WO2011132985A2 - Émetteur d'électrons et procédé de fabrication associé - Google Patents

Émetteur d'électrons et procédé de fabrication associé Download PDF

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Publication number
WO2011132985A2
WO2011132985A2 PCT/KR2011/002936 KR2011002936W WO2011132985A2 WO 2011132985 A2 WO2011132985 A2 WO 2011132985A2 KR 2011002936 W KR2011002936 W KR 2011002936W WO 2011132985 A2 WO2011132985 A2 WO 2011132985A2
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WIPO (PCT)
Prior art keywords
electron emission
cathode
graphite
adhesive
substrate
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PCT/KR2011/002936
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English (en)
Korean (ko)
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WO2011132985A3 (fr
Inventor
이철진
신동훈
Original Assignee
고려대학교 산학협력단
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Priority claimed from KR1020100126410A external-priority patent/KR101106121B1/ko
Application filed by 고려대학교 산학협력단 filed Critical 고려대학교 산학협력단
Publication of WO2011132985A2 publication Critical patent/WO2011132985A2/fr
Publication of WO2011132985A3 publication Critical patent/WO2011132985A3/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/04—Cathodes

Definitions

  • the present invention relates to an electron emission source and a method of manufacturing the same, and more particularly, to an electron emission source using a needle-like electron emission material such as carbon nanotubes.
  • CNTs carbon nanotubes
  • nanoparticles and the like are preferred as electron emitters.
  • CNTs are known in various forms as microstructures grown or composited in the form of tubes or rods.
  • CNTs have very excellent electrical, mechanical, chemical, and thermal properties, and have been applied to various fields due to these advantages.
  • CNTs have a very high field enhancement factor because they have a low work function and a high aspect ratio, and because the top end or emission end has a small radius of curvature. Therefore, electrons can be easily released even under a low potential electric field.
  • Conventional methods of forming a field emission device using CNTs include screen printing using CNT paste and chemical vapor deposition method in which CNTs are directly grown vertically only in a patterned area on a substrate.
  • Manufacturing using the screen printing method may be implemented by applying a photosensitive CNT paste to the entire surface of the substrate, selectively patterning the electron-emitting material film through a photolithography process, or applying the CNT paste only to a selective region of the substrate.
  • Such a screen printing method has a problem in that the manufacturing process is complicated, the density control of the electron emission part is difficult, and thus the reproducibility is low.
  • the field emission performance and the stability of the device are drastically deteriorated due to contamination of the field electron emission source by the organic binder material. have.
  • the CNT vertical growth method by chemical vapor deposition has low adhesion between the substrate and the CNT, so that the CNT falls easily, it is difficult to apply various kinds of CNTs, and it is difficult to realize a good field electron emission device due to the screening effect. There is a limit.
  • Some embodiments of the present invention provide a method for producing an electron emission source that can be manufactured in a configuration that provides adhesion to the cathode.
  • some embodiments of the present invention provide a method for producing an electron emission source that can be manufactured in a configuration that provides adhesion to the electron emission material.
  • some embodiments of the present invention provide a method of manufacturing an electron emission source capable of patterning an electron emission material in various forms.
  • the electron emission source according to the first aspect of the present invention is formed on the substrate, the substrate, the graphite cathode made of an adhesive graphite adhesive (graphite adhesive) and the A needle-like electron emitting material fixed to the graphite cathode.
  • the method of manufacturing an electron emission source includes the steps of forming a needle-like electron emission material film on a template, forming a graphite cathode made of graphite adhesive on top of the substrate, and the graphite cathode of the substrate and the Contacting the needle-like electron-emitting material film of the template to transfer the needle-like electron-emitting material film formed on the template to the graphite cathode.
  • the method of manufacturing an electron emission source comprises the steps of forming a needle-like electron emission material film on a template, forming a cathode on the top of the substrate, applying an adhesive material on the needle-like electron emission material film And contacting the cathode of the substrate with the adhesive material applied to the acicular electron emission material film to transfer the acicular electron emission material film formed on the template to the cathode.
