WO2011108803A2 - Procédé de fabrication d'actionneur hélicoïdal tridimensionnel - Google Patents

Procédé de fabrication d'actionneur hélicoïdal tridimensionnel Download PDF

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Publication number
WO2011108803A2
WO2011108803A2 PCT/KR2010/008655 KR2010008655W WO2011108803A2 WO 2011108803 A2 WO2011108803 A2 WO 2011108803A2 KR 2010008655 W KR2010008655 W KR 2010008655W WO 2011108803 A2 WO2011108803 A2 WO 2011108803A2
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WIPO (PCT)
Prior art keywords
actuator
photonic
dimensional
hema
polar
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PCT/KR2010/008655
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English (en)
Korean (ko)
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WO2011108803A3 (fr
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정광운
진광용
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전북대학교산학협력단
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Publication of WO2011108803A2 publication Critical patent/WO2011108803A2/fr
Publication of WO2011108803A3 publication Critical patent/WO2011108803A3/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C67/00—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0019—Flexible or deformable structures not provided for in groups B81C1/00142 - B81C1/00182

Definitions

  • the present invention combines a high-molecular hydrogel, photonic crystal, and three-dimensional spiral structure, and uses a new actuator that can be applied to fabricate a new device using characteristics that change shape, color, and structure according to external stimuli. Is to implement.
  • Actuator manufacturing method based on the basic principle of the existing actuator through the introduction of photonic crystals and hydrogel to provide a basis for a variety of color and morphological changes to have a more stubborn and higher functionality than the conventional actuator
  • the present invention provides a method of manufacturing a photonic actuator applicable to a technical field such as photon, electric and magnetic devices and chemical and biological sensors.
  • thermosetting reaction by adding and infiltrating a nonpolar PDMS (polydimethylsiloxane) precursor to the space of the photonic crystal;
  • a fifth step of performing UV curing by applying a polar polyurethane (PU) / 2-hydroxyethylmethacrylate (HEMA) layer Characterized in that it comprises a.
  • PU polar polyurethane
  • HEMA 2-hydroxyethylmethacrylate
  • the mold is characterized in that the tilting of the mold 0 ⁇ 45 ° in the process of the thermosetting reaction of the third step.
  • the component ratio of PU: HEMA in the PU / HEMA layer is characterized in that 1 ⁇ 9: 9 ⁇ 1.
  • Actuator manufacturing method can implement a new one-dimensional scroll structure and three-dimensional photonic actuator capable of simultaneously adjusting the color and shape by external stimulation by the combination of hydrogel, photonic crystal, and actuator
  • the manufacture of new actuators incorporating technology has excellent capabilities for applications in photonics, electricity, magnetic devices and chemical and biological sensors and related materials.
  • Tg glass transition temperature
  • HEMA component ratio
  • Figure 2 (a) is an actuator manufacturing process of the one-dimensional kenti lever structure.
  • Figure 2 (b) is a SEM photograph of the colloidal single crystal represented by [111].
  • Figure 2 (c) is a SEM image of a single crystal represented by.
  • Figure 2 (d) is a SEM photograph of the single crystal after the addition of PDMS
  • Figure 2 (e) is a photograph of the actuator of the one-dimensional kentilever structure.
  • Figure 3 is a 270nm silica colloidal photonic crystal produced by the manufacturing process of FIG.
  • Figure 5a is a scroll actuator photograph produced.
  • Figure 5b is a photograph showing the actuating process acting along the y-axis by the solvent.
  • FIGS. 5A and 5B are photographs showing the sides, the stomach, and the middle of FIGS. 5A and 5B, (a) a left-hand scroll actuator in a polar acetic acid solvent, and (b) a right-hand scroll actuator in a non-polar nucleic acid solvent.
  • Figure 7 (a) is a one-dimensional scroll photonic actuator structure, (b) is a three-dimensional polypeptide spring spiral actuator structure diagram, (c) is a schematic diagram of a three-dimensional DNA double spiral actuator.
  • FIG. 8 is a view showing a manufacturing process of a three-dimensional spiral photonic actuator.
  • FIG. 9 is a photograph of the operation of a three-dimensional spring photonic actuator in a capillary.
  • FIG. 10 is a photograph of the operation of a three-dimensional double helical actuator under nonpolar hexane solvent conditions.
  • 11 is a photograph showing computer simulation data of a three-dimensional double spiral actuator.
  • thermosetting reaction Adding a non-polar PDMS precursor to the space of the photonic crystal and infiltrating the thermosetting reaction;
  • the mold is produced using a unit in the mold can be observed with the eyes, the size of the actuator is characterized in that the production can be up to 100 ⁇ m ⁇ 1m.
  • the mold is characterized in that the tilting of the mold 0 ⁇ 45 ° in the process of the thermosetting reaction of the third step.
  • the component ratio of PU to HEMA in the PU / HEMA layer is characterized in that 1 ⁇ 9: 9 ⁇ 1.
  • the actuator according to the present invention by combining a polymer hydrogel, photonic crystal, and three-dimensional spiral structure, a new three-dimensional photonic actuator that simultaneously changes shape and color according to an external stimulus is intended.
