WO2009136594A1 - Piping provided with heating means - Google Patents

Piping provided with heating means Download PDF

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Publication number
WO2009136594A1
WO2009136594A1 PCT/JP2009/058518 JP2009058518W WO2009136594A1 WO 2009136594 A1 WO2009136594 A1 WO 2009136594A1 JP 2009058518 W JP2009058518 W JP 2009058518W WO 2009136594 A1 WO2009136594 A1 WO 2009136594A1
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WO
WIPO (PCT)
Prior art keywords
heater
pipe
heating means
piping
fins
Prior art date
Application number
PCT/JP2009/058518
Other languages
French (fr)
Japanese (ja)
Inventor
一利 長澤
章雄 長澤
Original Assignee
株式会社アルファテック
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Filing date
Publication date
Application filed by 株式会社アルファテック filed Critical 株式会社アルファテック
Publication of WO2009136594A1 publication Critical patent/WO2009136594A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
    • F16L53/30—Heating of pipes or pipe systems
    • F16L53/35—Ohmic-resistance heating

Definitions

  • the present invention relates to a pipe provided with a heating means, and more particularly to a pipe provided with a heating means for circulating a gas used in semiconductor manufacturing or the like or a used exhaust gas.
  • gas used for etching and film formation is obliged to be processed by a detoxifying device, rendered harmless and discarded.
  • the exhaust gas is conveyed from the etching device or the like through the piping to the abatement device.
  • the reaction product of the exhaust gas adheres to the inner wall of the pipe, and the circulation of the exhaust gas is hindered.
  • the temperature in the pipe is raised to a predetermined temperature or higher so that the reaction product of the exhaust gas does not adhere to the inner wall of the pipe.
  • One method is to wrap a ribbon heater 2 around the outer surface of the pipe 1 and heat the inside of the pipe 1 from the outside of the pipe 1 as shown in FIG.
  • FIG. 2 there is a method in which a pipe 3 having an L-shaped structure is used, a heater 4 is inserted into the pipe 3 using a bent portion 3 a of the pipe 3, and the pipe 3 is heated. is there.
  • ribbon heaters are uniformly wound around the entire piping at a dense pitch.
  • the ribbon heater 2 is strictly prohibited from being overwrapped. Since it is necessary to wind the ribbon heater 2 carefully along the surface of the pipe 1 so as not to become unsatisfactory, the work efficiency in the construction at the site has deteriorated.
  • the method of inserting the heater 4 into the pipe 3 requires the pipe 3 having the bent portion 3a typified by the L-shaped structure, so that the structure of the pipe 3 is complicated and the installation place is restricted. As a result, there is a problem that the entire exhaust pipe cannot be heated sufficiently.
  • the present invention was created in view of the problems of the above-described conventional example, and the structure of the heater installation part is simple and the inside of the pipe can be efficiently heated, or the efficiency of the heater installation work is improved.
  • a pipe provided with a heating means that can be improved is provided.
  • the apparatus includes a tubular member and a heating unit provided inside the tubular member, and the heating unit includes a heater unit and a plurality of fins disposed around the heater unit.
  • the heating unit includes a heater unit and a plurality of fins disposed around the heater unit.
  • a pipe provided with a heating means, characterized in that it has a heat diffusion part.
  • the heating means is installed inside the pipe, the inside of the pipe can be efficiently heated. Furthermore, unlike the case of the ribbon heater, there is no need to wrap around the entire area of the piping, and there is no need for a heater installation section having an L-shaped structure, so the heater installation section can be a simple mechanism.
  • the heating means has a heater portion and a heat diffusion portion, and the diffusion portion has a plurality of fins arranged around the fin, and the fins are close to or in contact with the inner wall of the pipe (tubular member). Therefore, the heater part can be easily installed at the center inside the pipe during assembly. Moreover, since the fins are attached around the heater portion, heat can be efficiently and widely released around the heater, and the temperature difference inside the pipe can be reduced as much as possible.
  • At least the heat generating part of the heater part has a rod shape, and the plurality of fans may be arranged around the heater part so as to make a round with each other.
  • the plurality of fins are configured by a plurality of fin groups arranged at intervals along the longitudinal direction of the heater portion, and one fin group is spaced from each other around the heater portion. It is good to be comprised with the several fin arrange
  • the surface of the fin is oriented in the longitudinal direction of the heater or obliquely with respect to the longitudinal direction of the heater. These fins obstruct part of the gas flow and disturb the gas flow. Thereby, since the gas heated by the heat from the fins is stirred, the temperature distribution can be made more uniform from the central part to the peripheral part in the pipe.
  • the surface of the fin is parallel to the longitudinal direction of the heater portion or inclined with respect to the longitudinal direction.
  • the diffusing section may be configured by a cylindrical member that covers the periphery of the heater section and the plurality of fins attached to the cylindrical member. Thereby, the heat of a heater part can be efficiently conducted to the whole several fin surface.
