WO2011074381A1 - Conveyance device for film substrate - Google Patents
Conveyance device for film substrate Download PDFInfo
- Publication number
- WO2011074381A1 WO2011074381A1 PCT/JP2010/070787 JP2010070787W WO2011074381A1 WO 2011074381 A1 WO2011074381 A1 WO 2011074381A1 JP 2010070787 W JP2010070787 W JP 2010070787W WO 2011074381 A1 WO2011074381 A1 WO 2011074381A1
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- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- film substrate
- grip
- grip roller
- angle
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
- B65H23/032—Controlling transverse register of web
- B65H23/0324—Controlling transverse register of web by acting on lateral regions of the web
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
- B65H23/032—Controlling transverse register of web
- B65H23/038—Controlling transverse register of web by rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H9/00—Registering, e.g. orientating, articles; Devices therefor
- B65H9/16—Inclined tape, roller, or like article-forwarding side registers
- B65H9/166—Roller
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2301/00—Handling processes for sheets or webs
- B65H2301/30—Orientation, displacement, position of the handled material
- B65H2301/32—Orientation of handled material
- B65H2301/323—Hanging
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2403/00—Power transmission; Driving means
- B65H2403/90—Machine drive
- B65H2403/94—Other features of machine drive
- B65H2403/942—Bidirectional powered handling device
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2404/00—Parts for transporting or guiding the handled material
- B65H2404/10—Rollers
- B65H2404/14—Roller pairs
- B65H2404/142—Roller pairs arranged on movable frame
- B65H2404/1421—Roller pairs arranged on movable frame rotating, pivoting or oscillating around an axis, e.g. parallel to the roller axis
- B65H2404/14212—Roller pairs arranged on movable frame rotating, pivoting or oscillating around an axis, e.g. parallel to the roller axis rotating, pivoting or oscillating around an axis perpendicular to the roller axis
Definitions
- the present invention relates to a film substrate transport apparatus in which a film substrate (hereinafter, referred to as a “substrate”) is disposed and transported in a vertical posture with one end upper side in the width direction.
- a film substrate hereinafter, referred to as a “substrate”
- production apparatus An apparatus for producing a thin film laminate (hereinafter, referred to as "production apparatus") is used to form a photoelectric conversion layer or the like including a thin film photoelectric conversion element on the surface of a substrate.
- This manufacturing apparatus is configured such that the substrate is formed in an airtight state in the film forming chamber, and the substrate taken up by the unwinding core is further transferred to the film forming chamber in order to transport the substrate into the film forming chamber. After being sent out to pass through to the inside of the film forming chamber, they are wound up by the winding core.
- the vertical direction is to arrange and transfer the substrate in the vertical posture with one end in the width direction
- a lay transport method is adopted.
- the transport apparatus of this vertical transport system is excellent in that contamination of the substrate is prevented by the difficulty in depositing particles on the substrate surface, and the space of the manufacturing apparatus can be reduced by vertically placing the substrate. There is.
- the substrate since the substrate is mainly pulled and held between the unwinding core and the winding core, the substrate tends to sag downward by its own weight, and may also meander in the width direction.
- a structure in which a grip roller for adjusting the position of the substrate in the width direction is provided.
- a plurality of paired grip rollers are provided to sandwich the upper end portion and the lower end portion of the substrate, and the grip roller on the upper end portion side is the upper side with respect to the substrate feeding direction.
- the grip roller on the lower end side is disposed to be inclined downward with respect to the forward feeding direction of the substrate.
- an elastic body is provided on the outer peripheral surface of the grip roller for protecting the substrate and the like.
- the gripping force acting between the gripping roller and the substrate is reduced, and a sufficient lifting force for the substrate can not be obtained. Therefore, in Patent Document 1, in response to the deterioration of the elastic body, the gripping force is increased by increasing the force with which the pair of gripping rollers sandwiches the substrate (hereinafter referred to as "substrate gripping force").
- the grip roller on the upper end portion side is disposed to be inclined only upward with respect to the forward feeding direction of the substrate, and the grip roller on the lower end portion side is downwardly directed to the forward feeding direction of the substrate.
- the side is only tilted towards the side. Therefore, when the substrates are transported in both the forward feed direction and the reverse feed direction, these grip rollers can adjust the substrate transported in the forward feed direction with high accuracy, but the substrates transported in the reverse feed direction are high. It is difficult to adjust the position with accuracy.
- Patent Document 1 when the substrate gripping force of the grip roller whose outer peripheral surface is an elastic body is increased, the elastic body on the outer peripheral surface is crushed, and the cross sectional shape of the outer peripheral surface changes into an elliptical shape, There is a possibility that the diameter of the grip roller may change. In such a case, it is difficult to move the substrate to a desired position because a desired gripping force can not be obtained and a sufficient force for lifting the substrate can not be obtained. Thus, the accuracy of the position adjustment of the substrate is reduced.
