CN101642909A - Cavity body for multistage mechanical transmission module - Google Patents
Cavity body for multistage mechanical transmission module Download PDFInfo
- Publication number
- CN101642909A CN101642909A CN200910040586A CN200910040586A CN101642909A CN 101642909 A CN101642909 A CN 101642909A CN 200910040586 A CN200910040586 A CN 200910040586A CN 200910040586 A CN200910040586 A CN 200910040586A CN 101642909 A CN101642909 A CN 101642909A
- Authority
- CN
- China
- Prior art keywords
- cavity
- flange
- manipulator
- cavity body
- transmission module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)
- Manipulator (AREA)
Abstract
The invention provides a cavity body for a multistage mechanical transmission module, which is used for moving a manipulator between different kinds of production equipment. The cavity body comprisesa top cover of the cavity body, a main body of the cavity body, a supporting ring and a plurality of lateral flanges, wherein the main body of the cavity body is a hollow structure; the hollow structure forms a movable cavity of the manipulator; the upper end of the main body of the cavity body is provided with an opening of the cavity body; the lower end of the main body of the cavity body is provided with an extending port of the manipulator; the supporting ring is installed in the extending port of the manipulator; the manipulator hermetically penetrates through the supporting ring and extends into the movable cavity of the manipulator; the top cover of the cavity body is pivoted on the main body of the cavity body and the opening of the cavity body is sealed; the lateral flanges are flat and are provided with connection channels; the connection channels penetrate through the lateral flanges; the lateral flanges are installed on the lateral wall of the main body of the cavity body and the connection channels are communicated with the movable cavity of the manipulator. The cavity body has compact structure, high usage rate of internal space and good sealing performance, is connected with a plurality of kinds of production equipment with good compatibility, has multifunctional equipment and can effectively reduce the occupying area of the integral production line.
Description
Technical field
The present invention relates to a kind of cavity body for multistage mechanical transmission module, relate in particular to a kind of bundling transmission apparatus that is used to the activity that works the manipulator that transmits product or half product between the production equipment that the sealing transmission space is provided.
Background technology
In the processing cluster equipment of semicon industry, electronics industry and mechanical field, the transmission between product and the semi-finished product also is a very important part.Because it is related to one of the quality that improves product and key factor of qualification rate, also be to reduce one of enterprise's production cost key factor.Therefore, in today that the cost of enterprise's land used increases day by day, enterprise more and more payes attention to the space availability ratio of transmission equipment, reduces the use amount of enterprise to the soil, reducing the cost that enterprise produces product, thereby improves enterprise's competitiveness in market.But, the shortcoming that the transmission equipment ubiquity on the market is following:
At present, in transmission system, transmission equipment generally all is single to single right mode of operation, all is to carry out the transmission of product by the corresponding transmission equipment of an operation.Corresponding with traditional transmission system, traditional transmission cavity generally all is corresponding two production equipments of transmission cavity, promptly when the transmission of the product of biography, can only will in the transmission cavity, be transferred to another production equipment by transmission equipment from the product that a production equipment comes out by the transmission cavity.Thereby, in the production process of product production line, in order to satisfy the streamline production requirement of product, especially satisfy the production requirement of the miscellaneous semiconductor product of production process, need many transmission cavitys and transmission equipment to go to be responsible for to finish product transmission between the production equipment of each operation to realize streamline production operation purpose.This is on the one hand owing to the more process of semicon industry, and the transmission that needs a large amount of transmission cavity adapter cavities and transmission equipment to remove to carry out product and half product has increased the cost of making and use transmission cavity and transmission equipment; Make transmission equipment take a large amount of land resource on the other hand, increased the use cost in soil, thereby increased the production cost of enterprise product and reduced enterprise's competitiveness on market.In addition, owing to the transmission cavity is that pipelining at a certain semiconductor product requires to relate to formulation, after this semiconductor product updates, the great majority transmission cavity that is applied on this semiconductor product can not be suitable for the transmission requirement of new semiconductor product, thereby makes the poor compatibility of transmission equipment.
