WO2011052582A1

WO2011052582A1 - Method for manufacturing organic thin-film solar battery module

Info

Publication number: WO2011052582A1
Application number: PCT/JP2010/068959
Authority: WO
Inventors: 崇広清家; 大西　敏博
Original assignee: 住友化学株式会社
Priority date: 2009-10-29
Filing date: 2010-10-26
Publication date: 2011-05-05
Also published as: CN102598335A; JP2011119677A; JP5663264B2; US20120211083A1

Abstract

Disclosed is a method for manufacturing an organic thin-film solar battery module wherein manufacturing can be carried out in simple steps. A method for manufacturing an organic thin-film solar battery module in which a plurality of organic photovoltaic conversion elements (100A1) and (100A2), which are provided with a pair of electrodes comprising a first electrode (20) and a second electrode (70), and an active layer (50) held between the pair of electrodes, are arranged on a substrate (10), includes: a step for forming a plurality of first electrodes on the substrate; and a step for forming a liquid-repellent pattern (30a) on part of each of the plurality of first electrodes.

Description

Manufacturing method of organic thin film solar cell module

The present invention relates to a method for producing an organic thin film solar cell module in which a plurality of organic photoelectric conversion elements are integrated on the same substrate.

The organic thin-film solar cell module usually has (1) a step of preparing a substrate, (2) a step of forming a first electrode on the substrate, and (3) a first charge transport layer formed on the first electrode. A step, (4) a step of forming an active layer on the first charge transport layer, (5) a step of forming a second charge transport layer on the active layer, and (6) a second layer on the second charge transport layer. And a step of forming two electrodes.

That is, the organic thin film solar cell module is manufactured by sequentially forming a plurality of functional layers such as a charge transport layer and an active layer. Each functional layer is patterned into a desired shape by any suitable patterning process according to the material.

Conventionally, in order to make an active layer into an intended shape, (i) a direct patterning process such as a printing method is performed, or (ii) an unnecessary portion is removed after a film forming process and patterned into an intended shape. The wet etching process, the dry etching process, the laser patterning process, and the mechanical patterning process are performed separately from the film forming process.

As direct patterning processes used in the thin film formation process of organic thin film solar cells (organic photoelectric conversion elements), printing methods including gravure printing method, screen printing method, ink jet printing method and the like are known (non-patent literature). 1).

As a laser patterning process in the manufacturing process of an organic thin film solar cell, an example in which an active layer (MDMO-PPV: PCBM layer) is separated using an Nd: YAG laser having a wavelength of 532 nm is known (see Non-Patent Document 2). ).

However, when, for example, a coating method is used as the direct patterning process, the applied coating liquid oozes out to an undesired region, and as a result, adjacent organic photoelectric conversion elements are electrically short-circuited to operate. It may cause defects. In addition, when using a wet etching process, a dry etching process, or a laser patterning process, not only the number of processes is increased, but also a large-scale and expensive facility such as a vacuum system is required.

The inventors of the present invention have made extensive studies on an organic thin film solar cell module and a method for producing the same, and found that the above-mentioned problems can be solved by providing a liquid repellent pattern, thereby completing the present invention.

That is, this invention provides the manufacturing method and organic thin-film solar cell module of the following organic thin-film solar cell module.
[1] Manufacture of an organic thin-film solar cell module in which a plurality of organic photoelectric conversion elements including a pair of electrodes including a first electrode and a second electrode and an active layer sandwiched between the pair of electrodes are arranged on a substrate A method for producing an organic thin-film solar cell module, comprising: forming a plurality of first electrodes on a substrate; and forming a liquid repellent pattern on a part of each of the plurality of first electrodes.
[2] Manufacture of an organic thin-film solar cell module in which a plurality of organic photoelectric conversion elements including a pair of electrodes including a first electrode and a second electrode and an active layer sandwiched between the pair of electrodes are arranged on a substrate A method for producing an organic thin-film solar cell module, comprising: a step of forming a plurality of first electrodes on a substrate; and a step of forming a liquid repellent pattern on a substrate outside the plurality of first electrodes.
[3] The step of forming the liquid repellent pattern covers the step of forming the liquid repellent portion on the entire surface of the substrate on which the plurality of first electrodes are formed, and a portion on the substrate on which the first electrode is formed. Forming a mask pattern, lyophilically treating the entire surface of the substrate on which the first electrode is formed using the mask pattern as a mask, and removing the mask pattern to form a lyophobic pattern [1] Or the manufacturing method of the organic thin-film solar cell module as described in [2].
[4] A step of forming a plurality of first electrodes on the substrate, a step of forming a liquid repellent portion on the entire surface of the substrate on which the first electrodes are formed, and a part of the substrate on which the first electrodes are provided. Forming a mask pattern covering the substrate, lyophilicizing the entire surface of the substrate on which the first electrode is formed using the mask pattern as a mask, and removing the mask pattern to form a liquid repellent pattern; A first charge transport layer having a first exposed portion that exposes the liquid repellent pattern by applying a coating liquid that is repelled by the liquid repellent pattern over the entire surface of the substrate on which the pattern has been formed. An active layer covering the transport layer, a step of forming a second charge transport layer covering the active layer, and penetrating the second charge transport layer, the active layer and the first charge transport layer, outside the liquid repellent pattern Forming a second exposed portion where a portion of a certain first electrode is exposed, and a second charge Forming a second electrode that covers the transport layer, embeds the second exposed portion, and uncovers the liquid-repellent pattern by applying a coating liquid; a second electrode; a second charge transport layer; Forming a third exposed portion that penetrates the active layer and exposes a portion of the first charge transport layer outside the liquid repellent pattern, and separating the device into a plurality of organic photoelectric conversion elements. Manufacturing method of battery module.
[5] The step of forming the liquid repellent pattern includes the bonding strength between the material included in the substrate and the material included in the liquid repellent part, the material included in the first electrode, and the material included in the liquid repellent part. The lyophobic treatment is performed on the entire surface of the substrate by removing the liquid repellent portion from the surface of the first electrode by utilizing the difference between the bonding strength and the region of the substrate surface where the first electrode is not formed. Is a process for forming a liquid-repellent pattern by leaving the material contained in the liquid-repellent part, the method for producing an organic thin-film solar cell module according to [4].
[6] The step of forming the liquid repellent pattern is a step of forming the liquid repellent pattern using a coupling agent containing one kind of metal selected from the group consisting of silicon, aluminum, and titanium. The manufacturing method of the organic thin-film solar cell module as described in any one of-[5].
[7] The organic thin film solar cell according to any one of [1] to [5], wherein the step of forming the liquid repellent pattern is a step of forming a liquid repellent pattern using a material containing a thiol compound. Manufacturing method of battery module.
[8] The organic thin-film solar cell according to any one of [1] to [5], wherein the step of forming the liquid-repellent pattern is a step of forming the liquid-repellent pattern using a material containing fluorine. Module manufacturing method.
[9] The step of forming the liquid repellent pattern is a step of forming a liquid repellent pattern by steam treatment using one or more selected from the group consisting of CF ₄ , NF ₃ , and a mixture of CF ₄ and methanol. The method for producing an organic thin-film solar cell module according to [8].
[10] An organic thin film solar cell module that can be produced by the production method according to any one of [1] to [9].

