WO2010058907A3 - 태양전지용 실리콘기판, 그 제조장치, 방법 및 태양전지 - Google Patents

태양전지용 실리콘기판, 그 제조장치, 방법 및 태양전지 Download PDF

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Publication number
WO2010058907A3
WO2010058907A3 PCT/KR2009/005912 KR2009005912W WO2010058907A3 WO 2010058907 A3 WO2010058907 A3 WO 2010058907A3 KR 2009005912 W KR2009005912 W KR 2009005912W WO 2010058907 A3 WO2010058907 A3 WO 2010058907A3
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WO
WIPO (PCT)
Prior art keywords
solar battery
silicon substrate
manufacturing
curves
manufacturing apparatus
Prior art date
Application number
PCT/KR2009/005912
Other languages
English (en)
French (fr)
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WO2010058907A2 (ko
Inventor
박인순
최명화
Original Assignee
Park Rin Soon
Choi Myung Hwa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Park Rin Soon, Choi Myung Hwa filed Critical Park Rin Soon
Priority to CN2009801467013A priority Critical patent/CN102224600A/zh
Priority to AU2009318392A priority patent/AU2009318392B2/en
Priority to JP2011537348A priority patent/JP2012509587A/ja
Priority to EP09827672A priority patent/EP2360734A4/en
Priority to US13/130,756 priority patent/US20110226326A1/en
Publication of WO2010058907A2 publication Critical patent/WO2010058907A2/ko
Publication of WO2010058907A3 publication Critical patent/WO2010058907A3/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
    • H01L31/035281—Shape of the body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
    • B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
    • B23D61/185—Saw wires; Saw cables; Twisted saw strips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24628—Nonplanar uniform thickness material

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Silicon Compounds (AREA)

Abstract

본 발명의 태양전지용 실리콘기판(10)은 오목부(11)와 볼록부(12)로 구성된 태양광을 흡수하기 위한 다수의 곡면부(13)와, 다수의 곡면부(13)의 양측에 연결되고 태양광을 흡수함과 동시에 다른 실리콘기판들과 연결되는 평면부(14)를 포함하고, 곡면부(13) 및 평면부(14)의 두께는 100~ 300㎛이고, 오목부(11) 또는 볼록부(12)가 반원 모양을 가지며, 곡면부(13)는 전체 면적의 90% 이상을 차지한다.
PCT/KR2009/005912 2008-11-22 2009-10-14 태양전지용 실리콘기판, 그 제조장치, 방법 및 태양전지 WO2010058907A2 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN2009801467013A CN102224600A (zh) 2008-11-22 2009-10-14 用于太阳能电池的硅基板、其制造装置和方法以及太阳能电池
AU2009318392A AU2009318392B2 (en) 2008-11-22 2009-10-14 Silicon substrate for solar battery, manufacturing apparatus thereof, manufacturing method thereof, and solar battery
JP2011537348A JP2012509587A (ja) 2008-11-22 2009-10-14 太陽電池用シリコン基板、その製造装置、方法及び太陽電池
EP09827672A EP2360734A4 (en) 2008-11-22 2009-10-14 SILICON SUBSTRATE FOR A SOLAR BATTERY, MANUFACTURING APPARATUS, MANUFACTURING METHOD AND SOLAR BATTERY THEREFOR
US13/130,756 US20110226326A1 (en) 2008-11-22 2009-10-14 Silicon substrate for solar battery, manufacturing apparatus thereof, manufacturing method thereof, and solar battery

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080116536A KR100892108B1 (ko) 2008-11-22 2008-11-22 곡선형상의 태양전지용 실리콘웨이퍼 및 그 제조방법
KR10-2008-0116536 2008-11-22

Publications (2)

Publication Number Publication Date
WO2010058907A2 WO2010058907A2 (ko) 2010-05-27
WO2010058907A3 true WO2010058907A3 (ko) 2010-08-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/005912 WO2010058907A2 (ko) 2008-11-22 2009-10-14 태양전지용 실리콘기판, 그 제조장치, 방법 및 태양전지

Country Status (8)

Country Link
US (1) US20110226326A1 (ko)
EP (1) EP2360734A4 (ko)
JP (1) JP2012509587A (ko)
KR (1) KR100892108B1 (ko)
CN (1) CN102224600A (ko)
AU (1) AU2009318392B2 (ko)
TW (1) TW201021226A (ko)
WO (1) WO2010058907A2 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107263750B (zh) * 2017-08-07 2020-01-10 苏州赛万玉山智能科技有限公司 太阳能硅片的切割方法及三维结构太阳能硅片
KR101936811B1 (ko) * 2017-08-29 2019-01-10 주식회사 지엘테크 표면적과 흡수율이 향상된 태양전지용 웨이퍼 가공장치
KR101908885B1 (ko) * 2018-03-13 2018-10-16 장희철 3차원 곡률형상을 갖는 솔라 웨이퍼의 제조장치
KR101908886B1 (ko) * 2018-03-13 2018-10-16 장희철 3차원 곡률형상을 갖는 솔라 웨이퍼의 제조방법
CN110754696A (zh) 2018-07-23 2020-02-07 尤尔实验室有限公司 用于蒸发器装置的气流管理

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Publication number Priority date Publication date Assignee Title
US5043044A (en) * 1984-10-15 1991-08-27 Nec Corporation Monocrystalline silicon wafer
US5961944A (en) * 1996-10-14 1999-10-05 Kawasaki Steel Corporation Process and apparatus for manufacturing polycrystalline silicon, and process for manufacturing silicon wafer for solar cell
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JP2003286024A (ja) * 2002-03-27 2003-10-07 Mitsubishi Materials Corp 一方向凝固シリコンインゴット及びこの製造方法並びにシリコン板及び太陽電池用基板及びスパッタリング用ターゲット素材
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KR20060096544A (ko) * 2005-03-02 2006-09-13 주식회사 케이이씨 고효율 태양 전지 및 그 제조 방법

Also Published As

Publication number Publication date
AU2009318392B2 (en) 2013-10-03
KR100892108B1 (ko) 2009-04-08
US20110226326A1 (en) 2011-09-22
JP2012509587A (ja) 2012-04-19
CN102224600A (zh) 2011-10-19
WO2010058907A2 (ko) 2010-05-27
AU2009318392A1 (en) 2011-07-14
EP2360734A2 (en) 2011-08-24
TW201021226A (en) 2010-06-01
EP2360734A4 (en) 2012-06-20

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