WO2011113666A2 - Unité de balayage pour un dispositif de mesure de position optique - Google Patents

Unité de balayage pour un dispositif de mesure de position optique Download PDF

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Publication number
WO2011113666A2
WO2011113666A2 PCT/EP2011/052604 EP2011052604W WO2011113666A2 WO 2011113666 A2 WO2011113666 A2 WO 2011113666A2 EP 2011052604 W EP2011052604 W EP 2011052604W WO 2011113666 A2 WO2011113666 A2 WO 2011113666A2
Authority
WO
WIPO (PCT)
Prior art keywords
detector
scanning unit
detector elements
incremental
unit according
Prior art date
Application number
PCT/EP2011/052604
Other languages
German (de)
English (en)
Other versions
WO2011113666A3 (fr
Inventor
Reiner Burgschat
Mario Himmel
Original Assignee
Dr. Johannes Heidenhain Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr. Johannes Heidenhain Gmbh filed Critical Dr. Johannes Heidenhain Gmbh
Publication of WO2011113666A2 publication Critical patent/WO2011113666A2/fr
Publication of WO2011113666A3 publication Critical patent/WO2011113666A3/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Definitions

  • the present invention relates to a scanning unit for an optical position measuring device.
  • Known incremental optical position-measuring devices often comprise not only incremental graduations on the side of the sampled material measure, but also one or more reference markings or reference mark structures, via which reference signals can be generated.
  • the reference signals are used to produce the absolute reference to one or more defined relative positions of the two mutually movable elements whose relative movement is to be detected by means of the optical position measuring device.
  • the scanning unit must be designed accordingly on the scanning side.
  • the object of the present invention is to provide a scanning unit for an optical position-measuring device that is adaptable and easy to manufacture with very little effort on a wide variety of scanning configurations. Furthermore, it is desirable to have sufficient insensitivity to contamination on the material measure scanned thereby. This object is achieved by a scanning unit for an optical position-measuring device with the features of claim 1.
  • the scanning unit according to the invention for an optical position-measuring device comprises at least one light source and a detector arrangement with at least one incremental signal detector area and one reference ence signal detector area.
  • the incremental signal detector area is designed as a structured detector arrangement, which comprises a plurality of groups of individual detector elements.
  • the in-phase detector elements of several groups are electrically interconnected to generate incremental partial signals.
  • the reference signal detector area comprises a plurality of identically formed detector elements. Individual ones of the detector elements are electrically interconnected to generate reference signals.
  • a transparent insulating layer which has at least one contact opening above a plurality of predetermined detector elements, via which the corresponding detector elements can be electrically connected to each other.
  • the detector arrangement comprises two incremental signals Detector areas between which the reference signal detector area is arranged.
  • these are within the reference signal detector range
  • further detector elements which are not assigned to the first or second groups are electrically connected to one another and the number of further detector elements corresponds to the sum of the number of detector elements in the first and second groups.
  • the detector arrangement and the at least one light source can be arranged on top of a transparent carrier substrate, the photosensitive side of the detector arrangement and the light-emitting side of the light source being oriented in the direction of the top side of the carrier substrate.
  • an opaque and anti-reflective coating with window areas in front of the light source and the detector array is arranged.
  • a diaphragm with a light-permeable gap can be arranged on the carrier substrate in front of the light-emitting side of the light source.
  • the protective cap may comprise a cover element designed as a printed circuit board, on which one or more signal processing modules are arranged.
  • An optical position measuring device comprises, in addition to the scanning unit according to the invention, a material measure with an incremental graduation and one or more reference markings.
  • the configuration of the contact openings in the insulating layer above the detector elements of the reference signal detector area and / or the incremental signal detector area provides a simple configuration possibility for flexibly adapting the respective detector areas to different sampled structures on the sides of the material measure adapt. Only by changes to a single mask, namely that for the insulating layer, can a wide variety of configurations of the reference signal detector area and / or of the incremental signal detector area be realized.
  • the scanning unit according to the invention can in this case be used both in linear and in rotary optical position-measuring devices; as well as incident and transmitted light systems are thus feasible.
  • FIG 1 is a plan view of a part of the scanning unit according to the invention
  • FIGS. 2a-2c each show a variant of an optical position-measuring device with different embodiments of the scanning unit according to the invention
  • Figure 3 is a schematic representation of an optical
  • Position measuring device with a further embodiment of the scanning unit according to the invention
  • 4a and 4b are plan views of a portion of the sampled material measure and the reference signal detector area used for this purpose of a further embodiment of the scanning unit according to the invention.
  • FIG. 1 shows a plan view of a part of the detection plane of an exemplary embodiment of a scanning unit designed according to the invention for an optical position-measuring device. Shown in the figure is a detector arrangement 1 for generating incremental and reference signals. level signals comprising two incremental signal detector areas 10, 20 and a reference signal detector area 30 arranged therebetween. On the various detector areas 10, 20, 30, the coming of a - not shown - dimensional standard coming forth beam after they have acted there an incremental graduation and one or more reference marks.
  • the two incremental signal detector regions 10, 20 are each designed identically as a structured detector arrangement. These include a plurality of groups of identical optoelectronic detector elements which are in the form of elongated rectangles. The longitudinal axis of the detector elements extends in the indicated y-direction. In one possible embodiment, four such detector elements with a width of the rectangular narrow side in the x direction of 5 ⁇ and intervening gaps of 5 ⁇ are arranged approximately within a range of 40 ⁇ along the x-direction.
