WO2010148582A1 - Multistage mechanical conveying module chamber - Google Patents

Multistage mechanical conveying module chamber Download PDF

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Publication number
WO2010148582A1
WO2010148582A1 PCT/CN2009/073414 CN2009073414W WO2010148582A1 WO 2010148582 A1 WO2010148582 A1 WO 2010148582A1 CN 2009073414 W CN2009073414 W CN 2009073414W WO 2010148582 A1 WO2010148582 A1 WO 2010148582A1
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WO
WIPO (PCT)
Prior art keywords
rest
chamber
connection
same
wall
Prior art date
Application number
PCT/CN2009/073414
Other languages
French (fr)
Chinese (zh)
Inventor
杨明生
范继良
郭远伦
王曼媛
王勇
Original Assignee
东莞宏威数码机械有限公司
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Application filed by 东莞宏威数码机械有限公司 filed Critical 东莞宏威数码机械有限公司
Publication of WO2010148582A1 publication Critical patent/WO2010148582A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber

Definitions

  • the working mode of sheep and sheep is generally the same as the introduction process.
  • the unification of the system the system of the rest of the system is the same as the rest, that is, only in the rest of each of the rest of the rest. Therefore, in the flow of water, there are requirements for the flow of water that can be met, especially for the requirements of the many processes, and it is necessary to have a lot of rest and the responsibility of each process.
  • the number of process steps that are required to be suspended a large number of processes are required, and the cost of manufacturing and use is increased.
  • the cost of each land is increased, and the cost of using the land is increased. Generate this and lower the competition.
  • the rest since Hugh is involved in the formulation of the flow area of a certain half-time, the rest is replaced, and most of the rest on the Hugh can not meet the requirements of the new Hugh, which makes each compatibility.
  • the purpose of this is to provide a seal that is compatible with each other and that has a high internal utilization ratio, a good compatibility with each other, and an effective reduction in the ground.
  • this wood multi-purpose in the same or the same to provide the same seal, more rest, rest, support and more, rest, hollow, hollow formation, rest on the upper end of the rest, rest at the end of the Extend, support installed in the mouth, seal support
  • the flat plate has a connecting passage, and the connecting passage runs through
  • the connecting channel is connected.
  • the bottom with the extended mouth and the rest, on the inner wall of the upper end of the rest, and the top of the upper side
  • the sealing performance is better.
  • the connected students are also installed in the rest of the week, so that they are on the rules.
  • the upper side has a connection, the connection end
  • connection channel is connected, and the other end is connected.
  • connection is such that the protruding is mounted on the wall of the Hugh so that the squares are connected to each other, making the semi-finished Connect the channels to each.
  • the upper door has the same door device, the same door device has the same door, the same sensor, and the sensor is installed on the rest of the same door, and the same door is installed in the connecting channel, the sensor control center
  • each of the connecting channels are connected to each other, or need to be connected to each other, to or to the phase of the connecting channel, to the or the same door, or to connect the channel to the connected.
  • the inner wall of the rest has the same inner strength, and the rest of the connecting tube is strong and strong. Internal strength and external strength are strong and strong.
  • the top and bottom phases of the rest are respectively
  • the multi-window of the eye, the face of the window is transparent, and the window is connected to the front of the connecting channel.
  • the window can be connected to the home or connected to the channel.
  • the window has a connection near the top, and the top and bottom of the connecting tube are respectively connected to each other.
  • the window connection window is connected to the rest of the window.
  • Bracket connection Bracket connection, bracket top fixed connection, special control office
  • the cover has a window.
  • the window can be used to measure the working condition of or .
  • the wall of the Ming Dynasty rests on the wall
  • the tablet can be connected with many gods, so that the compatibility of the Ming and the rest is good, and it can be multi-functional, or in the different functions of the gods, and the extras are redundant and effective. Each and the same is the same. Therefore, the present multi-purpose, internal high utilization rate, sealed, multi-connected compatibility, multi-functional rest, can effectively reduce the ground. Description
  • 1 is a schematic diagram of the connection of the base of the present.
  • a is a schematic representation of the rest of the day.
  • b is another indication of the rest of the day.
  • the present disclosure is more than one, and the seals of the same or the same are provided.
  • the top 1, the bottom with the rest 11, the bottom with the mouth and the rest on the inner wall of the upper end of the rest 1 and the top 1 on the inner side of the upper side
  • the bottom 1 is attached to the wall of the rest 1 on the inner side 1 of the lower side.
  • top 1 and the rest 1 on the rest 11 make the top of the Hugh seal, the bottom, the bottom 1, and the seal support 1 so that the bottom of the Hugh seals, eventually forming a seal and 1
  • 1 is evenly distributed over the wall of the recess 11.
