WO2010008136A3 - 비파괴 박막센서가 내장된 결함 검출용 멀티프로브 - Google Patents

비파괴 박막센서가 내장된 결함 검출용 멀티프로브 Download PDF

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Publication number
WO2010008136A3
WO2010008136A3 PCT/KR2009/002459 KR2009002459W WO2010008136A3 WO 2010008136 A3 WO2010008136 A3 WO 2010008136A3 KR 2009002459 W KR2009002459 W KR 2009002459W WO 2010008136 A3 WO2010008136 A3 WO 2010008136A3
Authority
WO
WIPO (PCT)
Prior art keywords
defect
probe
detecting multi
film sensor
thin
Prior art date
Application number
PCT/KR2009/002459
Other languages
English (en)
French (fr)
Other versions
WO2010008136A2 (ko
Inventor
김종호
나용배
이재훈
신동문
Original Assignee
(주)노바마그네틱스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)노바마그네틱스 filed Critical (주)노바마그네틱스
Publication of WO2010008136A2 publication Critical patent/WO2010008136A2/ko
Publication of WO2010008136A3 publication Critical patent/WO2010008136A3/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06766—Input circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)

Abstract

본 발명인 비파괴 박막센서가 내장된 결함 검출용 멀티프로브는 피검체를 검사시 비파괴 박막센서가 하나인 단일프로브 대신에 다수 개의 단일프로브를 결합한 멀티프로브 내에 멀티프로브 모듈을 내장하여 검사시간의 단축과 검사효율을 높이고, 멀티프로브 내에 멀티 어레이 센서로 구성된 멀티프로브 모듈을 내장하여 피검체의 검사범위를 넓게 할 수 있으며, CoNiFe 삼원계 박막을 비파괴 박막센서로 사용함으로써, 고 자속밀도의 구현을 통해 여기코일에서 0.2mm 떨어진 금속의 극 미세 크랙의 검출이 가능하므로 분해능이 높아 피검체의 불량을 영상화시킬 수 있는 것이다.
PCT/KR2009/002459 2008-07-14 2009-05-11 비파괴 박막센서가 내장된 결함 검출용 멀티프로브 WO2010008136A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080067981A KR100954777B1 (ko) 2008-07-14 2008-07-14 비파괴 박막센서가 내장된 결함 검출용 멀티프로브
KR10-2008-0067981 2008-07-14

Publications (2)

Publication Number Publication Date
WO2010008136A2 WO2010008136A2 (ko) 2010-01-21
WO2010008136A3 true WO2010008136A3 (ko) 2010-03-11

Family

ID=41550794

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/002459 WO2010008136A2 (ko) 2008-07-14 2009-05-11 비파괴 박막센서가 내장된 결함 검출용 멀티프로브

Country Status (2)

Country Link
KR (1) KR100954777B1 (ko)
WO (1) WO2010008136A2 (ko)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000351091A (ja) * 1999-06-09 2000-12-19 Topy Ind Ltd 溶接ビードの検出方法とその装置
JP2002093620A (ja) * 2000-09-19 2002-03-29 Nec Corp 磁性薄膜とその製造方法及びそれを用いた磁気ヘッド並びに電解めっき装置
KR20050010433A (ko) * 2003-07-21 2005-01-27 충남대학교산학협력단 와이어로프의 비파괴검사장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000351091A (ja) * 1999-06-09 2000-12-19 Topy Ind Ltd 溶接ビードの検出方法とその装置
JP2002093620A (ja) * 2000-09-19 2002-03-29 Nec Corp 磁性薄膜とその製造方法及びそれを用いた磁気ヘッド並びに電解めっき装置
KR20050010433A (ko) * 2003-07-21 2005-01-27 충남대학교산학협력단 와이어로프의 비파괴검사장치

Also Published As

Publication number Publication date
KR100954777B1 (ko) 2010-04-28
KR20100007370A (ko) 2010-01-22
WO2010008136A2 (ko) 2010-01-21

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