WO2011026294A1

WO2011026294A1 - Substrate case microscope carrier

Info

Publication number: WO2011026294A1
Application number: PCT/CN2009/076026
Authority: WO
Inventors: 杨明生; 刘惠森; 范继良; 郭业祥; 王曼媛; 王勇
Original assignee: 东莞宏威数码机械有限公司
Priority date: 2009-09-03
Filing date: 2009-12-25
Publication date: 2011-03-10
Also published as: CN101673699A; CN101673699B

Abstract

A substrate case microscope carrier (100,100a) includes: a detection unit (100b), the detection unit (100b) including a photoelectric sensor (41), a sensor support (34), a sensor reflector plate (35), a sensor baffle plate (33), a suspension pin (32) and a control device; the sensor support (34) mounted on the second shoe plate (1a), the sensor reflector plate (35) mounted on the second shoe plate (1a), the photoelectric sensor (41) located lower of the sensor reflector plate (35) and electric connected with the control device, the second shoe plate (1a) having tank (39), the sensor baffle plate (33) having the first flexing part (33a) and the second flexing part (33b), which is extending in the reverse direction, the sensor baffle plate (33) tilt penetrating tank (39), the flexing point (33c) of the first flexing part (33a) carried on the suspension pin (32), the suspension pin (32) connected on the second shoe plate (1a), the first flexing part (33a) tilted upper and projected the upper end of the tank (39), the second flexing part (33b) tilted lower and projected the lower end (39), which is adjoining the photoelectric sensor (41) and forming light channel with the sensor reflector plate (35), the substrate case microscope carrier (100,100a) can prevent the substrate falling from the substrate case (5) in effect and increase the transfer efficiency and transfer quality of the substrate greatly.

Description

Substrate box

Technical field

The present invention relates to a stage for carrying and positioning, and more particularly to a substrate cassette stage for carrying and positioning a substrate cassette for loading a substrate. Background technique

As the flat panel display technology continues to mature, the size of the flat panel display becomes larger and larger, and the effect of the flat panel display tends to catch up with the cathode ray tube display. Technological reforms will drive market activity, and more and more consumers in the market have chosen flat-panel TVs with lower energy consumption and smaller footprints. Consumer demand has further promoted production, so manufacturers that produce flat panel displays are continually increasing production efficiency to meet market needs.

Generally, a display panel used on a flat display device such as a PDP (Plasma Display Panel), a TFT-LCD (Thin Film Transistor Liquid Crystal Display), or an OLED (Organic Light Emitting Display), which is a substrate made of glass or quartz. .

In the manufacturing process, the glass substrate needs to go through a lot of process steps, and the corresponding glass substrate needs to be stored and transported. Further, the substrate needs a kind of the substrate cassette to complete storage and transportation, and also needs a kind of A stage that supports, secures, and moves the substrate cassette.

The prior art for carrying and positioning the substrate cassette stage is mainly completed by two steps of positioning and carrying. First, the substrate cassette is placed on the stage, and then the positioning device is used to withstand The substrate cassette forces the substrate cassette to contact with a corresponding positioning block to complete carrying and positioning of the substrate cassette on the stage. It is also known to use a complicated detecting mechanism to judge the position of the substrate cassette, such as a 3D measuring machine.

At present, most manufacturers of flat panel displays use the arm of the robot to load and unload the substrate. In the process, the substrate cassette is inaccurately positioned, and the unstable support will cause the robot to accurately determine the position of the substrate. , further causing the robot to perform an error, the substrate loading and loading problems. An unstable table also tends to cause the substrate to fall off the substrate.

Since the support and positioning of the substrate cassette are accurate and reliable, it will directly affect whether the substrate will fall from the substrate box, and also affect the transmission efficiency and quality of the substrate and the substrate cassette. Therefore, there is an urgent need for a substrate cassette stage for carrying and positioning a substrate cassette with a simple structure and stable operation, so that the substrate can be effectively prevented from falling from the substrate cassette, and the substrate transmission can be greatly improved. Efficiency and quality. Summary of the invention

It is an object of the present invention to provide a substrate cassette stage for carrying and positioning a substrate cassette which is simple in structure and stable in operation, and the substrate cassette stage can effectively prevent the substrate from falling from the substrate cassette, and Can greatly improve the efficiency and quality of substrate transmission.

