WO2010109937A1 - Method for forming thin film, method for forming multilayer thin film having the thin film therein, electronic device, and organic electroluminescence element - Google Patents
Method for forming thin film, method for forming multilayer thin film having the thin film therein, electronic device, and organic electroluminescence element Download PDFInfo
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Definitions
- the present invention relates to a method for forming a thin film made of an organic material, a method for forming a thin film of thin films, and an electronic device and an organic electroluminescence element using them.
- ELD electroluminescence display
- inorganic electroluminescent elements and organic electroluminescent elements (hereinafter also referred to as organic EL elements).
- organic electroluminescent elements have been used as planar light sources, but an alternating high voltage is required to drive the light emitting elements.
- an organic EL element has a configuration in which a light emitting layer containing a compound that emits light is sandwiched between a cathode and an anode, and injects electrons and holes into the light emitting layer to recombine excitons.
- This is an element that emits light by utilizing the emission of light (fluorescence / phosphorescence) when the exciton (exciton) is deactivated, and can emit light at a voltage of several volts to several tens of volts. Since it is a self-luminous type, it has a wide viewing angle, high visibility, and since it is a thin-film type complete solid-state device, it has attracted attention from the viewpoints of space saving and portability.
- organic EL elements For the development of organic EL elements for practical use in the future, organic EL elements that emit light efficiently and with high luminance with lower power consumption are desired.
- Japanese Patent No. 3093796 discloses a technique of doping a stilbene derivative, a distyrylarylene derivative or a tristyrylarylene derivative with a small amount of a phosphor to improve emission luminance and extend the lifetime of the device.
- Japanese Patent Application Laid-Open No. 63-264692 discloses an element having an organic light emitting layer in which 8-hydroxyquinoline aluminum complex is used as a host compound and a small amount of phosphor is doped therein.
- an element having an organic light emitting layer in which an 8-hydroxyquinoline aluminum complex is used as a host compound and a quinacridone dye is doped is known.
- the generation ratio of the singlet exciton and the triplet exciton is 1: 3, so the generation probability of the luminescent excited species is 25%. Since the light extraction efficiency is about 20%, the limit of the external extraction quantum efficiency ( ⁇ ext) is set to 5%.
- the organic EL element is an all-solid element composed of an organic material film having a thickness of only about 0.1 ⁇ m between the electrodes, and can emit light at a relatively low voltage of about 2V to 20V. Therefore, it is a technology that is expected as a next-generation flat display and illumination.
- the structure of the organic EL element is a simple one in which an organic layer is sandwiched between a transparent electrode and a counter electrode, and the number of parts is overwhelmingly smaller than that of a liquid crystal display, which is a typical flat display.
- the cost should be kept low, this is not always the case at present, and a large amount of water is drained from the liquid crystal display in terms of performance and cost. In particular, in terms of cost, poor productivity is considered as a factor.
- organic EL is one of the causes not practically used for such applications.
- the present invention has been made in view of the above-mentioned problems, and the object of the present invention is to form an organic thin film or an organic laminated thin film by a coating method that enables continuous production.
- An electronic device including an organic thin film and an organic EL element are provided.
- Ar 1 and Ar 2 represent an aromatic ring, and R 1 and R 2 represent an atomic group necessary for bonding to each other to form a 5-membered or 6-membered aromatic ring, provided that (The aromatic ring represents an aromatic hydrocarbon ring or an aromatic heterocyclic ring.) 3. 3. The method for forming a thin film according to 1 or 2, wherein the change in physicochemical properties of the thin film is a change from amorphous to crystalline.
- a thin film adjacent to the thin film is formed on the thin film formed by the thin film forming method according to any one of 1 to 6, using the thin film forming method according to any one of 1 to 6.
- An electronic device comprising a thin film formed by the method for forming a thin film according to any one of 1 to 6 above.
- An electronic device comprising a laminated thin film formed by the method for forming a laminated thin film as described in 7 above.
- An organic electroluminescence device comprising a thin film formed by the method for forming a thin film according to any one of 1 to 6 above.
- An organic electroluminescence device comprising a laminated thin film formed by the method for forming a laminated thin film as described in 7 above.
- Ar 1 and Ar 2 represent an aromatic ring, and R 1 and R 2 represent an atomic group necessary for bonding to each other to form a 5-membered or 6-membered aromatic ring, provided that (The aromatic ring represents an aromatic hydrocarbon ring or an aromatic heterocyclic ring.) 3. 3. The method for forming a thin film according to 1 or 2, wherein the organic substance has at least two partial structures of the general formula (1).
- Ar 1 in the general formula (1) is any one of an aryl ring, a carbazole ring, a carboline ring, or a 1,10-phenanthroline ring of a substituted or unsubstituted triarylamine.
- the compound having the partial structure of the general formula (1) is at least one of at least one selected from “triarylamine, carbazole ring, or carboline ring” as Ar 1 of the partial structure of the general formula (1).
- the compound having the partial structure of the general formula (1) is represented by Ar 1 of at least two partial structures of the general formula (1), “a structure in which at least two triarylamines are linked via a single bond”. 10. The method for forming a thin film according to any one of 2 to 9, wherein the compound shares one of the aryl rings of the triarylamine at both terminal positions.
- the compound having the partial structure of the general formula (1) is a biphenyl ring as Ar 1 of at least two partial structures of the general formula (1) “at least two carbazole rings are in the N atom position ( ⁇ 9 position)”. , A dibenzofuran ring or a structure linked via at least one selected from a benzene ring ”, a compound sharing one or both of the carbazole rings at both terminal positions.
- the method for forming a thin film according to any one of 2 to 9.
- the compound having the partial structure of the general formula (1) shares at least two “1,10-phenanthroline ring” structures as Ar 1 of the partial structure of the general formula (1) at both terminal ring sites. 10.
- the compound having the partial structure of the general formula (1) is represented by “at least two carboline rings at the N atom position ( ⁇ 9 position) as Ar 1 of the partial structure of the general formula (1), Any one of 2 to 9, wherein the carboline ring at both terminal positions of the structure connected through at least one selected from dibenzofuran ring or benzene ring is shared.
- the compound having the partial structure of the general formula (1) is a biphenyl ring as Ar 1 of at least two partial structures of the general formula (1) “at least two carbazole rings are in the N atom position ( ⁇ 9 position)”.
- a dibenzofuran ring, or a structure connected via at least one selected from a benzene ring, the carbazole ring at both terminal positions, and Ar 2 is an aromatic heterocyclic ring. 10.
- a thin film adjacent to the thin film is formed on the thin film formed by the thin film forming method according to any one of 19.1 to 18, using the thin film forming method according to any one of 1 to 18.
- An electronic device comprising a thin film formed by the method for forming a thin film according to any one of 20.1 to 18.
- An electronic device comprising a laminated thin film formed by the method for forming a laminated thin film according to 21.19.
- An organic electroluminescence element comprising a thin film formed by the method for forming a thin film according to any one of 22.1 to 18.
- An organic electroluminescent device comprising a laminated thin film formed by the method for forming a laminated thin film described in 23.19.
- the coating method when a thin film is to be laminated in the coating process, when the thin film adjacent to the first formed thin film is formed, the first formed thin film dissolves in the solvent. There were difficulties unique to the coating process, such as contamination and interface disturbance.
- dissolution of an organic compound means that a state in which organic compound molecules are solvated by a solvent stably exists.
- the solution depends on the structure of the organic compound, the type of the solvent, etc. It was noted that it was decided whether it could exist stably.
- organic compounds that are easy to form solutions from the amorphous state and difficult to form solutions from the crystallized state, and applying these properties to thin film formation, It has been possible to easily achieve the lamination of thin films of organic compounds, which has been difficult until now.
- by making it possible to arbitrarily form a crystal film it is possible to achieve expression of electrical characteristics peculiar to the crystal film and improvement of charge mobility. That is, changing the state of the thin film by subjecting the thin film to physicochemical treatment after forming the thin film can be applied in a wide range, and the object of the present invention can be achieved.
- the organic thin film with improved mixing (contamination) of the lower layer material and disturbance of the interface is improved.
- FIG. 3 is a diagram showing the measurement results of X-ray diffraction XRD (X-ray diffraction method apparatus, manufactured by Rigaku Corporation, model RINT-TTR2 apparatus) of Sample 1-1 in Example 1.
- FIG. 3 is a diagram showing the measurement results of X-ray diffraction XRD (X-ray diffraction apparatus, manufactured by Rigaku Corporation, model RINT-TTR2 apparatus) of Sample 1-2 in Example 1. It is the schematic of an illuminating device. It is sectional drawing of an illuminating device.
- the thin film formation method of the present invention changes the physicochemical properties of the thin film without changing the chemical structure of the organic material forming the thin film by applying a physicochemical treatment after forming the thin film made of the organic material. It is characterized by that.
- Organic substance according to the present invention First, the organic substance according to the present invention will be described.
- Preferred examples of the organic substance according to the present invention include compounds having the partial structure represented by the general formula (1).
- the organic substance according to the present invention is preferably a so-called host compound that is conventionally used in an organic EL device, and is not particularly limited in terms of structure, but is typically a carbazole derivative, a triarylamine derivative, a carboline derivative, or a diazacarbazole derivative.
- the diazacarbazole derivative represents one in which at least one carbon atom of the hydrocarbon ring constituting the carboline ring of the carboline derivative is substituted with a nitrogen atom
- 1,10-phenanthroline derivative aromatic
- compounds having a partial structure of the general formula (1) of the present invention are preferable in carbazole derivatives, triarylamine derivatives, carboline derivatives, diazacarbazole derivatives, 1,10-phenanthroline derivatives, and the like. It is more preferable to have at least two partial structures of the general formula (1).
- Ar 1 and Ar 2 represent an aromatic ring, and R 1 and R 2 are bonded to each other to form a 5-membered or Represents a group of atoms required to form a 6-membered aromatic ring.
- the aromatic ring represents an aromatic hydrocarbon ring or an aromatic heterocyclic ring.
- Ar 1 in the general formula (1) is preferably a condensed ring formed from at least two aromatic rings.
- Ar 1 in the general formula (1) is preferably a condensed ring formed from at least three aromatic rings.
- Ar 1 in the general formula (1) may be a part of a chemical structure of any one of a substituted or unsubstituted triarylamine structure, carbazole structure, carboline structure, or 1,10-phenanthroline structure. preferable.
- Ar 2 in the general formula (1) is preferably a substituted or unsubstituted phenyl group.
- Ar 2 in the general formula (1) is preferably a substituted or unsubstituted nitrogen-containing 6-membered ring.
- the compound having the partial structure of the general formula (1) is selected as “tria” as Ar 1 of at least two partial structures of the general formula (1).
- the compound having the partial structure of the general formula (1) is a compound having the partial structure of the general formula (1) as Ar 1 of at least two partial structures of the general formula (1).
- Examples include compounds in which at least two triarylamines each share one of the aryl rings of the triarylamine at both terminal positions of the structure in which the structure is linked via a single bond.
- the compound having the partial structure of the general formula (1) is more preferably a compound having the partial structure of the general formula (1) as Ar 1 of at least two partial structures of the general formula (1).
- Ar 1 of at least two partial structures of the general formula (1).
- One or both ends of a structure in which at least two carbazole rings are linked via at least one selected from a biphenyl ring, a dibenzofuran ring, or a benzene ring at the N atom position ( ⁇ 9 position) And a compound sharing each carbazole ring at the position.
- the compound having the partial structure of the general formula (1) is more preferably a compound having the partial structure of the general formula (1) as Ar 1 of at least two partial structures of the general formula (1). And a compound having a “1,10-phenanthroline ring” structure at both terminal ring sites.
- the compound having the partial structure of the general formula (1) is more preferably a compound having the partial structure of the general formula (1) as Ar 1 of at least two partial structures of the general formula (1).
- the carboline ring at both terminal positions of“ a structure in which at least two carboline rings are linked at the N atom position ( ⁇ 9 position) via at least one selected from a biphenyl ring, a dibenzofuran ring, and a benzene ring ” a structure in which at least two carboline rings are linked at the N atom position ( ⁇ 9 position) via at least one selected from a biphenyl ring, a dibenzofuran ring, and a benzene ring ” , And the like.
- the compound having the partial structure of the general formula (1) is more preferably a compound having the partial structure of the general formula (1) as Ar 1 of at least two partial structures of the general formula (1).
- Ar 2 is an aromatic heterocyclic ring.
- the aromatic hydrocarbon ring represented by Ar 1 , Ar 2 , R 1 and R 2 is also referred to as an aryl ring, for example, a benzene ring, a naphthalene ring, an anthracene ring, Examples thereof include an azulene ring, an acenaphthylene ring, a fluorene ring, a phenanthrene ring, an indene ring, a pyrene ring, and a biphenyl ring.
