WO2011124595A1 - Vacuum bearing element - Google Patents

Vacuum bearing element Download PDF

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Publication number
WO2011124595A1
WO2011124595A1 PCT/EP2011/055325 EP2011055325W WO2011124595A1 WO 2011124595 A1 WO2011124595 A1 WO 2011124595A1 EP 2011055325 W EP2011055325 W EP 2011055325W WO 2011124595 A1 WO2011124595 A1 WO 2011124595A1
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WO
WIPO (PCT)
Prior art keywords
recesses
bearing
rolling
bearing cage
vacuum
Prior art date
Application number
PCT/EP2011/055325
Other languages
German (de)
French (fr)
Inventor
Rainer Hölzer
Hans-Günther STÜBER
Christian Beyer
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Priority to EP11712849A priority Critical patent/EP2556264A1/en
Publication of WO2011124595A1 publication Critical patent/WO2011124595A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/66—Special parts or details in view of lubrication
    • F16C33/6603—Special parts or details in view of lubrication with grease as lubricant
    • F16C33/6607—Retaining the grease in or near the bearing
    • F16C33/6614—Retaining the grease in or near the bearing in recesses or cavities provided in retainers, races or rolling elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/38—Ball cages
    • F16C33/3837—Massive or moulded cages having cage pockets surrounding the balls, e.g. machined window cages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/38—Ball cages
    • F16C33/3887—Details of individual pockets, e.g. shape or ball retaining means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Definitions

  • the invention relates to a vacuum bearing element for rolling bearings, in particular for the storage of rotor shafts of turbomolecular pumps.
  • turbomolecular pumps the bearings are exposed to very low pressures. If the bearing of the rotors of the turbomolecular pump does not take place via magnetic bearings but rolling bearings, there is an increased risk of bearing failure. On the other hand, the provision of magnetic bearings is structurally complex. The service life of mechanically supported turbomolecular pumps is therefore determined predominantly by the life of the roller bearings. The most common cause of bearing failure is that insufficient lubricant reaches the relevant parts of the bearing.
  • Lubrication of rolling bearings by oil requires large amounts of oil. These must be recycled via a cycle. If only small amounts of oil are supplied, the availability of security at the relevant points within the warehouse is limited. Furthermore, oil lubrication in rolling bearings in turbomolecular pumps has the disadvantage that the oil is difficult to apply, since the prevailing low pressure in the corresponding areas may be smaller than the vapor pressure of the oil or its additives. Another disadvantage is that the installation position of the turbomolecular pumps may be different and thus the direction of gravity is not fixed, this has the consequence that the oil supply to the relevant points in the rolling bearing by capillary forces or targeted droplet bombardment must occur. This is particularly structurally complex and difficult.
  • the object of the invention is to provide a vacuum bearing element by means of which the service life of rolling bearings used in vacuum pumps is increased.
  • the vacuum bearing element is a bearing cage which serves as a carrier and distributor of the lubricant.
  • the bearing cage recesses for supplying lubricant. These recesses formed in particular as pockets or cavities serve to provide the lubricant within the bearing, wherein the lubricant is preferably dispensed directly to the rolling element. This ensures a targeted delivery of small amounts of lubricant. It is avoided that large amounts of lubricant due to the prevailing Vacuum be sucked out of the camp. As a result, the life of bearings used in high vacuum bearings can be significantly increased. Further, the contamina- tion of the gases delivered by the turbomolecular pump is reduced by the lubricant
  • the recesses are at least partially formed such that they are open in the direction of the openings which serve to receive rolling elements. This ensures that lubrication of the Wäiz emotions especially when the contact of the bearing cage by the rolling elements. Furthermore, it is preferred that the recesses or at least a part of the recesses are open in the direction of an inner side of the bearing cage. The inside of the bearing cage points in the direction of an optionally provided inner ring of the Wäizlagers. Such an arrangement of the recesses has the advantage that due to the centrifugal forces occurring, the lubricant is held in the recesses and leak only very small amounts of lubricant.
  • At least a part of the recesses is arranged such that it is open not only in the direction of the rolling element opening, but also outwardly in the direction of the outer bearing shell.
  • At least those recesses which are associated with a specific opening, with respect to this opening to arrange substantially on the side facing away from the main direction of rotation of the bearing cage side.
  • the corresponding recesses are thus arranged in relation to the single opening in the direction of rotation in each case behind the opening.
  • At least a portion of the recesses is partially shell-shaped.
  • the thus formed recesses are in this case both in the direction of the respectively associated Opening of the bearing cage as well as towards the inside open.
