WO2010139174A1 - Substrate transporting mechanism - Google Patents

Substrate transporting mechanism Download PDF

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Publication number
WO2010139174A1
WO2010139174A1 PCT/CN2009/076057 CN2009076057W WO2010139174A1 WO 2010139174 A1 WO2010139174 A1 WO 2010139174A1 CN 2009076057 W CN2009076057 W CN 2009076057W WO 2010139174 A1 WO2010139174 A1 WO 2010139174A1
Authority
WO
WIPO (PCT)
Prior art keywords
transmission
permanent magnet
gear
magnetic
substrate
Prior art date
Application number
PCT/CN2009/076057
Other languages
French (fr)
Chinese (zh)
Inventor
杨明生
范继良
郭业祥
王曼媛
Original Assignee
东莞宏威数码机械有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 东莞宏威数码机械有限公司 filed Critical 东莞宏威数码机械有限公司
Publication of WO2010139174A1 publication Critical patent/WO2010139174A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Definitions

  • the present invention relates to a transport mechanism for a sheet-like thin substrate, and more particularly to a substrate transport mechanism suitable for a sheet-like thin substrate in a vacuum chamber. Background technique
  • OLED display is a new product in digital products
  • OLED is Organic Light-Emitting Diode, also known as Organic Electroluminesence Display (OELD;), because it is light and thin, saving electricity.
  • OELD Organic Electroluminesence Display
  • Such characteristics so it has been widely used in the display of digital products, and has a large market potential.
  • the application of OLED in the world is focused on flat panel displays, because OLED is the only application and TFT-LCD.
  • OLED display screen and traditional TFT-LCD display The screen is different, it does not require a backlight, it uses a very thin coating of organic material and a glass substrate. When there is current, these organic materials will emit light, and the OLED display screen can be made lighter and thinner, viewing angle Larger, and can save significant power; accordingly, manufacturing OLED display screens There OLED display device must ensure accuracy of the screen.
  • the substrate material of the OLED is a very thin and fragile glass.
  • a plurality of substrates are directly connected to each other on the transmission axis.
  • the conveying roller of the contact, the conveying shaft is connected with the driving shaft, and the driving shaft is connected with a driving device such as a motor, and the conveying shaft can obtain the rotating force from the driving shaft, that is, when the driving device such as the motor is started, the conveying shaft can rotate and transmit the substrate .
  • the above-mentioned transfer method Due to the direct contact between the substrate and the transfer roller, the above-mentioned transfer method easily causes mechanical wear of the substrate during the transfer process, affecting the accuracy and quality of the finished product. At the same time, it is easy to transmit due to the contact of various moving components, such as gears and screw rods.
  • the moving parts of the equipment are granulated due to friction, generating dust into the substrate conveying area, affecting the cleanliness of the substrate, and generating large noise during the transmission; in addition, transmitting the friction between the moving parts
  • the service life of each moving component is shortened and the service life of the transmission equipment is also shortened.
  • Another type of transmission is the use of industrial robots for transmission. Due to the high equipment cost and large footprint, the manufacturing cost is high, which limits the large-scale production and operation.
  • An object of the present invention is to provide a substrate transfer mechanism which is low in noise, high in cleanliness, and low in production cost.
  • the technical solution of the present invention is: providing a substrate transport mechanism including a driving device, a main transmission device, a bottom plate and two secondary transmission devices, wherein the driving device is connected to the main transmission device, two The secondary transmissions are connected in parallel to the two sides of the bottom plate and are respectively connected to the main transmission device, and a transmission area is formed between the two transmission devices, the driving device drives the main transmission device, the main transmission The device synchronously drives the two secondary transmissions, wherein the secondary transmission includes a bearing housing, a magnetic transmission shaft, a first helical gear, and a plurality of mutually corresponding first permanent magnet gears and a magnetic transmission unit, the bearing housing Connected to the bottom plate, the magnetic transmission unit is pivotally connected to the bearing housing in parallel, and the magnetic transmission unit has a roller extending into the conveying area; the first helical gear is fixed to the a magnetic transmission shaft, the main transmission device has a second helical gear that meshes with the first helical gear, and the
  • the magnetic transmission unit further includes a roller shaft fixedly coupled to the second permanent magnet gear, the roller shaft is pivotally connected to the bearing housing, and one end of the roller shaft passes through the bearing housing and Extending into the transfer area to connect with the roller, more specifically, the magnetic transfer unit further includes a gasket connected to one side of the roller facing the transfer area, and the roller forms a step with the washer
  • the roller shaft fixedly connected with the second permanent magnet gear is rotated by the rotation of the second permanent magnet gear, so that the pad and the roller on the roller shaft rotate together, and the substrate is carried on the roller and the pad to form
  • the friction between the gasket and the substrate is used to realize the transmission of the substrate, and on the other hand, the substrate is restrained by the side wall of the roller, thereby realizing the stability of the substrate during transmission, and being effective. Prevents the offset of the substrate from being transmitted.
  • the magnetic transmission unit further includes a sleeve, the sleeve is connected to one end of the roller shaft extending into the conveying area, and the roller and the washer are sequentially connected to the sleeve, the roller and The washer is connected to the roller shaft in the conveying area through the sleeve, and the axial adjustment of the roller along the roller shaft can be realized by adjusting the sleeve.
  • the pad is also moved along the axial direction. Therefore, it can adapt to the substrate transmission of different sizes, making the transmission mechanism more applicable and wider in use.
  • the bearing housing has a hollow structure, the hollow structure forms a mounting slot, the roller shaft is pivotally connected to the two sidewalls of the mounting slot, and the second permanent magnet gear is located in the mounting slot Further, the fine dust particles generated during the transmission process or outside are further prevented from entering the transfer area, thereby better maintaining the cleanliness of the vacuum chamber and the substrate, and providing high quality for the next step of the substrate.
  • the substrate is a hollow structure, the hollow structure forms a mounting slot, the roller shaft is pivotally connected to the two sidewalls of the mounting slot, and the second permanent magnet gear is located in the mounting slot
  • the secondary transmission device further includes a bearing seat, the bearing housing is mounted in the mounting groove, the magnetic transmission shaft is pivotally connected to the bearing housing, and is fixed on the magnetic transmission shaft.
  • the first permanent magnet gear is located directly below the second permanent magnet gear; since the first permanent magnet gear and the second permanent magnet gear are axially perpendicular to each other, and the first permanent magnet gear drives the second permanent magnet gear through the magnetic field, the first 7
  • the non-contact transmission between the magnetic gear and the second permanent magnet gear makes the substrate not produce fine dust particles and noise generated by the contact friction transmission during the transmission process, so that the substrate is cleaned with high cleanliness. The noise is low.
  • the main transmission device further includes an input shaft, the input shaft is coupled to the driving device, the second helical gear is located in the mounting groove and is fixed on the input shaft; the input shaft and the magnetic
  • the transmission shaft transmits power between the transmission shafts, and can receive high-speed transmission of the substrate while receiving large power transmission.
  • the transmission Since the input shaft synchronously drives the two magnetic transmission shafts of the two transmissions to rotate, the transmission is relatively stable, so the impact, The vibration and noise are much smaller, the service life of the helical gear and the entire transmission mechanism is increased, and the second helical gear is located in the installation groove, so that the first helical gear and the second helical gear that are in contact with the transmission are located at the In the mounting groove, the first helical gear and the second helical gear are effectively separated from the conveying region and the outside by the mounting groove, thereby effectively preventing the fine dust generated when the first helical gear and the second helical gear are in meshing engagement transmission. The particles enter the transfer area, and at the same time, the noise generated by the first helical gear and the second helical gear in meshing engagement transmission is greatly reduced.
  • the shaft mount or / and the bearing housing are mounted with sensors, and the sensor can accurately control the transmission position of the substrate, thereby ensuring the manufacturing precision of the subsequent process of the substrate and improving the yield of the product.
  • the driving device is a servo motor
  • the servo motor has the characteristics of low vibration, high speed, high response, high precision, etc., so that the substrate is fast, stable, accurate, and low in noise during transmission.
  • the substrate transport mechanism of the present invention has two secondary transmissions connected to both sides of the bottom plate and respectively connected to the main transmission, the transmission of the substrate transmission is formed between the two secondary transmissions.
  • the main transmission synchronously drives the two secondary transmissions;
  • the secondary transmission includes a bearing housing, a magnetic transmission shaft, a first helical gear and a plurality of first permanent magnet gears and a magnetic transmission unit corresponding to each other, and the bearing housing is connected to the bottom plate
  • the magnetic transmission unit is pivotally connected to the bearing housing in parallel, and the magnetic transmission unit has a roller extending into the transmission area, and has a second permanent magnet gear corresponding to the first permanent magnet gear, because the first 7 magnetic gear
  • the second permanent magnet gear is axially perpendicular to each other, and the first permanent magnet gear drives the second permanent magnet gear by a magnetic field, and the non-contact transmission between the first permanent magnet gear and the second permanent magnet gear causes the substrate to be transmitted During the process, fine dust particles and noise generated by the contact friction transmission method are
  • Figure la is a schematic structural view of a substrate transfer mechanism of the present invention.
  • Figure 1b is a schematic view showing the state of the substrate transporting substrate of the present invention.
  • Figure 2 is an enlarged schematic view of a portion A of Figure la.
  • Figure 3 is an enlarged schematic view of a portion B of Figure la.
  • Figure 4 is an enlarged schematic view of a portion C of Figure la. detailed description
  • the substrate transport mechanism 1 of the present invention comprises a driving device (not shown), a main transmission device 30, a bottom plate 10 and two secondary transmission devices 20, a driving device and a main transmission device. 30.
  • the two secondary transmissions 20 are connected in parallel to both sides of the bottom plate 10 and are respectively connected to the main transmission device 30.
  • a transmission area 101 is formed between the two transmission devices 20, and the driving device drives the main transmission device 30.
  • the main transmission device 30 drives the transmission device 20 synchronously, wherein the secondary transmission device 20 includes a bearing housing 201, a magnetic transmission shaft 202, a first helical gear 202a, and a plurality of mutually corresponding first permanent magnet gears 202b.