In order to achieve the above object, the technical solution of the present invention is: providing a substrate cassette stage, wherein the substrate cassette stage is adapted to carry and position a substrate cassette, and the substrate cassette stage includes a fixing base. The fixing base is configured to support a substrate box, the fixing base comprises a bottom plate, a first side plate, a second side plate, a first supporting plate and a second supporting plate, wherein the bottom plate is horizontally placed, the first side a lower end surface of the plate and the second side plate are respectively connected to the bottom plate, and the first side plate and the second side plate are parallel to each other, and a lower surface of the first support plate and the first side The upper end surface of the second support plate is connected to the upper end surface of the second side plate. The first support plate and the second support plate are in the same plane and are respectively parallel to the bottom plate. The detection unit further includes a photoelectric sensor, a sensor holder, a sensor reflector, a sensor shutter, a suspension shaft and a control device, and the sensor bracket is mounted on a lower surface of the second support plate. The sensor reflector is mounted on the second support plate, and the photoelectric sensor is disposed directly under the sensor reflector and electrically connected to the control device, and the second support plate is provided with a through slot. The sensor baffle has a first bent portion and a second bent portion extending in opposite directions, and the sensor baffle extends obliquely through the through groove, and the bent portion of the first bent portion is mounted on the suspension On the shaft, the suspension shaft is connected to the second support plate, the first bending portion protrudes obliquely upwardly to the upper end of the through groove, and the second bending portion protrudes obliquely downward to the through groove The lower end is adjacent to the optical path formed by the photosensor and the sensor reflector.

Preferably, a sinking groove is formed on an upper surface of the second supporting plate along a center of the through groove, and the suspension shaft is connected to the sinking groove. Specifically, the method further includes two fixing blocks, the fixing block has a groove, the fixing block is symmetrically installed in the sinking groove, and two ends of the suspension shaft are correspondingly fixed to the groove of the fixing block. Inside. The sinking groove is provided for better mounting of the fixing block, and the fixing block is symmetrical Installed in the sinking groove, and the fixing block has a groove, and two ends of the suspension shaft are correspondingly fixed in the groove of the fixing block, and can be freely rotated in the groove angle.

Preferably, the substrate cassette stage further includes a lifting device, the lifting device includes a vertical lifting mechanism, a base, an oil-free bushing and a guiding rod, and the first supporting plate and the second supporting plate respectively Opening a through hole, the oil-free bushing is installed in the through hole, the guide rod slidingly passes through the oil-free bushing and fixedly connected with the base, the vertical lifting mechanism and the base The connection is fixedly connected and electrically connected to the control device, and an output shaft of the vertical lifting mechanism is fixedly connected to the fixing base. By providing the vertical lifting mechanism and the guide bar, the lifting movement of the substrate cassette stage of the present invention in the vertical direction is limited to the vertical direction, and no horizontal swing occurs, and The oil-free bushing has the characteristics of being non-deformable, capable of maintaining flexibility for a long time and resisting repeated friction, and also has the characteristics of self-lubricating and having the advantage of reducing energy consumption, thereby saving energy and absorbing Noisy, avoid as much noise as possible to the work environment.

Preferably, the substrate cassette stage further holds a spring, one end of the spring is in contact with the second bent portion of the sensor baffle, and the other end of the spring is in contact with the second side plate. When the spring is disposed such that the first support plate and the second support plate do not carry the substrate case, the first bent portion of the sensor baffle can be protruded obliquely upward to the through groove The upper end of the second bend is capable of an optical path.

Preferably, the sensor baffle has a zigzag shape, and the sensor baffle includes an upper plate, a middle plate and a lower plate, and an upper end of the middle plate is connected with the upper plate to form a first bent portion, wherein the middle plate A lower end of the plate is coupled to the lower plate to form a second bent portion. The sensor baffle is designed in a zigzag shape, and has a simple structure. When the first support plate and the second support plate do not carry the substrate cassette, the light path formed by the second bent plate is easily made; When the first support plate and the second support plate carry the substrate box, the optical path formed by the photoelectric sensor and the sensor reflective plate is occupied.

