WO2011105286A1 - Head using near-field light, and information recording/reproducing device provided therewith - Google Patents

Head using near-field light, and information recording/reproducing device provided therewith Download PDF

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Publication number
WO2011105286A1
WO2011105286A1 PCT/JP2011/053437 JP2011053437W WO2011105286A1 WO 2011105286 A1 WO2011105286 A1 WO 2011105286A1 JP 2011053437 W JP2011053437 W JP 2011053437W WO 2011105286 A1 WO2011105286 A1 WO 2011105286A1
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WO
WIPO (PCT)
Prior art keywords
light
core
recording medium
slider
scatterer
Prior art date
Application number
PCT/JP2011/053437
Other languages
French (fr)
Japanese (ja)
Inventor
雅一 平田
徳男 千葉
学 大海
陽子 篠原
幸子 田邉
良和 田中
Original Assignee
セイコーインスツル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツル株式会社 filed Critical セイコーインスツル株式会社
Priority to JP2012501758A priority Critical patent/JP5718893B2/en
Publication of WO2011105286A1 publication Critical patent/WO2011105286A1/en

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
    • G11B5/314—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B2005/0002—Special dispositions or recording techniques
    • G11B2005/0005—Arrangements, methods or circuits
    • G11B2005/0021—Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal

Definitions

  • the present invention relates to a head for recording and reproducing various kinds of information on a recording medium using near-field light and an information recording / reproducing apparatus including the head.
  • An information recording / reproducing apparatus using a heat-assisted magnetic recording system requires a near-field light element for generating near-field light and an optical system for driving it.
  • Various types of near-field light elements and optical systems have been devised.
  • Patent Document 1 and Patent Document 2 there is provided a configuration in which a light scatterer made of gold or the like that generates near-field light is provided adjacent to the main magnetic pole, and the light scatterer is irradiated with light from the laser.
  • a light scatterer made of gold or the like that generates near-field light is provided adjacent to the main magnetic pole, and the light scatterer is irradiated with light from the laser.
  • Patent Document 1 As shown in FIGS. 3 and 18, light from a laser is irradiated to a light scatterer by air propagation. Although the light from the laser is squeezed by the lens, since the size of the light scatterer is small, a leaked light component that is not irradiated to the light scatterer increases. Most of the leakage light is applied to the recording medium and heats the recording medium. Originally, heat-assisted magnetic recording that realizes high-density recording by heating a minute area of a recording medium with near-field light, but only the minute area cannot be heated due to leakage light, and therefore high density Recording may not be possible.
  • a light scatterer near-field light scattering plate
  • the cross-sectional area of the portion that becomes the optical path of the optical waveguide is larger than that of the light scatterer, leakage light is generated in the same manner as in Patent Document 1, and there is a possibility that high-density recording cannot be realized in the same manner.
  • the present invention has been made in view of such circumstances, and its object is to propose a configuration in which the recording medium can be heated only by the near-field light component without leaking light, thereby achieving high-density recording. It is an object of the present invention to provide a near-field light using head that can be realized and an information recording / reproducing apparatus including the head.
  • the near-field light utilization head for thermally-assisted magnetic recording heats the recording medium with near-field light and applies a recording magnetic field to the recording medium, thereby causing magnetization reversal and recording information.
  • a slider disposed opposite to the surface of the recording medium, an optical waveguide having a core that is fixed to the slider and propagates a light beam, and a light shield that covers at least a portion of the tip of the core on the recording medium side that the optical axis crosses.
  • the light beam propagated by the core does not leak out by the light shielding film, but once as the near-field light via the surface plasmon on the light scatterer. First occurs on the slider surface. Therefore, only the near-field light is irradiated to the recording medium, and the propagation light from the core is not irradiated. Therefore, since only a minute region corresponding to the size of the near-field light in the recording medium is heated, the density of information written to the recording medium can be improved.
  • the near-field light using head for thermally assisted magnetic recording according to the present invention is characterized in that the optical waveguide that narrows the spot size of the light beam toward the tip of the core is a spot size converter. .
  • the spot size of the light propagating through the spot size converter can be reduced, so that light can be efficiently irradiated onto a light scatterer having a small size. it can. Thus, energy efficient information recording can be realized.
  • the light shielding film is provided obliquely with respect to the light scatterer, and the light shielding film and the light scattering are arranged toward the recording medium side of the core. It is provided so that the space
  • the light propagating through the core can be concentrated so as to be brought closer to the light scatterer by the light shielding film.
  • the scatterer can be irradiated, and near-field light can be generated with higher efficiency.
  • a near-field light utilization head for thermally assisted magnetic recording includes a laser that is fixed to a slider and introduces a light beam to an end side opposite to the recording medium side of the optical waveguide. To do.
  • the laser can be disposed in the immediate vicinity of the slider, so that the laser light can be efficiently transmitted to the optical waveguide.
  • energy efficient information recording can be realized.
  • a near-field light using head for thermally assisted magnetic recording includes a second optical waveguide that is fixed to a slider and that introduces a light beam to an end side of the optical waveguide opposite to the recording medium side. It is characterized by this.
  • the laser is disposed far from the slider and the laser and the optical waveguide can be connected using the second optical waveguide, so that the laser mounting location can be freely set.
  • the degree is improved. It becomes easy to use a laser larger than the slider, and a large energy can be supplied to the optical waveguide. Therefore, information recording with high SN can be realized.
  • the near-field light utilizing head for thermally assisted magnetic recording is characterized in that the base and the light scatterer tip have different widths.
  • the light beam from the optical waveguide can be efficiently received at the large base portion, and the minute near-field light can be generated at the tip portion of the small light scatterer. . Therefore, it is possible to realize information recording with high energy efficiency and high density.
  • the near-field light utilizing head for thermally assisted magnetic recording according to the present invention is characterized in that the base has the same width as the tip of the core.
  • the light beam from the optical waveguide can be efficiently received at the base.
  • energy efficient information recording can be realized.
  • the near-field light utilizing head for thermally assisted magnetic recording according to the present invention is characterized in that the base is provided on the side surface of the tip of the core.
  • the light beam from the optical waveguide can be efficiently received at the base.
  • energy efficient information recording can be realized.
  • the information recording / reproducing apparatus includes the near-field light utilizing head for the heat-assisted magnetic recording according to the present invention, and a recording medium.
  • the information recording / reproducing apparatus includes the near-field light utilization head for the heat-assisted magnetic recording according to the present invention, so that a high recording density can be realized.
  • the recording medium can be heated only by the near-field light component without leakage light from the light source and the waveguide, thereby realizing high-density recording.
  • An information recording / reproducing apparatus can be provided.
  • FIG. 3 is a cross-sectional view taken along line A-A ′ of FIG. 2.
  • FIG. 4 is an enlarged view of a part of the vicinity of the recording medium D of the light guide unit 303 and the main magnetic pole 310 in FIG. 3.
  • FIG. 5 is a bottom view of the slider 2 as viewed from the ABS.
  • FIG. 6 is a view of a core 311 and a light scatterer 313 that are transmitted through the reproducing element 304, the clad 312 and the light shielding film 314 from the outflow end side of the slider 2 according to the first embodiment of the present invention. It is a figure which shows the variation of FIG. It is a figure which shows another variation of FIG. It is a figure which shows another variation of FIG. It is a figure which shows the variation of FIG. FIG. 10 is a diagram showing another variation of FIG. 9. It is a figure which shows the variation of FIG. It is a perspective view which shows the head gimbal assembly which concerns on 2nd Embodiment of this invention.
  • FIG. 14 is a cross-sectional view taken along line B-B ′ of FIG. 13.
  • FIG. 17 is an enlarged view of a part of the vicinity of the recording medium D of the light guide and the main magnetic pole 310 in FIG. 16.
  • FIG. 1 is a configuration diagram showing an information recording / reproducing apparatus 1 according to the present embodiment.
  • the information recording / reproducing apparatus 1 of this embodiment is an apparatus which writes with respect to the recording medium D which has a magnetic-recording layer with a heat-assisted magnetic recording system.
  • a suspension 3 to which a slider 2 is fixed is fixed to a carriage 11.
  • the slider 2 and the suspension 3 are collectively referred to as a head gimbal assembly 12.
  • the disc-shaped recording medium D is rotated in a predetermined direction by the spindle motor 7.
  • the carriage 11 is rotatable about the pivot 10 and is rotated by an actuator 6 controlled by a control signal from the control unit 5, so that the slider 2 can be disposed at a predetermined position on the surface of the recording medium D.
  • the housing 9 is a box shape made of aluminum or the like (in FIG. 1, the peripheral wall surrounding the periphery of the housing 9 is omitted for easy understanding), and the above components are stored therein.
  • the spindle motor 7 is fixed to the bottom surface of the housing 9.
  • the slider 2 includes a recording element (not shown) for generating a magnetic field toward the recording medium D, a light guide unit (not shown) for generating near-field light, and a reproducing element (for reproducing information recorded on the recording medium D). (Not shown).
  • the recording element and the reproducing element are connected to the control unit 5 via the flexible wiring 13 laid along the suspension 3 and the carriage 11, the terminal 14 provided on the side surface of the carriage 11, and the flat cable 4.
  • the recording medium D may be one, but a plurality of recording media D may be provided as shown in FIG. As the number of recording media D increases, the number of head gimbal assemblies 12 also increases. Although FIG. 1 shows a configuration in which the head gimbal assembly 12 is provided only on one side of the recording medium D, it may be provided on both sides. Therefore, the number of head gimbal assemblies 12 is at most twice the number of recording media D. Thereby, the recording capacity per information recording / reproducing apparatus can be increased.
  • FIG. 2 is an enlarged view of the head gimbal assembly 12 according to the first embodiment.
  • the suspension 3 includes a base plate 201 made of a thin stainless plate, a hinge 202, a load beam 203, and a flexure 204.
  • the base plate 201 is fixed to the carriage 11 by mounting holes 201a provided in a part thereof.
  • the hinge 202 connects the base plate 201 and the load beam 203.
  • the hinge 202 is thinner than the base plate 201 and the load beam 203, and the suspension 3 is bent around the hinge 202.
  • the flexure 204 is an elongate member fixed to the load beam 203 and the hinge 202, is thinner than the load beam 203 and the base plate 201, and is easily bent.
  • a substantially rectangular parallelepiped slider 2 is fixed to the tip of the flexure 204.
  • the surface opposite to the surface fixed to the flexure 204 is a surface facing the recording medium D.
  • This surface is a surface that generates pressure for the slider 2 to rise from the viscosity of the air flow generated by the rotating recording medium D, and is called ABS (Air Bearing Surface).
  • An uneven shape (not shown) is provided on the ABS, and a desired pressure distribution is generated between the slider 2 and the recording medium D.
  • the slider 2 floats in a desired state due to a balance between the positive pressure for separating the slider 2 from the recording medium D, the negative pressure for attracting the slider 2 to the recording medium D, and the pressing force of the suspension 3.
  • the minimum clearance between the recording medium D and the slider 2 is about 10 nm or less.
  • the pressing force by the suspension 3 is mainly generated by the elasticity of the hinge 202. Further, since the hinge 202 and the flexure 204 are bent with respect to the undulation of the surface of the recording medium D, a desired floating state can be maintained.
  • the flexible wiring 13 is provided on the flexure 204.
  • the flexure 204 has a substantially U-shaped opening, and the slider 2 is fixed on a pad portion 204a that is surrounded by the opening and has a tongue shape.
  • the base side (carriage 11 side) of the suspension 3 is called an inflow end.
  • the tip side of the opposite suspension 3 is called the outflow end of the slider 2. These are named based on the direction of the air flow by the recording medium D described above.