  • the electron emission source is formed on the substrate, the upper portion of the substrate, the cathode formed by annealing the adhesive material and the needle-like needle fixed to the cathode by the adhesion of the cathode Release material.
  • any one of the problem solving means of the present invention described above it is possible to adhere the CNT and the cathode in accordance with the configuration of the graphite cathode.
  • This method of adhesion allows for electrical contact, ie ohmic contact, with very firm mechanical fixation.
  • the graphite cathode since outgasing is very small after complete firing, it is very effective for a field emission structure requiring vacuum.
  • FIG. 1 is a view showing the structure of an electron emission source according to an embodiment of the present invention.
  • FIG. 2 is a diagram showing a cross-sectional structure of an electron emission source according to an embodiment of the present invention.
  • 3A to 3E are views illustrating a method of manufacturing an electron emission source according to an embodiment of the present invention.
  • FIG. 4 is a diagram illustrating a structure of an electron emission source according to another embodiment of the present invention.
  • FIG. 5 is a view showing the structure of an electron emission source according to another embodiment of the present invention.
  • 6A to 6I illustrate a method of manufacturing an electron emission source according to an exemplary embodiment of the present invention.
  • FIG. 7A to 7D are views illustrating a manufacturing process of an electron emission source using protrusions of a predetermined pattern.
  • 8A to 8D are diagrams illustrating a manufacturing process of an electron emission source through a transfer and patterning process.
  • 9A to 9G illustrate a process of manufacturing an electron emission source according to another embodiment of the present invention.
  • 10A to 10D illustrate a process of manufacturing an electron emission source according to another embodiment of the present invention.
  • 11A through 11E illustrate a process of manufacturing an electron emission source according to another exemplary embodiment of the present invention.
  • FIG. 12 is a view showing an application including an electron emission source according to an embodiment of the present invention.
  • FIG. 13 illustrates an application device including an electron emission source according to an embodiment of the present invention.
  • FIG. 14 is a view showing an application including an electron emission source according to an embodiment of the present invention.
  • Needle-shaped electron emitting materials include hollow nanotubes, filled nanorods, nanowires, fibers, nanofibers, nanoparticles, and the like, and representative materials are carbon, and may also be made of metallic materials.
  • CNT carbon nanotube
  • any material capable of electron emission as a needle may be applied, and thus the present invention is not limited to the specific example of the needle electron emission material.
  • FIG. 1 is a view showing the structure of an electron emission source according to an embodiment of the present invention.
  • the electron emission source 1 includes a substrate 10, a graphite cathode 20 formed on the substrate 10, and a needle-like electron emission material film 30 formed on the graphite cathode 20.
  • Graphite cathode 20 is prepared using a graphite adhesive (graphite adhesive), the graphite adhesive is a binder containing an appropriate amount of organic binder (gahphite powder).
  • the organic binder is removed through a curing process.
  • the graphite powder and the organic binder are mixed and formed in a weight ratio of about 7: 3, and the ratio can be appropriately adjusted as necessary.
  • the graphite cathode 20 formed by using the graphite adhesive itself has adhesiveness. That is, after applying the graphite adhesive to the substrate and patterning it by a photolithography method, and softening it with an etchant (etchant) or the like can give the appropriate adhesion to the surface. In addition, soft annealing of the graphite adhesive after screen printing in the form of a cathode can impart proper adhesion to the surface thereof.
  • the graphite cathode 20 may have a multilayer structure, for example, a conductive base line may be further provided below the graphite cathode 20, and the base line may be understood as a part of the cathode.
  • an electron emission source may be formed through a cathode formed by an adhesive material. That is, by using a graphite adhesive, silver (Ag) paste, solder paste and conductive epoxy, in addition to the binder containing the oil, inorganic adhesives, etc., patterning in the form of a cathode, and performing annealing This can form a cathode.