  • In-phase detector elements of a plurality of groups are electrically interconnected in the incremental signal detector regions 10, 20 to produce four incremental sub-signals with particular phase shifts; Typically, four incremental sub-signals are generated with the phase relationships 0 °, 90 °, 180 ° and 270 °.
  • the electrical contacting of the interconnected detector elements takes place in a metallization plane of the scanning unit. From the usual way interconnection of the four incremental sub-signals, the two periodic incremental signals are obtained with a phase shift of 90 °.
  • a so-called single-field scanning can be realized with the scanning beam path light source - transmission grating - incremental graduation - structured detector arrangement via incremental signal detector regions 10, 20 formed in this way.
  • This is characterized by the fact that the four incremental sub-signals can all be obtained from a single graduation period of the sampled incremental graduation. This results in particular in a uniform influencing of all four incremental partial signals in the case of local contamination of the incremental graduation. Eventual errors in signal processing can thus be minimized.
  • the reference signal detector area centrally arranged in the present example in the detector arrangement 1 of the scanning unit according to the invention 20 of the detector assembly 1 also comprises a plurality of identically constructed detector elements in the form of elongated rectangles, the longitudinal axis of each extends in the y-direction, ie perpendicular to the measuring direction x.
  • the detector elements in the reference signal detector area 20 are also arranged along the measuring direction x with a certain periodicity. In a possible embodiment, approximately detector elements are provided with a width of the rectangular narrow side of 32 ⁇ , which are arranged in a periodic grid of 40 ⁇ along the measuring direction x.
  • an insulating layer transparent to the radiation used is arranged in the detector arrangement.
  • the insulating layer has contacting openings above those detector elements which are to be electrically connected to each other via the metallization level. Due to the contacting openings in the insulating layer, it is possible in a particularly simple manner to flexibly interconnect the various detector elements of the reference signal detector area 20. Only by changing a single lithography mask can a wide variety of variants of reference signal detector regions 20 be formed.
  • the reference signal detector region 20 can be configured in this way, in particular in such a way that differently formed reference markings on the material measure can be scanned.
  • reference marks which consist only of individual graduation marks or graduation ranges or else so-called coded reference marks, which comprise a large number of graduation marks in a specific geometrical arrangement, etc.
  • the electrical contacting of the detector elements in the incremental signal detector areas can also be undertaken.
  • the detector configuration can be different graduation periods of the scanned incremental graduation.
  • FIGS. 2a-2c three different such sample configurations are shown schematically.
  • the corresponding position-measuring devices each comprise a material measure as well as the scanning unit movable along the measuring direction x.
  • the material measure is in each case designed as a linear measuring standard which extends along the measuring direction x and is scanned in the incident light via the scanning unit according to the invention.
  • the measuring direction x is oriented perpendicular to the plane of the drawing.
  • the measuring scale and the scanning unit are e.g. connected to each other along the measuring direction x movable machine parts whose relative position is to be determined.
  • the position-dependent incremental and reference signals generated via the position-measuring device are further processed by a downstream sequential electronic unit which controls the positioning of the movable machine parts via it.
  • a material measure 40 is provided which comprises two adjacently arranged tracks with an incremental graduation 42.1 and one or more reference markings 42.2; the two tracks extend along the measuring direction x.
  • the arranged on a scale carrier 41 incremental 42.1 is formed in the present example as a reflection division. This consists of periodically arranged in the measuring direction x division regions of different reflectivity.
  • one or more reference marks 42.2 are formed in the parallel next to it lane, for example, each consisting of a single low-reflective division region, while the area surrounding this partition region of this track is designed to be highly reflective.
  • the inventively embodied scanning unit 50 of this optical position-measuring device comprises a transparent carrier substrate 53, on the upper side of which two light sources 51 .1, 51 .2 as well as a so-called opto-chip 52 are arranged.
  • One of the two light sources 51 .1 is used here for illuminating or scanning the incremental graduation 42. 1 on the measuring graduation 40; the other light source 51. 2 for scanning the reference marking 42. 2.
  • Opto-chip 52 includes i.a. on the carrier substrate 53 side facing a detector assembly 1, as described with reference to Figure 1.
  • the opto-chip 52 comprises electronic components (not shown) for further processing of the position-dependent signals generated via the detector arrangement 1.
  • only a single track with an incremental graduation 142 is arranged on a scale carrier 141 on the side of the scanned measuring graduation 140.
  • the reference mark is integrated in the incremental graduation 142. This can e.g. by omitting a plurality of adjacent division regions of the incremental division 142 e rfo l g e n, u m d ergesta l t ei ne detectable Aperiodizmaschine in the incremental graduation 142 form.
  • a plurality of reference marks can be formed in the incremental pitch 142 in this way.
  • the scanning unit 150 On the side of the scanning unit 150 according to the invention, in contrast to the previously explained embodiment of FIG. 2a, only a single light source 151 is arranged on the upper side of the carrier substrate 153, which serves to scan or illuminate the incremental graduation 142 with the reference marking integrated therein.
  • an opto-chip 152 is further arranged on the upper side of the carrier substrate 153, which in turn comprises a detector arrangement 1 according to FIG. 1 as well as further electronic components for signal processing.
  • the incremental graduation 142 differs in particular from the design of the reference signal detector range from the first example. It is now necessary to electrically interconnect other detector elements of the reference signal detector area. However, this can be done as explained above without much effort through corresponding openings in the insulating layer.
  • FIG. 2c shows a further variant of an optical position-measuring device with the complete construction of a further embodiment of the scanning unit 250 according to the invention.