Preferably, the weight of the lower plate is greater than the weight of the upper plate. The purpose of the arrangement is to ensure that the first bent portion of the sensor baffle can protrude obliquely upward to the upper end of the through groove, The light path formed by the sensor reflector.

Preferably, the substrate cassette stage further includes a positioning block, the positioning block has a first positioning block and a second positioning block perpendicular to each other, and the positioning block is horizontally mounted on the first supporting plate and the first A rectangular cavity is formed on the upper surface of the two support plates. The rectangular cavity is used for positioning the substrate cassette. Specifically, the positioning block further has an arc-shaped retaining groove, and the retaining groove is located at the junction of the first positioning block and the second positioning block. The positioning groove is configured to protect the corners of the substrate box from being bumped. Specifically, the inner side surface of the first positioning block has a first positioning surface and a first retaining surface, and the first positioning surface The first retaining surface is located at the first positioning surface, the first retaining surface is obtuse with the first positioning surface, and the joint is rounded, and the second positioning is perpendicular to the bottom plate. The inner side surface of the block has a second positioning surface and a second retaining surface, the second positioning surface is perpendicular to the bottom plate, the second retaining surface is located on the second positioning surface, and the second yielding position The face is obtusely angled with the second positioning surface and the joint is rounded. The setting of the retaining surface ensures that the substrate cassette does not collide with the positioning block during the loading and positioning of the mounting seat, thereby causing damage to the substrate box, speeding up operation efficiency and improving safety. Sex.

Compared with the prior art, the substrate cassette of the present invention comprises a detecting unit, wherein the detecting unit comprises a photoelectric sensor, a sensor bracket, a sensor reflector, a sensor shutter, a suspension shaft and a control device, and the sensor bracket is installed in the The sensor reflector is mounted on the second support plate, and the photoelectric sensor is disposed directly under the sensor reflector and electrically connected to the control device. The second support plate is provided with a through slot, the sensor baffle has a first bent portion and a second bent portion extending in opposite directions, and the sensor baffle extends obliquely through the through slot, the first bend a bending portion of the portion is mounted on the suspension shaft, the suspension shaft is coupled to the second support plate, and the first bending portion protrudes obliquely upward to an upper end of the through groove, the second bending The folded portion protrudes obliquely downward from the lower end of the through groove and adjacent to the optical path formed by the photosensor and the sensor reflective plate. When the substrate cassette is placed in a rectangular cavity formed by the fixing block mounted on the fixing base for carrying and positioning, the substrate box presses down the first bending portion of the sensor baffle. The sensor baffle rotates counterclockwise about the suspension axis by a certain angle, and the through slot limits the sensor baffle so that it can only rotate around the suspension axis without being disengaged from the suspension axis. The second bent portion of the sensor baffle blocks the photoelectric sensor emitted from the lower surface of the second support plate The light, therefore, the light emitted by the photosensor cannot be incident on the sensor reflector, and the control device determines that the mount has a carrier substrate. After the substrate cassette is unloaded from the rectangular cavity formed by the fixing block, the sensor baffle rotates clockwise by a certain angle, and the second bent portion of the sensor sensor baffle avoids The light emitted from the photoelectric sensor disposed on the lower surface of the second support plate can be incident on the sensor reflector, and the control device determines that the substrate is not carried on the fixed seat.

The invention will be more apparent from the following description, taken in conjunction with the accompanying drawings. DRAWINGS

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing the structure of a substrate cassette stage of the present invention.

Fig. 2 is a structural schematic view showing the lifting and lowering device of the substrate cassette of the present invention.

Fig. 3 is a structural schematic view showing another angle of the lifting and lowering device of the substrate cassette of the present invention.

Figure 4 is an exploded perspective view of the detecting unit of the substrate cassette stage of the present invention.

Figure 5 is a schematic view showing the structure of a positioning block of the substrate cassette stage of the present invention.

Figure 6 is a schematic illustration of one embodiment of a sensor baffle of a substrate cassette stage of the present invention.

Figure 7 is a schematic illustration of another embodiment of a sensor baffle of a substrate cassette stage of the present invention.