  • a graphite adhesive silver (Ag) paste, solder paste and conductive epoxy
  • FIG. 2 is a diagram showing a cross-sectional structure of an electron emission source according to an embodiment of the present invention.
  • the acicular electron emissive material film 30 includes acicular electron emissive material and is physically fixed by the graphite cathode 20. That is, the acicular electron emission material film 30 is fixed to the surface portion of the graphite cathode 20 itself.
  • the fixation of the electron-emitting material film 30 is due to the adhesion given to the surface of the graphite cathode 20, and this adhesion is obtained from the template when transferring the electron-emitting material film in the manufacturing method described later. Reliably contributes to transfer to the graphite cathode 20.
  • At least one other conductive layer may be present below the graphite cathode 20, which may be understood as part of the cathode.
  • the technical scope of the embodiments is not limited by the specific structure, such as the structure of the cathode, for example, the structure of a single layer, the multilayer structure by heterogeneous or homogeneous material film.
  • 3A to 3E are views illustrating a method of manufacturing an electron emission source according to an embodiment of the present invention.
  • a CNT colloidal suspension is applied to the filtration template 40 and then dried to form an electron emitting material film 32.
  • CNT colloidal suspensions are colloidal liquids made by dispersing powdered CNTs in solvents and surfactants. Ultrasonication can be added for more even dispersion.
  • the filtration template 40 one made of a material such as Teflon, ceramic, Anodic Aluminum Oxide (AOA), polycarbonate, or the like is used.
  • the filtration template 40 filters the CNT colloidal suspension, leaving only CNTs on its surface. Thus, after drying the CNT colloidal suspension, only CNTs can be retained in a predetermined pattern and transferred to the plate-shaped cathode.
  • the CNT may include a single-walled carbon nanotube (SWCNT), a double-walled carbon nanotube (DWCNT), a thin multi-walled carbon nanotube (MWCNT), a thick MWCNT, and the like.
  • the solvent may be ethanol, dimethyl formamide, tetrahydrofuran, dimethyl acetamide, 1,2 dichloroethane or 1,2 dichlorobenzene.
  • the surfactant is sodium dodecylbenzene sulfonate (NaDDBS C 12 H 25 C 6 H 4 SO 3 Na), sodium butylbenzene sulfonate (NaBBS C 4 H 9 C 6 H 4 SO 3 Na), sodium benzoate (C 6 H 5 CO 2 Na), sodium dodecyl sulfate (SDS; CH 3 (CH 2 ) 11 OSO 3 Na), Triton X-100 (TX100; C 8 H 17 C 6 H 4 (OCH 2 CH 2 ) n-OH; n 10), dodecyltrimethylammonium bromide (DTAB; CH 3 (CH 2 ) 11 N (CH 3 ) 3 Br), Arabic gum can be any one.
  • a suspension is applied in a predetermined pattern to a filtration template 40 made of a filter or the like and then dried to form an electron emitting material film 32.
  • the application area of the suspension can vary depending on the shape of the cathode of the electron emission source.
  • the CNT density can be freely adjusted by controlling the ratio or concentration of the solvent, the surfactant, and the CNTs in the suspension.
  • the electron emission material film 32 thus formed may be transferred directly onto the graphite cathode 20 to form an electron emission source.
  • a transfer process using a mask described below can be used.
  • the transfer process may be performed using the mask 50 having a window 52 having a predetermined shape.
  • the mask 50 may be made of metal or plastic sheet.
  • the window 52 may be formed in a slit shape in addition to the quadrangle as illustrated, and may have various shapes such as a polygon or a circle, an ellipse, and a star, such as a triangle or a pentagon. This form does not limit the technical scope of the present invention.
  • the graphite cathode 20 is formed after preparing the substrate 10.
  • Graphite cathode 20 is prepared using a graphite adhesive, the graphite adhesive is an appropriate amount of organic binder is included in the graphite powder.