- the present invention has been made in view of such circumstances, and its object is to provide a film substrate capable of adjusting the position of each of the substrates transported in both the forward feed direction and the reverse feed direction with high accuracy. It is in providing a conveying apparatus.
- the film substrate transport apparatus of the present invention is a film substrate transport apparatus which arranges and transports a strip-shaped film substrate in a vertical posture with one end on the upper side in the width direction, At least a pair of first grip rollers disposed so as to sandwich the upper end portion of the film substrate, and the rotation shaft angle of the first grip roller makes the rotation direction of the first grip roller upward with respect to the transport direction
- a first angle adjustment mechanism is provided to adjust the inclination direction and the inclination angle of the first grip roller so that it can be inclined to the side.
- a second angle adjusting mechanism capable of adjusting the inclination direction and the inclination angle of the second grip roller so that the rotation direction of the roller can be inclined downward with respect to the transport direction.
- the film substrate transport apparatus further includes detection means for detecting the height position of the width direction end of the film substrate, and the first grip is detected when the detection means detects positional deviation of the film substrate.
- the roller and / or the second grip roller is controlled by the first angle adjusting mechanism and / or the second angle adjusting mechanism to be inclined in an inclination direction corresponding to the transport direction of the film substrate .
- the first angle adjustment mechanism and / or the second angle adjustment mechanism may be used to correct the positional deviation of the substrate, and / or the first grip roller and / or the second It is controlled to change the inclination angle of the 2 grip rollers.
- the film substrate conveying apparatus is a film substrate conveying apparatus for arranging and conveying a strip-shaped film substrate in a vertical posture with one end on the upper side in the width direction, and the upper end of the film substrate At least a pair of first grip rollers disposed in a sandwiching manner, and the rotation angle of the first grip roller can be inclined so that the rotation direction of the first grip roller is on the upper side with respect to the transport direction And a first angle adjustment mechanism that makes it possible to adjust the inclination direction and the inclination angle of the first grip roller.
- At least a pair of second grip rollers disposed so as to sandwich the lower end portion of the film substrate, and the rotation angle of the second grip roller makes the rotation direction of the second grip roller downward.
- a second angle adjusting mechanism for adjusting an inclination direction and an inclination angle of the second grip roller so as to be able to be inclined.
- a detection means for detecting the height position of the width direction end of the film substrate is further provided, and when the detection means detects the positional deviation of the film substrate, the first grip roller and / or the second A grip roller is controlled to be inclined in an inclination direction corresponding to the transport direction of the film substrate by the first angle adjustment mechanism and / or the second angle adjustment mechanism. Therefore, highly accurate position adjustment is possible with respect to both the film substrate transported in the forward feeding direction and the reverse feeding direction.
- the first angle adjustment mechanism and / or the second angle adjustment mechanism may be used to correct the positional deviation of the substrate, and / or the first grip roller and / or the second
- the control is performed so as to change the inclination angle of the second grip roller.
- the gripping force of the first grip roller is reduced due to the wear of the first grip roller, and the force for lifting the film substrate
- the inclination of the first grip roller is increased, the amount of movement of the film substrate in the width direction can be increased to correct the positional adjustment of the film substrate. Therefore, it is possible to prevent an excessive load from being applied to the film substrate without increasing the force for sandwiching the film substrate by the first grip roller.
- the film substrate can be made by reducing the inclination of the first grip roller.
- the positional adjustment of the film substrate can be corrected by reducing the amount of movement in the width direction of the film substrate. Therefore, it is possible to prevent the positional adjustment accuracy of the film substrate from being lowered.
- FIG. 3 It is a cross-sectional top view which shows typically the manufacturing apparatus of the thin film laminated body in 1st Embodiment of this invention.
- A) is a cross-sectional plan view schematically showing the film formation chamber of FIG. 1 in an enlarged manner
- (b) is a cross-sectional view taken along the line CC of FIG.
- (A) is a schematic front view which shows an angle adjustment mechanism in case the rotating shaft of a grip roller is arrange
- (b) is a figure. It is a schematic side view of the angle adjustment mechanism of 3 (a), and (c) is DD sectional drawing of FIG. 3 (a).
- FIG. 4 (A) is a schematic front view which shows the angle adjustment mechanism which inclines a grip roller so that the position of the board
- (A) is a schematic front view which shows the angle adjustment mechanism which inclines a grip roller so that the position of the board
- Fig. 7 is a cross-sectional view taken along the line D "-D" in FIG.
