KR20100007370A - 비파괴 박막센서가 내장된 결함 검출용 멀티프로브 - Google Patents
비파괴 박막센서가 내장된 결함 검출용 멀티프로브 Download PDFInfo
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- KR20100007370A KR20100007370A KR1020080067981A KR20080067981A KR20100007370A KR 20100007370 A KR20100007370 A KR 20100007370A KR 1020080067981 A KR1020080067981 A KR 1020080067981A KR 20080067981 A KR20080067981 A KR 20080067981A KR 20100007370 A KR20100007370 A KR 20100007370A
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- probe
- thin film
- sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06766—Input circuits therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
Abstract
Description
Claims (4)
- 비파괴 박막센서가 내장된 결함 검출용 멀티프로브에 있어서,피검체의 결함을 검출하기 위해 멀티어레이 센서가 프로브 모듈의 바닥에 부착된 몸체와;상기 몸체의 연결되어 피검체의 결함을 검출하기 위해 움직이기 쉽게 하는 프로브 손잡이와;상기 프로브 손잡이의 하부면에 형성되어 측정 장비와 프로브를 선으로 연결할 수 있게 하는 단자 접속부; 를 포함함을 특징으로 하는 비파괴 박막센서가 내장된 결함 검출용 멀티프로브.
- 제 1항에 있어서,상기 멀티어레이 센서는 전기도금방법으로 중앙부에 수직방향으로 길게 형성된 CoNiFe 삼원계 박막과; 상기 CoNiFe 삼원계 박막 주위 둘러싸게 형성된 박막형 코일과; 상기 박막형 코일 하단부에 형성된 복수 개의 신호선 단자; 를 포함함을 특징으로 하는 비파괴 박막센서가 내장된 결함 검출용 멀티프로브.
- 제 1항에 있어서,상기 멀티어레이 센서는 24개의 센서로 구성되는 것을 포함함을 특징으로 하는 비파괴 박막센서가 내장된 결함 검출용 멀티프로브.
- 제 1항에 있어서,상기 프로브 모듈의 바닥에 장착된 여기코일과 멀티어레이 센서가 0.1 내지 0.3mm 떨어져서 설치되는 것을 포함함을 특징으로 하는 비파괴 박막센서가 내장된 결함 검출용 멀티프로브.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080067981A KR100954777B1 (ko) | 2008-07-14 | 2008-07-14 | 비파괴 박막센서가 내장된 결함 검출용 멀티프로브 |
PCT/KR2009/002459 WO2010008136A2 (ko) | 2008-07-14 | 2009-05-11 | 비파괴 박막센서가 내장된 결함 검출용 멀티프로브 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080067981A KR100954777B1 (ko) | 2008-07-14 | 2008-07-14 | 비파괴 박막센서가 내장된 결함 검출용 멀티프로브 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20100007370A true KR20100007370A (ko) | 2010-01-22 |
KR100954777B1 KR100954777B1 (ko) | 2010-04-28 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020080067981A KR100954777B1 (ko) | 2008-07-14 | 2008-07-14 | 비파괴 박막센서가 내장된 결함 검출용 멀티프로브 |
Country Status (2)
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KR (1) | KR100954777B1 (ko) |
WO (1) | WO2010008136A2 (ko) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000351091A (ja) | 1999-06-09 | 2000-12-19 | Topy Ind Ltd | 溶接ビードの検出方法とその装置 |
JP2002093620A (ja) | 2000-09-19 | 2002-03-29 | Nec Corp | 磁性薄膜とその製造方法及びそれを用いた磁気ヘッド並びに電解めっき装置 |
KR100523686B1 (ko) * | 2003-07-21 | 2005-10-25 | 충남대학교산학협력단 | 와이어로프의 비파괴검사장치 |
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2008
- 2008-07-14 KR KR1020080067981A patent/KR100954777B1/ko active IP Right Grant
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2009
- 2009-05-11 WO PCT/KR2009/002459 patent/WO2010008136A2/ko active Application Filing
Also Published As
Publication number | Publication date |
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WO2010008136A3 (ko) | 2010-03-11 |
KR100954777B1 (ko) | 2010-04-28 |
WO2010008136A2 (ko) | 2010-01-21 |
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