  • the graphite cathode 20 formed by using the graphite adhesive itself has adhesiveness. That is, after applying the graphite adhesive to the substrate and patterning it by a photolithography method, and softening it with an etchant (etchant) or the like can give the appropriate adhesion to the surface.
  • etchant etchant
  • soft annealing of the graphite adhesive after screen printing in the form of a cathode can impart proper adhesion to the surface thereof. At this time, soft annealing is performed so that the adhesive has a semi-cured state that is not completely cured.
  • the filter template 40 on which the electron emission material film 32 is formed is inverted and pressed. .
  • the electron emitting material film 32 attached to the filtration template 40 comes into contact with the graphite cathode 20 through the window 52.
  • the electron emission material passing through the window 52 is fixed to the surface of the graphite cathode 20.
  • the electron emission material is selectively transferred to the surface of the cathode 20.
  • the electron emitting material film 30 can be formed in a desired shape at a desired position on the graphite cathode 20.
  • the electron-emitting material can be aligned vertically with respect to the cathode.
  • the surface of the electron-emitting material film can be rolled up using an adhesive roller to produce the electron-emitting material.
  • the final heat treatment completely cures the graphite adhesive. Through this process, the electron-emitting material can be fixed to the cathode.
  • FIG. 4 is a diagram illustrating a structure of an electron emission source according to another embodiment of the present invention.
  • the electron emission source shown includes a substrate 10, a plurality of graphite cathodes 22 formed on the substrate 10, and a needle-shaped chariot emission material film 34 formed on the graphite cathodes 22.
  • the plurality of graphite cathodes 22 are disposed parallel to each other on the substrate 10, and the plurality of acicular electron emission material films 34 are disposed on the graphite cathodes 22 at predetermined intervals.
  • the electron emission source of this configuration can be used for the matrix electron emission structure of the display device, that is, the cathode plate.
  • the acicular electron emission material film 34 is disposed so as to correspond to the unit pixels of the display.
  • FIG. 5 is a view showing the structure of an electron emission source according to another embodiment of the present invention.
  • the electron emission source shown includes a substrate 10, a plurality of graphite cathodes 24 formed on the substrate 10, and a needle-shaped chariot emission material film 36 formed on the graphite cathodes 24.
  • the plurality of graphite cathodes 24 are disposed in parallel with each other on the substrate 10, and a needle-like electron emission material film 36 is disposed on each graphite cathode 24. Unlike the embodiment of FIG. 4, a stripe-shaped needle-like electron emission material film 36 is formed along each graphite cathode 24.
  • 6A to 6I illustrate a method of manufacturing an electron emission source according to an exemplary embodiment of the present invention illustrated in FIG. 4.
  • CNT colloidal suspension is applied to filtration template 40 and then dried to form an electron emitting material film 32.
  • CNT colloidal suspensions are colloidal liquids made by dispersing powdered CNTs in solvents and surfactants. Ultrasonication can be added for more even dispersion. More details on the suspension and CNTs are as described in Figure 3a.
  • a mask 50 having a plurality of windows 54 formed on a thin plate having an area sufficient to cover the electron emission material film 32 is prepared.
  • Each window 54 corresponds to each unit pixel of an electronic device, for example, a field emission display, and must correspond to an arrangement of cathodes described later.
  • a stripe-type electron emission material film 36 as shown in FIG. 5 may be formed.
  • the graphite adhesive film 21 is patterned to form a plurality of graphite cathodes 22 arranged side by side.
  • Such a structure may be formed by a simple screen printing process, omitting the process of FIG. 6C.
  • the mask 50 is disposed between the substrate 10 on which the graphite cathode 22 is formed and the filtration template 40 on which the electron emission material film 36 is formed, and then the filtration template ( 40 is pressed against substrate 10 such that electron-emitting material film 32 is selectively transferred through window 54 of mask 50. After the transfer is completed, the graphite cathode 22 is completely cured through the final heat treatment.