  • the scanning concept provided in this example basically corresponds to that of FIG. 2a. That is, on the side of the measuring scale 240, two parallel tracks with an incremental pitch 242.1 and one or more reference markings 242.2 are provided.
  • two light sources 251 .1, 252,2 are placed on the carrier substrate 253, which illuminate the respective tracks on the scale 240.
  • the opto-chip 252 with the detector arrangement 1 is arranged on the upper side of the carrier substrate 253.
  • the carrier substrate 253 On the upper side of the carrier substrate 253 are further - not shown - conductor track structures arranged, via which the opto-chip 252 and the light sources 251 .1, 251 .2 are electrically contacted. Furthermore, so-called transmission grating structures are arranged in front of the two light sources 251 .1, 251 .2 for reference signal and incremental signal generation on the upper side of the carrier substrate 253. In this case, the transmission grating may be formed, for example, as a diaphragm with a translucent gap, the width of the gap being matched to the structure of the material measure 340 scanned therewith. On the underside of the carrier substrate 253, an antireflecting and opaque coating is further arranged, which has light-permeable window areas in front of the light sources 251 .1, 251 .2 and the various detector areas.
  • a protective cap which consists of the lateral carrier elements 254.1, 254.2 and the cover element 255, is additionally arranged on the carrier substrate 253.
  • the various elements of the protective cap surround or encapsulate the opto-chip 252 on the carrier substrate 253 and serve i.a. for additional protection of the Opto-Chip 252 against mechanical damage.
  • the cover member 255 is preferably formed as a printed circuit board with corresponding conductor tracks.
  • a further signal processing module 256 is also arranged, via which the further processing of the signals of the opto chip 252 takes place; Of course, several more signal processing blocks can be provided on the circuit board here. With regard to this structure, reference is also made to EP 1 1 14 662 B1 of the Applicant.
  • the scanning is integrated into the reference mark integrated in the incremental graduation with the aid of the scanning unit according to the invention.
  • the material measure 340 with the reference mark 343 integrated in the incremental graduation 342 only that part of the scanning unit 350 that is needed to generate the reference signal is shown in this figure.
  • a single light source 351 is provided for generating the various position-dependent signals, which is formed for example as an LED.
  • the light-emitting side of the light source is oriented in the direction of the carrier substrate 353, wherein a width matched to the periodicity of the incremental graduation 342 is formed on the carrier substrate 353 in front of the light source 351.
  • the reference mark 343 integrated into the incremental graduation 342 is formed at the location of the respective reference position along the measuring path in the present example by omitting certain non-reflecting partial regions from the periodic incremental graduation 342. According to FIG. 3, approximately three non-reflective subregions shown in dark are omitted.
  • the resulting aperiodic structure acts as a detectable reference mark 343.
  • this aperiodic structure or reference mark 343 it is necessary to electrically connect certain detector elements of this detector region 330 to one another on the scanning unit 350 or in the reference signal detector region 330 arranged there.
  • these are the detector elements 330.1, 330.2, 330.3, which detect a Gaussian signal maximum with respect to the radiation reflected by the material measure 340 when the reference mark 343 is moved over, which is illuminated by the light source 351.
  • the width of the Gaussian reference signal generated in this way can be adjusted by selecting the width of the transmission gap in front of the light source 351.
  • this can of course also be other detector elements in the reference signal detector region 330.
  • FIG. 4 a shows a plan view of a part of an incremental graduation 442 which is formed integrally in the one reference mark.
  • the dark portions of the incremental graduation 442 are non-reflective, while the bright portions are reflective.
  • the reference mark 443 integrated in the incremental graduation 442 is formed in the present example by omitting in each case a non-reflective subregion from the periodic arrangement of reflective and non-reflecting subregions at six locations.
  • FIG. 4b shows a partial view of the reference signal detector region 430, which is suitable for scanning the reference marking from FIG. 4a.
  • a first group of interconnected triplets of detector elements 430.1a-430.6a are electrically connected to produce a first fractional reference signal thereabove when the scanning unit passes over the reference mark 443.
  • a second group of triplets of interconnected detector elements 430.1 b - 430.6b is electrically conductively connected to each other in order to generate a second sub-reference signal, which has a certain phase shift relative to the first sub-reference signal.
  • the selection of the position of the second group of detector elements in the reference signal detector area 430 also takes place as a function of the aperiodic structure of the reference mark 443.
  • the embodiment of the aperiodic structure of the reference marking 443 is preferably carried out in such a way that when passing the same by means of the scanning unit only one of the interconnected triplets of detector elements of a group detects a signal. Only at a single position do all six groups of three of a group detect a signal and thus generate the reference signal. In this way, insensitivity of the scan is guaranteed against any contamination of the material measure.
  • the remaining detector elements in the reference signal detector region 430 are also all electrically connected to one another and thus provide a compensation signal that can be used for the DC compensation of the sub-incremental signals.
  • the signal evaluation it has proven advantageous if the sum of the number of detector elements from the first and second groups is selected to be identical to the number of remaining interconnected detector elements from which the compensation signal is derived.
  • the sub-reference signals of the first and second groups are connected in sum and difference to each other, converted into rectangular signals and generated via a logical UN D link, a further processable reference signal.
  • a further processable reference signal With regard to such a generation of a reference signal, reference is made to EP 1 050 742 B1 of the Applicant.
  • an aperiodic structure with an identically formed reference mark could also be arranged in a parallel track adjacent to the incremental graduation, as in FIG. 2a. This could then also be scanned with a reference signal detector range, as shown in Figure 4b.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