- FIG. 3 is a cross-sectional view taken along the line CC in FIG. 2A in the second embodiment of the present invention. It is a graph which shows the relationship between the inclination angle of a grip roller, and the force which lifts the film board
- a thin film laminate manufacturing apparatus (hereinafter referred to as “manufacturing apparatus”) 1 including a film substrate conveying apparatus (hereinafter referred to as “carrier apparatus”), a belt-like film substrate (hereinafter referred to as While being arranged and transported in a vertical posture with one end on the upper side in the width direction, the thin film is formed on the surface of the substrate 2.
- the width direction of the substrate 2 is illustrated along the vertical direction, but the present invention is not limited to this.
- the manufacturing apparatus 1 is provided with a winding chamber 3 for winding the substrate 2 and a winding chamber 4 for winding the substrate 2.
- a winding chamber 3 for winding the substrate 2
- a winding chamber 4 for winding the substrate 2.
- six film forming chambers 5a to 5f are provided between the chamber 4 and the chamber 4.
- the substrate 2 is fed in a direction of forward feeding from the unwinding chamber 3 to the winding chamber 4 (hereinafter, indicated by an arrow A in the drawing) and a reverse feeding direction from the winding chamber 4 to the unwinding chamber 3 (hereinafter, in the drawing , And can be transported.
- an unwinding core 3 a capable of unwinding the wound substrate 2 is provided rotatably about a rotation axis along the width direction of the substrate 2.
- five rollers 3 b to 3 f are provided in the width direction of the substrate 2 downstream of the unwinding core 3 a in the forward direction.
- the unwinding core 3a and the rollers 3b to 3f are configured to rotate the substrate 2 so as to be able to be transported in the forward feeding direction and the reverse feeding direction.
- substrate 2 shown in FIG. 1, tension control, etc. is an example and it is not limited to this, According to the specification of the manufacturing apparatus 1, it can change. It is also possible not to provide a roller for conveyance drive of substrate 2 and tension control.
- a winding core 4 a configured to be able to wind the substrate 2 is provided rotatably about a rotation axis along the width direction of the substrate 2.
- seven rollers 4b to 4h are provided inside the winding chamber 4 as an example for conveying drive of the substrate 2, tension control, etc., and the width of the substrate 2 on the upstream side of the winding core 4a in the forward direction. It is provided to be rotatable about a rotational axis along the direction.
- the winding core 4a and the rollers 4b to 4h are configured to rotate so as to be able to transport the substrate 2 in the forward feeding direction and the reverse feeding direction.
- substrate 2 shown in FIG. 1, tension control, etc. is an example and it is not limited to this, According to the specification of the manufacturing apparatus 1, it can change. It is also possible not to provide a roller for conveyance drive of substrate 2 and tension control.
- FIGS. 2 (a) and 2 (b) show a state in which the substrate 2 is fed in the forward feeding direction (indicated by the arrow A), and the first grip roller 6 is fed in the forward feeding direction. It corresponds to the substrate 2.
- high voltage electrodes 7a to 7f and ground electrodes 8a to 8f are disposed to face each other, and the substrate 2 is provided with high voltage electrodes 7a to 7f and ground electrodes 8a to 8f. It is configured to pass between.
- the lengths along the width direction of the substrate 2 of the high voltage electrodes 7a to 7f and the ground electrodes 8a to 8f are respectively shorter than the width of the substrate 2, and the upper end portion and the lower end portion of the substrate 2 in the width direction
- the thin film laminated body is not formed into a film.
- a gas for film formation is supplied to the inside of the film formation chambers 5a to 5f.
- the insides of the film forming chambers 5a to 5f are configured to be capable of maintaining an airtight state.
- a thin film is formed on the substrate 2 when the substrate 2 is located between the high voltage electrodes 7a to 7f and the ground electrodes 8a to 8f in the film forming chambers 5a to 5f. Become.
- a method of forming a film on the surface of the substrate 2 for example, it is conceivable to use a method such as chemical vapor deposition (CVD) or physical vapor deposition (PVD).
- CVD chemical vapor deposition
- PVD physical vapor deposition
- the number of film forming chambers shown in FIG. 1 is an example and is not limited to this, and can be changed according to the specification of the manufacturing apparatus 1.
- a heating chamber for heating the substrate 2 may be provided.
- the manufacturing apparatus 1 is provided with detection means 9 for detecting the position of the substrate 2 in the width direction.
- the detection unit 9 may be configured to detect the position of the edge portion in the width direction of the substrate 2.
- the detection means 9 is preferably a non-contact sensor in particular, and may be, for example, a transmissive laser sensor, a reflective photosensor or the like. The detection means 9 is connected to the control means 10.
- the pair of first grip rollers 6 is configured to be rotatable around the rotation shaft 6 a, and is disposed so as to sandwich the upper end portion of the substrate 2 between the adjacent film forming chambers. Therefore, the pair of first grip rollers 6 sandwich the portion of the substrate 2 on which the thin film laminate is not formed.