  • FIG. 6F illustrates a matrix electron emission source structure (cathode plate) formed through the process of the preceding steps (FIGS. 6A to 6E), and the structure of FIG. 4 is the same as the basic structure.
  • FIG. 6G shows a gate plate 60 for use in a display device.
  • the gate plate 60 is manufactured through a separate process and includes a gate 62 orthogonal to the graphite cathode 22 and a plurality of gate holes 64 formed at positions corresponding to the electron emission material film 34. do.
  • FIG. 6H shows a spacer plate 70 for use in a display device.
  • the spacer plate 70 is disposed between the gate plate 60 and the cathode plate 10.
  • the spacer plate 70 includes a plurality of through holes 72 formed at positions corresponding to the gate holes 64.
  • the spacer used for the display may be replaced with a spacer in the form of a pillar or bar in addition to the plate-shaped spacer plate 70, which does not limit the technical scope of the present invention.
  • FIG. 6i schematically illustrates the basic stacking structure of a display.
  • the spacer plate 70 and the gate plate 60 are disposed between the cathode plate 10 and the anode plate 80.
  • An anode (not shown) is formed on an inner surface of the anode plate 80, and a phosphor layer may be provided on the surface thereof.
  • the dotted block shown below the anode plate 80 symbolically represents a spacer for maintaining a gap between the anode plate 80 and the gate plate 60, which may have various shapes.
  • the structure can be used as a matrix switch array as well as a display, in which case it is not necessary to have a phosphor layer on the anode.
  • an electron emitting material film having a predetermined pattern can be easily formed by transferring the electron emitting material film formed using the suspension filtering method using a mask. At this time, since the adhesion is given to the surface of the graphite cathode itself, the electron emission material film can be stably fixed to the cathode.
  • an electron-emitting material film of a desired pattern is formed by using a so-called imprint method or a lithography method. It can be formed on the cathode.
  • FIG. 7A to 7D are views illustrating a manufacturing process of an electron emission source using protrusions of a predetermined pattern.
  • a template substrate 42 having a protrusion 43 of a predetermined pattern is prepared using a polymer such as PDMS.
  • the protrusion 43 is pressed or contacted with the electron emitting material film or the suspension containing the electron emitting material to form the electron emitting material film 38 on the upper surface of the protrusion 43. do.
  • the template substrate 42 is pressed against the graphite cathode 21 formed by using the graphite adhesive to form the electron emission material film 38 formed on the upper surface of the protrusion 43. 21).
  • FIG. 7D shows an electron emission source in which an electron emission material film 38 is formed over the graphite cathode 21.
  • the graphite cathode 21 may be implemented in the form of an array including a plurality of cathodes as shown in FIG. 4 or 5.
  • 8A to 8D are diagrams illustrating a manufacturing process of an electron emission source through a transfer and patterning process.
  • a CNT colloidal suspension is applied to the filtration template 40 and then dried to form an electron emitting material film 32.
  • the detailed configuration of the CNT colloidal suspension is as described above.
  • the filtration template 40 is opposed to the substrate 10 on which the graphite cathode 21 is formed.
  • the filtration template 40 is pressed against the substrate 10 so that the electron-emitting material film 32 of the filtration template 40 is transferred to the top of the graphite cathode 21. do.
  • the electron emission material film 32 formed on the graphite cathode 21 is subjected to etching or patterning by using a lithography method of a predetermined pattern to obtain an electron emission source of a desired shape.
  • a lithography method various known methods such as photolithography or electron beam lithography may be applied.
  • the acicular electron emitting material is fixed by graphite cathode, which allows electrical contact, ie ohmic contact, with very firm mechanical fixation.
  • the acicular electron emitting material is carbon nanotubes
  • ohmic contact with the graphite cathode is further improved.
  • graphite cathode since outgasing is very small after complete firing, it is very effective for the field emission structure requiring vacuum.
