CN202139294U - Graphite carrier transmitting device of PEVCD device - Google Patents
Graphite carrier transmitting device of PEVCD device Download PDFInfo
- Publication number
- CN202139294U CN202139294U CN201120201883U CN201120201883U CN202139294U CN 202139294 U CN202139294 U CN 202139294U CN 201120201883 U CN201120201883 U CN 201120201883U CN 201120201883 U CN201120201883 U CN 201120201883U CN 202139294 U CN202139294 U CN 202139294U
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- China
- Prior art keywords
- graphite
- roller
- wheel
- supporting
- graphite carrier
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a graphite carrier transmitting device of a PEVCD device, which comprises a transmission mechanism and a roller part driven by the transmission mechanism, wherein the roller part comprises a plurality of roller wheels, and the roller wheels comprise a supporting wheel for carrying a graphite carrier, and a stopping wheel which is connected with the supporting wheel, is arranged at the outer side of the supporting wheel, and is used for stopping the graphite carrier. The stopping wheel for stopping the graphite carrier is arranged at the outer side of the supporting wheel, and the graphite carrier is easy to jump onto the stopping wheel when running unstably and is blocked by the stopping wheel so as not to deviate from the transmitting direction, the condition that the graphite carrier is clamped in a technical chamber so as to cause damage of a graphite strip or a graphite strip on the graphite carrier by a clamping plate can be avoided when the graphite carrier enters the technical chamber.
Description
[technical field]
The utility model relates to the manufacture of solar cells equipment technical field, relates in particular to a kind of graphite carrier plate transmission device of PECVD equipment.
[background technology]
The traditional board-like PECVD of manufacture of solar cells line (plasma enhanced chemical vapor deposition method) equipment is in the long-term production process, and is very big to the graphite bar loss on the graphite support plate especially graphite support plate, clamp and wear pattern often occur.Fig. 1 is traditional graphite carrier plate transmission device 100 vertical views, and graphite support plate 110 is placed on the wheel 120, and wheel 120 drives transmission by transmission rig 130; Wheel 120 rotates graphite support plate 110 is transferred to processing chamber during operation; Graphite bar on 120 pairs of graphite support plates 110 of run duration wheel has friction, simultaneously, and not graphite support plate 110 in service possibly steadily not being stuck in the processing chamber; Cause clamp; Cause causing silicon chip fragment or graphite bar to damage, and the price of graphite bar is very expensive, thereby has strengthened production cost.
[utility model content]
Based on this, be necessary to provide a kind of graphite carrier plate transmission device that can effectively prevent graphite support plate generation clamp in the PECVD equipment.
A kind of graphite carrier plate transmission device of PECVD equipment; Comprise transmission rig and the roller portion that drives by said transmission rig; Said roller portion comprises a plurality of rollers, said roller comprise be used to carry the supporting-point roller of said graphite support plate and link to each other with said supporting-point roller and be positioned at the wheel that stops that is used to stop said graphite support plate outside the said supporting-point roller.
In preferred embodiment, every group of said width that stops the distance between the wheel greater than said graphite support plate.
In preferred embodiment, the said wheel that stops is for frustum cone structure, and a less end and the said supporting-point roller of area be fitted and connected, and the diameter of the end that area is bigger is greater than the diameter of said supporting-point roller.
In preferred embodiment, said supporting-point roller and said stops that wheel is one-body molded.
In preferred embodiment, said transmitting device also comprises is located at the said baffle plate that stops the said transmitting device transmission direction extension in edge in the wheel outside.
In preferred embodiment, the roller that is arranged in said transmitting device two ends is provided with bearing.
In preferred embodiment, the roller of said roller portion is provided with in pairs.
The wheel that stops that is used to stop the graphite support plate through arranged outside at supporting-point roller; When the operation of graphite support plate is not steady, jump to easily and stop on the wheel; Stopped that wheel blocks and is unlikely to depart from transmission direction, when getting into processing chamber, also be unlikely to be stuck in the processing chamber and cause clamp to damage silicon chip or damage the graphite bar on the graphite support plate.
Every group of width that stops the distance between the wheel greater than the graphite support plate; And stop that wheel is frustum cone structure; A less end and the supporting-point roller of area is fitted and connected; Thereby the diameter of the end that area is bigger forms the tilting ledge structure greater than the diameter of supporting-point roller, when the graphite support plate jumps on the ledge structure, is easy to slide and returns on the supporting-point roller.In addition; Through increase baffle plate in the roller both sides; Further guarantee that the graphite support plate can too much not depart from transmission direction and landing from the transmitting device, cooperate that unit is desk-top to be stopped that wheel can also let and depart from more graphite support plate and return on the supporting-point roller, further guarantee the stable of transmission course.
Further; Through in the roller at two ends, bearing arrangement being set; It can under any circumstance freely be rotated, thereby in graphite support plate loading and unloading process, can avoid causing the graphite bar wearing and tearing on it because of push-and-pull graphite support plate by force; Thereby reduced the generation of the fragmentation of silicon chip in process of production, reduced production cost.
[description of drawings]
Fig. 1 is the structural representation of the graphite carrier plate transmission device of traditional P ECVD equipment;
Fig. 2 is the structural representation of the graphite carrier plate transmission device of PECVD equipment in the preferred implementation;
Fig. 3 is that the position of baffle plate and roller concerns synoptic diagram in the embodiment shown in Figure 2;
Fig. 4 is for transmission rig in the embodiment shown in Figure 2 and be provided with the roller structure synoptic diagram of bearing.
[embodiment]
Mainly combine accompanying drawing and specific embodiment that the graphite carrier plate transmission device of PECVD equipment is done further detailed explanation below.