FIG. 1 is a schematic cross-sectional view (1) showing the manufacturing method of the first embodiment. FIG. 2 is a schematic cross-sectional view (2) illustrating the manufacturing method of the first embodiment. FIG. 3 is a schematic cross-sectional view (3) showing the manufacturing method of the first embodiment. FIG. 4 is a schematic cross-sectional view (4) showing the manufacturing method of the first embodiment. FIG. 5 is a schematic cross-sectional view (5) showing the manufacturing method of the first embodiment. FIG. 6 is a schematic cross-sectional view (6) showing the manufacturing method of the first embodiment. FIG. 7 is a schematic cross-sectional view (7) showing the manufacturing method of the first embodiment. FIG. 8 is a schematic cross-sectional view (8) showing the manufacturing method of the first embodiment. FIG. 9 is a schematic cross-sectional view (9) showing the manufacturing method of the first embodiment. FIG. 10 is a schematic cross-sectional view (1) showing the manufacturing method of the second embodiment. FIG. 11 is a schematic cross-sectional view (2) showing the manufacturing method of the second embodiment. FIG. 12 is a schematic cross-sectional view (3) showing the manufacturing method of the second embodiment. FIG. 13 is a schematic cross-sectional view (4) showing the manufacturing method of the second embodiment. FIG. 14 is a schematic cross-sectional view (5) showing the manufacturing method of the second embodiment. FIG. 15 is a schematic cross-sectional view (6) showing the manufacturing method of the second embodiment. FIG. 16 is a schematic cross-sectional view (7) showing the manufacturing method of the second embodiment. FIG. 17 is a schematic cross-sectional view (8) showing the manufacturing method of the second embodiment. FIG. 18 is a schematic cross-sectional view (9) illustrating the manufacturing method of the second embodiment.

10: Substrate 10A: Electrode forming region 10B: Non-electrode forming region 20: First electrode 30: Liquid repellent portion 30a: Liquid repellent pattern 40: First charge transport layer 50: Active layer 60: Second charge transport layer 70 : Second electrode 70a: contact 100A1: first element 100A2: second element 100B: inter-element part R: lyophilic treatment X: first exposed part Y: second exposed part Z: third exposed part

<Organic thin film solar cell module>
The organic thin film solar cell module of the present invention can basically have the same module structure as a conventional solar cell module. In general, an organic thin-film solar cell module includes a plurality of organic photoelectric conversion elements (cells) formed on a metal (ceramic) substrate (supporting substrate), and the organic photoelectric conversion elements are covered with a filling resin, protective glass, or the like. A structure is adopted in which light is taken in from the opposite side of the substrate. However, a transparent material such as tempered glass may be used for the substrate, and an organic photoelectric conversion element may be formed thereon to take in light from the transparent substrate side.

Specific examples of the structure of the organic thin film solar cell module include module structures called super straight type, substrate type, and potting type, and substrate integrated module structures used in amorphous silicon solar cells and the like.

The structure of the organic thin-film solar cell module of the present invention may be appropriately selected from these module structures depending on the purpose of use, the place of use, and the environment.

In a typical super straight type or substrate type module structure, organic photoelectric conversion elements are arranged at regular intervals between substrates that are transparent on one side or both sides and subjected to antireflection treatment, and adjacent organic photoelectric conversion elements are They are connected by contact electrodes (embedded electrodes), metal leads, flexible wirings, etc., and current collecting electrodes are arranged on the outer edges, so that the generated power is taken out to the outside.

Between the substrate and the organic photoelectric conversion element, various types of plastic materials such as ethylene vinyl acetate (EVA) can be used in the form of a film or filled resin depending on the purpose in order to protect the organic photoelectric conversion element and improve the current collection efficiency. It may be used. Also, when used in places where there is no need to cover the surface with a hard material, such as where there is little impact from the outside, the surface protective layer is made of a transparent plastic film, and a protective function is given by curing the above filling resin However, the substrate on one side may be eliminated. The periphery of the substrate is sandwiched and fixed by a metal frame in order to secure internal sealing and module rigidity, and the substrate and the frame are hermetically sealed with a sealing material. In addition, if a flexible material is used for the organic photoelectric conversion element itself, the substrate, the filling material, and the sealing material, the organic photoelectric conversion element can be formed on the curved surface.

In the case of a solar cell module using a flexible support such as a polymer film, the solar cell module sequentially forms photoelectric conversion elements on the support while feeding out the roll-shaped support, and cuts it to a desired size. Then, the peripheral portion may be produced by sealing with a flexible and moisture-proof material.

It is also possible to adopt a module structure called “SCAF” described in Solar Energy Materials and Solar Cells, 48, p383-391. Furthermore, the solar cell module using the flexible support is preferably used by being bonded and fixed to curved glass or the like.

Hereinafter, the present invention will be described in detail with reference to the drawings. Among the organic thin-film solar cell modules having the above-described configuration, the exterior members such as the frame and the protective member are not the gist of the present invention, so the description thereof will be omitted, and the explanation will focus on the organic photoelectric conversion element and the manufacturing method thereof. To do.

In the following description, each figure only schematically shows the shape, size, and arrangement of components to the extent that the invention can be understood, and the present invention is not particularly limited thereby. Moreover, in each figure, about the same component, it attaches | subjects and shows the same code | symbol, The duplicate description may be abbreviate | omitted.

(First embodiment)
In the method for manufacturing an organic thin-film solar cell module according to the first embodiment, an organic photoelectric conversion element including a pair of electrodes including a first electrode and a second electrode and an active layer sandwiched between the pair of electrodes is a substrate. A method of manufacturing a plurality of organic thin-film solar cell modules arranged on a substrate, the step of forming a plurality of first electrodes on a substrate, and the step of forming a liquid repellent pattern on a part of each of the plurality of first electrodes, including.