- aryl ring for example, a benzene ring, a naphthalene ring, an anthracene ring, Examples thereof include an azulene ring, an acenaphthylene ring, a fluorene ring, a phenanthrene ring, an indene ring, a pyrene ring, and a biphenyl ring.
- examples of the aromatic heterocycle represented by Ar 1 , Ar 2 , R 1 and R 2 include a furan ring, a thiophene ring, a pyridine ring, a pyridazine ring, a pyrimidin ring, and a pyrazine.
- the aromatic hydrocarbon ring represented by Ar 1 is preferably a benzene ring, a naphthalene ring, or the like.
- examples of the aromatic heterocycle represented by Ar 1 include a carbazole ring, an azacarbazole (carboline ( ⁇ -carboline, ⁇ -carboline, ⁇ -carboline)) ring, and a 1,10-phenanthroline ring. , Etc. are preferred.
- the aromatic hydrocarbon ring represented by Ar 2 is preferably a benzene ring, a naphthalene ring, or the like.
- the aromatic heterocyclic ring represented by Ar 2 is preferably a pyridine ring.
- Examples of the 5-membered or 6-membered aromatic ring formed by combining R 1 and R 2 with each other include an aromatic hydrocarbon ring and an aromatic heterocyclic ring.
- Examples of the aromatic hydrocarbon ring include benzene A ring, a naphthalene ring, and the like, and a benzene ring is preferable.
- As an aromatic heterocyclic ring a thiophen ring, a pyridine ring, etc. are mentioned, for example, A pyridine ring is preferable.
- the compound of the present invention may further have a substituent, and examples of the substituent include an alkyl group (for example, methyl group, ethyl group, propyl group, isopropyl group, tert-butyl group, pentyl group, hexyl group).
- substituents include an alkyl group (for example, methyl group, ethyl group, propyl group, isopropyl group, tert-butyl group, pentyl group, hexyl group).
- octyl group dodecyl group, tridecyl group, tetradecyl group, pentadecyl group etc.
- cycloalkyl group eg cyclopentyl group, cyclohexyl group etc.
- alkenyl group eg vinyl group, allyl group etc.
- alkynyl group eg , Ethynyl group, propargyl group etc.
- aryl group eg phenyl group, naphthyl group etc.
- aromatic heterocyclic group eg furyl group, thienyl group, pyridyl group, pyridazinyl group, pyrimidinyl group, pyrazinyl group, triazinyl group
- Imidazolyl group pyrazolyl group, thiazolyl group, quinazolinyl group, carbazolyl group A carbolinyl group, a diazacarbazolyl group
- organic substance according to the present invention preferably a compound having the partial structure represented by the general formula (1) (hereinafter also referred to as the compound of the present invention), are shown below. It is not limited.
- the compound of the present invention can be synthesized by known synthesis methods such as Buchwald-Hartwig reaction and Suzuki reaction.
- compounds 2-1 to 2-5 are preferably used in the light emitting layer as the host compound of the present invention.
- Compounds 3-1 to 3-5 are preferably used as the electron transport material of the present invention, and compounds 1-1 to 1-5 are preferably used as the hole transport material of the present invention.
- Thin film formation In the method for forming a thin film of the present invention, the physicochemical properties of the thin film can be obtained without changing the chemical structure of the molecules forming the thin film by applying a physicochemical treatment after the formation of the organic thin film of the present invention. It is characterized by changing.
- ⁇ Formation of organic thin films> (Dissolving, coating, forming a thin film)
- the formation of a thin film made of an organic material is not particularly limited, but it is preferable to use a coating process.
- the compound of the present invention can be easily dissolved in an organic solvent to prepare a coating solution, and a thin film can be easily formed by a coating method.
- organic solvent for the coating solution examples include aromatic hydrocarbons such as toluene, xylene, mesitylene, and cyclohexylbenzene, aliphatic hydrocarbons such as cyclohexane, decalin, and dodecane, halogenated hydrocarbons such as dichlorobenzene, methanol, Organic solvents such as alcohols such as ethanyl, propanol and butanol, ketones such as methyl ethyl ketone and cyclohexanone, and fatty acid esters such as ethyl acetate can be used.
- aromatic hydrocarbons such as toluene, xylene, mesitylene, and cyclohexylbenzene
- aliphatic hydrocarbons such as cyclohexane, decalin, and dodecane
- halogenated hydrocarbons such as dichlorobenzene
- methanol Organic solvents such as alcohols such as ethan
- toluene o-dichlorobenzene, butanol, halogenated hydrocarbons and the like can be preferably used.
- a coating method that is known as a wet process and that can use a relatively simple apparatus such as a spin coating method, a casting method, an ink jet method, a printing method, and a coating coater method is used. be able to. From the viewpoint that a homogeneous film can be easily obtained and pinholes are difficult to be generated, film formation by a coating method such as a spin coating method, an ink jet method, or a printing method is preferable.
- the compound of the present invention when it is not an amorphous type but a crystal type, it can be changed to an amorphous type by a treatment such as sublimation purification, reprecipitation using a good solvent and a poor solvent, By using this, dissolution, coating, and thin film can be suitably formed in the same manner as in the case of the amorphous type from the beginning.
- the physicochemical treatment of the thin film can be performed without changing the chemical structure of the organic material forming the thin film by applying a physicochemical treatment after forming the thin film made of the organic material. It is characterized by changing properties.
- the change in the physicochemical properties of the thin film is preferably a change from amorphous to crystalline.
- the thin film formed by a coating method or the like in the state where the organic substance of the present invention is amorphous is subjected to heat treatment (physical Treatment), treatment with a specific solvent (chemical treatment), preferably, crystallization is performed by further applying physicochemical treatment such as heat treatment (physical treatment), and a thin film is formed.
- the physicochemical treatment for crystallizing the thin film from amorphous is preferably a physical treatment, especially a thermal treatment, and the heat treatment is preferably in the range of 50 ° C to 250 ° C, and 70 ° C to 200 ° C. The range of is more preferable. Further, the heating time is preferably in the range of 5 seconds to 120 minutes, and from the viewpoint of increasing production efficiency, it is preferably in the range of 10 seconds to 60 minutes.
- the heating method examples include blast heating, heating by radiant heat, microwave heating, infrared heating, and hot plate heating.
- the physicochemical treatment for crystallizing the thin film from amorphous is preferably a chemical treatment, and among the chemical treatments, a solvent treatment is preferably used.
- a solvent treatment a solvent having a large crystallization ability is preferably used for the compound of the present invention, and can be appropriately selected and used depending on the type of the compound of the thin film. Examples include acetonitrile, methanol, ethanol, acetone, hexane, ethyl acetate, toluene, tetrahydrofuran, chloroform, and the like. Crystallization can be easily carried out by applying a solvent by a known treatment method such as dipping, spraying, spin coating and the like.
- the first formed thin film does not dissolve in the solvent, and the lower layer material
- the laminated thin film can be applied without the difficulties inherent in the coating process, such as mixing (contamination) with the upper layer and disorder of the interface. Thereafter, the thin film can be crystallized to form a crystallized laminated thin film.
- a thin layer sample is treated with a solvent that dissolves in the case of an amorphous structure and has no action of crystallization, such as toluene.
- the degree of crystallization can be measured from the degree of mass reduction.
- the organic thin film of the present invention thus obtained can be suitably used for the organic EL element of the present invention, the electronic device of the present invention and the like.
- the electronic device of the present invention can be formed into various electronic devices using the organic thin film of the present invention. Among them, an element involving light is preferably used.
- elements that involve light include liquid crystal display elements, electrophotography using organic photoreceptor thin films, organic photovoltaic cells, photochemical hole burning (PHB) recording elements, organic electroluminescence elements (organic EL elements), Langmuir / Blodgets.
- PHB photochemical hole burning
- organic EL elements organic electroluminescence elements
- Langmuir / Blodgets Various optical functional elements using the (LB) film can be mentioned, and an organic EL element is particularly preferable.
- organic EL element which is a preferred embodiment among the electronic devices of the present invention, will be described in more detail.
- Organic EL element >> The organic EL element of the present invention having an organic thin film obtained by the method for forming an organic thin film of the present invention will be described.
- the first thin film is not dissolved in the solvent, and there is no mixing (contamination) of the lower layer material to the upper layer or disturbance of the interface.
- the organic EL device manufactured by this method can improve the light emission efficiency of the organic EL device, improve the device lifetime, and the like.
- the blue light emitting layer preferably has an emission maximum wavelength of 430 nm to 480 nm
- the green light emitting layer has an emission maximum wavelength of 510 nm to 550 nm
- the red light emitting layer is preferably a monochromatic light
- a white light emitting layer may be formed by laminating at least three light emitting layers. Further, a non-light emitting intermediate layer may be provided between the light emitting layers.
- the organic EL element of the present invention is preferably a white light emitting layer, and is preferably a lighting device using these.
- the light emitting layer according to the present invention is a layer that emits light by recombination of electrons and holes injected from the electrode, the electron transport layer, or the hole transport layer, and the light emitting portion is in the layer of the light emitting layer. May be the interface between the light emitting layer and the adjacent layer.
- the total film thickness of the light emitting layer is not particularly limited, but from the viewpoint of improving the uniformity of the film, preventing unnecessary application of high voltage during light emission, and improving the stability of the emission color with respect to the drive current. It is preferable to adjust in the range of 2 nm to 5 ⁇ m, more preferably in the range of 2 nm to 200 nm, and particularly preferably in the range of 10 nm to 20 nm.
- a light-emitting dopant or a host compound (also referred to as a light-emitting host compound) to be described later is used, for example, spin coating method, casting method, LB method, inkjet method, vacuum deposition method, etc.
- the film can be formed by the thinning method.
- the light emitting layer of the organic EL device of the present invention preferably contains a light emitting host compound and at least one kind of light emitting dopant (such as a phosphorescent dopant (also referred to as a phosphorescent dopant) or a fluorescent dopant).
- a light emitting host compound such as a phosphorescent dopant (also referred to as a phosphorescent dopant) or a fluorescent dopant).
- the host compound in the present invention is a phosphorescent quantum yield of phosphorescence emission at a room temperature (25 ° C.) having a mass ratio of 20% or more in the compound contained in the light emitting layer. Is defined as a compound of less than 0.1.
- the phosphorescence quantum yield is preferably less than 0.01.
- the mass ratio in the layer is 20% or more among the compounds contained in a light emitting layer.
- the compounds of the present invention for example, exemplified compounds 2-1 to 2-5 can be preferably used.
- the host compound may be used alone or in combination of two or more.
- the host compound By using a plurality of types of host compounds, it is possible to adjust the movement of charges, and the organic EL element can be made highly efficient. Moreover, it becomes possible to mix different light emission by using multiple types of light emission dopants mentioned later, and, thereby, arbitrary luminescent colors can be obtained.
- a known host compound that may be used in combination as long as the effect of the present invention is not impaired, it has a hole transporting ability and an electron transporting ability, and prevents a long wavelength emission, and has a high Tg (glass transition). Compound) is preferred.
- Luminescent dopant As a light-emitting dopant that can be used in the present invention, a fluorescent dopant (also referred to as a fluorescent compound) or a phosphorescent dopant (also referred to as a phosphorescent emitter, a phosphorescent compound, or a phosphorescent compound) can be used.
- the above-mentioned host is used as a light-emitting dopant (sometimes referred to simply as a light-emitting material) used in the light-emitting layer or light-emitting unit of the organic EL device of the present invention. It is preferable to contain a phosphorescent dopant simultaneously with the compound.
- the phosphorescent dopant that can be used in the present invention is a compound in which light emission from an excited triplet is observed, specifically, a compound that emits phosphorescence at room temperature (25 ° C.), and a phosphorescence quantum yield. Is defined as a compound of 0.01 or more at 25 ° C., but a preferable phosphorescence quantum yield is 0.1 or more.
- the phosphorescent quantum yield can be measured by the method described in Spectroscopic II, page 398 (1992 edition, Maruzen) of the Fourth Edition Experimental Chemistry Course 7. Although the phosphorescence quantum yield in a solution can be measured using various solvents, the phosphorescence dopant according to the present invention achieves the phosphorescence quantum yield (0.01 or more) in any solvent. That's fine.
- the energy transfer type that obtains light emission from the phosphorescent dopant, and the other is that the phosphorescent dopant becomes a carrier trap, carrier recombination occurs on the phosphorescent dopant, and light emission from the phosphorescent dopant is obtained.
- the excited state energy of the phosphorescent dopant is required to be lower than the excited state energy of the host compound.
- the phosphorescent dopant can be appropriately selected from known materials used for the light emitting layer of the organic EL element.
- the phosphorescent dopant that can be used in the present invention is preferably a complex compound containing a group 8-10 metal in the periodic table of elements, more preferably an iridium compound, an osmium compound, or a platinum compound (platinum complex).
