WO2011016496A1 - Recycling management method for metal parts integrated together with sealing material, and recycling management system - Google Patents

Recycling management method for metal parts integrated together with sealing material, and recycling management system Download PDF

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Publication number
WO2011016496A1
WO2011016496A1 PCT/JP2010/063212 JP2010063212W WO2011016496A1 WO 2011016496 A1 WO2011016496 A1 WO 2011016496A1 JP 2010063212 W JP2010063212 W JP 2010063212W WO 2011016496 A1 WO2011016496 A1 WO 2011016496A1
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Prior art keywords
seal
seal material
recycling
integrated
bonded
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PCT/JP2010/063212
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French (fr)
Japanese (ja)
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剛 野口
壮司 土屋
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ダイキン工業株式会社
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Priority to JP2011525919A priority Critical patent/JPWO2011016496A1/en
Publication of WO2011016496A1 publication Critical patent/WO2011016496A1/en

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Systems or methods specially adapted for specific business sectors, e.g. utilities or tourism
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling

Definitions

  • the present invention relates to a recycling management method and a recycling management system for metal parts integrated with a sealing material.
  • Patent Document 1 Japanese Patent Publication No. 2001-509647
  • the vacuum chamber has an inlet / outlet for taking in / out the wafer, and a metal member with an integrated sealing material for opening / closing the inlet / outlet is attached to the inlet / outlet.
  • a seal material integrated metal part a part (metal member) made of metal such as aluminum and a rubber seal material are integrated.
  • Sealing material integrated metal parts are regularly replaced in consideration of damage to the sealing material, but since the metal member and sealing material are integrated, they are not reused and discarded. Yes.
  • An object of the present invention is to provide a recycling management method or a recycling management system for a seal material-integrated metal part.
  • a recycling management method is a method for managing recycling of a seal material-integrated metal part, and includes a first step and a second step.
  • the seal material-integrated metal part is used as a bonded seal that opens and closes the entrance and exit of the vacuum chamber.
  • the seal material integrated metal part includes a seal material and a metal member. The metal member and the sealing material are bonded and integrated.
  • the first step the solid identification of the seal material-integrated metal part is made possible.
  • the used seal material is peeled off from the collected metal member of the seal material-integrated metal part and a new seal material is bonded to make a recycled seal material-integrated metal part.
  • the solid identification of the seal material-integrated metal part becomes possible. Further, the used sealing material is peeled off from the metal member, and a new sealing material is bonded. Thereby, since individual identification is possible, individual management, such as a recycling history, is attained.
  • the recycling management method according to the second invention is the recycling management method according to the first invention, further comprising a third step.
  • the recycling history of the seal material-integrated metal part capable of solid identification is stored.
  • the recycling history of the seal material-integrated metal part capable of identifying the solid is stored. Thereby, a sealing material integrated metal part can be recycled appropriately.
  • a recycling management method is the recycling management method according to the first or second aspect of the invention, wherein the first step includes an identifiable part forming step.
  • the identification part forming step an identifiable part that enables solid identification is formed on the metal member.
  • an identifiable portion for enabling solid identification of a seal material-integrated metal part is formed. Thereby, the identifiable site once formed can be used until the metal member is discarded.
  • a recycling management method is the recycling management method according to the third invention, and the identifiable part forming step is any one of stamping, sticking of a heat-resistant member, and embedding of a heat-resistant non-contact communication means .
  • the identifiable portion formed on the metal member is any one of stamping, sticking of a heat-resistant member, and embedding of a heat-resistant non-contact communication means.
  • the recycle management method according to the fifth invention is the recycle management method according to the third or fourth invention, wherein the identifiable part having the solid identification symbol is formed in the identifiable part forming step. Furthermore, the fourth step is provided. In the fourth step, the type of the seal material integrated metal part is stored in association with the solid identification symbol. In the recycling management method according to the present invention, an identifiable portion having a solid identification symbol is formed. In addition, the type of the seal material integrated metal part associated with the solid identification symbol is stored. Thereby, it is possible to easily identify the type of used seal material-integrated metal part.
  • a recycling management method is the recycling management method according to the fifth aspect of the present invention, wherein the type indicates a collection destination of the seal material integrated metal part and / or a user of the seal material integrated metal part.
  • the collection destination of the seal material integrated metal part and / or the user of the seal material integrated metal part is stored in association with the solid identification symbol. Thereby, the delivery destination of the recycled sealing material-integrated metal part can be easily specified.
  • a recycling management method is the recycling management method according to any of the first to sixth aspects of the invention, further comprising a fifth step.
  • the collected seal material-integrated metal part is inspected before and / or after the second step.
  • the recovered seal material-integrated metal part is inspected before and / or after the second step. Thereby, a suitable sealing material integrated metal part can be recycled.
  • the recycling management method according to the eighth invention is the recycling management method according to the seventh invention, further comprising a sixth step.
  • the inspection history is stored in association with the solid identification symbol.
  • the inspection history is a history inspected in the fifth step.
  • the inspection history of the seal material integrated metal part is stored. Thereby, a reliable seal material-integrated metal part can be recycled.
  • a recycle management system is a recycle management system for managing the recycling of a seal material-integrated metal part, comprising a first means and a second means.
  • the seal material-integrated metal part is used as a bonded seal that opens and closes the entrance and exit of the vacuum chamber.
  • the seal material integrated metal part includes a seal material and a metal member. The metal member and the sealing material are bonded and integrated.
  • the first means enables the solid identification of the seal-integrated metal part.
  • the second means peels off the used sealing material from the recovered metal member of the seal material-integrated metal part and adheres a new seal material to make a recycled seal material-integrated metal part.
  • the solid identification of the seal material-integrated metal part becomes possible. Further, the used sealing material is peeled off from the metal member, and a new sealing material is bonded. Thereby, since individual identification is possible, individual management, such as a recycling history, is attained.
  • the seal material integrated metal part can be appropriately recycled.
  • the identifiable part once formed can be used until the metal member is discarded.
  • the delivery destination of the recycled seal material-integrated metal part can be easily specified.
  • a reliable seal material-integrated metal part can be recycled.
  • the seal material-integrated metal part can be appropriately recycled.
  • a recycle management system is a management system for recycling a metal material (hereinafter referred to as a bonded seal) integrated with a seal material used in a vacuum chamber.
  • the recycling management system mainly manages bonded seals distributed among a bonded seal manufacturer 10, a vacuum chamber manufacturer (apparatus manufacturer) 20, and a user 30.
  • FIG. 2 shows a bonded seal 5 according to this embodiment.
  • the bonded seal 5 functions as, for example, a gate valve between the process chamber 6 and the transfer chamber 7 and / or a gate valve between the load lock chamber and the transfer chamber 7.
  • FIG. 3 shows a partially enlarged view of the bonded seal 5.
  • the bonded seal 5 mainly includes a metal member 51 and a seal material 52.
  • the metal member 51 is made of a material desired by the user, such as aluminum, stainless steel, titanium, or copper.
  • the metal member 51 has a groove 53 near the periphery of one surface. An adhesive is applied to the groove 53, and a rubber seal material 52 processed into an elongated shape is placed thereon.
  • the sealing material 52 is a member having corrosion resistance and plasma resistance. In general, a fluoroelastomer (fluororubber) is preferable.
  • the fluoro rubber As the fluoro rubber, a binary copolymer of vinylidene fluoride (VdF) and hexafluoropropylene (HFP), or 3 of VdF, HFP, and tetrafluoroethylene (TFE), which is widely adopted in general, is used.
  • a general-purpose fluororubber such as an original copolymer may be used.
  • a perfluoroelastomer having excellent plasma resistance may be used.
  • the metal member 51 and the sealing material 52 are bonded and integrated by applying pressure and heat by press molding.
  • the bonded seal 5 manufactured by the bonded seal manufacturer 10 is delivered to the vacuum chamber manufacturer (apparatus manufacturer) 20 as an initial part (arrow I-1). Thereafter, a vacuum chamber having the bonded seal 5 as a component is delivered to the user 30 by the vacuum chamber maker 20 (arrow II). Further, the bonded seal 5 used by the user 30 is collected by the bonded seal manufacturer 10 (arrow III). The bonded seal manufacturer 10 removes the collected sealing material 52 of the bonded seal 5 from the metal member 51, and then delivers it to the user 10 as a replacement part (arrow I-2). Details of the recycling management by the bonded seal manufacturer 10 will be described below.
  • Details of Recycle Management Bonded seal manufacturer 10 mainly includes a damage determination device, an identification symbol forming device, an identification symbol reader, a seal material replacement device, and a management device 40 (not shown).
  • the identification symbol forming device and the identification symbol reading device are connected to the management device 40.
  • the damage determination device determines whether or not the metal member 51 of the recovered bonded seal 5 is damaged.
  • the breakage of the metal member 51 means a state in which it is not preferable to reuse the bonded seal 5 even if the sealing material 52 is replaced.
  • the identification symbol forming apparatus is an apparatus that forms an identifiable portion on the metal member 51 of the bonded seal 5.
  • the identifiable part is a part that enables the solid identification of the bonded seal 5.
  • the identification symbol forming device imprints an identification symbol on the metal member 51.
  • the identification symbol corresponds to a unique identification number assigned to each bonded seal 5.
  • the unique identification number is determined based on information stored in the management device 40 described later.
  • the identification symbol is stamped on the metal member 51 in the form of a two-dimensional barcode.
  • the identification symbol reading device reads an identifiable portion (engraved identification symbol) formed on the metal member 51 of the bonded seal 5. Specifically, a unique identification number assigned to each bonded seal 5 is read. Thereafter, the identification symbol reading device sends information regarding the read identification symbol to the management device 40 described later.
  • the seal material replacement device mainly performs a first process of removing the seal material 52 from the metal member 51 of the bonded seal 5 and a second process of attaching a new seal material 52 to the metal member 51. Specifically, in the first treatment, the sealing material 52 is removed from the metal member 51 with a supercritical fluid. In the second process, a new sealing material is attached to the metal member 51 from which the sealing material 52 has been removed.
  • the management device 40 is connected to an external device.