  • the flexible wiring 13 extended from the base side of the suspension 3 branches into two from the middle, and is connected to the outflow end side of the slider 2 so as to go around the opening and both sides of the slider 2.
  • FIG. 3 is a cross-sectional view taken along the line A-A ′ of FIG.
  • the slider 2 includes a slider base 301, a recording element 302, a light guide unit 303, and a reproducing element 304.
  • a recording element 302, a light guide section 303, and a reproducing element 304 are sequentially stacked.
  • a laser 305 is fixed so as to be sandwiched between the slider base 301 and the pad portion 204a.
  • the laser 305 is an edge-emitting laser, and an end surface from which laser light is emitted is optically connected to the light guide unit 303.
  • the laser 305 is connected to the control unit 5 through the flexible wiring 13 and the like.
  • the laser 305 emits light based on the electrical signal from the control unit 5.
  • the slider base 301 is a substantially rectangular parallelepiped member and is made of an AlTiC material.
  • the recording element 302 includes a sub magnetic pole 306 fixed to the side surface on the outflow end side of the slider base 301, a main magnetic pole 310 that applies a recording magnetic field connected to the sub magnetic pole 306 via the yoke 307 and perpendicular to the recording medium D, A coil 308 that spirally winds around the yoke 307 around the yoke 307 is provided.
  • the main magnetic pole 310, the sub magnetic pole 306, and the yoke 307 are made of a high saturation magnetic flux density (Bs) material (for example, CoNiFe alloy, CoFe alloy, etc.) having a high magnetic flux density.
  • Bs high saturation magnetic flux density
  • the coil 308 is arranged so that there is a gap between adjacent coil wires, the yoke 307, the main magnetic pole 310, and the sub magnetic pole 306 so as not to be short-circuited. In this state, the coil 308 is molded by the insulator 309. ing.
  • the coil 308 is supplied with a current modulated according to information from the control unit 5. Therefore, the main magnetic pole 310, the sub magnetic pole 306, the yoke 307, and the coil 308 constitute an electromagnet as a whole.
  • the main magnetic pole 310 and the sub magnetic pole 306 are designed so that the end surfaces facing the recording medium D are flush with the ABS of the slider 2.
  • the light guide portion 303 is fixed adjacent to the recording element 302 with one end side facing the flexure 204 side and the other end side facing the recording medium D side. More specifically, it is fixed adjacent to the main pole 310.
  • the light guide unit 303 includes a polyhedral core 311, a clad 312 that confines the core 311 inside, a light scattering body 313 and a light shielding film 314 described later, and is formed in a substantially plate shape as a whole.
  • the core 311 is made of a material that is optically transparent and has a higher refractive index than the clad 312.
  • the core 311 can be made of germanium-doped SiO2, and the clad 312 can be made of pure SiO2.
  • Ta 2 O 5 can be used for the core 311 and alumina can be used for the clad 312. If the laser light from the laser 305 is infrared light, silicon can be used for the core 311. A part of one end side of the core 311 is exposed from the clad 312 and is in contact with the emission end face of the laser 305, thereby realizing an optical connection between the light guide unit 303 and the laser 305.
  • a reflection surface 311 a is provided on one end side of the core 311, and the light flux is incident in the longitudinal direction of the core 311 by reflecting the light flux from the laser 305 so as to change by approximately 90 degrees.
  • the core 311 has a triangular cross section perpendicular to the longitudinal direction from one end side to the other end side, and is drawn so that the cross-sectional area gradually decreases toward the other end side, and is reflected by the reflecting surface 311a.
  • the condensed light flux is condensed and propagated toward the other end side. That is, the core 311 and the clad 312 constitute a spot size converter that narrows the spot size of the introduced light beam.
  • the reproducing element 304 is a magnetoresistive film whose electric resistance is converted according to the magnitude of the magnetic field leaking from the recording medium D.
  • a bias current is supplied to the reproducing element 304 from the control unit 5 via a lead film (not shown).
  • the control unit 5 can detect a change in the magnetic field leaking from the recording medium D as a change in voltage, and can reproduce a signal from the change in voltage.
  • FIG. 4 is an enlarged cross-sectional view of a part of the vicinity of the recording medium D of the light guide unit 303 and the main magnetic pole 310.
  • FIG. 5 is a bottom view of FIG. 4 as viewed from the ABS of the slider 2.
  • the main magnetic pole 310 is in contact with the clad 312, but has a main magnetic pole tip 310 a protruding so as to be embedded on the clad 312 side in the vicinity of the recording medium D.
  • the end surface of the main magnetic pole tip 310a facing the recording medium D is flush with the ABS of the slider 2.
  • a light scatterer 313 is formed on one side surface of the main magnetic pole tip 310a.
  • the core 311 has an exposed portion 311b whose side surface on the other end side is exposed from the clad 312, and is in contact with the light scatterer 313 through the exposed portion 311b.
  • the other end side of the core 311 is covered with a light shielding film 314.
  • the light scatterer 313 is made of a material such as gold, silver, or platinum.
  • the light shielding film 314 is made of a material such as aluminum. In the present embodiment, the light shielding film 314 is provided obliquely with respect to the light scatterer 313, so that the distance between the light shielding film 314 and the light scatterer 313 becomes narrower toward the recording medium side of the core 311 (narrowing down). Structure).
  • the core 311 and the clad 312 constitute a spot size converter.
  • the core size becomes the limit of optical constriction due to total reflection at the interface between the core 311 and the clad 312 before the narrowing structure.
  • the core cross section has a dimension of about several ⁇ m. Below this value, the light flux cannot be confined in the core and leaks out.
  • the light shielding film 314 provided in the narrowing-down structure prevents the light flux from leaking outside, concentrates on the exposed portion 311b while reflecting the interface between the light shielding film 314 and the core 311, and passes through the exposed portion 311b.
  • the light scatterer 313 is efficiently irradiated.
  • the light beam applied to the light scatterer 313 is converted into surface plasmon, propagates on the surface of the light scatterer 313, and generates near-field light at the end surface (light scatterer tip) of the light scatterer 313 on the recording medium D side. Let That is, the light beam terminates at the tip of the core 311, but thereafter, the light beam is converted into surface plasmon, and near-field light is generated from the end surface of the light scatterer 313 on the recording medium D side. Since the light scatterer 313 is in contact with the main pole tip 310a, the magnetic flux from the main pole tip 310a and the near-field light from the light scatterer 313 are generated in a very close form.
  • FIG. 6 is a view showing the same portion as FIG. 4, and is a view of the core 311 and the light scatterer 313 as seen from the outflow end side of the slider 2 through the reproducing element 304, the clad 312 and the light shielding film 314.
  • the light scatterer 313 has a substantially rectangular parallelepiped shape that is long in the direction perpendicular to the surface of the recording medium D, and its width is several tens of nm or less.
  • the core 311 is in contact with the light scatterer 313 only at the exposed portion 311b which is a part of the side surface on the recording element 302 side.
  • the spot size of the near-field light is approximately the same as the size of the light scatterer 313 on the recording medium D side.
  • FIG. 7 shows a variation of FIG.
  • the light scatterer 313 has a feather-plate shape in which the recording medium D side is thin.
  • the width of the light scatterer 313 on the recording medium D side is several tens of nm or less.
  • the core 311 side of the light scatterer 313 is in contact with the core 311 with the same width as the core 311.
  • FIG. 8 and 9 are diagrams showing another variation of FIG.
  • the other end side of the core 311 has a sharp shape.
  • the core 311 may have any shape as long as it has a polyhedral shape capable of propagating a light beam.
  • the core 311 and the clad 312 may not be a spot size converter but a simple optical waveguide.
  • the light scatterer 313 has a linear shape in FIG. 8, a wide portion overlapping the exposed portion 311b in FIG. 9, and a thin spatula on the side facing the recording medium D.
  • the light scatterer 313 may have any shape as long as the light scatterer 313 has a portion overlapping the exposed portion 311b and the light scatterer tip facing the recording medium D.
  • FIG. 10 is a diagram showing a variation of FIG.
  • the other end side of the core 311 has an extended portion 311c extended to a position facing the recording medium D so that the planar shape matches the spatula-shaped light scatterer 311.
  • FIG. 11 is a diagram showing another variation of FIG. Thus, it may be configured not only from a polyhedron shape configured from a plane but also from a curved surface.
  • FIG. 12 is a diagram showing a variation of FIG.
  • the second core 315 may be sandwiched between the core 311 and the light shielding film 314.
  • the light beam from the laser 305 is concentrated on the exposed portion 311b while reflecting the interface between the light shielding film 314 and the second core 315.
  • the second core 315 covers a part of the light scatterer 313 to prevent contact between the light shielding film 314 and the light scatterer 313 and to prevent alteration such as diffusion of these materials.
  • the light beam propagated by the core 311 does not leak out by the light shielding film 314 but is generated on the surface of the slider 2 for the first time as near-field light through the surface plasmon on the light scatterer 313 once. Therefore, only the near-field light is irradiated to the recording medium D, and the propagation light from the core 311 is not irradiated. Therefore, since only a minute region corresponding to the size of the near-field light in the recording medium D is heated, the density of information written to the recording medium D can be improved.
  • FIG. 13 is an enlarged view of the head gimbal assembly 12 according to the second embodiment.
  • a flexible wiring 403 is provided on the flexure 204.
  • the laser 401 is provided in a part of a portion of the flexure 204 that rests on the base plate 201.
  • the laser 401 and the flexible wiring 403 are electrically connected, and the laser 401 emits light based on the electric signal from the control unit 5.
  • An optical fiber 402 is optically connected to the emission end of the laser 401.
  • the other end of the optical fiber 402 is optically coupled to a light guide 501 (described later) provided on the slider 2.
  • the optical fiber 402 is supported by using a sleeve 404 so that the longitudinal direction of the optical fiber 402 is free.
  • FIG. 14 is a B-B ′ cross section of FIG. 13.
  • the slider 2 includes a slider base 301, a light guide 501, a recording element 303, and a reproducing element 304.
  • a light guide 501, a recording element 303, and a reproducing element 304 are sequentially stacked on the side surface on the outflow end side of the slider base 301.
  • the optical fiber 402 is fixed so as to be sandwiched between the slider base 301 and the pad portion 204 a, and the end surface forms a reflecting surface 402 a inclined with respect to the longitudinal direction of the optical fiber 402.
  • the light guide 501 is fixed adjacent to the slider base 301 with one end facing toward the flexure 204 and the other end facing toward the recording medium D.
  • the light guide unit 501 includes a polyhedral core 504, a clad 503 that confines the core 504 therein, a light scatterer 313, and a light shielding film 314, and is formed in a substantially plate shape as a whole. Each material is the same as in the first embodiment.
  • One end side of the core 504 is exposed from the clad 503 and is in contact with the side surface of the optical fiber 402, thereby realizing the optical connection between the light guide unit 501 and the optical fiber 402.
  • the direction of the light beam propagated by the optical fiber 402 is bent by approximately 90 degrees at the reflection surface 402 a and enters the core 504 in the longitudinal direction.
  • the core 504 has a triangular cross section perpendicular to the longitudinal direction from one end side to the other end side.
  • the core 504 is drawn so that the cross sectional area gradually decreases toward the other end side.
  • the light is propagated toward the other end while being illuminated. That is, the core 504 and the clad 503 constitute a spot size converter that reduces the spot size of the introduced light beam.
  • the shape of the recording element 302 is the same as that of the first embodiment, but the fixing direction is different.
  • the main magnetic pole 310 is provided on the light guide 501 side, and the sub magnetic pole 306 is provided on the reproducing element 304 side.