- System compounds preferably iridium compounds, an osmium compound, or a platinum compound (platinum complex).
- System compounds rare earth complexes, and most preferred are iridium compounds.
- fluorescent dopants also referred to as fluorescent compounds
- coumarin dyes include coumarin dyes, pyran dyes, cyanine dyes, croconium dyes, squalium dyes, oxobenzanthracene dyes, fluorescein dyes, rhodamine dyes, pyrylium dyes
- Examples include perylene dyes, stilbene dyes, polythiophene dyes, and rare earth complex phosphors.
- Injection layer electron injection layer, hole injection layer >> The injection layer is provided as necessary, and there are an electron injection layer and a hole injection layer, and as described above, it exists between the anode and the light emitting layer or the hole transport layer and between the cathode and the light emitting layer or the electron transport layer. May be.
- An injection layer is a layer provided between an electrode and an organic layer in order to reduce drive voltage and improve light emission luminance.
- Organic EL element and its forefront of industrialization (issued by NTT Corporation on November 30, 1998) 2), Chapter 2, “Electrode Materials” (pages 123 to 166) in detail, and includes a hole injection layer (anode buffer layer) and an electron injection layer (cathode buffer layer).
- anode buffer layer hole injection layer
- copper phthalocyanine is used.
- examples thereof include a phthalocyanine buffer layer represented by an oxide, an oxide buffer layer represented by vanadium oxide, an amorphous carbon buffer layer, and a polymer buffer layer using a conductive polymer such as polyaniline (emeraldine) or polythiophene.
- cathode buffer layer (electron injection layer) The details of the cathode buffer layer (electron injection layer) are described in JP-A-6-325871, JP-A-9-17574, JP-A-10-74586, and the like. Specifically, strontium, aluminum, etc.
- Metal buffer layer typified by lithium, alkali metal compound buffer layer typified by lithium fluoride, alkaline earth metal compound buffer layer typified by magnesium fluoride, oxide buffer layer typified by aluminum oxide, etc.
- the buffer layer (injection layer) is preferably a very thin film, and the film thickness is preferably in the range of 0.1 nm to 5 ⁇ m, although it depends on the material.
- ⁇ Blocking layer hole blocking layer, electron blocking layer>
- the blocking layer is provided as necessary in addition to the basic constituent layer of the organic compound thin film as described above. For example, it is described in JP-A Nos. 11-204258 and 11-204359, and “Organic EL elements and the forefront of industrialization (published by NTT Corporation on November 30, 1998)” on page 237. There is a hole blocking (hole blocking) layer.
- the hole blocking layer has a function of an electron transport layer in a broad sense, and is made of a hole blocking material that has a function of transporting electrons and has a remarkably small ability to transport holes. The probability of recombination of electrons and holes can be improved by blocking. Moreover, the structure of the electron carrying layer mentioned later can be used as a hole-blocking layer concerning this invention as needed.
- the hole blocking layer of the organic EL device of the present invention is preferably provided adjacent to the light emitting layer.
- the hole blocking layer preferably contains the azacarbazole derivative mentioned as the host compound described above.
- the light emitting layer having the shortest wavelength of light emission is preferably closest to the anode among all the light emitting layers.
- 50% by mass or more of the compound contained in the hole blocking layer provided at the position has an ionization potential of 0.3 eV or more larger than the host compound of the shortest wave emitting layer.
- the ionization potential is defined by the energy required to emit electrons at the HOMO (highest occupied molecular orbital) level of the compound to the vacuum level, and can be obtained by the following method, for example.
- Gaussian 98 Gaussian 98, Revision A.11.4, MJ Frisch, et al, Gaussian, Inc., Pittsburgh PA, 2002.
- the ionization potential can be obtained as a value obtained by rounding off the second decimal place of the value (eV unit converted value) calculated by performing structural optimization using B3LYP / 6-31G *.
- the reason why this calculated value is effective is that there is a high correlation between the calculated value obtained by this method and the experimental value.
- the ionization potential can also be obtained by a method of directly measuring by photoelectron spectroscopy.
- a low energy electron spectrometer “Model AC-1” manufactured by Riken Keiki Co., Ltd. or a method known as ultraviolet photoelectron spectroscopy can be suitably used.
- the electron blocking layer has a function of a hole transport layer in a broad sense, and is made of a material that has a function of transporting holes and has an extremely small ability to transport electrons, and transports electrons while transporting holes. By blocking, the recombination probability of electrons and holes can be improved. Moreover, the structure of the positive hole transport layer mentioned later can be used as an electron blocking layer as needed.
- the film thickness of the hole blocking layer and the electron transport layer according to the present invention is preferably 3 nm to 100 nm, and more preferably 5 nm to 30 nm.
- the hole transport layer is made of a hole transport material having a function of transporting holes, and in a broad sense, a hole injection layer and an electron blocking layer are also included in the hole transport layer.
- the hole transport layer can be provided as a single layer or a plurality of layers.
- the compound of the present invention can be used as the hole transport material.
- exemplary compounds 1-1 to 1-5 can be preferably used. It can be suitably formed by a coating method.
- a well-known hole transport material can be used in combination as long as the effects of the present invention are not significantly impaired.
- the known hole transport material has either hole injection or transport or electron barrier property, and may be either organic or inorganic.
- triazole derivatives for example, triazole derivatives, oxadiazole derivatives, imidazole derivatives, polyarylalkane derivatives, pyrazoline derivatives and pyrazolone derivatives, phenylenediamine derivatives, arylamine derivatives, amino-substituted chalcone derivatives, oxazole derivatives, styrylanthracene derivatives, fluorenone derivatives, hydrazone derivatives, Examples thereof include stilbene derivatives, silazane derivatives, aniline copolymers, and conductive polymer oligomers, particularly thiophene oligomers.
- the above-mentioned materials can be used, but it is preferable to use a porphyrin compound, an aromatic tertiary amine compound and a styrylamine compound, particularly an aromatic tertiary amine compound.
- aromatic tertiary amine compounds and styrylamine compounds include N, N, N ′, N′-tetraphenyl-4,4′-diaminophenyl; N, N′-diphenyl-N, N′— Bis (3-methylphenyl)-[1,1′-biphenyl] -4,4′-diamine (TPD); 2,2-bis (4-di-p-tolylaminophenyl) propane; 1,1-bis (4-di-p-tolylaminophenyl) cyclohexane; N, N, N ′, N′-tetra-p-tolyl-4,4′-diaminobiphenyl; 1,1-bis (4-di-p-tolyl) Aminophenyl) -4-phenylcyclohexane; bis (4-dimethylamino-2-methylphenyl) phenylmethane; bis (4-di-p-tolylaminoph
- No. 5,061,569 Having a condensed aromatic ring of, for example, 4,4'-bis [N- (1-naphthyl) -N-phenylamino] biphenyl (NPD), JP-A-4-308 4,4 ′, 4 ′′ -tris [N- (3-methylphenyl) -N-phenylamino] triphenylamine in which three triphenylamine units described in Japanese Patent No. 88 are linked in a starburst type ( MTDATA) and the like.
- NPD 4,4'-bis [N- (1-naphthyl) -N-phenylamino] biphenyl
- JP-A-4-308 4,4 ′, 4 ′′ -tris [N- (3-methylphenyl) -N-phenylamino] triphenylamine in which three triphenylamine units described in Japanese Patent No. 88 are linked in a starburst type ( MTDATA) and the
- a polymer material in which these materials are introduced into a polymer chain or these materials are used as a polymer main chain can also be used.
- inorganic compounds such as p-type-Si and p-type-SiC can also be used as the hole injection material and the hole transport material.
- JP-A-11-251067 J. Org. Huang et. al.
- a so-called p-type hole transport material described in a book (Applied Physics Letters 80 (2002), p. 139) can also be used.
- these materials are preferably used because a light-emitting element with higher efficiency can be obtained.
- the hole transport layer can be formed by thinning the hole transport material by a known method such as a vacuum deposition method, a spin coating method, a casting method, a printing method including an ink jet method, or an LB method. it can.
- the thickness of the hole transport layer is not particularly limited, but is usually about 5 nm to 5 ⁇ m, preferably 5 nm to 200 nm.
- the hole transport layer may have a single layer structure composed of one or more of the above materials.
- a hole transport layer having a high p property doped with impurities examples thereof include JP-A-4-297076, JP-A-2000-196140, JP-A-2001-102175, J. Pat. Appl. Phys. 95, 5773 (2004), and the like.
- a hole transport layer having such a high p property because a device with lower power consumption can be produced.
- the electron transport layer is made of a material having a function of transporting electrons, and in a broad sense, an electron injection layer and a hole blocking layer are also included in the electron transport layer.
- the electron transport layer can be provided as a single layer or a plurality of layers.
- an electron transport material also serving as a hole blocking material used for an electron transport layer adjacent to the light emitting layer on the cathode side is injected from the cathode.
- the compound of the present invention can be used as the material as long as it has a function of transferring electrons to the light emitting layer.
- exemplary compounds 3-1 to 3-5 can be preferably used. It can be suitably formed by a coating method.
- a well-known hole transport material can be used in combination as long as the effects of the present invention are not significantly impaired.
- Conventionally known compounds include, for example, nitro-substituted fluorene derivatives, diphenylquinone derivatives, thiopyran dioxide oxide derivatives, carbodiimides, fluorenylidenemethane derivatives, anthraquinodimethane and anthrone derivatives, oxadiazole derivatives, and the like.
- a thiadiazole derivative in which the oxygen atom of the oxadiazole ring is substituted with a sulfur atom, and a quinoxaline derivative having a quinoxaline ring known as an electron withdrawing group can also be used as an electron transport material.
- a polymer material in which these materials are introduced into a polymer chain or these materials are used as a polymer main chain can also be used.
- metal complexes of 8-quinolinol derivatives such as tris (8-quinolinol) aluminum (Alq), tris (5,7-dichloro-8-quinolinol) aluminum, tris (5,7-dibromo-8-quinolinol) aluminum, Tris (2-methyl-8-quinolinol) aluminum, tris (5-methyl-8-quinolinol) aluminum, bis (8-quinolinol) zinc (Znq), etc.
- the central metals of these metal complexes are In, Mg, Cu , Ca, Sn, Ga, or Pb can also be used as an electron transport material.
- metal-free or metal phthalocyanine or those having terminal ends substituted with an alkyl group or a sulfonic acid group can be preferably used as the electron transporting material.
- the distyrylpyrazine derivative exemplified as the material for the light emitting layer can also be used as an electron transport material, and an inorganic semiconductor such as n-type-Si, n-type-SiC, etc. as in the case of the hole injection layer and the hole transport layer. Can also be used as an electron transporting material.
- the electron transport layer can be formed by thinning the electron transport material by a known method such as a vacuum deposition method, a spin coating method, a casting method, a printing method including an ink jet method, or an LB method.
- the thickness of the electron transport layer is not particularly limited, but is usually about 5 nm to 5 ⁇ m, preferably 5 nm to 200 nm.
- the electron transport layer may have a single layer structure composed of one or more of the above materials.
- an electron transport layer having a high n property doped with impurities examples thereof include JP-A-4-297076, JP-A-10-270172, JP-A-2000-196140, 2001-102175, J.A. Appl. Phys. 95, 5773 (2004), and the like.
- an electron transport layer having such a high n property because an element with lower power consumption can be produced.
- an electrode material made of a metal, an alloy, an electrically conductive compound, or a mixture thereof having a high work function (4 eV or more) is preferably used.
- electrode materials include metals such as Au, and conductive transparent materials such as CuI, indium tin oxide (ITO), SnO 2 , and ZnO.
- conductive transparent materials such as CuI, indium tin oxide (ITO), SnO 2 , and ZnO.
- an amorphous material such as IDIXO (In 2 O 3 —ZnO) capable of forming a transparent conductive film may be used.
- these electrode materials may be formed into a thin film by a method such as vapor deposition or sputtering, and a pattern having a desired shape may be formed by a photolithography method, or when pattern accuracy is not so high (about 100 ⁇ m or more) A pattern may be formed through a mask having a desired shape at the time of vapor deposition or sputtering of the electrode material.
- a wet film forming method such as a printing method or a coating method can be used.
- the transmittance be greater than 10%, and the sheet resistance as the anode is preferably several hundred ⁇ / ⁇ or less.
- the film thickness depends on the material, it is usually selected in the range of 10 nm to 1000 nm, preferably 10 nm to 200 nm.
- cathode a material having a low work function (4 eV or less) metal (referred to as an electron injecting metal), an alloy, an electrically conductive compound, and a mixture thereof as an electrode material is used.