  • the external device includes an identification symbol forming device and an identification symbol reader.
  • the management device 40 mainly includes a communication unit 41, a display unit 42, an input unit 43, a storage unit 44, and a control unit 45.
  • the communication unit 41 is a network interface that connects the management device 40 to external devices including an identification symbol forming device and an identification symbol reader.
  • the communication unit 41 exchanges various signals with an external device.
  • Display section The display unit 42 is mainly composed of a display.
  • the display unit 42 displays a management screen for displaying information acquired from the external device and information managed by the management device 40.
  • the input unit 43 mainly includes a touch panel and operation buttons that cover the display.
  • the storage unit 44 stores a program that can be read and executed by the control unit 45 described later.
  • the storage unit 44 mainly includes a type information storage area 44a, a reusable number storage area 44b, and an identification symbol information storage area 44c.
  • the type information storage area 44a stores information related to the type of the bonded seal 5.
  • the information related to the type of the bonded seal 5 is information indicating a recovery destination of the bonded seal 5 and / or a user of the recovered bonded seal 5. Specifically, as shown in FIG. 5, in the type information storage area 44a, the user name and the type of the bonded seal used by the user are stored in association with each other.
  • the reusable count storage area 44b stores the type of the bonded seal 5 and the recyclable count in association with each other (see FIG. 6).
  • the number of recyclable times is a value corresponding to the type of the bonded seal 5.
  • the number of recyclable times is determined in accordance with the durability period of each sealing material 52 and metal member 51. More specifically, for example, when the sealing material 52 of the bonded seal 5 used by the company A needs to be replaced in about 3 months, the durability of the sealing material 52 is 3 months. At this time, when the durability period of the metal member 51 of the bonded seal 5 used by the company A is 3 years, the number of times that the bonded seal 5 can be recycled is 11 times.
  • the identification symbol information storage area 44c stores a product ID, the number of times of recycling, and a collection history in association with each other (see FIG. 7).
  • the product ID is a symbol for identifying the bonded seal 5.
  • the product ID is associated with an identification symbol stamped on the metal member 51 of the bonded seal 5.
  • the collection history is stored in association with the product ID of the bonded seal 5 every time the bonded seal 5 is collected. Specifically, when the identification symbol of the bonded seal 5 is read by the identification symbol reading device, information related to the identification symbol is acquired by the identification symbol information acquisition unit 45a described later. Furthermore, the collection history of the corresponding product ID is updated based on the information regarding the identification symbol acquired by the identification symbol information acquisition unit 45a.
  • the date when the identification symbol is read by the identification symbol reader is stored in the collection history field.
  • the number of times of recycling is the total number of times that the bonded seal 5 has been recycled.
  • the number of recycles is incremented by one every time the collection history is updated.
  • the control unit 45 mainly includes a CPU, a ROM, and a RAM, and reads and executes a program stored in the storage unit 44 described above.
  • the control unit 45 mainly functions as an identification symbol information acquisition unit 45a, a type determination unit 45b, a reusable number determination unit 45c, and a reusability determination unit 45d.
  • the identification symbol information acquisition unit 45a acquires information related to the identification symbol of the bonded seal 5 from the identification symbol reader. When the identification symbol information acquisition unit 45a acquires the identification number, as described above, the identification symbol information acquisition unit 45a stores the date in the identification symbol information storage area 44c and increments the value of the number of recycles by one.
  • b) Type Determination Unit The type determination unit 45b determines the type of the bonded seal 5 corresponding to the identification number based on the identification number acquired by the identification symbol information acquisition unit 45a (see FIG. 5).
  • Reusable frequency determination unit 45c determines the recyclable frequency of the bonded seal 5 based on the type of the bonded seal 5 determined by the type determination unit 45b. Further, as described above, the reusable number determination unit 45c determines the recyclable number based on the information stored in the reusable number storage area 44b. d) Reusability determining unit The reusability determining unit 45d compares the recyclable number determined by the reusable number determining unit 45c with the information (see FIG. 6) stored in the identification symbol information storage area 44c. Then, it is determined whether or not the bonded seal 5 can be recycled.
  • step S101 the used bonded seal 5 is collected.
  • step S102 the damage determination device determines whether or not the recovered metal member 51 of the bonded seal 5 is damaged. If it is determined in step S102 that the metal member 51 of the bonded seal 5 is damaged, the process proceeds to step S109. If it is determined that there is no damage, the process proceeds to step S103. In step S103, it is determined whether or not the metal member 51 has an identifiable part. If the metal member 51 does not have an identifiable part in step S103, the process proceeds to step S104. In step S104, an identifiable part is formed on the metal member 51 by the identification symbol forming device.
  • an identification symbol for enabling the bonded seal 51 to be identified is marked on the metal member 51.
  • a new field is formed in the identification information storage area 44a.
  • information related to the bonded seal 51 in which the identifiable part is formed is stored. Thereafter, the process proceeds to step S107.
  • step S105 the identification symbol imprinted on the metal member 51 is read by the identification symbol reading device, and information regarding the identification symbol is sent to the management device 40.
  • the management device 40 when the identification symbol information acquisition unit 45a acquires information about the identification symbol, a date is input to the collection history field of the corresponding product ID in the identification symbol information storage area 44b. In addition, the recycle count field is also updated.
  • step S106 it is determined whether or not the bonded seal 51 can be recycled. Specifically, first, the type determination unit 45b determines the type of the bonded seal 5 from which the identification symbol has been read.
  • the reusable number determination unit 45c determines the reusable number of times for the bonded seal 5 based on the information stored in the reusable number storage area 44c. Thereafter, the reusability determination unit 45d determines whether or not the bonded seal 5 is reusable. If it is determined in step S106 that the bonded seal 5 can be reused, the process proceeds to step S107. For example, when the bonded seal 5 whose identification symbol is read by the identification symbol reader is the product (product ID: ABC010100) shown in FIG. 7, the type of the bonded seal is “ABC” by the type determination unit 45b. And the reusable number determination unit 45c determines that the reusable number of the type “ABC” is “11”. Further, the reusability determination unit 45d compares the number of recycles “2” stored in the identification symbol information storage area 44b with the number of reusable times “11” and determines that the reusability is possible.
  • step S107 the sealing material 52 of the bonded seal 5 is replaced.
  • the seal material 52 is removed from the metal member 51 using a fluid that can penetrate the seal material 52, and then a new seal material 52 is bonded to the metal member 51 by press molding. Then, it progresses to step S108 and is shipped to a predetermined user according to the type of the bonded seal 5.
  • step S109 the sealing material 52 is removed from the metal member 51, and then a disposal process is performed. In the disposal process, when the metal member 51 and the seal material can be reused, a process for reuse is performed.
  • the bonded seal 5 that performs recycle management functions as a vacuum chamber gate valve.
  • the bonded seal 5 includes a metal member 51 formed of aluminum or the like and a rubber seal material 52. Thereby, the state in the vacuum chamber is kept constant.
  • the seal material is likely to be twisted or damaged. Therefore, when the bonded seal is used for a certain period of time (for example, for three months), it is replaced with a new bonded seal, not limited to the presence or absence of breakage.
  • the parts for opening and closing the entrance / exit of the vacuum chamber include the sealing material and the metal member separately.
  • an O-ring as a seal material is attached to a metal member, and in the seal material integrated metal part, an elongated seal material is firmly bonded to the metal member.
  • the separate metal member with the sealing material since the sealing material can be easily removed from the metal member, it can be dealt with by replacing the used sealing material with a new sealing material when used for a certain period of time. That is, it is not necessary to discard the entire bonded seal.
  • the used bonded seal 5 was industrial waste.
  • the used bonded seal is collected, the sealing material is removed from the metal member, and a new sealing material is attached. Further, at the time of recovery, an identifiable portion that enables solid identification of the bonded seal is formed. This makes it possible to reuse the bonded seal 5 as a seal material-integrated metal part that has conventionally been an industrial waste after use for a certain period of time.
  • the material and shape of the bonded seal 5 vary depending on the shape and function of the chamber used by the user, it is expensive to manufacture the metal member 51. If it is a bonded seal as a separate metal part of the seal material, when the seal material is deteriorated, if the seal material is replaced, the metal member can be used again. It has generally been considered low cost. However, depending on the size and shape of the separate-separate-type metal part, it may be difficult to appropriately attach the seal material to the metal member. When the sealing material is not properly attached to the metal member, the state in the chamber cannot be kept constant, which is not preferable. By adopting the recycling management method and the recycling management system according to the present embodiment, the expensive metal member 51 can be reused. As a result, it is possible to use a bonded seal as a seal material integrated metal part at low cost.
  • an identifiable portion is formed on the metal member 51. Thereby, the identifiable site once formed can be used until the metal member is discarded.
  • an identification symbol is imprinted on the metal member 51 as an identifiable part. Therefore, even when the metal member 51 is repeatedly used, the identification symbol can be appropriately read.
  • the material and shape of the bonded seal 5 vary depending on the shape and function of the chamber used by the user. Therefore, it is necessary to deliver the bonded seal 5 in which the sealing material 52 has been replaced to the original user of the bonded seal 5.
  • the user of the bonded seal 5 corresponding to the type of bonded seal is stored in the management device 40. Thereby, the delivery destination of the regenerated bonded seal 5 can be appropriately determined.
  • the recovered bonded seal 5 is inspected. Thereby, a reliable bonded seal can be recycled.
  • the recognizable portion is formed on the metal member 51 when the bonded seal 5 is recycled. However, the recognizable portion may be formed on the metal member 51 when the bonded seal 5 is manufactured.
  • an identification symbol corresponding to a unique identification number is stamped on the metal member 51, but other information (for example, history) may be added in addition to the unique identification number.
  • the identification symbol was stamped on the metal member 51, you may affix not a stamp but a heat resistant member. Further, by embedding the heat resistance ratio contact communication means in the metal member 51, the solid identification of the bonded seal 5 may be made possible.
  • the number of times of reuse is compared with the number of reusable times to determine whether or not the recovered bonded seal 5 can be reused, but the date on which the bonded seal 5 was manufactured is stored. Then, by determining the use period of the bonded seal 5, it may be determined whether reuse is possible. (5) In the above embodiment, as shown in FIG.