Therefore, be badly in need of wanting a kind of compact conformation, inner space utilization rate height, transmission cavity that link to each other with many production equipments, compatible strong.
Summary of the invention
The object of the present invention is to provide a kind of compact conformation, inner space utilization rate height and the compatible activity that works the manipulator that transmits product or half product between the production equipment that is used to good, the floor space that can effectively dwindle whole production line that can link to each other with many production equipments provides the bundling transmission apparatus of sealing transmission space.
To achieve these goals, technical scheme of the present invention is: a kind of cavity body for multistage mechanical transmission module, be used to the activity that works the manipulator that transmits product or half product between the production equipment that seal cavity is provided, described cavity body for multistage mechanical transmission module comprises the cavity top cover, chamber body, support ring and a plurality of side-flange, described chamber body is hollow structure, described hollow structure forms the movable chamber of manipulator, described chamber body upper end offers cavity hatch, described chamber body lower end offers manipulator and stretches into mouth, described support ring is installed on described manipulator and stretches in the mouth, the described support ring of described manipulator hermetically passing also stretches into the movable chamber of described manipulator, described cavity top cover is articulated on the described chamber body and seals described cavity hatch, described side-flange is tabular and has interface channel, described interface channel runs through described side-flange, described side-flange is installed on the sidewall of described chamber body, and described interface channel is communicated with the movable chamber of described manipulator.
Preferably, described chamber body comprises upper cover, has the top flange of described cavity hatch, low head, have flange in the bottom and cavity sidepiece that described manipulator stretches into mouthful, described upper cover is sheathed on the inwall of described cavity sidepiece upper end, and described top flange is sheathed on the inboard of described upper cover; Described low head is sheathed on the inwall of described cavity side subordinate's end, and described flange in the bottom is sheathed on the inboard of described low head; Described side-flange is installed on the sidewall of described cavity sidepiece.Like this, make that described cavity body for multistage mechanical transmission module sealing property is better.
Preferably, described side-flange is uniformly distributed on the sidewall of described chamber body.Wherein, the production equipment that links to each other with described side-flange is that the center is installed in around the cavity with described cavity also, makes compact equipment, rule on the whole production line.
Preferably, also have connecting duct on the described side-flange, described connecting duct one end is communicated with the interface channel of described side-flange, and the other end is connected with the sidewall of described chamber body and is communicated with the movable chamber of described manipulator.Described connecting duct makes and make that like this side-flange is connected on the production equipment easily, and the interface channel that makes finished product and semi-finished product pass described side-flange easily is transferred on the production equipment on the outstanding sidewall that is installed on described cavity of side-flange.
Preferably, also be provided with valve system on the described side-flange, described valve system comprises gate, gate driving mechanism and sensor, described sensor is installed on the described chamber body and with described gate driving mechanism and is electrically connected, described gate is installed in the interface channel of described side-flange, and described sensor is controlled described driving mechanism described gate is opened or closed.During work, described side-flange links to each other with described production equipment and described interface channel is connected with described production equipment, when the product that is transmitted or half product needed are transferred to a certain production equipment, manipulator is transferred to corresponding interface channel with product or half product, described sensor sensing is to being transmitted product or half product, thereby control described gate driving mechanism described gate is opened, product or half product pass this interface channel and arrive the production equipment that is attached thereto.
Preferably, be provided with interior reinforcement between the inwall of described support ring and described chamber body, also be provided with outer reinforcement between described cavity sidepiece and the described connecting duct.Interior reinforcement and outer reinforcement have been strengthened the intensity of described multistage transport module with cavity reliably.
Preferably, be respectively equipped with on the corresponding position in the top of described chamber body and bottom and the corresponding a plurality of window flanges of described side-flange number, the end face of described window flange is transparence, and described window flange is communicated with the movable chamber of described manipulator and is positioned at before the described interface channel.Can observe the transmission course that product or half product enter interface channel by described window flange.