  • FIG. 15 is an enlarged cross-sectional view of a part of the light guide 501 and the main magnetic pole 310 in the vicinity of the recording medium D.
  • the main magnetic pole 310 is in contact with the clad 503, but has a main magnetic pole tip 310 a protruding so as to be embedded on the clad 503 side in the vicinity of the recording medium D.
  • a light scatterer 313 is formed on one side surface of the main magnetic pole tip 310a.
  • the core 504 has an exposed portion 504b whose side surface on the other end is exposed from the cladding 503, and is in contact with the light scatterer 313 through the exposed portion 504b.
  • the other end side of the core 504 is covered with a light shielding film 314.
  • the light flux from the optical fiber 402 propagates from one end side to the other end side of the core 504, but does not leak to the outside due to the light shielding film 314, and reflects the interface between the light shielding film 314 and the core 504.
  • the light scatterer 313 is irradiated through the exposed portion 504b while concentrating on the exposed portion 504b.
  • the light beam irradiated on the light scatterer 313 is converted into surface plasmon, propagates on the surface of the light scatterer 313, and generates near-field light on the end surface of the light scatterer 313 on the recording medium D side.
  • the same effect as that of the first embodiment can be realized. Further, since the main magnetic pole 310 is arranged on the side opposite to the outflow end of the slider 2 with respect to the light scatterer 313, the recording medium D is heated with near-field light from the light scatterer 313 and then the main magnetic pole 310. Thus, information can be recorded efficiently.
  • FIGS. 16 and 17 a third embodiment according to the present invention will be described with reference to FIGS. 16 and 17.
  • the same parts as those in the first and second embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.
  • This embodiment is different from the first embodiment in that a light guide is provided between the main magnetic pole and the sub magnetic pole, and that a laser is directly mounted on the slider.
  • FIG. 16 is a cross-sectional view of the head gimbal assembly 12 according to the third embodiment.
  • the recording element 302 includes a main magnetic pole 310, a sub magnetic pole 306, and a coil 308 molded in the clad 312a, and a yoke 307 disposed between the main magnetic pole 310 and the sub magnetic pole 306.
  • the sub magnetic pole 306 is disposed on the reproducing element 304 and is connected to one end of the yoke 307.
  • the coil 308 is formed in a spiral shape around the yoke 307 with the yoke 307 as the center.
  • a through hole 307a is formed in the yoke 307, and a core 311 is disposed so as to penetrate through the through hole 307a.
  • the main magnetic pole 310 is connected to the other end of the yoke 307.
  • a laser light source 601 is mounted on the slider base 301.
  • the laser light source 601 includes a laser mount 602 that is fixed to the upper surface of the slider base 301 and a semiconductor laser chip 603 that is fixed to the front end surface 602 a of the laser mount 602.
  • the laser mount 602 is a plate-like member made of, for example, the same material as the slider base 301 and having an outer shape in the direction parallel to the surface of the recording medium D formed to be the same as that of the slider base 301, and the upper surface side is the pad portion of the flexure 204.
  • 204a is fixed. That is, the slider base 301 is fixed to the pad portion 204a with the laser mount 602 sandwiched between the slider base portion 301 and the pad portion 204a.
  • electric wiring is fixed to the laser mount 602.
  • the flexible wiring 13 and the semiconductor laser chip 603 are electrically connected by this electric wiring.
  • the semiconductor laser chip 603 is disposed so that its emission side end face is directed downward and is opposed to the one end side end face of the core 311.
  • the light beam from the semiconductor laser chip 603 is introduced into the core 311 and guided to the other end side of the core 311.
  • oil having a refractive index equivalent to that of the core 311 may be interposed in this gap.
  • FIG. 17 is an enlarged cross-sectional view of a part of the light guide and the main magnetic pole 310 near the recording medium D.
  • the light scatterer 313, the core 311, the second core 315, and the main magnetic pole 310 are stacked in this order.
  • the main magnetic pole tip 310a also serves as the light shielding film 314 in the first and second embodiments.
  • the same effect as that of the first embodiment can be realized.
  • the light scatterer 313 and the main magnetic pole 310 can be disposed on the most front end side of the slider 3, the near-field light scattered from the light scatterer 313 and the magnetic field generated by the main magnetic pole 310 are closest to the recording medium D. Can be generated. Thereby, recording on the recording medium D can be performed smoothly and with high accuracy.
  • D recording medium 1 information recording / reproducing apparatus 2 slider 3 suspension 11 carriage 12 head gimbal assembly 13 flexible wiring 204 flexure 204a pad part 306 sub magnetic pole 308 coil 310 main magnetic pole 311 core 311b exposed part 312 clad 313 light scatterer 314 light shielding film

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Abstract

A light scatterer (313) is disposed between an end portion of a core (311) of an optical waveguide and an end portion of a main magnetic pole (310), and the surface, which at least the optical axis crosses, of the end portion of the core (311) is covered with a light-blocking film. The side surface of the end portion of the core (311) and the light scatterer are brought into contact with each other.

Description

近接場光利用ヘッド及びそれを備えた情報記録再生装置Near-field light utilization head and information recording / reproducing apparatus including the same
　本発明は、近接場光を利用して記録媒体に各種の情報を記録再生するヘッド及びそれを備えた情報記録再生装置に関するものである。 The present invention relates to a head for recording and reproducing various kinds of information on a recording medium using near-field light and an information recording / reproducing apparatus including the head.
　近年、コンピュータ機器におけるハードディスクドライブ等の情報記録再生装置は、より大量かつ高密度情報の記録再生を行いたい等のニーズを受けて、さらなる高密度化が求められている。そのため、隣り合う磁区同士の影響や、熱揺らぎを最小限に抑えるために、保磁力の強いものを記録媒体として採用することが考えられている。そのため、記録媒体に情報を記録することが困難になっていた。 In recent years, information recording / reproducing apparatuses such as hard disk drives in computer equipment have been required to have higher density in response to the need to record and reproduce larger amounts of high-density information. Therefore, in order to minimize the influence of adjacent magnetic domains and thermal fluctuation, it is considered to employ a recording medium having a strong coercive force. Therefore, it has been difficult to record information on the recording medium.
　そこで、上述した不具合を解消するために、近接場光を利用して磁区を局所的に加熱して一時的に保磁力を低下させ、その間に記録媒体への書き込みを行う熱アシスト磁気記録方式の情報記録再生装置が考案され開発が進められている。 Therefore, in order to eliminate the above-mentioned problems, a magnetically assisted magnetic recording system in which the magnetic domain is locally heated using near-field light to temporarily reduce the coercive force and during which writing to the recording medium is performed. An information recording / reproducing apparatus has been devised and developed.
　熱アシスト磁気記録方式による情報記録再生装置には、近接場光を発生させるための近接場光素子およびそれを駆動させるための光学系が必要となる。これら近接場光素子と光学系は、各種のものが考案されている。 An information recording / reproducing apparatus using a heat-assisted magnetic recording system requires a near-field light element for generating near-field light and an optical system for driving it. Various types of near-field light elements and optical systems have been devised.
　例えば特許文献１および特許文献２に示されるように、主磁極に隣接するように近接場光を発生する金等からなる光散乱体を設け、レーザからの光を光散乱体に照射する構成が知られている。 For example, as shown in Patent Document 1 and Patent Document 2, there is provided a configuration in which a light scatterer made of gold or the like that generates near-field light is provided adjacent to the main magnetic pole, and the light scatterer is irradiated with light from the laser. Are known.
特開２００５－００４９０１号公報JP 2005-004901 A 特開２００８－１５９１５８号公報JP 2008-159158 A
　しかしながら、上述の従来技術による近接場光利用ヘッドでは、高い記録密度に対応することが困難である。特許文献１においては図３や図１８に示すように、レーザからの光を空中伝搬によって光散乱体に照射している。レーザからの光をレンズで絞ってはいるが、光散乱体の寸法は小さいため、光散乱体に照射されない漏れ光成分が多くなってしまう。漏れ光の多くは記録媒体に照射され記録媒体を加熱してしまう。本来、近接場光により記録媒体の微小領域を加熱することで高密度記録を実現する熱アシスト磁気記録であるが、漏れ光のために微小領域だけを加熱することができず、そのために高密度記録を実現できないおそれがある。 However, it is difficult to cope with a high recording density with the above-mentioned conventional near-field light utilizing head. In Patent Document 1, as shown in FIGS. 3 and 18, light from a laser is irradiated to a light scatterer by air propagation. Although the light from the laser is squeezed by the lens, since the size of the light scatterer is small, a leaked light component that is not irradiated to the light scatterer increases. Most of the leakage light is applied to the recording medium and heats the recording medium. Originally, heat-assisted magnetic recording that realizes high-density recording by heating a minute area of a recording medium with near-field light, but only the minute area cannot be heated due to leakage light, and therefore high density Recording may not be possible.
　また、特許文献２のような構成においては図６に示すように、光導波路の出射端面に光散乱体（近接場光散乱板）を設けており、レーザからの光を光導波路を介して光散乱体に照射している。しかし、光導波路の光路となる部分の断面積が光散乱体よりも大きくなるため、特許文献１と同様に漏れ光が発生してしまい、同様に高密度記録を実現できないおそれがある。 Further, in the configuration as in Patent Document 2, as shown in FIG. 6, a light scatterer (near-field light scattering plate) is provided on the exit end face of the optical waveguide, and light from the laser is transmitted through the optical waveguide. Irradiating the scatterer. However, since the cross-sectional area of the portion that becomes the optical path of the optical waveguide is larger than that of the light scatterer, leakage light is generated in the same manner as in Patent Document 1, and there is a possibility that high-density recording cannot be realized in the same manner.
　そこで本発明は、このような事情に考慮してなされたもので、その目的は、漏れ光をなくし近接場光成分のみで記録媒体を加熱できるような構成を提案し、それにより高密度記録を実現できる近接場光利用ヘッド及びそれを備えた情報記録再生装置を提供することである。 Therefore, the present invention has been made in view of such circumstances, and its object is to propose a configuration in which the recording medium can be heated only by the near-field light component without leaking light, thereby achieving high-density recording. It is an object of the present invention to provide a near-field light using head that can be realized and an information recording / reproducing apparatus including the head.
　本発明は、上記目的を達成するために、以下の手段を提供する。
　本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドは、記録媒体を近接場光によって加熱するとともに記録媒体に対して記録磁界を与えることにより、磁化反転を生じさせ、情報を記録させるものであり、記録媒体の表面に対向配置されたスライダと、スライダに固定され、光束を伝搬するコアを有する光導波路と、記録媒体側のコアの先端部の少なくとも光軸が横切る部分を覆う遮光膜と、コアの先端部の遮光膜で覆われていない部分に備えられた基部と、記録媒体に露出した光散乱体先端部とを備えており、コア及び基部の境界部分に光束が照射されることにより、境界部分を介して生じる表面プラズモンを用いて光散乱体先端部から近接場光を発生させる光散乱体とを備えることを特徴とするものである。 In order to achieve the above object, the present invention provides the following means.
The near-field light utilization head for thermally-assisted magnetic recording according to the present invention heats the recording medium with near-field light and applies a recording magnetic field to the recording medium, thereby causing magnetization reversal and recording information. A slider disposed opposite to the surface of the recording medium, an optical waveguide having a core that is fixed to the slider and propagates a light beam, and a light shield that covers at least a portion of the tip of the core on the recording medium side that the optical axis crosses. A film, a base provided in a portion not covered with a light-shielding film at the tip of the core, and a light scatterer tip exposed to the recording medium, and a light flux is applied to the boundary between the core and the base And a light scatterer that generates near-field light from the tip of the light scatterer using surface plasmons generated through the boundary portion.