  • the example in which the main body that performs the recycling process of the bonded seal 5 is the same as the bonded seal manufacturer, but the main body that performs the recycling process and the bonded seal manufacturer And may be another subject.
  • the bonded seal manufacturer has delivered the initial parts to the vacuum chamber manufacturer (apparatus manufacturer), but is not limited to this.
  • the distribution route of the bonded seal 5 is not limited to that shown in FIG. 1, and may be a route as shown in FIGS. 9 and 10.
  • the user-customized bonded seal is delivered from the bonded seal manufacturer to the user (arrow I-2), and the used bonded seal is collected from the user to the bonded seal manufacturer (arrow III). ) Show the route.
  • a device maker such as a vacuum chamber collects the bonded seal from the user for maintenance or the like (arrow IV), and then the bonded seal is sent to the recycling process (arrow I ⁇ ). 1) Show the route.
  • the slit valve used in the semiconductor manufacturing apparatus is exemplified as the bonded seal 5.
  • the present invention is also applied to the bonded seal used in the manufacturing apparatus for liquid crystals, LEDs, solar cells and the like.
  • a metal member used to increase the airtightness of a predetermined region such as the gate valve 15 (see FIG. 11), the L-shaped valve 16 (see FIG. 12), and the butterfly valve 17 (see FIG. 13).
  • the recycling management method and the recycling management system according to the above-described embodiment can be applied to other parts used in other products as long as the parts are obtained by bonding and integrating the sealing material.
  • the present invention is useful as a recycling management method or a recycling management system for metal parts integrated with a sealing material.

Abstract

Provided are a recycling management method for metal parts integrated together with sealing material and a recycling management system. The aforementioned recycling management method serves to manage the recycling of metal parts integrated together with sealing material and is provided with a first process and a second process. In the first process, it is made possible to perform solid body identification for metal parts integrated together with sealing material. In the second process, used sealing material is removed from recovered metal parts integrated together with sealing material, and new sealing material is bonded, thereby producing recycled metal parts integrated together with sealing material. Due to the above, it is possible to perform individual piece management based on recycling history, since solid body identification can be performed.

Description

シール材一体型金属部品のリサイクル管理方法およびリサイクル管理システムRecycling management method and recycling management system for seal-integrated metal parts
　本発明は、シール材一体型金属部品のリサイクル管理方法およびリサイクル管理システムに関する。 The present invention relates to a recycling management method and a recycling management system for metal parts integrated with a sealing material.
　従来より、例えば、特許文献１（特表２００１－５０９６４７号公報）に示すように、半導体を製造する際には、真空チャンバーが用いられている。真空チャンバーは、ウエハを出し入れするための出入口を有しており、出入口には、出入口を開閉するシール材一体型金属部品が取り付けられている。シール材一体型金属部品は、アルミ等の金属からなる部品（金属部材）と、ゴム製のシール材とが一体となっている。このようなシール材一体型金属部品を用いると、真空チャンバー内の気密性が高められる。シール材一体型金属部品は、シール材の破損を考慮して、定期的に交換されるものであるが、金属部材とシール材とが一体になっているため、再利用されず廃棄処分されている。 Conventionally, for example, as shown in Patent Document 1 (Japanese Patent Publication No. 2001-509647), a vacuum chamber has been used in manufacturing semiconductors. The vacuum chamber has an inlet / outlet for taking in / out the wafer, and a metal member with an integrated sealing material for opening / closing the inlet / outlet is attached to the inlet / outlet. In the seal material integrated metal part, a part (metal member) made of metal such as aluminum and a rubber seal material are integrated. When such a seal material integrated metal part is used, the airtightness in the vacuum chamber is improved. Sealing material integrated metal parts are regularly replaced in consideration of damage to the sealing material, but since the metal member and sealing material are integrated, they are not reused and discarded. Yes.
　ここで、近年、産業廃棄物の削減および資源の有効活用の観点からリサイクルの要請が高まっており、例えば、レンズ付きフィルムユニットや複写機等、様々な技術分野においてもリサイクルの方法が提案されている。しかし、同様のリサイクル方法をシール材一体型金属部品のリサイクルに適用した場合、製品の特性上、不具合が生じる。
　本発明の課題は、シール材一体型金属部品のリサイクル管理方法またはリサイクル管理システムを提供することにある。 In recent years, there has been an increasing demand for recycling from the viewpoint of reducing industrial waste and effective use of resources. For example, recycling methods have been proposed in various technical fields such as film units with lenses and copying machines. Yes. However, when the same recycling method is applied to the recycling of metal parts with an integrated seal material, problems occur due to the characteristics of the product.
An object of the present invention is to provide a recycling management method or a recycling management system for a seal material-integrated metal part.
　第１発明に係るリサイクル管理方法は、シール材一体型金属部品のリサイクルを管理する方法であって、第１工程と第２工程とを備える。シール材一体型金属部品は、真空チャンバーの出入口を開閉するボンデッドシールとして用いられる。また、シール材一体型金属部品は、シール材と、金属部材とを有する。金属部材とシール材とは、接着され一体化されている。第１工程では、シール材一体型金属部品の固体識別を可能にする。第２工程では、回収されたシール材一体型金属部品の金属部材から、使用済みのシール材を剥がして新しいシール材を接着させ、再生シール材一体型金属部品を作る。
　本発明に係るリサイクル管理方法では、シール材一体型金属部品の固体識別が可能になる。また、金属部材から使用済みのシール材が剥がされ、新しいシール材が接着される。
　これにより、固体識別が可能であるため、リサイクル履歴等の個体管理が可能になる。 A recycling management method according to a first aspect of the invention is a method for managing recycling of a seal material-integrated metal part, and includes a first step and a second step. The seal material-integrated metal part is used as a bonded seal that opens and closes the entrance and exit of the vacuum chamber. Further, the seal material integrated metal part includes a seal material and a metal member. The metal member and the sealing material are bonded and integrated. In the first step, the solid identification of the seal material-integrated metal part is made possible. In the second step, the used seal material is peeled off from the collected metal member of the seal material-integrated metal part and a new seal material is bonded to make a recycled seal material-integrated metal part.
In the recycling management method according to the present invention, the solid identification of the seal material-integrated metal part becomes possible. Further, the used sealing material is peeled off from the metal member, and a new sealing material is bonded.
Thereby, since individual identification is possible, individual management, such as a recycling history, is attained.
　第２発明に係るリサイクル管理方法は、第１発明に係るリサイクル管理方法であって、第３工程をさらに備える。第３工程では、固体識別が可能にされたシール材一体型金属部品のリサイクル履歴を記憶する。
　本発明に係るリサイクル管理方法では、固体識別が可能になったシール材一体型金属部品のリサイクル履歴が記憶される。
　これにより、シール材一体型金属部品を適切にリサイクルすることができる。 The recycling management method according to the second invention is the recycling management method according to the first invention, further comprising a third step. In the third step, the recycling history of the seal material-integrated metal part capable of solid identification is stored.
In the recycling management method according to the present invention, the recycling history of the seal material-integrated metal part capable of identifying the solid is stored.
Thereby, a sealing material integrated metal part can be recycled appropriately.
　第３発明に係るリサイクル管理方法は、第１または第２発明に係るリサイクル管理方法であって、第１工程は、識別可能部位形成工程を有する。識別部位形成工程では、固体識別を可能にする識別可能部位を金属部材に形成する。
　本発明に係るリサイクル管理方法では、シール材一体型金属部品の固体識別を可能にするための識別可能部位が形成される。
　これにより、一旦形成された識別可能部位を金属部材が廃棄処理されるまで利用することができる。 A recycling management method according to a third aspect of the invention is the recycling management method according to the first or second aspect of the invention, wherein the first step includes an identifiable part forming step. In the identification part forming step, an identifiable part that enables solid identification is formed on the metal member.
In the recycling management method according to the present invention, an identifiable portion for enabling solid identification of a seal material-integrated metal part is formed.
Thereby, the identifiable site once formed can be used until the metal member is discarded.
　第４発明に係るリサイクル管理方法は、第３発明に係るリサイクル管理方法であって、識別可能部位形成工程は、刻印、耐熱性部材の貼付、および耐熱非接触通信手段の埋め込みのいずれかである。
　本発明に係るリサイクル管理方法では、金属部材に形成される識別可能部位が、刻印、耐熱性部材の貼付、および耐熱非接触通信手段の埋め込みのいずれかである。
　これにより、温度に影響を受けない識別可能部位を形成することができる。 A recycling management method according to a fourth invention is the recycling management method according to the third invention, and the identifiable part forming step is any one of stamping, sticking of a heat-resistant member, and embedding of a heat-resistant non-contact communication means .
In the recycling management method according to the present invention, the identifiable portion formed on the metal member is any one of stamping, sticking of a heat-resistant member, and embedding of a heat-resistant non-contact communication means.
Thereby, the identifiable part which is not influenced by temperature can be formed.
　第５発明に係るリサイクル管理方法は、第３発明または第４発明に係るリサイクル管理方法であって、識別可能部位形成工程では、固体識別記号を有する識別可能部位を形成する。さらに、第４工程を備える。第４工程では、固体識別記号に関連付けて、シール材一体型金属部品の種別を記憶させる。
　本発明に係るリサイクル管理方法では、固体識別記号を有する識別可能部位が形成される。また、固体識別記号に関連付けた、シール材一体型金属部品の種別が記憶される。
　これにより、使用済みのシール材一体型金属部品の種別を容易に特定できる。 The recycle management method according to the fifth invention is the recycle management method according to the third or fourth invention, wherein the identifiable part having the solid identification symbol is formed in the identifiable part forming step. Furthermore, the fourth step is provided. In the fourth step, the type of the seal material integrated metal part is stored in association with the solid identification symbol.
In the recycling management method according to the present invention, an identifiable portion having a solid identification symbol is formed. In addition, the type of the seal material integrated metal part associated with the solid identification symbol is stored.
Thereby, it is possible to easily identify the type of used seal material-integrated metal part.