- the outer peripheral surface 6b of the first grip roller 6 may be formed of an elastic body.
- heat resistant rubber such as silicone rubber or fluoro rubber may be used.
- the outer peripheral surface 6b of the first grip roller 6 may be formed of a synthetic resin such as PTFE or polyimide, or may be formed of a material coated with stainless steel, iron, chrome or the like.
- the outer peripheral surface 6b of the first grip roller 6 may be formed of another material as long as predetermined performance such as protection of the substrate 2 and grip is obtained.
- Such first grip roller 6 is configured to be adjustable in inclination.
- the first angle adjustment mechanism 11 for adjusting the inclination of the first grip roller 6 will be described with reference to FIGS. 3 (a) to 3 (c).
- the rotation axis 6a of the first grip roller 6 is adjusted by the first angle adjustment mechanism 11 to the neutral state in which the rotation axis 6a is arranged along the width direction of the substrate 2.
- a roller shaft 6 c is disposed on the first grip roller 6 so as to extend upward from the upper end along the width direction of the substrate 2.
- the upper end of the roller shaft 6 c is rotatably attached to the roller attachment portion 12.
- a link 13 extending upward from the roller attachment portion 12 along the width direction of the substrate 2 is disposed.
- An engagement roller 14 is provided at the top of the link 13.
- a link mounting portion 13 a is provided on the link 13 at the middle in the width direction of the substrate 2 between the roller mounting portion 12 and the engagement roller 14.
- This link mounting portion 13 a corresponds to the link 13 on the surface of the substrate 2. It is configured to be rotatable around a link rotation shaft 13 b extending in the width direction with respect to the above, and is attached to the support portion 15. Therefore, the link 13 is rotatable with respect to the support portion 15.
- biasing means 16 is disposed between the link 13 and the support portion 15 along the transport direction of the substrate 2.
- the biasing means 16 may be configured to be able to return the link 13 to the neutral position by using a coil spring, a plate spring, a torsion spring, a rubber member or the like.
- the actuator 17 is disposed above the link 13.
- the actuator 17 includes an arm 18 disposed along the width direction with respect to the surface of the substrate 2.
- the tip 18 a of the arm 18 is engaged with an engagement roller 14 attached to the link 13.
- a rotating shaft 19 extending along the width direction of the substrate 2 is attached to the proximal end 18 b of the arm 18.
- the lower end of the rotating shaft 19 is attached to the proximal end 18 b of the arm 18, and the upper end of the rotating shaft 19 is attached to the drive source 20. Therefore, the arm 18 can be rotated by rotational driving of the drive source 20.
- the drive source 20 is supported by the support portion 15, and the drive source 20 of the actuator 17 is connected to the control means 10.
- the substrate 2 wound around the unwinding core 3a is unwound while being driven and guided by the rollers 3b to 3f.
- the substrate 2 exits the unwinding chamber 3 and is sequentially transported in the film forming chambers 5a to 5f along the forward feeding direction, and various thin films are formed on the surface of the substrate 2 in each of the film forming chambers 5a to 5f. Is deposited.
- the film-formed substrate 2 is conveyed into the winding chamber 4 and wound around the winding core 4a while being driven and guided by the rollers 4b to 4h. In addition, the substrate 2 is transported along the reverse feed direction, as needed.
- FIG. 2 (b) When the detection means 9 (see FIG. 2 (b)) detects a downward displacement of the substrate 2 transported in the forward direction, the detection means 9 controls the control means 10 (see FIG. 2 (b)) Send a signal to Next, the control means 10 sends a signal to the drive source 20 of the actuator 17, and this drive source 20 is controlled to rotate so as to move the tip 18a of the arm 18 in the reverse feed direction. At this time, the engagement roller 14 engaged with the tip 18a of the arm 18 also moves in the reverse feeding direction, and the link 13 rotates about the link rotation shaft 13b.
- the inclination angle theta 1 is inclined with respect to the width direction of the substrate 2 It will be That is, the first grip roller 6 is inclined upward with respect to the forward feeding direction of the substrate 2.
- link 13 is biased to the first gripping roller 6 by the biasing means 16 so as to return to the neutral state.
- FIG. 2 (b) When the detection means 9 (see FIG. 2 (b)) detects a downward displacement of the substrate 2 transported in the reverse feed direction, the detection means 9 refers to the control means 10 (FIG. 2 (b)). Send a signal to). Next, the control means 10 sends a signal to the drive source 20 of the actuator 17, and the drive source 20 is controlled to rotate so as to move the tip 18a of the arm 18 in the forward direction. At this time, the engagement roller 14 engaged with the leading end 18a of the arm 18 also moves in the forward feeding direction, and the link 13 rotates around the link rotation shaft 13b.