  • the centrifugal forces, which act on the recess in the main direction of rotation of the bearing thus in turn act into the recess, so that the lubricant is held in the recess.
  • At least a portion of the recesses is formed as pores and / or capillary in the bearing cage.
  • Such small cavities can be soaked in particular by suitable impregnation with lubricant.
  • the pores and capillaries are, as described above, in a preferred embodiment at least partially turn in the direction of the opening which serves to receive the rolling elements, open. This ensures a targeted supply of lubricant to the rolling elements.
  • such relatively small cavities are preferably arranged within the bearing cage.
  • such cavities or recesses arranged within the bearing cage may in a preferred embodiment, in turn, be designed such that they have a small, optionally capillary, opening pointing in the direction of the rolling body opening.
  • the provision of such arranged within the bearing cage recesses is particularly easy to manufacture, if they are arranged in multi-part bearing cages in the parting plane. This has the advantage that the individual recesses are easy to derive, since substantially self-contained recess or cavity only arises when the individual parts of the bearing cage are connected to one another. Furthermore, there is the advantage here that the recesses can be filled with lubricant before the individual parts of the bearing cage are connected to each other.
  • the individual parts of the bearing cage are annular.
  • the connection is made by riveting, gluing or otherwise connecting the bearing rings.
  • the leakage of the lubricant from the recesses is preferably carried out by diffusion and / or concentration gradients or due to temperature increase, these effects are particularly relevant if the recesses are formed as pores or capillary.
  • FIG. 1 shows a schematic cross section of a vacuum bearing element in FIG.
  • Figure 2 is a schematic sectional view taken along the line II-II in Figure 1 and
  • Figure 3 is a schematic cross section of another preferred embodiment
  • Embodiment of a vacuum bearing element in the form of a bearing cage Embodiment of a vacuum bearing element in the form of a bearing cage.
  • the vacuum bearing element 10 has an annular bearing cage 12.
  • the bearing cage 12 has a plurality of regularly arranged openings 1.4 for receiving rolling elements.
  • the openings 14 are Vietnameseringförrnig and serve to receive balls as rolling elements.
  • the recesses 18 are identical.
  • the recesses 18 are in the illustrated embodiment partially-shell-shaped and in the direction of the inner side 16 of the bearing cage 12 open.
  • the recesses 18 shown in the direction of the openings 14, which serve to receive the rolling elements are open. Via an outlet opening 20 of the recesses, which faces in the direction of the openings 14, there is thus the exit of arranged in the recess 18 lubricant, which is then received by the rolling elements.
  • the recesses 18 are arranged in the illustrated embodiment in each case behind the associated opening 14. As a result, the lubricant present in the recess 18 is pressed into the recess substantially due to the forces occurring.
  • pores and / or capillaries can also be provided within the bearing cage 12, which also serve to receive lubricant. These pores and capillaries are preferably in the direction of the openings 14, which serve for WälzShabilityability and / or towards the inner side 16 open.
  • the bearing cage is in three parts and consists of three ring-shaped elements 24, 26, 28.
  • recesses 30 are arranged within the bearing cage in this embodiment.
  • the spherical recesses 30 formed in the illustrated embodiment are each arranged in parting planes 32 between the two parts of the bearing cage 24 and 26 and 26 and 28 respectively. This has the advantage that the recesses 30 can be produced in a simple manner. It is also possible to fill the recesses 30 with lubricant before the annular elements 24, 26, 28 are connected to each other.
  • the parting planes 32 are arranged such that they extend through the rolling element openings 14. Since no seals are provided between the individual annular elements 24, 26, 28, lubricant can penetrate through the separating planes 32 acting as a small gap in the direction of the rolling element openings 14. Thus, according to the invention, the rolling elements undergo substantial lubrication, in particular in the region in which the rolling elements bear against the bearing cage.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Rolling Contact Bearings (AREA)

Abstract

The service life of turbomolecular pumps comprising rotors that are mounted on mechanical rolling bearings, is frequently limited by the rolling bearings. In order to increase the service life of the rolling bearings, according to the invention a bearing cage (12) is provided, which, in addition to the openings (14) that are used to receive rolling elements, comprises recesses (18) for providing lubricant. The recesses are open at least partially in the direction of the rolling element opening.

Description

Vakuumlaqerelement  Vakuumlaqerelement
Die Erfindung betrifft ein Vakuumlagerelement für Wälzlager insbesondere zur Lagerung von Rotorwellen von Turbomoiekularpumpen. The invention relates to a vacuum bearing element for rolling bearings, in particular for the storage of rotor shafts of turbomolecular pumps.
