WO2011062400A3 - 액정표시장치용 어레이 기판의 제조 방법 - Google Patents

액정표시장치용 어레이 기판의 제조 방법 Download PDF

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Publication number
WO2011062400A3
WO2011062400A3 PCT/KR2010/008047 KR2010008047W WO2011062400A3 WO 2011062400 A3 WO2011062400 A3 WO 2011062400A3 KR 2010008047 W KR2010008047 W KR 2010008047W WO 2011062400 A3 WO2011062400 A3 WO 2011062400A3
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WO
WIPO (PCT)
Prior art keywords
metal film
based metal
composition
weight
titanium
Prior art date
Application number
PCT/KR2010/008047
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English (en)
French (fr)
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WO2011062400A2 (ko
Inventor
진영준
송인각
Original Assignee
동우 화인켐 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 동우 화인켐 주식회사 filed Critical 동우 화인켐 주식회사
Priority to CN201080041863.3A priority Critical patent/CN102576171B/zh
Publication of WO2011062400A2 publication Critical patent/WO2011062400A2/ko
Publication of WO2011062400A3 publication Critical patent/WO2011062400A3/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Weting (AREA)
  • Thin Film Transistor (AREA)
  • ing And Chemical Polishing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

본 발명은 액정표시장치용 어레이 기판의 제조 방법에 있어서, 게이트 배선 형성 단계에서 기판 상에 구리계 금속막과 티타늄계 금속막으로 이루어진 이중막을 형성한 후 식각액 조성물로 식각하여 게이트 배선을 형성하는 공정, 및 소스 및 드레인 전극을 형성하는 단계에서 구리계 금속막과 티타늄계 금속막으로 이루어진 이중막을 형성한 후 식각액 조성물로 식각하여 소스 및 드레인 전극을 형성하는 공정을 포함하며, 상기 식각액 조성물은, 조성물의 총 중량을 기준으로 과황산염 화합물 0.5 내지 20 중량%; 용액 내에서 플루오르 이온이 해리되는 화합물 0.01 내지 2.0 중량%; 하나 이상의 C1~C4의 직쇄 또는 분지쇄의 알킬기로 치환 또는 비치환된 시클로헥실아민 화합물 0.01 내지 5.0 중량%; 및 잔량의 물을 포함하며, 과산화수소를 포함하지 않는 것을 특징으로 하는 액정표시장치용 어레이 기판의 제조 방법; 상기 식각액 조성물; 및 구리계 금속막과 티타늄계 금속막으로 이루어진 이중막의 식각방법에 관한 것이다.
PCT/KR2010/008047 2009-11-17 2010-11-15 액정표시장치용 어레이 기판의 제조 방법 WO2011062400A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201080041863.3A CN102576171B (zh) 2009-11-17 2010-11-15 制造用于液晶显示装置的阵列基板的方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020090111030A KR101621546B1 (ko) 2009-11-17 2009-11-17 액정표시장치용 어레이 기판의 제조 방법
KR10-2009-0111030 2009-11-17

Publications (2)

Publication Number Publication Date
WO2011062400A2 WO2011062400A2 (ko) 2011-05-26
WO2011062400A3 true WO2011062400A3 (ko) 2011-09-09

Family

ID=44060175

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/008047 WO2011062400A2 (ko) 2009-11-17 2010-11-15 액정표시장치용 어레이 기판의 제조 방법

Country Status (3)

Country Link
KR (1) KR101621546B1 (ko)
CN (1) CN102576171B (ko)
WO (1) WO2011062400A2 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102955308B (zh) * 2011-08-19 2015-06-10 乐金显示有限公司 用于显示装置的阵列基板及其制造方法
KR102090243B1 (ko) * 2016-06-08 2020-03-17 주식회사 이엔에프테크놀로지 과수안정화제 및 이를 포함하는 식각 조성물

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030058789A (ko) * 2001-12-31 2003-07-07 테크노세미켐 주식회사 구리 또는 구리/티타늄 식각액
KR20040080963A (ko) * 2003-03-11 2004-09-20 테크노세미켐 주식회사 평판디스플레이의 박막트랜지스터 형성을 위한 금속전극용식각액 조성물
KR20070017762A (ko) * 2005-08-08 2007-02-13 엘지.필립스 엘시디 주식회사 식각액 조성물, 이를 이용한 도전막의 패터닝 방법 및평판표시장치의 제조 방법
KR20070062259A (ko) * 2005-12-12 2007-06-15 엘지.필립스 엘시디 주식회사 액정표시장치의 전극 식각용 식각액 조성물
KR20090081543A (ko) * 2008-01-24 2009-07-29 동우 화인켐 주식회사 평판표시장치의 제조방법, 및 상기 방법에 이용되는 식각액조성물

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100505328B1 (ko) * 2002-12-12 2005-07-29 엘지.필립스 엘시디 주식회사 구리 몰리브덴막에서 몰리브덴 잔사를 제거할 수 있는식각용액 및 그 식각 방법
US7056648B2 (en) * 2003-09-17 2006-06-06 International Business Machines Corporation Method for isotropic etching of copper
KR101174767B1 (ko) * 2005-03-10 2012-08-17 솔브레인 주식회사 금속배선 식각용액을 이용한 액정표시장치의 제조방법
KR100937173B1 (ko) * 2006-12-26 2010-01-15 엘지디스플레이 주식회사 박막트랜지스터 액정표시장치용 어레이 기판 및 그제조방법
KR101310310B1 (ko) * 2007-03-15 2013-09-23 주식회사 동진쎄미켐 박막트랜지스터 액정표시장치의 식각액 조성물

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030058789A (ko) * 2001-12-31 2003-07-07 테크노세미켐 주식회사 구리 또는 구리/티타늄 식각액
KR20040080963A (ko) * 2003-03-11 2004-09-20 테크노세미켐 주식회사 평판디스플레이의 박막트랜지스터 형성을 위한 금속전극용식각액 조성물
KR20070017762A (ko) * 2005-08-08 2007-02-13 엘지.필립스 엘시디 주식회사 식각액 조성물, 이를 이용한 도전막의 패터닝 방법 및평판표시장치의 제조 방법
KR20070062259A (ko) * 2005-12-12 2007-06-15 엘지.필립스 엘시디 주식회사 액정표시장치의 전극 식각용 식각액 조성물
KR20090081543A (ko) * 2008-01-24 2009-07-29 동우 화인켐 주식회사 평판표시장치의 제조방법, 및 상기 방법에 이용되는 식각액조성물

Also Published As

Publication number Publication date
KR101621546B1 (ko) 2016-05-16
CN102576171B (zh) 2014-12-10
CN102576171A (zh) 2012-07-11
WO2011062400A2 (ko) 2011-05-26
KR20110054408A (ko) 2011-05-25

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