WO2010109825A1 - Actionneur, dispositif d'entraînement, unité de lentille et dispositif de capture d'image - Google Patents

Actionneur, dispositif d'entraînement, unité de lentille et dispositif de capture d'image Download PDF

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Publication number
WO2010109825A1
WO2010109825A1 PCT/JP2010/001943 JP2010001943W WO2010109825A1 WO 2010109825 A1 WO2010109825 A1 WO 2010109825A1 JP 2010001943 W JP2010001943 W JP 2010001943W WO 2010109825 A1 WO2010109825 A1 WO 2010109825A1
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WO
WIPO (PCT)
Prior art keywords
moving
actuator
electromechanical
conversion unit
electromechanical conversion
Prior art date
Application number
PCT/JP2010/001943
Other languages
English (en)
Japanese (ja)
Inventor
美彦 鈴木
正章 田辺
Original Assignee
株式会社ニコン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ニコン filed Critical 株式会社ニコン
Priority to JP2011505857A priority Critical patent/JPWO2010109825A1/ja
Publication of WO2010109825A1 publication Critical patent/WO2010109825A1/fr
Priority to US13/240,268 priority patent/US20120026613A1/en

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H02N2/0025—Driving devices, e.g. vibrators using only longitudinal or radial modes using combined longitudinal modes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • G02B7/102—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens controlled by a microcomputer