- electrode materials include sodium, sodium-potassium alloy, magnesium, lithium, magnesium / copper mixture, magnesium / silver mixture, magnesium / aluminum mixture, magnesium / indium mixture, aluminum / aluminum oxide (Al 2 O 3 ) Mixtures, indium, lithium / aluminum mixtures, rare earth metals and the like.
- a mixture of an electron injecting metal and a second metal which is a stable metal having a larger work function than this for example, a magnesium / silver mixture, Magnesium / aluminum mixtures, magnesium / indium mixtures, aluminum / aluminum oxide (Al 2 O 3 ) mixtures, lithium / aluminum mixtures, aluminum and the like are preferred.
- the cathode can be produced by forming a thin film of these electrode materials by a method such as vapor deposition or sputtering.
- the sheet resistance as a cathode is preferably several hundred ⁇ / ⁇ or less, and the film thickness is usually selected in the range of 10 nm to 5 ⁇ m, preferably 50 nm to 200 nm.
- the light emission luminance is improved, which is convenient.
- a transparent or semi-transparent cathode can be produced by producing the conductive transparent material mentioned in the description of the anode on the cathode after producing the metal with a film thickness of 1 nm to 20 nm. By applying this, an element in which both the anode and the cathode are transmissive can be manufactured.
- a support substrate (hereinafter also referred to as a substrate, substrate, substrate, support, etc.) that can be used in the organic EL device of the present invention, there is no particular limitation on the type of glass, plastic, etc., and it is transparent. May be opaque. When extracting light from the support substrate side, the support substrate is preferably transparent. Examples of the transparent support substrate preferably used include glass, quartz, and a transparent resin film. A particularly preferable support substrate is a resin film capable of giving flexibility to the organic EL element.
- polyesters such as polyethylene terephthalate (PET) and polyethylene naphthalate (PEN), polyethylene, polypropylene, cellophane, cellulose diacetate, cellulose triacetate, cellulose acetate butyrate, cellulose acetate propionate (CAP), Cellulose esters such as cellulose acetate phthalate (TAC) and cellulose nitrate or derivatives thereof, polyvinylidene chloride, polyvinyl alcohol, polyethylene vinyl alcohol, syndiotactic polystyrene, polycarbonate, norbornene resin, polymethylpentene, polyether ketone, polyimide , Polyethersulfone (PES), polyphenylene sulfide, polysulfone , Polyetherimide, polyetherketoneimide, polyamide, fluororesin, nylon, polymethylmethacrylate, acrylic or polyarylates, cyclone resins such as Arton (trade name, manufactured by JSR) or Appel (trade
- an inorganic film, an organic film or a hybrid film of both may be formed on the surface of the resin film.
- the water vapor permeability (25 ⁇ 0.5 ° C.) measured by a method according to JIS K 7129-1992. , Relative humidity (90 ⁇ 2)% RH) is preferably 0.01 g / (m 2 ⁇ 24 h) or less, and further, oxygen measured by a method according to JIS K 7126-1987.
- a high barrier film having a permeability of 10 ⁇ 3 ml / (m 2 ⁇ 24 h ⁇ MPa) or less and a water vapor permeability of 10 ⁇ 5 g / (m 2 ⁇ 24 h) or less is preferable.
- the material for forming the barrier film may be any material that has a function of suppressing the intrusion of elements that cause deterioration of elements such as moisture and oxygen.
- silicon oxide, silicon dioxide, silicon nitride, or the like can be used.
- the method for forming the barrier film is not particularly limited.
- vacuum deposition, sputtering, reactive sputtering, molecular beam epitaxy, cluster ion beam, ion plating, plasma polymerization, atmospheric pressure plasma polymerization A plasma CVD method, a laser CVD method, a thermal CVD method, a coating method, or the like can be used, but an atmospheric pressure plasma polymerization method as described in JP-A-2004-68143 is particularly preferable.
- the opaque support substrate examples include metal plates such as aluminum and stainless steel, films, opaque resin substrates, ceramic substrates, and the like.
- the external extraction efficiency at room temperature of light emission of the organic EL element of the present invention is preferably 1% or more, more preferably 5% or more.
- the external extraction quantum efficiency (%) the number of photons emitted to the outside of the organic EL element / the number of electrons sent to the organic EL element ⁇ 100.
- a hue improvement filter such as a color filter may be used in combination, or a color conversion filter that converts the emission color from the organic EL element into multiple colors using a phosphor may be used in combination.
- the ⁇ max of light emission of the organic EL element is preferably 480 nm or less.
- ⁇ Sealing> As a sealing means used for this invention, the method of adhere
- the sealing member may be disposed so as to cover the display area of the organic EL element, and may be a concave plate shape or a flat plate shape. Further, transparency and electrical insulation are not particularly limited.
- Specific examples include a glass plate, a polymer plate / film, and a metal plate / film.
- the glass plate include soda-lime glass, barium / strontium-containing glass, lead glass, aluminosilicate glass, borosilicate glass, barium borosilicate glass, and quartz.
- the polymer plate include polycarbonate, acrylic, polyethylene terephthalate, polyether sulfide, and polysulfone.
- the metal plate include those made of one or more metals or alloys selected from the group consisting of stainless steel, iron, copper, aluminum, magnesium, nickel, zinc, chromium, titanium, molybdenum, silicon, germanium, and tantalum.
- a polymer film and a metal film can be preferably used because the element can be thinned.
- the polymer film has an oxygen permeability measured by a method according to JIS K 7126-1987 of 1 ⁇ 10 ⁇ 3 ml / (m 2 ⁇ 24 h ⁇ MPa) or less, and a method according to JIS K 7129-1992. It is preferable that the water vapor permeability (25 ⁇ 0.5 ° C., relative humidity (90 ⁇ 2)% RH) measured in (1) is 1 ⁇ 10 ⁇ 3 g / (m 2 ⁇ 24 h) or less.
- sealing member For processing the sealing member into a concave shape, sandblasting, chemical etching, or the like is used.
- the adhesive include photocuring and thermosetting adhesives having reactive vinyl groups of acrylic acid oligomers and methacrylic acid oligomers, and moisture curing adhesives such as 2-cyanoacrylates. be able to.
- hot-melt type polyamide, polyester, and polyolefin can be mentioned.
- a cationic curing type ultraviolet curing epoxy resin adhesive can be mentioned.
- an organic EL element may deteriorate by heat processing, what can be adhesively cured from room temperature to 80 ° C. is preferable.
- a desiccant may be dispersed in the adhesive.
- coating of the adhesive agent to a sealing part may use commercially available dispenser, and may print like screen printing.
- the electrode and the organic layer are coated on the outside of the electrode facing the support substrate with the organic layer interposed therebetween, and an inorganic or organic layer is formed in contact with the support substrate to form a sealing film.
- the material for forming the film may be any material that has a function of suppressing intrusion of elements that cause deterioration of elements such as moisture and oxygen.
- silicon oxide, silicon dioxide, silicon nitride, or the like may be used. it can.
- vacuum deposition sputtering, reactive sputtering, molecular beam epitaxy, cluster ion beam, ion plating, plasma polymerization, atmospheric pressure plasma
- a combination method a plasma CVD method, a laser CVD method, a thermal CVD method, a coating method, or the like can be used.
- an inert gas such as nitrogen or argon, or an inert liquid such as fluorinated hydrocarbon or silicon oil can be injected in the gas phase and liquid phase.
- an inert gas such as nitrogen or argon, or an inert liquid such as fluorinated hydrocarbon or silicon oil
- a vacuum is also possible.
- a hygroscopic compound can also be enclosed inside.
- Examples of the hygroscopic compound include metal oxides (eg, sodium oxide, potassium oxide, calcium oxide, barium oxide, magnesium oxide, aluminum oxide), sulfates (eg, sodium sulfate, calcium sulfate, magnesium sulfate, cobalt sulfate). Etc.), metal halides (eg calcium chloride, magnesium chloride, cesium fluoride, tantalum fluoride, cerium bromide, magnesium bromide, barium iodide, magnesium iodide etc.), perchloric acids (eg perchloric acid) Barium, magnesium perchlorate, and the like), and anhydrous salts are preferably used in sulfates, metal halides, and perchloric acids.
- metal oxides eg, sodium oxide, potassium oxide, calcium oxide, barium oxide, magnesium oxide, aluminum oxide
- sulfates eg, sodium sulfate, calcium sulfate, magnesium sulfate, cobalt
- a protective film or a protective plate may be provided on the outer side of the sealing film on the side facing the support substrate with the organic layer interposed therebetween or on the sealing film.
- the mechanical strength is not necessarily high, and thus it is preferable to provide such a protective film and a protective plate.
- the same glass plate, polymer plate / film, metal plate / film, and the like used for the sealing can be used, but the polymer film is light and thin. Is preferably used.
- the organic EL element emits light inside a layer having a refractive index higher than that of air (refractive index is about 1.7 to 2.1) and can extract only about 15% to 20% of the light generated in the light emitting layer. It is generally said. This is because the light incident on the interface (interface between the transparent substrate and air) at an angle ⁇ greater than the critical angle causes total reflection and cannot be taken out of the element, or between the transparent electrode or the light emitting layer and the transparent substrate. This is because the light is totally reflected between the light and the light is guided through the transparent electrode or the light emitting layer, and as a result, the light escapes in the direction of the element side surface.
- a method of improving the light extraction efficiency for example, a method of forming irregularities on the surface of the transparent substrate and preventing total reflection at the transparent substrate and the air interface (US Pat. No. 4,774,435), A method for improving efficiency by giving light condensing property to a substrate (Japanese Patent Laid-Open No. 63-314795), a method of forming a reflective surface on the side surface of an element (Japanese Patent Laid-Open No. 1-220394), and light emission from the substrate A method of forming an antireflection film by introducing a flat layer having an intermediate refractive index between the bodies (Japanese Patent Laid-Open No.
- these methods can be used in combination with the organic EL device of the present invention.
- a method of introducing a flat layer having a lower refractive index than the substrate between the substrate and the light emitter, or a substrate, transparent A method of forming a diffraction grating between any layers of the electrode layer and the light emitting layer (including between the substrate and the outside) can be suitably used.
- the low refractive index layer examples include aerogel, porous silica, magnesium fluoride, and a fluorine-based polymer. Since the refractive index of the transparent substrate is generally about 1.5 to 1.7, the low refractive index layer preferably has a refractive index of about 1.5 or less. Further, it is preferably 1.35 or less.
- the thickness of the low refractive index medium is preferably at least twice the wavelength in the medium. This is because the effect of the low refractive index layer is diminished when the thickness of the low refractive index medium is about the wavelength of light and the electromagnetic wave that has exuded by evanescent enters the substrate.
- the method of introducing a diffraction grating into an interface or any medium that causes total reflection is characterized by a high effect of improving light extraction efficiency.
- This method uses the property that the diffraction grating can change the direction of light to a specific direction different from refraction by so-called Bragg diffraction such as first-order diffraction and second-order diffraction.
- Light that cannot be emitted due to total internal reflection between layers is diffracted by introducing a diffraction grating in any layer or medium (in a transparent substrate or transparent electrode), and the light is removed. I want to take it out.
- the diffraction grating to be introduced has a two-dimensional periodic refractive index. This is because light emitted from the light-emitting layer is randomly generated in all directions, so in a general one-dimensional diffraction grating having a periodic refractive index distribution only in a certain direction, only light traveling in a specific direction is diffracted. Therefore, the light extraction efficiency does not increase so much. However, by making the refractive index distribution a two-dimensional distribution, light traveling in all directions is diffracted, and light extraction efficiency is increased.
- the position where the diffraction grating is introduced may be in any of the layers or in the medium (in the transparent substrate or the transparent electrode), but is preferably in the vicinity of the organic light emitting layer where light is generated.
- the period of the diffraction grating is preferably about 1/2 to 3 times the wavelength of light in the medium.
- the arrangement of the diffraction grating is preferably two-dimensionally repeated such as a square lattice, a triangular lattice, or a honeycomb lattice.
- the organic EL device of the present invention is processed on the light extraction side of the substrate so as to provide, for example, a microlens array structure, or combined with a so-called condensing sheet, for example, with respect to a specific direction, for example, the light emitting surface By condensing in the front direction, the luminance in a specific direction can be increased.
- quadrangular pyramids having a side of 30 ⁇ m and an apex angle of 90 degrees are arranged two-dimensionally on the light extraction side of the substrate.
- One side is preferably 10 ⁇ m to 100 ⁇ m. If it becomes smaller than this, the effect of diffraction will generate
- the condensing sheet it is possible to use, for example, a sheet that has been put to practical use in an LED backlight of a liquid crystal display device.
- a brightness enhancement film (BEF) manufactured by Sumitomo 3M Limited can be used.
- BEF brightness enhancement film
- the shape of the prism sheet for example, the base material may be formed by forming a ⁇ -shaped stripe having a vertex angle of 90 degrees and a pitch of 50 ⁇ m, or the vertex angle is rounded and the pitch is changed randomly. Other shapes may be used.