  • the magnetic transmission unit 203 The magnetic transmission unit 203; the bearing housing 201 is connected to the bottom plate 10, the magnetic transmission unit 203 is pivotally connected to the bearing housing 201 in parallel, and the magnetic transmission unit 203 has a roller 203e extending into the transmission area 101; the first helical gear 202a Fixed to the magnetic drive shaft 202, the main transmission 30 has a bevel gear 30a that meshes with the first helical gear 202a, and the first helical gear is axially perpendicular to the bevel gear 30a, the first permanent magnet Gear 202b solid To the magnetic shaft 202, the magnetic transfer unit 203 having the first permanent magnet gear 202b corresponding to the second permanent magnet gear 203b, a first permanent magnet gear 202b The second permanent magnet gear 203b is axially perpendicular to the second permanent magnet gear 203b.
  • the first permanent magnet gear 202b drives the second permanent magnet gear 203b by a magnetic field.
  • the bearing housing 201 has a hollow structure, and the hollow structure forms a mounting groove 201a.
  • the roller shaft 203 a is pivotally connected to the two side walls 201 b of the mounting groove, and the second permanent magnet gear 203 b is located in the mounting groove 201 a ; more specifically, as shown in FIG. 3 and FIG. 4 , as follows:
  • the secondary transmission 20 of the substrate transport mechanism 1 of the present invention further includes a bearing housing 204.
  • the bearing housing 204 is mounted in the mounting slot 201a.
  • the magnetic drive shaft 202 is pivotally connected to the bearing housing 204 and is fixed to the bearing housing 204.
  • the first permanent magnet gear 202b on the magnetic drive shaft 202 is located directly below the second permanent magnet gear 203b. Since the first permanent magnet gear 202b and the second permanent magnet gear 203b are axially perpendicular to each other, and the first 7 j magnetic gear
  • the first permanent magnet gear 202b drives the second permanent magnet gear 203b by the magnetic field, and the non-contact transmission mode between the first permanent magnet gear 202b and the second permanent magnet gear 203b causes the substrate to be generated during the transmission process due to the contact friction transmission mode.
  • the fine dust particles and noise make the substrate have high cleanliness and low noise during transmission.
  • the first permanent magnet gear 202b and the second permanent magnet gear 203b are in a non-contact transmission manner, the first permanent magnet gear 202b and the first permanent magnet gear 202b are The service life of the second permanent magnet gear 203b is greatly increased, thereby increasing the life of the entire substrate transfer mechanism 1 and greatly reducing the manufacturing cost.
  • the magnetic transmission unit 203 of the substrate transport mechanism 1 of the present invention further includes a roller shaft 203a fixedly coupled to the second permanent magnet gear 203b, the roller shaft 203a being pivotally coupled to the bearing housing 201, and the roller shaft 203a One end passes through the bearing housing 201 and extends into the transfer area 101 to be coupled to the roller 203e; the magnetic transfer unit 203 further includes a washer 203d connected to one side of the roller 203e toward the transfer area 101, and the roller 203e and the washer 203d are formed.
  • Step 203f when the substrate is transported, the substrate is loaded on the roller 203e and the pad 203d to form a step 203f.
  • the magnetic transmission unit 203 further includes a sleeve. 203c, the sleeve 203c is connected to one end of the roller shaft 203a extending into the conveying area 101, and the pad 203d and the roller 203e are sequentially connected to the sleeve 203c.
  • the main transmission 30 of the substrate transport mechanism 1 of the present invention comprises an input shaft 30b and a second helical gear 30a, the input shaft 30b is connected to the driving device, and the other end is connected to the two transmissions 20 respectively.
  • the device drives the main transmission device 30, and the main transmission device 30 drives the transmission device 20 synchronously;
  • the second helical gear 30a of the main transmission device 30 is fixed to the input shaft 30b, and the second helical gear 30a Located in the mounting groove 201a;
  • a first helical gear 202a bonded to the second helical gear 30a is fixed to the magnetic drive shaft 202, and the second helical gear 30a and the first helical gear 202a are perpendicular to each other in the axial direction of the input shaft
  • the power transmitted between the 30b and the magnetic drive shaft 202 through the second helical gear 30a and the first helical gear 202a can transmit power at the same time as the high power transmission and achieve high speed transmission of the substrate, and the two
  • the secondary transmission device 20 makes the transmission smoother, so that the shock, vibration and noise can be reduced, and the service life of the second helical gear 30a and the first helical gear 202a and the entire transmission mechanism 1 is increased;
  • the second helical gear 30a is located in the mounting groove 201a such that the first helical gear 202a and the second helical gear 30a that are in contact with each other are located in the mounting groove 201a, and the first helical gear 202a and the second oblique are effectively passed through the mounting groove 201a.
  • the gear 30a is separated from the transmission area 101 and the outside, effectively preventing the fine dust particles generated when the first helical gear 202a and the second helical gear 30a are in meshing engagement transmission into the transmission area 101. But also greatly reduces the noise caused when the first bevel gear 202a in contact with the second drive bevel gear 30a meshing produced.
  • the secondary transmission device 20 of the substrate transfer mechanism 1 of the present invention As shown in FIG. 1a, FIG. 1b and FIG. 3, the secondary transmission device 20 of the substrate transfer mechanism 1 of the present invention, the hollow structure of the bearing housing 201 of the secondary transmission device 20 forms a mounting groove 201a, and the bearing housing 204 is mounted in the mounting groove 201a.
  • the magnetic drive shaft 202 is pivotally connected to the bearing housing 204, and the first permanent magnet gear 202b fixed on the magnetic drive shaft 202 is located in the mounting slot 201a, and the roller shaft 203a of the magnetic transmission unit 203 is pivotally connected to the mounting slot 201a.
  • the second permanent magnet gear 203b On the side wall 201b, and the second permanent magnet gear 203b is located in the mounting groove 201a and located directly above the first permanent magnet gear 202b, the second permanent magnet gear 203b on the roller shaft 203a and the first on the magnetic drive shaft 202
  • the permanent magnet gear 202b is vertically mounted.
  • the first permanent magnet gear 202b drives the second permanent magnet gear 203b by the magnetic field, thereby driving the roller shaft 203a of the magnetic transmission unit 203 to rotate, and the magnetic transmission shaft 202 and the magnetic transmission unit 203
  • the magnetic field generated by the first permanent magnet gear 202b and the second permanent magnet gear 203b is used to transmit power; since the first permanent magnet gear 202b and the second permanent magnet gear 203b are axially perpendicular to each other, and the first permanent magnet gear 202b passes the magnetic field
  • Driving the second permanent magnet 203b the non-contact transmission between the first permanent magnet gear 202b and the second permanent magnet gear 203b causes the substrate to not generate fine dust particles and noise generated by the contact friction transmission mode during the transmission, so that the base
  • the sheet has high cleanliness and low noise during transmission, and at the same time, since the first permanent magnet gear 202b and the second permanent magnet gear 203b are in a non-contact transmission manner, the service life of the first permanent magnet gear 202b and the second permanent magnet gear 203
  • the magnetic transmission unit 203 of the substrate transport mechanism 1 of the present invention includes a roller shaft 203a, a second permanent magnet gear 203b, a sleeve 203c, a pad 203d and a roller 203e, and a roller shaft 203a.
  • the bearing housing 201 is pivotally connected, and one end of the roller shaft 203a passes through the bearing housing 201 and extends into the conveying area 101 to be connected with the roller 203e.
  • the second permanent magnet gear 203b is fixed to the roller shaft 203a and is located in the mounting groove of the bearing housing 201.
  • the sleeve 203c is connected to one end of the roller shaft 203a extending into the conveying area 101, the pad 203d and the roller 203e are sequentially connected to the sleeve 203c, and the roller 203e and the pad 203d form a step 203f;
  • the substrate la is carried on the step 203f by the roller 203e and the gasket 203d.
  • the friction between the pad 203d and the substrate la is used to realize the transmission of the substrate la, and on the other hand, the side wall 203g of the roller 203e.
  • the substrate la is limited to achieve smoothness of the substrate la during transmission, and can effectively prevent the substrate la from being displaced.
  • roller 203e is connected to the roller shaft 203a through the washer 203d and the sleeve 203c Can be adjusted by adjusting the sleeve 20 3c axially adjusts the roller 203e.
  • the pad 203d also moves along the axial direction of the roller shaft 203a along with the roller 203e, so that it can adapt to the substrate transmission of different sizes, so that the applicability of the transmission mechanism Strong, more widely used.
  • the substrate transport mechanism 1 of the present invention has a sensor (not shown) mounted on the bearing housing 204 or/and the bearing housing 201.
  • the mounted sensor may be one or more to detect the rotational speed or base of the gear.
  • the moving distance of the piece, and the detected signal is transmitted to the driving device through the control system, the driving device adjusts the rotation speed of the gear, and precisely controls the transmission position of the substrate, thereby ensuring the manufacturing precision of the subsequent process of the substrate and improving the qualification of the product.
  • the driving device is a servo motor, and the servo motor has the characteristics of low vibration, high speed, high response, high precision, etc., so that the substrate is fast, stable, accurate, and 4 ⁇ noise in the process of transmission.
  • the servo motor drive input shaft 30b rotates, and the second bevel gear 30a fixed to the input shaft 30b rotates accordingly, due to the second bevel gear 30a and the magnetic drive shaft on the input shaft 30b.
  • the first helical gear 202a on the mesh 202 engages, thereby causing the magnetic drive shaft 202 to rotate, and the rotation of the magnetic drive shaft 202 causes the first permanent magnet gear 202b on the magnetic drive shaft 202 to rotate accordingly, due to the first on the magnetic drive shaft 202.
  • the permanent magnet gear 202b is perpendicular to the second permanent magnet gear 203b of the magnetic transmission unit 203
  • the magnetic transmission unit 203 is rotated by the magnetic field between the first permanent magnet gear 202b on the magnetic transmission shaft 202 and the second permanent magnet gear 203b of the magnetic transmission unit 203, so that the roller shaft 203a of the magnetic transmission unit 203 rotates accordingly.
  • the roller sleeve 203a Since the roller sleeve 203a is mounted with the sleeve 203c, the washer 203d and the roller 203e are sequentially connected to the sleeve 203c, and the roller 203e and the washer 203d form a step 203f, and the roller shaft 203a rotates to cause the pad 203d together with the roller 203e Rotation, the smooth transfer of the substrate la is achieved by the friction between the pad 203d and the substrate la to be transported. Specifically, when the substrate 1a is transported, the substrate 1a is carried by the roller 203e and the washer 203d to form a step 203fJ.