More specifically, the method of manufacturing the organic thin-film solar cell module according to the first embodiment includes a step of forming a plurality of first electrodes on a substrate, and a liquid repellent property on the entire surface of the substrate on which the first electrodes are formed. Forming a conductive portion, forming a mask pattern covering a portion of the substrate on which the first electrode is provided, lyophilicizing the entire surface of the substrate on which the first electrode is formed using the mask pattern as a mask, Removing the liquid-repellent pattern, and applying a liquid-repellent coating liquid on the entire surface of the substrate on which the liquid-repellent pattern is formed to expose the liquid-repellent pattern. Forming a first charge transport layer having a first exposed portion, an active layer covering the first charge transport layer, a second charge transport layer covering the active layer, the second charge transport layer, the active layer, and the first layer The first that penetrates the charge transport layer and is outside the liquid repellent pattern A step of forming a second exposed portion in which a part of the electrode is exposed; and a second electrode that covers the second charge transport layer, embeds the second exposed portion, and uncovers the liquid repellent pattern. And forming a third exposed portion that exposes a portion of the first charge transport layer outside the liquid repellent pattern, penetrating the second electrode, the second charge transport layer, and the active layer. And a step of element separation into a plurality of organic photoelectric conversion elements.

Here, with reference to FIG. 1 to FIG. 9, the manufacturing method of the organic thin-film solar cell module of the first embodiment will be specifically described.

FIG. 1 is a schematic cross-sectional view (1) showing the manufacturing method of the first embodiment. FIG. 2 is a schematic cross-sectional view (2) illustrating the manufacturing method of the first embodiment. FIG. 3 is a schematic cross-sectional view (3) showing the manufacturing method of the first embodiment. FIG. 4 is a schematic cross-sectional view (4) showing the manufacturing method of the first embodiment. FIG. 5 is a schematic cross-sectional view (5) showing the manufacturing method of the first embodiment. FIG. 6 is a schematic cross-sectional view (6) showing the manufacturing method of the first embodiment. FIG. 7 is a schematic cross-sectional view (7) showing the manufacturing method of the first embodiment. FIG. 8 is a schematic cross-sectional view (8) showing the manufacturing method of the first embodiment. FIG. 9 is a schematic cross-sectional view (9) showing the manufacturing method of the first embodiment.

As shown in FIG. 1, first, a substrate 10 is prepared. The substrate 10 is a flat substrate having two principal surfaces facing each other. In preparing the substrate 10, a substrate on which one main surface of the substrate 10 is previously provided with a thin film of a conductive material that can be an electrode material such as indium tin oxide (sometimes referred to as ITO) is provided. You may prepare.

When a thin film of conductive material is not provided on the substrate 10, a thin film of conductive material is formed on one main surface of the substrate 10 by any suitable method. The conductive material thin film is then patterned. In this patterning, an electrode forming region 10A and a non-electrode forming region 10B outside the electrode forming region 10A are set in advance. The thin film of the conductive material is patterned by any suitable method such as a photolithography process and an etching process to form the first electrode 20 having a plurality of patterns electrically separated from each other in the electrode formation region 10A. By this step, a part of the main surface of the substrate 10 is exposed in the non-electrode forming region 10B where the first electrode 20 is not formed.

As shown in FIG. 2, a liquid repellent portion 30 that is liquid repellent is formed on the entire surface of the substrate 10 on which the first electrode 20 is formed, including the surface 20a of the first electrode 20.

As shown in FIG. 3, a mask pattern (not shown) is formed to cover a portion of the substrate 10 provided with the first electrode 20 (not shown), and the substrate 10 on which the first electrode 20 is formed using this mask pattern as a mask. The entire surface is made lyophilic by lyophilic treatment R.
As the lyophilic treatment R, preferably, plasma treatment, UV ozone treatment, and corona discharge treatment according to a conventional method are used.

Next, the mask pattern is removed to form a liquid repellent pattern 30a. As an example of the step of forming the liquid repellent pattern 30a, a step of first forming the liquid repellent portion 30 using a coupling agent and subsequently forming the liquid repellent pattern 30a, or a material containing a thiol compound is used. First, the step of forming the liquid-repellent portion 30 and subsequently forming the liquid-repellent pattern 30a can be mentioned.

Examples of coupling agents with metal Si are vinyltrichlorosilane, vinyltrimethoxysilane, vinyltriethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-glycidoxypropyltrimethoxy. Silane, 3-glycidoxypropylmethyldiethoxysilane, 3-glycidoxypropyltriethoxysilane, p-styryltrimethoxysilane, 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3- Methacryloxypropylmethyldiethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-acryloxypropyltrimethoxysilane, N-2- (aminoethyl) -3-aminopropylmethyldimethoxysilane, N-2- Aminoethyl) -3-aminopropyltrimethoxysilane, N-2- (aminoethyl) -3-aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-triethoxysilyl -N- (3-dimethyl-butylidene) propylamine, N-phenyl-3-aminopropyltrimethoxysilane, N- (vinylbenzyl) -2-aminoethyl-3-aminopropyltrimethoxysilane hydrochloride, 3-ureido Propyltriethoxysilane, 3-chloropropyltrimethoxysilane, 3-mercaptopropylmethyldimethoxysilane, 3-mercaptopropyltrimethoxysilane, bis (triethoxysilylpropyl) tetrasulfide, 3-isocyanatopropyltriethoxysila , Tetramethoxysilane, tetraethoxysilane, methyltrimethoxysilane, methyltriethoxysilane, dimethyltriethoxysilane, phenyltriethoxysilane, hexamethyldisilazane, hexyltrimethoxysilane, decyltrimethoxysilane, butyltrichlorosilane, cyclohexyltri Examples include chlorosilane, decyltrichlorosilane, dodecyltrichlorosilane, octyltrichlorosilane, octadecyltrichlorosilane, and tetradecyltrichlorosilane.

Examples of coupling agents with metal Al are aluminum isopropylate, mono sec-butoxyaluminum diisopropylate, aluminum sec-butyrate, aluminum ethylate, ethyl acetoacetate aluminum diisopropylate, aluminum tris (ethyl acetoacetate) , Alkyl acetoacetate aluminum diisopropylate, aluminum monoacetylacetonate bis (ethylacetoacetate), aluminum tris (acetylacetonate), aluminum monoisopropoxymonooroxyethyl acetoacetate, cyclic aluminum oxide isopropylate, cyclic aluminum oxide octyl Rate, cyclic aluminum oxide stearate, and the like.