- a light diffusion plate / film may be used in combination with the light collecting sheet.
- a diffusion film (light-up) manufactured by Kimoto Co., Ltd. can be used.
- a desired electrode material for example, a thin film made of an anode material is formed on a suitable substrate by a method such as vapor deposition or sputtering so as to have a film thickness of 1 ⁇ m or less, preferably 10 nm to 200 nm.
- a method for forming each of these layers there are a vapor deposition method, a wet process (spin coating method, casting method, ink jet method, printing method) and the like as described above, but it is easy to obtain a homogeneous film and it is difficult to generate pinholes.
- film formation by a coating method such as a spin coating method, an ink jet method, or a printing method is preferable in the present invention.
- liquid medium for dissolving or dispersing the organic EL material according to the present invention examples include ketones such as methyl ethyl ketone and cyclohexanone, fatty acid esters such as ethyl acetate, halogenated hydrocarbons such as dichlorobenzene, toluene, xylene, and mesitylene.
- Aromatic hydrocarbons such as cyclohexylbenzene, aliphatic hydrocarbons such as cyclohexane, decalin, and dodecane, and organic solvents such as DMF and DMSO can be used.
- a dispersion method it can disperse
- a thin film made of a cathode material is formed thereon by a method such as vapor deposition or sputtering so as to have a film thickness of 1 ⁇ m or less, preferably in the range of 50 nm to 200 nm.
- a desired organic EL element can be obtained.
- a DC voltage is applied to the multicolor display device thus obtained, light emission can be observed by applying a voltage of about 2 to 40 V with the positive polarity of the anode and the negative polarity of the cathode.
- An alternating voltage may be applied.
- the alternating current waveform to be applied may be arbitrary.
- the organic EL element of the present invention can be used as a display device, a display, and various light emission sources.
- lighting devices home lighting, interior lighting
- clock and liquid crystal backlights billboard advertisements, traffic lights, light sources of optical storage media, light sources of electrophotographic copying machines, light sources of optical communication processors, light
- the light source of a sensor etc. are mentioned, It is not limited to this, Especially, it can use effectively for the use as a backlight of a liquid crystal display device, and a light source for illumination.
- patterning may be performed by a metal mask, an ink jet printing method, or the like during film formation, if necessary.
- patterning only the electrode may be patterned, the electrode and the light emitting layer may be patterned, or the entire layer of the element may be patterned.
- a conventionally known method is used. Can do.
- the light emission color of the organic EL device of the present invention and the compound according to the present invention is shown in FIG. 4.16 on page 108 of “New Color Science Handbook” (edited by the Japan Color Society, University of Tokyo Press, 1985). It is determined by the color when the result measured with a total CS-1000 (manufactured by Konica Minolta Sensing) is applied to the CIE chromaticity coordinates.
- Example 1 Preparation of X-ray diffraction measurement sample >> Compound 3-3 (10 g) was dissolved in 50 ml of o-dichlorobenzene, and this solution was added little by little to 500 ml of acetonitrile while stirring. After the addition was completed, stirring was continued for 3 hours at room temperature. The sample was blown and dried at 70 ° C. for 6 hours to obtain Sample 1-1.
- the compound having a specific structure of the present invention can stably extract the amorphous state (sample 1-2) and the crystalline state (sample 1-1) by properly using any treatment method. did it.
- a substrate with a 150 nm ITO film formed on glass (NH Techno Glass: NA-45) was ultrasonically cleaned with iso-propyl alcohol, dried with dry nitrogen gas, UV ozone cleaned for 5 minutes, and a transparent support substrate Got.
- the substrate was transferred to a nitrogen atmosphere, and a film obtained by dissolving compound 2-2 (60 mg) in 6 ml of toluene was formed into a film by spin coating at 1000 rpm for 30 seconds, and heated in vacuum at 150 ° C. for 3 hours. And Sample 2-1 was obtained. Subsequently, the sample 2-1 was set on a spin coater, and 6 ml of acetonitrile was used to obtain a sample 2-2 treated with acetonitrile by a spin coating method under conditions of 1000 rpm and 300 seconds. Next, Sample 2-2 was heated in vacuum at 150 ° C. for 3 hours to obtain Sample 2-3.
- Residual rate (absorbance after rinsing) / (absorbance before rinsing) ⁇ 100
- Compound A Compound (23) described in JP-A No. 2004-292784 From Table 1, by applying a physicochemical treatment after forming a thin film using the compound of the present invention, the solvent solubility is changed, and it is possible to form a thin film having excellent thin film durability (solvent resistance). I understood it. When the UV spectral absorption spectrum was measured, the waveform did not change, and the chemical structure of the molecules forming the thin film did not change.
- Example 3 Preparation of organic EL element 3-1 >> This ITO transparent electrode was provided after patterning was performed on a substrate (NA-45 manufactured by NH Techno Glass Co., Ltd.) formed by depositing 100 nm of ITO (indium tin oxide) on a 100 mm ⁇ 100 mm ⁇ 1.1 mm glass substrate as an anode.
- the transparent support substrate was ultrasonically cleaned with isopropyl alcohol, dried with dry nitrogen gas, and subjected to UV ozone cleaning for 5 minutes.
- the substrate was transferred to a nitrogen atmosphere, and a solution of CBP (60 mg), compound Ir-9 (3.0 mg), and Ir-12 (3.0 mg) dissolved in 6 ml of toluene was used on the hole transport layer at 1000 rpm. For 30 seconds under the condition of spin coating. Heating was performed in vacuum at 150 ° C. for 1 hour to obtain a light emitting layer having a thickness of 30 nm.
- this transparent support substrate was fixed to a substrate holder of a commercially available vacuum deposition apparatus, while BCP and Alq 3 were placed in five tantalum resistance heating boats, respectively, and attached to the vacuum deposition apparatus (first vacuum chamber). . Further, lithium fluoride was placed in a resistance heating boat made of tantalum, and aluminum was placed in a resistance heating boat made of tungsten, and attached to the second vacuum tank of the vacuum evaporation apparatus.
- the first vacuum chamber was depressurized to 4 ⁇ 10 ⁇ 4 Pa, and then heated by energizing the heating boat containing BCP, and the first vacuum chamber having a thickness of 10 nm at a deposition rate of 0.1 to 0.2 nm / sec.
- An electron transport layer was provided.
- the heating boat containing Alq 3 was heated by energization to provide a second electron transport layer having a film thickness of 20 nm at a deposition rate of 0.1 to 0.2 nm / second.
- a stainless steel rectangular perforated mask is arranged on the electron transport layer from the outside of the apparatus. Installed with remote control.
- a current was passed through a boat containing lithium fluoride to provide a cathode buffer layer having a thickness of 0.5 nm at a deposition rate of 0.01 to 0.02 nm / second,
- a boat containing aluminum was energized, and a cathode having a film thickness of 150 nm was attached at a deposition rate of 1 to 2 nm / second to produce an organic EL element 3-1.
- ITO transparent electrode was provided after patterning was performed on a substrate (NA-45 manufactured by NH Techno Glass Co., Ltd.) formed by depositing 100 nm of ITO (indium tin oxide) on a 100 mm ⁇ 100 mm ⁇ 1.1 mm glass substrate as an anode.
- the transparent support substrate was ultrasonically cleaned with isopropyl alcohol, dried with dry nitrogen gas, and subjected to UV ozone cleaning for 5 minutes.
- This substrate was transferred to a nitrogen atmosphere, and a film obtained by dissolving ⁇ -NPD (60 mg) in 6 ml of toluene on a transparent support substrate was formed by spin coating at 1000 rpm for 30 seconds. After heating in vacuum at 150 ° C for 1 hour, the substrate was set on a spin coater, spin-coated using 6 ml of acetonitol at 1000 rpm for 300 seconds, and further heated in vacuum at 150 ° C for 1 hour. A hole transport layer having a thickness of 30 nm was provided.
- This substrate was transferred to a nitrogen atmosphere, and a spin coating method was performed on the hole transport layer using a solution of CBP (60 mg) and Ir-12 (6.0 mg) dissolved in 6 ml of toluene at 1000 rpm for 30 seconds. To form a film. Heating was performed in vacuum at 150 ° C. for 1 hour to obtain a light emitting layer having a thickness of 30 nm.
- this transparent support substrate was fixed to a substrate holder of a commercially available vacuum deposition apparatus, while BCP and Alq 3 were placed in five tantalum resistance heating boats, respectively, and attached to the vacuum deposition apparatus (first vacuum chamber). . Further, lithium fluoride was placed in a resistance heating boat made of tantalum, and aluminum was placed in a resistance heating boat made of tungsten, and attached to the second vacuum tank of the vacuum evaporation apparatus.
- the first vacuum chamber was depressurized to 4 ⁇ 10 ⁇ 4 Pa, and then heated by energizing the heating boat containing BCP, and the first vacuum chamber having a thickness of 10 nm at a deposition rate of 0.1 to 0.2 nm / sec.
- An electron transport layer was provided.
- the heating boat containing Alq 3 was heated by energization to provide a second electron transport layer having a film thickness of 20 nm at a deposition rate of 0.1 to 0.2 nm / second.
- a stainless steel rectangular perforated mask is arranged on the electron transport layer from the outside of the apparatus. Installed with remote control.
- a current was passed through a boat containing lithium fluoride to provide a cathode buffer layer having a thickness of 0.5 nm at a deposition rate of 0.01 to 0.02 nm / second,
- a boat containing aluminum was energized, a cathode having a film thickness of 150 nm was attached at a deposition rate of 1 to 2 nm / second, and an organic EL element 3-2 was produced.
- FIG. 3 is a schematic diagram of the lighting device, and the organic EL element 101 is covered with a glass cover 102 (in addition, the sealing operation with the glass cover is performed in a nitrogen atmosphere without bringing the organic EL element 101 into contact with the atmosphere. (In a high purity nitrogen gas atmosphere with a purity of 99.999% or more).
- FIG. 4 shows a cross-sectional view of the lighting device.
- 105 denotes a cathode
- 106 denotes an organic EL layer
- 107 denotes a glass substrate with a transparent electrode.
- the glass cover 102 is filled with nitrogen gas 108 and a water catching agent 109 is provided.
- the organic EL element was continuously lit at a constant current of 2.5 mA / cm 2 at room temperature, and the time ( ⁇ 1/2 ) required to reach half the initial luminance was measured.
- the light emission lifetime is expressed as a relative value where the organic EL element 3-1 is set to 100.
- the comparative organic EL device 3-2 did not function as a light emitting device, and performance evaluation could not be performed.
- the organic EL element of the present invention can achieve a longer emission lifetime than the comparative organic EL element 3-1, and the manufacturing method of the present invention is used as a manufacturing method of the organic EL element. I found it suitable.
- Example 4 Preparation of organic EL element 4-1 >> This ITO transparent electrode was provided after patterning was performed on a substrate (NA-45 manufactured by NH Techno Glass Co., Ltd.) formed by depositing 100 nm of ITO (indium tin oxide) on a 100 mm ⁇ 100 mm ⁇ 1.1 mm glass substrate as an anode.
- the transparent support substrate was ultrasonically cleaned with isopropyl alcohol, dried with dry nitrogen gas, and subjected to UV ozone cleaning for 5 minutes.
- This substrate was transferred to a nitrogen atmosphere, and a film obtained by dissolving compound 1-4 (60 mg) in 6 ml of toluene on a transparent support substrate was formed by spin coating at 1000 rpm for 30 seconds. After heating in vacuum at 150 ° C for 1 hour, the substrate was set on a spin coater, spin-coated using 6 ml of acetonitol at 1000 rpm for 300 seconds, and further heated in vacuum at 150 ° C for 1 hour. A hole transport layer having a thickness of 30 nm was provided.
- the substrate was transferred to a nitrogen atmosphere, and a solution of compound 2-1 (60 mg), compound Ir-9 (3.0 mg), and Ir-12 (3.0 mg) dissolved in 6 ml of toluene was placed on the hole transport layer.
- the film was formed by spin coating under conditions of 1000 rpm and 30 seconds. After heating in vacuum at 150 ° C for 1 hour, the substrate was set on a spin coater, spin-coated using 6 ml of acetonitol at 1000 rpm for 300 seconds, and further heated in vacuum at 150 ° C for 1 hour.
- a light emitting layer having a thickness of 30 nm was provided.
- a film obtained by dissolving Exemplified Compound 3-2 (60 mg) in 6 ml of butanol was formed into a film by spin coating under conditions of 1000 rpm and 30 seconds. After heating in vacuum at 150 ° C for 1 hour, the substrate was set on a spin coater, spin-coated using 6 ml of acetonitol at 1000 rpm for 300 seconds, and further heated in vacuum at 150 ° C for 1 hour. A first electron transport layer having a thickness of 30 nm was provided.