  • the lower surface 1c of the substrate la is carried on the upper surface of the gasket 203d, and the side walls lb of the substrate 1a are in contact with the side wall 203g of the roller 203e, and the friction between the pad 203d and the lower surface lc of the substrate 1a is utilized.
  • the roller 203 e can be adjusted along the axial direction of the roller shaft 203a, and the pad 203d on the roller 203e also moves along the axial direction of the roller shaft 203a with the roller 203e to adapt to the substrate transmission of different sizes. .
  • the substrate transport mechanism 1 of the present invention has two secondary transmissions 20 connected in parallel to the two sides of the bottom plate 101 and respectively connected to the main transmission device 30.
  • a transmission area 101 is formed between the two secondary transmission devices 20, and the main transmission device 30 is formed.
  • the secondary transmission 20 includes a bearing housing 201, a magnetic transmission shaft 202, a first helical gear 202a, and a plurality of mutually corresponding first permanent magnet gears 202b and a magnetic transmission unit 203, the bearing housing 201 Connected to the bottom plate 10, the magnetic transmission unit 203 is pivotally connected to the bearing housing 201 in parallel, and the magnetic transmission unit 203 has a roller 203e extending into the transmission area 101, and a second corresponding to the first permanent magnet gear 202b.
  • the permanent magnet gear 203b, the first permanent magnet gear 202b and the second permanent magnet gear 203b are axially perpendicular to each other, and the first permanent magnet gear 202b drives the second permanent magnet gear 203b by the magnetic field, because the first permanent magnet gear 202b and the second permanent magnet
  • the magnetic gears 203b are axially perpendicular to each other, and the first permanent magnet gear 202b drives the second permanent magnet gear 203b by a magnetic field, and the non-contact transmission between the first permanent magnet gear 202b and the second permanent magnet gear 203b causes the substrate la During the transmission process
  • the fine dust particles and noise generated by the contact type friction transmission mode are not generated, so that the substrate la is highly clean and low in noise, and at the same time, since the first permanent magnet gear 202b and the second permanent magnet gear 203b are not
  • the contact transmission mode greatly increases the service life of the first permanent magnet gear 202b and the second permanent magnet gear 203b, thereby increasing the life of the entire substrate transport mechanism 1 and
  • the main transmission device 30 and the transmission function portion of the secondary transmission device 20 are effectively separated from the transmission region and the outside through the bearing housing 201, which is effective.
  • the fine dust particles generated by the contact transmission of the main transmission 30 and the transmission portion of the secondary transmission 20 are prevented from entering the transmission area 101, and the noise due to the contact transmission is also greatly reduced.
  • the principle of the first permanent magnet gear 202b of the substrate transmission mechanism 1 of the present invention for driving the second permanent magnet gear 203b and the mounting and detecting principle of the sensor are well known to those skilled in the art, and will not be described in detail herein.

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
  • Transmission Devices (AREA)

Abstract

A substrate transporting mechanism (1) comprises a drive device, a main driving device (30), a bottom plate (10) and two secondary driving devices (20), wherein the secondary driving devices (20) comprise bearing boxes (201) connected to the bottom plate (10), magnetic driving shafts (202), first bevel gears (202a), first permanent-magnet gears (202b) and magnetic transmission units (203), the first bevel gears (202a) and the first permanent-magnet gears (202b) are fixed to the magnetic driving shafts (202), the magnetic transmission units (203) are pivoted to the bearing boxes (201) in parallel and provided with rollers (203e), the main driving device (30) is provided with the second bevel gears (30a) engaged with the first bevel gears (202a), the magnetic transmission units(203) are provided with the second permanent-magnet gears (203b) which are vertical to the first permanent-magnet gears axially, the first permanent-magnet gears drive the second permanent-magnet gears by magnetic field. The noise generated by the substrate transporting mechanism is reduced and the substrate transporting process is performed in high clean environment.

Description

基片传输机构 技术领域  Substrate transfer mechanism
本发明涉及一种板状薄基片的传输机构， 尤其涉及一种适用于真空腔体中 板状薄基片的基片传输机构。 背景技术  The present invention relates to a transport mechanism for a sheet-like thin substrate, and more particularly to a substrate transport mechanism suitable for a sheet-like thin substrate in a vacuum chamber. Background technique
随着经济的不断发展、 科技的不断进步和世界能源的日益减少， 人们在生 产中越来越重视能源的节约及利用效率， 使得人与自然和谐发展以满足中国新 型的工业化道路要求。  With the continuous development of the economy, the continuous advancement of science and technology, and the decreasing energy of the world, people pay more and more attention to energy conservation and utilization efficiency in production, which makes people and nature develop harmoniously to meet the requirements of China's new industrialization road.
例如， 在数码产品的显示产业中， 企业为了节约能源、 降低生产成本， 都 加大投资研发力度， 不断地追求节能的新产品。 其中， OLED显示屏就是数码产 品中的一种新产品， OLED即有机发光二极管（ Organic Light-Emitting Diode ), 又称为有机电激光显示 ( Organic Electroluminesence Display, OELD；) , 因为 具备轻薄、 省电等特性， 因此在数码产品的显示屏上得到了广泛应用， 并且 具有较大的市场潜力， 目前世界上对 OLED的应用都聚焦在平板显示器上， 因为 OLED是唯一在应用上能和 TFT-LCD相提并论的技术， 且是目前所有 显示技术中， 唯一可制作大尺寸、 高亮度、 高分辨率軟屏的显示技术， 可以 做成和纸张一样的厚度； 但 OLED显示屏幕与传统的 TFT-LCD显示屏幕并 不同， 其无需背光灯， 采用非常薄的有机材料涂层和玻璃基片， 当有电流通 过时， 这些有机材料就会发光， 而且 OLED 显示屏幕可以做得更轻更薄， 可视角度更大， 并且能够显著节省电能； 相应地， 制造 OLED 显示屏幕的 所有设备必须要保证 OLED显示屏幕的精度要求。 OLED的基片材料为非常 薄且易碎的玻璃， 在 OLED的基片制作工序及后续工艺中， 有很多基片传输 装置， 用于在基片加工的过程中传输基片， 为了保证 OLED 的质量和精度， 加工过程中对基片的自动化传输要求越来越高的同时， 对基片的清洁度也要求 越来越高， 因此对基片的传输设备提出了更高的要求。  For example, in the display industry of digital products, in order to save energy and reduce production costs, enterprises have increased investment in research and development and are constantly pursuing new products that are energy-saving. Among them, OLED display is a new product in digital products, OLED is Organic Light-Emitting Diode, also known as Organic Electroluminesence Display (OELD;), because it is light and thin, saving electricity. Such characteristics, so it has been widely used in the display of digital products, and has a large market potential. At present, the application of OLED in the world is focused on flat panel displays, because OLED is the only application and TFT-LCD. The same technology, and currently the only display technology that can produce large-size, high-brightness, high-resolution soft screens, can be made to the same thickness as paper; but OLED display screen and traditional TFT-LCD display The screen is different, it does not require a backlight, it uses a very thin coating of organic material and a glass substrate. When there is current, these organic materials will emit light, and the OLED display screen can be made lighter and thinner, viewing angle Larger, and can save significant power; accordingly, manufacturing OLED display screens There OLED display device must ensure accuracy of the screen. The substrate material of the OLED is a very thin and fragile glass. In the substrate fabrication process and subsequent processes of the OLED, there are many substrate transfer devices for transferring the substrate during the processing of the substrate, in order to ensure the OLED. Quality and precision, the requirements for automated transmission of substrates during processing are increasing, and the cleanliness of substrates is also increasing. Therefore, higher requirements are placed on the substrate transmission equipment.
现有的一种传输设备中， 在每一个传送轴上等距安装有多个与基片直接接 触的传送辊， 传送轴与驱动轴相连， 驱动轴与马达等驱动设备相连， 传送轴可 以从驱动轴获取旋转力， 即当马达等驱动设备开动时， 该传送轴就可以转动并 传送基片。 上述传送方式由于基片与传送辊直接接触， 传输过程中容易造成基 片的机械磨损， 影响成品的精度和质量； 同时， 由于传输各运动组件， 例如齿 轮、 丝杆等的接触， 容易使传输设备的各运动组件之间因为摩擦而粒化， 产生 粉尘进入到基片传送区域， 影响基片的清洁度， 并且在传输的过程中产生较大 噪声； 另外， 传输各运动组件之间的摩擦使得各运动组件的使用寿命縮短， 传 输设备的使用寿命也随之缩短。 另一种传送方式是采用工业机器人进行传输， 由于设备成本较高且占地面积较大， 因此其制造成本较高， 限制了大规模的生 产和运用。 In a conventional transmission device, a plurality of substrates are directly connected to each other on the transmission axis. The conveying roller of the contact, the conveying shaft is connected with the driving shaft, and the driving shaft is connected with a driving device such as a motor, and the conveying shaft can obtain the rotating force from the driving shaft, that is, when the driving device such as the motor is started, the conveying shaft can rotate and transmit the substrate . Due to the direct contact between the substrate and the transfer roller, the above-mentioned transfer method easily causes mechanical wear of the substrate during the transfer process, affecting the accuracy and quality of the finished product. At the same time, it is easy to transmit due to the contact of various moving components, such as gears and screw rods. The moving parts of the equipment are granulated due to friction, generating dust into the substrate conveying area, affecting the cleanliness of the substrate, and generating large noise during the transmission; in addition, transmitting the friction between the moving parts The service life of each moving component is shortened and the service life of the transmission equipment is also shortened. Another type of transmission is the use of industrial robots for transmission. Due to the high equipment cost and large footprint, the manufacturing cost is high, which limits the large-scale production and operation.
因此， 急需一种低噪音、 高清洁度、 低生产成本的基片传输机构。 发明内容  Therefore, there is an urgent need for a substrate transport mechanism that is low in noise, high in cleanliness, and low in production cost. Summary of the invention
本发明的目的在于提供一种低噪音、 高清洁度、 低生产成本的基片传输机 构。  SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transfer mechanism which is low in noise, high in cleanliness, and low in production cost.