In Turbomoiekularpumpen sind die Lager sehr niedrigen Drücken ausgesetzt. Sofern die Lagerung der Rotoren der Turbomolekularpumpe nicht über Magnetlager sondern Wälzlager erfolgt, besteht ein erhöhtes Risiko des Lagerversagens. Andererseits ist das Vorsehen von Magnetlagern konstruktiv aufwendiger. Die Lebensdauer von mechanisch gelagerten Turbomoiekularpumpen wird daher überwiegend durch die Lebensdauer der Wälzlager bestimmt. Die häufigste Ursache des Lagerversagens besteht darin, dass nicht ausreichend Schmiermittel zu den relevanten Stellen des Lagers gelangt. In turbomolecular pumps, the bearings are exposed to very low pressures. If the bearing of the rotors of the turbomolecular pump does not take place via magnetic bearings but rolling bearings, there is an increased risk of bearing failure. On the other hand, the provision of magnetic bearings is structurally complex. The service life of mechanically supported turbomolecular pumps is therefore determined predominantly by the life of the roller bearings. The most common cause of bearing failure is that insufficient lubricant reaches the relevant parts of the bearing.
Bei der Schmierung der Wälzlager durch Öl werden große Mengen Öl benötigt. Diese müssen über einen Kreislauf rückgeführt werden. Wenn nur kleine Mengen an Öl zugeführt werden, ist die Sicherheit der Verfügbarkeit an den relevanten Stellen innerhalb des Lagers nur eingeschränkt gewährleistbar. Ferner weist ÖSschmierung bei Wälzlagern in Turbomoiekularpumpen den Nachteil auf, dass das Öl nur schwierig applizierbar ist, da der herrschende geringe Druck in den entsprechenden Bereichen gegebenenfalls kleiner ist, als der Dampfdruck des Öls oder dessen Additive. Ein weiterer Nachteil besteht darin, dass die Einbaulage der Turbomoiekularpumpen unterschiedlich sein kann und somit die Richtung der Schwerkraft nicht festgelegt ist, Dies hat die Folge, dass die Ölzufuhr zu den relevanten Stellen im Wälzlager durch kapillare Kräfte oder gezielten Tröpfchenbeschuß erfolgen muss. Dies ist insbesondere konstruktiv aufwendig und schwierig. Lubrication of rolling bearings by oil requires large amounts of oil. These must be recycled via a cycle. If only small amounts of oil are supplied, the availability of security at the relevant points within the warehouse is limited. Furthermore, oil lubrication in rolling bearings in turbomolecular pumps has the disadvantage that the oil is difficult to apply, since the prevailing low pressure in the corresponding areas may be smaller than the vapor pressure of the oil or its additives. Another disadvantage is that the installation position of the turbomolecular pumps may be different and thus the direction of gravity is not fixed, this has the consequence that the oil supply to the relevant points in the rolling bearing by capillary forces or targeted droplet bombardment must occur. This is particularly structurally complex and difficult.
Bei dem Einsatz von Fettschmierung für Lagerelemente von Rotorweilen in Turbomolekularpumpen besteht der Nachteil, dass das in einem Verdicker gebundene Schmierfett nicht ausreichend zuverlässig über lange Zeit in ausreichender Menge austritt, um eine Schmierung der relevanten Stellen des Wälzlagers sicherzustellen, The use of grease lubrication for bearing elements of the rotor in turbomolecular pumps has the disadvantage that the grease bound in a thickener does not escape sufficiently reliably for a long time in sufficient quantity to ensure lubrication of the relevant points of the rolling bearing,
Ferner ist aus EP 2 096 327 ein Lagerkäfig bekannt, an dessen Innenseiten Ausnehmungen vorgesehen sind. Diese Ausnehmungen sind in Richtung der inneren Lagerschale offen. Die Ausnehmungen sind zur Aufnahme von Schmiermittel vorgesehen. Bei einem derartigen Vorsehen von Ausnehmungen zur Aufnahme von Schmiermittel besteht jedoch die Gefahr, dass der Bereich, in dem die größte Reibung auftritt, nicht zuverlässig geschmiert ist. Es handelt sich hierbei um den Bereich zwischen Lagerkäfig und Wälzkörpern. Furthermore, from EP 2 096 327 a bearing cage is known, on the insides of which recesses are provided. These recesses are open in the direction of the inner bearing shell. The recesses are provided for receiving lubricant. With such provision of recesses for receiving lubricant, however, there is a risk that the region in which the greatest friction occurs is not reliably lubricated. This is the area between the bearing cage and the rolling elements.