Definitions

  • the present invention relates to an actuator, a driving device, a lens unit, and an imaging device.
  • the displacement amount of the moving element is the same as the expansion / contraction amount of the piezoelectric element, and when the displacement amount of the moving element is increased, it is necessary to increase the expansion / contraction amount of the piezoelectric element. Therefore, in view of the circumstances, it is an object to provide an actuator capable of efficiently increasing the displacement amount of the moving element.
  • an actuator for moving a moving element comprising: a driving element disposed in contact with the moving element; and the moving element in the driving element.
  • the contact portion is displaced in the moving direction of the moving element and in the opposite direction to the moving direction so that the moving speed in the opposite direction is faster than the moving speed in the moving direction, and the moving element is moved in the moving direction.
  • an actuator comprising: a drive unit to be moved; and a displacement magnifying unit that links the drive unit and the drive element to expand displacement of the drive unit and transmits the displacement to the drive element.
  • FIG. 1 is an exploded perspective view showing a motor 10.
  • FIG. 1 is a side sectional view showing a motor 10.
  • FIG. 4 is a sectional view taken along line 4-4 of FIG. 2 is a perspective view showing an actuator 100.
  • FIG. 6 is a graph showing a drive voltage waveform of a first electromechanical converter 161 and a drive voltage waveform of a second electromechanical converter 162.
  • 5 is a side view showing the operation of the stator 150. It is a side view which shows the actuator 200 which concerns on other embodiment. It is a side view which shows the actuator 600 which concerns on other embodiment. It is a side view which shows the actuator 700 which concerns on other embodiment.
  • FIG. 1 is a side sectional view showing a schematic configuration of an imaging apparatus 1000 including a motor 10.
  • 3 is a perspective view showing the inside of a lens unit 300 including an actuator 100.
  • FIG. 1 is a perspective view showing a motor 10 including an actuator 100 according to an embodiment.
  • the drive output side in the axial direction of the rotating shaft 110 is referred to as an output side, and the opposite side is referred to as a non-output side.
  • the case where the motor 10 is viewed from the axial direction of the rotating shaft 110 (sometimes simply referred to as the rotating shaft direction) will be described as a plan view, and the case where the motor 10 is viewed from the radial direction of the rotating shaft 110 will be described as a side view.
  • the motor 10 includes a rotating shaft 110, a nut 210 arranged in order from the output side along the rotating shaft 110, a mounting plate 120, a biasing member 130, a washer 230, a rotor 140, and three actuators. 100, a base 190 and a nut 220.
  • the mounting plate 120 is formed in a disk shape, and the rotating shaft 110 is inserted through the axis. Further, the mounting plate 120 is formed with a pair of U-shaped fastening holes 122 symmetrically with respect to the axis, and the mounting plate 120 is fastened by a fastener such as a screw inserted through the fastening hole 122. And fastened to a device that uses the motor 10 as a drive source.
  • the rotor 140 is formed in a disk shape, and the rotating shaft 110 is inserted through the shaft center.
  • a gear portion 144 is formed at the output side end of the rotor 140.
  • An example of the urging member 130 is a compression coil spring shown in the figure, and the rotating shaft 110 is inserted therethrough.
  • the actuator 100 includes a stator 150, an electromechanical converter 160, a pair of flexible printed wiring boards 170 and 172, and a base 180.
  • the base 180 is a rectangular plate-like member and is screwed to the base 190.
  • the electromechanical conversion unit 160 includes a first electromechanical conversion unit 161 and a second electromechanical conversion unit 162.
  • the first electromechanical conversion unit 161 and the second electromechanical conversion unit 162 are stacked piezoelectric elements in which piezoelectric elements are stacked in the rotation axis direction, and expand and contract in the stacking direction when a drive voltage is supplied.
  • the electromechanical conversion unit 160 includes a first electromechanical conversion unit 161 and a second electromechanical conversion unit 162 that are separate from each other.
  • the first electromechanical conversion unit 161 and the second electromechanical conversion unit 162 are integrated with each other by forming a pair of expansion and contraction portions that expand and contract in the stacking direction when a voltage is applied to one stacked piezoelectric element.
  • the resulting electromechanical conversion unit 160 may be formed.
  • first electromechanical converter 161 and the second electromechanical converter 162 are arranged side by side in the longitudinal direction of the base 180.
  • the pair of flexible printed wiring boards 170 and 172 are arranged side by side in the longitudinal direction of the base 180, and the flexible printed wiring board 170 is sandwiched between the base 180 and the first electromechanical converter 161, The plate 172 is sandwiched between the base 180 and the second electromechanical converter 162.
  • the stator 150 is formed of an elastic material such as SUS, alumina, silicon carbide, brass, or ceramic, and protrudes toward the rotor 140 at the rectangular plate-like base portion 152 and the longitudinal center portion of the base portion 152. And a protruding portion 154.
  • One end of the base portion 152 in the longitudinal direction is joined to the upper end surface of the first electromechanical converter 161, and the other end of the base portion 152 in the longitudinal direction is joined to the upper end surface of the second electromechanical converter 162.
  • the tip of the protrusion 154 is covered with diamond coating, ceramic coating, or the like, so that the wear resistance is improved.
  • the protrusion 154 is preferably formed of a functionally gradient material.
  • the flexible printed wiring board 170 supplies a so-called sawtooth drive voltage to the first electromechanical converter 161 to expand and contract the first electromechanical converter 161 in the rotation axis direction.
  • the flexible printed wiring board 172 supplies a so-called comb-shaped drive voltage to the second electromechanical conversion unit 162 to expand and contract the second electromechanical conversion unit 162 in the rotation axis direction.
  • a positive drive voltage is applied to the first electromechanical converter 161 and the second electromechanical converter 162.
  • a negative drive voltage may be applied, or a positive and negative AC voltage may be applied. May be.
  • FIG. 2 is an exploded perspective view showing the motor 10.
  • screw portions 112 into which nuts 210 and 220 are screwed are formed at both ends in the axial direction of the rotating shaft 110, and a disk-shaped flange portion 114 having an enlarged diameter is formed between them. It is formed.
  • the nut 210, the mounting plate 120, the biasing member 130, the washer 230, and the rotor 140 are arranged on the output side with respect to the flange portion 114, while the base 190 and the nut 220 are on the non-output side with respect to the flange portion 114.
  • the three actuators 100 are arranged between the rotor 140 and the base 190 so as to surround the rotating shaft 110.