Examples of coupling agents in which the metal is Ti include tetraisopropyl titanate, tetranormal butyl titanate, butyl titanate dimer, tetra (2-ethylhexyl) titanate, tetramethyl titanate, titanium acetylacetonate, titanium tetraacetylacetonate, titanium Examples thereof include ethyl acetoacetate, titanium octanediolate, titanium lactate, titanium triethanolamate, and polyhydroxytitanium stearate.

Examples of thiol compounds include octadecanethiol, azophenoxide decanethiol, perfluorooctylpentanethiol, butanethiol, hexanethiol, octanethiol, dodecanethiol and the like. When the first electrode 20 is an oxide such as ITO, a coupling agent is preferably used.

Further, in the step of forming the liquid repellent pattern 30a, the liquid repellent portion 30 first fluorinated by vapor treatment using one or more selected from the group consisting of CF ₄ , NF ₃ , and a mixture of CF ₄ and methanol. And subsequently patterning the liquid repellent portion 30.

Alternatively, the liquid repellent pattern 30a may be directly formed on the substrate on which the first electrode 20 is provided by, for example, an ink jet method. In this case, the liquid repellent part 30 forming step and the liquid repellent part 30 patterning step are not required.

As shown in FIG. 4, a coating liquid that is repelled by the liquid repellent pattern 30a is then applied to the entire surface of the substrate 10 on which the liquid repellent pattern 30a is formed to expose the liquid repellent pattern 30a. A first charge transport layer 40 having a first exposed portion X is formed.

As shown in FIG. 5, the active layer 50 that covers the first charge transport layer 40 is subsequently formed.
Also in the step of forming the active layer 50, a coating liquid repelled by the liquid repellent pattern 30a is applied to the entire surface of the substrate 10 on which the liquid repellent pattern 30a is formed.

As shown in FIG. 6, a second charge transport layer 60 covering the active layer 50 is further formed. Also in the formation process of the second charge transport layer 60, a coating liquid repelled by the liquid repellent pattern 30a is applied to the entire surface of the substrate 10 on which the liquid repellent pattern 30a is formed.

Through the above steps, the island-shaped stacked structure of the first charge transport layer 40, the active layer 50, and the second charge transport layer 60 is formed in a region outside the liquid repellent pattern 30a in a self-aligned manner, and the liquid repellent property A first exposed portion X that exposes the pattern 30a is formed.

As shown in FIG. 7, the second exposure is such that a part of the first electrode 20 outside the liquid repellent pattern 30a is exposed through the first charge transport layer 40, the active layer 50, and the second charge transport layer 60. Part Y is formed.

As shown in FIG. 8, the second electrode 70 that covers the second charge transport layer 60, fills the second exposed portion Y, contacts the first electrode 20, and uncovers the liquid repellent pattern 30a. Form. This process is also formed by applying a coating liquid repelled by the liquid repellent pattern 30a. By this step, a gap is generated between the liquid repellent pattern 30 a and the second electrode 70. A portion of the second electrode that embeds the second exposed portion Y functions as a contact (electrode) 70 a that makes the first electrode 20 and the second electrode 70 conductive.

When the second electrode 70 is formed by a method such as a vapor deposition method instead of the coating method, the material of the second electrode 70 is deposited also on the liquid repellent pattern 30a. Needless to say, a contact is formed immediately above the liquid repellent pattern 30a. Therefore, in this case, the second exposed portion Y need not be formed.

As described above, since the second exposed portion Y is a contact groove or a contact hole for conducting the first electrode 20 and the second electrode 70, the shape thereof is not particularly limited. It can be formed as a columnar shape.

By forming the contact 70a in this way, adjacent organic photoelectric conversion elements are electrically connected, and an organic thin film solar cell module in which a plurality of organic photoelectric conversion elements are connected to each other is manufactured.

As described above, the first charge transport layer 40, the active layer 50, the second charge transport layer 60, and the second electrode 70 are coated with a coating liquid, that is, a solution, and the formed layer is applied in a nitrogen gas atmosphere. It is formed by a film forming method that is dried under conditions suitable for the material and the solvent under any suitable atmosphere.

Film formation methods include spin coating, casting, micro gravure coating, gravure coating, bar coating, roll coating, wire bar coating, dip coating, spray coating, screen printing, and gravure printing. , Flexographic printing methods, offset printing methods, inkjet printing methods, dispenser printing methods, nozzle coating methods, capillary coating methods, and other coating methods may be used, such as spin coating methods, flexographic printing methods, gravure printing methods, inkjet printing methods, Dispenser printing is preferred.

The solvent used in the film forming method using these solutions is not particularly limited as long as it dissolves the material of each layer and is repelled by the liquid repellent pattern so as not to wet and spread on the liquid repellent pattern.

Examples of such solvents include toluene, xylene, mesitylene, tetralin, decalin, bicyclohexyl, unsaturated hydrocarbon solvents such as butylbenzene, sec-butylbenzene, tert-butylbenzene, carbon tetrachloride, chloroform, dichloromethane , Halogenated saturated hydrocarbon solvents such as dichloroethane, chlorobutane, bromobutane, chloropentane, bromopentane, chlorohexane, bromohexane, chlorocyclohexane, bromocyclohexane, and halogenated unsaturated hydrocarbons such as chlorobenzene, dichlorobenzene, and trichlorobenzene Examples of the solvent include ether solvents such as tetrahydrofuran and tetrahydropyran.

As shown in FIG. 9, a third exposed portion that penetrates through the second electrode 70, the second charge transport layer 60, and the active layer 50 and exposes a portion of the first charge transport layer 40 outside the liquid repellent pattern 30a. Z is formed.

The third exposed portion Z can be formed by a conventionally known patterning process such as a photolithography process, an etching process subsequent thereto, and a cutting process using a rotary blade.

The third exposed portion Z is a configuration for electrically separating the first organic photoelectric conversion element 100A1 and the second organic photoelectric conversion element 100A2 by the inter-element portion 100B. By forming the third exposed portion Z, a plurality of organic photoelectric conversion elements are formed by element isolation. The inter-element portion 100B has a linear groove shape, and in this example, adjacent elements are separated in the vicinity of the peripheral edge portion of the first electrode along the peripheral edge shape (in this example, a straight line shape). Since the inter-element portion 100B is an area that does not function as a photoelectric conversion element, it is preferable to make the area as small as possible. Therefore, the third exposed portion Z is preferably formed as a shape and an arrangement position that can reduce the size of the inter-element portion 100B as much as possible. For example, in this example, it may be configured as a linear groove as close as possible to the peripheral edge of the first electrode and as narrow as possible.