　第６発明に係るリサイクル管理方法は、第５発明に係るリサイクル管理方法であって、種別は、シール材一体型金属部品の回収先または／およびシール材一体型金属部品の使用者を示す。
　本発明に係るリサイクル管理方法では、種別として、シール材一体型金属部品の回収先または／およびシール材一体型金属部品の使用者が、固体識別記号に関連付けて記憶される。
　これにより、再生シール材一体型金属部品の納品先を容易に特定できる。 A recycling management method according to a sixth aspect of the present invention is the recycling management method according to the fifth aspect of the present invention, wherein the type indicates a collection destination of the seal material integrated metal part and / or a user of the seal material integrated metal part.
In the recycling management method according to the present invention, as a type, the collection destination of the seal material integrated metal part and / or the user of the seal material integrated metal part is stored in association with the solid identification symbol.
Thereby, the delivery destination of the recycled sealing material-integrated metal part can be easily specified.
　第７発明に係るリサイクル管理方法は、第１発明から第６発明のいずれかに係るリサイクル管理方法であって、第５工程をさらに備える。第５工程では、第２工程の前または／および後で、回収されたシール材一体型金属部品を検査する。
　本発明に係るリサイクル管理方法では、第２工程の前または／および後で、回収されたシール材一体型金属部品が検査される。
　これにより、好適なシール材一体型金属部品をリサイクルすることができる。 A recycling management method according to a seventh aspect of the invention is the recycling management method according to any of the first to sixth aspects of the invention, further comprising a fifth step. In the fifth step, the collected seal material-integrated metal part is inspected before and / or after the second step.
In the recycling management method according to the present invention, the recovered seal material-integrated metal part is inspected before and / or after the second step.
Thereby, a suitable sealing material integrated metal part can be recycled.
　第８発明に係るリサイクル管理方法は、第７発明に係るリサイクル管理方法であって、第６工程をさらに備える。第６工程では、固体識別記号に関連付けて検査履歴を記憶させる。検査履歴とは、第５工程において検査された履歴である。
　本発明に係るリサイクル管理方法では、シール材一体型金属部品の検査履歴が記憶される。
　これにより、信頼性のあるシール材一体型金属部品をリサイクルすることができる。 The recycling management method according to the eighth invention is the recycling management method according to the seventh invention, further comprising a sixth step. In the sixth step, the inspection history is stored in association with the solid identification symbol. The inspection history is a history inspected in the fifth step.
In the recycling management method according to the present invention, the inspection history of the seal material integrated metal part is stored.
Thereby, a reliable seal material-integrated metal part can be recycled.
　第９発明に係るリサイクル管理システムは、シール材一体型金属部品のリサイクルを管理するためのリサイクル管理システムであって、第１手段と第２手段とを備える。シール材一体型金属部品は、真空チャンバーの出入口を開閉するボンデッドシールとして用いられる。また、シール材一体型金属部品は、シール材と、金属部材とを有する。金属部材とシール材とは、接着されて一体化されている。第１手段は、シール材一体型金属部品の固体識別を可能にする。第２手段は、回収されたシール材一体型金属部品の金属部材から、使用済みのシール材を剥がして新しいシール材を接着させ、再生シール材一体型金属部品を作る。
　本発明に係るリサイクル管理システムでは、シール材一体型金属部品の固体識別が可能になる。また、金属部材から使用済みのシール材が剥がされ、新しいシール材が接着される。
　これにより、固体識別が可能であるため、リサイクル履歴等の個体管理が可能になる。 A recycle management system according to a ninth aspect of the invention is a recycle management system for managing the recycling of a seal material-integrated metal part, comprising a first means and a second means. The seal material-integrated metal part is used as a bonded seal that opens and closes the entrance and exit of the vacuum chamber. Further, the seal material integrated metal part includes a seal material and a metal member. The metal member and the sealing material are bonded and integrated. The first means enables the solid identification of the seal-integrated metal part. The second means peels off the used sealing material from the recovered metal member of the seal material-integrated metal part and adheres a new seal material to make a recycled seal material-integrated metal part.
In the recycling management system according to the present invention, the solid identification of the seal material-integrated metal part becomes possible. Further, the used sealing material is peeled off from the metal member, and a new sealing material is bonded.
Thereby, since individual identification is possible, individual management, such as a recycling history, is attained.
　第１発明に係るリサイクル管理方法では、固体識別が可能であるため、リサイクル履歴等の個体管理が可能になる。
　第２発明に係るリサイクル管理方法では、シール材一体型金属部品を適切にリサイクルすることができる。
　第３発明に係るリサイクル管理方法では、一旦形成された識別可能部位を金属部材が廃棄処理されるまで利用することができる。
　第４発明に係るリサイクル管理方法では、温度に影響を受けない識別可能部位を形成することができる。
　第５発明に係るリサイクル管理方法では、使用済みのシール材一体型金属部品の種別を容易に特定できる。 In the recycling management method according to the first invention, since individual identification is possible, individual management such as recycling history becomes possible.
In the recycling management method according to the second aspect of the present invention, the seal material integrated metal part can be appropriately recycled.
In the recycling management method according to the third aspect of the invention, the identifiable part once formed can be used until the metal member is discarded.
In the recycling management method according to the fourth aspect of the invention, it is possible to form an identifiable part that is not affected by temperature.
In the recycling management method according to the fifth aspect of the present invention, it is possible to easily specify the type of used seal material-integrated metal part.
　第６発明に係るリサイクル管理方法では、再生シール材一体型金属部品の納品先を容易に特定できる。
　第７発明に係るリサイクル管理方法では、好適なシール材一体型金属部品をリサイクルすることができる。
　第８発明に係るリサイクル管理方法では、信頼性のあるシール材一体型金属部品をリサイクルすることができる。
　第９発明に係るリサイクル管理システムでは、シール材一体型金属部品を適切にリサイクルすることができる。 In the recycling management method according to the sixth aspect of the invention, the delivery destination of the recycled seal material-integrated metal part can be easily specified.
In the recycling management method according to the seventh aspect of the invention, it is possible to recycle a suitable sealing material-integrated metal part.
In the recycling management method according to the eighth aspect of the invention, a reliable seal material-integrated metal part can be recycled.
In the recycling management system according to the ninth aspect of the invention, the seal material-integrated metal part can be appropriately recycled.
ボンデッドシールの流通経路を示す図である。It is a figure which shows the distribution channel of a bonded seal. ボンデッドシールおよびボンデッドシールが用いられるチャンバーを示す図である。It is a figure which shows the chamber in which a bonded seal and a bonded seal are used. ボンデッドシールの部分拡大図である。It is the elements on larger scale of a bonded seal. 管理装置のブロック図である。It is a block diagram of a management device. 種別情報記憶領域に記憶された情報を示す図である。It is a figure which shows the information memorize | stored in the classification information storage area. 再利用可能回数記憶領域に記憶された情報を示す図である。It is a figure which shows the information memorize | stored in the reusable count memory area. 識別記号情報記憶領域に記憶された情報を示す図である。It is a figure which shows the information memorize | stored in the identification symbol information storage area. リサイクル管理システムにおける処理の流れを示す図である。It is a figure which shows the flow of a process in a recycling management system. 変形例（５）に係るボンデッドシールの流通経路を示す図である。It is a figure which shows the distribution route of the bonded seal | sticker which concerns on a modification (5). 変形例（５）に係るボンデッドシールの流通経路を示す図である。It is a figure which shows the distribution route of the bonded seal | sticker which concerns on a modification (5). ゲートバルブの断面図である。It is sectional drawing of a gate valve. Ｌ型バルブの断面図である。It is sectional drawing of an L-shaped valve. バタフライバルブの斜視図である。It is a perspective view of a butterfly valve.
　以下、図面を参照して、本発明の実施形態に係るリサイクル管理システムについて説明する。
　１．全体構成
　本実施形態に係るリサイクル管理システムは、真空チャンバーに用いられるシール材一体型金属部品（以下、ボンデッドシール）をリサイクルするための管理システムである。図１に示すように、リサイクル管理システムでは、主として、ボンデッドシールメーカー１０と、真空チャンバーのメーカー（装置メーカー）２０と、ユーザー３０との間で流通するボンデッドシールを管理する。
　図２に、本実施形態に係るボンデッドシール５を示す。ボンデッドシール５は、例えば、プロセスチャンバー６とトランスファーチャンバー７との仕切り弁、および／またはロードロックチャンバーとトランスファーチャンバー７との仕切り弁として機能する。 Hereinafter, a recycling management system according to an embodiment of the present invention will be described with reference to the drawings.
1. Overall Configuration A recycle management system according to the present embodiment is a management system for recycling a metal material (hereinafter referred to as a bonded seal) integrated with a seal material used in a vacuum chamber. As shown in FIG. 1, the recycling management system mainly manages bonded seals distributed among a bonded seal manufacturer 10, a vacuum chamber manufacturer (apparatus manufacturer) 20, and a user 30.
FIG. 2 shows a bonded seal 5 according to this embodiment. The bonded seal 5 functions as, for example, a gate valve between the process chamber 6 and the transfer chamber 7 and / or a gate valve between the load lock chamber and the transfer chamber 7.
　図３に、ボンデッドシール５の部分拡大図を示す。ボンデッドシール５は、主として、金属部材５１と、シール材５２とからなる。金属部材５１は、アルミ、ステンレス、チタン、銅等、ユーザーが所望する材質で作られている。金属部材５１は、一の面の周縁近傍に溝５３を有する。当該溝５３には、接着剤が塗られ、その上に、細長い形状に加工されたゴム製のシール材５２が載置される。シール材５２は、耐腐食ガス性および耐プラズマ性の部材である。一般的には、フルオロエラストマー（フッ素ゴム）が好ましい。フッ素ゴムとしては、広く一般的に採用されている、フッ化ビニリデン（ＶｄＦ）とヘキサフルオロプロピレン（ＨＦＰ）との２元共重合体、または、ＶｄＦとＨＦＰとテトラフルオロエチレン（ＴＦＥ）との３元共重合体などの汎用フッ素ゴムを用いてもよい。また、耐プラズマ性に優れるパーフルオロエラストマーを用いてもよい。金属部材５１とシール材５２とは、プレス成形による圧力と熱とが加えられ、接着され一体化する。 FIG. 3 shows a partially enlarged view of the bonded seal 5. The bonded seal 5 mainly includes a metal member 51 and a seal material 52. The metal member 51 is made of a material desired by the user, such as aluminum, stainless steel, titanium, or copper. The metal member 51 has a groove 53 near the periphery of one surface. An adhesive is applied to the groove 53, and a rubber seal material 52 processed into an elongated shape is placed thereon. The sealing material 52 is a member having corrosion resistance and plasma resistance. In general, a fluoroelastomer (fluororubber) is preferable. As the fluoro rubber, a binary copolymer of vinylidene fluoride (VdF) and hexafluoropropylene (HFP), or 3 of VdF, HFP, and tetrafluoroethylene (TFE), which is widely adopted in general, is used. A general-purpose fluororubber such as an original copolymer may be used. Further, a perfluoroelastomer having excellent plasma resistance may be used. The metal member 51 and the sealing material 52 are bonded and integrated by applying pressure and heat by press molding.