为实现上述目的， 本发明的技术方案为： 提供一种基片传输机构， 包括驱 动装置、 主传动装置、 底板及两个次传动装置， 所述驱动装置与所述主传动装 置连接， 两个次传动装置呈平行的连接于所述底板两侧且分别与所述主传动装 置连接， 所述两次传动装置之间形成传送区域， 所述驱动装置驱动所述主传动 装置， 所述主传动装置同步的驱动两所述次传动装置， 其中， 所述次传动装置 包括轴承箱、 磁传动轴、 第一斜齿轮及多个相互对应的第一永磁齿轮和磁传输 单元， 所述轴承箱连接于所述底板上， 所述磁传输单元呈平行的枢接于所述轴 承箱上， 且所述磁传输单元具有伸入所述传送区域的滚轮； 所述第一斜齿轮固 定于所述磁传动轴上， 所述主传动装置具有与所述第一斜齿轮相啮合的第二斜 齿轮， 且所述第一斜齿轮与第二斜齿轮的轴向相互垂直； 所述第一永磁齿轮固 定于所述磁传动轴上 , 所述磁传输单元具有与所述第一永磁齿轮相对应的第二 永磁齿轮， 所述第一永磁齿轮与第二永磁齿轮轴向相互垂直， 所述第一永磁齿 轮通过磁场驱动所述第二永磁齿轮。 较佳地， 所述磁传输单元还包括与所述第二永磁齿轮固定连接的滚轮轴， 所述滚轮轴与所述轴承箱枢接， 所述滚轮轴的一端穿过所述轴承箱并伸入传送 区域内与所述滚轮连接， 更具体地， 所述磁传输单元还包括垫圈， 所述垫圈连 接于朝向传送区域的所述滚轮的一侧， 且所述滚轮与所述垫圈形成台阶， 基片 传输时， 通过第二永磁齿轮的转动带动与第二永磁齿轮固定连接的滚轮轴转动， 使滚轮轴上的垫圏及滚轮一起转动， 将基片承载于滚轮与垫圏形成台阶上， 一 方面利用垫圈与基片之间的摩擦力， 实现基片的传输， 另一方面通过滚轮的侧 壁对基片进行限位， 实现基片在传输时的平稳， 并且能有效的防止基片发生传 输的偏移。 In order to achieve the above object, the technical solution of the present invention is: providing a substrate transport mechanism including a driving device, a main transmission device, a bottom plate and two secondary transmission devices, wherein the driving device is connected to the main transmission device, two The secondary transmissions are connected in parallel to the two sides of the bottom plate and are respectively connected to the main transmission device, and a transmission area is formed between the two transmission devices, the driving device drives the main transmission device, the main transmission The device synchronously drives the two secondary transmissions, wherein the secondary transmission includes a bearing housing, a magnetic transmission shaft, a first helical gear, and a plurality of mutually corresponding first permanent magnet gears and a magnetic transmission unit, the bearing housing Connected to the bottom plate, the magnetic transmission unit is pivotally connected to the bearing housing in parallel, and the magnetic transmission unit has a roller extending into the conveying area; the first helical gear is fixed to the a magnetic transmission shaft, the main transmission device has a second helical gear that meshes with the first helical gear, and the axial direction of the first helical gear and the second helical gear The first permanent magnet gear is fixed on the magnetic drive shaft, the magnetic transmission unit has a second permanent magnet gear corresponding to the first permanent magnet gear, and the first permanent magnet gear and the first permanent magnet gear The two permanent magnet gears are axially perpendicular to each other, and the first permanent magnet gear drives the second permanent magnet gear by a magnetic field. Preferably, the magnetic transmission unit further includes a roller shaft fixedly coupled to the second permanent magnet gear, the roller shaft is pivotally connected to the bearing housing, and one end of the roller shaft passes through the bearing housing and Extending into the transfer area to connect with the roller, more specifically, the magnetic transfer unit further includes a gasket connected to one side of the roller facing the transfer area, and the roller forms a step with the washer When the substrate is transmitted, the roller shaft fixedly connected with the second permanent magnet gear is rotated by the rotation of the second permanent magnet gear, so that the pad and the roller on the roller shaft rotate together, and the substrate is carried on the roller and the pad to form On the step, on the one hand, the friction between the gasket and the substrate is used to realize the transmission of the substrate, and on the other hand, the substrate is restrained by the side wall of the roller, thereby realizing the stability of the substrate during transmission, and being effective. Prevents the offset of the substrate from being transmitted.
较佳地， 所述磁传输单元还包括轴套， 所述轴套连接于伸入所述传送区域 内的滚轮轴的一端上， 所述滚轮及垫圈依次连接于所述轴套上， 滚轮及垫圈通 过轴套连接于传送区域内的滚轮轴上， 可以通过调节轴套实现对滚轮沿着滚轮 轴轴向的调节， 滚轮沿滚轮轴进行轴向调节时， 垫圏也随之沿轴向移动， 因此 可适应不同尺寸的基片传输， 使得传输机构的适用性更强， 使用范围更加广泛。  Preferably, the magnetic transmission unit further includes a sleeve, the sleeve is connected to one end of the roller shaft extending into the conveying area, and the roller and the washer are sequentially connected to the sleeve, the roller and The washer is connected to the roller shaft in the conveying area through the sleeve, and the axial adjustment of the roller along the roller shaft can be realized by adjusting the sleeve. When the roller is axially adjusted along the roller shaft, the pad is also moved along the axial direction. Therefore, it can adapt to the substrate transmission of different sizes, making the transmission mechanism more applicable and wider in use.
较佳地， 所述轴承箱呈中空结构， 所述中空结构形成安装槽， 所述滚轮轴 枢接于所述安装槽的两侧壁上， 且所述第二永磁齿轮位于所述安装槽内， 进一 步避免了在传动过程中产生的或外界的细小灰尘颗粒进入到传送区域内， 从而 较好的保持真空室和基片的清洁度， 为基片所进行的下一步工序提供了高质量 的基片。  Preferably, the bearing housing has a hollow structure, the hollow structure forms a mounting slot, the roller shaft is pivotally connected to the two sidewalls of the mounting slot, and the second permanent magnet gear is located in the mounting slot Further, the fine dust particles generated during the transmission process or outside are further prevented from entering the transfer area, thereby better maintaining the cleanliness of the vacuum chamber and the substrate, and providing high quality for the next step of the substrate. The substrate.
较佳地， 所述次传动装置还包括轴承座， 所述轴承座安装于所述安装槽内， 所述磁传动轴枢接于所述轴承座上， 且固定于所迷磁传动轴上的第一永磁齿轮 位于所述第二永磁齿轮正下方； 由于第一永磁齿轮与第二永磁齿轮轴向相互垂 直， 且第一永磁齿轮通过磁场驱动第二永磁齿轮， 第一 7 磁齿轮与第二永磁齿 轮之间的非接触式传动方式使得基片在传输过程中不会产生因接触式摩擦传送 方式所产生的细小灰尘颗粒和噪音， 使得基片传输时清洁度高、 噪声低， 另， 由于第一永磁齿轮与第二永磁齿轮为非接触式传动方式， 使得第一永磁齿轮与 第二永磁齿轮的使用寿命大大增加， 进而增加了整个基片传输机构的寿命并且 使得制造成本大为降低。 较佳地， 所述主传动装置还包括输入轴， 所述输入轴与所述驱动装置连接， 所述第二斜齿轮位于所述安装槽内并固定于所述输入轴上； 输入轴与磁传动轴 之间通过斜齿轮传输动力， 能接受较大功率传送的同时实现基片的高速传送， 由于输入轴同步的带动两次传动装置的两磁传动轴转动， 使得传动较为平稳， 因此冲击、 震动和噪声大为较小， 使斜齿轮及整个传输机构的使用寿命增长， 另由于第二斜齿轮位于所述安装槽内， 使得发生接触传动的第一斜齿轮与第二 斜齿轮均位于所述安装槽内， 通过安装槽有效的将第一斜齿轮和第二斜齿轮与 传送区域和外界隔离开， 有效的防止了第一斜齿轮与第二斜齿轮接触啮合传动 时所产生的细小灰尘颗粒进入到传送区域内， 同时也大大的降低了因第一斜齿 轮与第二斜齿轮接触啮合传动时所产生的噪音。 Preferably, the secondary transmission device further includes a bearing seat, the bearing housing is mounted in the mounting groove, the magnetic transmission shaft is pivotally connected to the bearing housing, and is fixed on the magnetic transmission shaft. The first permanent magnet gear is located directly below the second permanent magnet gear; since the first permanent magnet gear and the second permanent magnet gear are axially perpendicular to each other, and the first permanent magnet gear drives the second permanent magnet gear through the magnetic field, the first 7 The non-contact transmission between the magnetic gear and the second permanent magnet gear makes the substrate not produce fine dust particles and noise generated by the contact friction transmission during the transmission process, so that the substrate is cleaned with high cleanliness. The noise is low. In addition, since the first permanent magnet gear and the second permanent magnet gear are non-contact transmission modes, the service life of the first permanent magnet gear and the second permanent magnet gear is greatly increased, thereby increasing the entire substrate transmission. The life of the mechanism and the manufacturing costs are greatly reduced. Preferably, the main transmission device further includes an input shaft, the input shaft is coupled to the driving device, the second helical gear is located in the mounting groove and is fixed on the input shaft; the input shaft and the magnetic The transmission shaft transmits power between the transmission shafts, and can receive high-speed transmission of the substrate while receiving large power transmission. Since the input shaft synchronously drives the two magnetic transmission shafts of the two transmissions to rotate, the transmission is relatively stable, so the impact, The vibration and noise are much smaller, the service life of the helical gear and the entire transmission mechanism is increased, and the second helical gear is located in the installation groove, so that the first helical gear and the second helical gear that are in contact with the transmission are located at the In the mounting groove, the first helical gear and the second helical gear are effectively separated from the conveying region and the outside by the mounting groove, thereby effectively preventing the fine dust generated when the first helical gear and the second helical gear are in meshing engagement transmission. The particles enter the transfer area, and at the same time, the noise generated by the first helical gear and the second helical gear in meshing engagement transmission is greatly reduced.
