WO2011126292A3 - Cnt 대전 방지 처리된 작업 스테이지의 수선 방법 - Google Patents

Cnt 대전 방지 처리된 작업 스테이지의 수선 방법 Download PDF

Info

Publication number
WO2011126292A3
WO2011126292A3 PCT/KR2011/002397 KR2011002397W WO2011126292A3 WO 2011126292 A3 WO2011126292 A3 WO 2011126292A3 KR 2011002397 W KR2011002397 W KR 2011002397W WO 2011126292 A3 WO2011126292 A3 WO 2011126292A3
Authority
WO
WIPO (PCT)
Prior art keywords
cnt
antistatic
working stage
repairing
specific part
Prior art date
Application number
PCT/KR2011/002397
Other languages
English (en)
French (fr)
Other versions
WO2011126292A2 (ko
Inventor
박도형
이동면
구성창
Original Assignee
(주)탑나노시스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)탑나노시스 filed Critical (주)탑나노시스
Publication of WO2011126292A2 publication Critical patent/WO2011126292A2/ko
Publication of WO2011126292A3 publication Critical patent/WO2011126292A3/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/24—Electrically-conducting paints
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/60—Additives non-macromolecular
    • C09D7/61—Additives non-macromolecular inorganic
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/70—Additives characterised by shape, e.g. fibres, flakes or microspheres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/005—Repairing damaged coatings
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K7/00—Use of ingredients characterised by shape
    • C08K7/02—Fibres or whiskers
    • C08K7/04—Fibres or whiskers inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)

Abstract

본 발명은 CNT대전 방지 처리된 작업 스테이지의 수선 방법을 제공한다. 본 발명의 CNT대전 방지 처리된 작업 스테이지의 수선 방법은, 세척 단계와, 예열 단계와, 코팅 단계와, 열경화 단계를 포함한다. 세척 단계는 작업스테이지 중 수선이 필요한 특정 부위를 세척한다. 예열 단계는 상기 특정 부위를 예열한다. 코팅 단계는 상기 특정 부위에 탄소나노튜브가 함유된 리페어 용액을 코팅한다. 열경화 단계는 상기 리페어 용액이 코팅된 특정 부위를 열경화시킨다. 본 발명에 따르면 현장에서 신속하고, 간편하게 CNT 대전방지 처리된 작업 스테이지를 리페어 할 수 있다.
PCT/KR2011/002397 2010-04-06 2011-04-06 Cnt 대전 방지 처리된 작업 스테이지의 수선 방법 WO2011126292A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0031220 2010-04-06
KR1020100031220A KR101171316B1 (ko) 2010-04-06 2010-04-06 씨엔티대전 방지 처리된 작업 스테이지의 수선 방법

Publications (2)

Publication Number Publication Date
WO2011126292A2 WO2011126292A2 (ko) 2011-10-13
WO2011126292A3 true WO2011126292A3 (ko) 2012-03-08

Family

ID=44763397

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/002397 WO2011126292A2 (ko) 2010-04-06 2011-04-06 Cnt 대전 방지 처리된 작업 스테이지의 수선 방법

Country Status (2)

Country Link
KR (1) KR101171316B1 (ko)
WO (1) WO2011126292A2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101381864B1 (ko) * 2012-06-11 2014-04-24 (주)탑나노시스 탄소나노튜브 코팅막 및 상기 탄소나노튜브 코팅막을 형성하는 탄소나노튜브 용액 조성물
KR102231786B1 (ko) 2018-12-19 2021-03-25 (주)탑나노시스 손상된 작업스테이지 보수용 용액 조성물, 상기 보수용 용액 조성물을 이용한 손상된 작업스테이지 보수 방법
KR102261935B1 (ko) 2019-09-25 2021-06-07 (주)탑나노시스 작업 스테이지 수선 방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030047036A (ko) * 2001-12-07 2003-06-18 주식회사 코미코 플라즈마 스프레이 방식을 이용한 세라믹 반도체 부품의제조 및 재생 방법
KR20070040300A (ko) * 2005-10-11 2007-04-16 미쓰비시덴키 가부시키가이샤 소자기판의 제조 방법 및 기판 지지장치
US20070190799A1 (en) * 2005-01-18 2007-08-16 Applied Materials, Inc. Refurbishing a wafer having a low-k dielectric layer
US20080024742A1 (en) * 2006-07-26 2008-01-31 Tadahiro Ohmi Substrate stage and heat treatment apparatus
US20090034149A1 (en) * 2007-07-31 2009-02-05 Applied Materials, Inc. Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003083783A (ja) 2001-09-10 2003-03-19 Advance Denki Kogyo Kk フローモニター