　本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドにおいては、コアにより伝搬された光束は遮光膜によって漏れ出ることなく、一度光散乱体上の表面プラズモンを介して、近接場光として初めてスライダ表面に発生する。よって、記録媒体には近接場光のみが照射され、コアからの伝搬光が照射されることがない。よって、記録媒体のうち近接場光のサイズに対応した微小領域のみが加熱されるため、記録媒体に書き込む情報の密度を向上させることができる。 In the near-field light using head for thermally-assisted magnetic recording according to the present invention, the light beam propagated by the core does not leak out by the light shielding film, but once as the near-field light via the surface plasmon on the light scatterer. First occurs on the slider surface. Therefore, only the near-field light is irradiated to the recording medium, and the propagation light from the core is not irradiated. Therefore, since only a minute region corresponding to the size of the near-field light in the recording medium is heated, the density of information written to the recording medium can be improved.
　また、本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドは、コアの先端部に向うにつれて光束のスポットサイズを絞り込む光導波路がスポットサイズ変換器であることを特徴とするものである。 The near-field light using head for thermally assisted magnetic recording according to the present invention is characterized in that the optical waveguide that narrows the spot size of the light beam toward the tip of the core is a spot size converter. .
　本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドにおいては、スポットサイズ変換器を伝搬する光のスポットサイズを縮小できるため、微小寸法の光散乱体に効率よく光を照射することができる。よって、エネルギー効率の良い情報記録を実現することができる。 In the near-field light utilizing head for thermally-assisted magnetic recording according to the present invention, the spot size of the light propagating through the spot size converter can be reduced, so that light can be efficiently irradiated onto a light scatterer having a small size. it can. Thus, energy efficient information recording can be realized.
　また、本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドにおいて、遮光膜は、光散乱体に対して斜めに備えられており、コアの記録媒体側に向うにつれて遮光膜と光散乱体との間隔が狭くなるように備えられていることを特徴とするものである。 In the near-field light utilizing head for thermally-assisted magnetic recording according to the present invention, the light shielding film is provided obliquely with respect to the light scatterer, and the light shielding film and the light scattering are arranged toward the recording medium side of the core. It is provided so that the space | interval with a body may become narrow.
　本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドにおいては、コアを伝播してきた光を、遮光膜によって光散乱体に寄せるように集中させることができるため、より多くの光を光散乱体に照射することができ、より高い効率で近接場光を発生させることができる。 In the near-field light utilizing head for heat-assisted magnetic recording according to the present invention, the light propagating through the core can be concentrated so as to be brought closer to the light scatterer by the light shielding film. The scatterer can be irradiated, and near-field light can be generated with higher efficiency.
　また、本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドは、スライダに固定され、光導波路の記録媒体側とは逆側の端側に光束を導入するレーザを備えることを特徴とするものである。 Further, a near-field light utilization head for thermally assisted magnetic recording according to the present invention includes a laser that is fixed to a slider and introduces a light beam to an end side opposite to the recording medium side of the optical waveguide. To do.
　本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドにおいては、レーザをスライダの直近に配することができるため、効率よくレーザの光を光導波路に伝えることができる。よって、エネルギー効率の良い情報記録を実現することができる。 In the near-field light utilizing head for thermally-assisted magnetic recording according to the present invention, the laser can be disposed in the immediate vicinity of the slider, so that the laser light can be efficiently transmitted to the optical waveguide. Thus, energy efficient information recording can be realized.
　また、本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドは、スライダに固定され、光導波路の記録媒体側とは逆側の端側に光束を導入する第２の光導波路を備えることを特徴とするものである。 In addition, a near-field light using head for thermally assisted magnetic recording according to the present invention includes a second optical waveguide that is fixed to a slider and that introduces a light beam to an end side of the optical waveguide opposite to the recording medium side. It is characterized by this.
　本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドにおいては、レーザをスライダから遠方に配置し、第２の光導波路を用いてレーザと光導波路を接続できるため、レーザ搭載箇所の自由度が向上する。スライダよりも大きなレーザを用いることが容易になり、大きなエネルギーを光導波路に供給できる。よって、ＳＮの高い情報記録を実現することができる。 In the near-field light utilizing head for thermally-assisted magnetic recording according to the present invention, the laser is disposed far from the slider and the laser and the optical waveguide can be connected using the second optical waveguide, so that the laser mounting location can be freely set. The degree is improved. It becomes easy to use a laser larger than the slider, and a large energy can be supplied to the optical waveguide. Therefore, information recording with high SN can be realized.
　また、本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドは、基部と光散乱体先端部とが異なる幅を有することを特徴とするものである。 Also, the near-field light utilizing head for thermally assisted magnetic recording according to the present invention is characterized in that the base and the light scatterer tip have different widths.
　本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドにおいては、大きな基部で光導波路からの光束を効率よく受け止め、小さな光散乱体先端部で微小な近接場光を発生させることができる。よって、エネルギー効率が良く、かつ高密度な情報記録を実現することができる。 In the near-field light utilization head for thermally-assisted magnetic recording according to the present invention, the light beam from the optical waveguide can be efficiently received at the large base portion, and the minute near-field light can be generated at the tip portion of the small light scatterer. . Therefore, it is possible to realize information recording with high energy efficiency and high density.
　また、本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドは、基部がコアの先端部と同じ幅を有することを特徴とするものである。 The near-field light utilizing head for thermally assisted magnetic recording according to the present invention is characterized in that the base has the same width as the tip of the core.
　本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドにおいては、基部で光導波路からの光束を効率よく受け止めることができる。よって、エネルギー効率の良い情報記録を実現することができる。 In the near-field light utilizing head for heat-assisted magnetic recording according to the present invention, the light beam from the optical waveguide can be efficiently received at the base. Thus, energy efficient information recording can be realized.
　また、本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドは、基部がコアの先端部の側面に設けられていることを特徴とするものである。 The near-field light utilizing head for thermally assisted magnetic recording according to the present invention is characterized in that the base is provided on the side surface of the tip of the core.
　本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドにおいては、基部で光導波路からの光束を効率よく受け止めることができる。よって、エネルギー効率の良い情報記録を実現することができる。 In the near-field light utilizing head for heat-assisted magnetic recording according to the present invention, the light beam from the optical waveguide can be efficiently received at the base. Thus, energy efficient information recording can be realized.
　また、本発明に係る情報記録再生装置は、上記本発明の熱アシスト磁気記録のための近接場光利用ヘッドと、記録媒体と、を有することを特徴とするものである。 The information recording / reproducing apparatus according to the present invention includes the near-field light utilizing head for the heat-assisted magnetic recording according to the present invention, and a recording medium.
　本発明に係る情報記録再生装置においては、本発明の熱アシスト磁気記録のための近接場光利用ヘッドを備えているので、高い記録密度を実現することができる。 The information recording / reproducing apparatus according to the present invention includes the near-field light utilization head for the heat-assisted magnetic recording according to the present invention, so that a high recording density can be realized.
　本発明に係る熱アシスト磁気記録のための近接場光利用ヘッドによれば、光源および導波路からの漏れ光をなくし近接場光成分のみで記録媒体を加熱でき、それにより高密度記録を実現できる情報記録再生装置を提供することができる。 According to the near-field light utilization head for thermally-assisted magnetic recording according to the present invention, the recording medium can be heated only by the near-field light component without leakage light from the light source and the waveguide, thereby realizing high-density recording. An information recording / reproducing apparatus can be provided.
本発明の第１実施形態に係る情報記録再生装置を示す構成図である。It is a block diagram which shows the information recording / reproducing apparatus which concerns on 1st Embodiment of this invention. 図１に示すヘッドジンバルアセンブリの斜視図である。It is a perspective view of the head gimbal assembly shown in FIG. 図２のＡ－Ａ’線に沿う断面図である。FIG. 3 is a cross-sectional view taken along line A-A ′ of FIG. 2. 図３のうち導光部３０３と主磁極３１０の記録媒体Ｄ近傍の一部を拡大した図である。FIG. 4 is an enlarged view of a part of the vicinity of the recording medium D of the light guide unit 303 and the main magnetic pole 310 in FIG. 3. 図４をスライダ２のＡＢＳから見た下面図である。FIG. 5 is a bottom view of the slider 2 as viewed from the ABS. 本発明の第１実施形態に係るスライダ２の流出端側から再生素子３０４とクラッド３１２および遮光膜３１４を透過して、コア３１１と光散乱体３１３を見た図である。FIG. 6 is a view of a core 311 and a light scatterer 313 that are transmitted through the reproducing element 304, the clad 312 and the light shielding film 314 from the outflow end side of the slider 2 according to the first embodiment of the present invention. 図６のバリエーションを示す図である。It is a figure which shows the variation of FIG. 図６の別のバリエーションを示す図である。It is a figure which shows another variation of FIG. 図６の別のバリエーションを示す図である。It is a figure which shows another variation of FIG. 図９のバリエーションを示す図である。It is a figure which shows the variation of FIG. 図９の別のバリエーションを示す図である。FIG. 10 is a diagram showing another variation of FIG. 9. 図４のバリエーションを示す図である。It is a figure which shows the variation of FIG. 本発明の第２実施形態に係るヘッドジンバルアセンブリを示す斜視図である。It is a perspective view which shows the head gimbal assembly which concerns on 2nd Embodiment of this invention. 図１３のＢ－Ｂ’線に沿う断面図である。FIG. 14 is a cross-sectional view taken along line B-B ′ of FIG. 13. 図１４のうち導光部５０１と主磁極３１０の記録媒体Ｄ近傍の一部を拡大した図である。It is the figure which expanded a part of recording medium D vicinity of the light guide part 501 and the main magnetic pole 310 among FIG. 本発明の第３実施形態に係るヘッドジンバルアセンブリの断面図である。It is sectional drawing of the head gimbal assembly which concerns on 3rd Embodiment of this invention. 図１６のうち導光部と主磁極３１０の記録媒体Ｄ近傍の一部を拡大した図である。FIG. 17 is an enlarged view of a part of the vicinity of the recording medium D of the light guide and the main magnetic pole 310 in FIG. 16.
（第１実施形態）
　以下、本発明に係る第１実施形態を、図１から図８を参照して説明する。図１は、本実施形態に係る情報記録再生装置１を示す構成図である。なお、本実施形態の情報記録再生装置１は、磁気記録層を有する記録媒体Ｄに対して、熱アシスト磁気記録方式で書き込みを行う装置である。 (First embodiment)
A first embodiment according to the present invention will be described below with reference to FIGS. FIG. 1 is a configuration diagram showing an information recording / reproducing apparatus 1 according to the present embodiment. In addition, the information recording / reproducing apparatus 1 of this embodiment is an apparatus which writes with respect to the recording medium D which has a magnetic-recording layer with a heat-assisted magnetic recording system.