- the first grip roller 6 has an inclination angle ⁇ 2 with respect to the width direction of the substrate 2 so that the lower side of the first grip roller 6 faces the reverse direction along the surface of the substrate 2. It will be tilted. That is, the first grip roller 6 is inclined upward with respect to the reverse feeding direction of the substrate 2. Incidentally, in a state where the first grip roller 6 is tilted inclination angle theta 2, the link 13 is biased to the first gripping roller 6 by the biasing means 16 so as to return to the neutral state.
- the control unit 10 controls the drive source 20 of the actuator 17, the position adjustment of the substrate 2 is modified.
- the detection means 9 detects that the substrate 2 after position correction has deviated to the upper side, the lifting force becomes high because the grip force of the first grip roller 6 is too high. so as to reduce the first angle of inclination theta 1 or theta 2 of the grip roller 6, the control unit 10 controls the drive source 20 of the actuator 17, the position adjustment of the substrate 2 is modified.
- the manufacturing apparatus of the thin film laminated body in 2nd Embodiment of this invention is demonstrated below.
- the basic configuration of the thin film stack manufacturing apparatus according to the second embodiment is the same as the thin film stack manufacturing apparatus according to the first embodiment.
- the same elements as in the first embodiment will be described using the same reference numerals and names as in the first embodiment.
- a configuration different from the first embodiment will be described.
- a pair of second grip rollers 6 ′ configured to further sandwich the lower end portion of the substrate 2 is provided. Similar to the first grip roller 6, the second grip roller 6 'has a rotating shaft 6a' and an outer peripheral surface 6b '. Further, although not shown, the second grip roller 6 'can be inclined along the outer circumferential surface 6b of the substrate 2 with the second grip roller 6' downward with respect to the transport direction.
- a second angle adjustment mechanism is provided which can adjust the tilt direction and the tilt angle so as to tilt in both the forward feeding direction and the reverse feeding direction with respect to the transport direction.
- the basic configuration of the second angle adjustment mechanism corresponds to the second grip roller 6 ′ and is similar to the first angle adjustment mechanism 11. Note that FIG.
- FIG 8 shows a state in which the substrate 2 is sent in the forward feeding direction (indicated by the arrow A), and the second grip roller 6 ′ is the second corresponding to the substrate 2 sent in the forward feeding direction.
- the upper side of the grip roller 6 ' is inclined in the forward feeding direction.
- the first and / or second grip rollers 6, 6 ' are the first angle adjustment mechanism 11 and / or the second angle.
- the adjustment mechanism makes it possible to adjust the inclination direction and the inclination angle so as to incline in both the forward feed direction and the reverse feed direction in the transport direction of the substrate 2, so that the substrate 2 is transported in the forward feed direction and the reverse feed direction.
- the position can be adjusted with high accuracy for both
- the grip force of the first grip roller 6 is reduced due to the wear of the first grip roller 6, and the force for lifting the substrate 2 is If the inclination of the first grip roller 6 is increased, the displacement of the substrate 2 in the width direction can be increased, and the positional adjustment of the substrate 2 can be corrected. Therefore, it is possible to prevent an excessive load from being applied to the substrate 2 without increasing the force for sandwiching the substrate 2 by the first grip roller 6.
- the grip force of the first grip roller 6 is too high due to variation or the like and the force for lifting the substrate 2 is too large, the width of the substrate 2 can be reduced by decreasing the inclination of the first grip roller 6.
- the positional adjustment of the substrate 2 can be corrected by reducing the amount of movement of the direction. Therefore, the positional adjustment accuracy of the substrate 2 can be prevented from decreasing.
- the first and / or second grip rollers 6, 6 ' are configured to be able to adjust the force to hold the substrate 2 (hereinafter referred to as "substrate holding force"). It may be done. For example, as the grip force of the first grip roller 6 is reduced, a sufficient lifting force for the substrate 2 can not be obtained, and it is detected that the substrate 2 after position correction is still shifted downward. When 9 is detected, the control means 10 controls the pair of first grip rollers 6 so that the substrate gripping force of the pair of first grip rollers 6 is increased, and the position adjustment of the substrate 2 is corrected. It is also good.
- control unit 10 may control the pair of first grip rollers 6 to correct the positional adjustment of the substrate 2 so as to reduce the substrate gripping force between the pair of first grip rollers 6.
- the transport section between the unwinding chamber 3 and the film forming chamber 5a, the transport section between five adjacent film forming chambers, the winding chamber 4 and the film forming chamber The first and / or second grip rollers 6, 6 'may be provided in at least one of the conveyance sections between 5f, and the first and / or second grip rollers 6, 6' may be provided.
- the number of transport sections provided with ' can be varied to optimally position the substrate 2.