  • 9A to 9G illustrate a process of manufacturing an electron emission source according to another embodiment of the present invention.
  • an imprint method is used to form an electron emission source having a desired pattern.
  • the adhesive conductive material 96 is applied onto the substrate 90, and the adhesive conductive material 96 is pressed to form the mold substrate 92 by pressing the mold substrate 92.
  • the adhesive conductive material 96 is applied onto the substrate 90, and the adhesive conductive material 96 is pressed to form the mold substrate 92 by pressing the mold substrate 92.
  • the mold substrate 92 is formed by etching the silicon substrate in a predetermined pattern.
  • a release layer 94 is applied to the mold substrate 92 so that the mold substrate 92 is easily released after the imprint process of the adhesive conductive material 96.
  • an isotropic conductive adhesive composed of a composite of metal particles and an organic adhesive may be used as the adhesive conductive material.
  • metal particles various metals such as silver, nickel, copper, aluminum, or gold may be used.
  • the mold substrate 92 is pressed against the substrate 90 to which the adhesive conductive material 96 is applied so that the adhesive conductive material 96 is formed into a mold of the mold substrate 92.
  • the mold may be formed such that the adhesive conductive material 96 has a conical shape having a predetermined height.
  • the adhesive conductive material 96 may be formed into a mold of the mold substrate 92.
  • the electron-emitting material is adhered to the cathode 26 made of the adhesive conductive material.
  • the filtration template 40 on which the electron emission material film 32 is formed is opposed to the target substrate 10 on which the cathode 26 is formed.
  • the CNT electron emission source may be manufactured by adhering the electronic material film 32 to the cathode 26 formed as described above.
  • 10A to 10D illustrate a process of manufacturing an electron emission source according to another embodiment of the present invention.
  • a template 40 on which an electron emission material film 32 is formed is prepared.
  • the adhesive material 100 is coated on the electron emission material film 32.
  • the adhesive conductive material described in the embodiment of FIG. 9 may be used as the adhesive material 100.
  • the adhesive material 100 may be a conductive tape made of a mixture of conductive powders such as nickel and carbon pigments and adhesive resins such as acrylic ester polyol copolymers.
  • the substrate 10 on which the cathode 28 is formed is opposed to the filtration template 40.
  • the cathode 28 is formed of a conductive material, and may be formed in various forms according to a patterning method commonly used. In this case, in order to improve the adhesion, the adhesion to the cathode 28 may be additionally provided. That is, the cathode may be formed using the graphite adhesive described above, or an adhesive material may be provided on the cathode.
  • the adhesive material may be a conductive tape made of a mixture of a conductive powder such as nickel and a carbon pigment and an adhesive resin such as an acrylic ester polyol copolymer. Alternatively, the adhesive conductive material described in the embodiment of FIG. 9 may be used.
  • 11A through 11E illustrate a process of manufacturing an electron emission source according to another exemplary embodiment of the present invention.
  • the present embodiment relates to a method of providing adhesion to an electron emitting material instead of a cathode, and provides a method of using a mask to form an electron emission source in a shape desired by a user.
  • a template 40 on which an electron emission material film 32 is formed is prepared.
  • the adhesive material 100 is coated on the electron emission material film 32.
  • an adhesive conductive material may be used as the adhesive material 100.
  • a mask 50 including a window 52 having a predetermined shape is disposed between the substrate 10 and the filtration template 40.
  • the cathode 28 formed on the substrate 10 may also be patterned to have a predetermined shape.
  • the cathode 28 is formed of a conductive material, and may be formed in various forms according to a patterning method commonly used. At this time, the cathode 28 is not provided with adhesiveness.
  • the substrate 10 and the filtration template 40 are brought into contact.
  • the electron emitting material film 32 attached to the filtration template 40 comes into contact with the cathode 28 through the window 52.