　本実施形態に係るリサイクル管理システムでは、まず、ボンデッドシールメーカー１０によって製造されたボンデッドシール５が初期部品として真空チャンバーメーカー（装置メーカー）２０に納品される（矢印Ｉ－１）。その後、真空チャンバーメーカー２０によってボンデッドシール５を構成部品とする真空チャンバーがユーザー３０に納品される（矢印ＩＩ）。さらに、ユーザー３０によって使用されたボンデッドシール５がボンデッドシールメーカー１０によって回収される（矢印ＩＩＩ）。ボンデッドシールメーカー１０は、回収したボンデッドシール５のシール材５２を金属部材５１から取り外し、その後、取替え部品としてユーザー１０に納品する（矢印Ｉ－２）。
　以下、ボンデッドシールメーカー１０による、リサイクル管理の詳細を説明する。 In the recycling management system according to the present embodiment, first, the bonded seal 5 manufactured by the bonded seal manufacturer 10 is delivered to the vacuum chamber manufacturer (apparatus manufacturer) 20 as an initial part (arrow I-1). Thereafter, a vacuum chamber having the bonded seal 5 as a component is delivered to the user 30 by the vacuum chamber maker 20 (arrow II). Further, the bonded seal 5 used by the user 30 is collected by the bonded seal manufacturer 10 (arrow III). The bonded seal manufacturer 10 removes the collected sealing material 52 of the bonded seal 5 from the metal member 51, and then delivers it to the user 10 as a replacement part (arrow I-2).
Details of the recycling management by the bonded seal manufacturer 10 will be described below.
　２．リサイクル管理の詳細
　ボンデッドシールメーカー１０は、主として、図示しない破損判定装置、識別記号形成装置、識別記号読み取り装置、およびシール材取替え装置と、管理装置４０とを有する。識別記号形成装置および識別記号読取装置は、管理装置４０に接続されている。 2. Details of Recycle Management Bonded seal manufacturer 10 mainly includes a damage determination device, an identification symbol forming device, an identification symbol reader, a seal material replacement device, and a management device 40 (not shown). The identification symbol forming device and the identification symbol reading device are connected to the management device 40.
　＜破損判定装置＞
　破損判定装置は、回収されたボンデッドシール５の金属部材５１に破損があるか否かを判定する。ここで、金属部材５１の破損とは、シール材５２を取り替えたとしても、ボンデッドシール５を再度利用することが好ましくない状態を意味する。 <Damage determination device>
The damage determination device determines whether or not the metal member 51 of the recovered bonded seal 5 is damaged. Here, the breakage of the metal member 51 means a state in which it is not preferable to reuse the bonded seal 5 even if the sealing material 52 is replaced.
　＜識別記号形成装置＞
　識別記号形成装置は、ボンデッドシール５の金属部材５１に識別可能部位を形成する装置である。識別可能部位とは、ボンデッドシール５の固体識別を可能にする部位である。具体的に、識別記号形成装置は、金属部材５１に識別記号を刻印する。識別記号は、各ボンデッドシール５に対して割り当てられた固有の識別番号に相当する。固有の識別番号は、後述する管理装置４０に記憶されている情報に基づいて決定される。識別記号は、二次元バーコードの態様で、金属部材５１に刻印される。 <Identification symbol forming device>
The identification symbol forming apparatus is an apparatus that forms an identifiable portion on the metal member 51 of the bonded seal 5. The identifiable part is a part that enables the solid identification of the bonded seal 5. Specifically, the identification symbol forming device imprints an identification symbol on the metal member 51. The identification symbol corresponds to a unique identification number assigned to each bonded seal 5. The unique identification number is determined based on information stored in the management device 40 described later. The identification symbol is stamped on the metal member 51 in the form of a two-dimensional barcode.
　＜識別記号読取装置＞
　識別記号読取装置は、ボンデッドシール５の金属部材５１に形成された識別可能部位（刻印された識別記号）を読み取る。具体的には、各ボンデッドシール５に対して割り当てられた固有の識別番号が読み取られる。その後、識別記号読取装置は、読み取った識別記号に関する情報を後述する管理装置４０に送る。 <Identification symbol reader>
The identification symbol reading device reads an identifiable portion (engraved identification symbol) formed on the metal member 51 of the bonded seal 5. Specifically, a unique identification number assigned to each bonded seal 5 is read. Thereafter, the identification symbol reading device sends information regarding the read identification symbol to the management device 40 described later.
　＜シール材取替え装置＞
　シール材取替え装置は、主として、ボンデッドシール５の金属部材５１からシール材５２を取り外す第１処理と、金属部材５１に新たなシール材５２を取り付ける第２処理とを行う。具体的に、第１処理では、超臨界流体により金属部材５１からシール材５２を取り外す。第２処理では、シール材５２が取り外された金属部材５１に新たなシール材を取り付ける。 <Sealing material replacement device>
The seal material replacement device mainly performs a first process of removing the seal material 52 from the metal member 51 of the bonded seal 5 and a second process of attaching a new seal material 52 to the metal member 51. Specifically, in the first treatment, the sealing material 52 is removed from the metal member 51 with a supercritical fluid. In the second process, a new sealing material is attached to the metal member 51 from which the sealing material 52 has been removed.
　＜管理装置＞
　管理装置４０は、外部機器と接続されている。外部機器には、識別記号形成装置および識別記号読取装置が含まれる。管理装置４０は、図４に示すように、主として、通信部４１と、表示部４２と、入力部４３と、記憶部４４と、制御部４５とを有する。
　〔通信部〕
　通信部４１は、管理装置４０を識別記号形成装置および識別記号読取装置を含む外部機器と接続するネットワークインターフェースである。また、通信部４１は、外部機器との間で各種信号の授受を行う。
　〔表示部〕
　表示部４２は、主としてディスプレイから構成されている。表示部４２には、外部機器から取得した情報および管理装置４０で管理している情報を表示するための管理画面が表示される。 <Management device>
The management device 40 is connected to an external device. The external device includes an identification symbol forming device and an identification symbol reader. As shown in FIG. 4, the management device 40 mainly includes a communication unit 41, a display unit 42, an input unit 43, a storage unit 44, and a control unit 45.
[Communication Department]
The communication unit 41 is a network interface that connects the management device 40 to external devices including an identification symbol forming device and an identification symbol reader. The communication unit 41 exchanges various signals with an external device.
[Display section]
The display unit 42 is mainly composed of a display. The display unit 42 displays a management screen for displaying information acquired from the external device and information managed by the management device 40.
　〔入力部〕
　入力部４３は、主としてディスプレイを覆うタッチパネルおよび操作ボタンから構成されている。
　〔記憶部〕
　記憶部４４には、後述する制御部４５が読み出して実行可能なプログラムが記憶されている。また、記憶部４４は、主として、種別情報記憶領域４４ａと、再利用可能回数記憶領域４４ｂと、識別記号情報記憶領域４４ｃとを有する。 [Input section]
The input unit 43 mainly includes a touch panel and operation buttons that cover the display.
[Storage section]
The storage unit 44 stores a program that can be read and executed by the control unit 45 described later. The storage unit 44 mainly includes a type information storage area 44a, a reusable number storage area 44b, and an identification symbol information storage area 44c.
　（ａ）種別情報記憶領域
　種別情報記憶領域４４ａには、ボンデッドシール５の種別に関する情報が記憶されている。ボンデッドシール５の種別に関する情報とは、ボンデッドシール５の回収先または／および回収したボンデッドシール５のユーザーを示す情報である。具体的には、図５に示すように、種別情報記憶領域４４ａには、ユーザー名と、当該ユーザーが使用するボンデッドシールの種別とが関連付けて記憶されている。 (A) Type information storage area The type information storage area 44a stores information related to the type of the bonded seal 5. The information related to the type of the bonded seal 5 is information indicating a recovery destination of the bonded seal 5 and / or a user of the recovered bonded seal 5. Specifically, as shown in FIG. 5, in the type information storage area 44a, the user name and the type of the bonded seal used by the user are stored in association with each other.
　（ｂ）再利用可能回数記憶領域
　再利用可能回数記憶領域４４ｂには、ボンデッドシール５の種別と、リサイクル可能回数とが関連付けて記憶されている（図６参照）。リサイクル可能回数は、ボンデッドシール５の種別に応じた値である。具体的には、リサイクル可能回数は、それぞれのシール材５２と金属部材５１との耐久期間に応じて決定される。より具体的に、例えば、会社Ａが使用しているボンデッドシール５のシール材５２は、３ヶ月程度で取り替える必要が生じる場合、シール材５２の耐久期間は３ヶ月である。このとき、会社Ａが使用するボンデッドシール５の金属部材５１の耐久期間が３年である場合には、当該ボンデッドシール５のリサイクル可能回数は１１回となる。 (B) Reusable count storage area The reusable count storage area 44b stores the type of the bonded seal 5 and the recyclable count in association with each other (see FIG. 6). The number of recyclable times is a value corresponding to the type of the bonded seal 5. Specifically, the number of recyclable times is determined in accordance with the durability period of each sealing material 52 and metal member 51. More specifically, for example, when the sealing material 52 of the bonded seal 5 used by the company A needs to be replaced in about 3 months, the durability of the sealing material 52 is 3 months. At this time, when the durability period of the metal member 51 of the bonded seal 5 used by the company A is 3 years, the number of times that the bonded seal 5 can be recycled is 11 times.