　図１に示すように本実施形態の情報記録再生装置１において、スライダ２が固定されたサスペンション３が、キャリッジ１１に固定されている。スライダ２とサスペンション３を合わせて、ヘッドジンバルアセンブリ１２と呼ぶ。円盤状の記録媒体Ｄはスピンドルモータ７によって所定の方向に回転する。キャリッジ１１はピボット１０を中心に回転可能になっており、制御部５からの制御信号によって制御されるアクチュエータ６によって回転し、スライダ２を記録媒体Ｄ表面の所定の位置に配置することができる。ハウジング９はアルミニウムなどから成る箱状（図１では説明を分かりやすくするため、ハウジング９の周囲を取り囲む周壁を省略している）ものであり、上記の部品をその内部に格納している。スピンドルモータ７はハウジング９の底面に固定されている。スライダ２は記録媒体Ｄに向けて磁場を発生させる記録素子（図示略）と、近接場光を発生する導光部（図示略）と、記録媒体Ｄに記録された情報を再生する再生素子（図示略）を有している。記録素子と再生素子は、サスペンション３およびキャリッジ１１に沿って敷設されたフレキシブル配線１３、キャリッジ１１側面に設けられたターミナル１４およびフラットケーブル４を介して制御部５に接続されている。 As shown in FIG. 1, in the information recording / reproducing apparatus 1 of this embodiment, a suspension 3 to which a slider 2 is fixed is fixed to a carriage 11. The slider 2 and the suspension 3 are collectively referred to as a head gimbal assembly 12. The disc-shaped recording medium D is rotated in a predetermined direction by the spindle motor 7. The carriage 11 is rotatable about the pivot 10 and is rotated by an actuator 6 controlled by a control signal from the control unit 5, so that the slider 2 can be disposed at a predetermined position on the surface of the recording medium D. The housing 9 is a box shape made of aluminum or the like (in FIG. 1, the peripheral wall surrounding the periphery of the housing 9 is omitted for easy understanding), and the above components are stored therein. The spindle motor 7 is fixed to the bottom surface of the housing 9. The slider 2 includes a recording element (not shown) for generating a magnetic field toward the recording medium D, a light guide unit (not shown) for generating near-field light, and a reproducing element (for reproducing information recorded on the recording medium D). (Not shown). The recording element and the reproducing element are connected to the control unit 5 via the flexible wiring 13 laid along the suspension 3 and the carriage 11, the terminal 14 provided on the side surface of the carriage 11, and the flat cable 4.
　記録媒体Ｄは１枚でも良いが、図１に示すように複数枚設けても良い。記録媒体Ｄの枚数が増えれば、ヘッドジンバルアセンブリ１２の個数も増加する。図１では記録媒体Ｄの片面側のみにヘッドジンバルアセンブリ１２が設けられている構成を示しているが、両面に設けても良い。よって、ヘッドジンバルアセンブリ１２の個数は、最大で記録媒体Ｄの枚数の倍になる。これにより、情報記録再生装置１台当たりの記録容量の増加を図ることができる。 The recording medium D may be one, but a plurality of recording media D may be provided as shown in FIG. As the number of recording media D increases, the number of head gimbal assemblies 12 also increases. Although FIG. 1 shows a configuration in which the head gimbal assembly 12 is provided only on one side of the recording medium D, it may be provided on both sides. Therefore, the number of head gimbal assemblies 12 is at most twice the number of recording media D. Thereby, the recording capacity per information recording / reproducing apparatus can be increased.
　図２は第１実施形態に係るヘッドジンバルアセンブリ１２の拡大図である。サスペンション３は、ステンレス薄板を材料とするベースプレート２０１、ヒンジ２０２、ロードビーム２０３、フレクシャ２０４からなる。ベースプレート２０１は、その一部に設けられた取り付け穴２０１ａにより、キャリッジ１１に固定されている。ヒンジ２０２はベースプレート２０１とロードビーム２０３を接続している。ヒンジ２０２はベースプレート２０１とロードビーム２０３よりも薄くなっており、ヒンジ２０２を中心としてサスペンション３がたわむようになっている。フレクシャ２０４はロードビーム２０３、ヒンジ２０２に固定された細長い部材であり、ロードビーム２０３やベースプレート２０１よりも薄くなっており、たわみやすく出来ている。フレクシャ２０４の先端には略直方体形状のスライダ２が固定されている。 FIG. 2 is an enlarged view of the head gimbal assembly 12 according to the first embodiment. The suspension 3 includes a base plate 201 made of a thin stainless plate, a hinge 202, a load beam 203, and a flexure 204. The base plate 201 is fixed to the carriage 11 by mounting holes 201a provided in a part thereof. The hinge 202 connects the base plate 201 and the load beam 203. The hinge 202 is thinner than the base plate 201 and the load beam 203, and the suspension 3 is bent around the hinge 202. The flexure 204 is an elongate member fixed to the load beam 203 and the hinge 202, is thinner than the load beam 203 and the base plate 201, and is easily bent. A substantially rectangular parallelepiped slider 2 is fixed to the tip of the flexure 204.
　スライダ２の表面のうちフレクシャ２０４に固定された面の反対面は、記録媒体Ｄに対向する面である。この面は回転する記録媒体Ｄによって生じた空気流の粘性から、スライダ２が浮上するための圧力を発生させる面であり、ＡＢＳ（Ａｉｒ　Ｂｅａｒｉｎｇ　Ｓｕｒｆａｃｅ）と呼ばれている。ＡＢＳ上には図示を略した凹凸形状が設けられており、スライダ２と記録媒体Ｄ間に所望の圧力分布を発生させている。スライダ２を記録媒体Ｄから離そうとする正圧とスライダ２を記録媒体Ｄに引き付けようとする負圧と、サスペンション３による押しつけ力の釣り合いで、スライダ２は所望の状態で浮上している。記録媒体Ｄとスライダ２のすきまの最低値は１０ｎｍ程度もしくはそれ以下となっている。サスペンション３による押しつけ力は主にヒンジ２０２の弾性により発生している。また、記録媒体Ｄ表面のうねりに対して、ヒンジ２０２およびフレクシャ２０４がたわむことで、所望の浮上状態を維持することが出来る。 Of the surface of the slider 2, the surface opposite to the surface fixed to the flexure 204 is a surface facing the recording medium D. This surface is a surface that generates pressure for the slider 2 to rise from the viscosity of the air flow generated by the rotating recording medium D, and is called ABS (Air Bearing Surface). An uneven shape (not shown) is provided on the ABS, and a desired pressure distribution is generated between the slider 2 and the recording medium D. The slider 2 floats in a desired state due to a balance between the positive pressure for separating the slider 2 from the recording medium D, the negative pressure for attracting the slider 2 to the recording medium D, and the pressing force of the suspension 3. The minimum clearance between the recording medium D and the slider 2 is about 10 nm or less. The pressing force by the suspension 3 is mainly generated by the elasticity of the hinge 202. Further, since the hinge 202 and the flexure 204 are bent with respect to the undulation of the surface of the recording medium D, a desired floating state can be maintained.
　フレクシャ２０４上にはフレキシブル配線１３が設けられている。フレクシャ２０４は略コ字状の開口部を有しており、この開口部に囲まれて舌状となったパッド部２０４ａ上にスライダ２が固定されている。スライダ２の端部のうち、サスペンション３の根本側（キャリッジ１１側）は流入端と呼ばれている。その反対のサスペンション３の先端側は、スライダ２の流出端と呼ばれている。これらは、前述の記録媒体Ｄによる空気流の方向に基づいて名付けられている。サスペンション３の根本側から延設されたフレキシブル配線１３は途中から２本に分岐し、前述の開口部およびスライダ２の両側を回り込むように、スライダ２の流出端側に接続されている。 The flexible wiring 13 is provided on the flexure 204. The flexure 204 has a substantially U-shaped opening, and the slider 2 is fixed on a pad portion 204a that is surrounded by the opening and has a tongue shape. Of the ends of the slider 2, the base side (carriage 11 side) of the suspension 3 is called an inflow end. The tip side of the opposite suspension 3 is called the outflow end of the slider 2. These are named based on the direction of the air flow by the recording medium D described above. The flexible wiring 13 extended from the base side of the suspension 3 branches into two from the middle, and is connected to the outflow end side of the slider 2 so as to go around the opening and both sides of the slider 2.
　図３は図２のＡ－Ａ’断面を示す図である。スライダ２はスライダ基部３０１、記録素子３０２、導光部３０３、再生素子３０４から構成される。スライダ基部３０１の流出端側の側面に、記録素子３０２、導光部３０３、再生素子３０４が順に積層されている。また、スライダ基部３０１とパッド部２０４ａに挟まれるようにレーザ３０５が固定されている。レーザ３０５は端面発光型レーザであり、レーザ光が出射する端面が導光部３０３に光学的に接続されている。レーザ３０５はフレキシブル配線１３等を介して制御部５に接続されている。制御部５の電気信号に基づいてレーザ３０５が発光動作するようになっている。スライダ基部３０１は略直方体状の部材であり、ＡｌＴｉＣ材からなる。 FIG. 3 is a cross-sectional view taken along the line A-A ′ of FIG. The slider 2 includes a slider base 301, a recording element 302, a light guide unit 303, and a reproducing element 304. On the side surface on the outflow end side of the slider base 301, a recording element 302, a light guide section 303, and a reproducing element 304 are sequentially stacked. Further, a laser 305 is fixed so as to be sandwiched between the slider base 301 and the pad portion 204a. The laser 305 is an edge-emitting laser, and an end surface from which laser light is emitted is optically connected to the light guide unit 303. The laser 305 is connected to the control unit 5 through the flexible wiring 13 and the like. The laser 305 emits light based on the electrical signal from the control unit 5. The slider base 301 is a substantially rectangular parallelepiped member and is made of an AlTiC material.
　記録素子３０２は、スライダ基部３０１の流出端側の側面に固定された副磁極３０６と、ヨーク３０７を介して副磁極３０６に接続され記録媒体Ｄに対して垂直な記録磁界を主磁極３１０と、ヨーク３０７を中心としてヨーク３０７の周囲を螺旋状に巻回するコイル３０８とを備えている。主磁極３１０、副磁極３０６及びヨーク３０７は、磁束密度が高い高飽和磁束密度（Ｂｓ）材料（例えば、ＣｏＮｉＦｅ合金、ＣｏＦｅ合金等）により形成されている。また、コイル３０８は、ショートしないように、隣り合うコイル線間、ヨーク３０７、主磁極３１０、副磁極３０６との間に隙間が空くように配置されており、この状態で絶縁体３０９によってモールドされている。そして、コイル３０８は、情報に応じて変調された電流が制御部５から供給されるようになっている。よって、主磁極３１０、副磁極３０６、ヨーク３０７及びコイル３０８は、全体として電磁石を構成している。なお、主磁極３１０及び副磁極３０６は、記録媒体Ｄに対向する端面がスライダ２のＡＢＳと面一となるように設計されている。 The recording element 302 includes a sub magnetic pole 306 fixed to the side surface on the outflow end side of the slider base 301, a main magnetic pole 310 that applies a recording magnetic field connected to the sub magnetic pole 306 via the yoke 307 and perpendicular to the recording medium D, A coil 308 that spirally winds around the yoke 307 around the yoke 307 is provided. The main magnetic pole 310, the sub magnetic pole 306, and the yoke 307 are made of a high saturation magnetic flux density (Bs) material (for example, CoNiFe alloy, CoFe alloy, etc.) having a high magnetic flux density. Further, the coil 308 is arranged so that there is a gap between adjacent coil wires, the yoke 307, the main magnetic pole 310, and the sub magnetic pole 306 so as not to be short-circuited. In this state, the coil 308 is molded by the insulator 309. ing. The coil 308 is supplied with a current modulated according to information from the control unit 5. Therefore, the main magnetic pole 310, the sub magnetic pole 306, the yoke 307, and the coil 308 constitute an electromagnet as a whole. The main magnetic pole 310 and the sub magnetic pole 306 are designed so that the end surfaces facing the recording medium D are flush with the ABS of the slider 2.