Preferably, also have joint sleeve on the described window flange, described joint sleeve is connected with the bottom with the top of described chamber body respectively and is communicated with the movable chamber of described manipulator.Described window flange conveniently stably is connected on the described chamber body described window flange by described joint sleeve.
Preferably, described multistage transport module also comprises the top cover controlling organization with cavity, described cavity top cover controlling organization comprises support, rack-mount runner and top cover transmission mechanism, described top cover transmission mechanism and described support articulate, described support is fixedlyed connected with described top flange, and described runner is controlled described top cover transmission mechanism and rotated around described support.When the multistage transport module of needs during with the manipulator in cavity or this cavity, rotate described runner, described runner drives described top cover transmission mechanism, and described top cover transmission mechanism drives described cavity top cover and rotates around described support, opens thereby control described cavity top cover.
Preferably, has watch window on the described cavity top cover.Can transmit the working condition of product or half product by described watch window observation manipulator.
Compare with conventional art, has the side-flange that several link to each other with production equipment on the sidewall of the chamber body of cavity body for multistage mechanical transmission module of the present invention, the auxiliary manipulator that is used for transmitting product and half product, realize carrying out between many associated devices the mutual transmission of product and half product, saved unnecessary space and unnecessary transmission equipment, had compact conformation, inner space utilization rate height, link to each other, compatible strong advantage with many production equipments.On the other hand, side-flange on the cavity body for multistage mechanical transmission module sidewall of the present invention is tabular, can be connected with multiple production equipment, make the compatible good of cavity body for multistage mechanical transmission module of the present invention, can integrate multifunctional equipment, realize that product or half product conveniently transmit between the production equipment of multiple difference in functionality, saved unnecessary space, unnecessary transmission equipment and unnecessary passing time effectively.Therefore, cavity body for multistage mechanical transmission module compact conformation of the present invention, inner space utilization rate height, good airproof performance and can link to each other with many production equipments compatible good, integrate multifunctional equipment, can effectively dwindle the floor space of whole production line.
Description of drawings
Fig. 1 is the structural representation that cavity body for multistage mechanical transmission module of the present invention is connected with base.
Fig. 2 is another structural representation that cavity body for multistage mechanical transmission module of the present invention is connected with base.
Fig. 3 is the decomposing schematic representation of cavity body for multistage mechanical transmission module of the present invention.
Fig. 4 a is the structural representation of cavity body for multistage mechanical transmission module of the present invention.
Fig. 4 b is another structural representation of cavity body for multistage mechanical transmission module of the present invention.
Fig. 4 c is the another structural representation of cavity body for multistage mechanical transmission module of the present invention.
The specific embodiment
As Fig. 1, Fig. 2 and shown in Figure 3, cavity body for multistage mechanical transmission module 1 of the present invention, be used to the activity that works the manipulator that transmits product or half product between the production equipment that seal cavity is provided, described cavity body for multistage mechanical transmission module 1 comprises cavity top cover 13, chamber body 11, support ring 12 and a plurality of side-flange 41, described chamber body 11 is hollow structure, described hollow structure forms the movable chamber 14 of manipulator, described chamber body 11 upper ends offer cavity hatch 211, described chamber body 11 lower ends offer manipulator and stretch into mouth 311, described support ring 12 is installed on described manipulator and stretches in the mouth 311, the described support ring 12 of described manipulator hermetically passing also stretches into the movable chamber 14 of described manipulator, described cavity top cover 13 is articulated on the described chamber body 11 and seals described cavity hatch 211, particularly, the runner 134 that has handle by hand rotation makes cavity top cover 13 rotate around support 131, thereby realize the hermetically closing or the unlatching of 13 pairs of cavity hatch 211 of cavity top cover, described side-flange 41 is tabular and has interface channel 411, described interface channel 411 runs through described side-flange 41, described side-flange 41 is installed on the sidewall of described chamber body 11, and described interface channel 411 is communicated with the movable chamber 14 of described manipulator.More specifically, shown in Fig. 4 a, Fig. 4 b and Fig. 4 c,