- the number of first and / or second grip rollers 6, 6 'provided in each conveyance section may be two or more. The same effect as the embodiment of the present invention can be obtained.
- a drive source for rotating the first and / or second grip rollers 6, 6 'instead of the roller mounting portion 12 is provided, the first and / or the first.
- the second grip rollers 6, 6 ' may be configured to be rotatable by the drive source.
- this drive source may be connected to the control means 10 to control the rotation of the first and / or second grip rollers 6, 6 '. The same effect as the embodiment of the present invention can be obtained.
- the relationship between the tilt angle ⁇ 1 or ⁇ 2 of the first grip roller 6 and the lifting force F of the substrate 2 of the first grip roller 6 is a solid line when the substrate gripping force is 4.4 N.
- a broken line Q indicates a case where the substrate holding force is 8.9 N
- a dashed dotted line R indicates a case where the substrate holding force is 16.3 N.
- the lifting force F is also proportionally increased when the inclination angle ⁇ 1 or ⁇ 2 is increased.
- the tilt angle ⁇ 1 or ⁇ 2 may be about 3.5 ° when the substrate holding force is 4.4N.
- the inclination angle ⁇ 1 or ⁇ 2 may be approximately 2 °.
- the inclination angle ⁇ 1 or ⁇ 2 may be approximately 1 °.
- Production device for thin film laminate production device
- Film substrate (substrate) 6 first grip roller 6 'second grip roller 6a, 6a' rotation shaft 6b, 6b 'outer peripheral surface
- detection means 11 angle adjustment mechanism A, B, C, D, D', D '' arrow F lifting force ⁇ 1 , ⁇ 2 Inclination angle
- Solid line Q Broken line
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
- Advancing Webs (AREA)
Abstract
Description
本発明のフィルム基板の搬送装置は、帯状のフィルム基板を、その幅方向について片端部を上側とした縦姿勢で配置して搬送するフィルム基板の搬送装置であって、前記フィルム基板の上端部を挟むように配設される少なくとも一対の第1のグリップローラと、前記第1のグリップローラの回転角度が前記第1のグリップローラの回転方向を搬送方向に対して上方側とするように傾け可能となるように、前記第1のグリップローラの傾斜方向および傾斜角度を調節可能とする第1の角度調節機構とを備えている。
また、前記フィルム基板の下端部を挟むように配設される少なくとも一対の第2のグリップローラと、前記第2のグリップローラの回転角度が前記第2のグリップローラの回転方向を下方側とするように傾け可能となるように、前記第2のグリップローラの傾斜方向および傾斜角度を調節可能とする第2の角度調節機構とをさらに備えている。
さらに、前記フィルム基板の幅方向端部の高さ位置を検知する検知手段をさらに備え、前記検知手段が前記フィルム基板の位置ズレを検知すると、前記第1のグリップローラおよび/または前記第2のグリップローラが、前記第1の角度調節機構および/または前記第2の角度調節機構によって、前記フィルム基板の搬送方向に対応した傾斜方向に傾けられるように制御される。
そのため、順送り方向および逆送り方向に搬送される前記フィルム基板の両方に対して、精度の高い位置調節が可能となる。 According to the film substrate transport apparatus of the present invention, the following effects can be obtained.
The film substrate conveying apparatus according to the present invention is a film substrate conveying apparatus for arranging and conveying a strip-shaped film substrate in a vertical posture with one end on the upper side in the width direction, and the upper end of the film substrate At least a pair of first grip rollers disposed in a sandwiching manner, and the rotation angle of the first grip roller can be inclined so that the rotation direction of the first grip roller is on the upper side with respect to the transport direction And a first angle adjustment mechanism that makes it possible to adjust the inclination direction and the inclination angle of the first grip roller.
Further, at least a pair of second grip rollers disposed so as to sandwich the lower end portion of the film substrate, and the rotation angle of the second grip roller makes the rotation direction of the second grip roller downward. And a second angle adjusting mechanism for adjusting an inclination direction and an inclination angle of the second grip roller so as to be able to be inclined.
Furthermore, a detection means for detecting the height position of the width direction end of the film substrate is further provided, and when the detection means detects the positional deviation of the film substrate, the first grip roller and / or the second A grip roller is controlled to be inclined in an inclination direction corresponding to the transport direction of the film substrate by the first angle adjustment mechanism and / or the second angle adjustment mechanism.
Therefore, highly accurate position adjustment is possible with respect to both the film substrate transported in the forward feeding direction and the reverse feeding direction.
