WO2011132632A1 - Unité actionneur - Google Patents

Unité actionneur Download PDF

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Publication number
WO2011132632A1
WO2011132632A1 PCT/JP2011/059510 JP2011059510W WO2011132632A1 WO 2011132632 A1 WO2011132632 A1 WO 2011132632A1 JP 2011059510 W JP2011059510 W JP 2011059510W WO 2011132632 A1 WO2011132632 A1 WO 2011132632A1
Authority
WO
WIPO (PCT)
Prior art keywords
actuator
actuators
rod
actuator unit
axial direction
Prior art date
Application number
PCT/JP2011/059510
Other languages
English (en)
Japanese (ja)
Inventor
修平 山中
潤 大塚
哲也 坂上
光輝 難波
Original Assignee
Thk株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thk株式会社 filed Critical Thk株式会社
Publication of WO2011132632A1 publication Critical patent/WO2011132632A1/fr

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2207/00—Specific aspects not provided for in the other groups of this subclass relating to arrangements for handling mechanical energy
    • H02K2207/03—Tubular motors, i.e. rotary motors mounted inside a tube, e.g. for blinds

Definitions

  • the present invention relates to an actuator unit including a plurality of actuators.
  • the component transfer apparatus has a multi-axis linear motor (actuator unit) configured by integrally combining a plurality of single-axis linear motors (actuators).
  • the multi-axis linear motor is supported by the substrate transport mechanism and moves horizontally on the base.
  • each single-axis linear motor of the multi-axis linear motor reciprocates a movable part (rod) in the vertical direction to handle electronic components.
  • the conventional actuator unit has the following problems.
  • the multi-axis linear motor of the component transfer device described above has a configuration in which a plurality of single-axis linear motors are integrally combined, and the inter-axis pitch between these single-axis linear motors is fixed. Therefore, it is necessary to sequentially move the multi-axis linear motor in accordance with the respective work positions at the time of electronic component pick-up and release at each single-axis linear motor. That is, after the operation of one single-axis linear motor is completed, it is necessary to perform the operation of the other single-axis linear motor. Therefore, efficient work cannot be performed. Further, this type of component transfer apparatus is required to be further downsized.
  • the present invention has been made in view of such circumstances, and it is an object of the present invention to provide an actuator unit having a compact configuration that can perform work efficiently.
  • an actuator unit includes a plurality of actuators each having a rod and a support body that supports the rod so as to be relatively movable along the axial direction thereof.
  • a plurality of first actuators are arranged close to each other in parallel to form a first layer
  • a plurality of second actuators are arranged close to each other in parallel to form a second layer.
  • the first and second layers are formed so as to be stacked in the thickness direction orthogonal to the axial direction of the first actuator and the axial direction of the second actuator.
  • the axial direction of the first actuator and the axial direction of the second actuator extend so as to intersect each other when viewed from the thickness direction, and the rod of the first actuator and the support body of the second actuator, Are connected one to one.
  • the plurality of first actuators are arranged in parallel close to each other in the first layer, and the plurality of second actuators are arranged in parallel close to each other in the second layer.
  • the axial directions of the second actuators extend in different directions. That is, when viewed from the thickness direction in which the first and second layers are stacked, the first actuator and the second actuator overlap each other and are arranged in a lattice shape, for example.
  • the rod of the first actuator and the support of the second actuator are connected one-to-one. Therefore, when the rod of each first actuator moves (extends or contracts), each second actuator moves independently along the axial direction of the rod. As a result, the second actuators are provided with a variable inter-axis pitch. Therefore, for example, one of the second actuators can perform the work independently by extending and contracting the rod without waiting for the completion of the work of the other second actuator.
  • the first actuators and the second actuators are arranged in close proximity to each other. Therefore, a compact device can be obtained.
  • the actuator unit According to the actuator unit according to the present invention, it is possible to perform work efficiently and to obtain a compact device.
  • the actuator unit 100 of the present embodiment includes, for example, an IC handler that transports electronic components composed of ICs to a tester for performance inspection in the final process of semiconductor manufacturing, a surface mounter that mounts electronic components on a substrate, and the like. Used as an electronic component transport device.
  • the actuator unit 100 includes a plurality of actuators 40 and 50.
  • the actuators 40 and 50 include a rod and a forcer (support) that supports the rod so as to be relatively movable along the axial direction thereof.