  • the rotor 140 is rotatably supported by the rotating shaft 110 via the bearing 142.
  • FIG. 3 is a side sectional view showing the motor 10.
  • the mounting plate 120, the biasing member 130, the washer 230, the rotor 140, the actuator 100, and the base 190 are fastened in the direction of the rotation axis by nuts 210 and 220.
  • the urging member 130 is elastically contracted in the rotation axis direction, and the rotor 140 is pressed against the actuator 100 via the washer 230.
  • the direction in which the rotor 140, the stator 150, and the electromechanical converter 160 are arranged is orthogonal to the rotational direction of the rotor 140 and the moving direction of the contact portion between the protrusion 154 and the rotor 140 described later.
  • FIG. 4 is a cross-sectional view taken along line 4-4 of FIG.
  • the three actuators 100 are arranged around the rotation axis 110 while being shifted by 2 ⁇ / 3, and the space surrounded by these is a triangle in plan view.
  • the three protrusions 154 are arranged around the rotation axis 110 while being shifted by 2 ⁇ / 3.
  • FIG. 5 is a perspective view showing the actuator 100. As shown in this figure, in the actuator 100, a gap 163 is provided between the first electromechanical converter 161 and the second electromechanical converter 162, and the first electromechanical converter 161 and the second electric machine The converter 162 is separated from each other in a direction orthogonal to the expansion / contraction direction (that is, the arrangement direction).
  • a rectangular groove 153 that bisects the base portion 152 in the longitudinal direction is formed at the longitudinal center of the base portion 152 of the stator 150.
  • the groove 153 extends over the entire width direction of the base portion 152 and is formed so as to overlap with the gap 163 between the first electromechanical converter 161 and the second electromechanical converter 162 in the rotation axis direction.
  • the whole longitudinal direction one end side (it may only be called the base part 1521) of the base part 152 is joined to the whole end surface of the 1st electromechanical conversion part 161, and the longitudinal direction other end side of the base part 152
  • the whole (which may be simply referred to as a base portion 1522) is joined to the entire end surface of the second electromechanical transducer 162.
  • the groove 153 extends through the base portion 152 to the base end portion of the protruding portion 154 in the depth direction.
  • a pair of leg portions 156 and 157 that are divided into two in the longitudinal direction of the base portion 152 by the groove 153 are formed at the base end portion of the projection portion 154.
  • the leg portion 156 extends from the end of the base portion 1521 on the groove 153 side to the rotor 140 side.
  • the leg portion 157 extends from the end portion of the base portion 1522 on the groove 153 side toward the rotor 140 side.
  • the protruding portion 154 is supported on the base portion 152 by a U-shaped base end portion including a pair of leg portions 156 and 157.
  • a wave shaper 175 is connected to the flexible printed wiring boards 170 and 172 via drivers 171 and 173, respectively.
  • the driver 171 applies the drive voltage whose waveform has been shaped by the waveform shaper 175 to the first electromechanical converter 161.
  • the driver 173 applies the drive voltage whose waveform is shaped by the waveform shaper 175 to the second electromechanical converter 162.
  • the graph of FIG. 6 shows the drive voltage waveform of the first electromechanical converter 161 and the drive voltage waveform of the second electromechanical converter 162.
  • the upper graph shows the waveform of the drive voltage applied to the first electromechanical converter 161.
  • the lower graph shows the waveform of the drive voltage applied to the second electromechanical converter 162.
  • the drive voltage applied to the first electromechanical converter 161 is increased from 0 V to V1 from time 0 to time T1. Further, as shown in the lower graph, the drive voltage applied to the second electromechanical converter 162 is decreased from V1 to 0V from time 0 to time T1.
  • the extension amount of the first electromechanical conversion unit 161 becomes 0 and the extension amount of the second electromechanical conversion unit 162 becomes the maximum, so that the protrusion 154 is located on the first electromechanical conversion unit 161 side. Take a tilted posture.
  • the extension amount of the first electromechanical conversion unit 161 is maximized, and the extension amount of the second electromechanical conversion unit 162 is zero.
  • the protrusion 154 is moved from the posture inclined toward the first electromechanical conversion unit 161 to the second by the action of the first electromechanical conversion unit 161 and the second electromechanical conversion unit 162. It swings to the electromechanical converter 162 side and takes a posture inclined to the second electromechanical converter 162 side.
  • the drive voltage applied to the first electromechanical converter 161 is decreased from V1 to 0V from time T1 to time T2.
  • the driving voltage applied to the second electromechanical converter 162 is increased from 0 V to V1 from time T1 to time T2.
  • the protrusion 154 is inclined to the second electromechanical converter 162 side.
  • the extension amount of the first electromechanical conversion unit 161 becomes zero, and the extension amount of the second electromechanical conversion unit 162 becomes the maximum, so that the protrusion 154 is connected to the first electromechanical conversion unit 161.
  • the protrusion 154 is moved from the posture inclined toward the second electromechanical conversion unit 162 to the first by the action of the first electromechanical conversion unit 161 and the second electromechanical conversion unit 162. It swings toward the electromechanical converter 161 and takes a posture inclined toward the first electromechanical converter 161.
  • the gradient of the drive voltage applied to the first electromechanical converter 161 and the second electromechanical converter 162 from time T1 to time T2 (that is, the amount of change in voltage per unit time) is from time 0 to time T1. Is greater than the gradient of the drive voltage applied to the first electromechanical converter 161 and the second electromechanical converter 162. For this reason, the protrusion 154 swings at a higher speed between time T1 and time T2 than between time 0 and time T1.
  • the resultant force of the frictional force generated between the tip of the protrusion 154 and the rotor 140 and the force with which the tip of the protrusion 154 pushes the rotor 140 is It is set to be smaller than the inertia force. For this reason, since slip occurs between the tip of the protrusion 154 and the rotor 140, the tip of the protrusion 154 swings from the second electromechanical converter 162 side to the first electromechanical converter 161 side. While moving, the rotor 140 continues to rotate in the same direction.
  • the driving voltage is applied to the first electromechanical conversion unit 161 and the second electromechanical conversion unit 162 as from time 0 to time T1, and from time T3 to time T4, The driving voltage is applied to the first electromechanical converter 161 and the second electromechanical converter 162 in the same manner as from time T2 to time T2.
