WO2011134149A1 - Module de siège à fente pour un spectromètre et spectromètre - Google Patents

Module de siège à fente pour un spectromètre et spectromètre Download PDF

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Publication number
WO2011134149A1
WO2011134149A1 PCT/CN2010/072288 CN2010072288W WO2011134149A1 WO 2011134149 A1 WO2011134149 A1 WO 2011134149A1 CN 2010072288 W CN2010072288 W CN 2010072288W WO 2011134149 A1 WO2011134149 A1 WO 2011134149A1
Authority
WO
WIPO (PCT)
Prior art keywords
slit
seat
spectrometer
fixing device
waveguide
Prior art date
Application number
PCT/CN2010/072288
Other languages
English (en)
Chinese (zh)
Inventor
柯正浩
Original Assignee
台湾超微光学股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 台湾超微光学股份有限公司 filed Critical 台湾超微光学股份有限公司
Priority to CN201080064500.1A priority Critical patent/CN102869962B/zh
Priority to PCT/CN2010/072288 priority patent/WO2011134149A1/fr
Publication of WO2011134149A1 publication Critical patent/WO2011134149A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804—Plane gratings

Definitions

  • This invention relates to a device and, more particularly, to a device suitable for use in a slit holder of a spectrometer.
  • the miniaturized spectrometer has been the development target in the market. After the spectrometer is miniaturized, the spectrometer receives the light source. The hole that receives the light source into the spectrometer must be smaller, and the incident angle of the light source after entering the spectrometer must be more accurate. The deviation of the slight incident angle will cause the image quality displayed by the spectrometer. Poor or cause an increase in stray light.
  • the invention mainly provides a slit seat module and a spectrometer suitable for a spectrometer, which use a point contact method to fix a slit seat without generating a rotational moment, so that the slit can be accurately positioned to improve The accuracy of the spectrometer.
  • a slit block module suitable for use in a spectrometer.
  • the slit block module includes a bottom plate, a slit seat, a slit plate, a fixture, and a ball.
  • the slit seat is disposed on the bottom plate.
  • the slit sheet has a slit, and the slit sheet is engaged with the slit seat to allow a light to pass through the slit.
  • the ball is disposed between the slit seat and the fixing device, and the ball has a contact point with the slit seat, and an external force is applied to the ball by the fixing device to fix the slit seat to the bottom plate.
  • a spectrometer comprising a bottom plate, a slit seat, a slit plate, a fixture, a ball, an image capture assembly, and a grating.
  • Slit The seat is placed on the bottom plate.
  • the slit sheet has a slit, and the slit sheet is engaged with the slit seat to allow an optical signal to pass through the slit.
  • the ball is disposed between the slit seat and the fixing device, and the ball has a contact point with the slit seat, and an external force is applied to the ball by the fixing device to fix the slit seat to the bottom plate.
  • a waveguide device is located on the substrate such that the optical signal passes through the slot and is transmitted in the waveguide device.
  • the grating is used to separate the optical signal transmitted in the waveguide into a plurality of spectral components and direct the spectral components toward the image capturing assembly.
  • FIG. 1 is a schematic diagram of a slit block module suitable for use in a spectrometer in accordance with an embodiment of the present invention.
  • FIG. 2 is a side view of the slit seat module of FIG. 1.
  • FIG. 3 is a partial schematic view of a spectrometer using the slit block module of FIG. 1.
  • Figure 4 is an exploded view of the spectrometer of Figure 3.
  • Figure 5 is a combination of the spectrometer of Figure 4.
  • FIG. 1 is a schematic diagram of a slit seat module suitable for a spectrometer according to an embodiment of the present invention
  • FIG. 2 is a side view of the slit seat module of FIG.
  • the slit seat module 100 includes a bottom plate 110, a slit seat 120, a slit piece 130, a fixing device 140, and a ball 150.
  • the slit seat 120 is disposed on the bottom plate 110.
  • the slit sheet 130 has a slit 131 which can be bonded to the slit holder 120 or joined in other suitable manner so that light can pass through the slit 131.
  • the ball 150 is disposed between the slit seat 120 and the fixing device 140, so that a contact point 151 is formed between the ball 150 and the slit seat 120, and an external force is applied to the ball 150 by the fixing device 140 to make the slit seat.
  • the 120 is fixed to the bottom plate 1 10.
  • the slit seat module 100 as described above further includes a fixing plate 160 (shown in FIG. 2).
  • the fixing plate 160 in this embodiment has, for example, two holes 161.
  • the outer side of the fixture 140 has, for example, a thread.
  • the fixing device 140 is rotated in the hole 161 by applying a rotating external force to the fixing device 140, and an external force is applied to the ball 150.
  • the upper portion of the fixing device 140 has a hexagonal plate hole 141 , for example, by using a hexagonal hand to rotate the hexagonal plate hole 141 , so that an external force can be applied to the ball 150 . Effect.