Aufgabe der Erfindung ist es, ein Vakuumlagere!ement zu schaffen, durch das die Lebensdauer von in Vakuumpumpen eingesetzten Wälzlagern erhöht wird. The object of the invention is to provide a vacuum bearing element by means of which the service life of rolling bearings used in vacuum pumps is increased.
Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1. The object is achieved according to the invention by the features of claim 1.
Erfindungsgemäß handelt es sich bei dem Vakuumlagerelement um einen Lagerkäfig, der als Träger und Verteiler des Schmiermitteis dient. Hierzu weist in einer ersten bevorzugten Ausführungsform der Lagerkäfig Ausnehmungen zur Schmiermitteibereitstellung auf. Diese insbesondere als Taschen oder Hohlräume ausgebildeten Ausnehmungen dienen zur Bereitstellung des Schmiermittels innerhalb des Lagers, wobei das Schmiermittel vorzugsweise unmittelbar an den Wälzkörper abgegeben wird. Hierdurch ist eine gezielte Abgabe von geringen Mengen an Schmiermittel gewährleistet. Es ist vermieden, dass große Mengen an Schmiermittel aufgrund des herrschenden Vakuums aus dem Lager herausgesaugt werden. Hierdurch kann die Lebensdauer von in hohem Vakuum eingesetzten Wälzlagern deutlich erhöht werden. Ferner ist die Kontammierung der von der Turbomolekularpumpe geförderten Gase durch das Schmiermittet verringert According to the invention, the vacuum bearing element is a bearing cage which serves as a carrier and distributor of the lubricant. For this purpose, in a first preferred embodiment, the bearing cage recesses for supplying lubricant. These recesses formed in particular as pockets or cavities serve to provide the lubricant within the bearing, wherein the lubricant is preferably dispensed directly to the rolling element. This ensures a targeted delivery of small amounts of lubricant. It is avoided that large amounts of lubricant due to the prevailing Vacuum be sucked out of the camp. As a result, the life of bearings used in high vacuum bearings can be significantly increased. Further, the contamina- tion of the gases delivered by the turbomolecular pump is reduced by the lubricant
Erfindungsgemäß sind die Ausnehmungen zumindest teilweise derart ausgebildet, dass sie in Richtung der Öffnungen, die zur Aufnahme von Wälzkörpern dienen, offen sind. Hierdurch ist sichergestellt, dass eine Schmierung der Wäizkörper insbesondere bei der Berührung des Lagerkäfigs durch den Wälzkörper erfolgt. Ferner ist es bevorzugt, dass die Ausnehmungen bzw. zumindest ein Teil der Ausnehmungen in Richtung einer Innenseite des Lagerkäfigs offen sind. Die Innenseite des Lagerkäfigs weist in Richtung eines gegebenenfalls vorgesehenen Innenrings des Wäizlagers. Eine derartige Anordnung der Ausnehmungen hat den Vorteil, dass aufgrund der auftretenden Fliehkräfte das Schmiermittel in den Ausnehmungen gehalten wird und nur sehr geringe Mengen an Schmiermittel austreten. According to the invention, the recesses are at least partially formed such that they are open in the direction of the openings which serve to receive rolling elements. This ensures that lubrication of the Wäizkörper especially when the contact of the bearing cage by the rolling elements. Furthermore, it is preferred that the recesses or at least a part of the recesses are open in the direction of an inner side of the bearing cage. The inside of the bearing cage points in the direction of an optionally provided inner ring of the Wäizlagers. Such an arrangement of the recesses has the advantage that due to the centrifugal forces occurring, the lubricant is held in the recesses and leak only very small amounts of lubricant.
Bei einer Außenführung des Lagerkäfigs ist es bevorzugt, dass zumindest ein Teil der Ausnehmungen derart angeordnet ist, dass die nicht nur in Richtung der Wälzkörper-Öffnung, sondern auch nach außen in Richtung der äußeren Lagerschale offen ist. In an outer guide of the bearing cage, it is preferred that at least a part of the recesses is arranged such that it is open not only in the direction of the rolling element opening, but also outwardly in the direction of the outer bearing shell.