  • the actuator unit 100 has a coil configured by surrounding a rod of the actuators 40 and 50 having magnets with a forcer.
  • the actuator unit 100 includes a linear motor 11 that reciprocally moves the rod with respect to the forcer by obtaining a thrust by the magnetic field of the magnet and the current flowing through the coil.
  • the linear motor 11 is a so-called rod type linear motor. The configuration of the linear motor 11 will be described later.
  • Actuator unit 100 has a rectangular flat base 60.
  • the base material 60 is formed so as to extend in the horizontal direction indicated by reference characters X and Y in FIGS. 1 to 4 and to extend in the Y direction.
  • the base material 60 is supported by a transport mechanism (not shown) and is configured to be movable in the XY direction by the transport mechanism.
  • a plurality of first actuators 40 extending along the Y direction are disposed on one surface of the substrate 60 facing the thickness direction (Z direction). Specifically, in the first actuator 40, the axial direction of the rod 41 extends along the Y direction. The rod 41 is supported by a forcer 42 fixed to the substrate 60 and reciprocates in the Y direction with respect to the forcer 42. These first actuators 40 are formed to have the same length, and are arranged close to each other in parallel in the X direction to form a first hierarchy indicated by reference numeral F1 in FIGS. 3 and 4.
  • the first actuators 40 are respectively disposed on both sides of a virtual line V passing through the center in the Y direction of the substrate 60 and extending along the X direction.
  • the first actuators 40A to 40D are arranged in parallel on one side (the lower side in FIG. 1) of the virtual line V in the base material 60, and the first actuator 40A to 40D is arranged on the other side (the upper side in FIG. 1) of the virtual line V.
  • Actuators 40E to 40H are arranged in parallel.
  • the first actuator 40A is disposed at one end in the X direction (the right end in FIG. 1) farthest from the virtual line V. Further, on the one side of the base material 60, the first actuator 40D is disposed at the other end in the X direction (left end in FIG. 1) closest to the virtual line V. Further, the first actuator 40B and the first actuator 40C are arranged at equal intervals in this order between the first actuator 40A and the first actuator 40D. Furthermore, the first actuators 40A, 40B, 40C, and 40D are disposed so as to step toward the virtual line V stepwise from the first actuator 40A toward the first actuator 40D.
  • the first actuators 40E to 40H are arranged symmetrically with respect to the virtual line V in this order with respect to the first actuators 40A to 40D.
  • first support bases 61 projecting from the one surface are formed at both ends in the X direction on one surface of the substrate 60 so as to extend in the Y direction.
  • first support base 61 the surface facing the side opposite to the base material 60 side
  • rails 62A and 62B extending in the Y direction are arranged close to each other in parallel in the X direction.
  • These rails 62A and 62B are formed in the same length, and are shifted from each other in the Y direction.
  • the center in the Y direction of the rail 62A at the one end of the first support base 61 is located on the one side from the virtual line V, and the center of the rail 62B at the other end is from the virtual line V. Is also located on the other side.
  • a plurality of sliders (moving bodies) 63A and 63B are arranged on these rails 62A and 62B so as to be relatively movable in the Y direction with respect to the rails 62A and 62B, thereby constituting a linear motion guide.
  • four sliders 63A are provided on the rail 62A
  • four sliders 63B are provided on the rail 62B.
  • the slider 63A and the slider 63B are arranged in a staggered pattern in a plan view.
  • a plurality of second actuators 50 extending along the X direction are disposed on the side opposite to the base material 60 side. Specifically, in the second actuator 50, the axial direction of the rod 51 extends along the X direction.
  • the rod 51 is supported by the forcer 52 and reciprocates in the X direction with respect to the forcer 52.
  • second actuators 50A to 50H connected in a one-to-one order in this order are provided corresponding to the first actuators 40A to 40H described above.
  • These second actuators 50 are formed to have the same length, and their positions along the X direction are set to be substantially the same.
  • the second actuators 50 are arranged close to each other in parallel in the Y direction to form a second hierarchy indicated by reference numeral F2 in FIGS.
  • the second actuators 50A to 50D are arranged on the one side of the virtual line V, and the second actuators 50E to 50H are arranged on the other side of the virtual line V.
  • the second actuator 50A is arranged furthest away from the virtual line V
  • the second actuator 50D is arranged closest to the virtual line V
  • the second actuators 50A and 50D are connected to each other.
  • the second actuators 50B and 50C are arranged in this order.
  • the second actuator 50E is arranged farthest from the imaginary line V
  • the second actuator 50H is arranged closest to the imaginary line V
  • the second actuators 50F and 50G are arranged in this order.
