CN111850522A

CN111850522A - Transmission device

Info

Publication number: CN111850522A
Application number: CN202010772639.7A
Authority: CN
Inventors: 张树德; 魏青竹; 倪志春; 时宝; 钱洪强; 连维飞
Original assignee: Suzhou Talesun Solar Technologies Co Ltd
Current assignee: Suzhou Talesun Solar Technologies Co Ltd
Priority date: 2020-08-04
Filing date: 2020-08-04
Publication date: 2020-10-30
Anticipated expiration: 2040-08-04
Also published as: CN111850522B

Abstract

The invention discloses a transmission device which comprises a bearing main body, wherein a plurality of rollers for transmitting a transmission object are symmetrically arranged on two sides of the bearing main body, and limiting parts for preventing the transmission object from entering gaps are arranged in gaps between every two adjacent rollers. Because the spacing parts for preventing the transmission objects from entering the spaces are arranged in the spaces between the adjacent rollers, the transmission objects cannot enter the spaces between the rollers to cause the transmission objects to continuously move forwards, so that the scheme can reduce the probability of the clamping frame quickly and at low cost, reduce the problem of poor product quality caused by the clamping frame, improve the equipment transfer rate and reduce the production cost.

Description

Transmission device

Technical Field

The invention belongs to the technical field of transmission equipment, and particularly relates to a transmission device.

Background

The plate-type PECVD (Plasma Enhanced Chemical vapor Deposition) equipment is a main core equipment for producing a silicon-on-insulator PERC Cell (Passivated emitter and Rear Cell), especially after solving the reliability problem of mass production of cells from 2015, the PERC Cell becomes the mainstream of a crystalline silicon high-efficiency solar Cell, and in the process route of the PERC Cell, the PECVD plate-type equipment is adopted for aluminum oxide process preparation to be the most mature mode.

The plate PECVD equipment adopts a graphite frame carrier to bear crystal silicon wafers, the graphite frame advances between each process cavity of the equipment under the control of rollers, the equipment is in a chain type continuous production mode, the size of the graphite frame is about 1.1 m by 0.85 m (the advancing direction is about 0.85 m long and the width is about 1.1 m), 4 rollers rotate to transmit the graphite frame on each side below a single graphite frame in the advancing direction, the equipment transmission area is about 10m long, the stable transmission of the graphite frame is controlled by horizontally adjusting the rollers, coaxially controlling the rollers and linearly adjusting the accuracy of the rollers, the probability of the graphite frame being clamped is about 0.0125 percent, the process cavity needs to be opened for processing after the graphite frame is clamped for 4 times on average per day according to the CT (Cycle Time, the Cycle Time) of the graphite frame is 27 seconds, the probability of the single frame is 0.0125 percent, the graphite frame is clamped once for 2.5 days, if 10 equipment is adopted, the process cavity needs to be opened for processing each Time, the process cavity is unequal to 2 hours, it can be seen that this severely affects the quality of the product and the equipment survival rate.

The graphite frame is conveyed on the conveying rails, the basic reason for frame clamping is that the friction forces F1 and F2 between the rollers on the left rail and the right rail and the graphite frame are different, the graphite frame turns to cause deviation from the rails in the conveying process, and after the graphite frame turns and deviates in the advancing direction, the front corner position of the frame enters a gap between the two rollers, so that the graphite frame is clamped between the rollers to cause frame clamping. Due to continuous production, after the frame is clamped, a follow-up graphite frame can collide with a front graphite frame, a defective product can easily come out of a silicon wafer in the follow-up graphite frame, a vacuum process cavity needs to be opened after the frame is clamped to process the clamped graphite frame, the required time is long, and products on the graphite frame are easily defective in the vacuum breaking process.

Disclosure of Invention

In order to solve the problems, the invention provides a transmission device which can reduce the probability of clamping frames rapidly and at low cost, reduce the problem of poor product quality caused by the clamping frames, improve the equipment transfer rate and reduce the production cost.

The invention provides a transmission device which comprises a bearing main body, wherein a plurality of rollers for transmitting a transmission object are symmetrically arranged on two sides of the bearing main body, and limiting parts for preventing the transmission object from entering gaps are arranged in gaps between every two adjacent rollers.

Preferably, in the above-mentioned conveying device, a distance between the limiting member and the roller adjacent thereto is in a range of 2mm to 10 mm.

