WO2011087217A3 - 정전용량형 압력센서 및 그 제조방법 - Google Patents
정전용량형 압력센서 및 그 제조방법 Download PDFInfo
- Publication number
- WO2011087217A3 WO2011087217A3 PCT/KR2010/009249 KR2010009249W WO2011087217A3 WO 2011087217 A3 WO2011087217 A3 WO 2011087217A3 KR 2010009249 W KR2010009249 W KR 2010009249W WO 2011087217 A3 WO2011087217 A3 WO 2011087217A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrode
- pressure sensor
- capacitive pressure
- manufacturing
- insertion groove
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
본 발명은 제조공정이 단순하고 빠르며, 동일한 품질의 전극형성이 용이한 정전용량형 압력센서와 그것의 제조방법을 제공하는 것이다. 본 발명은 하면의 소정영역에 제1전극이 장착된 커버부재와, 상기 커버부재의 하부에 설치되고 상기 제1전극과 소정의 간격을 가지는 제2전극이 상부에 설치된 몸체부와, 상기 커버부재와 상기 몸체부를 접합하는 접합부재를 포함하는 정전용량형 압력센서에 있어서, 상기 몸체부에는 삽입홈이 형성되고, 상기 삽입홈에 제2전극이 삽입되며, 상기 제2전극과 상기 삽입홈의 바닥면은 전극접합체에 의해 접합되어 있는 정전용량형 압력센서를 제공한다.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20100002900 | 2010-01-12 | ||
KR10-2010-0002900 | 2010-01-12 | ||
KR10-2010-0011854 | 2010-02-09 | ||
KR1020100011854A KR100962022B1 (ko) | 2010-01-12 | 2010-02-09 | 정전용량형 압력센서 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2011087217A2 WO2011087217A2 (ko) | 2011-07-21 |
WO2011087217A3 true WO2011087217A3 (ko) | 2011-11-10 |
Family
ID=42369727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2010/009249 WO2011087217A2 (ko) | 2010-01-12 | 2010-12-23 | 정전용량형 압력센서 및 그 제조방법 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100962022B1 (ko) |
WO (1) | WO2011087217A2 (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101227866B1 (ko) * | 2011-03-07 | 2013-01-31 | 박성현 | 세라믹형 정전용량식 압력센서 |
US9383283B2 (en) * | 2014-01-16 | 2016-07-05 | Sensata Technologies, Inc. | Pressure transducer with capacitively coupled source electrode |
US9470594B2 (en) * | 2014-01-17 | 2016-10-18 | Sensata Technologies, Inc. | Differential pressure sensor with dual output using a double-sided capacitive sensing element |
DE102016205163A1 (de) * | 2016-03-30 | 2017-10-05 | Robert Bosch Gmbh | Elektrogerät mit einem Gehäuse mit einem kapazitiven Drucksensor und Drucksensorarray |
EP3679332B1 (en) * | 2018-11-30 | 2022-11-23 | Carrier Corporation | Printed capacitive liquid level sensor for fire suppression |
KR20200094529A (ko) | 2019-01-30 | 2020-08-07 | 에스케이하이닉스 주식회사 | 반도체 메모리 장치 및 그 제조방법 |
KR102577156B1 (ko) | 2019-05-02 | 2023-09-12 | 에스케이하이닉스 주식회사 | 반도체 메모리 장치의 제조방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1022512A (ja) * | 1996-07-01 | 1998-01-23 | Tokin Corp | 静電容量型圧力センサ |
KR20030026083A (ko) * | 2001-09-24 | 2003-03-31 | 주식회사코닉스 | 정전 용량식 압력센서의 제조방법 및 이를 이용한 압력검출 장치 |
JP2004177343A (ja) * | 2002-11-28 | 2004-06-24 | Fujikura Ltd | 圧力センサ |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2795730B1 (fr) | 1999-07-01 | 2001-08-31 | Adir | Nouveaux inhibiteurs de metalloproteases, leur procede de preparation et les compositions pharmaceutiques qui les contiennent |
-
2010
- 2010-02-09 KR KR1020100011854A patent/KR100962022B1/ko not_active IP Right Cessation
- 2010-12-23 WO PCT/KR2010/009249 patent/WO2011087217A2/ko active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1022512A (ja) * | 1996-07-01 | 1998-01-23 | Tokin Corp | 静電容量型圧力センサ |
KR20030026083A (ko) * | 2001-09-24 | 2003-03-31 | 주식회사코닉스 | 정전 용량식 압력센서의 제조방법 및 이를 이용한 압력검출 장치 |
JP2004177343A (ja) * | 2002-11-28 | 2004-06-24 | Fujikura Ltd | 圧力センサ |
Also Published As
Publication number | Publication date |
---|---|
WO2011087217A2 (ko) | 2011-07-21 |
KR100962022B1 (ko) | 2010-06-08 |
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