The preferably, described chamber body 11 comprises upper cover 22, has the top flange 21 of described cavity hatch 211, low head 32, have described manipulator and stretch into mouthfuls 311 flange in the bottom 31 and cavity sidepiece 15, described upper cover 22 is sheathed on the inwall of described cavity sidepiece 15 upper ends, and described top flange 21 is sheathed on the inboard of described upper cover 22; Described low head 32 is sheathed on the inwall of described cavity sidepiece 15 lower ends, and described flange in the bottom 31 is sheathed on the inboard of described low head 32; Described side-flange 41 is installed on the sidewall of described cavity sidepiece 15.Like this, described cavity body for multistage mechanical transmission module 1 cavity is by upper cover 22, top flange 21 and be articulated in cavity top cover 13 on the described chamber body 11 and make the top seal of described cavity, by low head 32, flange in the bottom 31, and the manipulator of the described support ring 12 of hermetically passing make the bottom sealing of cavity, the final movable chamber 14 of manipulator that forms a sealing makes described cavity body for multistage mechanical transmission module 1 sealing property better.
The preferably, described side-flange 41 is uniformly distributed on the sidewall of described chamber body 11.Such structure makes integral layout rule, the compactness of described cavity, and the production equipment that links to each other with described side-flange 41 is that the center is installed in around the cavity with described cavity also, has improved space availability ratio effectively.
The preferably also has connecting duct 42 on the described side-flange 41, and described connecting duct 42 1 ends are communicated with the interface channel 411 of described side-flange 41, and the other end is connected with the sidewall of described chamber body 11 and is communicated with the movable chamber 14 of described manipulator.Described side-flange 41 is fixed on the sidewall of described chamber body 11.Described connecting duct 42 makes on the outstanding sidewall that is installed on described cavity of side-flange 41, make the opposite side of side-flange 41 be connected on the production equipment easily like this, be transferred on the production equipment thereby finished product and semi-finished product pass the interface channel 411 of described side-flange 41 easily.
The preferably, also be provided with valve system on the described side-flange 41, described valve system comprises gate (not shown), gate driving mechanism 43 and sensor 53, described sensor 53 is installed on the described chamber body and with described gate driving mechanism 43 and is electrically connected, described gate is installed in the interface channel 411 of described side- flange 41, and 43 pairs of described gates of the described sensor 53 described driving mechanisms of control are opened or closed.During work, described side-flange 41 links to each other with described production equipment and described interface channel 411 is connected with described production equipment, when the product that is transmitted or half product needed are transferred to a certain production equipment, manipulator is transferred to corresponding interface channel 411 with product or half product, described sensor 53 is sensed and is transmitted product or half product, the described gate of described gate driving mechanism 43 controls is opened, and arrives the production equipment that is attached thereto when product or half product pass this interface channel 411.
The preferably, also be provided with the corresponding window flange 51 of number and the joint sleeve 52 of a plurality of and described side-flange 41 on the described chamber body 11, described joint sleeve 52 1 ends are connected with described window flange 51, the top of the other end and described the chamber body 11 or bottom is connected and be communicated with the movable chamber 14 of described manipulator, particularly, on the top of described the chamber body 11 and position that is positioned at before the described interface channel 411 is provided with joint sleeve 52 and the window flange 51 that links to each other with described joint sleeve 52, accordingly, also be provided with joint sleeve 52 and the window flange 51 that links to each other with described joint sleeve 52 on the bottom of described chamber body 11 and the corresponding position, the top of above-mentioned chamber body 11, thereby described window flange 51 is connected on the described chamber body 11 and with the movable chamber 14 of described manipulator by described joint sleeve 52 to be connected, again because the end face of described window flange 51 is transparence, see through described window flange 51 and can see in the movable chamber 14 of manipulator and be positioned at position before the described interface channel 411, therefore can observe the course of work that product or half product enter interface channel 411 by described window flange 51.More specifically, the sensor 53 of described valve system is installed on the window that is transparence with this side-flange 41 corresponding window flanges 51, and described sensor 53 can be photoelectric sensor, when product or half product during by described interface channel 41, the product that photoelectric sensor 53 is transmitted by induction luminosity variation sensing or the transmission state of half product, thus the described gate of the gate driving mechanism that control is electrically connected with it 43 drivings is opened.