　（ｃ）識別記号情報記憶領域
　識別記号情報記憶領域４４ｃには、製品ＩＤと、リサイクル回数と、回収履歴とが関連付けて記憶されている（図７参照）。製品ＩＤは、ボンデッドシール５を識別するための記号である。製品ＩＤは、ボンデッドシール５の金属部材５１に刻印された識別記号と関連付けられている。回収履歴は、ボンデッドシール５が回収される度に、当該ボンデッドシール５の製品ＩＤに関連付けて記憶されていく。具体的には、識別記号読取装置によって、ボンデッドシール５の識別記号が読み取られると、後述する識別記号情報取得部４５ａによって、当該識別記号に関する情報が取得される。さらに、識別記号情報取得部４５ａによって取得された識別記号に関する情報に基づいて、該当する製品ＩＤの回収履歴が更新される。具体的には、回収履歴のフィールドに、識別記号読取装置によって識別記号が読み取られた日付が記憶されていく。リサイクル回数は、ボンデッドシール５がリサイクルされた回数の合計である。リサイクル回数は、上述の回収履歴が更新されるたびに一つ増加される。 (C) Identification Symbol Information Storage Area The identification symbol information storage area 44c stores a product ID, the number of times of recycling, and a collection history in association with each other (see FIG. 7). The product ID is a symbol for identifying the bonded seal 5. The product ID is associated with an identification symbol stamped on the metal member 51 of the bonded seal 5. The collection history is stored in association with the product ID of the bonded seal 5 every time the bonded seal 5 is collected. Specifically, when the identification symbol of the bonded seal 5 is read by the identification symbol reading device, information related to the identification symbol is acquired by the identification symbol information acquisition unit 45a described later. Furthermore, the collection history of the corresponding product ID is updated based on the information regarding the identification symbol acquired by the identification symbol information acquisition unit 45a. Specifically, the date when the identification symbol is read by the identification symbol reader is stored in the collection history field. The number of times of recycling is the total number of times that the bonded seal 5 has been recycled. The number of recycles is incremented by one every time the collection history is updated.
　〔制御部〕
　制御部４５は、主としてＣＰＵ、ＲＯＭおよびＲＡＭから構成されており、上述の記憶部４４に記憶されているプログラムを読み出して実行する。
　また、制御部４５は、主として、識別記号情報取得部４５ａ、種別判定部４５ｂ、再利用可能回数判定部４５ｃ、および再利用可否決定部４５ｄとして機能する。 (Control part)
The control unit 45 mainly includes a CPU, a ROM, and a RAM, and reads and executes a program stored in the storage unit 44 described above.
The control unit 45 mainly functions as an identification symbol information acquisition unit 45a, a type determination unit 45b, a reusable number determination unit 45c, and a reusability determination unit 45d.
　ａ）識別記号情報取得部
　識別記号情報取得部４５ａは、ボンデッドシール５の識別記号に関する情報を識別記号読取装置から取得する。識別記号情報取得部４５ａは、識別番号を取得すると、上述したように、識別記号情報記憶領域４４ｃに日付を記憶し、リサイクル回数の値を一つ増加させる。
　ｂ）種別判定部
　種別判定部４５ｂは、識別記号情報取得部４５ａによって取得された識別番号に基づいて、当該識別番号に対応するボンデッドシール５の種別を判定する（図５参照）。 a) Identification Symbol Information Acquisition Unit The identification symbol information acquisition unit 45a acquires information related to the identification symbol of the bonded seal 5 from the identification symbol reader. When the identification symbol information acquisition unit 45a acquires the identification number, as described above, the identification symbol information acquisition unit 45a stores the date in the identification symbol information storage area 44c and increments the value of the number of recycles by one.
b) Type Determination Unit The type determination unit 45b determines the type of the bonded seal 5 corresponding to the identification number based on the identification number acquired by the identification symbol information acquisition unit 45a (see FIG. 5).
　ｃ）再利用可能回数判定部
　再利用可能回数判定部４５ｃは、種別判定部４５ｂによって判定されたボンデッドシール５の種別に基づいて、ボンデッドシール５のリサイクル可能回数を判定する。また、上述したように、再利用可能回数判定部４５ｃは、再利用可能回数記憶領域４４ｂに記憶されている情報に基づいて、リサイクル可能回数を判定する。
　ｄ）再利用可否決定部
　再利用可否決定部４５ｄは、再利用可能回数判定部４５ｃによって判定されたリサイクル可能回数と、識別記号情報記憶領域４４ｃに記憶された情報（図６参照）とを比較して、ボンデッドシール５のリサイクルの可否を判定する。 c) Reusable frequency determination unit The reusable frequency determination unit 45c determines the recyclable frequency of the bonded seal 5 based on the type of the bonded seal 5 determined by the type determination unit 45b. Further, as described above, the reusable number determination unit 45c determines the recyclable number based on the information stored in the reusable number storage area 44b.
d) Reusability determining unit The reusability determining unit 45d compares the recyclable number determined by the reusable number determining unit 45c with the information (see FIG. 6) stored in the identification symbol information storage area 44c. Then, it is determined whether or not the bonded seal 5 can be recycled.
　３．リサイクル管理の流れ
　次に、図８を用いて、本発明に係るリサイクル管理システムにおける処理の流れを説明する。
　まず、ステップＳ１０１として、使用済みのボンデッドシール５が回収される。次に、ステップＳ１０２で、破損判定装置によって、回収されたボンデッドシール５の金属部材５１に破損があるか否かが判定される。ステップＳ１０２で、ボンデッドシール５の金属部材５１に破損があると判定された場合には、ステップＳ１０９に進み、破損がないと判定された場合には、ステップＳ１０３に進む。
　ステップＳ１０３では、金属部材５１が識別可能部位を有しているか否かが判断される。ステップＳ１０３で、金属部材５１が識別可能部位を有していない場合には、ステップＳ１０４に進む。ステップＳ１０４では、識別記号形成装置によって、金属部材５１に識別可能部位が形成される。具体的には、ボンデッドシール５１を固体識別可能にするための識別記号が、金属部材５１に刻印される。また、このとき、識別情報記憶領域４４ａには新たなフィールドが形成される。新たなフィールドには、識別可能部位が形成されたボンデッドシール５１に関する情報が記憶される。その後、ステップＳ１０７に進む。 3. Flow of Recycling Management Next, the flow of processing in the recycling management system according to the present invention will be described with reference to FIG.
First, as step S101, the used bonded seal 5 is collected. Next, in step S102, the damage determination device determines whether or not the recovered metal member 51 of the bonded seal 5 is damaged. If it is determined in step S102 that the metal member 51 of the bonded seal 5 is damaged, the process proceeds to step S109. If it is determined that there is no damage, the process proceeds to step S103.
In step S103, it is determined whether or not the metal member 51 has an identifiable part. If the metal member 51 does not have an identifiable part in step S103, the process proceeds to step S104. In step S104, an identifiable part is formed on the metal member 51 by the identification symbol forming device. Specifically, an identification symbol for enabling the bonded seal 51 to be identified is marked on the metal member 51. At this time, a new field is formed in the identification information storage area 44a. In the new field, information related to the bonded seal 51 in which the identifiable part is formed is stored. Thereafter, the process proceeds to step S107.
　一方、ステップＳ１０３で金属部材５１が識別可能部位を有している場合には、ステップＳ１０５に進む。ステップＳ１０５では、識別記号読取装置によって、金属部材５１に刻印された識別記号が読み取られ、識別記号に関する情報が管理装置４０に送られる。管理装置４０において、識別記号情報取得部４５ａが識別記号に関する情報を取得すると、識別記号情報記憶領域４４ｂの該当する製品ＩＤの回収履歴のフィールドに、日付が入力される。さらに、リサイクル回数のフィールドも更新される。
　次に、ステップＳ１０６では、ボンデッドシール５１のリサイクルの可否が判定される。具体的には、まず、種別判定部４５ｂが、識別記号を読み取られたボンデッドシール５の種別を判定する。さらに、再利用可能回数判定部４５ｃが、再利用可能回数記憶領域４４ｃに記憶された情報に基づき、当該ボンデッドシール５の再利用可能回数を判定する。その後、再利用可否決定部４５ｄは、当該ボンデッドシール５が再利用可能か否かを判定する。ステップＳ１０６において、ボンデッドシール５の再利用が可能であると判定された場合には、ステップＳ１０７に進む。例えば、識別記号読取装置によって識別記号が読み取られたボンデッドシール５が図７に示す製品（製品ＩＤ：ＡＢＣ０１０１００）であった場合、種別判定部４５ｂによってボンデッドシールの種別が「ＡＢＣ」であると判定され、再利用可能回数判定部４５ｃによって当該種別「ＡＢＣ」の再利用可能回数が「１１」であることが判定される。また、再利用可否決定部４５ｄが、識別記号情報記憶領域４４ｂに記憶されているリサイクル回数「２」と、再利用可能回数「１１」とを比較し、再利用可能であると判定する。 On the other hand, if the metal member 51 has an identifiable part in step S103, the process proceeds to step S105. In step S <b> 105, the identification symbol imprinted on the metal member 51 is read by the identification symbol reading device, and information regarding the identification symbol is sent to the management device 40. In the management device 40, when the identification symbol information acquisition unit 45a acquires information about the identification symbol, a date is input to the collection history field of the corresponding product ID in the identification symbol information storage area 44b. In addition, the recycle count field is also updated.