  • the layout of the rest of the Hugh, and the 1 connected students are also installed in the rest of the week, effectively improving the utilization rate.
  • connection channel 11 is connected, the other end is closed 11
  • the connection is such that the 1 protruding portion is mounted on the wall of the rest so that the other one of the 1 is connected to each of the connecting passages 11 of the one and the half of the square 1 to each.
  • 1 has the same door device, the same door device has the same door (middle), the same door and the sensor, the sensor is installed on the same door, and the same door is installed in the connecting channel 11 of the door, the sensor control is the same door or with.
  • Work, 1 Each connected connection channel 11 is connected to each other, or needs to be connected to a certain phase, or to the phase connection channel 11, the sensor to or the same door control, or the connection channel 11 to the connected life.
  • the connection window is connected, the top end of the rest 11 or the bottom connection 1 is connected, Hugh, and the rest of the 11 is connected to the top.
  • the front part of the passage 11 has a window 1 connected and connected, and the bottom part of the rest 11 on the bottom of the rest 11 also has a window 1 connected and connected, and the window 1 is connected to the rest.
  • the 1st phase is connected. Since the surface of the window 1 is transparent, the window 1 can see the part of the 1 in front of the connection channel 11, so the window 1 can be connected to the home or the connection channel 11 can be operated.
  • the sensor of the same door device is installed on the transparent window of the window of the 1st phase, the sensor can be connected, or the channel 1 is connected, the sensor is photometrically or the same door is controlled by the same door.
  • the inner wall of the rest 11 has the same internal strength, and the rest 1 has the same strength and is strong.
  • the internal strength 1 and the external strength effectively increase the strength, making the strength of the present multi-day 1 reliable.
  • the multi-sleep 1 near control, the rest control bracket 1 1 , the special 1 mounted on the bracket 1 1 , and
  • bracket 1 1 is connected, bracket 1 1 is matched with the screw 1 a on the bracket 1 1 and the 1 a on the top 1 1 1 is fixed on the top 1 of the unit.
  • Work, or special 1 , special 1 1 see bracket 1 1 special, while rest 1 rest 11 or the same, rest 1 phase in the same 11 rest, the screw 1 b on the rest 1 b 1 on the top 1 match Hugh 1 is in the same seal as Hugh 11.
  • Hugh, Hugh 1 has a transparent window 1 .
  • Window 1 measures the working condition of and or .
  • rest 11 is installed on the base 16, the screws 13b 21b are matched, and the rest 13 is sealed in the 211 seal so that the 14 forms a seal, and the 41 joints on the rest 15 are connected to each other. , its connection channel 411 is also on
  • Each phase is connected, and it is necessary to connect the same door 43 of each of the upper and lower intermediates 41, the same door in the control core 41, the upper and upper connecting channels 411 to 14, and the connecting channels to the respective connected 41.
  • the sensor 53 mounted on the phase window 51 is connected to the indoor connection channel 411, and the same door device 43 of the control 41 is on
  • connection channel 411 of the upper 41 is in the middle of each of the media, and the work of each of the different activities will be completed. Among them, the number of the rest of the day 1 and the hand bag, the device and the special 17,
  • Special 1 control unit need or, device control, 1 or 1 connection channel 11 to another 1 Connect the channel 1 1 inside.
  • Special 1 control unit need or, device control, 1 or 1 connection channel 11 to another 1 Connect the channel 1 1 inside.
  • device control since there are a total of 41 connected in the present, it is possible to use any of them in the other or in the other.
  • the rest of the rest of the day 1 has a number of connected 1, unhealed, and many connected to each other, and the same and redundant, with the same internal utilization rate, can be more Each connected.
  • this one-seat 1 tablet can be connected with multiple specifications and multi-god functions, making the compatibility of the multi-day 1 good, multi-functional, or different in different functions. Tongfang is fast, compatible, and versatile. Therefore, the present multi-day 1 is effective and the same as the redundant, redundant and redundant, with, internal high utilization, sealed, multi-connected compatibility, multi-functional, and effective Shrinking the ground.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)
  • Manipulator (AREA)

Abstract

Multistage mechanical conveying module chamber is used for the moving of a mechanical arm among manufacturing apparatuses. The chamber has a chamber top cover (13), a chamber main body (11), a supporting ring (12) and multiple side flanges (41). The chamber main body is a hollow structure to form a chamber (14) for the moving of the mechanical arm, a chamber opening (211) is set on the top of the chamber main body. A mechanical arm stretching inlet (311) is set on the bottom of the chamber main body and the supporting ring is installed thereinto. The mechanical arm hermetically penetrates the supporting ring and stretches into the chamber for the moving of the mechanical arm. The chamber top cover is pivoted on the chamber main body for sealing the chamber opening. The side flanges are installed on the side wall of the chamber main body, and the side flanges are flat plate-shaped and equipped with connecting passages through the side flanges and in communication with the chamber for the moving of the mechanical arm. The chamber has a compact structure, high internal space utilization rate and better air tightness. The chamber has good compatibility to connect with many manufacturing apparatuses and effectively reduce area occupation of whole production line.