(Second Embodiment)
In the method for manufacturing an organic thin film solar cell module according to the second embodiment, an organic photoelectric conversion element including a pair of electrodes including a first electrode and a second electrode and an active layer sandwiched between the pair of electrodes is a substrate. In the method for manufacturing an organic thin-film solar cell module including a plurality of organic photoelectric conversion elements arranged on the substrate, a step of forming a plurality of first electrodes on the substrate and a plurality of first electrodes provided on the substrate Forming a liquid repellent pattern on an outer substrate.

More specifically, the step of forming the liquid repellent pattern includes the bond strength between the material included in the substrate and the material included in the liquid repellent part, and the material included in the first electrode and the liquid repellent part. The lyophobic treatment is performed on the entire surface of the substrate by utilizing the difference in bonding strength with the material to be removed, and the liquid repellent portion is removed from the surface of the first electrode, and the first electrode is not formed on the surface of the substrate. This is a step of forming a liquid repellent pattern by leaving the material contained in the liquid repellent part in the region.

10 to 18, a method for manufacturing the organic thin film solar cell module of the second embodiment will be specifically described. It should be noted that detailed description of conditions and the like may be omitted for the steps common to the already described first embodiment.

FIG. 10 is a schematic cross-sectional view (1) showing the manufacturing method of the second embodiment. FIG. 11 is a schematic cross-sectional view (2) showing the manufacturing method of the second embodiment. FIG. 12 is a schematic cross-sectional view (3) showing the manufacturing method of the second embodiment. FIG. 13 is a schematic cross-sectional view (4) showing the manufacturing method of the second embodiment. FIG. 14 is a schematic cross-sectional view (5) showing the manufacturing method of the second embodiment. FIG. 15 is a schematic cross-sectional view (6) showing the manufacturing method of the second embodiment. FIG. 16 is a schematic cross-sectional view (7) showing the manufacturing method of the second embodiment. FIG. 17 is a schematic cross-sectional view (8) showing the manufacturing method of the second embodiment. FIG. 18 is a schematic cross-sectional view (9) illustrating the manufacturing method of the second embodiment.

As shown in FIG. 10, first, a substrate 10 is prepared. If the substrate 10 is not provided with a thin film of conductive material, the conductive material film is formed by any suitable method. The conductive material thin film is then patterned. In this patterning, an electrode forming region 10A and a non-electrode forming region 10B outside the electrode forming region 10A are set in advance. The thin film of the conductive material is patterned to form the first electrode 20 having a plurality of patterns electrically separated from each other in the electrode formation region 10A. By this step, a part of the main surface of the substrate 10 is exposed in the non-electrode formation region 10B.

As shown in FIG. 11, a liquid repellent portion 30 that is liquid repellent is formed on the entire surface of the substrate 10 on which the first electrode 20 is formed, including the surface 20 a of the first electrode 20.

The step of forming the liquid repellent portion 30 may be performed in the same manner as in the first embodiment. Preferably, the liquid repellent part 30 may be formed using a coupling agent containing one kind of metal selected from the group consisting of silicon, aluminum and titanium.

The step of forming the liquid repellent part 30 includes the step of forming the liquid repellent part 30 fluorinated by steam treatment using one or more selected from the group consisting of CF ₄ , NF ₃ , and a mixture of CF ₄ and methanol. What is necessary is just to make it the process of forming.

As shown in FIG. 12, the entire surface of the substrate 10 on which the first electrode 20 is formed is made lyophilic by lyophilic treatment R. The lyophilic process may be performed in the same manner as in the first embodiment. The lyophilic treatment R preferably includes plasma treatment, UV ozone treatment, corona discharge treatment, and water washing treatment according to a conventional method. By this step, the exposed surface of the first electrode 20, that is, the electrode formation region 10 </ b> A is made lyophilic, and the liquid repellent pattern 30 a remains only in the non-electrode formation region 10 </ b> B exposed from the first electrode 20.

Thus, in the second embodiment, the property of the surface of the first electrode 20 (the property of the material included in the first electrode 20) and the property of the surface of the substrate 10 exposed from the first electrode 20 (on the substrate 10). Property of the material contained), that is, the parent of the material of the liquid repellent part 30 formed on both the surface of the first electrode 20 and a part (region) of the surface of the substrate 10 on which the first electrode 20 is not formed. It can be implemented by utilizing the difference in the removal rate due to the liquefaction treatment R.

For example, when the lyophobic portion 30 that has been fluorinated by CF ₄ plasma treatment is washed with water to a suitable degree, only the fluoride that is the fluorine component on the first electrode 20 can be selectively removed, and the first The liquid repellent pattern 30 a can be formed (remaining) only in the region outside the electrode 20.

In this way, a mask pattern forming step, a patterning step using the mask pattern as a mask, and a mask pattern removing step are not required.

Of course, as described in the first embodiment, the liquid repellent pattern 30a may be formed by using a mask pattern or by an inkjet method.

As shown in FIG. 13, a coating liquid that is repelled by the liquid repellent pattern 30a is then applied to the entire surface of the substrate 10 on which the liquid repellent pattern 30a is formed to expose the liquid repellent pattern 30a. A first charge transport layer 40 having a first exposed portion X is formed.

As shown in FIG. 14, the active layer 50 that covers the first charge transport layer 40 is subsequently formed. Also in the step of forming the active layer 50, a coating liquid repelled by the liquid repellent pattern 30a is applied to the entire surface of the substrate 10 on which the liquid repellent pattern 30a is formed.

As shown in FIG. 15, a second charge transport layer 60 covering the active layer 50 is further formed. Also in the formation process of the second charge transport layer 60, a coating liquid repelled by the liquid repellent pattern 30a is applied to the entire surface of the substrate 10 on which the liquid repellent pattern 30a is formed.

As shown in FIG. 16, the second exposure is such that a part of the first electrode 20 outside the liquid repellent pattern 30a is exposed through the first charge transport layer 40, the active layer 50, and the second charge transport layer 60. Part Y is formed.

As shown in FIG. 17, the second electrode 70 that covers the second charge transport layer 60, fills the second exposed portion Y, contacts the first electrode 20, and uncovers the liquid repellent pattern 30a is formed. Form. This process is also formed by applying a coating liquid repelled by the liquid repellent pattern 30a.