较佳地， 所述轴^^座或 /和所述轴承箱上安装有传感器， 传感器可以精确的 控制基片的传输位置， 保证了基片后续工艺的制造精度， 提高产品的合格率。  Preferably, the shaft mount or / and the bearing housing are mounted with sensors, and the sensor can accurately control the transmission position of the substrate, thereby ensuring the manufacturing precision of the subsequent process of the substrate and improving the yield of the product.
较佳地， 所述驱动装置为伺服电机， 伺服电机具有低震动、 高速高响应、 高精度等特性， 使得基片在传输的过程中快速、 平稳、 精确、 且低噪音。  Preferably, the driving device is a servo motor, and the servo motor has the characteristics of low vibration, high speed, high response, high precision, etc., so that the substrate is fast, stable, accurate, and low in noise during transmission.
与现有技术相比， 由于本发明基片传输机构具有平行的连接于底板两侧且 分别与主传动装置连接的两个次传动装置， 两个次传动装置之间形成供基片传 输的传送区域， 主传动装置同步的驱动两个次传动装置； 次传动装置包括轴承 箱、 磁传动轴、 第一斜齿轮及多个相互对应的第一永磁齿轮和磁传输单元， 轴 承箱连接于底板上， 磁传输单元呈平行的枢接于轴承箱上， 且磁传输单元具有 伸入传送区域的滚轮， 还具有与第一永磁齿轮相对应的第二永磁齿轮， 由于第 一 7 磁齿轮与第二永磁齿轮轴向相互垂直， 且第一永磁齿轮通过磁场驱动第二 永磁齿轮， 第一永磁齿轮与第二永磁齿轮之间的非接触式传动方式使得基片在 传输过程中不会产生因接触式摩擦传送方式所产生的细小灰尘颗粒和噪音， 使 得基片传输时清洁度高、 噪声低， 同时， 由于第一永磁齿轮与第二永磁齿轮为 非接触式传动方式， 使得第一永磁齿轮与第二永磁齿轮的使用寿命大大增加， 进而增加了整个基片传输机构的寿命并且使得制造成本大为降低； 由于主传动 装置具有与第一斜齿轮相啮合的第二斜齿轮， 且第一斜齿轮与第二斜齿轮的轴 向相互垂直， 主传动装置同步的驱动两个次传动装置， 使基片传输时冲击、 振 动减小， 传输更加平稳； 另， 由于具有轴承箱， 通过轴承箱有效的将主传动装 置与次传动装置的具有传动功能的部分与传送区域和外界隔离开， 有效的防止 了主传动装置与次传动装置的具有传动功能的部分因接触传动所产生的细小灰 尘颗粒进入到传送区域内， 同时也大大的降低了因接触传动所产生的噪音。 附图说明 Compared with the prior art, since the substrate transport mechanism of the present invention has two secondary transmissions connected to both sides of the bottom plate and respectively connected to the main transmission, the transmission of the substrate transmission is formed between the two secondary transmissions. In the region, the main transmission synchronously drives the two secondary transmissions; the secondary transmission includes a bearing housing, a magnetic transmission shaft, a first helical gear and a plurality of first permanent magnet gears and a magnetic transmission unit corresponding to each other, and the bearing housing is connected to the bottom plate The magnetic transmission unit is pivotally connected to the bearing housing in parallel, and the magnetic transmission unit has a roller extending into the transmission area, and has a second permanent magnet gear corresponding to the first permanent magnet gear, because the first 7 magnetic gear The second permanent magnet gear is axially perpendicular to each other, and the first permanent magnet gear drives the second permanent magnet gear by a magnetic field, and the non-contact transmission between the first permanent magnet gear and the second permanent magnet gear causes the substrate to be transmitted During the process, fine dust particles and noise generated by the contact friction transmission method are not generated, so that the substrate is cleaned with high cleanliness and low noise, and at the same time, due to the first permanent magnet The gear and the second permanent magnet gear are in a non-contact transmission manner, so that the service life of the first permanent magnet gear and the second permanent magnet gear is greatly increased, thereby increasing the life of the entire substrate transmission mechanism and greatly reducing the manufacturing cost; Since the main transmission has a second helical gear that meshes with the first helical gear, and the axial direction of the first helical gear and the second helical gear are perpendicular to each other, the main transmission synchronously drives the two secondary transmissions to transmit the substrate. Impact, vibration The movement is reduced, and the transmission is more stable; in addition, since the bearing housing has the bearing box, the main transmission device and the transmission function portion of the secondary transmission device are effectively separated from the transmission region and the outside, effectively preventing the main transmission device from being The portion of the secondary transmission that has the transmission function enters the transmission area by the fine dust particles generated by the contact transmission, and also greatly reduces the noise generated by the contact transmission. DRAWINGS
图 la是本发明基片传输机构的结构示意图。  Figure la is a schematic structural view of a substrate transfer mechanism of the present invention.
图 lb是本发明基片传输机构传输基片的状态示意图。  Figure 1b is a schematic view showing the state of the substrate transporting substrate of the present invention.
图 2是图 la中 A部分的放大示意图。  Figure 2 is an enlarged schematic view of a portion A of Figure la.
图 3是图 la中 B部分的放大示意图。  Figure 3 is an enlarged schematic view of a portion B of Figure la.
图 4是图 la中 C部分的放大示意图。 具体实施方式  Figure 4 is an enlarged schematic view of a portion C of Figure la. detailed description
现在参考附图描述本发明的实施例， 附图中类似的元件标号代表类似的元 件。  Embodiments of the present invention will now be described with reference to the drawings, in which like reference numerals represent like elements.
如图 la、 图 lb及图 2所示， 本发明基片传输机构 1包括驱动装置（图中未 示）、 主传动装置 30、 底板 10及两个次传动装置 20， 驱动装置与主传动装置 30 连接， 两个次传动装置 20呈平行的连接于底板 10两侧且分别与所述主传动装 置 30连接， 两次传动装置 20之间形成传送区域 101 , 所述驱动装置驱动主传动 装置 30 , 主传动装置 30同步的驱动两次传动装置 20, 其中， 所述次传动装置 20包括轴承箱 201、 磁传动轴 202、 第一斜齿轮 202a及多个相互对应的第一永 磁齿轮 202b和磁传输单元 203; 轴承箱 201连接于所述底板 10上， 磁传输单元 203平行的枢接于轴承箱 201上，且磁传输单元 203具有伸入传送区域 101的滚 轮 203e; 第一斜齿轮 202a固定于磁传动轴 202上， 主传动装置 30具有与第一 斜齿轮 202a相啮合的笫二斜齿轮 30a， 且笫一斜齿轮 202a与笫二斜齿轮 30a的 轴向相互垂直， 第一永磁齿轮 202b固定于磁传动轴 202上， 磁传输单元 203具 有与所述第一永磁齿轮 202b相对应的第二永磁齿轮 203b, 第一永磁齿轮 202b 与第二永磁齿轮 203b轴向相互垂直， 所述第一永磁齿轮 202b通过磁场驱动第 二永磁齿轮 203b; 具体地， 所述轴承箱 201呈中空结构， 中空结构形成安装槽 201a, 所述滚轮轴 203 a枢接于安装槽的两侧壁 201 b上， 且所述第二永磁齿轮 203b位于所述安装槽 201a内； 更具体地， 结合图 3及图 4所示， 如下： As shown in FIG. 1a, FIG. 1b and FIG. 2, the substrate transport mechanism 1 of the present invention comprises a driving device (not shown), a main transmission device 30, a bottom plate 10 and two secondary transmission devices 20, a driving device and a main transmission device. 30. The two secondary transmissions 20 are connected in parallel to both sides of the bottom plate 10 and are respectively connected to the main transmission device 30. A transmission area 101 is formed between the two transmission devices 20, and the driving device drives the main transmission device 30. The main transmission device 30 drives the transmission device 20 synchronously, wherein the secondary transmission device 20 includes a bearing housing 201, a magnetic transmission shaft 202, a first helical gear 202a, and a plurality of mutually corresponding first permanent magnet gears 202b. The magnetic transmission unit 203; the bearing housing 201 is connected to the bottom plate 10, the magnetic transmission unit 203 is pivotally connected to the bearing housing 201 in parallel, and the magnetic transmission unit 203 has a roller 203e extending into the transmission area 101; the first helical gear 202a Fixed to the magnetic drive shaft 202, the main transmission 30 has a bevel gear 30a that meshes with the first helical gear 202a, and the first helical gear is axially perpendicular to the bevel gear 30a, the first permanent magnet Gear 202b solid To the magnetic shaft 202, the magnetic transfer unit 203 having the first permanent magnet gear 202b corresponding to the second permanent magnet gear 203b, a first permanent magnet gear 202b The second permanent magnet gear 203b is axially perpendicular to the second permanent magnet gear 203b. The first permanent magnet gear 202b drives the second permanent magnet gear 203b by a magnetic field. Specifically, the bearing housing 201 has a hollow structure, and the hollow structure forms a mounting groove 201a. The roller shaft 203 a is pivotally connected to the two side walls 201 b of the mounting groove, and the second permanent magnet gear 203 b is located in the mounting groove 201 a ; more specifically, as shown in FIG. 3 and FIG. 4 , as follows:
较佳者， 本发明基片传输机构 1的次传动装置 20还包括轴承座 204, 轴承 座 204位安装于安装槽 201a内， 磁传动轴 202枢接于所述轴承座 204上， 且固 定于磁传动轴 202上的第一永磁齿轮 202b位于所述第二永磁齿轮 203b正下方。 由于第一永磁齿轮 202b与第二永磁齿轮 203b轴向相互垂直， 且第一 7j磁齿轮Preferably, the secondary transmission 20 of the substrate transport mechanism 1 of the present invention further includes a bearing housing 204. The bearing housing 204 is mounted in the mounting slot 201a. The magnetic drive shaft 202 is pivotally connected to the bearing housing 204 and is fixed to the bearing housing 204. The first permanent magnet gear 202b on the magnetic drive shaft 202 is located directly below the second permanent magnet gear 203b. Since the first permanent magnet gear 202b and the second permanent magnet gear 203b are axially perpendicular to each other, and the first 7 j magnetic gear
202b通过磁场驱动第二永磁齿轮 203b ,第一永磁齿轮 202b与第二永磁齿轮 203b 之间的非接触式传动方式使得基片在传输过程中不会产生因接触式摩擦传送方 式所产生的细小灰尘颗粒和噪音， 使得基片传输时清洁度高、 噪声低， 另， 由 于第一永磁齿轮 202b与第二永磁齿轮 203b为非接触式传动方式， 使得第一永 磁齿轮 202b与第二永磁齿轮 203b的使用寿命大大增加， 进而增加了整个基片 传输机构 1的寿命并且使得制造成本大为降低。 202b drives the second permanent magnet gear 203b by the magnetic field, and the non-contact transmission mode between the first permanent magnet gear 202b and the second permanent magnet gear 203b causes the substrate to be generated during the transmission process due to the contact friction transmission mode. The fine dust particles and noise make the substrate have high cleanliness and low noise during transmission. In addition, since the first permanent magnet gear 202b and the second permanent magnet gear 203b are in a non-contact transmission manner, the first permanent magnet gear 202b and the first permanent magnet gear 202b are The service life of the second permanent magnet gear 203b is greatly increased, thereby increasing the life of the entire substrate transfer mechanism 1 and greatly reducing the manufacturing cost.