Description

休 木領域  Hugh wood field
本 涉及 多 休, 尤其涉及 于 各 同 或 的和 的 提供密封 同的 各。 背景 木  This is related to multiple breaks, especially when it comes to the same or the same. Background
在 休行止、 屯子工 及 領域的 工 各中, 半成 同的 也是很重要的 部分。 它 到提高 的原量及合格 的重要 因素 , 也是降低 成本重要因素 。 因此, 在 用地的成本日 益增 的今天, 越未越重視 各的 同利用率, 減少 土地的使 用量, 以降低 戶戶 的成本, 而提高 在 中 爭力。 但是, 上的 各普遍存在以下的  Semi-conformity is also an important part of the work of rest, work, and work. It is also an important factor in reducing the cost to the original quantity and the important factors of the qualification. Therefore, as the cost of land is increasing, the more attention is paid to the utilization rate, the reduction of land use, and the reduction of household costs, and the increase in competitiveness. However, the following are common
目前, 在 統中, 各 般都是羊 羊 的工作模式, 都是通 介工序 介 各 的 。 統的 統相 , 統 的 休 般都是 介 休 各, 即在 , 只能 休將 介 各 未的 各在 休內 另 介 各。 因而, 在 流水域的生 中, 了能滿足 的流水 域 要求, 尤其是滿足 工序 繁多的 休 的生 要求, 需要許 多 休和 各 責完成各工序的生 各 同的 以 流 水域 目的。 方面由于 休行止較多的工序步驟, 需要大量的 和 各 和 的 , 增 了制造和使用 休和 各的成本 另 方面使得 各占用了大量的土地資源, 增 了 土地的使用成本, 而增 了 的生 成本以及降低 在 上 爭 力。 另, 由于 休是 某 半 休 的流水域 要求而涉及制定的, 休 更新換代 , 于 休 上的大多 休不能 新的 休 的 要求, 而使得 各的兼容性 。  At present, in the system, the working mode of sheep and sheep is generally the same as the introduction process. The unification of the system, the system of the rest of the system is the same as the rest, that is, only in the rest of each of the rest of the rest. Therefore, in the flow of water, there are requirements for the flow of water that can be met, especially for the requirements of the many processes, and it is necessary to have a lot of rest and the responsibility of each process. In terms of the number of process steps that are required to be suspended, a large number of processes are required, and the cost of manufacturing and use is increased. In addition, the cost of each land is increased, and the cost of using the land is increased. Generate this and lower the competition. In addition, since Hugh is involved in the formulation of the flow area of a certain half-time, the rest is replaced, and most of the rest on the Hugh can not meet the requirements of the new Hugh, which makes each compatibility.
因此, 急需要 、 內部 同利用率高、 多 各相連的、 兼容性 的 休。 內容 Therefore, there is an urgent need, and the internal utilization rate is high, and each is connected. The rest of the compatibility. content
本 的目的在于提供 、 內部 同利用率高、 多 各相連兼容性好、 能有效縮小 的 地面 的 于 各 同 或 的和 的 提供密封 同的 各。  The purpose of this is to provide a seal that is compatible with each other and that has a high internal utilization ratio, a good compatibility with each other, and an effective reduction in the ground.
了 上 目的, 本 的 木 多 休, 于 各 同 或 的和 的 提供密封 同, 多 休 休 、 休 休、 支撐 及多 , 休 休 中空 , 中空 形成 , 休 休上 端升 有 休 , 休 休下端升 有 伸 口, 支撐 安裝 于 伸 口內, 密封 支撐 伸  For the purpose, this wood multi-purpose, in the same or the same to provide the same seal, more rest, rest, support and more, rest, hollow, hollow formation, rest on the upper end of the rest, rest at the end of the Extend, support installed in the mouth, seal support
, 休 接于 休 休上 密封 休 ,  , rest on the rest of the rest of the day ,
平板 具有連接通道, 連接通道貫穿 ,  The flat plate has a connecting passage, and the connecting passage runs through,
安裝于 休 休的 壁上, 連接通道 連通。 Installed on the wall of the rest, the connecting channel is connected.