A part of the second electrode that embeds the second exposed portion Y functions as a contact 70 a that connects the first electrode 20 and the second electrode 70.

As described above, since the second exposed portion Y is a contact groove for conducting the first electrode 20 and the second electrode 70, the shape thereof is not particularly limited. For example, the second exposed portion Y may be formed as a groove shape or a hole shape. Good.

As shown in FIG. 18, a third exposed portion that penetrates through the second electrode 70, the second charge transport layer 60, and the active layer 50 and exposes a portion of the first charge transport layer 40 outside the liquid repellent pattern 30a. Z is formed.

<Organic photoelectric conversion element>
Here, the organic photoelectric conversion element with which the organic thin-film solar cell module manufactured by the manufacturing method of this invention is provided is demonstrated with reference to FIG.

The organic photoelectric conversion element includes a pair of electrodes composed of an anode and a cathode, and an active layer sandwiched between the pair of electrodes.

Of the pair of electrodes, at least one of the electrodes on which light is incident, that is, at least one of the electrodes is a transparent or translucent electrode capable of transmitting incident light (sunlight) having a wavelength necessary for power generation. .

As shown in FIG. 9, the organic photoelectric conversion elements (the first element 100A1 and the second element 100A2) include, for example, a pair of electrodes including a first electrode 20 that is an anode and a second electrode 70 that is a cathode, for example. Active layer 50 sandwiched between the electrodes. The polarities of the first electrode 20 and the second electrode 70 may be any suitable polarity corresponding to the element structure, and the first electrode 20 may be a cathode and the second electrode 70 may be an anode.

Examples of transparent or translucent electrodes include conductive metal oxide films and translucent metal thin films. Specifically, as the electrode, indium oxide, zinc oxide, tin oxide, and a film made using a conductive material such as indium tin oxide or indium zinc oxide (IZO) that is a composite thereof, A film made of gold, platinum, silver, copper or the like such as NESA is used, and a film made of ITO, indium zinc oxide, or tin oxide is preferable. Examples of the electrode manufacturing method include a vacuum deposition method, a sputtering method, an ion plating method, a plating method, and the like. Moreover, you may use organic transparent conductive films, such as polyaniline and its derivative (s), polythiophene, and its derivative (s) as an electrode.

As the electrode material for the opaque electrode, a metal, a conductive polymer, or the like can be used. Specific examples of electrode materials for opaque electrodes include lithium, sodium, potassium, rubidium, cesium, magnesium, calcium, strontium, barium, aluminum, scandium, vanadium, zinc, yttrium, indium, cerium, samarium, europium, terbium Selected from the group consisting of gold, silver, platinum, copper, manganese, titanium, cobalt, nickel, tungsten and tin, and a metal such as ytterbium and two or more alloys thereof, or one or more metals Examples include alloys with one or more metals, graphite, graphite intercalation compounds, polyaniline and its derivatives, polythiophene and its derivatives. Examples of the alloy include magnesium-silver alloy, magnesium-indium alloy, magnesium-aluminum alloy, indium-silver alloy, lithium-aluminum alloy, lithium-magnesium alloy, lithium-indium alloy, calcium-aluminum alloy and the like.

The organic photoelectric conversion element is usually formed on a substrate. That is, the first element 100A1 and the second element 100A2 are provided on the main surface of the substrate 10.

The material of the substrate 10 may be any material that does not change chemically when forming an electrode and forming a layer containing an organic substance. Examples of the material of the substrate 10 include glass, plastic, polymer film, silicon and the like.

When the substrate 10 is opaque and does not transmit incident light, the second electrode 70 (that is, the electrode far from the substrate 10) provided on the side opposite to the substrate side facing the first electrode 20 is transparent. Or a translucent material capable of transmitting required incident light.

The active layer 50 is sandwiched between the first electrode 20 and the second electrode 70. The active layer 50 of the second embodiment is a bulk hetero type organic layer containing a mixture of an electron-accepting compound (n-type semiconductor) and an electron-donating compound (p-type semiconductor). It is a layer having a function essential to the photoelectric conversion function, which can generate electric charges (holes and electrons) using the energy of.

The active layer included in the organic photoelectric conversion element includes an electron donating compound and an electron accepting compound as described above.
Note that the electron-donating compound and the electron-accepting compound are determined relatively from the energy levels of these compounds, and one compound can be either an electron-donating compound or an electron-accepting compound.

Examples of electron donating compounds include pyrazoline derivatives, arylamine derivatives, stilbene derivatives, triphenyldiamine derivatives, oligothiophene and derivatives thereof, polyvinylcarbazole and derivatives thereof, polysilane and derivatives thereof, aromatic amines in the side chain or main chain And polysiloxane derivatives, polyaniline and derivatives thereof, polythiophene and derivatives thereof, polypyrrole and derivatives thereof, polyphenylene vinylene and derivatives thereof, polythienylene vinylene and derivatives thereof, and the like.

Examples of electron accepting compounds include oxadiazole derivatives, anthraquinodimethane and its derivatives, benzoquinone and its derivatives, naphthoquinone and its derivatives, anthraquinone and its derivatives, tetracyanoanthraquinodimethane and its derivatives, fluorenone derivatives, diphenyldicyanoethylene and derivatives thereof, diphenoquinone derivatives, 8-hydroxyquinoline and metal complexes of derivatives thereof, polyquinoline and derivatives thereof, polyquinoxaline and derivatives thereof, polyfluorene and derivatives thereof, fullerenes and derivatives thereof such as C ₆₀ fullerene, bathocuproine And phenanthrene derivatives such as titanium oxide, metal oxides such as titanium oxide, and carbon nanotubes. As the electron-accepting compound, titanium oxide, carbon nanotubes, fullerenes, and fullerene derivatives are preferable, and fullerenes and fullerene derivatives are particularly preferable.

Examples of _{fullerene, C 60} _{fullerene, C 70} _{fullerene, C 76} _{fullerene, C 78} _fullerene, such as _{C 84} fullerene, and the like.

Examples of the fullerene derivatives _{C 60} _{fullerene, C 70} _{fullerene, C 76} _{fullerene, C 78} fullerene _{include C 84} fullerene derivatives of each. Examples of the specific structure of the fullerene derivative include the following structures.