- this substrate was fixed to a substrate holder of a vacuum vapor deposition apparatus, and 200 mg of Alq 3 was put into a molybdenum resistance heating boat and attached to the vacuum vapor deposition apparatus.
- the vacuum chamber was depressurized to 4 ⁇ 10 ⁇ 4 Pa, and then heated by energizing the heating boat containing Alq 3 and deposited on the first electron transport layer at a deposition rate of 0.1 nm / second, Further, a second electron transport layer having a thickness of 40 nm was provided.
- the substrate temperature at the time of vapor deposition was room temperature.
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Abstract
Description
3.前記薄膜の物理化学的性質の変化がアモルファスから結晶への変化であることを特徴とする前記1または2に記載の薄膜の形成方法。 (In the formula, Ar 1 and Ar 2 represent an aromatic ring, and R 1 and R 2 represent an atomic group necessary for bonding to each other to form a 5-membered or 6-membered aromatic ring, provided that (The aromatic ring represents an aromatic hydrocarbon ring or an aromatic heterocyclic ring.)
3. 3. The method for forming a thin film according to 1 or 2, wherein the change in physicochemical properties of the thin film is a change from amorphous to crystalline.
3.前記有機物が一般式(1)の部分構造を少なくとも2つ有することを特徴とする1または2に記載の薄膜の形成方法。 (In the formula, Ar 1 and Ar 2 represent an aromatic ring, and R 1 and R 2 represent an atomic group necessary for bonding to each other to form a 5-membered or 6-membered aromatic ring, provided that (The aromatic ring represents an aromatic hydrocarbon ring or an aromatic heterocyclic ring.)
3. 3. The method for forming a thin film according to 1 or 2, wherein the organic substance has at least two partial structures of the general formula (1).
(本発明に係る有機物)
先ず、本発明に係る有機物について説明する。 The thin film formation method of the present invention changes the physicochemical properties of the thin film without changing the chemical structure of the organic material forming the thin film by applying a physicochemical treatment after forming the thin film made of the organic material. It is characterized by that.
(Organic substance according to the present invention)
First, the organic substance according to the present invention will be described.
(薄膜の形成)
本発明の薄膜の形成方法においては、上記本発明の有機物からなる薄膜形成後に物理化学的な処理を加えることにより、薄膜を形成する分子の化学的構造を変えることなく、薄膜の物理化学的性質を変化させることを特徴とする。 Compounds 3-1 to 3-5 are preferably used as the electron transport material of the present invention, and compounds 1-1 to 1-5 are preferably used as the hole transport material of the present invention.
(Thin film formation)
In the method for forming a thin film of the present invention, the physicochemical properties of the thin film can be obtained without changing the chemical structure of the molecules forming the thin film by applying a physicochemical treatment after the formation of the organic thin film of the present invention. It is characterized by changing.
(溶解、塗布、薄膜を形成)
本発明において、有機物からなる薄膜形成には、特には限定されないが、塗布工程を用いることが好ましい。 <Formation of organic thin films>
(Dissolving, coating, forming a thin film)
In the present invention, the formation of a thin film made of an organic material is not particularly limited, but it is preferable to use a coating process.
(薄膜の結晶化)
本発明の薄膜の形成方法においては、有機物からなる薄膜を形成した後に物理化学的な処理を加えることにより、前記薄膜を形成する前記有機物の化学的構造を変えることなく、前記薄膜の物理化学的性質を変化させることを特徴とする。 In addition, when the compound of the present invention is not an amorphous type but a crystal type, it can be changed to an amorphous type by a treatment such as sublimation purification, reprecipitation using a good solvent and a poor solvent, By using this, dissolution, coating, and thin film can be suitably formed in the same manner as in the case of the amorphous type from the beginning.
(Thin film crystallization)
In the method for forming a thin film of the present invention, the physicochemical treatment of the thin film can be performed without changing the chemical structure of the organic material forming the thin film by applying a physicochemical treatment after forming the thin film made of the organic material. It is characterized by changing properties.
(加熱処理での薄膜の結晶化)
薄膜をアモルファスから結晶化するための物理化学的な処理が物理的な処理、中でも熱的処理であることが好ましく、加熱処理としては、50℃~250℃の範囲が好ましく、70℃~200℃の範囲がより好ましい。また、加熱時間は5秒~120分の範囲が好ましく、製造効率アップの観点から、10秒~60分の範囲が好ましい。 In the present invention, the change in the physicochemical properties of the thin film is preferably a change from amorphous to crystalline. The thin film formed by a coating method or the like in the state where the organic substance of the present invention is amorphous is subjected to heat treatment (physical Treatment), treatment with a specific solvent (chemical treatment), preferably, crystallization is performed by further applying physicochemical treatment such as heat treatment (physical treatment), and a thin film is formed. By changing the physicochemical properties of the thin film without changing the chemical structure of the molecule, the thin film can be made insoluble in the coating solution.
(Thin film crystallization by heat treatment)
The physicochemical treatment for crystallizing the thin film from amorphous is preferably a physical treatment, especially a thermal treatment, and the heat treatment is preferably in the range of 50 ° C to 250 ° C, and 70 ° C to 200 ° C. The range of is more preferable. Further, the heating time is preferably in the range of 5 seconds to 120 minutes, and from the viewpoint of increasing production efficiency, it is preferably in the range of 10 seconds to 60 minutes.
(特定の溶剤処理での薄膜の結晶化)
又、薄膜をアモルファスから結晶化するための物理化学的な処理が化学的処理であることが好ましく、化学的処理のうちでも、溶剤処理が好ましく用いられる。溶剤処理としては、本発明の化合物にたいして結晶化能の大きな溶剤を用いることが好ましく、薄膜の化合物の種類に応じて適宜選択して用いることができる。例えば、アセトニトリル、メタノール、エタノール、アセトン、ヘキサン、酢酸エチル、トルエン、テトラヒドロフラン、クロロホルム、等が挙げられる。浸漬法、スプレー、スピンコート等公知の処理法で溶剤を施し結晶化を簡便に行うことができる。 Examples of the heating method include blast heating, heating by radiant heat, microwave heating, infrared heating, and hot plate heating.
(Thin film crystallization by specific solvent treatment)
The physicochemical treatment for crystallizing the thin film from amorphous is preferably a chemical treatment, and among the chemical treatments, a solvent treatment is preferably used. As the solvent treatment, a solvent having a large crystallization ability is preferably used for the compound of the present invention, and can be appropriately selected and used depending on the type of the compound of the thin film. Examples include acetonitrile, methanol, ethanol, acetone, hexane, ethyl acetate, toluene, tetrahydrofuran, chloroform, and the like. Crystallization can be easily carried out by applying a solvent by a known treatment method such as dipping, spraying, spin coating and the like.
(積層薄膜の形成)
本発明においては、上記で作製した結晶化した薄膜の上に、前述した本発明の化合物の塗布液を塗布することにより、最初に形成した薄膜が溶剤に溶解してしまうことなしに、下層材料の上層への混合(コンタミ)や界面の乱れ、など塗布工程ならではの難しさなしに、積層薄膜を塗布することができる。後、薄膜の結晶化処理を行い、結晶化した積層薄膜を形成することができる。 For the crystallization of the thin film, it is preferable to use physical treatment and chemical treatment as physicochemical treatments, and more preferably in combination.
(Formation of laminated thin film)
In the present invention, by applying the above-described coating solution of the compound of the present invention on the crystallized thin film produced as described above, the first formed thin film does not dissolve in the solvent, and the lower layer material The laminated thin film can be applied without the difficulties inherent in the coating process, such as mixing (contamination) with the upper layer and disorder of the interface. Thereafter, the thin film can be crystallized to form a crystallized laminated thin film.
(アモルファス構造、または、結晶構造、の確認)
本発明の化合物、や、薄膜が、アモルファス構造、または、結晶構造、であることの確認や測定は、試料のX線回折(XRD)(X線回折法装置、例えば、理学電気社製、形式RINT-TTR2装置)の測定により容易に行うことができる。 It is possible to easily form a stack of organic compound thin films, which has been difficult in the coating process, and to make it possible to arbitrarily form a crystalline film. Expression and charge mobility can be improved.
(Confirmation of amorphous structure or crystal structure)
Confirmation and measurement of the compound of the present invention and the thin film having an amorphous structure or a crystal structure can be carried out using X-ray diffraction (XRD) (X-ray diffractometer, for example, manufactured by Rigaku Denki Co., Ltd. RINT-TTR2 apparatus) can be easily performed.
本発明の電子デバイスについて説明する。 《Electronic device》
The electronic device of the present invention will be described.
本発明の有機薄膜の形成方法により得られた有機薄膜を有する、本発明の有機EL素子について説明する。 << Organic EL element >>
The organic EL element of the present invention having an organic thin film obtained by the method for forming an organic thin film of the present invention will be described.
本発明の有機EL素子の構成層について説明する。本発明において、有機EL素子の層構成の好ましい具体例を以下に示すが、本発明はこれらに限定されない。 << Constituent layers of organic EL elements >>
The constituent layers of the organic EL element of the present invention will be described. In this invention, although the preferable specific example of the layer structure of an organic EL element is shown below, this invention is not limited to these.
(ii)陽極/正孔輸送層/発光層/電子輸送層/陰極
(iii)陽極/正孔輸送層/発光層/正孔阻止層/電子輸送層/陰極
(iv)陽極/正孔輸送層/発光層/正孔阻止層/電子輸送層/陰極バッファー層/陰極
(v)陽極/陽極バッファー層/正孔輸送層/発光層/正孔阻止層/電子輸送層/陰極バッファー層/陰極
本発明の有機EL素子においては、青色発光層の発光極大波長は430nm~480nmにあるものが好ましく、緑色発光層は発光極大波長が510nm~550nm、赤色発光層は発光極大波長が600nm~640nmの範囲にある単色発光層であることが好ましく、これらを用いた表示装置であることが好ましい。また、これらの少なくとも3層の発光層を積層して白色発光層としたものであってもよい。更に、発光層間には非発光性の中間層を有していてもよい。本発明の有機EL素子としては白色発光層であることが好ましく、これらを用いた照明装置であることが好ましい。 (I) Anode / light emitting layer / electron transport layer / cathode (ii) Anode / hole transport layer / light emitting layer / electron transport layer / cathode (iii) Anode / hole transport layer / light emitting layer / hole blocking layer / electron Transport layer / cathode (iv) Anode / hole transport layer / light emitting layer / hole blocking layer / electron transport layer / cathode buffer layer / cathode (v) Anode / anode buffer layer / hole transport layer / light emitting layer / hole Blocking layer / electron transport layer / cathode buffer layer / cathode In the organic EL device of the present invention, the blue light emitting layer preferably has an emission maximum wavelength of 430 nm to 480 nm, and the green light emitting layer has an emission maximum wavelength of 510 nm to 550 nm, The red light emitting layer is preferably a monochromatic light emitting layer having a light emission maximum wavelength in the range of 600 nm to 640 nm, and is preferably a display device using these. Alternatively, a white light emitting layer may be formed by laminating at least three light emitting layers. Further, a non-light emitting intermediate layer may be provided between the light emitting layers. The organic EL element of the present invention is preferably a white light emitting layer, and is preferably a lighting device using these.
本発明に係る発光層は、電極または電子輸送層、正孔輸送層から注入されてくる電子及び正孔が再結合して発光する層であり、発光する部分は発光層の層内であっても発光層と隣接層との界面であってもよい。 <Light emitting layer>
The light emitting layer according to the present invention is a layer that emits light by recombination of electrons and holes injected from the electrode, the electron transport layer, or the hole transport layer, and the light emitting portion is in the layer of the light emitting layer. May be the interface between the light emitting layer and the adjacent layer.
本発明に用いられるホスト化合物について説明する。 (Host compound)
The host compound used in the present invention will be described.
本発明に用いることができる発光ドーパントとしては、蛍光ドーパント(蛍光性化合物ともいう)、リン光ドーパント(リン光発光体、リン光性化合物、リン光発光性化合物等ともいう)を用いることができるが、より発光効率の高い有機EL素子を得る観点からは、本発明の有機EL素子の発光層や発光ユニットに使用される発光ドーパント(単に、発光材料ということもある)としては、上記のホスト化合物を含有すると同時に、リン光ドーパントを含有することが好ましい。 (Luminescent dopant)
As a light-emitting dopant that can be used in the present invention, a fluorescent dopant (also referred to as a fluorescent compound) or a phosphorescent dopant (also referred to as a phosphorescent emitter, a phosphorescent compound, or a phosphorescent compound) can be used. However, from the viewpoint of obtaining an organic EL device with higher luminous efficiency, the above-mentioned host is used as a light-emitting dopant (sometimes referred to simply as a light-emitting material) used in the light-emitting layer or light-emitting unit of the organic EL device of the present invention. It is preferable to contain a phosphorescent dopant simultaneously with the compound.