較佳 , 休 休 上 、 具有所 休 的頂部 、 下 、 具有所 伸 口的底部 及 休 , 上 于 休 上端的內壁上, 頂部 于 上 的內側 下  Preferably, on the rest, with the top and bottom of the rest, the bottom with the extended mouth and the rest, on the inner wall of the upper end of the rest, and the top of the upper side
于 休 部下端的內壁上, 底部 于 下 的內側  On the inner wall of the lower end of the rest, the inner side of the bottom
安裝于 休 部的 壁上。 , 使得 多  Installed on the wall of the rest. Make more
休密封性能更好。  The sealing performance is better.
較佳 , 均勻分布于 休 休的 壁上。 其中,  Preferably, it is evenly distributed on the wall of the rest. among them,
相連的生 各也以 休 中 安裝在 休 周, 使得 上的 各 、 規律。  The connected students are also installed in the rest of the week, so that they are on the rules.
較佳 , 上近具有連接 , 連接 端  Preferably, the upper side has a connection, the connection end
的連接通道連通, 另 端 休 休的 連接  The connection channel is connected, and the other end is connected.
連通。 連接 使得 突出的安裝于 休的 壁上, 使 得 方 的連接在 各上, 使成 和半成 方 的 的連接通道 到 各上。 Connected. The connection is such that the protruding is mounted on the wall of the Hugh so that the squares are connected to each other, making the semi-finished Connect the channels to each.
較佳 , 上近 有同門裝置, 同門裝置 同門、 同 及 感器, 感器安裝于 休 休上 同門 連接, 同門安裝于 的連接通道內, 感器控制所  Preferably, the upper door has the same door device, the same door device has the same door, the same sensor, and the sensor is installed on the rest of the same door, and the same door is installed in the connecting channel, the sensor control center
同門 或 同。 工作 , 各相 連 連接通道 各相連通, 的 或 需要 到某 生 各 , 將 或 到相 的連接通道, 感 器 到 或 , 而控制所 同門 同門 , 或 連接通道到 相連的生 各。  Same door or same. Work, each of the connecting channels are connected to each other, or need to be connected to each other, to or to the phase of the connecting channel, to the or the same door, or to connect the channel to the connected.
較佳 , 休 休的內壁 同 有內 強 , 休 連接 管 同近 有外 強 。 內 強 和外 強 可靠的 強了 多 休的強度。  Preferably, the inner wall of the rest has the same inner strength, and the rest of the connecting tube is strong and strong. Internal strength and external strength are strong and strong.
較佳 , 休 休的頂部和底部相 的位置上分別 有  Preferably, the top and bottom phases of the rest are respectively
目相 的多 窗口 , 窗口 的 面呈透明 , 窗口 連通 于 連接通道 前。 窗口 可以 到戶 或 連接通道的 。  The multi-window of the eye, the face of the window is transparent, and the window is connected to the front of the connecting channel. The window can be connected to the home or connected to the channel.
較佳 , 窗口 上近具有連接 , 連接 管分別 休 休的頂部和底部連接 連通。 窗口 連 接 窗口 方 定地連接到 休 休上。  Preferably, the window has a connection near the top, and the top and bottom of the connecting tube are respectively connected to each other. The window connection window is connected to the rest of the window.
較佳 , 多 休近 控制 , 休 控 制 支架、 安裝在支架上的特 和 ,  Preferably, multiple rest control, rest control bracket, special mounting on the bracket,
支架 接, 支架 頂部 固定連接, 特 控制所  Bracket connection, bracket top fixed connection, special control office
支架特 。 需要多 休或者 休內的和 , 特 特 , 特 ,  Bracket special. Need more rest or rest, and special, special,
休 支架特 , 而控制所 休 。  Hugh brackets, and the control is closed.
較佳 , 休 蓋上具有 窗口。 可以 窗口 測和 或 的工作狀況。  Preferably, the cover has a window. The window can be used to measure the working condition of or .