　導光部３０３は、一端側がフレクシャ２０４側に向くと共に、他端側が記録媒体Ｄ側に向いた状態で、記録素子３０２に隣接して固定されている。より具体的には、主磁極３１０に隣接して固定されている。この導光部３０３は、多面体のコア３１１と、コア３１１を内部に閉じ込めるクラッド３１２と、後述の光散乱体３１３および遮光膜３１４から構成されており、全体として略板状に形成されている。コア３１１は光学的に透明でクラッド３１２よりも屈折率が大きい材料で構成されている。例えばコア３１１にゲルマニウムをドープしたＳｉＯ２を用い、クラッド３１２に純ＳｉＯ２を用いることができる。また、コア３１１にＴａ２Ｏ５を用い、クラッド３１２にアルミナを用いることもできる。レーザ３０５からのレーザ光が赤外光であればコア３１１にシリコンを用いることもできる。コア３１１の一端側の一部はクラッド３１２から露出しており、レーザ３０５の出射端面と接触しており、前述の導光部３０３とレーザ３０５との光学的接続を実現している。また、コア３１１の一端側には反射面３１１ａが設けられており、レーザ３０５からの光束の向きが略９０度変わるように反射させて、コア３１１長手方向へ光束を入射させている。コア３１１は一端側から他端側に向かう長手方向に直交する断面が三角形になっており、その断面積が他端側に向かって漸次減少するように絞り成形されており、反射面３１１ａによって反射された光束を集光させながら他端側に向けて伝播させている。つまり、コア３１１とクラッド３１２は、導入された光束のスポットサイズを絞るスポットサイズ変換器を構成している。 The light guide portion 303 is fixed adjacent to the recording element 302 with one end side facing the flexure 204 side and the other end side facing the recording medium D side. More specifically, it is fixed adjacent to the main pole 310. The light guide unit 303 includes a polyhedral core 311, a clad 312 that confines the core 311 inside, a light scattering body 313 and a light shielding film 314 described later, and is formed in a substantially plate shape as a whole. The core 311 is made of a material that is optically transparent and has a higher refractive index than the clad 312. For example, the core 311 can be made of germanium-doped SiO2, and the clad 312 can be made of pure SiO2. Further, Ta 2 O 5 can be used for the core 311 and alumina can be used for the clad 312. If the laser light from the laser 305 is infrared light, silicon can be used for the core 311. A part of one end side of the core 311 is exposed from the clad 312 and is in contact with the emission end face of the laser 305, thereby realizing an optical connection between the light guide unit 303 and the laser 305. In addition, a reflection surface 311 a is provided on one end side of the core 311, and the light flux is incident in the longitudinal direction of the core 311 by reflecting the light flux from the laser 305 so as to change by approximately 90 degrees. The core 311 has a triangular cross section perpendicular to the longitudinal direction from one end side to the other end side, and is drawn so that the cross-sectional area gradually decreases toward the other end side, and is reflected by the reflecting surface 311a. The condensed light flux is condensed and propagated toward the other end side. That is, the core 311 and the clad 312 constitute a spot size converter that narrows the spot size of the introduced light beam.
　また、再生素子３０４は、記録媒体Ｄから漏れ出ている磁界の大きさに応じて電気抵抗が変換する磁気抵抗効果膜である。この再生素子３０４には、図示しないリード膜等を介して制御部５からバイアス電流が供給されている。これにより制御部５は、記録媒体Ｄから漏れ出た磁界の変化を電圧の変化として検出することでき、この電圧の変化から信号の再生を行うことができるようになっている。 Also, the reproducing element 304 is a magnetoresistive film whose electric resistance is converted according to the magnitude of the magnetic field leaking from the recording medium D. A bias current is supplied to the reproducing element 304 from the control unit 5 via a lead film (not shown). Thereby, the control unit 5 can detect a change in the magnetic field leaking from the recording medium D as a change in voltage, and can reproduce a signal from the change in voltage.
　導光部３０３と主磁極３１０近傍の詳細構造について図４および図５を用いて説明する。図４は導光部３０３と主磁極３１０の記録媒体Ｄ近傍の一部を拡大した断面図である。図５は図４をスライダ２のＡＢＳから見た下面図である。主磁極３１０はクラッド３１２に接しているが、記録媒体Ｄ近傍ではクラッド３１２側に埋め込まれるようにせり出した主磁極先端３１０ａを有している。主磁極先端３１０ａの記録媒体Ｄに対向する端面がスライダ２のＡＢＳと面一となっている。主磁極先端３１０ａの一側面上には光散乱体３１３が構成されている。コア３１１は他端側の側面がクラッド３１２から露出した露出部３１１ｂを有しており、露出部３１１ｂを介して光散乱体３１３と接している。コア３１１の他端側は遮光膜３１４により覆われている。光散乱体３１３は金、銀、プラチナ等の材料からなっている。遮光膜３１４はアルミニウム等の材料からなっている。本実施形態では、遮光膜３１４は、光散乱体３１３に対して斜めに備えられており、コア３１１の記録媒体側に向うにつれて遮光膜３１４と光散乱体３１３との間隔が狭くなるよう（絞り込み構造）に備えられている。前述のようにコア３１１とクラッド３１２はスポットサイズ変換器を構成しているが、絞り込み構造の手前で、コア３１１とクラッド３１２界面の全反射による光絞り込みの限界となるコア寸法となっている。具体的にはレーザ３０５の光束が可視光や近赤外光の場合、コア断面がおおよそ数μｍ程度の寸法となっている。これ以下になると光束をコア内に閉じこめることが出来ず、漏れ出してしまう。しかし、絞り込み構造に備えられた遮光膜３１４のために光束が外部に漏れ出ることがなく、遮光膜３１４とコア３１１との界面を反射しながら露出部３１１ｂに集中し、露出部３１１ｂを介して光散乱体３１３に効率よく照射される。光散乱体３１３に照射された光束は表面プラズモンに変換されて、光散乱体３１３表面を伝搬し、光散乱体３１３の記録媒体Ｄ側の端面（光散乱体先端部）で近接場光を発生させる。つまり、コア３１１の先端部で光束が終端するが、その後は光束が表面プラズモンに変換されて光散乱体３１３の記録媒体Ｄ側の端面から近接場光が発生する。光散乱体３１３は主磁極先端３１０ａと接しているため、主磁極先端３１０ａからの磁束と、光散乱体３１３からの近接場光が、極めて近接した形で発生する。 The detailed structure in the vicinity of the light guide unit 303 and the main magnetic pole 310 will be described with reference to FIGS. FIG. 4 is an enlarged cross-sectional view of a part of the vicinity of the recording medium D of the light guide unit 303 and the main magnetic pole 310. FIG. 5 is a bottom view of FIG. 4 as viewed from the ABS of the slider 2. The main magnetic pole 310 is in contact with the clad 312, but has a main magnetic pole tip 310 a protruding so as to be embedded on the clad 312 side in the vicinity of the recording medium D. The end surface of the main magnetic pole tip 310a facing the recording medium D is flush with the ABS of the slider 2. A light scatterer 313 is formed on one side surface of the main magnetic pole tip 310a. The core 311 has an exposed portion 311b whose side surface on the other end side is exposed from the clad 312, and is in contact with the light scatterer 313 through the exposed portion 311b. The other end side of the core 311 is covered with a light shielding film 314. The light scatterer 313 is made of a material such as gold, silver, or platinum. The light shielding film 314 is made of a material such as aluminum. In the present embodiment, the light shielding film 314 is provided obliquely with respect to the light scatterer 313, so that the distance between the light shielding film 314 and the light scatterer 313 becomes narrower toward the recording medium side of the core 311 (narrowing down). Structure). As described above, the core 311 and the clad 312 constitute a spot size converter. However, the core size becomes the limit of optical constriction due to total reflection at the interface between the core 311 and the clad 312 before the narrowing structure. Specifically, when the luminous flux of the laser 305 is visible light or near infrared light, the core cross section has a dimension of about several μm. Below this value, the light flux cannot be confined in the core and leaks out. However, the light shielding film 314 provided in the narrowing-down structure prevents the light flux from leaking outside, concentrates on the exposed portion 311b while reflecting the interface between the light shielding film 314 and the core 311, and passes through the exposed portion 311b. The light scatterer 313 is efficiently irradiated. The light beam applied to the light scatterer 313 is converted into surface plasmon, propagates on the surface of the light scatterer 313, and generates near-field light at the end surface (light scatterer tip) of the light scatterer 313 on the recording medium D side. Let That is, the light beam terminates at the tip of the core 311, but thereafter, the light beam is converted into surface plasmon, and near-field light is generated from the end surface of the light scatterer 313 on the recording medium D side. Since the light scatterer 313 is in contact with the main pole tip 310a, the magnetic flux from the main pole tip 310a and the near-field light from the light scatterer 313 are generated in a very close form.
　図６は図４と同じ箇所を示す図であり、スライダ２の流出端側から再生素子３０４とクラッド３１２および遮光膜３１４を透過して、コア３１１と光散乱体３１３を見た図である。光散乱体３１３は記録媒体Ｄ面と垂直方向に長い略直方体形状を有しており、その幅は数十ｎｍ以下である。コア３１１は、記録素子３０２側の側面の一部である露出部３１１ｂのみで光散乱体３１３に接している。近接場光のスポットサイズは光散乱体３１３の記録媒体Ｄ側の寸法と同程度である。 FIG. 6 is a view showing the same portion as FIG. 4, and is a view of the core 311 and the light scatterer 313 as seen from the outflow end side of the slider 2 through the reproducing element 304, the clad 312 and the light shielding film 314. The light scatterer 313 has a substantially rectangular parallelepiped shape that is long in the direction perpendicular to the surface of the recording medium D, and its width is several tens of nm or less. The core 311 is in contact with the light scatterer 313 only at the exposed portion 311b which is a part of the side surface on the recording element 302 side. The spot size of the near-field light is approximately the same as the size of the light scatterer 313 on the recording medium D side.
　図７は図６のバリエーションを示す図である。光散乱体３１３は記録媒体Ｄ側が細くなっている羽子板状の形状を有している。記録媒体Ｄ側の光散乱体３１３の幅は数十ｎｍ以下である。光散乱体３１３のコア３１１側は、コア３１１と同じ幅でコア３１１と接している。 FIG. 7 shows a variation of FIG. The light scatterer 313 has a feather-plate shape in which the recording medium D side is thin. The width of the light scatterer 313 on the recording medium D side is several tens of nm or less. The core 311 side of the light scatterer 313 is in contact with the core 311 with the same width as the core 311.
　図８および図９は図６の別のバリエーションを示す図である。コア３１１の他端側が尖った形状となっている。このようにコア３１１は光束を伝搬できるような多面体形状であればどのような形状でも良い。また、コア３１１とクラッド３１２はスポットサイズ変換器ではなくて単なる光導波路でも良い。光散乱体３１３は図８では直線状、図９では露出部３１１ｂと重なる部分が広く、記録媒体Ｄと対向する側が細いへら状になっている。このように光散乱体３１３は露出部３１１ｂと重なる部分と記録媒体Ｄに対向する光散乱体先端部を有していればどのような形状でも良い。 8 and 9 are diagrams showing another variation of FIG. The other end side of the core 311 has a sharp shape. As described above, the core 311 may have any shape as long as it has a polyhedral shape capable of propagating a light beam. The core 311 and the clad 312 may not be a spot size converter but a simple optical waveguide. The light scatterer 313 has a linear shape in FIG. 8, a wide portion overlapping the exposed portion 311b in FIG. 9, and a thin spatula on the side facing the recording medium D. As described above, the light scatterer 313 may have any shape as long as the light scatterer 313 has a portion overlapping the exposed portion 311b and the light scatterer tip facing the recording medium D.