  • the drive voltage is applied to the first electromechanical converter 161 and the second electromechanical converter 162 in the same manner as from time 0 to time T4. That is, a sawtooth waveform driving voltage is repeatedly applied to the first electromechanical converter 161 and the second electromechanical converter 162.
  • the frictional force generated between the tip portion of the protrusion 154 and the rotor 140 is based on the resultant force of the inertia force of the rotor 140 and the force by which the tip portion of the protrusion 154 pushes the rotor 140. Is also getting bigger. For this reason, from time T2 to time T3, the tip of the protrusion 154 and the rotor 140 move together from the first electromechanical converter 161 side to the second electromechanical converter 162 side.
  • the resultant force of the frictional force generated between the tip of the protrusion 154 and the rotor 140 and the force with which the tip of the protrusion 154 pushes the rotor 140 is smaller than the inertial force of the rotor 140. It is set to be. For this reason, since slip occurs between the tip of the protrusion 154 and the rotor 140, the tip of the protrusion 154 swings from the second electromechanical converter 162 side to the first electromechanical converter 161 side. While moving, the rotor 140 continues to rotate in the same direction. After time T4, the rotor 140 continues to rotate by repeating the operation from time T2 to time T4.
  • a driving voltage having a waveform shown in the lower graph is applied to the first electromechanical converter 161, and a waveform shown in the upper graph is applied to the second electromechanical converter 162.
  • the drive voltage may be applied.
  • the electromechanical conversion unit 160 causes the protrusion 154 as a driver disposed between the electromechanical conversion unit 160 and the rotor 140 to be in the direction opposite to the rotation direction of the rotor 140 and the rotation direction. Moved back and forth.
  • the speed at which the electromechanical conversion unit 160 extends and the speed at which the electromechanical conversion unit 160 contracts are made different so that the movement speed of the protrusion 154 in the reverse direction is higher than the movement speed of the protrusion 154 in the rotation direction. As a result, the rotor 140 can continue to rotate.
  • the expansion / contraction direction of the electromechanical conversion unit 160 is set to a direction orthogonal to the rotation direction of the rotor 140 as a mover, and the protrusions 154 and the rotor 140 that protrude from the electromechanical conversion unit 160 side to the rotor 140 side Is moved in the rotation direction of the rotor 140.
  • the electromechanical converter 160 can be accommodated between the rotor 140 and the base 190.
  • the end on the stator 150 side in the expansion / contraction direction of the electromechanical conversion unit 160 can be fixed to the base 190. That is, the electromechanical conversion unit 160 and the stator 150 as a driving element can be accommodated in the space of the motor 10, and the electromechanical conversion unit 160 can be supported with a simple structure.
  • the actuator 100 is structurally suitable as a drive source for the rotary motor 10. Although details will be described later, the actuator 100 is also suitable as a drive source for a linear drive motor. Therefore, it is possible to provide an actuator with less restrictions on the moving direction of the moving element, that is, a wider degree of freedom in selecting an application.
  • FIG. 7 is a side view showing the operation of the stator 150.
  • a base portion 1521 on one end side in the longitudinal direction of the base portion 152 and a base portion 1522 on the other end side in the longitudinal direction of the base portion 152 are separated by a groove 153.
  • the base portion 1521 and the base portion 1522 can be independently displaced in the rotation axis direction, and the relative positions in the rotation axis direction can be made different.
  • the base portion 1521 can be displaced toward the rotor 140, while the base portion 1522 can be displaced toward the electromechanical conversion portion 160.
  • the leg portion 156 integrated with the base portion 1521 is displaced toward the rotor 140, while the leg portion 157 integrated with the base portion 1522 is displaced toward the electromechanical conversion portion 160.
  • the protrusion 154 tilts toward the second electromechanical converter 162 with the midpoint between the leg 156 and the leg 157 as a fulcrum, and swings in the direction of arrow A in the figure.
  • the leg portion 157 is displaced toward the rotor 140 while the leg portion is displaced.
  • 156 is displaced to the second electromechanical converter 162 side.
  • the protrusion 154 tilts toward the first electromechanical converter 161 with the midpoint as a fulcrum and swings in the direction of arrow B in the figure.
  • the distance from the fulcrum to the tip of the protrusion 154 is longer than the distance from the legs 156 and 157 to the fulcrum.
  • the amount of displacement of the protrusion 154 in the direction along the rotation direction is geometrically larger than the amount of expansion and contraction of the first electromechanical converter 161 and the second electromechanical converter 162.
  • the electromechanical converter 160 when the first electromechanical converter 161 is expanded, the second electromechanical converter 162 contracts, and when the first electromechanical converter 161 contracts, 2 The electromechanical converter 162 extends. Thereby, the height difference between the base portion 1521 fixed to the first electromechanical conversion portion 161 and the base portion 1522 fixed to the second electromechanical conversion portion 162 can be enlarged.
  • the protrusion 154 elastically deforms with the leg portions 156 and 157 as fulcrums. Therefore, the relative displacement amount in the direction along the rotation direction of the protrusion 154 with respect to the expansion / contraction amount of the first electromechanical conversion unit 161 and the second electromechanical conversion unit 162 can be efficiently increased, and the output of the actuator 100 can be increased. Can be expanded efficiently.
  • a pair of legs 156 and 157 branched in the rotation direction of the rotor 140 by the groove 153 is provided at the base end of the protrusion 154, and one leg 156 is formed by the first electromechanical converter 161. While supporting, the other leg part 157 was supported by the second electromechanical converter 162. Thereby, a displacement amount equal to the amount of expansion and contraction of the first electromechanical conversion unit 161 is given to the leg portion 156 constituting one side in the rotation direction at the proximal end portion of the projecting portion 154, and the proximal end of the projecting portion 154 is provided.
  • the amount of displacement equal to the amount of expansion / contraction of the second electromechanical converter 162 can be applied to the leg 157 constituting the other side in the rotational direction of the part. Therefore, the relative displacement amount in the direction along the rotation direction of the projection 154 with respect to the expansion / contraction amount of the first electromechanical conversion unit 161 and the second electromechanical conversion unit 162 can be increased more efficiently, and the actuator 100 The output can be expanded even more efficiently.