The preferably, reinforcement 61 in being provided with between the inwall of described support ring 12 and described chamber body 11 also is provided with outer reinforcement 62 between described cavity sidepiece 15 and the described connecting duct 42.Interior reinforcement 61 and outer reinforcement 62 have been strengthened the intensity of equipment effectively, make that the intensity of cavity body for multistage mechanical transmission module 1 of the present invention is reliable.
The preferably, described multistage transport module also comprises the top cover controlling organization with cavity 1, described cavity top cover controlling organization comprises support 131, be installed in the runner with handle 134 on the support 131, and top cover transmission mechanism 133, described top cover transmission mechanism 133 articulates with described support 131, described support 131 matches by being arranged on screw 13a on the support 131 and the screw 21a on the described top flange 21, and described support 131 is fixed on the described top flange 21.During work, rotate described runner 134 clockwise or counterclockwise, described runner 134 drives described top cover transmission mechanism 133 and rotates around described support 131, thereby drives closing or opening of 13 pairs of cavity hatch 211 of described cavity top cover; Wherein, when described cavity top cover 13 was closed with respect to described cavity hatch 211, the screw 13b on the described cavity top cover 13 matched with screw 21b on the described top flange 21, makes described cavity top cover 13 with respect to described cavity hatch 211 seal closures.Particularly, has the watch window 132 that is transparence on the described cavity top cover 13.Can transmit the working condition of product or half product by described watch window 132 observation manipulators.
In conjunction with Fig. 1 and Fig. 2 the course of work of the multistage transport module of the present invention with cavity 1 is described:
When described multistage transport module is worked with cavity 1, described chamber body 11 is installed on the base 16, described screw 13b matches with described screw 21b, described cavity top cover 13 makes the movable chamber 14 of described manipulator form a sealed space with respect to described cavity hatch 211 seal closures, the a plurality of side-flange 41 that are positioned on the described cavity sidepiece 15 link to each other with corresponding production equipment respectively, its interface channel 411 also is connected with above-mentioned production equipment, when needs will be transferred to the product in the production equipment with another production equipment in the time, gate driving mechanism 43 actions of the side-flange 41 that links to each other with above-mentioned first production equipment, the gate of controlling in this side-flange 41 is opened, described manipulator grasps the said goods and enters into the movable chamber 14 of manipulator by above-mentioned interface channel 411, and this product is transferred in the interface channel 411 of the side-flange 41 that links to each other with a back production equipment, being installed in sensor 53 on the respective window flange 51 senses product and enters above-mentioned interface channel 411, and the gate driving device 43 of control side-flange 41 is opened the gate that is positioned at above-mentioned side-flange, described product enters into back one production equipment by the interface channel 411 of above-mentioned side-flange 41, finishes the work that product is transferred to another production equipment from a production equipment by the multistage transport module of the present invention with cavity 1.Wherein, cavity body for multistage mechanical transmission module 1 related manipulator of the present invention has comprised the manipulator clamping part, manipulator driving device and manipulator turning cylinder 17, described manipulator clamping part is connected with described manipulator turning cylinder 17, described robot drives axle 17 is fixedly mounted on described support ring 12, and the described manipulator of an end hermetically passing that described robot drives axle 17 has a manipulator clamping part stretches into mouthfuls 311 and stretch in the movable chamber 14 of described manipulator, described manipulator driving device driving device hand turning cylinder 17 rotates and controls the holding action of described manipulator clamping part, when needing transmission product or half product, manipulator driving device is transferred to product or half product in the interface channel 411 of another side-flange 41 in the interface channel 411 of a side-flange 41 by described manipulator turning cylinder 17 of control and described manipulator clamping part action.In addition, owing to have seven side-flange that link to each other with production equipment 41 in the present embodiment, so product or half product in any one production equipment wherein can be transferred in other six production equipments.