本発明の第1実施形態におけるフィルム基板の搬送装置について以下に説明する。
図1を参照すると、フィルム基板の搬送装置(以下、「搬送装置」と呼ぶ)を含む薄膜積層体の製造装置(以下、「製造装置」と呼ぶ)1においては、帯状のフィルム基板(以下、「基板」と呼ぶ)2が、その幅方向について片端部を上側とした縦姿勢で配置されて搬送されるとともに、基板2の表面に薄膜が成膜される構成となっている。なお、第1実施形態では、基板2の幅方向を鉛直方向に沿わせた状態で図示して説明するが、これに限定されない。
この基板2を搬送するため、製造装置1には、基板2を巻出すための巻出し室3と基板2を巻き取るための巻取り室4とが設けられており、巻出し室3と巻取り室4との間には一例として6つの成膜室5a~5fが設けられている。また、基板2は、巻出し室3から巻取り室4に向かう順送り方向(以下、図面において矢印Aで示す)と、巻取り室4から巻出し室3に向かう逆送り方向(以下、図面において矢印Bで示す)とに搬送可能に構成されている。さらに、巻出し室3および成膜室5aの間の搬送区間と、5つの隣接する成膜室同士間の搬送区間と、巻取り室4および成膜室5fの間の搬送区間とには、一例として、第1のグリップローラ6がそれぞれ1対ずつ設けられている。 First Embodiment
The film substrate transport apparatus according to the first embodiment of the present invention will be described below.
Referring to FIG. 1, in a thin film laminate manufacturing apparatus (hereinafter referred to as “manufacturing apparatus”) 1 including a film substrate conveying apparatus (hereinafter referred to as “carrier apparatus”), a belt-like film substrate (hereinafter referred to as While being arranged and transported in a vertical posture with one end on the upper side in the width direction, the thin film is formed on the surface of the
In order to transport the
製造装置1における基板2の搬送および成膜について、再び図1を参照しながら説明する。巻出し室3内において、巻出しコア3aに巻き取られた基板2が、ローラ3b~3fによって駆動かつガイドされながら巻き出される。この基板2が、巻出し室3を出て、順送り方向に沿って成膜室5a~5f内に順次搬送されて、成膜室5a~5f内のそれぞれでは、基板2の表面に各種の薄膜が成膜される。成膜された基板2は、巻取り室4内に搬送され、ローラ4b~4hによって駆動かつガイドされながら、巻取りコア4aに巻き取られる。また、必要に応じて、基板2が逆送り方向に沿って搬送される。 The operation of the
The transport and film formation of the
本発明の第2実施形態における薄膜積層体の製造装置について以下に説明する。第2実施形態における薄膜積層体の製造装置の基本的な構成は、第1実施形態における薄膜積層体の製造装置と同様になっている。第1実施形態と同様な要素は、第1実施形態と同様の符号および名称を用いて説明する。ここでは、第1実施形態と異なる構成について説明する。 Second Embodiment
The manufacturing apparatus of the thin film laminated body in 2nd Embodiment of this invention is demonstrated below. The basic configuration of the thin film stack manufacturing apparatus according to the second embodiment is the same as the thin film stack manufacturing apparatus according to the first embodiment. The same elements as in the first embodiment will be described using the same reference numerals and names as in the first embodiment. Here, a configuration different from the first embodiment will be described.
本発明の第1実施形態の製造装置1を用いた実施例を説明する。本発明の実施例では、一対の第1のグリップローラ6における基板挟持力を4.4N、8.9Nまたは16.3Nとした場合において、第1のグリップローラ6の傾斜角度θ1またはθ2を0°~8°の間で変化させたとき、一対の第1のグリップローラ6における基板2を持上げる力(以下、「持上げ力」という)Fの変化を測定した。 [Example]
An example using the
2 フィルム基板(基板)
6 第1のグリップローラ
6’ 第2のグリップローラ
6a,6a’ 回転軸
6b,6b’ 外周表面
9 検知手段
11 角度調節機構
A,B,C,D,D’,D’’ 矢印
F 持上げ力
θ1,θ2 傾斜角度
P 実線
Q 破線
R 一点鎖線 1 Production device for thin film laminate (production device)
2 Film substrate (substrate)
6 first grip roller 6 '
Claims (4)
- 帯状のフィルム基板を、その幅方向について片端部を上側とした縦姿勢で配置して搬送するフィルム基板の搬送装置であって、
前記フィルム基板の上端部を挟むように配設される少なくとも一対の第1のグリップローラと、
前記第1のグリップローラの回転軸角度が前記第1のグリップローラの回転方向を搬送方向に対して上方側とするように傾け可能となるように、前記第1のグリップローラの傾斜方向および傾斜角度を調節可能とする第1の角度調節機構と
を備えているフィルム基板の搬送装置。 A film substrate conveying apparatus for arranging and conveying a strip-shaped film substrate in a vertical posture with one end on the upper side in the width direction,
At least a pair of first grip rollers disposed so as to sandwich the upper end portion of the film substrate;
Inclination direction and inclination of the first grip roller so that the rotation axis angle of the first grip roller can be inclined so that the rotation direction of the first grip roller is on the upper side with respect to the transport direction And a first angle adjusting mechanism capable of adjusting the angle. - 前記フィルム基板の下端部を挟むように配設される少なくとも一対の第2のグリップローラと、
前記第2のグリップローラの回転軸角度が前記第2のグリップローラの回転方向を搬送方向に対して下方側とするように傾け可能となるように、前記第2のグリップローラの傾斜方向および傾斜角度を調節可能とする第2の角度調節機構と
をさらに備えている請求項1に記載のフィルム基板の搬送装置。 At least a pair of second grip rollers disposed to sandwich the lower end portion of the film substrate;