  • the electron emission material film 32 is adhesive to the surface, the electron emission material passing through the window 52 is fixed to the surface of the cathode 28.
  • the electron-emitting material is selectively transferred to the surface of the cathode 28. Therefore, the electron emission material film 30 can be formed in a desired shape at a desired position on the cathode 28.
  • This embodiment of the present invention is applicable to the manufacture of lamps, displays, backlight devices for flat panel displays, electron sources for X-ray devices, electron sources for high power microwaves, electron sources for electron microscopes, electron sources for electron beam lithography, and the like. Can be. In addition, independent driving of an optional individual cell is possible, and thus an integrated vacuum device can be realized.
  • FIG. 12 is a view showing an application including an electron emission source according to an embodiment of the present invention.
  • the illustrated application device 200 may be used as a display device including an electron emission source or as a backlight unit (BLU) of the display device.
  • BLU backlight unit
  • the application device 200 includes a cathode 232 formed on the substrate 230, a needle-like electron-emitting material 220, a front plate 210, and a needle-like electron-emitting material 220 bonded to the cathode and serving as an electron emission source.
  • the anode 212 which reaches the electrons emitted from the phosphor layer 214, is included.
  • the insulating layer 234 includes a through hole for opening the acicular electron emission material 220, and a grid 236 for extracting electrons.
  • the electrons emitted from the electron-emitting material 220 of the cathode are accelerated to the voltage applied to the anode 212 to impinge on the phosphor layer 214 to cause light emission.
  • a self-luminous structure can be applied to a self-luminous display such as FED, or can be applied as a backlight of the LCD rather than a self-luminous type.
  • the needle-like electron emission material 220 is fixed to the cathode 232 through the various embodiments of the present invention described above. That is, it may be fixed through the configuration of the graphite cathode, or may be fixed by providing adhesiveness to the acicular electron emission material 220. In addition, it can be manufactured in various shapes using a mask, or using an imprint method.
  • FIG. 13 is a view showing an application including an electron emission source according to an embodiment of the present invention.
  • the application device 300 shown may be used as an X-ray generator including an electron emission source.
  • Conventional X-ray generators emit electrons accelerated under high voltage using a vacuum discharge tube, and generate the X-rays by colliding the emitted electrons with a target metal plate.
  • a vacuum discharge tube is very large in order to emit a large amount of electrons, so until recently, as a source of electron emission, a synchrotron, a radiation accelerator, or a laser-plasma or hot electron emitting device using a high-power laser and a solid target is mainly used. have.
  • researches on using carbon nanotubes as an electron emission source have been continued to solve problems occurring in the conventional X-ray generator.
  • the application device 300 includes an electron emission source 310 comprising a cathode 312, acicular electron emission material 314 and an anode 316, a power supply 334, 336, a target 330, a glass filter ( 332, chamber 338.
  • an electron emission source 310 comprising a cathode 312, acicular electron emission material 314 and an anode 316, a power supply 334, 336, a target 330, a glass filter ( 332, chamber 338.
  • the needle-like electron emission material 314 emits electrons according to voltages applied to the anode 316 and the cathode 312, and the emitted electrons collide with the target 330 through a through hole formed in the anode 316. .
  • X-rays generated by the collision of the target 330 with the electrons are emitted to the outside through the glass filter 332.
  • the acicular electron emission material 314 is fixed to the cathode 312 through the various embodiments of the present invention described above. That is, it may be fixed through the configuration of the graphite cathode, or may be fixed by providing adhesion to the acicular electron emission material 314. In addition, it can be manufactured in various shapes using a mask, or using an imprint method.
  • FIG. 14 is a view showing an application including an electron emission source according to an embodiment of the present invention.
  • the application device 400 shown may be used as an electron emitter or electron gun in an electron beam lithography apparatus or electron microscope.
  • a typical electron beam lithography apparatus transfers a beam 430 of electrons generated at the electron emission source 400 onto a reticle (not shown) to transfer a pattern layout onto a resist layer provided on the reticle.