较佳者， 本发明基片传输机构 1的磁传输单元 203还包括与第二永磁齿轮 203b固定连接的滚轮轴 203a,所述滚轮轴 203a与轴承箱 201枢接， 所述滚轮轴 203a的一端穿过轴承箱 201并伸入传送区域内 101与滚轮 203e连接；磁传输单 元 203还包括垫圈 203d， 垫圏 203d连接于朝向传送区域 101的滚轮 203e的一 侧，且滚轮 203e与垫圈 203d形成台阶 203f,基片传输时将基片承栽于滚轮 203e 与垫圏 203d形成台阶 203f上， 一方面利用垫圈 203d与基片 la的下表面 lc之 间的摩擦力， 实现基片 la的传输， 另一方面通过滚轮 203e的侧壁 203g对基片 la进行限位， 实现基片 la在传输时的平稳， 并且能有效的防止基片 la发生传 输的偏移； 磁传输单元 203还包括轴套 203c, 所轴套 203c连接于伸入传送区域 101内的滚轮轴 203a的一端上，垫圏 203d及滚轮 203e依次连接于轴套 203c上。  Preferably, the magnetic transmission unit 203 of the substrate transport mechanism 1 of the present invention further includes a roller shaft 203a fixedly coupled to the second permanent magnet gear 203b, the roller shaft 203a being pivotally coupled to the bearing housing 201, and the roller shaft 203a One end passes through the bearing housing 201 and extends into the transfer area 101 to be coupled to the roller 203e; the magnetic transfer unit 203 further includes a washer 203d connected to one side of the roller 203e toward the transfer area 101, and the roller 203e and the washer 203d are formed. Step 203f, when the substrate is transported, the substrate is loaded on the roller 203e and the pad 203d to form a step 203f. On the one hand, the friction between the washer 203d and the lower surface lc of the substrate 1a is used to realize the transmission of the substrate la. On the other hand, the substrate la is restrained by the side wall 203g of the roller 203e, thereby achieving smoothness of the substrate 1a during transmission, and effectively preventing the substrate la from being displaced. The magnetic transmission unit 203 further includes a sleeve. 203c, the sleeve 203c is connected to one end of the roller shaft 203a extending into the conveying area 101, and the pad 203d and the roller 203e are sequentially connected to the sleeve 203c.
较佳者， 本发明基片传输机构 1的主传动装置 30包括输入轴 30b及第二斜 齿轮 30a, 入轴 30b—端与驱动装置连接， 另一端分別与两次传动装置 20连 接， 当驱动装置驱动主传动装置 30， 主传动装置 30 同步的驱动两次传动装置 20; 主传动装置 30的第二斜齿轮 30a固定于输入轴 30b上， 且第二斜齿轮 30a 位于安装槽 201a内； 在磁传动轴 202上固定有与第二斜齿轮 30a相互粘合的第 一斜齿轮 202a， 第二斜齿轮 30a与第一斜齿轮 202a的轴向相互垂直， 在输入轴 30b与磁传动轴 202之间通过第二斜齿轮 30a与第一斜齿轮 202a来传输动力， 能满足较大功率传送的同时并实现基片的高速传送， 且由于主传动装置 30同步 的驱动两次传动装置 20, 使得传动较为平稳， 因此能够^ ί艮好的减小冲击、 震动 和噪声， 使第二斜齿轮 30a与第一斜齿轮 202a及整个传输机构 1的使用寿命增 长； 另外， 由于第二斜齿轮 30a位于安装槽 201a内， 使得发生接触传动的第一 斜齿轮 202a与第二斜齿轮 30a均位于安装槽 201a内， 通过安装槽 201a有效的 将第一斜齿轮 202a和第二斜齿轮 30a与传送区域 101和外界隔离开， 有效的防 止了第一斜齿轮 202a与第二斜齿轮 30a接触啮合传动时所产生的细小灰尘颗粒 进入到传送区域 101内， 同时也大大的降低了因第一斜齿轮 202a与第二斜齿轮 30a接触啮合传动时所产生的噪音。 Preferably, the main transmission 30 of the substrate transport mechanism 1 of the present invention comprises an input shaft 30b and a second helical gear 30a, the input shaft 30b is connected to the driving device, and the other end is connected to the two transmissions 20 respectively. The device drives the main transmission device 30, and the main transmission device 30 drives the transmission device 20 synchronously; the second helical gear 30a of the main transmission device 30 is fixed to the input shaft 30b, and the second helical gear 30a Located in the mounting groove 201a; a first helical gear 202a bonded to the second helical gear 30a is fixed to the magnetic drive shaft 202, and the second helical gear 30a and the first helical gear 202a are perpendicular to each other in the axial direction of the input shaft The power transmitted between the 30b and the magnetic drive shaft 202 through the second helical gear 30a and the first helical gear 202a can transmit power at the same time as the high power transmission and achieve high speed transmission of the substrate, and the two main drives 30 are synchronously driven. The secondary transmission device 20 makes the transmission smoother, so that the shock, vibration and noise can be reduced, and the service life of the second helical gear 30a and the first helical gear 202a and the entire transmission mechanism 1 is increased; The second helical gear 30a is located in the mounting groove 201a such that the first helical gear 202a and the second helical gear 30a that are in contact with each other are located in the mounting groove 201a, and the first helical gear 202a and the second oblique are effectively passed through the mounting groove 201a. The gear 30a is separated from the transmission area 101 and the outside, effectively preventing the fine dust particles generated when the first helical gear 202a and the second helical gear 30a are in meshing engagement transmission into the transmission area 101. But also greatly reduces the noise caused when the first bevel gear 202a in contact with the second drive bevel gear 30a meshing produced.
如图 la、 图 lb及图 3所示， 本发明基片传输机构 1的次传动装置 20， 次传 动装置 20的轴承箱 201的中空结构形成安装槽 201a,轴承座 204安装于安装槽 201a内， 磁传动轴 202枢接于轴承座 204上， 且固定于磁传动轴 202上的第一 永磁齿轮 202b位于安装槽 201a内， 磁传输单元 203的滚轮轴 203a枢接于安装 槽 201a的两侧壁 201b上，且第二永磁齿轮 203b位于安装槽 201a内， 并位于第 一永磁齿轮 202b的正上方，滚轮轴 203a上的第二永磁齿轮 203b与磁传动轴 202 上的第一永磁齿轮 202b垂直安装， 传输基片时第一永磁齿轮 202b通过磁场驱 动第二永磁齿轮 203b， 进而带动磁传输单元 203的滚轮轴 203a转动， 在磁传动 轴 202与磁传输单元 203之间利用第一永磁齿轮 202b、第二永磁齿轮 203b产生 的磁场来传输动力； 由于第一永磁齿轮 202b与第二永磁齿轮 203b轴向相互垂 直，且第一永磁齿轮 202b通过磁场驱动第二永磁齿轮 203b,第一永磁齿轮 202b 与第二永磁齿轮 203b之间的非接触式传动方式使得基片在传输过程中不会产生 因接触式摩擦传送方式所产生的细小灰尘颗粒和噪音， 使得基片传输时清洁度 高、 噪声低， 同时， 由于第一永磁齿轮 202b与第二永磁齿轮 203b为非接触式 传动方式， 使得第一永磁齿轮 202b与第二永磁齿轮 203b的使用寿命大大增加， 进而增加了整个基片传输机构 1的寿命并且使得制造成本大为降低。 如图 la、 图 lb及图 4所示， 本发明基片传输机构 1的磁传输单元 203包括 滚轮轴 203a、 第二永磁齿轮 203b、 轴套 203c、 垫圏 203d及滚轮 203e, 滚轮轴 203a与轴承箱 201枢接， 且滚轮轴 203a的一端穿过轴承箱 201并伸入传送区域 101内与滚轮 203e连接， 第二永磁齿轮 203b固定于滚轮轴 203a上且位于轴承 箱 201的安装槽 201a内， 轴套 203c连接于伸入传送区域 101 内的滚轮轴 203a 的一端上， 垫圏 203d及滚轮 203e依次连接于轴套 203c上，且滚轮 203e与垫圏 203d形成台阶 203f;基片传输时将基片 la承载于滚轮 203e与垫圈 203d形成台 阶 203f上，一方面利用垫圏 203d与基片 la之间的摩擦力，实现基片 la的传输， 另一方面通过滚轮 203e的侧壁 203g对基片 la进行限位，实现基片 la在传输时 的平稳， 并且能有效的防止基片 la发生传输的偏移； 另外， 由于滚轮 203e通过 垫圈 203d及轴套 203c连接于滚轮轴 203a上，可通过调节轴套 203c对滚轮 203e 进行轴向调节， 当调节滚轮 203e时， 垫圏 203d也随着滚轮 203e一起沿着滚轮 轴 203a的轴向移动， 因此能适应不同尺寸的基片传输， 使得传输机构的适用性 强， 使用范围更加广泛。 As shown in FIG. 1a, FIG. 1b and FIG. 3, the secondary transmission device 20 of the substrate transfer mechanism 1 of the present invention, the hollow structure of the bearing housing 201 of the secondary transmission device 20 forms a mounting groove 201a, and the bearing housing 204 is mounted in the mounting groove 201a. The magnetic drive shaft 202 is pivotally connected to the bearing housing 204, and the first permanent magnet gear 202b fixed on the magnetic drive shaft 202 is located in the mounting slot 201a, and the roller shaft 203a of the magnetic transmission unit 203 is pivotally connected to the mounting slot 201a. On the side wall 201b, and the second permanent magnet gear 203b is located in the mounting groove 201a and located directly above the first permanent magnet gear 202b, the second permanent magnet gear 203b on the roller shaft 203a and the first on the magnetic drive shaft 202 The permanent magnet gear 202b is vertically mounted. When the substrate is transported, the first permanent magnet gear 202b drives the second permanent magnet gear 203b by the magnetic field, thereby driving the roller shaft 203a of the magnetic transmission unit 203 to rotate, and the magnetic transmission shaft 202 and the magnetic transmission unit 203 The magnetic field generated by the first permanent magnet gear 202b and the second permanent magnet gear 203b is used to transmit power; since the first permanent