Inclination direction and inclination of the second grip roller so that the rotation axis angle of the second grip roller can be inclined so that the rotation direction of the second grip roller is lower with respect to the conveyance direction The film substrate transport apparatus according to claim 1, further comprising: a second angle adjustment mechanism capable of adjusting the angle. - 前記フィルム基板の幅方向端部の高さ位置を検知する検知手段をさらに備え、
前記検知手段が前記フィルム基板の位置ズレを検知すると、前記第1のグリップローラおよび/または前記第2のグリップローラが、前記第1の角度調節機構および/または前記第2の角度調節機構によって、前記フィルム基板の搬送方向に対応した傾斜方向に傾けられるように制御される、請求項1または2に記載のフィルム基板の搬送装置。 It further comprises detection means for detecting the height position of the widthwise end of the film substrate,
When the detection means detects displacement of the film substrate, the first grip roller and / or the second grip roller are operated by the first angle adjustment mechanism and / or the second angle adjustment mechanism. The film substrate transport device according to claim 1, wherein the transport device is controlled to be inclined in a tilt direction corresponding to the transport direction of the film substrate. - 前記第1の角度調節機構および/または前記第2の角度調節機構が、前記基板の位置ズレを修正するために前記第1のグリップローラおよび/または前記第2のグリップローラの傾斜角度を変化させるように制御される、請求項1~3のいずれか一項に記載のフィルム基板の搬送装置。
The first angle adjusting mechanism and / or the second angle adjusting mechanism change the inclination angle of the first grip roller and / or the second grip roller in order to correct the displacement of the substrate. The film substrate transport apparatus according to any one of claims 1 to 3, which is controlled as follows.
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CN201080053146.2A CN102770579A (en) | 2009-12-14 | 2010-11-22 | Conveyance device for film substrate |
EP10837410.9A EP2514852A4 (en) | 2009-12-14 | 2010-11-22 | Conveyance device for film substrate |
US13/512,213 US20130043294A1 (en) | 2009-12-14 | 2010-11-22 | Film substrate conveying device |
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JP2009282865A JP5652692B2 (en) | 2009-12-14 | 2009-12-14 | Film substrate transfer device |
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EP (1) | EP2514852A4 (en) |
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KR102090712B1 (en) * | 2013-07-25 | 2020-03-19 | 삼성디스플레이 주식회사 | Thin film deposition device, the deposition method using the same, and the fabrication method of organic light emitting display device using the same |
CN105506553B (en) * | 2014-09-26 | 2019-03-12 | 蒯一希 | The location regulation method of vacuum coater, vacuum double-sided coating device and band |
CN104805400B (en) * | 2015-04-10 | 2017-09-29 | 宁波华甬新材料科技有限公司 | Sample transmission and mask device for film deposition equipment system |
CN106115336A (en) * | 2016-08-23 | 2016-11-16 | 温州瑞驰机械有限公司 | Stretched film deviation correcting device |
CN111344239B (en) | 2017-10-10 | 2021-11-02 | 鲍勃斯脱格伦兴股份公司 | Sheet alignment apparatus, processing machine for processing sheet, and method of aligning sheet |
CN108666612B (en) * | 2018-07-27 | 2024-03-01 | 重庆能源职业学院 | A tear film and wash air-dry device for battery |
CN112125007A (en) * | 2020-09-29 | 2020-12-25 | 山东新北洋信息技术股份有限公司 | Deviation correcting device, sheet medium processing equipment and control method of deviation correcting device |
DE102022129119A1 (en) * | 2022-11-03 | 2024-05-08 | Syntegon Technology Gmbh | Transverse travel unit for a device for producing packaging elements from fibre-based materials |
CN115971140B (en) * | 2023-03-20 | 2023-07-21 | 山东金冠网具有限公司 | Fishery aquaculture net cleaning machine |
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JP5652692B2 (en) | 2015-01-14 |
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CN102770579A (en) | 2012-11-07 |
EP2514852A4 (en) | 2013-10-09 |
US20130043294A1 (en) | 2013-02-21 |
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