  • the protrusion 154 is supported by the end of the first electromechanical converter 161 on the second electromechanical converter 162 side and the end of the second electromechanical converter 162 on the first electromechanical converter 161 side. Has been. Therefore, the relative displacement amount in the direction along the rotation direction of the protrusion 154 with respect to the expansion / contraction amount of the first electromechanical conversion unit 161 and the second electromechanical conversion unit 162 can be further efficiently increased. The output of the actuator 100 can be expanded more efficiently.
  • the actuator 100 can be driven at a frequency different from the resonance frequency of the entire motor 10 system.
  • the positive drive voltage applied to the other is reduced.
  • the one side is extended and the other side is returned to the natural length.
  • FIG. 8 is a side view showing an actuator 200 according to another embodiment.
  • the actuator 200 includes a base 280 disposed opposite to the rotor 140 in the rotation axis direction, a protrusion 254 erected on the base 280, and an electromechanical converter supported by the base 280. 260.
  • the lower end of the protrusion 254 is formed in a hemispherical shape, and the base 280 is formed with a bowl-shaped shaft support 285 into which the lower end of the protrusion 254 is inserted.
  • the radius of curvature of the shaft support portion 285 is larger than the radius of curvature of the lower end portion of the protrusion 254.
  • the electromechanical conversion unit 260 includes a first electromechanical conversion unit 261 and a second electromechanical conversion unit 262 arranged in the rotation direction of the rotor 140.
  • the first electromechanical converter 261 is disposed on the upstream side in the rotational direction from the protrusion 254, and the second electromechanical converter 262 is disposed on the downstream side in the rotational direction from the protrusion 254.
  • the first electromechanical converter 261 and the second electromechanical converter 262 are supported by support walls 281 and 282 erected on the base 280.
  • the first electromechanical converter 261 is disposed between the support wall 281 and the protrusion 254, and one end side of the first electromechanical converter 261 is fixed to the support wall 281, and the first electromechanical converter 261.
  • a base 271 is fixed to the other end of the base plate.
  • a hemispherical convex portion 273 is formed on the surface of the base 271 on the protruding portion 254 side. The convex portion 273 is in contact with the lower end side of the protruding portion 254.
  • the first electromechanical conversion unit 261 expands and contracts in a direction along a tangent to the rotation direction of the rotor 140.
  • the second electromechanical converter 262 is disposed between the support wall 282 and the protrusion 254, and one end side of the second electromechanical converter 262 is fixed to the support wall 282, and the second electromechanical converter 262.
  • a base 272 is fixed to the other end of the base plate.
  • a hemispherical convex portion 275 is formed on the surface of the base 272 on the protruding portion 254 side. The convex portion 275 is in contact with the lower end side of the protruding portion 254. Further, the second electromechanical conversion unit 262 expands and contracts in a direction along a tangent to the rotation direction of the rotor 140.
  • the relative positions of the first electromechanical conversion unit 261 and the second electromechanical conversion unit 262 in the rotation axis direction are different.
  • the first electromechanical conversion unit 261 and the second electromechanical conversion unit 262 are extended in the same phase, thereby connecting the projection 254 to the projection 273 and the projection 275. It can be swung in the direction of arrow A in the figure with the midpoint P as a fulcrum.
  • the protrusion 254 can be swung in the direction of arrow B in the figure with the midpoint P as a fulcrum.
  • the first electromechanical conversion unit 261 and the second electromechanical conversion unit 262 are contracted at the same phase, and the first electromechanical conversion unit 261 and the second electromechanical conversion unit 262 are operated at the same phase. Set faster than the decompression speed. Thereby, the rotor 140 can be continuously rotated from the first electromechanical conversion unit 261 side to the second electromechanical conversion unit 262 side.
  • the distance from the fulcrum P in the protrusion 254 to the tip end in contact with the rotor 140 is longer than the distance between the fulcrum P in the protrusion 254 and the load application point. For this reason, the amount of displacement of the protrusion 254 in the direction along the rotational direction is geometrically larger than the amount of expansion / contraction of the first electromechanical converter 261 and the second electromechanical converter 262.
  • FIG. 9 is a side view showing an actuator 600 according to another embodiment.
  • the actuator 600 includes a base 680 disposed facing the rotor 140 in the rotational axis direction, a protrusion 254 erected on the base 680, and an electromechanical converter supported by the base 680. 660.
  • the lower end portion of the protruding portion 254 is formed in a hemispherical shape, and the base 680 is formed with a concave shaft support portion 685 into which the lower end portion of the protruding portion 254 is inserted.
  • the width of the shaft support portion 285 is larger than the width of the lower end portion of the protrusion 254.
  • the electromechanical conversion unit 260 includes a first electromechanical conversion unit 661 and a second electromechanical conversion unit 662 arranged in the rotation axis direction.
  • the first electromechanical conversion unit 661 and the second electromechanical conversion unit 662 are arranged on the downstream side in the rotation direction from the protrusion 254.
  • the first electromechanical conversion unit 661 and the second electromechanical conversion unit 662 are supported by a support wall 681 erected on the base 680.
  • the first electromechanical conversion unit 661 and the second electromechanical conversion unit 662 are disposed between the support wall 681 and the protrusion 254, and are one ends of the first electromechanical conversion unit 661 and the second electromechanical conversion unit 662.
  • the side is fixed to the support wall 681, and the bases 271 and 272 are fixed to the other end side.
  • a hemispherical convex portion 273 is formed on the surface of the bases 271 and 272 on the protruding portion 254 side.
  • the convex portion 273 is in contact with the lower end side of the protruding portion 254.
  • the first electromechanical conversion unit 661 and the second electromechanical conversion unit 662 expand and contract in a direction along a tangent to the rotation direction of the rotor 140.
  • a shaft support wall 682 is erected on the upstream side of the protrusion 254 in the base 680 in the rotation direction.
  • the shaft support wall 682 faces the support wall 681 with the protrusion 254 interposed therebetween, and supports the protrusion 254 tilted upstream in the rotation direction.
  • the interval between the shaft support wall 682 and the protrusion 254 is set so that the tilt angle of the protrusion 254 in the rotation direction indicated by the broken line in the drawing is equal to the tilt angle of the protrusion 254 in the counter-rotation direction. Has been.