木相比, 本 明多 休的 休 休的 壁上 有若干 各相連的 , 未 和 的和 , 多 相連 各 同 和 的相互 , 了多余的 同和多 余的 各, 具有 、 內部 同利用率高、 多 各相連、 兼 容性 。 另 方面, 本 的多 休 壁上的 Compared to the wood, the wall of the Ming Dynasty rests on the wall There are a number of connected, unharmonized and multi-connected mutual and identical, redundant and identical, with internal, high utilization, multiple connections, and compatibility. On the other hand, this is on the wall
平板 , 可以和多神生 各相連接, 使得本 明多 休 的兼容性好, 可以 多功能 各于 休, 或 在多神不同功能的 生 各 同方 快捷的 , 有效地 了多余的 同、 多余的 各和 多余的 同。 因此, 本 明多 休 、 內部 同 利用率高、 密封 好、 多 各相連兼容性好、 多功能 各于 休, 能有效縮小 的 地面 。 說明 The tablet can be connected with many gods, so that the compatibility of the Ming and the rest is good, and it can be multi-functional, or in the different functions of the gods, and the extras are redundant and effective. Each and the same is the same. Therefore, the present multi-purpose, internal high utilization rate, sealed, multi-connected compatibility, multi-functional rest, can effectively reduce the ground. Description
1是本 明多 休 底座連接的 示意囤。  1 is a schematic diagram of the connection of the base of the present.
是本 明多 休 底座連接的另 示意囤。 是本 明多 休的分解示意囤。 It is another indication of the connection of the base of the present. It is an explanation of the decomposition of the present.
a是本 明多 休的 示意囤。 a is a schematic representation of the rest of the day.
b是本 明多 休的另 示意囤。 b is another indication of the rest of the day.
c是本 明多 休的 示意囤。 休 方式 c is the indication of the multiples of this book. Hugh way
1、 2及 3所示, 本 明多 休1, 于 各 同 或 的和 的 提供密封 同, 多  As shown in 1, 2 and 3, the present disclosure is more than one, and the seals of the same or the same are provided.
休1 休 1 、 休 休11、 支撐 1 及多 1, 休 休11 中空 , 中空 形成 1 , 休 休11上端升 有 休 11, 休 休1 端升 有 伸 口 11, 支撐 1 安裝于 伸 口 11 內, 密封 支撐 1 伸 1 , 休 1 接于 休 休11上 密封 休 11, 休 ,通 特 具有 的特 1 休 1 支架 1 1特 , 而 休 1 休 11的密封 同或 , 1 平板 具有連接通道 11, 連接通道 11貫穿Hugh 1 rest 1, rest 11, support 1 and more 1, rest 11 hollow, hollow formation 1, rest 11 upper end lift 11, rest 1 end rise with extension 11, support 1 installed in the extension 11 , Sealing support 1 extension 1, Hugh 1 is connected to the rest of the 11th seal, 11 rest, Hugh, Tongte has a special 1 rest 1 bracket 1 1 special, and the rest of the rest 1 is the same as the seal, 1 the plate has the connecting passage 11, and the connecting passage 11 runs through
1, 1安裝于 休 休11的 壁上, 連 接通道 11 1 連通。 更具休 , 結合 4a、 4b及 4c 所示,  1, 1 is installed on the wall of the recess 11, and the connecting passage 11 1 is connected. More rest, as shown in 4a, 4b and 4c,
較佳者, 休 休11 上 、具有所 休 11的頂部 1、 下 、 具有所 伸 口 的底部 及 休 , 上 于 休 1 上端的內壁上, 頂部 1 于 上 的內側 所述下 于 休 1 下端的內壁上, 底部 1 于所述下 的內側 1安裝于 休 1 的 壁上。 , 多 休1 休 上  Preferably, on the rest 11, the top 1, the bottom with the rest 11, the bottom with the mouth and the rest, on the inner wall of the upper end of the rest 1 and the top 1 on the inner side of the upper side On the inner wall of the lower end, the bottom 1 is attached to the wall of the rest 1 on the inner side 1 of the lower side. , rest on 1 off
頂部 1、 及 接于 休 休11上的 休 1 使得 休的頂部 密封, 通 下 、 底部 1、 及密封 支撐 1 的和 使得 休的底部密封, 最終形成 介密封的和 1 , 使 多 The top 1 and the rest 1 on the rest 11 make the top of the Hugh seal, the bottom, the bottom 1, and the seal support 1 so that the bottom of the Hugh seals, eventually forming a seal and 1
休1密封性能更好。  Hugh 1 has better sealing performance.
較佳者, 1 均勻分布于 休 休 11 的 壁上。 的 休的 休布局規律、 , 1相連的生 各也 以 休 中 安裝在 休 周, 有效地提高了 同利用率。  Preferably, 1 is evenly distributed over the wall of the recess 11. The layout of the rest of the Hugh, and the 1 connected students are also installed in the rest of the week, effectively improving the utilization rate.