magnet gear 202b and the second permanent magnet gear 203b are axially perpendicular to each other, and the first permanent magnet gear 202b passes the magnetic field Driving the second permanent magnet 203b, the non-contact transmission between the first permanent magnet gear 202b and the second permanent magnet gear 203b causes the substrate to not generate fine dust particles and noise generated by the contact friction transmission mode during the transmission, so that the base The sheet has high cleanliness and low noise during transmission, and at the same time, since the first permanent magnet gear 202b and the second permanent magnet gear 203b are in a non-contact transmission manner, the service life of the first permanent magnet gear 202b and the second permanent magnet gear 203b is made. The increase is greatly increased, which in turn increases the life of the entire substrate transport mechanism 1 and greatly reduces the manufacturing cost. As shown in FIG. 1a, FIG. 1b and FIG. 4, the magnetic transmission unit 203 of the substrate transport mechanism 1 of the present invention includes a roller shaft 203a, a second permanent magnet gear 203b, a sleeve 203c, a pad 203d and a roller 203e, and a roller shaft 203a. The bearing housing 201 is pivotally connected, and one end of the roller shaft 203a passes through the bearing housing 201 and extends into the conveying area 101 to be connected with the roller 203e. The second permanent magnet gear 203b is fixed to the roller shaft 203a and is located in the mounting groove of the bearing housing 201. 201a, the sleeve 203c is connected to one end of the roller shaft 203a extending into the conveying area 101, the pad 203d and the roller 203e are sequentially connected to the sleeve 203c, and the roller 203e and the pad 203d form a step 203f; The substrate la is carried on the step 203f by the roller 203e and the gasket 203d. On the one hand, the friction between the pad 203d and the substrate la is used to realize the transmission of the substrate la, and on the other hand, the side wall 203g of the roller 203e. The substrate la is limited to achieve smoothness of the substrate la during transmission, and can effectively prevent the substrate la from being displaced. Further, since the roller 203e is connected to the roller shaft 203a through the washer 203d and the sleeve 203c Can be adjusted by adjusting the sleeve 20 3c axially adjusts the roller 203e. When the roller 203e is adjusted, the pad 203d also moves along the axial direction of the roller shaft 203a along with the roller 203e, so that it can adapt to the substrate transmission of different sizes, so that the applicability of the transmission mechanism Strong, more widely used.
较佳者， 本发明基片传输机构 1在轴承座 204或 /和轴承箱 201上安装有传 感器（图中未示）， 所安装的传感器可为一个或多个， 以检测齿轮的转速或基片 的移动距离， 并将检测到的信号通过控制系统传给驱动装置， 由驱动装置调节 齿轮的转速， 精确的控制基片的传输位置， 保证了基片后续工艺的制造精度， 提高产品的合格率； 在本发明中驱动装置为伺服电机， 伺服电机具有低震动、 高速高响应、 高精度等特性， 使得基片在传输的过程中快速、 平稳、 精确、 且 4氐噪音。  Preferably, the substrate transport mechanism 1 of the present invention has a sensor (not shown) mounted on the bearing housing 204 or/and the bearing housing 201. The mounted sensor may be one or more to detect the rotational speed or base of the gear. The moving distance of the piece, and the detected signal is transmitted to the driving device through the control system, the driving device adjusts the rotation speed of the gear, and precisely controls the transmission position of the substrate, thereby ensuring the manufacturing precision of the subsequent process of the substrate and improving the qualification of the product. In the invention, the driving device is a servo motor, and the servo motor has the characteristics of low vibration, high speed, high response, high precision, etc., so that the substrate is fast, stable, accurate, and 4 氐 noise in the process of transmission.
结合图 la至图 4对本发明基片传输机构 1传输基片的工作原理做一详细的 说明：  A detailed description of the working principle of the substrate transfer mechanism 1 of the present invention will be described in conjunction with FIG.
当基片 la进入到传送区域 101时， 伺服电机驱动输入轴 30b转动， 固定在 输入轴 30b上的第二斜齿轮 30a随之转动， 由于输入轴 30b上的第二斜齿轮 30a 与磁传动轴 202上的第一斜齿轮 202a啮合， 因此带动磁传动轴 202转动， 磁传 动轴 202的转动使得磁传动轴 202上的第一永磁齿轮 202b随之转动， 由于磁传 动轴 202上的第一永磁齿轮 202b与磁传输单元 203的第二永磁齿轮 203b垂直 安装， 磁传动轴 202上的第一永磁齿轮 202b与磁传输单元 203的第二永磁齿轮 203b之间通过磁场作用带动磁传输单元 203转动， 因此磁传输单元 203的滚轮 轴 203a随之转动； 由于滚轮轴 203a上安装有轴套 203c, 垫圈 203d及滚轮 203 e 依次连接于轴套 203c上， 且滚轮 203e与垫圈 203d形成台阶 203 f， 滚轮轴 203a 转动使垫圏 203d与滚轮 203 e一起转动，通过垫圏 203d与被传输的基片 la之间 的摩擦力， 实现基片 la的平稳传送， 具体地， 在基片 la传输时， 基片 la承载 于滚轮 203e与垫圈 203d形成台阶 203fJ ,基片 la的下表面 lc承载于垫圈 203d 的上表面上，基片 la的两侧壁 lb与滚轮 203e的侧壁 203g接触， 利用垫圏 203d 与基片 la的下表面 lc之间的摩擦力， 实现基片 la的传输， 并且通过滚轮 203e 的侧壁 203g对基片 la进行限位， 实现基片 la在传输时的平稳， 并且能有效的 防止基片 la发生传输的偏移； 当基片 la的尺寸改变时， 可以沿着滚轮轴 203a 的轴向对滚轮 203 e进行调节， 滚轮 203e上的垫圏 203d也随滚轮 203 e—起沿滚 轮轴 203a的轴向移动， 来适应不同尺寸的基片传输。 When the substrate la enters the transfer area 101, the servo motor drive input shaft 30b rotates, and the second bevel gear 30a fixed to the input shaft 30b rotates accordingly, due to the second bevel gear 30a and the magnetic drive shaft on the input shaft 30b. The first helical gear 202a on the mesh 202 engages, thereby causing the magnetic drive shaft 202 to rotate, and the rotation of the magnetic drive shaft 202 causes the first permanent magnet gear 202b on the magnetic drive shaft 202 to rotate accordingly, due to the first on the magnetic drive shaft 202. The permanent magnet gear 202b is perpendicular to the second permanent magnet gear 203b of the magnetic transmission unit 203 The magnetic transmission unit 203 is rotated by the magnetic field between the first permanent magnet gear 202b on the magnetic transmission shaft 202 and the second permanent magnet gear 203b of the magnetic transmission unit 203, so that the roller shaft 203a of the magnetic transmission unit 203 rotates accordingly. Since the roller sleeve 203a is mounted with the sleeve 203c, the washer 203d and the roller 203e are sequentially connected to the sleeve 203c, and the roller 203e and the washer 203d form a step 203f, and the roller shaft 203a rotates to cause the pad 203d together with the roller 203e Rotation, the smooth transfer of the substrate la is achieved by the friction between the pad 203d and the substrate la to be transported. Specifically, when the substrate 1a is transported, the substrate 1a is carried by the roller 203e and the washer 203d to form a step 203fJ. The lower surface 1c of the substrate la is carried on the upper surface of the gasket 203d, and the side walls lb of the substrate 1a are in contact with the side wall 203g of the roller 203e, and the friction between the pad 203d and the lower surface lc of the substrate 1a is utilized. Force, realize the transmission of the substrate la, and limit the substrate la through the side wall 203g of the roller 203e, thereby realizing the smoothness of the substrate la during transmission, and effectively preventing the transmission of the substrate la from being shifted; Ruler of the substrate la When changing, the roller 203 e can be adjusted along the axial direction of the roller shaft 203a, and the pad 203d on the roller 203e also moves along the axial direction of the roller shaft 203a with the roller 203e to adapt to the substrate transmission of different sizes. .