Figure 8 is a schematic illustration of yet another embodiment of a sensor baffle of a substrate cassette stage of the present invention.

Fig. 9 is a schematic view showing the principle of the optical path formed by the photoelectric sensor and the sensor reflecting plate when the substrate cassette stage of the present invention does not carry the substrate cassette.

Fig. 10 is a schematic view showing the principle of the optical path formed by the photosensor and the sensor reflector when the substrate cassette of the present invention is carrying the substrate cassette which has not been completely inserted.

Figure 11 is a schematic view showing the principle of the light path formed by the photosensor and the reflector of the substrate when the substrate cassette of the present invention carries the completely inserted substrate. detailed description

Embodiments of the present invention will now be described with reference to the drawings, in which like reference numerals represent like elements. As described above, as shown in FIG. 1 and FIG. 2, the substrate cassette stage 100 provided by the present invention is used for the substrate. The cassette 5 is carried and positioned, and the substrate cassette 100 includes a fixing base 100a for supporting the substrate 5. The fixing base 100a includes a bottom plate 13 and a first side plate 12. a second side plate 12a, a first support plate 1 and a second support plate 1a, the bottom plate 13 is horizontally placed, and the lower end faces of the first side plate 12 and the second side plate 12a are respectively The bottom plate 13 is connected, and the first side plate 12 and the second side plate 12 a are parallel to each other, and the lower surface of the first support plate 1 is connected to the upper end surface of the first side plate 12, The lower surface of the second support plate 1 a is connected to the upper end surface of the second side plate 12 a , and the first support plate 1 and the second support plate 1 a are located in the same plane and respectively respectively with the bottom plate 13 Parallel, wherein, as shown in FIG. 3, FIG. 4 and FIG. 9, a detecting unit 100b is further included. The detecting unit 100b includes a photosensor 41, a sensor bracket 34, a sensor reflector 35, a sensor shutter 33, and a suspension shaft 32. And a control device (not shown), the sensor bracket 34 is mounted on a lower surface of the second support plate 12a, The sensor reflector 35 is mounted on the second support plate la. The photosensor 41 is disposed directly under the sensor reflector 35 and electrically connected to the control device. The second support panel 12a is opened. There is a through groove 39, the sensor baffle 33 has a first bent portion 33a and a second bent portion 33b extending in opposite directions, and the sensor baffle 33 obliquely penetrates the through groove 39, the first bend A bent portion 33c of the folded portion 33a is mounted on the suspension shaft 32, and the suspension shaft 32 is coupled to the second support plate 1a, and the first bent portion 33a protrudes obliquely upward from the through groove 39. At the upper end, the second bent portion 33b protrudes obliquely downward from the lower end of the through groove 39 and adjacent to the optical path formed by the photosensor 41 and the sensor reflection plate 35. Specifically, a sinking groove 38 is defined in the upper surface of the second supporting plate 1a along the center of the through groove 39, and the suspension shaft 32 is connected to the sinking groove 38. Specifically, the fixing block 31 has a recess 31a, and the fixing block 31 is symmetrically mounted in the sinking slot 38, and the two ends of the suspension shaft 32 are correspondingly fixed to the The inside of the recess 31a of the fixing block 31 is described. The sinking groove 38 is provided for better mounting of the fixing block 32. The fixing block 31 is symmetrically mounted in the sinking groove 38, and the fixing block 31 has a groove 31a, and the suspension shaft 32 The two ends are correspondingly fixed in the recess 31a of the fixing block 31, and can be freely rotated by an angle in the recess 31.

Preferably, as shown in FIG. 1 and FIG. 2, a lifting device (not shown) is further included. The lifting device includes a vertical lifting mechanism (not shown), a base 18, an oil-free bushing 15 and a guide rod. 16, the first support plate 1 and the second support plate 1 a are respectively provided with a through hole 20, and the oil-free bushing 15 is installed in the In the through hole 20, the guide rod 16 slidingly passes through the oil-free bushing 15 and is fixedly connected to the base 18, and the vertical lifting mechanism is fixedly connected with the base 18 and electrically connected to the control device The output shaft 17 of the vertical lifting mechanism is fixedly connected to the fixing base 100a. By providing the vertical lifting mechanism and the guide rod 16, the lifting movement of the substrate cassette stage 100 in the vertical direction of the present invention is defined in the vertical direction without horizontal swinging, and The oil-free bushing 15 has the characteristics of being non-deformable, capable of maintaining flexibility for a long period of time and resisting repeated friction, and has the characteristics of self-lubricating property and having the advantage of reducing energy consumption, thereby saving energy. It can also absorb loud noises and avoid as much noise as possible in the work environment.