較佳者, 1上近具有連接 , 連接 端 Preferably, 1 has a connection, the connection end
1的連接通道 11連通, 另 端 休 休 11的 連接 1 connection channel 11 is connected, the other end is closed 11
1 連通。 將 1 固定在所 休 休11的 壁上。 連接 使得 1 突出的安裝于 休的 壁上, 使得 1的另 方 的連接在 各上, 而成 和半成 方 的 1的連接通道 11 到 各上。  1 Connected. Fix 1 on the wall of rest 11 . The connection is such that the 1 protruding portion is mounted on the wall of the rest so that the other one of the 1 is connected to each of the connecting passages 11 of the one and the half of the square 1 to each.
較佳者, 1上近 有同門裝置, 同門裝置 同門 ( 中未 )、 同門 及 感器 , 感器 安裝于 休 休上 同門 連接, 同門安裝于 1 的連接通 道 11 內, 感器 控制所 同門 或 同。 工作 , 1 各相連 連接通道 11 各相連通, 的 或 需要 到某 生 各 , 將 或 到相 的連接通道 11, 感器 到 或 , 同門 控制所 同門 , 或 連接通 道 11 到 相連的生 各。 Preferably, 1 has the same door device, the same door device has the same door (middle), the same door and the sensor, the sensor is installed on the same door, and the same door is installed in the connecting channel 11 of the door, the sensor control is the same door or with. Work, 1 Each connected connection channel 11 is connected to each other, or needs to be connected to a certain phase, or to the phase connection channel 11, the sensor to or the same door control, or the connection channel 11 to the connected life.
較佳者, 休 休 11上近 有多 1 的敬目相 的窗口 1和連接 , 連接 端 窗口 連接, 另 端 休 休 11 的頂部或底部連接 1 連通, 休 , 休 休11的頂部上 于 連接通道 11 前的部位上 有 連接 和 連接 相連的窗口 1, 相 的, 休 休 11的底部 上 休 休11的頂部相 的部位上也 有連接 和 連接 相連的窗口 1, 而使 窗口 1 連接 連接到 休 休11上 1 相連通, 由于 窗 口 1的 面呈透明 , 窗口 1可以看到 1 中 于 連接通道 11 前的部位, 因此可以 窗口 1 到戶 或 連接通道 11 的工作 。 更具休 , 同門裝置的 感器 安裝在 1相 的窗口 1的 透明 的窗口上, 感器 可 感器, 或 連接通道 1 , 感器 光度 化 的 或 的 , 而控制 連接的同門 同門 。  Preferably, there are nearly 1 eye-catching window 1 and connection on the 11th of the rest, the connection window is connected, the top end of the rest 11 or the bottom connection 1 is connected, Hugh, and the rest of the 11 is connected to the top. The front part of the passage 11 has a window 1 connected and connected, and the bottom part of the rest 11 on the bottom of the rest 11 also has a window 1 connected and connected, and the window 1 is connected to the rest. On the 11th, the 1st phase is connected. Since the surface of the window 1 is transparent, the window 1 can see the part of the 1 in front of the connection channel 11, so the window 1 can be connected to the home or the connection channel 11 can be operated. More rest, the sensor of the same door device is installed on the transparent window of the window of the 1st phase, the sensor can be connected, or the channel 1 is connected, the sensor is photometrically or the same door is controlled by the same door.
較佳者, 1 休 休11的內壁 同 有內 強 1, 休 1 連接 同近 有外 強 。 內 強 1和外 強 有效地 強了 各的強度, 使得本 明多 休1的 強度可靠。  Preferably, the inner wall of the rest 11 has the same internal strength, and the rest 1 has the same strength and is strong. The internal strength 1 and the external strength effectively increase the strength, making the strength of the present multi-day 1 reliable.
較佳者, 多 休 1 近 控制 , 休 控制 支架 1 1、 安裝在支架 1 1上的具有 的特 1 、 及 Preferably, the multi-sleep 1 near control, the rest control bracket 1 1 , the special 1 mounted on the bracket 1 1 , and
1 , 1 支架 1 1 接, 支架 1 1 在支架 1 1上的螺釘1 a和 頂部 1上的 1a相配合, 將 支架 1 1 固定在所 頂部 1上。 工作 , 或 特 特 1 , 特 1 1 看 支架 1 1特 , 而 休 1 休 11的 同或 其中, 休 1 相 于 休 11 同 , 休 1 上的螺釘1 b 頂部 1 上的 1b相配合,使得 休 1 相 于 休 11密封同合。 休 , 休 1 上具有 透明 的 窗口 1 。 可以 1 , 1 bracket 1 1 is connected, bracket 1 1 is matched with the screw 1 a on the bracket 1 1 and the 1 a on the top 1 1 1 is fixed on the top 1 of the unit. Work, or special 1 , special 1 1 see bracket 1 1 special, while rest 1 rest 11 or the same, rest 1 phase in the same 11 rest, the screw 1 b on the rest 1 b 1 on the top 1 match Hugh 1 is in the same seal as Hugh 11. Hugh, Hugh 1 has a transparent window 1 . can
窗口 1 測和 或 的工作狀況。 Window 1 measures the working condition of and or .