Have several side-flange that links to each other with production equipment 41 on the sidewall of the chamber body 11 of cavity body for multistage mechanical transmission module 1 of the present invention, the auxiliary manipulator that is used for transmitting product and half product, realize carrying out between many associated devices the mutual transmission of product and half product, unnecessary space and unnecessary transmission equipment have been saved, the advantage that have compact conformation, inner space utilization rate height, can link to each other with many production equipments.On the other hand, the side-flange 41 of cavity body for multistage mechanical transmission module 1 of the present invention is tabular, can be connected with the production equipment of the multiple function of plurality of specifications, make the compatible good of cavity body for multistage mechanical transmission module 1 of the present invention, integrate multifunctional equipment, realize that product or half product conveniently transmit between the production equipment of multiple difference in functionality, it is strong to have compatibility, integrates the advantage of multifunctional equipment.Therefore, cavity body for multistage mechanical transmission module 1 of the present invention has been saved space unnecessary in transmission product and the half product process, unnecessary transmission equipment and unnecessary passing time effectively, have compact conformation, inner space utilization rate height, good airproof performance and can link to each other with many production equipments compatible good, integrate multifunctional equipment, can effectively dwindle the advantage of the floor space of whole production line.
Cavity body for multistage mechanical transmission module of the present invention 1 related manipulator driving device, family of power and influence's drive unit and be arranged on the operation principle of the sensor on the window flange and structure to be those of ordinary skills known according to actual needs, no longer be described in detail at this.Certainly, the number of the side-flange that links to each other with production equipment among the present invention can be provided with according to the grown place needs, and for example the quantity of transmission channel is seven in the embodiment of the invention, can be five, six according to actual needs, also can be eight, nine or the like.
Above disclosed only is the preferred embodiments of the present invention, can not limit the present invention's interest field certainly with this, and therefore the equivalent variations of being done according to the present patent application claim still belongs to the scope that the present invention is contained.
Claims (10)
1, a kind of cavity body for multistage mechanical transmission module, be used to the activity that works the manipulator that transmits product or half product between the production equipment that seal cavity is provided, it is characterized in that: described cavity body for multistage mechanical transmission module comprises the cavity top cover, chamber body, support ring and a plurality of side-flange, described chamber body is hollow structure, described hollow structure forms the movable chamber of manipulator, described chamber body upper end offers cavity hatch, described chamber body lower end offers manipulator and stretches into mouth, described support ring is installed on described manipulator and stretches in the mouth, the described support ring of described manipulator hermetically passing also stretches into the movable chamber of described manipulator, described cavity top cover is articulated on the described chamber body and seals described cavity hatch, described side-flange is tabular and has interface channel, described interface channel runs through described side-flange, described side-flange is installed on the sidewall of described chamber body, and described interface channel is communicated with the movable chamber of described manipulator.
2, cavity body for multistage mechanical transmission module as claimed in claim 1, it is characterized in that: described chamber body comprises upper cover, top flange with described cavity hatch, low head, have flange in the bottom and cavity sidepiece that described manipulator stretches into mouthful, described upper cover is sheathed on the inwall of described cavity sidepiece upper end, described top flange is sheathed on the inboard of described upper cover, described low head is sheathed on the inwall of described cavity side subordinate's end, described flange in the bottom is sheathed on the inboard of described low head, and described side-flange is installed on the sidewall of described cavity sidepiece.
3, cavity body for multistage mechanical transmission module as claimed in claim 1 is characterized in that: described side-flange is uniformly distributed on the sidewall of described chamber body.