Preferably, as shown in FIG. 4, a spring 36 is further engaged, one end of the spring 36 is in contact with the second bent portion 33b of the sensor shutter 33, and the other end of the spring 36 is opposite to the second side. The plate 12a is in conflict. When the spring 36 is disposed such that the first support plate 1 and the second support plate 1a do not carry the substrate 5, the first bent portion 33a of the sensor shutter 33 can be ensured. The upper end of the through groove 39 is protruded obliquely upward, and the second bent portion 33 b can protrude obliquely downward toward the lower end of the through groove 39 and adjacent to the light formed by the photosensor 41 and the sensor reflection plate 35 path.

Preferably, the sensor baffle 33 has a zigzag shape, and the sensor baffle 33 includes an upper plate, a middle plate and a lower plate, and an upper end of the middle plate is connected with the upper plate to form a first bent portion 33a. The lower end of the intermediate plate is connected to the lower plate to form a second bent portion 33b. The sensor baffle 33 is designed in a zigzag shape, and has a simple structure. When the first support plate 1 and the second support plate 1a are not carried by the substrate 5, the second bent portion is easily made. 33 b can protrude obliquely downward from the lower end of the through groove 39 and adjacent to the light path formed by the photosensor 41 and the sensor reflection plate 35; on the first support plate 1 and the second support plate 1a When the substrate 5 is carried, the second bent portion 33 b can protrude obliquely downward from the lower end of the through groove 39 and rotates counterclockwise at an angle to cover the photosensor 41 and the sensor reflector 35 formed light path.

As shown in Fig. 6, an embodiment of the sensor shutter 33 of the present invention is shown as 6. In the embodiment, the sensor baffle 33 includes an upper plate 331a, a middle plate 331b, and a lower plate 331c, and the upper plate 331a, the intermediate plate 331b, and the lower plate 331c are integrally formed. The lower plate 331c is a rectangle, and the middle plate 331b is provided with holes 3310 and 3311. Also included is a spring 36 as shown in FIG. 4, the spring 36 for controlling the rotation of the sensor-shaped baffle 33, one end of which abuts against the holes 3310 and 3311 of the intermediate plate 331b. The other end is in contact with the second side plate 12a. The substrate 5 is placed on the fixing base 100a. Specifically, the substrate 5 is placed on the upper surfaces of the first supporting plate 1 and the second supporting plate 1a, and the substrate cassette 5 is placed on the upper surface of the first supporting plate 1 and the second supporting plate 1a. In the vertical direction, the first support plate 1 and the second support plate 1a are positioned and supported, and in the horizontal direction, the positioning is performed by the four positioning blocks 4, when the base When the cassette 5 is completely placed on the holder 100a, since the substrate cassette 5 presses down the sensor shutter 33, the spring 36 is stretched to the maximum position. At the same time, the lower plate 331c of the sensor-shaped baffle 33 completely blocks the light emitted from the photosensor 41 disposed at the lower portion of the fixing base 100a. The control device over analyzes and processes the signal of the photosensor 41, thereby determining that the substrate cassette 5 has been completely placed on the stage, and the insertion detection of the substrate cassette 5 is completed. Specifically, at a moment when the substrate cassette 5 contacts the sensor shutter 33, the sensor-shaped shutter 33 performs a counterclockwise rotation motion with the vertical movement of the substrate cassette 5, and the The lower plate 331c also gradually blocks the light emitted by the photosensor 41. When the substrate cassette 5 is completely unloaded, the sensor-shaped shutter 33 will be rotated by the tension of the spring 36 about the suspension shaft 32 by a certain angle, while the lower plate 331c of the sensor shutter 33 will completely avoid The light emitted from the photosensor 41 disposed at the lower portion of the holder 100a is opened. The control device analyzes and processes the signal of the photosensor 41, thereby determining that the substrate cassette 5 has been completely unloaded from the stage, and the unloading detection of the substrate cassette 5 is completed.