Examples of fullerene derivatives include [6,6] phenyl-C ₆₁ butyric acid methyl ester (C ₆₀ PCBM, [6,6] -Phenyl C ₆₁ butyric acid methyl ester), and [6,6] phenyl-C _71. Butyric acid methyl ester (C ₇₀ PCBM, [6,6] -Phenyl C ₇₁ butyric acid methyl ester), [6,6] Phenyl-C ₈₅ butyric acid methyl ester (C ₈₄ PCBM, [6,6] -Phenyl C ₈₅ butyric acid methyl ester), and the like [6,6] thienyl _{-C 61} butyric acid methyl ester _{([6,6] -Thienyl C 61 butyric} acid methyl ester).

When a fullerene derivative is used as the electron accepting compound, the ratio of the fullerene derivative is preferably 10 parts by weight to 1000 parts by weight with respect to 100 parts by weight of the electron donating compound, and 20 parts by weight to 500 parts by weight. It is more preferable that
The ratio of the electron accepting compound in the bulk hetero type active layer containing the electron accepting compound and the electron donating compound is preferably 10 parts by weight to 1000 parts by weight with respect to 100 parts by weight of the electron donating compound. More preferred is 50 to 500 parts by weight.

The thickness of the active layer is usually preferably 1 nm to 100 μm, more preferably 2 nm to 1000 nm, still more preferably 5 nm to 500 nm, and particularly preferably 20 nm to 200 nm.

Here, the operation mechanism of the organic photoelectric conversion element will be briefly described. The energy of incident light that has passed through the transparent or translucent electrode and entered the active layer is absorbed by the electron-accepting compound and / or the electron-donating compound to generate excitons in which electrons and holes are combined. When the generated excitons move and reach the heterojunction interface where the electron-accepting compound and the electron-donating compound are bonded, the difference between the HOMO energy and the LUMO energy at the interface causes the electrons and holes to be separated. Charges (electrons and holes) are generated that can separate and move independently. The generated charges move to the electrodes (cathode and anode), respectively, and can be taken out as electric energy (current) outside the device.

In the organic photoelectric conversion element, an additional layer (intermediate layer) other than the active layer is provided as a means for improving photoelectric conversion efficiency between at least one of the first electrode and the second electrode and the active layer. May be provided. Examples of the material used for the additional intermediate layer include alkali metal and alkaline earth metal halides such as lithium fluoride, alkali metal and alkaline earth metal oxides, and the like. Examples of the material used as the additional intermediate layer include fine particles of inorganic semiconductor such as titanium oxide, PEDOT (poly-3,4-ethylenedioxythiophene), and the like.

Examples of the additional layer include a charge transport layer (hole transport layer, electron transport layer) that transports holes or electrons.

Any suitable material can be used as the material constituting the charge transport layer. When the charge transport layer is an electron transport layer, an example of the material is 2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline (BCP). When the charge transport layer is a hole transport layer, an example of the material is PEDOT.

The additional intermediate layer that may be provided between the first electrode and the second electrode and the active layer may be a buffer layer. The material used as the buffer layer may be an alkali metal such as lithium fluoride. And alkaline earth metal halides and oxides such as titanium oxide. When an inorganic semiconductor is used, it can be used in the form of fine particles.

The configuration of the organic photoelectric conversion element will be described more specifically. A first electrode 20 is provided on the main surface of the substrate 10. A first charge transport layer 40 is provided on the first electrode 20. The first charge transport layer 40 is a hole transport layer when the first electrode 20 is an anode, and is an electron transport layer when the first electrode 20 is a cathode.

The active layer 50 is provided on the first charge transport layer 40. A second charge transport layer 60 is provided on the active layer 50. The second charge transport layer 60 is an electron transport layer when the first electrode 20 is an anode, and is a hole transport layer when the first electrode 20 is a cathode. The second electrode 70 is provided on the second charge transport layer 60.

In the organic photoelectric conversion device having the above configuration, the active layer 50 is described as a single-layer active layer in which a bulk hetero type in which an electron accepting compound and an electron donating compound are mixed. However, the active layer 50 includes a plurality of layers. For example, a heterojunction type in which an electron-accepting layer containing an electron-accepting compound such as a fullerene derivative and an electron-donating layer containing an electron-donating compound such as P3HT may be joined. .

Here, an example of the layer structure which an organic photoelectric conversion element can take is shown below.
a) Anode / active layer / cathode b) Anode / hole transport layer / active layer / cathode c) Anode / active layer / electron transport layer / cathode d) Anode / hole transport layer / active layer / electron transport layer / cathode e) Anode / electron supply layer / electron acceptor layer / cathode f) Anode / hole transport layer / electron supply layer / electron acceptor layer / cathode g) Anode / electron supply layer / electron acceptor layer / electron Transport layer / cathode h) anode / hole transport layer / electron supply layer / electron-accepting layer / electron transport layer / cathode (where the symbol “/” is adjacent to the layer sandwiching the symbol “/”) Indicates that they are stacked.)

The layer configuration may be any of a form in which the anode is provided on the side closer to the substrate and a form in which the cathode is provided on the side closer to the substrate.
Each of the above layers may be formed as a single layer or a laminate of two or more layers.

<Example 1> (Liquid-repellent treatment in electrode)
Polyethylene naphthoate with ITO film (sometimes called PEN) Film substrate (trade name: OTEC, manufactured by Tobi Co., Ltd.) After protecting the surface on which the electrode is formed with Kapton tape, HNO with a concentration of 1 mol / L ₃ was immersed in 3 minutes, and the ITO film was patterned into a pattern in which a plurality of electrodes (first electrodes) are arranged and the main surface of the PEN film substrate is exposed outside these electrodes. The substrate on which the electrodes were patterned was washed with acetone, and then subjected to UV ozone cleaning treatment for 15 minutes using an ultraviolet ozone irradiation apparatus (Technovision, model: UV-312) equipped with a low-pressure mercury lamp. A first electrode with a clean surface was made on the PEN substrate. Next, the substrate on which the first electrode was formed was immersed in a solution obtained by dissolving 0.5% by weight of octadecyltrichlorosilane in an octane solvent, followed by heat treatment at 120 ° C. for 30 minutes. Then, after protecting the partial area | region on the 1st electrode used as a liquid repellent pattern with a Kapton tape, it processed by UV ozone for 15 minutes, and produced the 1st board | substrate 1 provided with a 1st electrode and a liquid repellent pattern.