　図１０は図９のバリエーションを示す図である。コア３１１の他端側がへら状の光散乱体３１１に平面形状が一致するように、記録媒体Ｄに対向するところまで延長された延長部３１１ｃを有している。図１１は図９の別のバリエーションを示す図である。このように平面から構成される多面体形状だけでなく曲面から構成されても良い。 FIG. 10 is a diagram showing a variation of FIG. The other end side of the core 311 has an extended portion 311c extended to a position facing the recording medium D so that the planar shape matches the spatula-shaped light scatterer 311. FIG. 11 is a diagram showing another variation of FIG. Thus, it may be configured not only from a polyhedron shape configured from a plane but also from a curved surface.
　図１２は図４のバリエーションを示す図である。このようにコア３１１と遮光膜３１４の間に第２のコア３１５をはさんでも良い。この場合、レーザ３０５からの光束は、遮光膜３１４と第２のコア３１５との界面を反射しながら露出部３１１ｂに集中する。また、第２のコア３１５は光散乱体３１３の一部を覆っており、遮光膜３１４と光散乱体３１３の接触を防ぎ、これらの材料が拡散する等の変質を起こすことを防いでいる。 FIG. 12 is a diagram showing a variation of FIG. In this manner, the second core 315 may be sandwiched between the core 311 and the light shielding film 314. In this case, the light beam from the laser 305 is concentrated on the exposed portion 311b while reflecting the interface between the light shielding film 314 and the second core 315. Further, the second core 315 covers a part of the light scatterer 313 to prevent contact between the light shielding film 314 and the light scatterer 313 and to prevent alteration such as diffusion of these materials.
　本実施の形態によって、コア３１１により伝搬された光束は遮光膜３１４によって漏れ出ることなく、一度光散乱体３１３上の表面プラズモンを介して、近接場光として初めてスライダ２表面に発生する。よって、記録媒体Ｄには近接場光のみが照射され、コア３１１からの伝搬光が照射されることがない。よって、記録媒体Ｄのうち近接場光のサイズに対応した微小領域のみが加熱されるため、記録媒体Ｄに書き込む情報の密度を向上させることができる。 According to the present embodiment, the light beam propagated by the core 311 does not leak out by the light shielding film 314 but is generated on the surface of the slider 2 for the first time as near-field light through the surface plasmon on the light scatterer 313 once. Therefore, only the near-field light is irradiated to the recording medium D, and the propagation light from the core 311 is not irradiated. Therefore, since only a minute region corresponding to the size of the near-field light in the recording medium D is heated, the density of information written to the recording medium D can be improved.
（第２実施形態）
　以下、本発明に係る第２実施形態を、図１３から図１５を参照して説明する。第１実施形態と同一箇所については同一符号を付して詳細な説明を省略する。本実施形態が第１実施形態と異なる点は、レーザをスライダから離れた場所に搭載し、レーザとスライダを光ファイバで接続した点と、スライダ中の導光部と記録素子の積層の順序が異なる点である。 (Second Embodiment)
A second embodiment according to the present invention will be described below with reference to FIGS. The same parts as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. This embodiment is different from the first embodiment in that the laser is mounted at a location away from the slider, the laser and the slider are connected by an optical fiber, and the order of stacking the light guide unit and the recording element in the slider. It is a different point.
　図１３は第２実施形態に係るヘッドジンバルアセンブリ１２の拡大図である。フレクシャ２０４上にはフレキシブル配線４０３が設けられている。レーザ４０１はフレクシャ２０４のうちベースプレート２０１上に載る部分の一部に設けられている。レーザ４０１とフレキシブル配線４０３は電気的に接続され、制御部５の電気信号に基づいてレーザ４０１が発光動作するようになっている。レーザ４０１の出射端には光ファイバ４０２が光学的に接続されている。光ファイバ４０２のもう一端は、スライダ２に設けられた後述の導光部５０１と光学的に結合している。また、光ファイバ４０２はスリーブ４０４をもちいて光ファイバ４０２の長手方向が自由になるように支持されている。 FIG. 13 is an enlarged view of the head gimbal assembly 12 according to the second embodiment. A flexible wiring 403 is provided on the flexure 204. The laser 401 is provided in a part of a portion of the flexure 204 that rests on the base plate 201. The laser 401 and the flexible wiring 403 are electrically connected, and the laser 401 emits light based on the electric signal from the control unit 5. An optical fiber 402 is optically connected to the emission end of the laser 401. The other end of the optical fiber 402 is optically coupled to a light guide 501 (described later) provided on the slider 2. The optical fiber 402 is supported by using a sleeve 404 so that the longitudinal direction of the optical fiber 402 is free.
　図１４は図１３のＢ－Ｂ’断面である。スライダ２はスライダ基部３０１、導光部５０１、記録素子３０３、再生素子３０４から構成される。スライダ基部３０１の流出端側の側面に、導光部５０１、記録素子３０３、再生素子３０４が順に積層されている。また、光ファイバ４０２がスライダ基部３０１とパッド部２０４ａに挟まれるように固定されており、その端面は光ファイバ４０２の長手方向に対して傾斜した反射面４０２ａを形成している。 FIG. 14 is a B-B ′ cross section of FIG. 13. The slider 2 includes a slider base 301, a light guide 501, a recording element 303, and a reproducing element 304. A light guide 501, a recording element 303, and a reproducing element 304 are sequentially stacked on the side surface on the outflow end side of the slider base 301. Further, the optical fiber 402 is fixed so as to be sandwiched between the slider base 301 and the pad portion 204 a, and the end surface forms a reflecting surface 402 a inclined with respect to the longitudinal direction of the optical fiber 402.
　導光部５０１は、一端側がフレクシャ２０４側に向くと共に、他端側が記録媒体Ｄ側に向いた状態で、スライダ基部３０１に隣接して固定されている。この導光部５０１は、多面体のコア５０４と、コア５０４を内部に閉じ込めるクラッド５０３と、光散乱体３１３および遮光膜３１４から構成されており、全体として略板状に形成されている。それぞれの材料は第１実施形態と同様である。コア５０４の一端側はクラッド５０３から露出しており、光ファイバ４０２の側面と接触しており、前述の導光部５０１と光ファイバ４０２との光学的接続を実現している。光ファイバ４０２により伝搬された光束は、反射面４０２ａにてその向きが略９０度曲げられ、コア５０４長手方向へ入射する。コア５０４は一端側から他端側に向かう長手方向に直交する断面が三角形になっており、その断面積が他端側に向かって漸次減少するように絞り成形されており、入射した光束を集光させながら他端側に向けて伝播させている。つまり、コア５０４とクラッド５０３は、導入された光束のスポットサイズを絞るスポットサイズ変換器を構成している。 The light guide 501 is fixed adjacent to the slider base 301 with one end facing toward the flexure 204 and the other end facing toward the recording medium D. The light guide unit 501 includes a polyhedral core 504, a clad 503 that confines the core 504 therein, a light scatterer 313, and a light shielding film 314, and is formed in a substantially plate shape as a whole. Each material is the same as in the first embodiment. One end side of the core 504 is exposed from the clad 503 and is in contact with the side surface of the optical fiber 402, thereby realizing the optical connection between the light guide unit 501 and the optical fiber 402. The direction of the light beam propagated by the optical fiber 402 is bent by approximately 90 degrees at the reflection surface 402 a and enters the core 504 in the longitudinal direction. The core 504 has a triangular cross section perpendicular to the longitudinal direction from one end side to the other end side. The core 504 is drawn so that the cross sectional area gradually decreases toward the other end side. The light is propagated toward the other end while being illuminated. That is, the core 504 and the clad 503 constitute a spot size converter that reduces the spot size of the introduced light beam.
　記録素子３０２の形状は第１実施形態と同様であるが、固定される向きが異なり、導光部５０１側に主磁極３１０が設けられ、再生素子３０４側に副磁極３０６が設けられる。 The shape of the recording element 302 is the same as that of the first embodiment, but the fixing direction is different. The main magnetic pole 310 is provided on the light guide 501 side, and the sub magnetic pole 306 is provided on the reproducing element 304 side.
　導光部５０１と主磁極３１０近傍の詳細構造について図１５を用いて説明する。図１５は導光部５０１と主磁極３１０の記録媒体Ｄ近傍の一部を拡大した断面図である。主磁極３１０はクラッド５０３に接しているが、記録媒体Ｄ近傍ではクラッド５０３側に埋め込まれるようにせり出した主磁極先端３１０ａを有している。主磁極先端３１０ａの一側面上には光散乱体３１３が構成されている。コア５０４は前述の他端側の側面がクラッド５０３から露出した露出部５０４ｂを有しており、露出部５０４ｂを介して光散乱体３１３と接している。コア５０４の他端側は遮光膜３１４により覆われている。前述のように光ファイバ４０２からの光束はコア５０４の一端側から他端側に伝搬するが、遮光膜３１４のために外部に漏れ出ることがなく、遮光膜３１４とコア５０４との界面を反射しながら露出部５０４ｂに集中し、露出部５０４ｂを介して光散乱体３１３に照射される。光散乱体３１３に照射された光束は表面プラズモンに変換されて、光散乱体３１３表面を伝搬し、光散乱体３１３の記録媒体Ｄ側の端面で近接場光を発生させる。 The detailed structure near the light guide 501 and the main magnetic pole 310 will be described with reference to FIG. FIG. 15 is an enlarged cross-sectional view of a part of the light guide 501 and the main magnetic pole 310 in the vicinity of the recording medium D. The main magnetic pole 310 is in contact with the clad 503, but has a main magnetic pole tip 310 a protruding so as to be embedded on the clad 503 side in the vicinity of the recording medium D. A light scatterer 313 is formed on one side surface of the main magnetic pole tip 310a. The core 504 has an exposed portion 504b whose side surface on the other end is exposed from the cladding 503, and is in contact with the light scatterer 313 through the exposed portion 504b. The other end side of the core 504 is covered with a light shielding film 314. As described above, the light flux from the optical fiber 402 propagates from one end side to the other end side of the core 504, but does not leak to the outside due to the light shielding film 314, and reflects the interface between the light shielding film 314 and the core 504. The light scatterer 313 is irradiated through the exposed portion 504b while concentrating on the exposed portion 504b. The light beam irradiated on the light scatterer 313 is converted into surface plasmon, propagates on the surface of the light scatterer 313, and generates near-field light on the end surface of the light scatterer 313 on the recording medium D side.
　本実施の形態によっても、第１実施形態と同様の効果を実現することができる。また、主磁極３１０を光散乱体３１３に対してスライダ２の流出端とは反対側に配しているため、記録媒体Ｄを光散乱体３１３からの近接場光で加熱し、その後主磁極３１０からの磁束で書き込みをおこなうことができ、効率良く情報の記録を実現することができる。 Also according to the present embodiment, the same effect as that of the first embodiment can be realized. Further, since the main magnetic pole 310 is arranged on the side opposite to the outflow end of the slider 2 with respect to the light scatterer 313, the recording medium D is heated with near-field light from the light scatterer 313 and then the main magnetic pole 310. Thus, information can be recorded efficiently.
（第３実施形態）
　以下、本発明に係る第３実施形態を、図１６と図１７を参照して説明する。第１および第２実施形態と同一箇所については同一符号を付して詳細な説明を省略する。本実施形態が第１実施形態と異なる点は、主磁極と副磁極の間に導光部を設けている点、またスライダにレーザを直接搭載している点である。 (Third embodiment)
Hereinafter, a third embodiment according to the present invention will be described with reference to FIGS. 16 and 17. The same parts as those in the first and second embodiments are denoted by the same reference numerals, and detailed description thereof is omitted. This embodiment is different from the first embodiment in that a light guide is provided between the main magnetic pole and the sub magnetic pole, and that a laser is directly mounted on the slider.
