WO2011025273A3 - 카메라 교번 장치를 구비한 태양 전지의 듀얼 라인 생산 장치 및 그 생산 방법 - Google Patents

카메라 교번 장치를 구비한 태양 전지의 듀얼 라인 생산 장치 및 그 생산 방법 Download PDF

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Publication number
WO2011025273A3
WO2011025273A3 PCT/KR2010/005718 KR2010005718W WO2011025273A3 WO 2011025273 A3 WO2011025273 A3 WO 2011025273A3 KR 2010005718 W KR2010005718 W KR 2010005718W WO 2011025273 A3 WO2011025273 A3 WO 2011025273A3
Authority
WO
WIPO (PCT)
Prior art keywords
solar cells
producing solar
camera
production method
dual line
Prior art date
Application number
PCT/KR2010/005718
Other languages
English (en)
French (fr)
Other versions
WO2011025273A2 (ko
Inventor
최용정
방신웅
유춘우
양정순
이경주
신성영
Original Assignee
주식회사 제우스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020090078921A external-priority patent/KR101140317B1/ko
Priority claimed from KR1020090080666A external-priority patent/KR101110713B1/ko
Application filed by 주식회사 제우스 filed Critical 주식회사 제우스
Publication of WO2011025273A2 publication Critical patent/WO2011025273A2/ko
Publication of WO2011025273A3 publication Critical patent/WO2011025273A3/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Abstract

본 발명은 태양전지를 생산하는 장치 및 방법에 관련된 것으로서, 특히 웨이퍼를 가공하는 가공 유닛을 2개로 배치하되 검사 유닛은1개만을 배치하여 생산성을 향상시키면서도 추가적인 검사 유닛은 필요로 하지 않아 설비 비용을 절감할 수 있고 결국 태양 전지의 제조 원가를 절감할 수 있는 태양 전지의 듀얼 라인 생산 장치와 생산 방법에 관한 것이다.
PCT/KR2010/005718 2009-08-25 2010-08-25 카메라 교번 장치를 구비한 태양 전지의 듀얼 라인 생산 장치 및 그 생산 방법 WO2011025273A2 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020090078921A KR101140317B1 (ko) 2009-08-25 2009-08-25 카메라 교번 장치 및 이를 이용한 듀얼 라인 생산 장치와 생산 방법
KR10-2009-0078921 2009-08-25
KR1020090080666A KR101110713B1 (ko) 2009-08-28 2009-08-28 태양 전지의 듀얼 라인 생산 장치와 생산 방법
KR10-2009-0080666 2009-08-28

Publications (2)

Publication Number Publication Date
WO2011025273A2 WO2011025273A2 (ko) 2011-03-03
WO2011025273A3 true WO2011025273A3 (ko) 2011-07-07

Family

ID=43628607

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/005718 WO2011025273A2 (ko) 2009-08-25 2010-08-25 카메라 교번 장치를 구비한 태양 전지의 듀얼 라인 생산 장치 및 그 생산 방법

Country Status (1)

Country Link
WO (1) WO2011025273A2 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104980106B (zh) * 2015-06-19 2017-12-05 李毅 一种检测弱光型太阳能电池的测试设备
CN105428464B (zh) * 2015-12-31 2017-03-29 苏州博阳能源设备有限公司 太阳能电池汇流条折弯装置
CN108010984A (zh) * 2016-10-28 2018-05-08 应用材料意大利有限公司 用于处理太阳能电池的设备、用于制造太阳能电池的系统和用于测试太阳能电池的方法
EP3316318A1 (en) * 2016-10-28 2018-05-02 Applied Materials Italia S.R.L. Apparatus for processing of solar cells, system for the manufacture of solar cells, and method for testing solar cells
WO2019205351A1 (zh) * 2018-04-24 2019-10-31 君泰创新（北京）科技有限公司 双面镀膜设备及其载板处理单元
CN109360868B (zh) * 2018-11-15 2020-01-14 浙江艾能聚光伏科技股份有限公司 一种太阳能电池片的加工生产线
WO2020117158A2 (en) * 2018-12-07 2020-06-11 Kale Oto Radyatör Sanayi̇ Ve Ti̇caret Anoni̇m Şi̇rketi̇ Dual radiator interlocking machine

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980022944A (ko) * 1996-09-24 1998-07-06 김광호 전자 부품 실장장치
JPH11502348A (ja) * 1995-04-10 1999-02-23 ユナイテッド パーセル サービス オブ アメリカ，インコーポレイテッド 基準マークの位置および方向の検出方法
JP2005024074A (ja) * 2003-07-02 2005-01-27 Canon Inc ２軸回転台装置および被駆動体回転制御システム
JP2007011145A (ja) * 2005-07-01 2007-01-18 Fujifilm Holdings Corp ステレオ撮影用カメラ保持装置
JP2008076639A (ja) * 2006-09-20 2008-04-03 Canon Inc 雲台機能付きクレードル

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11502348A (ja) * 1995-04-10 1999-02-23 ユナイテッド パーセル サービス オブ アメリカ，インコーポレイテッド 基準マークの位置および方向の検出方法
KR19980022944A (ko) * 1996-09-24 1998-07-06 김광호 전자 부품 실장장치
JP2005024074A (ja) * 2003-07-02 2005-01-27 Canon Inc ２軸回転台装置および被駆動体回転制御システム
JP2007011145A (ja) * 2005-07-01 2007-01-18 Fujifilm Holdings Corp ステレオ撮影用カメラ保持装置
JP2008076639A (ja) * 2006-09-20 2008-04-03 Canon Inc 雲台機能付きクレードル

Also Published As

Publication number Publication date
WO2011025273A2 (ko) 2011-03-03

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