L'invention concerne une unité de balayage pour un dispositif de mesure de position optique. Celle-ci comprend une source lumineuse et un système de détection ayant au moins une zone de détection de signaux incrémentiels et une zone de détection de signaux de référence. La zone de détection de signaux incrémentiels est conçue comme un système de détection structuré qui comprend une pluralité de groupes d'éléments de détection individuels. Les éléments de détection de même phase de plusieurs groupes sont électriquement interconnectés pour produire des signaux incrémentiels partiels. La zone de détection de signaux de référence comprend une pluralité d'éléments de détection conçus de manière identique. Certains des éléments de détection sont électriquement interconnectés pour produire des signaux de référence. Au-dessus des éléments de détection de la zone de détection de signaux incrémentiels et/ou de la zone de détection de signaux de référence est disposée une couche isolante transparente qui présente au-dessus de plusieurs éléments de détection déterminés au moins une ouverture de mise en contact par l'intermédiaire de laquelle les éléments de détection correspondants peuvent être électriquement reliés les uns aux autres.
PCT/EP2011/052604 2010-03-16 2011-02-22 Unité de balayage pour un dispositif de mesure de position optique WO2011113666A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010002902A DE102010002902A1 (de) 2010-03-16 2010-03-16 Abtasteinheit für eine optische Positionsmesseinrichtung
DE102010002902.5 2010-03-16