  • the first level F ⁇ b> 1 constituted by the first actuator 40 and the second level F ⁇ b> 2 constituted by the second actuator 50 include the axial direction (Y direction) of the rod 41 of the first actuator 40 and the second level F ⁇ b> 2.
  • Two actuators 50 are arranged so as to be stacked in the thickness direction (Z direction) orthogonal to the axial direction (X direction) of the rod 51 of the actuator 50.
  • the axial direction of the first actuator 40 and the axial direction of the second actuator 50 extend along the horizontal direction and are orthogonal to each other when viewed from the thickness direction.
  • the lower surface of the forcer 52 of the second actuator 50 (the surface facing the base material 60 side) is fixed to and supported by a rectangular plate-shaped second support base 64.
  • the second support base 64 extends in the horizontal direction and extends in the X direction.
  • the full length of the 2nd support stand 64 is set longer than the width
  • the width along the Y direction of the second support base 64 is set to be substantially the same as or slightly larger than the width of the forcer 52.
  • a pair of sliders 63A and 63A are connected to the lower surface (the surface facing the base material 60) of the second support base 64 of the second actuators 50A, 50C, 50F, and 50H so as to be separated from each other in the X direction.
  • a pair of sliders 63B and 63B are connected to the lower surface of the second support base 64 of the second actuators 50B, 50D, 50E, and 50G so as to be separated from each other in the X direction.
  • the tip ends of the rods 41 of the first actuators 40A to 40H are connected to the second support base 64 formed integrally with the forcers 52 of the second actuators 50A to 50H in this order in a one-to-one relationship.
  • the first actuator 40B is a second actuator in which the adjacent first actuators 40A are connected. It arrange
  • an external device mounting portion 65 is connected to the tip of the rod 51 of the second actuator 50.
  • an external device mounting portion 65 is provided at the other end along the X direction of the rod 51.
  • a suction nozzle for handling an electronic component or the like, a probe for laser processing, or the like can be used as the external device mounting portion 65.
  • the external device mounting portion 65 is set to perform work in the Z direction.
  • FIG. 5 shows a linear motor position detection system according to an embodiment of the present invention.
  • This position detection system interpolates a linear motor 11, a magnetic sensor 12 for detecting the position of the rod 1 of the linear motor 11 (rods 41 and 51 in FIGS. 1 to 4), and a signal output from the magnetic sensor 12.
  • a position detection circuit 13 for processing.
  • the position signal output by the position detection circuit 13 is input to the driver 14 of the linear motor 11.
  • the driver 14 includes a power converter such as a PWM inverter (PWM: Pulse Width Modulation) that supplies power in a form suitable for controlling the linear motor 11, a signal from the position detection circuit 13, and a command from a host computer.
  • a controller for controlling the power converter is incorporated.
  • the magnetic sensor 12 and the position detection circuit 13 are connected by an encoder cable 15.
  • the coil of the linear motor 11 and the power converter of the driver are connected by a power cable 16.
  • FIG. 6 is a perspective view (partially sectional view) of the linear motor 11.
  • the linear motor 11 is a rod type linear motor in which the rod 1 moves in the axial direction with respect to the forcer 2 (the forcers 42 and 52 in FIGS. 1 to 4).
  • the linear motor 11 is used to mount a chip-shaped electronic component or the like on the tip of the rod 1 and mount the electronic component at a predetermined position on the substrate.
  • end cases 9 are attached to both end faces of the forcer 2.
  • a bush 8 that is a bearing for guiding the linear motion of the rod 1 is attached to the end case 9.
  • One of these end cases 9 constitutes a position detection head.
  • the rod 1 is made of a non-magnetic material such as stainless steel and has a hollow space like a pipe.
  • a plurality of cylindrical magnets 3 are stacked in the hollow space of the rod 1 so that the same poles face each other. That is, the magnet 3 is laminated so that the N pole and the N pole face each other, and the S pole and the S pole face each other.
  • a pole shoe 7 (magnetic pole block) made of a magnetic material such as iron is interposed between the magnets 3.
  • the rod 1 penetrates through the stacked coils 4 and is supported by the forcer 2 so as to be movable in the axial direction.
  • the coil 4 is formed by winding a copper wire in a spiral shape and is held by a coil holder 5. Since it is necessary to insulate adjacent coils 4, ring-shaped resin spacers 5 a are provided between the coils 4.
  • a printed circuit board 6 is provided on the coil holder 5. A winding end 4 a of the coil 4 is connected to the printed circuit board 6.
  • the forcer 2 is integrally formed with the coil 4 by insert molding in which the coil 4 and the coil holder 5 are set in a mold and molten resin or special ceramics is injected into the mold. As shown in FIG. 6, the forcer 2 is formed with a plurality of fins 2 a in order to improve the heat dissipation of the coil 4.