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030047036A (ko) * 2001-12-07 2003-06-18 주식회사 코미코 플라즈마 스프레이 방식을 이용한 세라믹 반도체 부품의제조 및 재생 방법
US20070190799A1 (en) * 2005-01-18 2007-08-16 Applied Materials, Inc. Refurbishing a wafer having a low-k dielectric layer
KR20070040300A (ko) * 2005-10-11 2007-04-16 미쓰비시덴키 가부시키가이샤 소자기판의 제조 방법 및 기판 지지장치
US20080024742A1 (en) * 2006-07-26 2008-01-31 Tadahiro Ohmi Substrate stage and heat treatment apparatus
US20090034149A1 (en) * 2007-07-31 2009-02-05 Applied Materials, Inc. Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing

Also Published As

Publication number Publication date
KR20110111904A (ko) 2011-10-12
WO2011126292A2 (ko) 2011-10-13
KR101171316B1 (ko) 2012-08-10

Similar Documents

Publication Publication Date Title
EP2578720A3 (en) Repair methods for cooled components
BRPI0913135A2 (pt) pigmentos de efeito metálico, processo para produção de pigmentos de efeito metálico, utilização de pigmentos de efeito metálico, composição de revestimento, artigo revestido.
UA102424C2 (ru) Способ получения резиновых частиц с покрытием
WO2012141293A3 (ja) 積層体とその製造方法および、この積層体を用いたデバイス構造体の作成方法
WO2008134315A3 (en) Process and apparatus for drying & curing a container coating and containers produced therefrom
WO2010050732A3 (ko) 알루미늄 튜브 및 그 제조방법
BRPI1006540A2 (pt) dispersão híbrida, processo para produzir uma dispersão híbrida, artigo revestido, método para revestir um artigo, estrutura revestida e método para revestir uma estrutura
WO2014166492A8 (en) Curing agent for tie-coat composition comprising an amino-silane adduct
MX371049B (es) Fibras de carbono y fibras de alto rendimiento para aplicaciones compuestas.
PT2238227E (pt) Processo para revestimento de superfícies metálicas com uma camada de fosfato seguida de uma camada lubrificante de polímeros
WO2010120873A3 (en) Method and apparatus for digital coating project purchase
JP2015515367A5 (ko)
MX362398B (es) Tratamiento termico de un recubrimiento por laser.
IN2014DN09953A (ko)
WO2015007789A3 (de) Verfahren zum beschichten von metallischen oberflächen von substraten und nach diesem verfahren beschichteten gegenstände
BRPI0917600A2 (pt) composição de revestimento, artigo revestido, processo para produzir uma composição de revestimento e método para reparar um artigo revestido
GB201114552D0 (en) A high performance coating composition
WO2014105350A3 (en) Coatings for enhancing glass strength
EA201290099A1 (ru) Способ нанесения покрытий на трубы или части труб
WO2011126292A3 (ko) Cnt 대전 방지 처리된 작업 스테이지의 수선 방법
DE502008000203D1 (de) Vorrichtung und verfahren zum lackieren von felgen
IN2014DN09651A (ko)
MX2010007594A (es) Composicion de recubrimiento de metal.
BR112012012448A2 (pt) "processo para aplicação de um revestimento de metal em um artigo polimérico, método e artigo"
WO2009148529A3 (en) Polyurethane-polyurea dispersions based on polycarbonate-polyols

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11766143

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205 DATED 13.12.2013)

122 Ep: pct application non-entry in european phase

Ref document number: 11766143

Country of ref document: EP

Kind code of ref document: A2