As shown in Figure 7, another embodiment of the sensor baffle of the present invention is shown as 7. In the present embodiment, the sensor shutter 33 includes an upper plate 332a, a middle plate 332b, and a lower plate 332c, and the upper plate 332a, the intermediate plate 332b, and the lower plate 332c are integrally formed. The embodiment is different from the embodiment shown in FIG. 6 in that the lower plate 332c is a wedge shape instead of a rectangle; the sensor baffle 33 has no opening, and no spring 36 is provided, but the same is realized. The rotation of the Z-shaped baffle 33. When the substrate cassette 5 is placed in the fixing base 100a, the sensor shutter 33 is rotated counterclockwise by the pressure of the substrate cassette 5 to block the light emitted by the photoelectric sensor 41, and there is no process in the process. The pulling force of the spring 36; when the substrate cassette 5 is unloaded, the sensor shutter 33 is automatically rotated about the suspension shaft 32 by a certain gravity by the large gravity of the lower plate 332c. The working principle of the remaining part is the same as that of the embodiment shown in FIG. 6, and details are not described herein again.

As shown in Figure 8, another embodiment of the sensor baffle of the present invention is shown as 8. In this embodiment, the sensor baffle 33 includes an upper plate 333a, a middle plate 333b, and a lower plate 333c, the upper plate 333a, the middle plate 333b and the lower plate 333C are integrally formed. In this embodiment, the weight 334 is added. The weight 334 may be one or more, and most preferably one to two. The weight 334 is connected to the lower plate 333c by welding or screws. When the substrate cassette 5 is placed in the fixing base 100a, the sensor shutter 33 is rotated counterclockwise by the pressure of the substrate cassette 5 to block the light emitted by the sensor; when the substrate cassette 5 is When unloading, the sensor baffle 33 is automatically rotated about the axis 32 by a certain angle by the greater gravity of the lower plate 333c and the weight 334. The working principle of the remaining part is the same as that of the embodiment shown in FIG. 6, and details are not described herein again.

As shown in Fig. 9, a schematic structural view of the optical path formed by the photosensor 41 and the sensor reflector 35 when the substrate cassette 100a of the present invention does not carry the substrate 5 is shown. In this embodiment, the substrate 5 is not placed on the upper surfaces of the first support plate 1 and the second support plate 1a, and the light 40 on the edge of the photosensor 41 is just opposite to the sensor block. The lower plate 33b of the plate 33 is tangentially and can be emitted to the sensor transmitting plate 35, so that all the light emitted from the photoelectric sensor 41 can be incident on the sensor transmitting plate 35, and the control device passes the analysis processing. The signal intensity of the photosensor 41 is weak and stable, and it is determined that the substrate 5 is not placed in the holder 100a.

As shown in FIG. 10, a schematic structural diagram of the optical path formed by the photosensor 41 and the sensor reflector 35 when the substrate cassette 100a of the present invention is carrying the substrate cassette 5 that has not been completely inserted is shown. . In this embodiment, the substrate cassette 5 is being placed on the upper surfaces of the first support plate 1 and the second support plate 1a, and the lower plate 33b of the sensor shutter 33 is rotated counterclockwise to block Part of the light 40 emitted from the photosensor 41, and the remaining portion of the light 40 is still able to be emitted to the sensor emitting plate 35, tangentially just being able to be emitted to the sensor emitting plate 35, the control device passing The signal intensity of the analysis processing photosensor 41 is relatively weak, and is in a state of being weakened, and it is further determined that the substrate cassette 5 is placed on the fixing base 100a.

As shown in Fig. 11, a schematic structural view of the optical path formed by the photosensor 41 and the sensor reflector 35 when the substrate cassette stage 100a of the present invention carries the completely inserted substrate cassette 5 is shown. In the present embodiment, the substrate cassette 5 has been completely inserted into the emitted light 40 of the first support plate 1 and the second support plate 1a, and the control device detects the signal intensity of the photosensor 41 by zero. , into It is determined that the substrate cassette 5 has been placed on the holder 100a.