  • both the first electromechanical conversion unit 261 and the second electromechanical conversion unit 262 are located on the downstream side in the rotation direction from the protrusion 254. Further, the first electromechanical conversion unit 261 is arranged closer to the rotor 140 than the second electromechanical conversion unit 262. For this reason, as shown by a broken line in the figure, the first electromechanical conversion unit 261 is contracted and the second electromechanical conversion unit 262 is extended to connect the protrusion 254 to the pair of upper and lower convex portions 273. It can be swung in the direction of arrow A in the figure with the point P as a fulcrum. Further, by extending the first electromechanical conversion unit 261 and contracting the second electromechanical conversion unit 262, the protrusion 254 can be swung in the arrow B direction in the figure with the midpoint P as a fulcrum. it can.
  • the speed at which the first electromechanical converter 261 is expanded and the second electromechanical converter 262 is contracted, and the speed at which the first electromechanical converter 261 is contracted and the second electromechanical converter is used. Set faster than the speed at which 262 is extended. Thereby, the rotor 140 can be continuously rotated from the first electromechanical conversion unit 661 side to the second electromechanical conversion unit 662 side.
  • the distance from the fulcrum P in the protrusion 254 to the tip end in contact with the rotor 140 is longer than the distance between the fulcrum P in the protrusion 254 and the load application point.
  • the amount of displacement in the direction along the rotation direction of the protrusion 254 is geometrically larger than the amount of expansion / contraction of the first electromechanical conversion unit 661 and the second electromechanical conversion unit 662.
  • FIG. 10 is a side view showing an actuator 700 according to another embodiment.
  • the actuator 700 includes a base 780 disposed opposite to the rotor 140 in the rotation axis direction, a column 790 supported by the base 780, an electromechanical converter 760, an elastic member 770, a column A base 752 rotatably supported at the upper end of the body 790 and a protrusion 754 standing on the base 752 are provided.
  • the electromechanical conversion unit 760, the column 790, and the elastic member 770 are arranged along the rotation direction in the order of description.
  • the lower end and the upper end of the electromechanical conversion unit 760 are fixed to the base 780 and the base 752, respectively.
  • the lower end of the column 790 is fixed to the base 780, and the central portion in the rotation direction of the base 752 is rotatably connected to the upper end of the column 790.
  • the base 752 is supported by the upper end of the columnar body 790 so as to be rotatable around an axis along the rotational radial direction with the central portion in the rotational direction as a fulcrum.
  • the elastic member 770 is a compression coil spring, the lower end thereof is fixed to the base 780, and the upper end thereof is fixed to the base 752.
  • the protruding portion 754 is disposed on an extension line of the axis of the elastic member 770, and the tip portion is in contact with the rotor 140.
  • the electromechanical conversion unit 760 is extended to displace the upstream side in the rotational direction of the base 752 toward the rotor 140 side, and the downstream side in the rotational direction of the base 752 to the biasing force of the elastic member 770. Accordingly, it can be displaced to the side away from the rotor 140. Thereby, the projection part 754 can be swung to the downstream side in the rotation direction.
  • the upstream side in the rotational direction of the base 752 is displaced to the side away from the rotor 140, and the downstream side in the rotational direction of the base 752 is applied using the biasing force of the elastic member 770. It can be displaced toward the rotor 140 side. Thereby, the projection part 254 can be swung to the upstream side in the rotation direction.
  • the speed at which the electromechanical converter 760 is contracted is set to be higher than the speed at which the electromechanical converter 760 is extended. Thereby, the rotor 140 can be continuously rotated in one direction.
  • the distance from the fulcrum in the protrusion 754 to the tip that contacts the rotor 140 is longer than the distance from the fulcrum in the protrusion 754 to the rotation center P of the base 752. For this reason, the amount of displacement of the protrusion 254 in the direction along the rotation direction is geometrically larger than the amount of expansion / contraction of the electromechanical converter 760.
  • FIG. 11 is a side view showing an actuator 800 according to another embodiment.
  • the actuator 800 includes a base 880 disposed opposite to the rotor 140 in the rotational axis direction, a box 890 supported by the base 880, an electromechanical converter 860, and an upper end of the box 890. And a base 852 fixed to the upper end of the electromechanical converter 860 and a protrusion 854 erected on the base 852.
  • the electromechanical converter 860 and the box 890 are arranged in the order of description along the rotation direction.
  • the lower end of the electromechanical converter 860 is fixed to the base 880, and the upper end is fixed to the upstream side in the rotation direction of the base 852.
  • the lower end of the box body 890 is fixed to the base 880, and the upper end of the box body 890 is fixed to the downstream side in the rotation direction of the base 852.
  • the projecting portion 854 is disposed on an extension line of the axis of the electromechanical conversion portion 860, and the tip portion is brought into contact with the rotor 140.
  • the region upstream of the fixed region in the base 852 is the fulcrum P at the dragon side end in the rotational direction of the fixed region. It can be elastically deformed as a fulcrum.
  • the electromechanical converter 860 by extending the electromechanical converter 860, the upstream side in the rotation direction of the base 852 can be displaced toward the rotor 140 with the fulcrum P as a fulcrum. Thereby, the projection part 854 can be swung to the downstream side in the rotation direction.
  • the upstream side in the rotation direction of the base 852 can be displaced to the side away from the rotor 140 with the fulcrum P as a fulcrum.
  • the projection part 854 can be swung to the upstream side in the rotation direction.
  • the speed at which the electromechanical conversion unit 860 is contracted is set to be faster than the speed at which the electromechanical conversion unit 860 is expanded. Thereby, the rotor 140 can be continuously rotated in one direction.
  • the distance from the fulcrum in the protrusion 854 to the tip that contacts the rotor 140 is longer than the distance from the fulcrum in the protrusion 854 to the fulcrum P fixed to the box 890 in the base 752. ing. For this reason, the amount of displacement of the protrusion 854 in the direction along the rotational direction is geometrically larger than the amount of expansion / contraction of the electromechanical converter 860.
  • FIG. 12 is a side view showing an actuator 900 according to another embodiment.
  • the actuator 900 is a DC motor, and includes a drive unit 902, a rotating shaft 904, a rotor 906, and a driver 908.
  • the driving unit 902 rotates the rotating shaft 904.
  • the rotor 906 is a disk fixed to the rotation shaft 904, and the rotation shaft 904 is inserted through the axis of the rotor 906.
  • the driver 908 is provided on the rotor 906.
  • the driver 908 is a protrusion that protrudes from the rotor 906 toward the rotor 140 and contacts the rotor 140, and extends from the center of rotation in the outer diameter direction.