As shown in Figure 2, the graphite carrier plate transmission device 200 of the PECVD equipment of a preferred implementation comprises transmission rig 210 and the roller portion 220 that is driven by transmission rig 210.
Supporting-point roller 222 with stop wheel 224 can but be not limited to one-body molded setting.
Stop wheel 224 through what the arranged outside at supporting-point roller 222 was used to stop graphite support plate 300; When 300 operations of graphite support plate are not steady, jump to easily and stop on the wheel 224; Stopped that wheel 224 blocks and is unlikely to depart from transmission direction, when getting into processing chamber, also be unlikely to be stuck in the processing chamber and cause clamp to damage silicon chip or damage the graphite bar on the graphite support plate 300.
Every group of this embodiment stops distance between the wheel 224 greater than the width of graphite support plate 300, thereby both sides stop between wheel 224 and the graphite support plate 300 and have the gap.And; The wheel 224 that stops of present embodiment is frustum cone structure, and an end and supporting-point roller 222 that area is less are fitted and connected, and the diameter of the end that area is bigger is greater than the diameter of supporting-point roller 222; Thereby stop and form the tilting ledge structure between wheel 224 and the supporting-point roller 222; When graphite support plate 300 jumped on the ledge structure, because step tilts, graphite support plate 300 was easy to slide and returns on the supporting-point roller 222.
Further, as shown in Figure 3, the transmitting device 200 of this embodiment is provided with baffle plate 230 in the both sides of transmission direction.Baffle plate 230 is along the transmission direction of transmitting device 200 arranged outside at roller.Through increase baffle plate 230 in the roller both sides; Further guarantee that graphite support plate 300 can too much not depart from transmission direction and landing from the transmitting device 200; Cooperate that unit is desk-top to be stopped that wheel 224 can also let and depart from more graphite support plate 300 and return on the supporting-point roller 222, further guarantee the stable of transmission course.
In addition, as shown in Figure 4, for preventing the wearing and tearing in graphite support plate 300 loading and unloading processes, be provided with bearing 226 in the roller at transmitting device 200 two ends of this embodiment.Through bearing 226 is set in the roller at two ends; The roller at two ends can under any circumstance freely be rotated; Thereby in graphite support plate 300 loading and unloading processes; Can avoid because of push-and-pull graphite support plate 300 by force causes the graphite bar wearing and tearing on it, thereby reduce the generation of the fragmentation of silicon chip in process of production, reduce production cost.
The above embodiment has only expressed several kinds of embodiments of the utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model claim.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model design, can also make some distortion and improvement, these all belong to the protection domain of the utility model.Therefore, the protection domain of the utility model patent should be as the criterion with accompanying claims.
Claims (7)
1. the graphite carrier plate transmission device of a PECVD equipment; Comprise transmission rig and the roller portion that drives by said transmission rig; Said roller portion comprises a plurality of rollers; It is characterized in that, said roller comprise the supporting-point roller that is used to carry said graphite support plate and link to each other with said supporting-point roller and be positioned at the wheel that stops that is used to stop said graphite support plate outside the said supporting-point roller.
2. the graphite carrier plate transmission device of PECVD equipment as claimed in claim 1 is characterized in that, every group of said width that stops the distance between the wheel greater than said graphite support plate.
3. the graphite carrier plate transmission device of PECVD equipment as claimed in claim 1 is characterized in that, the said wheel that stops is for frustum cone structure, and a less end and the said supporting-point roller of area be fitted and connected, and the diameter of the end that area is bigger is greater than the diameter of said supporting-point roller.
4. the graphite carrier plate transmission device of PECVD equipment as claimed in claim 1 is characterized in that, said supporting-point roller and said stops that wheel is one-body molded.
5. the graphite carrier plate transmission device of PECVD equipment as claimed in claim 1 is characterized in that, said transmitting device also comprises is located at the said baffle plate that stops the said transmitting device transmission direction extension in edge in the wheel outside.
6. the graphite carrier plate transmission device of PECVD equipment as claimed in claim 1 is characterized in that the roller that is arranged in said transmitting device two ends is provided with bearing.
7. the graphite carrier plate transmission device of PECVD equipment as claimed in claim 1 is characterized in that, the roller of said roller portion is provided with in pairs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120201883U CN202139294U (en) | 2011-06-15 | 2011-06-15 | Graphite carrier transmitting device of PEVCD device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120201883U CN202139294U (en) | 2011-06-15 | 2011-06-15 | Graphite carrier transmitting device of PEVCD device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202139294U true CN202139294U (en) | 2012-02-08 |
Family
ID=45550366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120201883U Expired - Fee Related CN202139294U (en) | 2011-06-15 | 2011-06-15 | Graphite carrier transmitting device of PEVCD device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202139294U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106672627A (en) * | 2017-01-22 | 2017-05-17 | 深圳市华星光电技术有限公司 | Rolling wheel for transferring base plates |
| CN111850522A (en) * | 2020-08-04 | 2020-10-30 | 苏州腾晖光伏技术有限公司 | Transmission device |
-
2011
- 2011-06-15 CN CN201120201883U patent/CN202139294U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106672627A (en) * | 2017-01-22 | 2017-05-17 | 深圳市华星光电技术有限公司 | Rolling wheel for transferring base plates |
| CN106672627B (en) * | 2017-01-22 | 2019-05-21 | 深圳市华星光电技术有限公司 | A kind of idler wheel transmitting substrate |
| CN111850522A (en) * | 2020-08-04 | 2020-10-30 | 苏州腾晖光伏技术有限公司 | Transmission device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120208 Termination date: 20160615 |