  • the fixture 140 applies an external force to the ball 150 in a direction substantially perpendicular to the base plate 110.
  • the fixing device 140 is, for example, a screw or a set screw.
  • the contact between the fixture 140 and the slit seat 120 will be a contact other than point contact, such as a face contact.
  • point contact such as a face contact.
  • the offset slit sheet 130 will cause the light to be shifted after it enters without proceeding along the predetermined light path. As such, the image quality of the spectrometer using the slit holder module 100 is deteriorated or the effective amount of light incident is lowered.
  • the fixing device 140 fixes the slit by the ball 150 in a point contact manner. seat.
  • the technique of the present embodiment is compared with the technique of rotating the slit seat. The accuracy of the position of the slit seat 120 during assembly can be greatly improved, thereby obtaining a correct light path and improving the accuracy of the spectrometer using the same.
  • FIG. 3 is a partial schematic view of the spectrometer 200 using the slit holder module of FIG. 1, FIG. 4 is an exploded view of the spectrometer 200 of FIG. 3, and FIG. 5 is a spectrometer 200 of FIG. Combination diagram.
  • the spectrometer 200 further has an image capture assembly 280 and a grating 290.
  • the spectrometer 200 further includes a waveguide device 270.
  • the grating 290 can be designed, for example, as a micro-diffraction grating as the spectrometer 200 is miniaturized.
  • the waveguide device 270 is located on the bottom plate 110, and the optical signal 52 passes through the slit 131 into the spectrometer. The interior 200 is then transmitted in the waveguide device 270.
  • the grating 290 is used to separate the optical signal 52 transmitted in the waveguide device 270 into a plurality of spectral components 51 and direct the spectral components 51 toward the image capturing component 280.
  • the waveguide device 270 includes, for example, a first waveguide plate 271, a second waveguide plate 272, and two side plates 273.
  • the two side plates 273 are disposed between the first waveguide plate 271 and the second waveguide plate 272 to form a cavity waveguide 274.
  • Optical signal 52 is transmitted in cavity waveguide 274.
  • the spectrometer 200 further has a front seat 300.
  • the front seat 300 has an open area corresponding to the slit 131 so that the optical signal 52 can pass through the slit 131 into the interior of the spectrometer 200.
  • the upper and lower sides of the slit seat 120 may be fixed by the fixing plate 160 and the bottom plate 110, respectively, and the left side thereof may be provided by the recess 275 reserved in the first waveguide plate 271 and the second waveguide plate 272.
  • the right side can be resisted by the front seat 300.
  • the first waveguide plate 271, the second waveguide plate 272 and the front seat 300 collectively define the horizontal position of the slit seat 120.
  • the material of the slit seat 120 is, for example, a stainless steel.
  • the material of the slit sheet 130 is achieved by, for example, a silicon crystal, a group of three or five semiconductor materials, or a base material of another semiconductor chip by an etching process, and silicon is used as a material of the slit sheet 130. If the slit 131 on the slit sheet 130 is penetrated by the wet etching technique of the semiconductor factory, the slit 131 will have a very flat and sharp edge, and the flatness can reach the level of the silicon lattice, so the image of the spectrometer Quality will be further improved.
  • the slit 131 has a width of, for example, about 25 ⁇ m m) and a height of, for example, about 150 ⁇ m ( ⁇ m).
  • the fixing device 140 fixes the slit seat 120 to the bottom plate 100 by the ball 150, the fixing device 140 does not directly apply force to the slit sheet 130. In this way, it is possible to protect the slit piece 130 from being broken by the force when the fixing device 140 is locked to the fixing plate 160.
  • the optical signal 52 is also shifted. The direction of travel of the optical signal 52 is made incorrect. Further, the optical signal 52 passes through the plurality of spectral components 51 separated by the grating 290. Since the distance traveled is longer, the offset is more serious, and the optical signal 52 and the spectral component 51 in the spectrometer 200 are affected correctly. Sex. In addition, because of the offset of the optical signal 52, part of the optical signal 52 cannot be transmitted under a predetermined path, and the deviation becomes stray light, which will increase the background noise and affect the imaging of the image capturing component 280. degree.
  • the manner in which the slit seat 120 is fixed by the contact point 151 using the ball 150 is proposed. Since it is a point contact, unless the force other than the common force is applied to the fixing device 140 to fix the slit seat 120, there is no possibility. The situation in which the slit seat 120 is rotated occurs. Therefore, the embodiment can accurately position the slit seat 120 and the slit 131, and allow the optical signal 52 and the spectral component 51 to advance along a predetermined traveling path to improve the accuracy of the spectrometer.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