結合 1和 2說明本 明多 休1的工作  Combine 1 and 2 to illustrate the work of this week
多 休 1工作 , 休 休 11安裝在底座 16上, 螺釘13b 21b相配合, 休 13相 于 休 211 密封同合使得 14形成 介密封的 同, 于 休 15 上的多 41分別 相 的生 各相連, 其連接通道411也 上  Multiple rest 1 work, rest 11 is installed on the base 16, the screws 13b 21b are matched, and the rest 13 is sealed in the 211 seal so that the 14 forms a seal, and the 41 joints on the rest 15 are connected to each other. , its connection channel 411 is also on
各相連通, 需要將 介 各中的 到 另 介 各中 上 第 介 各相連的 41 的同門 43 , 控制 核 41 內的同門 , 上 上 連接通道411 到 14中, 到 介 各相連 41 的連接通道411 中, 安裝在相 窗口 51上的 感器 53 到戶 上 連接通道411, 控制 41的同門 裝置43 于上  Each phase is connected, and it is necessary to connect the same door 43 of each of the upper and lower intermediates 41, the same door in the control core 41, the upper and upper connecting channels 411 to 14, and the connecting channels to the respective connected 41. In 411, the sensor 53 mounted on the phase window 51 is connected to the indoor connection channel 411, and the same door device 43 of the control 41 is on
內的同門, 上 41的連接通道411 到 介的生 各中, 完成將 介 各 本 明多 休 1 到 另 介的生 各的工作。 其中, 本 明多 休 1 涉及的 和 手包 了 、 裝置和 特 17, Inside the same door, the connection channel 411 of the upper 41 is in the middle of each of the media, and the work of each of the different activities will be completed. Among them, the number of the rest of the day 1 and the hand bag, the device and the special 17,
特 17相連接, 17 固定安裝在所 支撐 1 , 17具有 部的 端密封  Special 17-phase connection, 17 fixedly mounted on the support 1 , 17 with end seal
伸 口 11 伸 1 內, 裝置  Extension 11 extension 1 inside, device
特 1 特 控制所 部的 ,需要 或 , 裝置 控制所 特 1 , 將 或 介 1的連接通道 11 內 到另 介 1的 連接通道 1 1 內。 另, 由于本 中共有 各相連的 41, 因此可以將其中任意 介 各中的 或 到另外 各 中。 Special 1 control unit, need or, device control, 1 or 1 connection channel 11 to another 1 Connect the channel 1 1 inside. In addition, since there are a total of 41 connected in the present, it is possible to use any of them in the other or in the other.
本 的多 休1的 休 休1 1的 壁上具有若干 各相連的 1, 未 和 的和 , 多 相連 各 同 和 的相互 , 了多余的 同和多余的 各, 具有 、 內部 同利用率高、 可 多 各相連的 。 另 方面, 本 的多 休1的 1 平板 , 可以 多 規格多神功能的生 各相連接, 使得本 明多 休 1 的兼容性好, 多功能 各于 休, 或 在多神不同功能的生 各 同方 快捷的 , 具有兼容性 , 多功能 各于 休的 。 因此, 本 明多 休 1 有效地 了 和 中多余 的 同、 多余的 各和多余的 同, 具有 、 內部 同利用率 高、 密封 好、 多 各相連兼容性好、 多功能 各于 休, 能 有效縮小 的 地面 的 。  The rest of the rest of the day 1 has a number of connected 1, unhealed, and many connected to each other, and the same and redundant, with the same internal utilization rate, can be more Each connected. On the other hand, this one-seat 1 tablet can be connected with multiple specifications and multi-god functions, making the compatibility of the multi-day 1 good, multi-functional, or different in different functions. Tongfang is fast, compatible, and versatile. Therefore, the present multi-day 1 is effective and the same as the redundant, redundant and redundant, with, internal high utilization, sealed, multi-connected compatibility, multi-functional, and effective Shrinking the ground.
本 的多 休 1 涉及的的和 裝置、 需要 熟 的, 在此不再做 的說明。 然, 本 明中 各相連的 的數目可以 需要 , 例 本 中 通道的數量力 , 需要可以是 、 , 也可以是 , 等 。  This section of the rest of the 1 and the device, need to be familiar, no longer do the description here. However, the number of connections in the present invention may be required, and the number of channels in the example may be, or may be, etc.