Next, in step S106, it is determined whether or not the bonded seal 51 can be recycled. Specifically, first, the type determination unit 45b determines the type of the bonded seal 5 from which the identification symbol has been read. Further, the reusable number determination unit 45c determines the reusable number of times for the bonded seal 5 based on the information stored in the reusable number storage area 44c. Thereafter, the reusability determination unit 45d determines whether or not the bonded seal 5 is reusable. If it is determined in step S106 that the bonded seal 5 can be reused, the process proceeds to step S107. For example, when the bonded seal 5 whose identification symbol is read by the identification symbol reader is the product (product ID: ABC010100) shown in FIG. 7, the type of the bonded seal is “ABC” by the type determination unit 45b. And the reusable number determination unit 45c determines that the reusable number of the type “ABC” is “11”. Further, the reusability determination unit 45d compares the number of recycles “2” stored in the identification symbol information storage area 44b with the number of reusable times “11” and determines that the reusability is possible.
　次に、ステップＳ１０７では、ボンデッドシール５のシール材５２が交換される。例えば、シール材５２に浸透しうる流体を用いて、金属部材５１からシール材５２が取り外され、その後、新たなシール材５２がプレス成形により金属部材５１に接着される。その後、ステップＳ１０８に進み、ボンデッドシール５の種別に応じて、所定のユーザーに出荷される。
　一方、ステップＳ１０６において、ボンデッドシール５の再利用が不可能と判定された場合には、ステップＳ１０９に進む。ステップＳ１０９では、金属部材５１からシール材５２が取り外され、その後、廃棄処理が行われる。なお、廃棄処理では、金属部材５１およびシール材がそれぞれ再利用可能な場合には、再利用のための処理が行われる。 Next, in step S107, the sealing material 52 of the bonded seal 5 is replaced. For example, the seal material 52 is removed from the metal member 51 using a fluid that can penetrate the seal material 52, and then a new seal material 52 is bonded to the metal member 51 by press molding. Then, it progresses to step S108 and is shipped to a predetermined user according to the type of the bonded seal 5.
On the other hand, when it is determined in step S106 that the bonded seal 5 cannot be reused, the process proceeds to step S109. In step S109, the sealing material 52 is removed from the metal member 51, and then a disposal process is performed. In the disposal process, when the metal member 51 and the seal material can be reused, a process for reuse is performed.
　４．特徴
　（１）
　本実施形態においてリサイクル管理を行うボンデッドシール５は、真空チャンバーの仕切り弁として機能する。ボンデッドシール５は、アルミ等を成形した金属部材５１と、ゴム製のシール材５２とからなる。これにより、真空チャンバー内の状態を一定に保つ。ここで、ボンデッドシールはチャンバーを開閉するために頻繁に用いられることから、シール材にねじれや破損が生じやすい。そのため、ボンデッドシールは、一定期間（例えば、３ヶ月間）使用されると、破損の有無に限らず、新しいボンデッドシールに交換される。
　ところで、真空チャンバーの出入口を開閉する部品には、シール材５１と金属部材５２とが一体であるシール材一体型金属部品５の他に、シール材と金属部材とが別体であるシール材別体型金属部品がある。シール材別体型金属部品は、シール材としてのＯリングが金属部材に取り付けられるもので、シール材一体型金属部品は、金属部材に細長い形状のシール材が強固に接着されているものである。シール材別体型金属部品については、シール材を金属部材から容易に取り外すことができるため、一定期間使用されたときには、使用済みのシール材を新たなシール材に取り替えることで対処できる。すなわち、ボンデッドシール全体を廃棄する必要がない。しかし、シール材一体型金属部品については、金属部材からシール材を取り外すことができないため、一定期間使用されると、新たなボンデッドシールへと取り替えられる必要が生じる。その結果、使用済みのボンデッドシール５は、産業廃棄物となっていた。
　上記実施形態に係るリサイクル管理方法およびリサイクル管理システムでは、使用済みのボンデッドシールを回収し、金属部材からシール材を取り外して新たなシール材を取り付ける。また、回収時には、ボンデッドシールの固体識別を可能にする識別可能部位を形成する。これにより、従来、一定期間使用後に産業廃棄物となっていたシール材一体型金属部品としてのボンデッドシール５を、再利用することを可能にする。 4). Features (1)
In the present embodiment, the bonded seal 5 that performs recycle management functions as a vacuum chamber gate valve. The bonded seal 5 includes a metal member 51 formed of aluminum or the like and a rubber seal material 52. Thereby, the state in the vacuum chamber is kept constant. Here, since the bonded seal is frequently used to open and close the chamber, the seal material is likely to be twisted or damaged. Therefore, when the bonded seal is used for a certain period of time (for example, for three months), it is replaced with a new bonded seal, not limited to the presence or absence of breakage.
By the way, in addition to the sealing material integrated metal part 5 in which the sealing material 51 and the metal member 52 are integrated, the parts for opening and closing the entrance / exit of the vacuum chamber include the sealing material and the metal member separately. There are body metal parts. In the seal material-separated metal part, an O-ring as a seal material is attached to a metal member, and in the seal material integrated metal part, an elongated seal material is firmly bonded to the metal member. As for the separate metal member with the sealing material, since the sealing material can be easily removed from the metal member, it can be dealt with by replacing the used sealing material with a new sealing material when used for a certain period of time. That is, it is not necessary to discard the entire bonded seal. However, since the seal material-integrated metal part cannot be removed from the metal member, it needs to be replaced with a new bonded seal after a certain period of use. As a result, the used bonded seal 5 was industrial waste.
In the recycling management method and the recycling management system according to the embodiment, the used bonded seal is collected, the sealing material is removed from the metal member, and a new sealing material is attached. Further, at the time of recovery, an identifiable portion that enables solid identification of the bonded seal is formed. This makes it possible to reuse the bonded seal 5 as a seal material-integrated metal part that has conventionally been an industrial waste after use for a certain period of time.
　（２）
　また、ボンデッドシール５の材質や形状は、ユーザーが利用するチャンバーの形状や機能等に応じて異なるため、金属部材５１を製造するためにはコストがかかる。シール材別体型金属部品としてのボンデッドシールであれば、シール材が劣化した際、シール材を交換すれば、再度金属部材を利用することができるため、シール材一体型金属部品に比べて、一般的に低コストと考えられてきた。しかし、シール材別体型金属部品の大きさや形状によって、金属部材にシール材を適切に取り付けることが困難な場合もある。シール材が金属部材に適切に取り付けられない場合、チャンバー内の状態を一定に保つことができず好ましくない。本実施形態に係るリサイクル管理方法およびリサイクル管理システムを採用することにより、コスト高の金属部材５１を再利用することができる。その結果、シール材一体型金属部品としてのボンデッドシールを低コストで利用することができる。 (2)
In addition, since the material and shape of the bonded seal 5 vary depending on the shape and function of the chamber used by the user, it is expensive to manufacture the metal member 51. If it is a bonded seal as a separate metal part of the seal material, when the seal material is deteriorated, if the seal material is replaced, the metal member can be used again. It has generally been considered low cost. However, depending on the size and shape of the separate-separate-type metal part, it may be difficult to appropriately attach the seal material to the metal member. When the sealing material is not properly attached to the metal member, the state in the chamber cannot be kept constant, which is not preferable. By adopting the recycling management method and the recycling management system according to the present embodiment, the expensive metal member 51 can be reused. As a result, it is possible to use a bonded seal as a seal material integrated metal part at low cost.
　（３）
　また、本実施形態では、金属部材５１に識別可能部位が形成される。これにより、一旦形成された識別可能部位を金属部材が廃棄処理されるまで利用することができる。
　（４）
　また、本実施形態では、識別可能部位として、識別記号を金属部材５１に刻印している。そのため、金属部材５１が繰り返し利用された場合にも、適当に識別記号を読み取ることができる。 (3)
In the present embodiment, an identifiable portion is formed on the metal member 51. Thereby, the identifiable site once formed can be used until the metal member is discarded.
(4)
In the present embodiment, an identification symbol is imprinted on the metal member 51 as an identifiable part. Therefore, even when the metal member 51 is repeatedly used, the identification symbol can be appropriately read.
　（５）
　ボンデッドシール５の材質や形状は、上述したように、ユーザーが利用するチャンバーの形状や機能等に応じて異なる。したがって、シール材５２が交換されたボンデッドシール５は、当該ボンデッドシール５の元の利用者に納品する必要がある。本実施形態では、管理装置４０に、ボンデッドシールの種別に対応するボンデッドシール５のユーザーが記憶されている。これにより、再生されたボンデッドシール５の納品先を適当に判定することができる。
　（６）
　本実施形態のリサイクル管理システムでは、回収されたボンデッドシール５の検査が行われる。これにより、信頼性のあるボンデッドシールをリサイクルすることができる。 (5)
As described above, the material and shape of the bonded seal 5 vary depending on the shape and function of the chamber used by the user. Therefore, it is necessary to deliver the bonded seal 5 in which the sealing material 52 has been replaced to the original user of the bonded seal 5. In the present embodiment, the user of the bonded seal 5 corresponding to the type of bonded seal is stored in the management device 40. Thereby, the delivery destination of the regenerated bonded seal 5 can be appropriately determined.
(6)
In the recycling management system of the present embodiment, the recovered bonded seal 5 is inspected. Thereby, a reliable bonded seal can be recycled.
　５．変形例
　（１）
　上記実施形態では、ボンデッドシール５のリサイクル時に、金属部材５１に識別可能部位を形成したが、ボンデッドシール５の製造時に金属部材５１に識別可能部位を形成していてもよい。
　（２）
　上記実施形態では、金属部材５１に、固有の識別番号に相当する識別記号を刻印したが、固有の識別番号に加えて、その他の情報（例えば、履歴）を付加するようにしてもよい。 5. Modification (1)
In the above embodiment, the recognizable portion is formed on the metal member 51 when the bonded seal 5 is recycled. However, the recognizable portion may be formed on the metal member 51 when the bonded seal 5 is manufactured.
(2)
In the above embodiment, an identification symbol corresponding to a unique identification number is stamped on the metal member 51, but other information (for example, history) may be added in addition to the unique identification number.