4, cavity body for multistage mechanical transmission module as claimed in claim 1, it is characterized in that: also comprise valve system, described valve system comprises gate, gate driving mechanism and sensor, described sensor is installed on the described chamber body and with described gate driving mechanism and is electrically connected, described gate is installed in the interface channel of described side-flange, and described sensor is controlled described driving mechanism described gate is opened or closed.
5, cavity body for multistage mechanical transmission module as claimed in claim 1, it is characterized in that: also have connecting duct on the described side-flange, described connecting duct one end is communicated with the interface channel of described side-flange, and the other end is connected with the sidewall of described chamber body and is communicated with the movable chamber of described manipulator.
6, cavity body for multistage mechanical transmission module as claimed in claim 5 is characterized in that: be provided with interior reinforcement between the inwall of described support ring and described chamber body, be provided with outer reinforcement between described cavity sidepiece and the described connecting duct.
7, cavity body for multistage mechanical transmission module as claimed in claim 1, it is characterized in that: be respectively equipped with on the corresponding position in the top of described chamber body and bottom and the corresponding a plurality of window flanges of described side-flange number, the end face of described window flange is transparence, and described window flange is communicated with the movable chamber of described manipulator and is positioned at before the described interface channel.
8, cavity body for multistage mechanical transmission module as claimed in claim 7 is characterized in that: also have joint sleeve on the described window flange, described joint sleeve is connected with the bottom with the top of described chamber body respectively and is communicated with the movable chamber of described manipulator.
9, cavity body for multistage mechanical transmission module as claimed in claim 1, it is characterized in that: also comprise the top cover controlling organization, described cavity top cover controlling organization comprises support, is installed in runner and top cover transmission mechanism on the described support, described top cover transmission mechanism and described support articulate, described support is fixedlyed connected with described top flange, and described runner is controlled described top cover transmission mechanism and rotated around described support.
10, cavity body for multistage mechanical transmission module as claimed in claim 1 is characterized in that: have the watch window that is transparence on the described cavity top cover.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910040586A CN101642909A (en) | 2009-06-26 | 2009-06-26 | Cavity body for multistage mechanical transmission module |
| PCT/CN2009/073414 WO2010148582A1 (en) | 2009-06-26 | 2009-08-21 | Multistage mechanical conveying module chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910040586A CN101642909A (en) | 2009-06-26 | 2009-06-26 | Cavity body for multistage mechanical transmission module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101642909A true CN101642909A (en) | 2010-02-10 |
Family
ID=41655044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910040586A Pending CN101642909A (en) | 2009-06-26 | 2009-06-26 | Cavity body for multistage mechanical transmission module |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN101642909A (en) |
| WO (1) | WO2010148582A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104882396A (en) * | 2015-04-29 | 2015-09-02 | 沈阳拓荆科技有限公司 | Transparent cover plate structure of wafer transfer chamber of semiconductor film equipment |
| CN104894528A (en) * | 2015-04-29 | 2015-09-09 | 沈阳拓荆科技有限公司 | Bilayer manipulator arm wafer conveying structure in observable wafer conveying chamber |
| CN104952777A (en) * | 2015-04-29 | 2015-09-30 | 沈阳拓荆科技有限公司 | Observable wafer conveying cavity structure of semiconductor thin film equipment |