Next, PEDOT (trade name Baytron P AI4083, lot. HCD07O109, manufactured by Starck Co., Ltd.), which is a hole transporting material, was applied on the substrate 1 by a spin coating method. By this coating process, a patterned PEDOT layer was formed outside the liquid repellent pattern. Thereafter, drying was performed in air at 150 ° C. for 30 minutes. Next, poly (3-hexylthiophene) (P3HT) (trade name licicon SP001, lot. EF431002) as a conjugated polymer compound as an electron donating material and PCBM (frontier as a fullerene derivative as an electron accepting material). Carbon, trade name E100, lot.7B0168-A) was added to the orthodichlorobenzene solvent so that P3HT was 1.5 wt% and PCBM was 1.2 wt%, and 70 ° C. for 2 hours. After stirring, the mixture is filtered with a filter having a pore size of 0.2 μm to prepare a coating solution. Next, an active layer was formed on the PEDOT layer by applying the coating solution by spin coating. By this coating step, a patterned active layer was formed outside the liquid repellent pattern.

<Example 2> (Liquid repellent treatment in a region outside the electrode)
The surface on which the first electrode of the PEN film substrate with ITO film (trade name: OTEC, manufactured by Tobi) is protected with Kapton tape, and then immersed in 1 mol / L HNO ₃ for 3 minutes. The film was patterned to a pattern including a plurality of first electrodes. After cleaning the patterned substrate with acetone, the substrate was cleaned by UV ozone cleaning for 15 minutes using an ultraviolet ozone irradiation device (Technovision, model: UV-312) equipped with a low-pressure mercury lamp. A first electrode having a surface was formed on a PEN substrate.

Next, after protecting the first electrode with Kapton tape, the substrate was introduced into an atmospheric pressure plasma apparatus, and plasma treatment was performed in a CF ₄ atmosphere. Thereafter, the Kapton tape is peeled off to obtain the second substrate 2.
Thereafter, a laminated structure was produced using the second substrate 2 by the same method as in Example 1.

The present invention is useful for manufacturing an organic thin film solar cell module.

Claims

In the method of manufacturing an organic thin-film solar cell module in which a plurality of organic photoelectric conversion elements each including an active layer sandwiched between a pair of electrodes composed of a first electrode and a second electrode and the pair of electrodes are disposed on a substrate,
Forming a plurality of first electrodes on a substrate;
Forming a liquid repellent pattern on a part of each of the plurality of first electrodes.
In the method of manufacturing an organic thin-film solar cell module in which a plurality of organic photoelectric conversion elements each including an active layer sandwiched between a pair of electrodes composed of a first electrode and a second electrode and the pair of electrodes are disposed on a substrate,
Forming a plurality of first electrodes on a substrate;
Forming a liquid repellent pattern on a plurality of substrates outside the first electrodes. A method for manufacturing an organic thin film solar cell module.
The step of forming the liquid repellent pattern includes a step of forming a liquid repellent portion on the entire surface of the substrate on which the plurality of first electrodes are formed, and a mask pattern that covers a part of the substrate on which the first electrode is formed. And forming a lyophobic pattern by removing the mask pattern and lyophilically treating the entire surface of the substrate on which the first electrode is formed using the mask pattern as a mask. Manufacturing method of organic thin film solar cell module.
Forming a plurality of first electrodes on a substrate;
Forming a liquid repellent portion on the entire surface of the substrate on which the first electrode is formed;
A mask pattern is formed to cover a portion of the substrate on which the first electrode is formed, and the entire surface of the substrate on which the first electrode is formed is made lyophilic using the mask pattern as a mask, and the mask pattern is removed to make liquid repellent Forming a pattern;
A first charge transport layer having a first exposed portion that exposes the liquid repellent pattern by applying a coating liquid repelled by the liquid repellent pattern on the entire surface of the substrate on which the liquid repellent pattern is formed; Forming an active layer covering the first charge transport layer, a second charge transport layer covering the active layer;
Forming a second exposed portion that penetrates the second charge transport layer, the active layer, and the first charge transport layer and exposes a portion of the first electrode outside the liquid repellent pattern;
Forming a second electrode covering the second charge transport layer, embedding the second exposed portion, and uncovering the liquid repellent pattern by applying a coating liquid;
A third exposed portion is formed through the second electrode, the second charge transport layer, and the active layer to expose a portion of the first charge transport layer outside the liquid repellent pattern, thereby forming a plurality of organic photoelectric conversion elements. The manufacturing method of an organic thin-film solar cell module provided with the process of element isolation.
The step of forming the liquid repellent pattern includes the bonding strength between the material included in the substrate and the material included in the liquid repellent portion, and the bonding strength between the material included in the first electrode and the material included in the liquid repellent portion. The lyophobic treatment is performed on the entire surface of the substrate to remove the lyophobic portion from the surface of the first electrode, and the region of the substrate surface where the first electrode is not formed is lyophobic. The manufacturing method of the organic thin-film solar cell module of Claim 4 which is a process of forming a liquid repellent pattern by leaving the material contained in a property part.
The step of forming a liquid repellent pattern is a step of forming a liquid repellent pattern using a coupling agent containing one metal selected from the group consisting of silicon, aluminum, and titanium. Manufacturing method of organic thin film solar cell module.
The method for producing an organic thin film solar cell module according to claim 1, wherein the step of forming the liquid repellent pattern is a step of forming the liquid repellent pattern using a material containing a thiol compound.
The method for producing an organic thin film solar cell module according to claim 1, wherein the step of forming the liquid repellent pattern is a step of forming the liquid repellent pattern using a material containing fluorine.
The step of forming the liquid repellent pattern is a step of forming the liquid repellent pattern by steam treatment using one or more selected from the group consisting of CF 4 , NF 3 , and a mixture of CF 4 and methanol. The manufacturing method of the organic thin-film solar cell module of Claim 8.
An organic thin-film solar cell module that can be manufactured by the manufacturing method according to claim 1.
The step of forming a liquid repellent pattern is a step of forming a liquid repellent pattern using a coupling agent containing one kind of metal selected from the group consisting of silicon, aluminum, and titanium. Manufacturing method of organic thin film solar cell module.
The method for producing an organic thin film solar cell module according to claim 4, wherein the step of forming the liquid repellent pattern is a step of forming the liquid repellent pattern using a material containing a thiol compound.
The method for producing an organic thin film solar cell module according to claim 4, wherein the step of forming the liquid repellent pattern is a step of forming the liquid repellent pattern using a material containing fluorine.
The step of forming the liquid repellent pattern is a step of forming the liquid repellent pattern by steam treatment using one or more selected from the group consisting of CF 4 , NF 3 , and a mixture of CF 4 and methanol. The manufacturing method of the organic thin-film solar cell module of Claim 13.
An organic thin-film solar cell module that can be manufactured by the manufacturing method according to claim 4.