Preferably, in the above-described transport apparatus, a distance between a portion of the side edge of the stopper member near the front end and the edge of the transport object is 1mm, and a distance between a portion of the side edge of the stopper member near the rear end and the edge of the transport object is 2 mm.

Preferably, in the above-mentioned conveying device, a distance between the limiting component and the cavity wall of the carrying main body ranges from 1mm to 5 mm.

Preferably, in the above-described transfer device, the height of the stopper member is 1mm to 5mm higher than the transfer object.

Preferably, in the above-described conveying device, the stopper member is a rectangular parallelepiped stopper.

Preferably, in the above-described transfer device, the stopper member is fixed to the carrier body by a bolt.

Preferably, in the above-mentioned conveying device, the rectangular parallelepiped block is an aluminum rectangular parallelepiped block.

According to the transmission device provided by the invention, as the limiting parts for preventing the transmission object from entering the gaps are arranged in the gaps between the adjacent rollers, the transmission object cannot enter the gaps between the rollers and cannot move forwards continuously, so that the scheme can reduce the probability of clamping the frame quickly and at low cost, reduce the problem of poor product quality caused by clamping the frame, improve the equipment moving rate and reduce the production cost.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

Fig. 1 is a schematic diagram of an embodiment of a transmission device provided in the present invention;

fig. 2 is a schematic diagram illustrating the position distribution between a transmission device and surrounding components according to the present invention.

Detailed Description

The core of the invention is to provide a transmission device, which can reduce the probability of the clamping frame rapidly and at low cost, reduce the problem of poor product quality caused by the clamping frame, improve the equipment grafting rate and reduce the production cost.

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Fig. 1 shows an embodiment of a conveying device provided by the present invention, and fig. 1 is a schematic view of an embodiment of a conveying device provided by the present invention, the conveying device includes a bearing main body 1, a plurality of rollers 2 for conveying a conveying object 4 are symmetrically arranged on both sides of the bearing main body 1, and a spacing component 3 for preventing the conveying object 4 from entering a spacing is arranged in a spacing between adjacent rollers 2.

It should be noted that, the transmission object 4 may be, but not limited to, a graphite frame, and two ends of the transmission object 4 are lapped on the rollers 2, and the transmission object 4 moves forward under the rolling driving of the rollers 2, and precisely because the spacing component 3 is arranged in the gap between the adjacent rollers 2 in the scheme, in the moving process of the transmission object 4, although a slight direction deviation occurs, the transmission object does not enter the gap between the rollers 2, because the spacing component 3 performs spacing this time, the advancing direction of the transmission object 4 can be quickly corrected, the frame clamping phenomenon is avoided, and the working efficiency is effectively improved. It should be noted that the specific shape of the limiting component 3 is not limited, and may be a rectangular parallelepiped shape as shown in fig. 1, or may be other shapes, such as a square, etc., and of course, the size and the distance from other surrounding components are not limited as long as the effective limiting function is achieved.

As can be seen from the above description, in the embodiment of the conveying device provided by the present invention, since the spacing parts for preventing the conveying object from entering the spacing are respectively disposed in the spacing between the adjacent rollers, the conveying object cannot enter the spacing between the rollers and cannot move forward, so that the scheme can rapidly and low-cost reduce the probability of the frame clamping, reduce the problem of poor product quality caused by the frame clamping, improve the plant grafting rate, and reduce the production cost.

In an embodiment of the above-mentioned conveying device, referring to fig. 2, fig. 2 is a schematic diagram of a position distribution detail between the conveying device and the surrounding parts provided by the present invention, and the distance between the limiting part 3 and the roller 2 adjacent to the limiting part may be in a range of 2mm to 10mm, it should be noted that this range is selected because if this distance is too small, the roller and the limiting part may be rubbed together to affect the use, and if the distance is too large, the front corner of the conveying object may enter into the gap between the roller and the limiting part to be jammed. Further, the distance may preferably be 5mm, and other distances may be selected according to actual needs, which is not limited herein.