Preferably, as shown in FIG. 5, the positioning block 4 further includes a first positioning block 423 and a second positioning block 443 which are perpendicular to each other, and the positioning block 4 is horizontally mounted on the first A rectangular cavity is formed on the upper surface of the support plate 1 and the second support plate _1a . The rectangular cavity is used for positioning the substrate cassette 5 . Specifically, the positioning block 4 further defines an arc-shaped retaining groove 430 , and the retaining groove 430 is located at the first positioning block 423 and the second Positioning block 443 is connected. The positioning groove 430 is provided to protect the corners of the substrate cassette 5 from being bumped. Specifically, the inner side surface of the first positioning block 423 has a first positioning surface 422 and a first letting surface 421. The first positioning surface 421 is perpendicular to the bottom plate 13 , the first retaining surface 421 is located on the first positioning surface 422 , and the first retaining surface 421 and the first positioning surface 422 are obtuse and The connecting portion 421 a is rounded, the inner side surface of the second positioning block 443 has a second positioning surface 442 and a second retaining surface 441 , and the second positioning surface 442 is perpendicular to the bottom plate 13 , the second The retaining surface 441 is located on the second positioning surface 442, the second retaining surface 441 and the second positioning surface 442 are obtuse and the joint 441 a is rounded. Setting the first letting surface 421 a and the second letting surface 441 a on the first positioning block 423 and the second positioning block 443 ensure that the substrate cassette 5 is placed in the fixing base 100 During the carrying and positioning process, the positioning block 4 is not collided, causing damage to the substrate cassette 5, which speeds up the operation and improves the safety.

Compared with the prior art, the substrate cassette stage 100 of the present invention includes a detecting unit 100b, and the detecting unit 100b includes a photo sensor 41, a sensor holder 34, a sensor reflecting plate 35, a sensor shutter 33, and a suspension shaft 32. And the control device, the sensor holder 34 is mounted on the lower surface of the second support plate 12a, the sensor reflection plate 35 is mounted on the second support plate 1a, and the photoelectric sensor 41 is disposed at the Directly below the sensor reflector 35 and electrically connected to the control device, the second support plate 12a is provided with a through slot 39, and the sensor shutter 33 has a first bent portion 33a extending in the opposite direction. And the second bent portion 33 b , the sensor baffle 33 is obliquely penetrated through the through groove 39 , and the bent portion 33 c of the first bent portion 33 a is mounted on the suspension shaft 32 , the suspension shaft 32 is connected to the second support plate 1a, the first bent portion 33a protrudes obliquely upward from the upper end of the through groove 39, and the second bent portion 33b protrudes obliquely downward to the through groove 39 a lower end and adjacent to the formation of the photosensor 41 and the sensor reflector 35 Light path. When the substrate cassette 5 is placed in a rectangular cavity formed by the fixing block 4 mounted on the fixing base 13 for carrying and positioning, the substrate cassette 5 is pressed downward. The first bending portion 33 a of the sensor baffle 33 rotates the sensor baffle 33 a counterclockwise about the suspension shaft 32 by a certain angle, and the through groove 39 faces the sensor baffle 33 Limiting so that it can only rotate around the suspension shaft 32 without being disengaged from the suspension shaft 32, and the second bending portion 33b of the sensor shutter 33 blocks from being disposed on the second support The light emitted from the photosensor 41 on the lower surface of the panel la, so that the light emitted from the photosensor 41 cannot be incident on the sensor reflector 35, and the control device determines that the mount 100a has a carrier. Cassette 5. After the substrate cassette 5 is unloaded from the rectangular cavity formed by the fixing block 4, the sensor shutter 33 is rotated clockwise by a certain angle, and the second bent portion 33b of the sensor sensor shutter 33 And illuminating the light emitted from the photosensor 41 disposed on the lower surface of the second support plate 1 a, the light can be incident on the sensor reflector 35, and the control device determines the mount 100a. The substrate cassette 5 is not carried on.