  • the coil 4 held by the coil holder 5 is housed in the aluminum forcer 2 and the gap between the coil 4 and the forcer 2 is filled with an adhesive so that the coil 4 and the coil holder 5 are fixed to the forcer 2. May be.
  • FIG. 8 shows the positional relationship between the magnet 3 and the coil 4 of the linear motor.
  • Three coils 4 form a set of three-phase coils composed of U, V, and W phases.
  • a coil unit is comprised by combining one set of three-phase coils.
  • a three-phase current having a phase difference of 120 ° is applied to a plurality of coils divided into U, V, and W phases, a moving magnetic field that moves in the axial direction of the coil 4 is generated.
  • the rod 1 obtains a thrust by the moving magnetic field and performs a linear motion relative to the coil 4 in synchronization with the speed of the moving magnetic field.
  • a magnetic sensor 12 for detecting the position of the rod 1 is attached to one end case 9 which is a magnetic sensor housing case.
  • the magnetic sensor 12 is disposed from the rod 1 through a predetermined gap, and detects a change in the magnetic field direction (magnetic vector direction) of the rod 1 caused by the linear motion of the rod 1.
  • the magnetic sensor 12 includes a Si or glass substrate 21 and a ferromagnetic thin film metal of an alloy mainly composed of a ferromagnetic metal such as Ni or Fe formed on the substrate 21. And a magnetoresistive element 22.
  • the magnetic sensor 12 is called an AMR (Anisotropic-Magnetro-Resistance) sensor (anisotropic magnetoresistive element) because its resistance value changes in a specific magnetic field direction.
  • FIG. 10 shows the magnetic sensor 12 attached to the end case 9.
  • the end case 9 is provided with a magnetic sensor housing portion 26 configured from a space for housing the magnetic sensor 12.
  • the periphery of the magnetic sensor 12 is filled with a filler 27.
  • the magnetic sensor 12 has a temperature characteristic, and its output changes with changes in temperature.
  • a material having a lower thermal conductivity than the forcer 2 is used for the end case 9 and the filler 27.
  • epoxy resin is used for the forcer 2
  • PPS polyphenylene sulfide
  • FIG. 11 shows the bush 8 which is a bearing attached to the end case 9. Since the end case 9 has a bearing function, a phenomenon in which the gap between the rod 1 and the magnetic sensor 12 fluctuates can be prevented.
  • FIG. 12 shows a configuration diagram of the position detection circuit 13.
  • a sine wave signal and a cosine wave signal output from the magnetic sensor 12 are taken into the position detection circuit 13.
  • the pitch between the magnetic poles of the rod 1 is, for example, on the order of several tens of mm, which is much larger than the order of several hundred ⁇ m of the magnetic encoder. When the rod 1 is used as a magnetic scale, it is necessary to subdivide the sine wave signal and the cosine wave signal output from the magnetic sensor 12 to increase the resolution.
  • a sine wave signal and a cosine wave signal whose phases are different by 90 ° are respectively input to the A / D converter 30.
  • the A / D converter 30 samples the sine wave-like signal and the cosine wave-like signal into the digital data DA and DB at predetermined cycles, respectively.
  • the plurality of first actuators 40 are arranged in parallel close to each other in the first hierarchy F1, and the plurality of second actuators 50 are arranged in the second hierarchy F2.
  • the axial directions of the first and second actuators 40 and 50 extend in different directions. That is, when viewed from the thickness direction in which the first and second layers F1 and F2 are stacked, the first actuator 40 and the second actuator 50 overlap each other and are arranged in a substantially lattice shape.
  • the rod 41 of the first actuator 40 and the forcer 52 of the second actuator 50 are connected on a one-to-one basis. Therefore, when the rod 41 of each first actuator 40 reciprocates (that is, the rod 41 extends or contracts with respect to the forcer 42), each second actuator 50 becomes independent along the axial direction of the rod 41. Can move. As a result, since the second actuators 50 are provided with a variable inter-axis pitch, one of the second actuators 50 can extend the rod 51 without waiting for the completion of the work of the other second actuator 50. Shrink and work independently.
  • the actuator unit 100 according to the present embodiment, the first actuators 40 and the second actuators 50 are reliably disposed close to each other. Therefore, the actuator unit 100 having a compact configuration can be obtained.
  • the first and second actuators 40 and 50 are configured using the linear motor 11. Therefore, the entire actuator unit 100 is reliably reduced in size.
  • the linear motor 11 is used, so that the reciprocation of the rods 41 and 51 with respect to the forcers 42 and 52 is performed with high accuracy. As a result, work can be performed with high accuracy.