Um das Schmiermittel in den Ausnehmungen zu halten, ist es in einer weiteren Ausführungsform bevorzugt, zumindest diejenigen Ausnehmungen, die einer bestimmten Öffnung zugeordnet sind, bezogen auf diese Öffnung im Wesentlichen auf der der Hauptdrehrichtung des Lagerkäfigs abgewandten Seite anzuordnen. Die entsprechenden Ausnehmungen sind somit bezogen auf die einzelne Öffnung in Drehrichtung jeweils hinter der Öffnung angeordnet. In order to keep the lubricant in the recesses, it is preferred in a further embodiment, at least those recesses, which are associated with a specific opening, with respect to this opening to arrange substantially on the side facing away from the main direction of rotation of the bearing cage side. The corresponding recesses are thus arranged in relation to the single opening in the direction of rotation in each case behind the opening.
Bei einer bevorzugten Weiterbildung der Erfindung ist zumindest ein Teil der Ausnehmungen teil-schalenförmig ausgebildet. Die derart ausgebildeten Ausnehmungen sind hierbei sowohl in Richtung der jeweils zugeordneten Öffnung des Lagerkäfigs als auch in Richtung der Innenseite offen. Die Fliehkräfte, die bei der Hauptdrehrichtung des Lagers auf die Ausnehmung wirken, wirken somit wiederum in die Ausnehmung hinein, so dass das Schmiermittel in der Ausnehmung gehalten wird. In a preferred embodiment of the invention, at least a portion of the recesses is partially shell-shaped. The thus formed recesses are in this case both in the direction of the respectively associated Opening of the bearing cage as well as towards the inside open. The centrifugal forces, which act on the recess in the main direction of rotation of the bearing, thus in turn act into the recess, so that the lubricant is held in the recess.
Bei einer weiteren bevorzugten Ausführungsform der Erfindung ist zumindest ein Teil der Ausnehmungen als Poren und/oder Kapillare in dem Lagerkäfig ausgebildet. Derartige kleine Hohlräume können insbesondere durch geeignete Tränkverfahren mit Schmiermittel getränkt werden. Die Poren und Kapillare sind, wie vorstehend beschrieben, in bevorzugter Ausführungsform zumindest teilweise wiederum in Richtung der Öffnung, die zur Aufnahme der Wälzkörper dient, offen. Hierdurch ist eine zielgerichtete Zufuhr von Schmiermittel zu dem Wälzkörper gewährleistet. In a further preferred embodiment of the invention, at least a portion of the recesses is formed as pores and / or capillary in the bearing cage. Such small cavities can be soaked in particular by suitable impregnation with lubricant. The pores and capillaries are, as described above, in a preferred embodiment at least partially turn in the direction of the opening which serves to receive the rolling elements, open. This ensures a targeted supply of lubricant to the rolling elements.
Insbesondere derartige relativ kleine Hohlräume sind vorzugsweise innerhalb des Lagerkäfigs angeordnet. Hierbei können derartige innerhalb des Lagerkäfigs angeordnete Hohlräume bzw. Ausnehmungen in bevorzugter Ausführungsform wiederum derart ausgebildet sein, dass sie eine kleine gegebenenfalls kapillare Öffnung aufweisen, die in Richtung der Wälzkörper- Öffnung weist. Das Vorsehen derartiger innerhalb des Lagerkäfigs angeordneter Ausnehmungen ist insbesondere in der Herstellung einfach, wenn diese bei mehrteiligen Lagerkäfigen in der Trennebene angeordnet sind. Dies hat den Vorteil, dass die einzelnen Ausnehmungen einfach herzusteiien sind, da im Wesentlich in sich geschlossene Ausnehmung bzw. Hohlraum erst entsteht, wenn die Einzelteile des Lagerkäfigs miteinander verbunden werden. Ferner besteht hierbei der Vorteil, dass die Ausnehmungen mit Schmiermittel gefüllt werden können, bevor die einzelnen Teile des Lagerkäfigs miteinander verbunden werden. Besonders bevorzugt ist es hierbei, dass die einzelnen Teile des Lagerkäfigs ringförmig ausgebildet sind. Das Verbinden erfolgt durch Vernieten, Verkleben oder anderes Verbinden der Lagerringe. Selbst wenn die derartig ausgebildeten innen liegenden Hohlräume vollständig von dem Material des Lagerkäfigs umgeben sind, entstehen beispielsweise bei vernieteten Teilen des Lagerkäfigs Schlitze, die in Richtung der Wälzkörper- Öffnungen weisen. Diese Schlitze dienen als Förder- bzw„ Austrittskanäle, durch die das Schmiermittel aus den Hohlräumen in Richtung der Wälzkörper- Öffnungen transportiert wird. In particular, such relatively small cavities are preferably arranged within the bearing cage. In this case, such cavities or recesses arranged within the bearing cage may in a preferred embodiment, in turn, be designed such that they have a small, optionally capillary, opening pointing in the direction of the rolling body opening. The provision of such arranged within the bearing cage recesses is particularly easy to manufacture, if they are arranged in multi-part bearing cages in the parting plane. This has the advantage that the individual recesses are easy to derive, since substantially self-contained recess or cavity only arises when the individual parts of the bearing cage are connected to one another. Furthermore, there is the advantage here that the recesses can be filled with lubricant before the individual parts of the bearing cage are connected to each other. It is particularly preferred in this case that the individual parts of the bearing cage are annular. The connection is made by riveting, gluing or otherwise connecting the bearing rings. Even if the thus formed inside cavities are completely surrounded by the material of the bearing cage arise, for example, at riveted parts of the bearing cage slots facing in the direction of the Wälzkörper- openings. These slots serve as delivery or "exit channels through which the lubricant is transported from the cavities in the direction of the Wälzkörper- openings.