  • a reticle not shown
  • various types of lens systems, apertures, and deflectors are additionally provided.
  • the conventional electron microscope reduces the electron beam emitted from the electron emission source 400 with an electron lens to form a fine electron probe on the sample surface, and moves and scans the electron probe on the sample by a deflector.
  • An electro-optical system, a sample chamber, and an exhaust system for maintaining them in a vacuum are included.
  • the electron emission source 400 shown includes a needle-like electron emission material 412, a cathode 410, a cylinder 414, an anode 420, and a slit 422.
  • the needle-like electron emission material 412 and the cathode 410 are fixed by the cylinder 414. Depending on the voltage applied to the cathode 410 and the anode 420, the electron beam 430 emitted from the needle-like electron emitting material 412 is directed toward the anode 420 and then passes through the slit 422.
  • the needle-like electron emission material 412 is fixed to the cathode 410 through the various embodiments of the present invention described above. That is, it may be fixed through the configuration of the graphite cathode, or may be fixed by providing adhesion to the acicular electron emitting material. In addition, it can be manufactured in various shapes using a mask, or using an imprint method.

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  • Cold Cathode And The Manufacture (AREA)

Abstract

L'invention concerne un émetteur d'électrons qui comprend: un substrat; une cathode graphite formée sur le haut du substrat et à partir d'un adhésif graphite possédant une propriété adhésive; et un matériau d'émission d'électrons aciculaires fixé à la cathode graphite. En outre, l'invention concerne un procédé de fabrication d'émetteur d'électrons selon l'invention qui consiste: à former un film de matériau d'émission d'électrons aciculaires sur un modèle; à former une cathode graphite formée à partir d'un adhésif graphite sur un substrat; et à mettre en contact la cathode graphite sur le substrat avec le film de matériau d'émission d'électrons aciculaires sur le modèle, ainsi, le film de matériau d'émission d'électrons aciculaires formé sur le modèle est transcrit vers la cathode graphite.
PCT/KR2011/002936 2010-04-22 2011-04-22 Émetteur d'électrons et procédé de fabrication associé WO2011132985A2 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2010-0037529 2010-04-22
KR20100037529 2010-04-22
KR1020100126410A KR101106121B1 (ko) 2010-04-22 2010-12-10 전자 방출원 및 그 제조 방법
KR10-2010-0126410 2010-12-10

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WO2011132985A2 true WO2011132985A2 (fr) 2011-10-27
WO2011132985A3 WO2011132985A3 (fr) 2012-03-01

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CN103515169A (zh) * 2012-06-21 2014-01-15 上海联影医疗科技有限公司 一种纳米场发射电子源及其制备方法
CN113097032A (zh) * 2021-04-23 2021-07-09 西北核技术研究所 长寿命微柱阵列石墨和金属的复合阴极结构及其制备方法

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KR20090093655A (ko) * 2008-02-29 2009-09-02 고려대학교 산학협력단 전자방출원, 이를 적용한 전자장치 및 전자방출원의제조방법
KR20100021898A (ko) * 2008-08-18 2010-02-26 고려대학교 산학협력단 가요성 전자발광 소자 및 이를 적용한 디스플레이 및 그 제조방법

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KR20090093655A (ko) * 2008-02-29 2009-09-02 고려대학교 산학협력단 전자방출원, 이를 적용한 전자장치 및 전자방출원의제조방법
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103515169A (zh) * 2012-06-21 2014-01-15 上海联影医疗科技有限公司 一种纳米场发射电子源及其制备方法
CN113097032A (zh) * 2021-04-23 2021-07-09 西北核技术研究所 长寿命微柱阵列石墨和金属的复合阴极结构及其制备方法
CN113097032B (zh) * 2021-04-23 2023-10-20 西北核技术研究所 长寿命微柱阵列石墨和金属的复合阴极结构及其制备方法

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