The invention has been described above in connection with the preferred embodiments, but the invention is not limited to the embodiments disclosed above, but should be construed to cover various modifications and equivalent combinations in accordance with the nature of the invention.

Claims

A substrate cassette carrier adapted to carry and position a substrate cassette, the substrate cassette stage comprising a fixing base, the fixing base is for supporting a substrate box, and the fixing base comprises a bottom plate, The first side plate, the second side plate, the first support plate and the second support plate are horizontally placed, and the lower end faces of the first side plate and the second side plate are respectively connected to the bottom plate. And the first side panel and the second side panel are parallel to each other, the lower surface of the first support panel is connected to the upper end surface of the first side panel, and the lower surface of the second support panel is The upper end surface of the second side plate is connected to the second side plate. The first support plate and the second support plate are in the same plane and are respectively parallel to the bottom plate. The method further includes: a detecting unit, wherein the detecting unit comprises a photoelectric sensor a sensor holder, a sensor reflector, a sensor shutter, a suspension shaft and a control device, the sensor bracket is mounted on a lower surface of the second support plate, and the sensor reflector is mounted on the second support plate Upper, The photoelectric sensor is disposed directly under the sensor reflector and electrically connected to the control device, the second support plate is provided with a through slot, and the sensor shutter has a first bent portion extending in an opposite direction and a second bent portion, the sensor baffle extends obliquely through the through groove, the bent portion of the first bent portion is mounted on the suspension shaft, and the suspension shaft is coupled to the second support plate The first bent portion protrudes obliquely upward from an upper end of the through groove, and the second plate forms an optical path.

2. The substrate cassette stage according to claim 1, wherein: a sinking groove is formed on an upper surface of the second supporting plate along a center of the through groove, and the suspension shaft is connected to the sink Inside the slot.

The substrate cassette stage according to claim 2, further comprising: two fixing blocks, wherein the fixing block has a groove, and the fixing block is symmetrically mounted in the sinking groove, The two ends of the suspension shaft are correspondingly fixed in the grooves of the fixing block.

4. The substrate cassette stage of claim 1 further comprising: a lifting device, said The lifting device includes a vertical lifting mechanism, a base, an oil-free bushing and a guiding rod, and the first supporting plate and the second supporting plate are respectively provided with through holes, and the oil-free bushing is installed in the through hole The guide rod slidingly passes through the oil-free bushing and is fixedly connected to the base, the vertical lifting mechanism is fixedly connected to the base and electrically connected to the control device, and the output of the vertical lifting mechanism The shaft is fixedly coupled to the mount.

5. The substrate cassette stage according to claim 1, wherein: a spring is further received, one end of the spring is in contact with the second bent portion of the sensor shutter, and the other end of the spring is The second side panel is in conflict.

The substrate cassette stage according to claim 1, wherein: the sensor baffle has a zigzag shape, and the sensor baffle comprises an upper plate, a middle plate and a lower plate, and the upper end of the middle plate is The upper plate is connected to form a first bent portion, and the lower end of the middle plate is connected with the lower plate to form a second bent portion.

7. The substrate cassette stage of claim 6, wherein: the weight of the lower plate is greater than the weight of the upper plate.

8. The substrate cassette stage according to claim 1, further comprising: a positioning block, the positioning block having a first positioning block and a second positioning block perpendicular to each other, the positioning block being horizontally mounted on A rectangular cavity is formed on the upper surface of the first support plate and the second support plate.

The substrate cassette stage according to claim 8, wherein: the positioning block further defines an arc-shaped retaining groove, wherein the retaining groove is located in the first positioning block and the second positioning Block connection.

The substrate cassette stage according to claim 9, wherein: the inner side surface of the first positioning block has a first positioning surface and a first retaining surface, and the first positioning surface and the bottom plate Vertically, the first retaining surface is located on the first positioning surface, the first retaining surface is obtuse with the first positioning surface, and the joint is rounded, and the inner side of the second positioning block Having a second positioning surface and a second yielding surface, The second positioning surface is perpendicular to the bottom plate, the second retaining surface is located on the second positioning surface, the second retaining surface and the second positioning surface are obtuse and the joint is rounded.