  • the rod 41 of the first actuator 40 moves, so that the second actuator 50 connected to the rod 41 moves in the Y direction among the horizontal directions. Then, the rod 51 of the second actuator 50 moves in the X direction that is orthogonal to the Y direction in the horizontal direction, so that the external device mounting portion 65 performs an operation on the electronic component or the like. Therefore, the work range in which the external device mounting portion 65 disposed at the tip of the rod 51 of the second actuator 50 works can be set relatively freely in the horizontal plane, and a sufficient work range can be secured. .
  • the forcer 52 of the second actuator 50 is supported on the pair of first support bases 61 and 61 that are separated from each other in the X direction on the base material 60. Therefore, the second actuator 50 hardly moves along the Y direction and moves stably. Therefore, the work of the external device mounting portion 65 of the second actuator 50 can be performed with high accuracy.
  • the actuator unit 100 on the first support base 61, the rails 62A and 62B are arranged close to each other in parallel, and the sliders 63A and 63B are arranged in a staggered manner.
  • the second actuators 50 can be arranged close to each other. Therefore, the inter-axis pitch between the second actuators 50 is further reduced, and the movement range of the second actuators 50 in the Y direction is expanded. Further, the actuator unit 100 is further downsized.
  • the first and second actuators 40 and 50 are configured using the linear motor 11, but the configuration is not limited thereto. That is, one of the first and second actuators 40 and 50 may be configured using the linear motor 11. Alternatively, instead of the first and second actuators 40 and 50 being configured using the linear motor 11, the first and second actuators 40 and 50 are configured using a linear actuator that converts the rotational motion of the drive motor into a linear motion and outputs the linear motion, an air cylinder, or the like. It doesn't matter.
  • the axial direction of the first actuator 40 and the axial direction of the second actuator 50 extend along the horizontal direction, and are arranged orthogonal to each other when viewed from the thickness direction.
  • the axial direction of the first actuator 40 and the axial direction of the second actuator 50 need only be arranged so as to intersect with each other, and are not limited to being orthogonal.
  • the angle formed by the axial direction of the first actuator 40 and the axial direction of the second actuator 50 is within the range of 80 ° to 100 ° when viewed from the thickness direction. It is preferable to set to.
  • the external device mounting portion 65 is provided at the other end of the second actuator 50.
  • the configuration is not limited to this configuration, and the external device mounting portion 65 may be provided at the one end. .
  • a suction nozzle for handling an electronic component or the like, a probe for laser processing, or the like is used as the external device mounting portion 65, and the external device mounting portion 65 is set to perform work in the Z direction.
  • the external device mounting portion 65 for example, another actuator that extends the axial direction of the rod along the thickness direction may be further disposed.
  • the external device attachment portion 65 may be configured to perform work in the X direction or the like other than the Z direction. In this way, it is possible to respond to various requests.
  • the first actuators 40A to 40D and the first actuators 40E to 40H are arranged on the base member 60 in line symmetry with the virtual line V interposed therebetween.
  • the present invention is not limited to this configuration.
  • the virtual line V may be arranged asymmetrically.
  • the first actuators 40A to 40D (40E to 40H) are arranged so as to gradually approach the virtual line V from the first actuator 40A (40E) toward the first actuator 40D (40H).
  • the first actuator 40B (40F) and the first actuator 40C (40G) may be arranged with each other, or may have other arrangements.
  • the arrangement of the second actuators 50A to 50H connected to the first actuators 40A to 40H may be interchanged.
  • the base member 60 of the actuator unit 100 is formed in a rectangular flat plate shape, but is not limited to this configuration. That is, unevenness may be formed on one surface of the substrate 60.
  • the 1st actuator 40 may be arrange
  • the rods 41 and 51 of the first and second actuators 40 and 50 extend so as to be orthogonal to each other along the horizontal direction.
  • the present invention is not limited to this configuration. That is, for example, the rod 41 of the first actuator 40 may extend along the horizontal direction (Y direction), and the rod 51 of the second actuator 50 may extend along the vertical direction (X direction).
  • the movement of the rod 41 of the first actuator 40 causes the second actuator 50 connected to the rod 41 to move in the horizontal direction.
  • the external device mounting portion 65 provided at the tip of the rod 51 is processed and measured with respect to the electronic component or the like arranged in the X direction. Work such as handling can be performed.
  • the thickness direction (Z direction) is set in the horizontal direction.
  • first actuator (actuator) 50 Second actuator (actuator) 65 ... External device mounting portion 100 ... Actuator unit F1 ... First layer F2 ... Second layer X ... Axial direction Y of second actuator ... Axial direction Z of first actuator ... Thickness direction