  • the simplest and simplest existing actuator is a one-dimensional cantilever structure that is mainly used in MEMS (microelectromechanical systems).
  • the one-dimensional centrifugal actuator of the present invention was manufactured using silicon nanoparticles and a polymer.
  • the polymer used in the actuator is considered to be an ideal material because it can change the surface freely and easily change the shape and size in response to the external environment compared to the silicon inorganic material.
  • the polymer material is used as a material for silicon-based electronic devices and bio devices that are currently being studied in various fields because they can easily change molecular structure and have chemical and mechanical stability.
  • a flexible, transparent, heat-curable polydimethylsiloxane (PDMS) and a UV-curable polyurethane / 2-hydroxyethylmethacrylate (PU / HEMA) elastomer composite are respectively non-polar ( Selective swelling experiments were performed in polar / nonpolar solvents by selecting hydrophobic) and polar (hydrophilic) materials.
  • PDMS polydimethylsiloxane
  • PU / HEMA 2-hydroxyethylmethacrylate
  • Figure 1 (a) is a change in Tg due to the difference in the component ratio of HEMA
  • Figure 1 (b) is a change in physical properties according to the difference in the component ratio of PU / HEMA.
  • DSC differential scanning calorimeter
  • DMA dynamic mechanical analysis
  • UMT universal mechanical tester
  • PU and HEMA were manufactured with various component ratios, and the thermal and mechanical analysis showed the best thermal and mechanical properties at the composition ratio of 7: 3, and was selected as the optimal PU / HEMA component ratio for the manufacture of actuators.
  • a one-dimensional scroll photonic actuator capable of reversibly adjusting colors and shapes in both directions depending on the polarity or nonpolarity of the solvent may be implemented.
  • the one-dimensional scroll photonic actuator was manufactured through a total of five steps as shown in (a) of FIG. 2, and the crystal structure of the photonic crystal formed during the assembly process from (b) to (d) of FIG. was observed by SEM.
  • thermosetting reaction Adding a non-polar PDMS precursor to the space of the photonic crystal and infiltrating the thermosetting reaction;
  • Applying a polar PU / HEMA layer is to undergo a fifth step of performing UV curing.
  • FIG. 2 (b) is an SEM photograph of the colloidal single crystal represented by [111]
  • FIG. 2 (c) is an SEM photograph of the colloidal single crystal represented by [011].
  • FIG. 2D is a photograph of SEM of a single crystal after adding PDMS.
  • the one-dimensional scroll photonic actuator separated from the mold after curing is shown in FIG. 3.
  • the fabricated one-dimensional scroll photonic actuator is transparent in the visible region. This is because, firstly, the PDMS layer and the PU / HEMA layer material do not absorb light in the visible region, and secondly, the refractive index (n) of the PDMS layer and silica colloid is equal to 1.43.
  • FIG. 4 is a reflection spectrum of the assembled photonic crystal
  • (a) of FIG. 4 is silica
  • (b) is PDMS / silica
  • FIG. 4 (c) is PDMS / silica in a hexane solvent
  • FIG. 4 (D) is the spectrum of PDMS / silica in acetic acid solvent.
  • the silica colloidal crystal having a diameter of 270 nm used in the present invention exhibits a reflection peak of 70% maximum intensity at a green wavelength of 596 nm, but the reflection peak disappears through infiltration with PDMS having the same refractive index as silica, thereby obtaining a transparent sample. .
  • the reflection spectra under solvent conditions show a different pattern: the swelled silica / PDMS photonic crystals in hexane solvent show a broad and low intensity 7% reflection peak at a wavelength of 459 nm, while the swelled silica / PDMS photo in acetic acid solvent The nick crystal will show a reflection peak of 20% maximum intensity at a wavelength of 659 nm.
  • the reason for the occurrence of such a reflection peak is that as soon as the solvent infiltrates the colloidal template, low transmittance is observed due to the high crystallinity of the silica colloidal crystal in the silica / PDMS layer.
  • the one-dimensional scroll photonic actuator is the x-axis in the width direction, the y-axis in the xy-plane according to the three-dimensional Cartesian coordinate system It is perpendicular to the longitudinal direction, and the z axis is expressed in the thickness direction.
  • the prepared scroll photonic actuator was stretched in the long axis direction.
  • the scroll photonic actuator was bent toward the PDMS layer having a larger restoring force as shown in FIG. Therefore, in order to give the direction of the actuator, the left / right hand orientation was determined based on the PDMS layer with the + z axis as shown by the Cartesian coordinate system.
  • the left / right hand orientation of the actuator acts as an important distinguishing factor in distinguishing the color and form according to the solvent in the actuator driving experiment.
  • the fabricated one-dimensional scroll photonic actuator was placed in a polar / non-polar solvent to observe changes in structure and color according to swelling time.
  • the one-dimensional scroll photonic actuator is blue, yellow / green, and red according to a viewing point in which the deformation occurs in the right hand direction in acetic acid, a polar solvent, according to the left / right hand orientation.