以上 揭露的 力本 的 而已, 然不能以此未限定本 明 , 因此依本 固所作的等同 化, 仍 本 涵蓋  The above-mentioned disclosure of the power of this, but can not be unrestricted, so the equivalent of this, still covered

Claims

要 求 1、 多 休, 于 各 同 或 的 的 提供密封 同, 其特 在于 多 休 休 、 休 休、 支撐 及多 , 休 休 中空 , 中空 形成 , 休 休上端升 有 休 , 休 休下端升 有 伸 口, 支撐 安裝于 伸 口  Requirements 1, multiple rest, in the same or provide the same seal, it is characterized by multiple rest, rest, support and more, rest and hollow, hollow formation, rest on the upper end of the rest, rest at the lower end of the mouth , the support is installed at the mouth
密封 支撐 伸 , 休 接于 休 休上 密封 休 , 平板 具有連接通道, 連接通道貫穿 , 安裝于 休 休的 壁上, 連接通道 連通。  The sealing support extends and rests on the rest of the rest. The flat plate has a connecting passage, the connecting passage runs through, and is installed on the wall of the rest, and the connecting passage is connected.
、 要求1 的多 休, 其特 在于 休 休 上 、 具有所 休 的頂部 、 下 、 具有所 伸 口 的底部 及 休 , 上 于 休 上端的內壁上, 頂部 于 上 的內側, 下 于 休 部下端的內 壁上, 底部 于 下 的內側, 安裝于 休 部的 壁上。  Requirement 1 of multiple rest, which is characterized by rest, with the top and bottom of the rest, the bottom with the mouth and the rest, the upper wall of the upper end, the top of the upper side, the lower part of the lower part On the inner wall, the bottom is on the lower inner side and is mounted on the wall of the rest.
、 要求1 的多 休, 其特 在于  , the number of requests for 1 is characterized by
均勻分布于 休 休的 壁上。 Evenly distributed on the wall of the rest.
、 要求1 的多 休, 其特 在于 近 同 裝 置, 同 裝置 同 、 同 及 感器, 感器安裝于 休 休上 同 連接, 同 安裝于 的連 接通道 感器控制所 同 或 。 、 要求1 的多 休, 其特 在于 The request 1 has multiple rests, which are characterized by the same device, the same device, the same sensor, and the sensor is installed on the rest, and is connected with the connected channel sensor. Request for a multiple break, which is
上近具有連接 , 連接 端 的連接通道連通, 另 端 休 休的 連接 連通。 The upper side has a connection, the connection channel of the connection end is connected, and the other end of the connection is connected.
、 要求 的多 休, 其特 在于  The required rest, the special feature
休 休的內壁 同 有內 強 , 休 連接 管 同 有外 強 。  The inner wall of the rest has the same strength as the inner wall of the rest.
、 要求1 的多 休, 其特 在于 休 休 的頂部和底部相 的位置上分別 有 目相 的多 窗口 , 窗口 的 面呈透明 , 窗口 連通 于 連接通道 前。  The request 1 has a multi-window with the appearance of the top and bottom phases of the rest, the surface of the window is transparent, and the window is connected to the front of the connecting channel.
、 要求 的多 休, 其特 在于 窗口 上近具有連接 , 連接 管分別 休 休的頂部和底部連接  The required rest, which is characterized by a connection on the window and a connection between the top and bottom of the connection tube.
連通。  Connected.
、 要求1 的多 休, 其特 在于 近 控 制 , 休 控制 支架、 安裝在所 支架上的特 和  , the request for 1 rest, which is characterized by the near control system, the rest control bracket, and the special installation on the bracket.
, 支架 接, 支架 頂部 固定連 接, 特 控制所 支架特 。 1 0、 要求 1 的多 休, 其特 在于 休 蓋上具有 透明 的 窗口。  The bracket is connected, the top of the bracket is fixedly connected, and the bracket is specially controlled. 1 0. Requirement 1 has a special break, which is characterized by a transparent window on the cover.
PCT/CN2009/073414 2009-06-26 2009-08-21 Multistage mechanical conveying module chamber WO2010148582A1 (en)

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CN104952777A (en) * 2015-04-29 2015-09-30 沈阳拓荆科技有限公司 Observable wafer conveying cavity structure of semiconductor thin film equipment
CN104882396A (en) * 2015-04-29 2015-09-02 沈阳拓荆科技有限公司 Transparent cover plate structure of wafer transfer chamber of semiconductor film equipment
WO2020228029A1 (en) * 2019-05-16 2020-11-19 深圳市大疆创新科技有限公司 Detachable robot
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