本发明基片传输机构 1 ,具有平行的连接于底板 101两侧且分别与主传动装 置 30连接的两个次传动装置 20， 两个次传动装置 20之间形成传送区域 101， 主传动装置 30同步的驱动两个次传动装置 20; 次传动装置 20包括轴承箱 201、 磁传动轴 202、第一斜齿轮 202a及多个相互对应的第一永磁齿轮 202b和磁传输 单元 203， 轴承箱 201连接于底板 10上， 磁传输单元 203呈平行的枢接于轴承 箱 201上， 且磁传输单元 203具有伸入传送区域 101的滚轮 203 e, 及与第一永 磁齿轮 202b相对应的第二永磁齿轮 203b , 第一永磁齿轮 202b与第二永磁齿轮 203b轴向相互垂直， 第一永磁齿轮 202b通过磁场驱动第二永磁齿轮 203b, 由 于第一永磁齿轮 202b与第二永磁齿轮 203b轴向相互垂直，且第一永磁齿轮 202b 通过磁场驱动第二永磁齿轮 203b , 第一永磁齿轮 202b与第二永磁齿轮 203b之 间的非接触式传动方式使得基片 la在传输过程中不会产生因接触式摩擦传送方 式所产生的细小灰尘颗粒和噪音，使得基片 la传输时清洁度高、噪声低， 同时， 由于第一永磁齿轮 202b与第二永磁齿轮 203b为非接触式传动方式， 使得第一 永磁齿轮 202b与第二永磁齿轮 203b的使用寿命大大增加， 进而增加了整个基 片传输机构 1的寿命并且使得制造成本大为降低； 由于主传动装置 30具有与第 一斜齿轮 202a相啮合的第二斜齿轮 30a, 且第一斜齿轮 202a与第二斜齿轮 30a 的轴向相互垂直， 主传动装置 30同步的驱动两个次传动装置 20, 使基片传输时 冲击、 振动减小， 传输更加平稳； 另外， 由于具有轴承箱 201 , 通过轴承箱 201 有效的将主传动装置 30与次传动装置 20的具有传动功能的部分与传送区域和 外界隔离开， 有效的防止了主传动装置 30与次传动装置 20的具有传动功能的 部分因接触传动所产生的细小灰尘颗粒进入到传送区域 101 内， 同时也大大的 低了因因接触传动所产生的噪音。 The substrate transport mechanism 1 of the present invention has two secondary transmissions 20 connected in parallel to the two sides of the bottom plate 101 and respectively connected to the main transmission device 30. A transmission area 101 is formed between the two secondary transmission devices 20, and the main transmission device 30 is formed. Synchronously driving the two secondary transmissions 20; the secondary transmission 20 includes a bearing housing 201, a magnetic transmission shaft 202, a first helical gear 202a, and a plurality of mutually corresponding first permanent magnet gears 202b and a magnetic transmission unit 203, the bearing housing 201 Connected to the bottom plate 10, the magnetic transmission unit 203 is pivotally connected to the bearing housing 201 in parallel, and the magnetic transmission unit 203 has a roller 203e extending into the transmission area 101, and a second corresponding to the first permanent magnet gear 202b. The permanent magnet gear 203b, the first permanent magnet gear 202b and the second permanent magnet gear 203b are axially perpendicular to each other, and the first permanent magnet gear 202b drives the second permanent magnet gear 203b by the magnetic field, because the first permanent magnet gear 202b and the second permanent magnet The magnetic gears 203b are axially perpendicular to each other, and the first permanent magnet gear 202b drives the second permanent magnet gear 203b by a magnetic field, and the non-contact transmission between the first permanent magnet gear 202b and the second permanent magnet gear 203b causes the substrate la During the transmission process The fine dust particles and noise generated by the contact type friction transmission mode are not generated, so that the substrate la is highly clean and low in noise, and at the same time, since the first permanent magnet gear 202b and the second permanent magnet gear 203b are not The contact transmission mode greatly increases the service life of the first permanent magnet gear 202b and the second permanent magnet gear 203b, thereby increasing the life of the entire substrate transport mechanism 1 and greatly reducing the manufacturing cost; since the main transmission 30 has And the first The second helical gear 30a is engaged by the helical gear 202a, and the axial direction of the first helical gear 202a and the second helical gear 30a are perpendicular to each other, and the main transmission 30 drives the two secondary transmissions 20 synchronously to transmit the substrate. The impact and vibration are reduced, and the transmission is more stable. In addition, since the bearing housing 201 is provided, the main transmission device 30 and the transmission function portion of the secondary transmission device 20 are effectively separated from the transmission region and the outside through the bearing housing 201, which is effective. The fine dust particles generated by the contact transmission of the main transmission 30 and the transmission portion of the secondary transmission 20 are prevented from entering the transmission area 101, and the noise due to the contact transmission is also greatly reduced.
本发明基片传输机构 1的第一永磁齿轮 202b驱动第二永磁齿轮 203b的原 理及传感器的安装及检测原理等均为本领域普通技术人员所熟知， 在此不再做 详细的说明。  The principle of the first permanent magnet gear 202b of the substrate transmission mechanism 1 of the present invention for driving the second permanent magnet gear 203b and the mounting and detecting principle of the sensor are well known to those skilled in the art, and will not be described in detail herein.
以上所揭露的仅为本发明的优选实施例而已， 当然不能以此来限定本发明 之权利范围， 因此依本发明申请专利范围所作的等同变化， 仍属本发明所涵盖 的范围。  The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, and the equivalent changes made by the scope of the present invention remain within the scope of the present invention.

Claims

权 利 要 求 Rights request
1.一种基片传输机构， 包括驱动装置、主传动装置、底板及两个次传动装置， 所述驱动装置与所述主传动装置连接， 两个次传动装置呈平行的连接于所述底 板两侧且分别与所述主传动装置连接， 所述两次传动装置之间形成传送区域， 所述驱动装置驱动所述主传动装置， 所述主传动装置同步的驱动两所述次传动 装置， 其特征在于： 所述次传动装置包括轴承箱、 磁传动轴、 第一斜齿轮及多 个相互对应的第一永磁齿轮和磁传输单元， 所述轴承箱连接于所述底板上， 所 述磁传输单元呈平行的枢接于所述轴承箱上， 且所述磁传输单元具有伸入所述 传送区域的滚轮； 所述第一斜齿轮固定于所述磁传动轴上， 所述主传动装置具 有与所述第一斜齿轮相啮合的笫二斜齿轮， 所述第一斜齿轮与第二斜齿轮的轴 向相互垂直， 所述第一永磁齿轮固定于所述磁传动轴上， 所述磁传输单元具有 与所述第一永磁齿轮相对应的第二永磁齿轮， 所述第一永磁齿轮与第二永磁齿 轮轴向相互垂直， 所述第一永磁齿轮通过磁场驱动所述第二永磁齿轮。 A substrate transport mechanism comprising a driving device, a main transmission device, a bottom plate and two secondary transmission devices, wherein the driving device is connected to the main transmission device, and the two secondary transmission devices are connected in parallel to the bottom plate Two sides and respectively connected to the main transmission device, a transmission area is formed between the two transmission devices, the driving device drives the main transmission device, and the main transmission device synchronously drives two of the secondary transmission devices, The secondary transmission device includes: a bearing housing, a magnetic transmission shaft, a first helical gear, and a plurality of first permanent magnet gears and a magnetic transmission unit corresponding to each other, wherein the bearing housing is coupled to the bottom plate, The magnetic transmission unit is pivotally connected to the bearing housing in parallel, and the magnetic transmission unit has a roller extending into the transmission area; the first helical gear is fixed on the magnetic transmission shaft, and the main transmission The device has a bevel gear that meshes with the first helical gear, the first helical gear and the second helical gear are axially perpendicular to each other, and the first permanent magnet gear is fixed to the a magnetic transmission unit having a second permanent magnet gear corresponding to the first permanent magnet gear, wherein the first permanent magnet gear and the second permanent magnet gear are axially perpendicular to each other, the first permanent The magnetic gear drives the second permanent magnet gear by a magnetic field.
2. 如权利要求 1所述的基片传输机构， 其特征在于： 所述磁传输单元还包 括与所述第二永磁齿轮固定连接的滚轮轴， 所述滚轮轴与所述轴承箱枢接， 所 述滚轮轴的一端穿过所述轴承箱并伸入传送区域内与所述滚轮连接。 2. The substrate transfer mechanism according to claim 1, wherein: said magnetic transmission unit further comprises a roller shaft fixedly coupled to said second permanent magnet gear, said roller shaft being pivotally coupled to said bearing housing One end of the roller shaft passes through the bearing housing and protrudes into the conveying area to be connected with the roller.
3. 如权利要求 2所述的基片传输机构， 其特征在于： 所迷磁传输单元还包 括垫圏， 所述垫圏连接于朝向传送区域的所述滚轮的一側， 且所述滚轮与所述 垫圈形成台阶。 3. The substrate transfer mechanism according to claim 2, wherein: the magnetic transfer unit further comprises a pad, the pad is connected to one side of the roller facing the transfer area, and the roller is The gasket forms a step.
4. 如权利要求 3所述的基片传输机构， 其特征在于： 所述磁传输单元还包 括轴套， 所述轴套连接于伸入所述传送区域内的滚轮轴的一端上， 所述垫圈及 滚轮依次连接于所述轴套上。 4. The substrate transfer mechanism according to claim 3, wherein: said magnetic transmission unit further comprises a sleeve, said sleeve being coupled to one end of a roller shaft extending into said transfer area, said A washer and a roller are sequentially connected to the sleeve.
5. 如权利要求 2所述的基片传输机构， 其特征在于： 所述轴承箱呈中空结 构， 所述中空结构形成安装槽， 所述滚轮轴枢接于所迷安装槽的两侧壁上， 且 所述第二永磁齿轮位于所述安装槽内。 5. The substrate transport mechanism according to claim 2, wherein: the bearing housing has a hollow structure, the hollow structure forms a mounting groove, and the roller shaft is pivotally connected to the two side walls of the mounting groove. And the second permanent magnet gear is located in the mounting groove.
6. 如权利要求 5所述的基片传输机构， 其特征在于： 所述次传动装置还包 括轴承座， 所述轴承座安装于所述安装槽内， 所述磁传动轴枢接于所述轴承座 上， 且固定于所述磁传动轴上的第一永磁齿轮位于所述第二永磁齿轮正下方。 6. The substrate transfer mechanism according to claim 5, wherein: the secondary transmission further comprises a bearing seat, the bearing housing is mounted in the mounting groove, and the magnetic drive shaft is pivotally connected to the A first permanent magnet gear fixed to the magnetic drive shaft on the bearing housing is located directly below the second permanent magnet gear.
7. 如权利要求 5所述的基片传输机构， 其特征在于： 所述主传动装置还包 括输入轴， 所述输入轴与所述驱动装置连接， 所述第二斜齿轮位于所述安装槽 内并固定于所述输入轴上。 7. The substrate transport mechanism according to claim 5, wherein: the main transmission further includes an input shaft, the input shaft is coupled to the driving device, and the second helical gear is located in the mounting slot Internally and fixed to the input shaft.
8. 如权利要求 6所述的基片传输机构， 其特征在于： 所述轴承座或 /和所述 轴承箱上安装有传感器。 The substrate transfer mechanism according to claim 6, wherein a sensor is mounted on the bearing housing or / and the bearing housing.
9. 如权利要求 1所述的基片传输机构， 其特征在于： 所述驱动装置为伺服 电机。 9. The substrate transfer mechanism according to claim 1, wherein: said driving device is a servo motor.
PCT/CN2009/076057 2009-06-04 2009-12-25 Substrate transporting mechanism WO2010139174A1 (en)

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