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)

Abstract

L'invention porte sur une unité actionneur. L'unité actionneur selon l'invention comprend une première hiérarchie formée d'une pluralité de premiers actionneurs (40) disposés à proximité les uns des autres et parallèlement entre eux, et une seconde hiérarchie formée d'une pluralité de seconds actionneurs (50) disposés à proximité les uns des autres et parallèlement entre eux, qui sont positionnés de telle sorte que la première hiérarchie et la seconde hiérarchie se chevauchent dans la direction de l'épaisseur (Z) de l'intersection d'une direction d'axe (Y) des premiers actionneurs (40) et d'une direction d'axe (X) des seconds actionneurs (50). De plus, la direction d'axe (Y) des premiers actionneurs (40) et la direction d'axe (X) des seconds actionneurs (50) se coupent et se prolongent, vu de la direction de l'épaisseur (Z), et des tiges (40) des premiers actionneurs (40) et des corps de support (52) des seconds actionneurs sont reliés individuellement.
PCT/JP2011/059510 2010-04-23 2011-04-18 Unité actionneur WO2011132632A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-100067 2010-04-23
JP2010100067A JP4838372B2 (ja) 2010-04-23 2010-04-23 アクチュエータユニット

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WO2011132632A1 true WO2011132632A1 (fr) 2011-10-27

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TW (1) TW201212492A (fr)
WO (1) WO2011132632A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006109664A (ja) * 2004-10-08 2006-04-20 Matsushita Electric Ind Co Ltd Ｘｙロボット及び部品実装装置
JP2007068326A (ja) * 2005-08-31 2007-03-15 Thk Co Ltd リニアモータユニット及びその組み合わせ方法
JP2008017571A (ja) * 2006-07-04 2008-01-24 Juki Corp リニアモータ及び部品搭載装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69735016T2 (de) * 1996-12-24 2006-08-17 Asml Netherlands B.V. Lithographisches Gerät mit zwei Objekthaltern

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006109664A (ja) * 2004-10-08 2006-04-20 Matsushita Electric Ind Co Ltd Ｘｙロボット及び部品実装装置
JP2007068326A (ja) * 2005-08-31 2007-03-15 Thk Co Ltd リニアモータユニット及びその組み合わせ方法
JP2008017571A (ja) * 2006-07-04 2008-01-24 Juki Corp リニアモータ及び部品搭載装置

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JP2011234436A (ja) 2011-11-17
TW201212492A (en) 2012-03-16

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