In another embodiment of the above-described transport apparatus, a distance between a portion 6 of the side edge of the stopper member 3 near the front end and the edge of the transport object is 1mm, and a distance between a portion 7 of the side edge of the stopper member near the rear end and the edge of the transport object is 2 mm. It should be noted that the rear end distance is larger than the front end distance, so that the front end of the transmission object collides with the rear end position, and the orientation of the transmission object can be corrected by the continuous shortening of the advancing distance. Of course, such a distance is also a preferable solution, and other combinations of distances may be selected according to actual needs, and is not limited herein.

In another embodiment of the above-mentioned transfer device, the distance between the position-limiting component 3 and the cavity wall 5 of the carrier body 1 may be in a range from 1mm to 5mm, and the distance is set to ensure that the position-limiting component 3 does not touch the cavity wall 5, although other distances may be selected, and is not limited herein.

In a preferred embodiment of the above-mentioned transfer device, the height of the position limiting member 3 may be 1mm to 5mm higher than the transfer object 4, which may provide a more effective position limiting effect, but the height of the position limiting member 3 may not be too high, since it may not be easily fitted therein.

In another preferred embodiment of the above-mentioned transmission device, the limiting component 3 may be a rectangular block, which is easier to realize limiting function and is more suitable for being installed between the rollers, but other shapes of limiting components may be selected according to actual needs, and are not limited herein.

In another preferred embodiment of the above-mentioned transmission device, with reference to fig. 2, the position-limiting component 3 may be fixed on the bearing main body 1 by using bolts 8, the number of the bolts 8 may preferably be 2, but other numbers may also be selected according to actual needs, and there is no limitation here, as long as the position-limiting component 3 can be firmly fixed on the bearing main body 1, so that it can be ensured that the position-limiting component 3 does not contact with surrounding components to affect the operation of the equipment during operation.

It will be appreciated by those skilled in the art that the rectangular parallelepiped block may preferably be an aluminum rectangular parallelepiped block, which is particularly suitable for the PECVD process, since aluminum oxide is deposited in the PECVD process, and thus no other impurities are introduced into the PECVD process if the material of the rectangular parallelepiped block is selected to be aluminum. Of course, other materials such as stainless steel, copper, graphite, etc. may be selected according to actual needs, and are not limited herein.

Taking the situation of conveying the graphite frame as an example, the effect of the conveying device is verified, the frame clamping rate of the conveying device of the embodiment is only 1/8 of the existing scheme, and due to the existence of the limiting component, the frame is not easy to clamp occasionally, the graphite frame can be withdrawn and recovered basically through the control device, the single treatment time is reduced by one time, and the number of defective products is reduced by one time. Specifically, after the transmission device of the present embodiment is adopted, the frame clamping frequency of 10 devices per day is 4 times, the frame clamping probability is 0.0125%, the post-processing time of a single frame clamping is 20 to 120 minutes, and is on average 45 minutes, the frame clamping failure rate is 1.25%, the number of single defective products is 20 to 120, and is on average 45, and after the transmission device of the present embodiment is adopted, the frame clamping frequency of each 10 devices is 0.5 times, the frame clamping probability is 0.00156%, the post-processing time of a single frame clamping is on average 20 minutes, the failure rate caused by the frame clamping is 0.07%, the number of single defective products is 20 to 50, and is on average 20, so that each device can directly save the cost by 1.73 ten thousand yuan each year.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The conveying device comprises a bearing main body, wherein a plurality of rollers for conveying a conveying object are symmetrically arranged on two sides of the bearing main body, and the conveying device is characterized in that limiting parts for preventing the conveying object from entering the gaps are arranged in gaps between the adjacent rollers.

2. The transfer device of claim 1, wherein the spacing between the stop member and the roller adjacent thereto is in the range of 2mm to 10 mm.

3. The transfer apparatus according to claim 1, wherein a distance between a portion of the side edge of the stopper member near the front end and the edge of the transfer object is 1mm, and a distance between a portion of the side edge of the stopper member near the rear end and the edge of the transfer object is 2 mm.

4. The transfer device of claim 1, wherein the spacing member is spaced from the wall of the cavity of the carrier body by a distance in the range of 1mm to 5 mm.

5. The transfer device according to claim 1, wherein the height of the position restricting member is 1mm to 5mm higher than the transfer object.

6. The transfer device of any one of claims 1-5, wherein the stop member is a cuboid stop.

7. The transfer device of claim 6, wherein the stop member is secured to the carrier body with a bolt.

8. The transfer device of claim 6, wherein the rectangular block is an aluminum rectangular block.