本発明に用いることができるリン光ドーパントは、励起三重項からの発光が観測される化合物であり、具体的には、室温(25℃)にてリン光発光する化合物であり、リン光量子収率が、25℃において0.01以上の化合物であると定義されるが、好ましいリン光量子収率は0.1以上である。 (Phosphorescent dopant)
The phosphorescent dopant that can be used in the present invention is a compound in which light emission from an excited triplet is observed, specifically, a compound that emits phosphorescence at room temperature (25 ° C.), and a phosphorescence quantum yield. Is defined as a compound of 0.01 or more at 25 ° C., but a preferable phosphorescence quantum yield is 0.1 or more.
蛍光ドーパント(蛍光性化合物ともいう)としては、クマリン系色素、ピラン系色素、シアニン系色素、クロコニウム系色素、スクアリウム系色素、オキソベンツアントラセン系色素、フルオレセイン系色素、ローダミン系色素、ピリリウム系色素、ペリレン系色素、スチルベン系色素、ポリチオフェン系色素、または希土類錯体系蛍光体等が挙げられる。 (Fluorescent dopant)
As fluorescent dopants (also referred to as fluorescent compounds), coumarin dyes, pyran dyes, cyanine dyes, croconium dyes, squalium dyes, oxobenzanthracene dyes, fluorescein dyes, rhodamine dyes, pyrylium dyes, Examples include perylene dyes, stilbene dyes, polythiophene dyes, and rare earth complex phosphors.
注入層は必要に応じて設け、電子注入層と正孔注入層があり、上記の如く陽極と発光層または正孔輸送層の間、及び陰極と発光層または電子輸送層との間に存在させてもよい。 << Injection layer: electron injection layer, hole injection layer >>
The injection layer is provided as necessary, and there are an electron injection layer and a hole injection layer, and as described above, it exists between the anode and the light emitting layer or the hole transport layer and between the cathode and the light emitting layer or the electron transport layer. May be.
阻止層は、上記の如く有機化合物薄膜の基本構成層の他に必要に応じて設けられるものである。例えば、特開平11-204258号公報、同11-204359号公報、及び「有機EL素子とその工業化最前線(1998年11月30日エヌ・ティー・エス社発行)」の237頁等に記載されている正孔阻止(ホールブロック)層がある。 <Blocking layer: hole blocking layer, electron blocking layer>
The blocking layer is provided as necessary in addition to the basic constituent layer of the organic compound thin film as described above. For example, it is described in JP-A Nos. 11-204258 and 11-204359, and “Organic EL elements and the forefront of industrialization (published by NTT Corporation on November 30, 1998)” on page 237. There is a hole blocking (hole blocking) layer.
正孔輸送層とは正孔を輸送する機能を有する正孔輸送材料からなり、広い意味で正孔注入層、電子阻止層も正孔輸送層に含まれる。正孔輸送層は単層または複数層設けることができる。 《Hole transport layer》
The hole transport layer is made of a hole transport material having a function of transporting holes, and in a broad sense, a hole injection layer and an electron blocking layer are also included in the hole transport layer. The hole transport layer can be provided as a single layer or a plurality of layers.
電子輸送層とは電子を輸送する機能を有する材料からなり、広い意味で電子注入層、正孔阻止層も電子輸送層に含まれる。電子輸送層は単層または複数層設けることができる。 《Electron transport layer》
The electron transport layer is made of a material having a function of transporting electrons, and in a broad sense, an electron injection layer and a hole blocking layer are also included in the electron transport layer. The electron transport layer can be provided as a single layer or a plurality of layers.
有機EL素子における陽極としては、仕事関数の大きい(4eV以上)金属、合金、電気伝導性化合物及びこれらの混合物を電極物質とするものが好ましく用いられる。このような電極物質の具体例としては、Au等の金属、CuI、インジウムチンオキシド(ITO)、SnO2、ZnO等の導電性透明材料が挙げられる。また、IDIXO(In2O3-ZnO)等非晶質で透明導電膜を作製可能な材料を用いてもよい。 "anode"
As the anode in the organic EL element, an electrode material made of a metal, an alloy, an electrically conductive compound, or a mixture thereof having a high work function (4 eV or more) is preferably used. Specific examples of such electrode materials include metals such as Au, and conductive transparent materials such as CuI, indium tin oxide (ITO), SnO 2 , and ZnO. Alternatively, an amorphous material such as IDIXO (In 2 O 3 —ZnO) capable of forming a transparent conductive film may be used.
一方、陰極としては仕事関数の小さい(4eV以下)金属(電子注入性金属と称する)、合金、電気伝導性化合物及びこれらの混合物を電極物質とするものが用いられる。このような電極物質の具体例としては、ナトリウム、ナトリウム-カリウム合金、マグネシウム、リチウム、マグネシウム/銅混合物、マグネシウム/銀混合物、マグネシウム/アルミニウム混合物、マグネシウム/インジウム混合物、アルミニウム/酸化アルミニウム(Al2O3)混合物、インジウム、リチウム/アルミニウム混合物、希土類金属等が挙げられる。これらの中で、電子注入性及び酸化等に対する耐久性の点から、電子注入性金属とこれより仕事関数の値が大きく安定な金属である第二金属との混合物、例えば、マグネシウム/銀混合物、マグネシウム/アルミニウム混合物、マグネシウム/インジウム混合物、アルミニウム/酸化アルミニウム(Al2O3)混合物、リチウム/アルミニウム混合物、アルミニウム等が好適である。 "cathode"
On the other hand, as the cathode, a material having a low work function (4 eV or less) metal (referred to as an electron injecting metal), an alloy, an electrically conductive compound, and a mixture thereof as an electrode material is used. Specific examples of such electrode materials include sodium, sodium-potassium alloy, magnesium, lithium, magnesium / copper mixture, magnesium / silver mixture, magnesium / aluminum mixture, magnesium / indium mixture, aluminum / aluminum oxide (Al 2 O 3 ) Mixtures, indium, lithium / aluminum mixtures, rare earth metals and the like. Among these, from the point of durability against electron injection and oxidation, etc., a mixture of an electron injecting metal and a second metal which is a stable metal having a larger work function than this, for example, a magnesium / silver mixture, Magnesium / aluminum mixtures, magnesium / indium mixtures, aluminum / aluminum oxide (Al 2 O 3 ) mixtures, lithium / aluminum mixtures, aluminum and the like are preferred.
本発明の有機EL素子に用いることのできる支持基板(以下、基体、基板、基材、支持体等とも言う)としては、ガラス、プラスチック等の種類には特に限定はなく、また透明であっても不透明であってもよい。支持基板側から光を取り出す場合には、支持基板は透明であることが好ましい。好ましく用いられる透明な支持基板としては、ガラス、石英、透明樹脂フィルムを挙げることができる。特に好ましい支持基板は、有機EL素子にフレキシブル性を与えることが可能な樹脂フィルムである。 《Support substrate》
As a support substrate (hereinafter also referred to as a substrate, substrate, substrate, support, etc.) that can be used in the organic EL device of the present invention, there is no particular limitation on the type of glass, plastic, etc., and it is transparent. May be opaque. When extracting light from the support substrate side, the support substrate is preferably transparent. Examples of the transparent support substrate preferably used include glass, quartz, and a transparent resin film. A particularly preferable support substrate is a resin film capable of giving flexibility to the organic EL element.
本発明に用いられる封止手段としては、例えば、封止部材と電極、支持基板とを接着剤で接着する方法を挙げることができる。 <Sealing>
As a sealing means used for this invention, the method of adhere | attaching a sealing member, an electrode, and a support substrate with an adhesive agent can be mentioned, for example.
有機層を挟み支持基板と対向する側の前記封止膜、あるいは前記封止用フィルムの外側に、素子の機械的強度を高めるために保護膜、あるいは保護板を設けてもよい。特に封止が前記封止膜により行われている場合には、その機械的強度は必ずしも高くないため、このような保護膜、保護板を設けることが好ましい。これに使用することができる材料としては、前記封止に用いたのと同様なガラス板、ポリマー板・フィルム、金属板・フィルム等を用いることができるが、軽量且つ薄膜化ということからポリマーフィルムを用いることが好ましい。 《Protective film, protective plate》
In order to increase the mechanical strength of the element, a protective film or a protective plate may be provided on the outer side of the sealing film on the side facing the support substrate with the organic layer interposed therebetween or on the sealing film. In particular, when the sealing is performed by the sealing film, the mechanical strength is not necessarily high, and thus it is preferable to provide such a protective film and a protective plate. As a material that can be used for this, the same glass plate, polymer plate / film, metal plate / film, and the like used for the sealing can be used, but the polymer film is light and thin. Is preferably used.
有機EL素子は空気よりも屈折率の高い(屈折率が1.7~2.1程度)層の内部で発光し、発光層で発生した光のうち15%から20%程度の光しか取り出せないことが一般的に言われている。これは、臨界角以上の角度θで界面(透明基板と空気との界面)に入射する光は、全反射を起こし素子外部に取り出すことができないことや、透明電極ないし発光層と透明基板との間で光が全反射を起こし、光が透明電極ないし発光層を導波し、結果として光が素子側面方向に逃げるためである。 《Light extraction》
The organic EL element emits light inside a layer having a refractive index higher than that of air (refractive index is about 1.7 to 2.1) and can extract only about 15% to 20% of the light generated in the light emitting layer. It is generally said. This is because the light incident on the interface (interface between the transparent substrate and air) at an angle θ greater than the critical angle causes total reflection and cannot be taken out of the element, or between the transparent electrode or the light emitting layer and the transparent substrate. This is because the light is totally reflected between the light and the light is guided through the transparent electrode or the light emitting layer, and as a result, the light escapes in the direction of the element side surface.
本発明の有機EL素子は基板の光取り出し側に、例えば、マイクロレンズアレイ状の構造を設けるように加工したり、あるいは所謂集光シートと組み合わせることにより、特定方向、例えば、素子発光面に対し正面方向に集光することにより、特定方向上の輝度を高めることができる。 <Condenser sheet>
The organic EL device of the present invention is processed on the light extraction side of the substrate so as to provide, for example, a microlens array structure, or combined with a so-called condensing sheet, for example, with respect to a specific direction, for example, the light emitting surface By condensing in the front direction, the luminance in a specific direction can be increased.
本発明の有機EL素子の作製方法の一例として、陽極/正孔注入層/正孔輸送層/発光層/電子輸送層/電子注入層/陰極からなる有機EL素子の作製法を説明する。 << Method for producing organic EL element >>
As an example of the method for producing the organic EL device of the present invention, a method for producing an organic EL device comprising an anode / hole injection layer / hole transport layer / light emitting layer / electron transport layer / electron injection layer / cathode will be described.
本発明の有機EL素子は、表示デバイス、ディスプレイ、各種発光光源として用いることができる。発光光源として、例えば、照明装置(家庭用照明、車内照明)、時計や液晶用バックライト、看板広告、信号機、光記憶媒体の光源、電子写真複写機の光源、光通信処理機の光源、光センサーの光源等が挙げられるがこれに限定するものではないが、特に液晶表示装置のバックライト、照明用光源としての用途に有効に用いることができる。 <Application>
The organic EL element of the present invention can be used as a display device, a display, and various light emission sources. For example, lighting devices (home lighting, interior lighting), clock and liquid crystal backlights, billboard advertisements, traffic lights, light sources of optical storage media, light sources of electrophotographic copying machines, light sources of optical communication processors, light Although the light source of a sensor etc. are mentioned, It is not limited to this, Especially, it can use effectively for the use as a backlight of a liquid crystal display device, and a light source for illumination.
《X線回折測定試料の作製》
化合物3-3(10g)を50mlのo-ジクロロベンゼンに溶解させ、この溶液を500mlのアセトニトリルに撹拌しながら少量ずつ添加し、添加終了後、室温にて3時間撹拌し続け、析出物をろ取、70℃で6時間送風乾燥を行い、試料1-1を得た。 Example 1
<< Preparation of X-ray diffraction measurement sample >>
Compound 3-3 (10 g) was dissolved in 50 ml of o-dichlorobenzene, and this solution was added little by little to 500 ml of acetonitrile while stirring. After the addition was completed, stirring was continued for 3 hours at room temperature. The sample was blown and dried at 70 ° C. for 6 hours to obtain Sample 1-1.
試料1-1、試料1-2のX線回折XRD(X線回折法装置、理学電機社製、形式RINT-TTR2装置)の測定結果を図1、図2に示す。 << Measurement of X-ray diffraction (XRD) >>
The measurement results of X-ray diffraction XRD (X-ray diffraction apparatus, manufactured by Rigaku Corporation, model RINT-TTR2 apparatus) of Sample 1-1 and Sample 1-2 are shown in FIGS.