  • hexane which is a non-polar solvent, as shown in FIG.
  • one-dimensional scroll photonic actuator can be realized by the destruction of one-dimensional symmetrical structure, and reversible actuating with one-dimensional cantilever structure that shows left / right hand orientation and various colors according to the polarity / non-polarity of solvent. Causes a reaction.
  • the advanced three-dimensional spiral photonic actuator is an actuator that can simultaneously adjust color and shape according to external stimulus by applying a spiral structure to one-dimensional scroll photonic actuator. It is a spring spiral like polypeptide and double spiral like DNA. Two three-dimensional spiral photonic actuators of structure were fabricated. The three-dimensional spiral photonic actuator realizes a spiral structure by changing the symmetrical structure in the one-layer scroll photonic actuator having a bilayer structure, and responds to the external environment change more sensitively and accurately.
  • the same swelling action as that of the one-dimensional scrolling structure is used as the driving force of the actuator, and the left / right hand is swelled by the selective swelling action depending on the polarity of the solvent in the PU / HEMA layer or the PDMS layer.
  • Three-dimensional spring spiral structure in the direction is implemented.
  • the fabrication of the three-dimensional spring spiral photonic actuator is performed through the process shown in FIG. 8, and the manufacturing process is the same as that of the one-dimensional scroll photonic actuator, and the material used in the manufacturing is also the same PDMS and PU / as the one-dimensional scroll photonic actuator. HEMA was used.
  • the difference between the manufacturing process of the one-dimensional scroll photonic actuator and the three-dimensional spring spiral photonic actuator is the formation of silica nanocolloidal FCC single crystals followed by infiltration of non-polar PDMS precursors to tilt the mold 0-45 ° during thermal curing. This is because the PDMS layer and the PU / HEMA layer are arranged diagonally to implement a spiral structure in the swelling process.
  • the slope of the mold was 11.3 ° as an angle that takes into account the lengths of the x and z axes.
  • the manufacturing process of the 3D double spiral photonic actuator is the same as that of FIG. 8, and two prepared spring spiral photonic actuators are prepared and bonded by PU / HEMA layers to yz-plane. 9 and 10 show the manufactured three-dimensional spring helical photonic actuator to observe the color and shape over time under polar / non-polar solvent conditions.
  • the three-dimensional spring helical photonic actuator was subjected to swelling experiments in a confined space called a capillary tube to more accurately observe the distortion in the helical structure.
  • FIG. 9 is a photograph of the operation of a three-dimensional spring photonic actuator in a capillary, illustrating: (a) swelling in the right hand direction in a nonpolar hexane solvent in a 1 nm diameter capillary; (b) in the left hand direction in a polar acetic acid solvent. Swelled state, (c) loosened in the right hand direction, (d) loosened in the left hand direction, (e) loosened in the right hand direction in a 2 mm diameter capillary tube, and (f) loosened in the left hand direction.
  • the diameter of the capillary tube used in the swelling experiment was tested using (a) to (d) of Fig. 11 and Fig. 11 (e) and (f) of 2 mm, and the three-dimensional spring spiral photonic actuator in the capillary was polarized. It was placed in the left hand / right hand direction by acting on a nonpolar solvent.
  • the three-dimensional double spiral photonic actuator is spontaneously implemented through a swelling process under non-polar hexane solvent conditions.
  • the three-dimensional double helical photonic actuator uses a non-polar hexane solvent to implement a double helical structure by using a selective swelling action on the non-polar PDMS layer surrounding both sides of the polar PU / HEMA layer (Fig. 10 ( a)). Also, in order to confirm the degree of swelling of the PDMS layer and the PU / HEMA layer, both ends are partially cut by the yz-plane of the three-dimensional double spiral photonic actuator in FIG. 10 (b), and the nonpolarity is the same as in FIG. 10 (a). Swelling was observed in hexane solvent.
  • the three-dimensional double spiral photonic actuator shows a difference in the swelling process that there is no left hand / right hand orientation with the one-dimensional scroll structure or the three-dimensional spring spiral structure.
  • the PDMS layer is asymmetrically arranged on both sides of the PU / HEMA layer, so that the left / right hand orientation is not established.
  • the PDMS layer shows a double helical structure surrounded by the outward shape. A distinct color is indicated in the hexane solvent of.
  • FIG. 11 is computer simulation data of a three-dimensional double spiral actuator, and the principle of driving and twisting the dual spiral actuator is understood through computer simulation in which the amount of stress applied to the inside of the actuator in the three-dimensional double spiral photonic actuator is measured.
  • the present invention can be used in the manufacture of new devices in the field of mechanical, electrical and electronic biotechnology in the nano / micro unit and is industrially applicable.