| CN112055678A (en) * | 2019-05-16 | 2020-12-08 | 深圳市大疆创新科技有限公司 | Detachable robot |
| CN117747526A (en) * | 2024-02-21 | 2024-03-22 | 无锡星微科技有限公司 | Wafer sorting guide machine |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6216328B1 (en) * | 1996-07-09 | 2001-04-17 | Lam Research Corporation | Transport chamber and method for making same |
| US5882413A (en) * | 1997-07-11 | 1999-03-16 | Brooks Automation, Inc. | Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer |
| US6379095B1 (en) * | 2000-04-14 | 2002-04-30 | Applied Materials, Inc. | Robot for handling semiconductor wafers |
| US20040141832A1 (en) * | 2003-01-10 | 2004-07-22 | Jang Geun-Ha | Cluster device having dual structure |
| JP4353903B2 (en) * | 2005-01-07 | 2009-10-28 | 東京エレクトロン株式会社 | Cluster tool processing system |
| US7720655B2 (en) * | 2005-12-20 | 2010-05-18 | Applied Materials, Inc. | Extended mainframe designs for semiconductor device manufacturing equipment |
| US8082741B2 (en) * | 2007-05-15 | 2011-12-27 | Brooks Automation, Inc. | Integral facet cryopump, water vapor pump, or high vacuum pump |
| CN101383311B (en) * | 2007-09-04 | 2010-12-08 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Wafer transmission system |
-
2009
- 2009-06-26 CN CN200910040586A patent/CN101642909A/en active Pending
- 2009-08-21 WO PCT/CN2009/073414 patent/WO2010148582A1/en active Application Filing
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104882396A (en) * | 2015-04-29 | 2015-09-02 | 沈阳拓荆科技有限公司 | Transparent cover plate structure of wafer transfer chamber of semiconductor film equipment |
| CN104894528A (en) * | 2015-04-29 | 2015-09-09 | 沈阳拓荆科技有限公司 | Bilayer manipulator arm wafer conveying structure in observable wafer conveying chamber |
| CN104952777A (en) * | 2015-04-29 | 2015-09-30 | 沈阳拓荆科技有限公司 | Observable wafer conveying cavity structure of semiconductor thin film equipment |
| CN112055678A (en) * | 2019-05-16 | 2020-12-08 | 深圳市大疆创新科技有限公司 | Detachable robot |
| CN117747526A (en) * | 2024-02-21 | 2024-03-22 | 无锡星微科技有限公司 | Wafer sorting guide machine |
| CN117747526B (en) * | 2024-02-21 | 2024-05-17 | 无锡星微科技有限公司 | Wafer sorting guide machine |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2010148582A1 (en) | 2010-12-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101642909A (en) | Cavity body for multistage mechanical transmission module | |
| CN102282092B (en) | Installation for the production of containers, comprising a retractable transfer wheel | |
| CN106103006B (en) | Manufacture work station, manufacturing equipment and method | |
| CN104118835B (en) | A kind of screw top pipe device for releasing closures | |
| CN201900652U (en) | Vacuum glove box | |
| CN106514681A (en) | Combined gripper for engine cylinder head | |
| CN103395490A (en) | Lifting-opening linkage structure for turn-over airliner cabin door | |
| US20170334064A1 (en) | Articulated robot and module thereof | |
| US10744659B2 (en) | Aseptic work system | |
| CN201446535U (en) | Mechanical transmission cavity | |
| CN105016043B (en) | A kind of material transfer device between hot cell | |
| CN102359614B (en) | Gate valve | |
| CN108380762A (en) | Riveting device and production line | |
| CN204125137U (en) | A kind of screw top pipe device for releasing closures and with the use of screw top pipe | |
| CN208380363U (en) | A kind of assembling type door shaft device | |
| CN207071491U (en) | A kind of muffin paint box point gum machine | |
| CN109812193A (en) | A kind of hermatic door and encapsulating method for large-scale increasing material manufacturing | |
| CN202958601U (en) | Horizontal dough mixer | |
| CN108927824A (en) | A kind of articulated robot wrist Guo Xian mechanism | |
| CN202575128U (en) | Container with hard open top | |
| CN208483779U (en) | A kind of novel combination type spanner | |
| CN209974798U (en) | Carbon dioxide culture device butt-joint structure | |
| CN101648382A (en) | bundling transmission apparatus | |
| CN112393541A (en) | Tea leaf drying equipment capable of turning and blowing | |
| CN107140342A (en) | The monitoring system of bulky refuse bucket |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20100210 |