Publications (2)

Publication Number Publication Date
WO2011113666A2 true WO2011113666A2 (fr) 2011-09-22
WO2011113666A3 WO2011113666A3 (fr) 2012-01-05

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WO (1) WO2011113666A2 (fr)

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DE102015201297B4 (de) * 2015-01-26 2024-03-14 Bundesdruckerei Gmbh Vorrichtung und Verfahren zum Bestimmen einer Ausrichtung zwischen einer Vorderseitenmarkierung und einer Rückseitenmarkierung eines Dokumentenkörpers

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1114662B1 (fr) 2000-01-08 2005-10-12 Intex Recreation Corp. Structures de jeu gonflables interconnectées
EP1050742B1 (fr) 1999-05-07 2008-06-18 Dr. Johannes Heidenhain GmbH Unité de balayage pour un dispositif optique de mesure de position

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19752511A1 (de) * 1996-12-07 1998-06-10 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmeßeinrichtung
DE19855828A1 (de) * 1998-12-03 2000-06-08 Heidenhain Gmbh Dr Johannes Dreidimensionales Meßmodul
DE19917950A1 (de) * 1999-04-21 2000-10-26 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Dünnschichtsensor und Verfahren zu dessen Herstellung
DE10022619A1 (de) * 2000-04-28 2001-12-06 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
JP2002009328A (ja) * 2000-06-21 2002-01-11 Mitsutoyo Corp 受光素子アレイ及びその製造方法
JP3589621B2 (ja) * 2000-07-03 2004-11-17 株式会社ミツトヨ 光電式エンコーダ及びそのセンサヘッドの製造方法
DE10043828B4 (de) * 2000-09-06 2016-11-10 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine optische Positionsmesseinrichtung
DE10116599A1 (de) * 2001-04-03 2003-02-06 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
JP2004163302A (ja) * 2002-11-14 2004-06-10 Harmonic Drive Syst Ind Co Ltd 光学式エンコーダ
DE10338991A1 (de) * 2003-08-18 2005-03-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7102123B2 (en) * 2003-10-28 2006-09-05 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Reflective imaging encoder
DE10357654A1 (de) * 2003-12-10 2005-07-14 Dr. Johannes Heidenhain Gmbh Abtastkopf für optische Positionsmeßsysteme

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1050742B1 (fr) 1999-05-07 2008-06-18 Dr. Johannes Heidenhain GmbH Unité de balayage pour un dispositif optique de mesure de position
EP1114662B1 (fr) 2000-01-08 2005-10-12 Intex Recreation Corp. Structures de jeu gonflables interconnectées

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DE102010002902A1 (de) 2011-09-22
WO2011113666A3 (fr) 2012-01-05

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