WO2009145492A3 - 마그네트론 스퍼터링에 의한 후막제조방법 - Google Patents

마그네트론 스퍼터링에 의한 후막제조방법 Download PDF

Info

Publication number
WO2009145492A3
WO2009145492A3 PCT/KR2009/001730 KR2009001730W WO2009145492A3 WO 2009145492 A3 WO2009145492 A3 WO 2009145492A3 KR 2009001730 W KR2009001730 W KR 2009001730W WO 2009145492 A3 WO2009145492 A3 WO 2009145492A3
Authority
WO
WIPO (PCT)
Prior art keywords
thick film
fabrication process
magnetron sputtering
thin film
film
Prior art date
Application number
PCT/KR2009/001730
Other languages
English (en)
French (fr)
Other versions
WO2009145492A2 (ko
Inventor
김갑석
김용모
Original Assignee
(주)케이아이자이맥스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)케이아이자이맥스 filed Critical (주)케이아이자이맥스
Priority to US12/935,612 priority Critical patent/US20110017588A1/en
Priority to JP2011502861A priority patent/JP2011516729A/ja
Publication of WO2009145492A2 publication Critical patent/WO2009145492A2/ko
Publication of WO2009145492A3 publication Critical patent/WO2009145492A3/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

마그네트론 스퍼터링에 의한 후막제조방법이 개시된다. 본 발명의 후막 제조방법은, 기판 상에 마그네트론 스퍼터링 방법에 따라 압축잔류응력을 가지는 제1박막을 형성하는 단계와, 상기 제1박막 위에 마그네트론 스퍼터링 방법에 따라 인장잔류응력을 가지는 제2박막을 형성하는 단계와, 상기 제1박막 및 제2박막을 증착하는 단계를 적어도 1회이상 반복하여 전체 잔류 응력이 기 설정된 범위내로 제어되는 후막을 증착하는 단계를 포함한다. 이러한 후막 제조방법에 의해, 전체 후막의 응력을 용인 가능한 범위내에서 제어하면서 이종 물질 뿐만 아니라 동일 물질의 후막을 형성할 수 있다.
PCT/KR2009/001730 2008-04-03 2009-04-03 마그네트론 스퍼터링에 의한 후막제조방법 WO2009145492A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/935,612 US20110017588A1 (en) 2008-04-03 2009-04-03 Fabrication process for a thick film by magnetron sputtering
JP2011502861A JP2011516729A (ja) 2008-04-03 2009-04-03 マグネトロンスパッタリングによる厚膜の製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0031268 2008-04-03
KR1020080031268A KR100885664B1 (ko) 2008-04-03 2008-04-03 고속/고밀도 마그네트론 스퍼터링 법을 이용한 후막제조방법

Publications (2)

Publication Number Publication Date
WO2009145492A2 WO2009145492A2 (ko) 2009-12-03
WO2009145492A3 true WO2009145492A3 (ko) 2010-01-21

Family

ID=40682127

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/001730 WO2009145492A2 (ko) 2008-04-03 2009-04-03 마그네트론 스퍼터링에 의한 후막제조방법

Country Status (4)