装置:理学電機製RINT-TTR2
X線:Cu(1.54Å)
X線動作条件:15kV300mA
光学系:ブラッグーブレンターノ光学系
測定資料の形態:乳鉢にて粉砕後、無反射試料板に充填
スリット条件
DS、SS:1/2°
RS:0.3mm
走査条件:2θ=2~45°(0.04°刻み)、スキャンスピード:1°/分
実施例2
《積層薄膜の形成》
ガラス上にITOを150nm成膜した基板(NHテクノグラス社製:NA-45)をiso-プロピルアルコールで超音波洗浄し、乾燥窒素ガスで乾燥し、UVオゾン洗浄を5分間行い、透明支持基板を得た。 X-ray diffraction measurement conditions Equipment: RINT-TTR2 manufactured by Rigaku Corporation
X-ray: Cu (1.54mm)
X-ray operating conditions: 15 kV, 300 mA
Optical system: Bragg-Brentano optical system Form of measurement materials: After grinding in a mortar and filling in a non-reflective sample plate Slit conditions DS, SS: 1/2 °
RS: 0.3mm
Scanning conditions: 2θ = 2 to 45 ° (in increments of 0.04 °), scanning speed: 1 ° / min.
<Formation of laminated thin film>
A substrate with a 150 nm ITO film formed on glass (NH Techno Glass: NA-45) was ultrasonically cleaned with iso-propyl alcohol, dried with dry nitrogen gas, UV ozone cleaned for 5 minutes, and a transparent support substrate Got.
作製した試料(試料2-1~2-18)をスピンコーターにのせトルエン6mlを用い、1000rpm、30秒の条件下、スピンコート法によるトルエンリンス処理を実施し、トルエンリンス処理実施前後の360nmの吸光度を分光光度計(日立UV-3300)にて測定した。各試料のトルエンリンス後の薄膜の残存率を次式により求め薄膜の耐久性(耐溶剤性)を示す指標とした。結果を表1に示す。 << Durability test of thin film >>
The prepared samples (Samples 2-1 to 2-18) are placed on a spin coater, 6 ml of toluene is used, and a toluene rinsing process is performed by spin coating under conditions of 1000 rpm and 30 seconds. Absorbance was measured with a spectrophotometer (Hitachi UV-3300). The residual rate of the thin film after toluene rinsing of each sample was obtained by the following formula and used as an index indicating the durability (solvent resistance) of the thin film. The results are shown in Table 1.
表1から、本発明の化合物を用いて薄膜形成後に物理化学的な処理を加えることにより、溶剤溶解性が変化し、薄膜の耐久性(耐溶剤性)に優れた薄膜の形成が可能であることがわかった。尚、UV分光吸収スペクトルを測定したところ、その波形が変化していなかったことから、薄膜を形成する分子の化学的構造は変化していなかった。 Compound A: Compound (23) described in JP-A No. 2004-292784
From Table 1, by applying a physicochemical treatment after forming a thin film using the compound of the present invention, the solvent solubility is changed, and it is possible to form a thin film having excellent thin film durability (solvent resistance). I understood it. When the UV spectral absorption spectrum was measured, the waveform did not change, and the chemical structure of the molecules forming the thin film did not change.
《有機EL素子3-1の作製》
陽極として100mm×100mm×1.1mmのガラス基板上にITO(インジウムチンオキシド)を100nm製膜した基板(NHテクノグラス社製NA-45)にパターニングを行った後、このITO透明電極を設けた透明支持基板をイソプロピルアルコールで超音波洗浄し、乾燥窒素ガスで乾燥し、UVオゾン洗浄を5分間行った。 Example 3
<< Preparation of organic EL element 3-1 >>
This ITO transparent electrode was provided after patterning was performed on a substrate (NA-45 manufactured by NH Techno Glass Co., Ltd.) formed by depositing 100 nm of ITO (indium tin oxide) on a 100 mm × 100 mm × 1.1 mm glass substrate as an anode. The transparent support substrate was ultrasonically cleaned with isopropyl alcohol, dried with dry nitrogen gas, and subjected to UV ozone cleaning for 5 minutes.
陽極として100mm×100mm×1.1mmのガラス基板上にITO(インジウムチンオキシド)を100nm製膜した基板(NHテクノグラス社製NA-45)にパターニングを行った後、このITO透明電極を設けた透明支持基板をイソプロピルアルコールで超音波洗浄し、乾燥窒素ガスで乾燥し、UVオゾン洗浄を5分間行った。 << Preparation of organic EL element 3-2 >>
This ITO transparent electrode was provided after patterning was performed on a substrate (NA-45 manufactured by NH Techno Glass Co., Ltd.) formed by depositing 100 nm of ITO (indium tin oxide) on a 100 mm × 100 mm × 1.1 mm glass substrate as an anode. The transparent support substrate was ultrasonically cleaned with isopropyl alcohol, dried with dry nitrogen gas, and subjected to UV ozone cleaning for 5 minutes.
有機EL素子3-2の作製において、正孔輸送層を設ける際に、α-NPD(正孔輸送材料)を表2に記載の化合物に変更した以外は同様にして、有機EL素子3-3~3-5を作製した。 << Preparation of organic EL elements 3-3 to 3-5 >>
In the production of the organic EL device 3-2, the organic EL device 3-3 was prepared in the same manner except that α-NPD (hole transport material) was changed to the compounds shown in Table 2 when the hole transport layer was provided. ~ 3-5 were produced.
得られた有機EL素子3-1~3-5を評価するに際しては、作製後の各有機EL素子の非発光面をガラスケースで覆い、厚み300μmのガラス基板を封止用基板として用いて、周囲にシール材として、エポキシ系光硬化型接着剤(東亞合成社製ラックストラックLC0629B)を適用し、これを上記陰極上に重ねて前記透明支持基板と密着させ、ガラス基板側からUV光を照射して、硬化させて、封止して、図3、図4に示すような照明装置を形成して評価した。 << Evaluation of organic EL elements >>
When evaluating the obtained organic EL elements 3-1 to 3-5, the non-light emitting surface of each organic EL element after production was covered with a glass case, and a glass substrate having a thickness of 300 μm was used as a sealing substrate. An epoxy-based photo-curing adhesive (Lux Track LC0629B manufactured by Toagosei Co., Ltd.) is applied as a sealing material in the periphery, and this is placed on the cathode to be in close contact with the transparent support substrate and irradiated with UV light from the glass substrate side. Then, it was cured and sealed, and an illumination device as shown in FIGS. 3 and 4 was formed and evaluated.
有機EL素子を室温(約23~25℃)、2.5mA/cm2の定電流条件下による点灯を行い、点灯開始直後の発光輝度(L)[cd/m2]を測定することにより、外部取り出し量子効率(ηext)を算出した。ここで、発光輝度の測定はCS-1000(コニカミノルタセンシング製)を用いた。外部取り出し量子効率は有機EL素子3-1を100とする相対値で表した。 (External quantum efficiency)
By lighting the organic EL element under a constant current condition of room temperature (about 23 to 25 ° C.) and 2.5 mA / cm 2 , and measuring the emission luminance (L) [cd / m 2 ] immediately after the start of lighting, External extraction quantum efficiency (ηext) was calculated. Here, CS-1000 (manufactured by Konica Minolta Sensing) was used for measurement of light emission luminance. The external extraction quantum efficiency was expressed as a relative value where the organic EL element 3-1 was 100.
有機EL素子を室温下、2.5mA/cm2の定電流条件下による連続点灯を行い、初期輝度の半分の輝度になるのに要する時間(τ1/2)を測定した。発光寿命は有機EL素子3-1を100と設定する相対値で表した。 (Luminescent life)
The organic EL element was continuously lit at a constant current of 2.5 mA / cm 2 at room temperature, and the time (τ 1/2 ) required to reach half the initial luminance was measured. The light emission lifetime is expressed as a relative value where the organic EL element 3-1 is set to 100.
《有機EL素子4-1の作製》
陽極として100mm×100mm×1.1mmのガラス基板上にITO(インジウムチンオキシド)を100nm製膜した基板(NHテクノグラス社製NA-45)にパターニングを行った後、このITO透明電極を設けた透明支持基板をイソプロピルアルコールで超音波洗浄し、乾燥窒素ガスで乾燥し、UVオゾン洗浄を5分間行った。 Example 4
<< Preparation of organic EL element 4-1 >>
This ITO transparent electrode was provided after patterning was performed on a substrate (NA-45 manufactured by NH Techno Glass Co., Ltd.) formed by depositing 100 nm of ITO (indium tin oxide) on a 100 mm × 100 mm × 1.1 mm glass substrate as an anode. The transparent support substrate was ultrasonically cleaned with isopropyl alcohol, dried with dry nitrogen gas, and subjected to UV ozone cleaning for 5 minutes.
102 ガラスカバー
105 陰極
106 有機EL層
107 透明電極付きガラス基板
108 窒素ガス
109 捕水剤 DESCRIPTION OF
Claims (11)
- 有機物からなる薄膜を形成した後に物理化学的な処理を加えることにより、前記薄膜を形成する前記有機物の化学的構造を変えることなく、前記薄膜の物理化学的性質を変化させることを特徴とする薄膜の形成方法。 A thin film characterized by changing the physicochemical properties of the thin film without changing the chemical structure of the organic material forming the thin film by applying a physicochemical treatment after forming the thin film made of the organic material. Forming method.
- 前記有機物が下記一般式(1)の部分構造を有する化合物であることを特徴とする請求項1に記載の薄膜の形成方法。
(式中、Ar1、Ar2は芳香族環を表し、R1、R2は互いに結合して、5員または6員の芳香族環を形成するのに必要な原子郡を表す。但し、前記芳香族環は、芳香族炭化水素環または芳香族複素環を表す。) The method for forming a thin film according to claim 1, wherein the organic substance is a compound having a partial structure represented by the following general formula (1).
(In the formula, Ar 1 and Ar 2 represent an aromatic ring, and R 1 and R 2 represent an atomic group necessary for bonding to each other to form a 5-membered or 6-membered aromatic ring, provided that (The aromatic ring represents an aromatic hydrocarbon ring or an aromatic heterocyclic ring.) - 前記薄膜の物理化学的性質の変化がアモルファスから結晶への変化であることを特徴とする請求項1または2に記載の薄膜の形成方法。 The method for forming a thin film according to claim 1 or 2, wherein the change in the physicochemical properties of the thin film is a change from amorphous to crystalline.
- 前記物理化学的な処理が熱的処理であることを特徴とする請求項1~3のいずれか1項に記載の薄膜の形成方法。 The method for forming a thin film according to any one of claims 1 to 3, wherein the physicochemical treatment is thermal treatment.
- 前記物理化学的な処理が化学的処理であることを特徴とする請求項1~3のいずれか1項に記載の薄膜の形成方法。 4. The method for forming a thin film according to claim 1, wherein the physicochemical treatment is a chemical treatment.
- 前記薄膜の形成で塗布工程を用いることを特徴とする請求項1~5のいずれか1項に記載の薄膜の形成方法。 The method for forming a thin film according to any one of claims 1 to 5, wherein a coating step is used in forming the thin film.
- 請求項1~6のいずれか1項に記載の薄膜の形成方法で形成された薄膜上に、当該薄膜に隣接した薄膜を、請求項1~6のいずれか1項に記載の薄膜の形成方法を用いてもよい塗布工程で形成し、積層薄膜を形成することを特徴とする積層薄膜の形成方法。 The thin film forming method according to any one of claims 1 to 6, wherein a thin film adjacent to the thin film is formed on the thin film formed by the thin film forming method according to any one of claims 1 to 6. A method for forming a laminated thin film, characterized in that the laminated thin film is formed by a coating process that may be used.
- 請求項1~6のいずれか1項に記載の薄膜の形成方法で形成された薄膜を含むことを特徴とする電子デバイス。 An electronic device comprising a thin film formed by the method for forming a thin film according to any one of claims 1 to 6.
- 請求項7に記載の積層薄膜の形成方法で形成された積層薄膜を含むことを特徴とする電子デバイス。 An electronic device comprising a laminated thin film formed by the method for forming a laminated thin film according to claim 7.
- 請求項1~6のいずれか1項に記載の薄膜の形成方法で形成された薄膜を含むことを特徴とする有機エレクトロルミネッセンス素子。 An organic electroluminescence device comprising a thin film formed by the method for forming a thin film according to any one of claims 1 to 6.
- 請求項7に記載の積層薄膜の形成方法で形成された積層薄膜を含むことを特徴とする有機エレクトロルミネッセンス素子。 An organic electroluminescence device comprising a laminated thin film formed by the method for forming a laminated thin film according to claim 7.
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