L'invention porte sur un module de siège à fente (100) pour un spectromètre (200), lequel module comprend une plaque de base (110), un siège à fente (120), une plaque à fente (130), un dispositif de fixation (140) et un élément sphérique (150). Le siège à fente (120) est disposé sur la plaque de base (110). La plaque à fente (130) a une fente (131) et est fixée au siège à fente (120), de telle sorte que la lumière peut passer à travers la fente (131). L'élément sphérique (150) est disposé entre le siège à fente (120) et le dispositif de fixation (140), et un point de contact (151) est présent entre l'élément sphérique (150) et le siège à fente (120). Une force est appliquée sur l'élément sphérique (150) par l'intermédiaire du dispositif de fixation (140), permettant ainsi au siège à fente (120) d'être fixé à la plaque de base (151). L'invention porte également sur un spectromètre (200) comprenant le module de siège à fente (100).
PCT/CN2010/072288 2010-04-28 2010-04-28 Module de siège à fente pour un spectromètre et spectromètre WO2011134149A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201080064500.1A CN102869962B (zh) 2010-04-28 2010-04-28 适用于光谱仪的狭缝座模块与光谱仪
PCT/CN2010/072288 WO2011134149A1 (fr) 2010-04-28 2010-04-28 Module de siège à fente pour un spectromètre et spectromètre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2010/072288 WO2011134149A1 (fr) 2010-04-28 2010-04-28 Module de siège à fente pour un spectromètre et spectromètre

Publications (1)

Publication Number Publication Date
WO2011134149A1 true WO2011134149A1 (fr) 2011-11-03

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Country Status (2)

Country Link
CN (1) CN102869962B (fr)
WO (1) WO2011134149A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015149331A1 (fr) * 2014-04-03 2015-10-08 台湾超微光学股份有限公司 Spectromètre, procédé de fabrication pour guide d'ondes de spectromètre et structure de celui-ci
US10302486B2 (en) 2016-07-12 2019-05-28 Oto Photonics Inc. Spectrometer module and fabrication method thereof

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104616576A (zh) * 2014-12-17 2015-05-13 成都科创佳思科技有限公司 狭缝装置
CN107167240B (zh) * 2017-05-26 2018-08-28 中国科学院光电研究院 一种机械双狭缝

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2549447Y (zh) * 2002-06-05 2003-05-07 精碟科技股份有限公司 测量定位夹具
CN2629011Y (zh) * 2003-06-26 2004-07-28 长春第一光学有限公司 简易适用的狭缝装置
CN1854696A (zh) * 2005-04-27 2006-11-01 中国科学院长春光学精密机械与物理研究所 微小型光纤光谱仪的结构及其狭缝的制作方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3940886B2 (ja) * 2001-04-16 2007-07-04 横河電機株式会社 分光器用可変幅スリット装置
CN101532876A (zh) * 2009-04-14 2009-09-16 中国科学技术大学 缝宽可调节的小型精密狭缝装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2549447Y (zh) * 2002-06-05 2003-05-07 精碟科技股份有限公司 测量定位夹具
CN2629011Y (zh) * 2003-06-26 2004-07-28 长春第一光学有限公司 简易适用的狭缝装置
CN1854696A (zh) * 2005-04-27 2006-11-01 中国科学院长春光学精密机械与物理研究所 微小型光纤光谱仪的结构及其狭缝的制作方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015149331A1 (fr) * 2014-04-03 2015-10-08 台湾超微光学股份有限公司 Spectromètre, procédé de fabrication pour guide d'ondes de spectromètre et structure de celui-ci
CN106415222A (zh) * 2014-04-03 2017-02-15 台湾超微光学股份有限公司 光谱仪、光谱仪的波导片的制造方法及其结构
US10145739B2 (en) 2014-04-03 2018-12-04 Oto Photonics Inc. Waveguide sheet, fabrication method thereof and spectrometer using the same
US10302486B2 (en) 2016-07-12 2019-05-28 Oto Photonics Inc. Spectrometer module and fabrication method thereof

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Publication number Publication date
CN102869962A (zh) 2013-01-09
CN102869962B (zh) 2014-05-07

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