WO2011087217A3 - 정전용량형 압력센서 및 그 제조방법 - Google Patents

정전용량형 압력센서 및 그 제조방법 Download PDF

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Publication number
WO2011087217A3
WO2011087217A3 PCT/KR2010/009249 KR2010009249W WO2011087217A3 WO 2011087217 A3 WO2011087217 A3 WO 2011087217A3 KR 2010009249 W KR2010009249 W KR 2010009249W WO 2011087217 A3 WO2011087217 A3 WO 2011087217A3
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WO
WIPO (PCT)
Prior art keywords
electrode
pressure sensor
capacitive pressure
manufacturing
insertion groove
Prior art date
Application number
PCT/KR2010/009249
Other languages
English (en)
French (fr)
Other versions
WO2011087217A2 (ko
Inventor
김성수
박성현
천정선
김은섭
김광수
박호철
손원근
Original Assignee
(주)유니크코리아엔아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)유니크코리아엔아이 filed Critical (주)유니크코리아엔아이
Publication of WO2011087217A2 publication Critical patent/WO2011087217A2/ko
Publication of WO2011087217A3 publication Critical patent/WO2011087217A3/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

본 발명은 제조공정이 단순하고 빠르며, 동일한 품질의 전극형성이 용이한 정전용량형 압력센서와 그것의 제조방법을 제공하는 것이다. 본 발명은 하면의 소정영역에 제1전극이 장착된 커버부재와, 상기 커버부재의 하부에 설치되고 상기 제1전극과 소정의 간격을 가지는 제2전극이 상부에 설치된 몸체부와, 상기 커버부재와 상기 몸체부를 접합하는 접합부재를 포함하는 정전용량형 압력센서에 있어서, 상기 몸체부에는 삽입홈이 형성되고, 상기 삽입홈에 제2전극이 삽입되며, 상기 제2전극과 상기 삽입홈의 바닥면은 전극접합체에 의해 접합되어 있는 정전용량형 압력센서를 제공한다.
PCT/KR2010/009249 2010-01-12 2010-12-23 정전용량형 압력센서 및 그 제조방법 WO2011087217A2 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20100002900 2010-01-12
KR10-2010-0002900 2010-01-12
KR10-2010-0011854 2010-02-09
KR1020100011854A KR100962022B1 (ko) 2010-01-12 2010-02-09 정전용량형 압력센서 및 그 제조방법

Publications (2)

Publication Number Publication Date
WO2011087217A2 WO2011087217A2 (ko) 2011-07-21
WO2011087217A3 true WO2011087217A3 (ko) 2011-11-10

Family

ID=42369727

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/009249 WO2011087217A2 (ko) 2010-01-12 2010-12-23 정전용량형 압력센서 및 그 제조방법

Country Status (2)

Country Link
KR (1) KR100962022B1 (ko)
WO (1) WO2011087217A2 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101227866B1 (ko) * 2011-03-07 2013-01-31 박성현 세라믹형 정전용량식 압력센서
US9383283B2 (en) * 2014-01-16 2016-07-05 Sensata Technologies, Inc. Pressure transducer with capacitively coupled source electrode
US9470594B2 (en) * 2014-01-17 2016-10-18 Sensata Technologies, Inc. Differential pressure sensor with dual output using a double-sided capacitive sensing element
DE102016205163A1 (de) * 2016-03-30 2017-10-05 Robert Bosch Gmbh Elektrogerät mit einem Gehäuse mit einem kapazitiven Drucksensor und Drucksensorarray
EP3679332B1 (en) * 2018-11-30 2022-11-23 Carrier Corporation Printed capacitive liquid level sensor for fire suppression
KR20200094529A (ko) 2019-01-30 2020-08-07 에스케이하이닉스 주식회사 반도체 메모리 장치 및 그 제조방법
KR102577156B1 (ko) 2019-05-02 2023-09-12 에스케이하이닉스 주식회사 반도체 메모리 장치의 제조방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1022512A (ja) * 1996-07-01 1998-01-23 Tokin Corp 静電容量型圧力センサ
KR20030026083A (ko) * 2001-09-24 2003-03-31 주식회사코닉스 정전 용량식 압력센서의 제조방법 및 이를 이용한 압력검출 장치
JP2004177343A (ja) * 2002-11-28 2004-06-24 Fujikura Ltd 圧力センサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2795730B1 (fr) 1999-07-01 2001-08-31 Adir Nouveaux inhibiteurs de metalloproteases, leur procede de preparation et les compositions pharmaceutiques qui les contiennent

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1022512A (ja) * 1996-07-01 1998-01-23 Tokin Corp 静電容量型圧力センサ
KR20030026083A (ko) * 2001-09-24 2003-03-31 주식회사코닉스 정전 용량식 압력센서의 제조방법 및 이를 이용한 압력검출 장치
JP2004177343A (ja) * 2002-11-28 2004-06-24 Fujikura Ltd 圧力センサ

Also Published As

Publication number Publication date
WO2011087217A2 (ko) 2011-07-21
KR100962022B1 (ko) 2010-06-08

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