Country Link
US (1) US20110017588A1 (ko)
JP (1) JP2011516729A (ko)
KR (1) KR100885664B1 (ko)
WO (1) WO2009145492A2 (ko)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101096114B1 (ko) 2009-12-28 2011-12-19 주식회사 코리아 인스트루먼트 일체형 전력 반도체 모듈 기판의 제조방법
KR20110085609A (ko) * 2010-01-21 2011-07-27 엘지이노텍 주식회사 발광 소자 및 그 제조방법
KR101200302B1 (ko) 2010-07-30 2012-11-12 (주)포러스텍 간헐적 스퍼터링을 이용한 고저항 금속박막 제조방법
KR102269136B1 (ko) 2014-11-24 2021-06-25 삼성디스플레이 주식회사 증착용 마스크와, 이를 제조하는 방법
JP7292695B2 (ja) * 2016-08-17 2023-06-19 地方独立行政法人東京都立産業技術研究センター 機能性薄膜、その製造方法、積層構造体及びその製造方法
CN108251806A (zh) * 2017-12-28 2018-07-06 上海佑戈金属科技有限公司 光亮彩色不锈钢带的制造方法及其光亮彩色不锈钢带
CN112011779B (zh) * 2019-05-30 2022-09-23 兰州空间技术物理研究所 一种真空磁控溅射卷绕镀制低残余应力厚铜膜的方法
KR102096787B1 (ko) 2019-06-11 2020-04-03 주식회사 바이테크 다층 구조의 다결정 탄화규소 성형체의 제조방법
KR20200142137A (ko) * 2019-06-11 2020-12-22 주식회사 포엠비 저유전율을 가지는 불소계 기판 및 그의 제조 방법
KR102239162B1 (ko) * 2019-06-24 2021-04-12 주식회사 브라이튼 의료용 공구 및 그 제조방법
CN112921285A (zh) * 2019-12-05 2021-06-08 比亚迪股份有限公司 渐变色镀膜基板及其制备方法、电子产品外壳、电子装置
KR102188258B1 (ko) 2020-04-27 2020-12-09 주식회사 바이테크 일체형 다층 구조의 다결정 탄화규소 성형체 제조방법과 다결정 탄화규소 성형체 및 플라즈마 공정장비용 샤워헤드
KR102430218B1 (ko) * 2020-10-20 2022-08-11 한국전자기술연구원 AlN(질화알루미늄) 박막 증착 방법
CN114322740A (zh) * 2021-12-03 2022-04-12 电子科技大学长三角研究院(湖州) 一种基于磁控溅射的复合薄膜应变计及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1121669A (ja) * 1997-07-02 1999-01-26 Ulvac Japan Ltd シリコン半導体に於ける化合物バリア膜形成方法
JP2005298833A (ja) * 2002-10-22 2005-10-27 Asahi Glass Co Ltd 多層膜付き基板とその製造方法
JP2007053373A (ja) * 2005-08-12 2007-03-01 Samsung Electronics Co Ltd 単結晶窒化物系半導体基板及びこれを用いた高品質の窒化物系発光素子製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4869714A (en) * 1986-02-13 1989-09-26 California Institute Of Technology Luminal surface fabrication for cardiovascular prostheses
US5022977A (en) * 1986-09-29 1991-06-11 Nippon Telegraph And Telephone Corporation Ion generation apparatus and thin film forming apparatus and ion source utilizing the ion generation apparatus
JPH07161637A (ja) * 1988-01-26 1995-06-23 Toshiba Corp 膜のスパッタリング形成方法
JPH0353539A (ja) * 1989-07-21 1991-03-07 Hitachi Ltd 半田接続用端子
JPH07235420A (ja) * 1994-02-22 1995-09-05 Nippon Telegr & Teleph Corp <Ntt> Ｆｅ−Ｒｈ磁性薄膜及びその作製方法
JPH11258406A (ja) * 1998-03-13 1999-09-24 Toppan Printing Co Ltd 反射防止膜
JP2000001776A (ja) * 1998-06-18 2000-01-07 Matsushita Electric Ind Co Ltd スパッタリング装置および薄膜形成方法
KR20000073343A (ko) * 1999-05-10 2000-12-05 김영환 반도체 장치의 배선구조
JP2002280171A (ja) * 2001-03-15 2002-09-27 Canon Inc 有機エレクトロルミネッセンス素子及びその製造方法
JP2008101916A (ja) * 2006-10-17 2008-05-01 Canon Inc 多層膜光学素子
KR100888145B1 (ko) * 2007-02-22 2009-03-13 성균관대학교산학협력단 무응력 연성회로기판 제조 장치 및 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1121669A (ja) * 1997-07-02 1999-01-26 Ulvac Japan Ltd シリコン半導体に於ける化合物バリア膜形成方法
JP2005298833A (ja) * 2002-10-22 2005-10-27 Asahi Glass Co Ltd 多層膜付き基板とその製造方法
JP2007053373A (ja) * 2005-08-12 2007-03-01 Samsung Electronics Co Ltd 単結晶窒化物系半導体基板及びこれを用いた高品質の窒化物系発光素子製造方法

Also Published As

Publication number Publication date
WO2009145492A2 (ko) 2009-12-03
KR100885664B1 (ko) 2009-02-25
US20110017588A1 (en) 2011-01-27
JP2011516729A (ja) 2011-05-26

Similar Documents

Publication Publication Date Title
WO2009145492A3 (ko) 마그네트론 스퍼터링에 의한 후막제조방법
WO2012142439A8 (en) Method and apparatus for ion-assisted atomic layer deposition
WO2012174260A3 (en) Pinhole-free dielectric thin film fabrication
WO2011065796A3 (ko) 안티 글레어 글래스 제조 방법
WO2007024341A3 (en) Method of preparing a film layer-by-layer using plasma enhanced atomic layer deposition
WO2010135616A3 (en) Method for separating a sheet of brittle material
WO2009148634A3 (en) Conversion of just-continuous metallic films to large particulate substrates for metal-enhanced fluorescence
WO2007117797A3 (en) Method of forming a metal carbide or metal carbonitride film having improved adhesion
WO2012099975A3 (en) Electrochromic tungsten oxide film deposition
WO2007140376A3 (en) A method for depositing and curing low-k films for gapfill and conformal film applications
TW200744241A (en) Method of making an encapsulated plasma sensitive device
TN2011000458A1 (en) Thin film coating and method of making of making the same
WO2011090704A3 (en) Method for producing microstructured templates and their use in providing pinning enhancements in superconducting films deposited thereon
WO2010055423A8 (en) Tellurium precursors for film deposition
WO2009131857A3 (en) A hardware set for growth of high k and capping material films
WO2008029179A3 (en) Method of manufacturing composite material by growing of a layer of reinforcement and related apparatus
WO2011163037A3 (en) Plasma-enhanced chemical vapor deposition of crystalline germanium
MX2010000795A (es) Un laminado y capa compuesta que comprende un sustrato y un recubrimiento, y un proceso y aparato para reparacion de los mismos.
WO2013009913A3 (en) Mixed metal oxide barrier films and atomic layer deposition method for making mixed metal oxide barrier films
GB201106553D0 (en) Mthod for coating substrates
WO2007111781A3 (en) Method of light enhanced atomic layer deposition
SG138523A1 (en) Method of integrating triple gate oxide thickness
MY188421A (en) Polymer coatings and methods for depositing polymer coatings
WO2011159737A3 (en) Systems, methods and products involving aspects of laser irradiation, cleaving, and/or bonding silicon-containing material to substrates
WO2011129882A3 (en) Method of making coated article having anti-bacterial and/or anti-fungal coating and resulting product

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09754957

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 2011502861

Country of ref document: JP

Ref document number: 12935612

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 09754957

Country of ref document: EP

Kind code of ref document: A2