Das Austreten des Schmierstoffs aus den Ausnehmungen erfolgt vorzugsweise durch Diffusion und/oder Konzentrationsgradienten oder aufgrund von Temperaturerhöhung, wobei diese Effekte insbesondere relevant sind, wenn die Ausnehmungen als Poren oder Kapillare ausgebildet sind. The leakage of the lubricant from the recesses is preferably carried out by diffusion and / or concentration gradients or due to temperature increase, these effects are particularly relevant if the recesses are formed as pores or capillary.
Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform unter Bezugnahme auf die Zeichnungen näher erläutert. The invention will be explained in more detail below with reference to a preferred embodiment with reference to the drawings.
Es zeigen: Show it:
Figur 1 einen schematischen Querschnitt eines Vakuumlagerelements in FIG. 1 shows a schematic cross section of a vacuum bearing element in FIG
Form eines Lagerkäfigs,  Shape of a bearing cage,
Figur 2 eine schematische Schnittansicht entlang der Linie II-II in Figur 1 und Figure 2 is a schematic sectional view taken along the line II-II in Figure 1 and
Figur 3 einen schematischen Querschnitt einer weiteren bevorzugten Figure 3 is a schematic cross section of another preferred
Ausführungsform eines Vakuumlagerelements in Form eines Lagerkäfigs.  Embodiment of a vacuum bearing element in the form of a bearing cage.
Das Vakuumlagerelement 10 weist einen kreisringförmigen Lagerkäfig 12 auf. Der Lagerkäfig 12 weist mehrere regelmäßig angeordnete Öffnungen 1.4 zur Aufnahme von Wälzkörpern auf. Im dargestellten Ausführungsbeispiel sind die Öffnungen 14 kreisringförrnig und dienen zur Aufnahme von Kugeln als Wälzkörper. An einer Innenseite 16 des Lagerkäfigs 12 ist im dargestellten Ausführungsbeispiel je Öffnung 14 eine Ausnehmung 18 ausgebildet. Hierbei sind die Ausnehmungen 18 identisch ausgebildet. Die Ausnehmungen 18 sind im dargestellten Ausführungsbeispiel teil-schalenförmig und in Richtung der Innenseite 16 des Lagerkäfigs 12 offen. Ferner sind die dargestellten Ausnehmungen 18 in Richtung der Öffnungen 14, die zur Aufnahme der Wälzkörper dienen, offen. Über eine Austrittsöffnung 20 der Ausnehmungen, die in Richtung der Öffnungen 14 weist, erfolgt somit der Austritt von in der Ausnehmung 18 angeordnetem Schmiermittel, das sodann von dem Wälzkörper aufgenommen wird. The vacuum bearing element 10 has an annular bearing cage 12. The bearing cage 12 has a plurality of regularly arranged openings 1.4 for receiving rolling elements. In the illustrated embodiment, the openings 14 are kreisringförrnig and serve to receive balls as rolling elements. On an inner side 16 of the bearing cage 12, a recess 18 is formed per opening 14 in the illustrated embodiment. Here, the recesses 18 are identical. The recesses 18 are in the illustrated embodiment partially-shell-shaped and in the direction of the inner side 16 of the bearing cage 12 open. Furthermore, the recesses 18 shown in the direction of the openings 14, which serve to receive the rolling elements, are open. Via an outlet opening 20 of the recesses, which faces in the direction of the openings 14, there is thus the exit of arranged in the recess 18 lubricant, which is then received by the rolling elements.