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  • Microelectronics & Electronic Packaging (AREA)
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Abstract

La présente invention concerne un procédé de fabrication d'un actionneur photonique. La présente invention comporte les cinq étapes suivantes : (1) la formation d'un cristal unique, cubique à faces centrées, nanocolloïde, de silice, sur une surface d'un moule, qui a été traité par du fluorosilane ; (2) la formation d'un cristal photonique par un autoassemblage dudit cristal unique ; (3) l'ajout d'un précurseur de poly(diméthylsiloxane) non polaire pour l'infiltration et le durcissement thermique de ladite zone de cristallisation photonique ; (4) l'ajout d'une monocouche de méthacryloxypropyl-triméthoxysilane sur une couche de poly(diméthylsiloxane) traitée au plasma d'oxygène, et (5) l'application d'une couche polaire de PU-HEMA et le durcissement aux ultraviolets. La présente invention concerne un procédé de fabrication, d'un nouvel actionneur, qui rassemble une variété de technologies, et l'invention permet d'obtenir une nouvelle structure en spirale, unidimensionnelle, et un actionneur photonique, tridimensionnel, leurs couleurs et leurs formes pouvant être réglées simultanément, au moyen d'un stimulus externe, à partir de la combinaison d'un hydrogel, d'un cristal photonique et d'un actionneur.
PCT/KR2010/008655 2010-03-04 2010-12-06 Procédé de fabrication d'actionneur hélicoïdal tridimensionnel WO2011108803A2 (fr)

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KR10-2010-0019370 2010-03-04
KR1020100019370A KR101177981B1 (ko) 2010-03-04 2010-03-04 3차원 나선형 액추에이터의 제조방법

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WO2011108803A3 WO2011108803A3 (fr) 2011-11-10

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6147582A (en) * 1999-03-04 2000-11-14 Raytheon Company Substrate supported three-dimensional micro-coil
US6245444B1 (en) * 1997-10-02 2001-06-12 New Jersey Institute Of Technology Micromachined element and method of fabrication thereof
KR20020036964A (ko) * 1999-06-28 2002-05-17 추후제출 마이크로 가공된 탄성중합체 밸브 및 펌프 시스템

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6245444B1 (en) * 1997-10-02 2001-06-12 New Jersey Institute Of Technology Micromachined element and method of fabrication thereof
US6147582A (en) * 1999-03-04 2000-11-14 Raytheon Company Substrate supported three-dimensional micro-coil
KR20020036964A (ko) * 1999-06-28 2002-05-17 추후제출 마이크로 가공된 탄성중합체 밸브 및 펌프 시스템

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KWANG-UN JEONG ET AL. JOURNAL OF METERIALS CHEMISTRY vol. 19, 2009, pages 1956 - 1959 *

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KR20110100409A (ko) 2011-09-14
KR101177981B1 (ko) 2012-08-28
WO2011108803A3 (fr) 2011-11-10

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