　図１６は第３実施形態に係るヘッドジンバルアセンブリ１２の断面図である。記録素子３０２は、クラッド３１２ａ内にモールドされた主磁極３１０、副磁極３０６およびコイル３０８と、主磁極３１０および副磁極３０６の間に配置されたヨーク３０７と、を備えている。 FIG. 16 is a cross-sectional view of the head gimbal assembly 12 according to the third embodiment. The recording element 302 includes a main magnetic pole 310, a sub magnetic pole 306, and a coil 308 molded in the clad 312a, and a yoke 307 disposed between the main magnetic pole 310 and the sub magnetic pole 306.
　副磁極３０６は、再生素子３０４上に配置されるとともに、ヨーク３０７の一端側が接続されている。コイル３０８は、ヨーク３０７を中心としてヨーク３０７の周囲に螺旋状に形成されている。また、ヨーク３０７には貫通孔３０７ａが形成され、この貫通孔３０７ａ内を貫通するようにコア３１１が配置されている。そして、ヨーク３０７の他端側には主磁極３１０が接続されている。 The sub magnetic pole 306 is disposed on the reproducing element 304 and is connected to one end of the yoke 307. The coil 308 is formed in a spiral shape around the yoke 307 with the yoke 307 as the center. A through hole 307a is formed in the yoke 307, and a core 311 is disposed so as to penetrate through the through hole 307a. The main magnetic pole 310 is connected to the other end of the yoke 307.
　スライダ基部３０１には、レーザ光源６０１が搭載されている。レーザ光源６０１は、スライダ基部３０１の上面に固定されたレーザマウント６０２と、レーザマウント６０２の前端面６０２ａに固定された半導体レーザチップ６０３と、を有している。レーザマウント６０２は、例えばスライダ基部３０１と同一材料により構成され、記録媒体Ｄの面と平行方向における外形がスライダ基部３０１と同等に形成された板状の部材であり、上面側がフレクシャ２０４のパッド部２０４ａに固定されている。すなわち、スライダ基部３０１は、パッド部２０４ａとの間にレーザマウント６０２を挟持した状態でパッド部２０４ａに固定されている。なお、図示しないがレーザマウント６０２には電気配線が固定されている。この電気配線によりフレキシブル配線１３と半導体レーザチップ６０３が電気的に接続されている。半導体レーザチップ６０３は、その出射側端面を下方に向けた状態で、かつコア３１１の一端側端面に対向するように配置されている。半導体レーザチップ６０３からの光束はコア３１１に導入され、コア３１１の他端側に導かれる。また、半導体レーザチップ６０３の出射側端面と、コア３１１との間に間隔を有しているが、この間隔内にコア３１１と同等の屈折率を有するオイル等を介在させても構わない。 A laser light source 601 is mounted on the slider base 301. The laser light source 601 includes a laser mount 602 that is fixed to the upper surface of the slider base 301 and a semiconductor laser chip 603 that is fixed to the front end surface 602 a of the laser mount 602. The laser mount 602 is a plate-like member made of, for example, the same material as the slider base 301 and having an outer shape in the direction parallel to the surface of the recording medium D formed to be the same as that of the slider base 301, and the upper surface side is the pad portion of the flexure 204. 204a is fixed. That is, the slider base 301 is fixed to the pad portion 204a with the laser mount 602 sandwiched between the slider base portion 301 and the pad portion 204a. Although not shown, electric wiring is fixed to the laser mount 602. The flexible wiring 13 and the semiconductor laser chip 603 are electrically connected by this electric wiring. The semiconductor laser chip 603 is disposed so that its emission side end face is directed downward and is opposed to the one end side end face of the core 311. The light beam from the semiconductor laser chip 603 is introduced into the core 311 and guided to the other end side of the core 311. Further, although there is a gap between the emission side end face of the semiconductor laser chip 603 and the core 311, oil having a refractive index equivalent to that of the core 311 may be interposed in this gap.
　図１７は導光部と主磁極３１０の記録媒体Ｄ近傍の一部を拡大した断面図である。光散乱体３１３、コア３１１、第２のコア３１５、主磁極３１０の順に積層されている。主磁極先端３１０ａは、第１および第２実施形態における遮光膜３１４の役割を兼ねている。 FIG. 17 is an enlarged cross-sectional view of a part of the light guide and the main magnetic pole 310 near the recording medium D. The light scatterer 313, the core 311, the second core 315, and the main magnetic pole 310 are stacked in this order. The main magnetic pole tip 310a also serves as the light shielding film 314 in the first and second embodiments.
　本実施の形態によっても、第１実施形態と同様の効果を実現することができる。また、スライダ３における最も前端側に、光散乱体３１３と主磁極３１０とを配置できるので、光散乱体３１３から散乱した近接場光と、主磁極３１０による磁界を記録媒体Ｄに最も接近した状態で発生させることができる。これにより、記録媒体Ｄへの記録をスムーズ、かつ高精度に行うことができる。 Also according to the present embodiment, the same effect as that of the first embodiment can be realized. In addition, since the light scatterer 313 and the main magnetic pole 310 can be disposed on the most front end side of the slider 3, the near-field light scattered from the light scatterer 313 and the magnetic field generated by the main magnetic pole 310 are closest to the recording medium D. Can be generated. Thereby, recording on the recording medium D can be performed smoothly and with high accuracy.
　なお、本発明の技術範囲は、上述した実施形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において、上述した実施形態に種々の変更を加えたものを含む。すなわち、上述した実施形態で挙げた構成等はほんの一例に過ぎず、適宜変更が可能である。また、上述した各実施形態を適宜組み合わせて採用することも可能である。 It should be noted that the technical scope of the present invention is not limited to the above-described embodiment, and includes those in which various modifications are made to the above-described embodiment without departing from the spirit of the present invention. In other words, the configuration described in the above-described embodiment is merely an example, and can be changed as appropriate. Moreover, it is also possible to employ | adopt combining each embodiment mentioned above suitably.
Ｄ記録媒体　１情報記録再生装置　２スライダ　３サスペンション　１１キャリッジ　１２ヘッドジンバルアセンブリ　１３フレキシブル配線　２０４フレクシャ　２０４ａパッド部　３０６副磁極　３０８コイル　３１０主磁極　３１１コア　３１１ｂ露出部　３１２クラッド　３１３光散乱体　３１４遮光膜 D recording medium 1 information recording / reproducing apparatus 2 slider 3 suspension 11 carriage 12 head gimbal assembly 13 flexible wiring 204 flexure 204a pad part 306 sub magnetic pole 308 coil 310 main magnetic pole 311 core 311b exposed part 312 clad 313 light scatterer 314 light shielding film

Claims (9)

  1. 　記録媒体を近接場光によって加熱するとともに前記記録媒体に対して記録磁界を与えることにより、磁化反転を生じさせ、情報を記録させる近接場光利用ヘッドであって、
    　前記記録媒体の表面に対向配置されたスライダと、
    　前記スライダに固定され、光束を伝搬するコアを有する光導波路と、
    　前記記録媒体側の前記コアの先端部の少なくとも光軸が横切る部分を覆う遮光膜と、
    　前記コアの先端部の前記遮光膜で覆われていない部分に備えられた基部と、前記記録媒体に露出した光散乱体先端部とを備えており、前記コア及び前記基部の境界部分に前記光束が照射されることにより、前記境界部分を介して生じる表面プラズモンを用いて前記光散乱体先端部から近接場光を発生させる光散乱体と
    を備えることを特徴とする近接場光利用ヘッド。     A near-field light utilization head that records information by causing magnetization reversal by heating a recording medium with near-field light and applying a recording magnetic field to the recording medium,
    A slider disposed opposite to the surface of the recording medium;
    An optical waveguide fixed to the slider and having a core for propagating a light beam;
    A light-shielding film that covers at least a portion of the tip of the core on the recording medium side that the optical axis crosses,
    A base provided at a portion of the tip of the core not covered with the light-shielding film, and a light scatterer tip exposed at the recording medium, and the light flux at a boundary between the core and the base And a light scatterer that generates near-field light from the tip of the light scatterer using surface plasmons generated through the boundary portion.
  2. 　前記光導波路は、前記コアの先端部に向うにつれて前記光束のスポットサイズを絞り込むスポットサイズ変換器であることを特徴とする請求項１に記載の近接場光利用ヘッド。 2. The near-field light using head according to claim 1, wherein the optical waveguide is a spot size converter that narrows the spot size of the light beam toward the tip of the core.
  3. 　前記遮光膜は、前記光散乱体に対して斜めに備えられており、前記コアの前記記録媒体側に向うにつれて前記遮光膜と前記光散乱体との間隔が狭くなるように備えられていることを特徴とする請求項１または２のいずれかに記載の近接場光利用ヘッド。 The light-shielding film is provided obliquely with respect to the light scatterer, and is provided such that a distance between the light-shielding film and the light scatterer becomes narrower toward the recording medium side of the core. The near-field light utilizing head according to claim 1, wherein:
  4. 　前記スライダに固定され、前記光導波路の前記記録媒体側とは逆側の端側に前記光束を導入するレーザを備えることを特徴とする請求項１から３のいずれかに記載の近接場光利用ヘッド。 The near-field light utilization according to any one of claims 1 to 3, further comprising a laser that is fixed to the slider and that introduces the light beam to an end side of the optical waveguide opposite to the recording medium side. head.
  5. 　前記スライダに固定され、前記光導波路の前記記録媒体側とは逆側の端側に前記光束を導入する第２の光導波路を備えることを特徴とする請求項１から３のいずれかに記載の近接場光利用ヘッド。 4. The optical waveguide according to claim 1, further comprising: a second optical waveguide that is fixed to the slider and that introduces the light flux to an end side of the optical waveguide opposite to the recording medium side. 5. Near-field light head.
  6. 　前記基部と前記光散乱体先端部とが異なる幅を有することを特徴とする請求項１から５のいずれかに記載の近接場光利用ヘッド。 6. The near-field light utilizing head according to claim 1, wherein the base and the light scatterer tip have different widths.
  7. 　前記基部が前記コアの先端部と同じ幅を有することを特徴とする請求項１から６のいずれかに記載の近接場光利用ヘッド。 The near-field light utilizing head according to any one of claims 1 to 6, wherein the base has the same width as the tip of the core.
  8. 　前記基部が前記コアの先端部の側面に設けられていることを特徴とする請求項１から７のいずれかに記載の近接場光利用ヘッド。 The near-field light utilizing head according to any one of claims 1 to 7, wherein the base is provided on a side surface of the tip of the core.
  9. 　請求項１から請求項８のいずれかに記載の近接場光利用ヘッドと、前記記録媒体とを有する情報記録再生装置。 An information recording / reproducing apparatus comprising: the near-field light using head according to any one of claims 1 to 8; and the recording medium.
PCT/JP2011/053437 2010-02-23 2011-02-18 Head using near-field light, and information recording/reproducing device provided therewith WO2011105286A1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003006803A (en) * 2001-06-22 2003-01-10 Fuji Xerox Co Ltd Optical magnetic head and magneto-optical disk device
JP2003114184A (en) * 2001-10-04 2003-04-18 Hitachi Ltd Near-field light generation apparatus
JP2008152897A (en) * 2006-11-20 2008-07-03 Seiko Instruments Inc Near-field light generation element, near-field light head, and information recording/reproducing device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003006803A (en) * 2001-06-22 2003-01-10 Fuji Xerox Co Ltd Optical magnetic head and magneto-optical disk device
JP2003114184A (en) * 2001-10-04 2003-04-18 Hitachi Ltd Near-field light generation apparatus
JP2008152897A (en) * 2006-11-20 2008-07-03 Seiko Instruments Inc Near-field light generation element, near-field light head, and information recording/reproducing device

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