  • the rotational speed of the rotating shaft 904 in the clockwise arrow B direction in the figure is set to be faster than the rotational speed of the rotating shaft 904 in the arrow A direction in the figure.
  • the rotor 140 can be rotated in one direction.
  • the driving element 908 that contacts the rotor 140 extends from the center of rotation on the rotor 906 in the outer diameter direction, and a point of action where a load acts on the rotor 140 from the driving element 908.
  • the turning radius is larger than the turning radius of the rotating shaft 904.
  • the displacement amount of the driver 908 in the rotation direction is geometrically larger than the displacement amount of the rotation shaft 904 in the rotation direction.
  • FIG. 13 is a side sectional view showing a schematic configuration of the imaging apparatus 1000 including the motor 10.
  • the imaging apparatus 1000 includes an optical member 420, a lens barrel 430, a motor 10, an imaging unit 500, and a control unit 550.
  • the lens barrel 430 accommodates the optical member 420.
  • the motor 10 moves the optical member 420.
  • the imaging unit 500 captures an image formed by the optical member 420.
  • the control unit 550 controls the motor 10 and the imaging unit 500.
  • the imaging apparatus 1000 includes an optical member 420, a lens barrel 430, a lens unit 410 including the motor 10, and a body 460.
  • the lens unit 410 is detachably attached to the body 460 via the mount 450.
  • the optical member 420 includes a front lens 422, a compensator lens 424, a focusing lens 426, and a main lens 428, which are sequentially arranged from the incident end corresponding to the left side in the drawing.
  • An iris unit 440 is disposed between the focusing lens 426 and the main lens 428.
  • the motor 10 is arranged in the middle of the lens barrel 430 in the optical axis direction and below the focusing lens 426 having a relatively small diameter. Thereby, the motor 10 is accommodated in the lens barrel 430 without increasing the diameter of the lens barrel 430.
  • the motor 10 advances or retracts the focusing lens 426 in the optical axis direction via, for example, a gear train.
  • the body 460 accommodates optical members including a main mirror 540, a pentaprism 470, and an eyepiece system 490.
  • the main mirror 540 is located between a standby position inclined on the optical path of incident light incident through the lens unit 410 and an imaging position (indicated by a dotted line in the figure) that rises while avoiding incident light. Moving.
  • the main mirror 540 at the standby position guides most of the incident light to the pentaprism 470 disposed above. Since the pentaprism 470 emits a reflection of incident light toward the eyepiece system 490, the image on the focusing screen can be viewed as a normal image from the eyepiece system 490. The remainder of the incident light is guided to the photometric unit 480 by the pentaprism 470.
  • the photometric unit 480 measures the intensity and distribution of incident light.
  • a half mirror 492 is arranged between the pentaprism 470 and the eyepiece system 490 to superimpose the display image formed on the finder liquid crystal 494 on the image of the focusing screen.
  • the display image is displayed so as to overlap the image projected from the pentaprism 470.
  • the main mirror 540 has a sub mirror 542 on the back surface with respect to the incident light incident surface.
  • the sub mirror 542 guides part of the incident light transmitted through the main mirror 540 to the distance measuring unit 530 disposed below. Thereby, when the main mirror 540 is in the standby position, the distance measuring unit 530 measures the distance to the subject.
  • the sub mirror 542 is also retracted from the optical path of the incident light.
  • a shutter 520, an optical filter 510, and an imaging unit 500 are sequentially arranged behind the main mirror 540 with respect to incident light.
  • the main mirror 540 moves to the photographing position immediately before the shutter 520 is opened, so that incident light travels straight and enters the imaging unit 500.
  • an image formed by incident light is converted into an electric signal.
  • the imaging unit 500 captures an image formed by the lens unit 410.
  • the lens unit 410 and the body 460 are also electrically coupled. Therefore, for example, the autofocus mechanism can be formed by controlling the rotation of the motor 10 according to the information on the distance to the subject detected by the distance measuring unit 530 on the body 460 side. In addition, a focus aid mechanism can be formed by the distance measuring unit 530 referring to the operation amount of the motor 10. The motor 10 and the imaging unit 500 are controlled by the control unit 550 as described above.
  • the output torque of the motor 10 can be increased efficiently. Therefore, since the driving force of the autofocus mechanism can be increased efficiently, it is possible to save power and drive the autofocus mechanism with a high driving force.
  • the motor 10 contributes to automating exposure, execution of a scene mode, execution of bracket photography, and the like.
  • the motor 10 can be suitably used for driving a focusing mechanism, a zoom mechanism, a camera shake correction mechanism, and the like in an optical system such as a photographing machine and binoculars. Furthermore, it can be used for power sources such as precision stages, more specifically electron beam lithography equipment, various stages for inspection equipment, moving mechanisms for cell injectors for biotechnology, moving beds for nuclear magnetic resonance equipment, etc. Needless to say, it is not limited to.
  • FIG. 14 is a perspective view showing the inside of the lens unit 300 including the actuator 100.
  • the lens unit 300 can be attached to the body 460.
  • the lens unit 300 includes a focusing lens 426, a lens holding frame 302 that holds the focusing lens 426, and a pair of guide bars 304 that guide the movement of the lens holding frame 302 in the optical axis direction.
  • 306 is arranged.
  • a bearing portion 308 is provided on the left side of the lens holding frame 302, and a pair of front and rear bearing portions 310 and 312 are provided on the upper right portion of the lens holding frame 302.
  • the guide bar 304 is slidably inserted into the bearing portion 308, and the guide bar 306 is slidably inserted into the bearing portions 310 and 312.
  • the bearing portion 310 and the bearing portion 312 are connected by a stay 314 extending in the optical axis direction.
  • a rectangular plate-like moving body 316 whose longitudinal direction is the optical axis direction is suspended below the stay 314 so as to be displaceable in the vertical direction.
  • a leaf spring 318 is disposed between the lower portion of the stay 314 and the moving body 316. The leaf spring 318 biases the moving body 316 downward.
  • the actuator 100 is disposed below the moving body 316, and the moving body 316 is pressed against the protrusion 154 of the actuator 100 by a leaf spring 318.
  • the actuator 100 is arranged such that the first electromechanical conversion unit 161 and the second electromechanical conversion unit 162 are arranged in the optical axis direction. Therefore, when the actuator 100 is operated by the above-described method, a thrust force in the optical axis direction is applied from the protrusion 154 to the moving body 316, and the lens holding frame 302 and the focusing lens 426 are moved in the optical axis direction. Moved.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lens Barrels (AREA)