　（３）
　上記実施形態では、金属部材５１に識別記号を刻印したが、刻印ではなく、耐熱性部材を貼付してもよい。また、耐熱比接触通信手段を金属部材５１に埋め込むことにより、ボンデッドシール５の固体識別を可能にしてもよい。
　（４）
　上記実施形態では、既に再利用した回数と、再利用可能回数とを比較して、回収されたボンデッドシール５の再利用の可否を判定したが、ボンデッドシール５が製造された日付を記憶させ、ボンデッドシール５の利用期間を判定することにより、再利用の可否を判定してもよい。
　（５）
　上記実施形態では、図１に示すように、ボンデッドシール５のリサイクル処理を行う主体と、ボンデッドシールメーカーとが同一である例を挙げたが、リサイクル処理を行う主体と、ボンデッドシールメーカーとが別の主体であってもよい。また、ボンデッドシールメーカーが初期部品を納品する先を真空チャンバーメーカー（装置メーカー）としたが、これに限られるものではない。
　また、ボンデッドシール５の流通経路は、図１に示すものに限られず、図９および図１０に示すような経路であってもよい。例えば、図９では、ユーザーカスタマイズしたボンデッドシールが、ボンデッドシールメーカーからユーザーに納品され（矢印Ｉ－２）、使用済みのボンデッドシールがユーザーからボンデッドシールメーカーに回収される（矢印ＩＩＩ）経路を示す。また、図１０では、真空チャンバー等の装置メーカーがメンテナンス等の理由で、ユーザーからボンデッドシールを回収し（矢印ＩＶ）、その後、当該ボンデッドシールがリサイクル処理の工程に送られる（矢印Ｉ－１）経路を示す。 (3)
In the said embodiment, although the identification symbol was stamped on the metal member 51, you may affix not a stamp but a heat resistant member. Further, by embedding the heat resistance ratio contact communication means in the metal member 51, the solid identification of the bonded seal 5 may be made possible.
(4)
In the above embodiment, the number of times of reuse is compared with the number of reusable times to determine whether or not the recovered bonded seal 5 can be reused, but the date on which the bonded seal 5 was manufactured is stored. Then, by determining the use period of the bonded seal 5, it may be determined whether reuse is possible.
(5)
In the above embodiment, as shown in FIG. 1, the example in which the main body that performs the recycling process of the bonded seal 5 is the same as the bonded seal manufacturer, but the main body that performs the recycling process and the bonded seal manufacturer And may be another subject. In addition, the bonded seal manufacturer has delivered the initial parts to the vacuum chamber manufacturer (apparatus manufacturer), but is not limited to this.
Further, the distribution route of the bonded seal 5 is not limited to that shown in FIG. 1, and may be a route as shown in FIGS. 9 and 10. For example, in FIG. 9, the user-customized bonded seal is delivered from the bonded seal manufacturer to the user (arrow I-2), and the used bonded seal is collected from the user to the bonded seal manufacturer (arrow III). ) Show the route. Also, in FIG. 10, a device maker such as a vacuum chamber collects the bonded seal from the user for maintenance or the like (arrow IV), and then the bonded seal is sent to the recycling process (arrow I−). 1) Show the route.
　（６）
　また、図２および図３では、半導体製造装置に用いられるスリットバルブをボンデッドシール５として例示したが、本発明は、液晶、ＬＥＤ、太陽電池等の製造装置に用いられるボンデッドシールにも採用することもできる。
　例えば、ゲートバルブ１５（図１１参照）や、Ｌ型バルブ１６（図１２参照）、さらに、バタフライバルブ１７（図１３参照）等、所定領域についての気密性を高めるために用いられる、金属部材にシール材を接着させて一体化させたような部品であれば、他の製品に用いられる他の部品であっても、上記実施形態に係るリサイクル管理方法およびリサイクル管理システムを適用することができる。 (6)
2 and 3, the slit valve used in the semiconductor manufacturing apparatus is exemplified as the bonded seal 5. However, the present invention is also applied to the bonded seal used in the manufacturing apparatus for liquid crystals, LEDs, solar cells and the like. You can also
For example, a metal member used to increase the airtightness of a predetermined region, such as the gate valve 15 (see FIG. 11), the L-shaped valve 16 (see FIG. 12), and the butterfly valve 17 (see FIG. 13). The recycling management method and the recycling management system according to the above-described embodiment can be applied to other parts used in other products as long as the parts are obtained by bonding and integrating the sealing material.
　本発明は、シール材一体型金属部品のリサイクル管理方法またはリサイクル管理システムとして有用である。 The present invention is useful as a recycling management method or a recycling management system for metal parts integrated with a sealing material.
５　スリットバルブ（シール材一体型金属部品）
４０　管理装置
５１　金属部材
５２　シール材
５３　溝 5 Slit valve (metal part with integrated seal material)
40 Management Device 51 Metal Member 52 Sealing Material 53 Groove
特表２００１－５０９６４７号公報JP-T-2001-509647

Claims (9)

  1. 　真空チャンバーの出入口を開閉するボンデッドシールとして用いられるシール材一体型金属部品（５）であって、金属部材（５１）と、シール材（５２）とが接着されて一体化された前記シール材一体型金属部品のリサイクルを管理する方法であって、
    　前記シール材一体型金属部品の固体識別を可能にする第１工程と、
    　回収された前記シール材一体型金属部品の前記金属部材から、使用済みの前記シール材を剥がして新しいシール材を接着させ、再生シール材一体型金属部品を作る第２工程と、
    を備えたリサイクル管理方法。     A seal material-integrated metal part (5) used as a bonded seal for opening and closing the entrance and exit of a vacuum chamber, wherein the metal member (51) and the seal material (52) are bonded and integrated. A method for managing the recycling of integrated metal parts,
    A first step for enabling solid identification of the seal material-integrated metal part;
    A second step of creating a recycled sealant-integrated metal part by peeling off the used sealant from the metal member of the collected sealant-integrated metal part and bonding a new sealant;
    Recycling management method with
  2. 　前記固体識別が可能にされた前記シール材一体型金属部品のリサイクル履歴を記憶する第３工程をさらに備えた、
    請求項１に記載のリサイクル管理方法。     And further comprising a third step of storing a recycling history of the seal material-integrated metal part capable of identifying the solid.
    The recycling management method according to claim 1.
  3. 　前記第１工程は、前記固体識別を可能にする識別可能部位を前記金属部材に形成する識別可能部位形成工程を有する、
    請求項１または２に記載のリサイクル管理方法。     The first step includes an identifiable part forming step of forming an identifiable part on the metal member that enables the solid identification.
    The recycling management method according to claim 1 or 2.
  4. 　前記識別可能部位形成工程は、刻印、耐熱性部材の貼付、および耐熱非接触通信手段の埋め込みのいずれかである、
    請求項３に記載のリサイクル管理方法。     The identifiable part forming step is any one of stamping, sticking of a heat-resistant member, and embedding of a heat-resistant non-contact communication means.
    The recycling management method according to claim 3.
  5. 　前記識別可能部位形成工程では、固体識別記号を有する前記識別可能部位を形成し、
    　前記固体識別記号に関連付けて、前記シール材一体型金属部品の種別を記憶させる第４工程をさらに備える、
    請求項３または４のいずれかに記載のリサイクル管理方法。     In the identifiable part forming step, the identifiable part having a solid identification symbol is formed,
    A fourth step of storing a type of the seal material integrated metal part in association with the solid identification symbol;
    The recycling management method according to claim 3 or 4.
  6. 　前記種別は、前記シール材一体型金属部品の回収先または／および前記シール材一体型金属部品の使用者を示す、
    請求項５に記載のリサイクル管理方法。     The type indicates a collection destination of the seal material integrated metal part or / and a user of the seal material integrated metal part.
    The recycling management method according to claim 5.
  7. 　前記第２工程の前または／および後で、前記回収されたシール材一体型金属部品を検査する第５工程をさらに備える、
    請求項１から６のいずれかに記載のリサイクル管理方法。     The method further comprises a fifth step of inspecting the recovered seal material-integrated metal part before or / and after the second step.
    The recycling management method according to any one of claims 1 to 6.
  8. 　前記第５工程において検査された履歴である検査履歴を、前記固体識別記号に関連付けて記憶させる第６工程をさらに備える、
    請求項７に記載のリサイクル管理方法。     A sixth step of storing an inspection history, which is a history of inspection in the fifth step, in association with the solid identification symbol;
    The recycling management method according to claim 7.
  9. 　真空チャンバーの出入口を開閉するボンデッドシールとして用いられるシール材一体型金属部品であって、金属部材と、シール材とが接着されて一体化された前記シール材一体型金属部品のリサイクルを管理するためのリサイクル管理システムであって、
    　前記シール材一体型金属部品の固体識別を可能にする第１手段と、
    　回収された前記シール材一体型金属部品の前記金属部材から、使用済みの前記シール材を剥がして新しいシール材を接着させ、再生シール材一体型金属部品を作る第２手段と
    を備えたリサイクル管理システム。     It is a seal material integrated metal part used as a bonded seal that opens and closes the entrance and exit of a vacuum chamber, and manages recycling of the seal material integrated metal part in which the metal member and the seal material are bonded and integrated. A recycling management system for
    A first means for enabling solid identification of the metal member integrated with the sealing material;
    Recycling management provided with a second means for peeling off the used seal material from the metal member of the collected seal material-integrated metal part and bonding a new seal material to create a recycled seal material-integrated metal part system.
PCT/JP2010/063212 2009-08-06 2010-08-04 Recycling management method for metal parts integrated together with sealing material, and recycling management system WO2011016496A1 (en)

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JPH0658275U (en) * 1993-01-27 1994-08-12 オルガノ株式会社 Gasket with reinforcing member and gasket mounting structure
JPH10222568A (en) * 1997-02-07 1998-08-21 Hitachi Ltd Product and part individual information service system in product life cycle
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JPH0658275U (en) * 1993-01-27 1994-08-12 オルガノ株式会社 Gasket with reinforcing member and gasket mounting structure
JPH10222568A (en) * 1997-02-07 1998-08-21 Hitachi Ltd Product and part individual information service system in product life cycle
JPH11120308A (en) * 1997-08-11 1999-04-30 Sony Corp History information recording device and product equipment provided with the same
JP2000320683A (en) * 1999-04-15 2000-11-24 Robert Bosch Gmbh Unit having sealing device
JP2006002794A (en) * 2004-06-15 2006-01-05 Mitsubishi Cable Ind Ltd Seal structure

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