Bezogen auf eine Hauptdrehrichtung 22 des Lagerkäfigs 12, sind die Ausnehmungen 18 im dargestellten Ausführungsbeispiel jeweils hinter der dazugehörigen Öffnung 14 angeordnet. Hierdurch wird das in der Ausnehmung 18 vorhandene Schmiermittel aufgrund der auftretenden Kräfte im Wesentlichen in die Ausnehmung hineingedrückt. Based on a main direction of rotation 22 of the bearing cage 12, the recesses 18 are arranged in the illustrated embodiment in each case behind the associated opening 14. As a result, the lubricant present in the recess 18 is pressed into the recess substantially due to the forces occurring.
Zusätzlich oder anstelle der teil-schaSenförmigen Ausnehmungen 18 können innerhalb des Lagerkäfigs 12 auch Poren und/oder Kapillaren vorgesehen sein, die ebenfalls zur Aufnahme von Schmiermittel dienen. Diese Poren und Kapillaren sind vorzugsweise in Richtung der Öffnungen 14, die zur Wälzkörperaufnahme dienen und/oder in Richtung der Innenseite 16 offen. In addition to or instead of the part-shell-shaped recesses 18, pores and / or capillaries can also be provided within the bearing cage 12, which also serve to receive lubricant. These pores and capillaries are preferably in the direction of the openings 14, which serve for Wälzkörperaufnahme and / or towards the inner side 16 open.
Bei einer weiteren bevorzugten Ausführungsform des Lagerkäfigs (Fig. 3) sind dieselben und ähnliche Bauteile mit den selben Bezugszeichen gekennzeichnet. In a further preferred embodiment of the bearing cage (FIG. 3), the same and similar components are identified by the same reference numerals.
Bei diesem Ausführungsbeispiel ist der Lagerkäfig dreiteilig und besteht aus drei ringförmig ausgebildeten Elementen 24, 26, 28. Zur Ausbildung des Lagerkäfigs 12 sind die drei ringförmigen Elemente 24 ,26, 28 beispielweise über Nieten miteinander verbunden. Im Unterschied zu den Ausnehmungen 18 gemäß der ersten Ausführungsform sind bei dieser Ausführungsform Ausnehmungen 30 innerhalb des Lagerkäfigs angeordnet. Die im dargestellten Ausführungsbeispiel kugelförmig ausgebildeten Ausnehmungen 30 sind jeweils in Trennebenen 32 zwischen den beiden Teilen des Lagerkäfigs 24 und 26 bzw. 26 und 28 angeordnet. Dies hat den Vorteil, dass die Ausnehmungen 30 auf einfache Weise hergestellt werden können. Auch ist es möglich, die Ausnehmungen 30 mit Schmiermittel zu befüllen, bevor die ringförmigen Elemente 24, 26, 28 miteinander verbunden werden. In this embodiment, the bearing cage is in three parts and consists of three ring-shaped elements 24, 26, 28. To form the bearing cage 12, the three annular elements 24, 26, 28, for example, connected by rivets. In contrast to the recesses 18 according to the first embodiment, recesses 30 are arranged within the bearing cage in this embodiment. The spherical recesses 30 formed in the illustrated embodiment are each arranged in parting planes 32 between the two parts of the bearing cage 24 and 26 and 26 and 28 respectively. This has the advantage that the recesses 30 can be produced in a simple manner. It is also possible to fill the recesses 30 with lubricant before the annular elements 24, 26, 28 are connected to each other.
Die Trennebenen 32 sind derart angeordnet, dass diese durch die Wälzkörper- Öffnungen 14 verlaufen. Da zwischen den einzelnen ringförmigen Elemente 24, 26, 28 keine Dichtungen vorgesehen sind, kann Schmiermittel durch die als geringen Spalt wirkenden Trennebenen 32 in Richtung der Wälzkörper- Öffnungen 14 vordringen. Es erfolgt somit das erfindungsgemäß wesentliche Schmieren der Wälzkörper, insbesondere in dem Bereich, in dem die Wälzkörper an dem Lagerkäfig anliegen. The parting planes 32 are arranged such that they extend through the rolling element openings 14. Since no seals are provided between the individual annular elements 24, 26, 28, lubricant can penetrate through the separating planes 32 acting as a small gap in the direction of the rolling element openings 14. Thus, according to the invention, the rolling elements undergo substantial lubrication, in particular in the region in which the rolling elements bear against the bearing cage.
Selbstverständlich können die vorstehend beschriebenen Ausführungsformen auch miteinander kombiniert werden. Of course, the embodiments described above can also be combined with each other.