Abstract

L'invention porte sur un actionneur dans lequel la quantité de déplacement d'un élément mené est accrue de façon efficace. Un actionneur configuré pour déplacer un élément mené comprend : un élément menant installé de façon à être en contact avec l'élément mené ; une section d'entraînement pour déplacer la section de contact de l'élément menant, ladite section de contact étant en contact avec l'élément mené, dans le sens de mouvement de l'élément mené et dans le sens opposé au sens de mouvement de l'élément mené de telle manière que la vitesse de mouvement dans le sens opposé est supérieure à la vitesse de mouvement dans le sens du mouvement, pour ainsi déplacer l'élément mené dans le sens du mouvement ; et une section d'augmentation de déplacement pour amener la section d'entraînement et l'élément menant à être associés l'un à l'autre afin d'augmenter le déplacement de la section d'entraînement et de transmettre le déplacement accru à l'élément menant.
PCT/JP2010/001943 2009-03-24 2010-03-18 Actionneur, dispositif d'entraînement, unité de lentille et dispositif de capture d'image WO2010109825A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011505857A JPWO2010109825A1 (ja) 2009-03-24 2010-03-18 アクチュエータ、駆動装置、レンズユニット、及び撮像装置
US13/240,268 US20120026613A1 (en) 2009-03-24 2011-09-22 Actuator, drive device, lens unit, image-capturing device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-072779 2009-03-24
JP2009072779 2009-03-24

Related Child Applications (1)

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US13/240,268 Continuation US20120026613A1 (en) 2009-03-24 2011-09-22 Actuator, drive device, lens unit, image-capturing device

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WO2010109825A1 true WO2010109825A1 (fr) 2010-09-30

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JP2019122239A (ja) * 2017-12-28 2019-07-22 新思考電機有限公司 圧電式駆動装置、光学部材駆動装置、カメラ装置及び電子機器
US10707784B2 (en) 2017-12-28 2020-07-07 New Shicoh Motor Co., Ltd. Piezoelectric driving device, optical member driving device, camera device, and electronic apparatus

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US8690687B1 (en) * 2012-11-20 2014-04-08 National Cheng Kung University Magnetic coupling assembly with an actively air gap adjustable mechanism
US20140280367A1 (en) * 2013-03-14 2014-09-18 Sap Ag Silo-aware databases
DE102014205280B3 (de) * 2014-03-21 2015-06-11 Physik Instrumente (Pi) Gmbh & Co. Kg Trägheitsantrieb

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US6327120B1 (en) * 1997-04-17 2001-12-04 Fujitsu Limited Actuator using piezoelectric element and head-positioning mechanism using the actuator
JP2004191453A (ja) * 2002-12-09 2004-07-08 Sony Corp レンズ駆動装置および撮像装置
JP2005287167A (ja) * 2004-03-29 2005-10-13 Konica Minolta Opto Inc 駆動装置

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JPS6438350A (en) * 1987-07-31 1989-02-08 Shimadzu Corp Conveyer
JP2007185056A (ja) * 2006-01-10 2007-07-19 Sony Corp 弾性振動体の励振方法および振動型駆動装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019122239A (ja) * 2017-12-28 2019-07-22 新思考電機有限公司 圧電式駆動装置、光学部材駆動装置、カメラ装置及び電子機器
US10707784B2 (en) 2017-12-28 2020-07-07 New Shicoh Motor Co., Ltd. Piezoelectric driving device, optical member driving device, camera device, and electronic apparatus

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US20120026613A1 (en) 2012-02-02
JPWO2010109825A1 (ja) 2012-09-27

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