Claims

Vakuumlagerelement für Wälzlager, insbesondere zur Lagerung von Turbomolekularpumpen, mit einem Lagerkäfig ( 12) mit mehreren Öffnungen ( 14) zur Aufnahme von Wälzkörpern , wobei der Lagerkäfig ( 12) Ausnehmungen (18) zur Schmiermittelbereitstellung aufweist, dadurch gekennzeichnet, dass die Ausnehmungen (18,30) zumindest teilweise in Richtung der Wälzkörper-Öffnungen (14) offen sind, Vacuum bearing element for rolling bearings, in particular for the storage of turbomolecular pumps, with a bearing cage (12) having a plurality of openings (14) for receiving rolling elements, wherein the bearing cage (12) has recesses (18) for supplying lubricant, characterized in that the recesses (18, 30) are at least partially open in the direction of the rolling body openings (14),
Vakuumlagere!ement nach Anspruch 1, dadurch gekennzeichnet dass die Ausnehmungen (18,30) zumindest teilweise in Richtung einer Innenseite (16) des Lagerkäfigs (12) offen sind, A vacuum bearing according to claim 1, characterized in that the recesses (18, 30) are at least partially open in the direction of an inner side (16) of the bearing cage (12),
Vakuumlagerelement nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass jede Wälzkörper-Öffnung (14) genau einer Ausnehmung ( 18,30) zugeordnet ist. Vacuum bearing element according to claim 1 or 2, characterized in that each rolling element opening (14) is assigned to exactly one recess (18, 30).
Vakuumlagereiement nach einem der Ansprüche 1-3, dadurch gekennzeichnet, dass die Ausnehmungen (18) bezüglich der zugehörigen Wälzkörper-Öffnung (14) im Wesentlich auf der der Hauptdrehrichtung (22) des Lagerkäfigs (12) abgewandten Seite angeordnet sind. Vacuum bearing element according to one of claims 1-3, characterized in that the recesses (18) with respect to the associated rolling element opening (14) substantially on the main rotational direction (22) of the bearing cage (12) facing away from the side are arranged.
Vakuumlagereiement nach einem der Ansprüche 1-4, dadurch gekennzeichnet, dass zumindest ein Teil der Ausnehmungen ( 18) teil- schalenförmig ausgebildet ist und diese Ausnehmungen sowohl in Richtung einer zugehörigen Wälzkörper-Öffnung ( 14) als auch in Richtung der Innenseite (16) offen sind. Vacuum bearing element according to one of claims 1-4, characterized in that at least a part of the recesses (18) partially is formed shell-shaped and these recesses are open both in the direction of an associated rolling element opening (14) and in the direction of the inner side (16).
6. Vakuumlagerelement nach einem der Ansprüche 1-5, dadurch gekennzeichnet, dass zumindest ein Teil der Ausnehmung (18,30) als Poren und/oder Kapillaren ausgebildet ist. 6. Vacuum bearing element according to one of claims 1-5, characterized in that at least part of the recess (18,30) is formed as pores and / or capillaries.
7. Vakuumlagerelement nach einem der Ansprüche 1-6, dadurch gekennzeichnet, dass die Ausnehmungen (30) innerhalb des Lagerkörpers ( 12) angeordnet sind. 7. Vacuum bearing element according to one of claims 1-6, characterized in that the recesses (30) within the bearing body (12) are arranged.
8. Vakuumiagereiernent nach Anspruch 7, dadurch gekennzeichnet, dass die Ausnehmungen (30) bei einem mehrteiligen Lagerkörper (12) in einer Trennebene (32) angeordnet sind. 8. Vakuumiagereiernent according to claim 7, characterized in that the recesses (30) are arranged in a multi-part bearing body (12) in a parting plane (32).
9„ Vakuumiagereiernent nach einem der Ansprüche 1-8, dadurch gekennzeichnet, dass das Austreten des Schmierstoffs aus den Ausnehmungen, insbesondere aus den Poren und/oder Kapillaren, durch Diffusion und/oder aufgrund von Konzentrationsgradienten und/oder aufgrund von Temperaturerhöhungen erfolgt. 9 "Vakuumiagereiernent according to any one of claims 1-8, characterized in that the leakage of the lubricant from the recesses, in particular from the pores and / or capillaries, by diffusion and / or due to concentration gradients and / or due to temperature increases.
PCT/EP2011/055325 2010-04-09 2011-04-06 Vacuum bearing element WO2011124595A1 (en)

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DE102010014321.9A DE102010014321B4 (en) 2010-04-09 2010-04-09 Turbo molecular pump
DE102010014321.9 2010-04-09

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