  • the heater portion is a rod-shaped member composed of a central heating element, an insulator covering the periphery of the heating element, and a sheath member serving as an outer skin, one end of which is sealed with the sheath member.
  • a cartridge type in which the other end is at least a lead wire introduction portion, it is possible to facilitate attachment to the pipe.
  • the pipe provided with the heating means can be attached to another pipe together with the pipe via the flange, so that the pipe provided with the heating means can be easily installed at a necessary place. Therefore, the efficiency of heater installation work can be improved.
  • the structure of the heater installation part is simple and the inside of the pipe can be efficiently heated, or the efficiency of the heater installation work can be improved.
  • FIG. 1 It is a side view shown about the structure of piping provided with the heater of the prior art example. It is a side view shown about the structure of piping provided with the heater of another prior art example. It is a schematic diagram shown about the structure of piping provided with the heater which is the 1st Embodiment of this invention.
  • (A)-(c) is a figure shown about the structure of the support part unit of piping provided with the heater which is the 1st Embodiment of this invention
  • (b) is a side view, (a) It is the figure which looked at the support part unit of (b) from the left side, (c) is the figure which looked at the support part unit of (b) from the right side.
  • FIG. 1 It is a perspective view (the 1) shown about the attachment method to the exhaust piping of piping provided with the heater which is the 1st Embodiment of this invention.
  • (A) is a figure (the 2) shown about the attachment method to another piping of piping provided with the heater which is the 1st Embodiment of this invention.
  • (A) is a perspective view
  • (b) is a sectional view taken along line II of (a).
  • (A) is a schematic diagram which shows the structure installed in a part of gas piping which connects the piping provided with the heater of the 1st Embodiment of this invention from an etching apparatus to an abatement apparatus.
  • (B) is sectional drawing of piping provided with the heater.
  • (A) is a side view showing the configuration of a pipe provided with a heater according to the second embodiment of the present invention
  • (b) is a cross-sectional view taken along line II-II in (a)
  • (C) is a perspective view of a heating means.
  • (A), (b) is sectional drawing shown about the structure of piping provided with the heater which concerns on the modification of embodiment of this invention.
  • or (d) are sectional drawings shown about the structure of piping provided with the heater which concerns on the modification of embodiment of this invention.
  • FIG. 3 is a diagram illustrating a configuration of a pipe provided with the heater according to the first embodiment of the present invention.
  • the left view of FIG. 3 is a view seen from the side of the piping provided with the heater, and the right view is a view of the piping provided with the heater of the left view as viewed from the right.
  • FIGS. 4A to 4C are views showing one unit extracted from a plurality of units constituting the diffusion portion of the heating means provided in the pipe provided with the above-described heater.
  • 4 (b) is a side view of one unit
  • FIG. 4 (a) is a view of one unit of FIG. 4 (b) viewed from the left side
  • FIG. 4 (c) is a view of FIG. 4 (b). It is the figure which looked at one unit from the right side.
  • a pipe 101 provided with a heater has a pipe (tubular member) 12 having a length of about 450 mm and a diameter of about 48 mm, flanges (pipe interconnecting portions) 11 provided at both ends of the pipe 12, and It is comprised with the heating means 13 installed in the piping 12 inside.
  • the diameter of the pipe 12 corresponding to the installation location of the heating means 13 may be the same as the diameter of both ends of the pipe 12 as shown in FIG. 3 as long as the cross-sectional area of the gas flow passage can be secured. However, when it is necessary to ensure a larger cross-sectional area of the gas flow passage, the diameter of the pipe 12 at that portion is set to the pipe 12 at both ends corresponding to the installation location of the heating means 13 as shown in FIG. It may be larger than the diameter.
  • the heating means 13 is bent at 90 degrees on the lead wire introduction portion side and has a shape penetrating the pipe wall of the pipe 12. It is a shape that enables installation in a straight line portion that occupies most in the piping layout, and a shape that enables heating to the entire area of the piping 101. Further, the lead wire portion is drawn out of the pipe in a state where the sheath member of the heater main body portion is extended to be completely protected from the circulating gas.
  • the pipe 101 provided with a heater can be attached to another pipe together with the pipe via the flange 11.
  • the flanges 11 at both ends of the pipe 12 are opposed to flanges of other pipes, and have seal surfaces 11a for sealing with a center ring interposed between the contact surfaces.
  • the heating means 13 includes a heater part 51a and a diffusion part that has a structure that keeps the heater part 51a in the center of the pipe in contact with or close to the inner wall of the pipe 12 and does not hinder the flow of gas. 51c.
  • the diffusion portion 51c is made of stainless steel that is excellent in corrosion resistance to various gases used in semiconductor manufacturing and that is also a heat dissipation material and a heat conduction material.
  • the heater 51a has a cylindrical shape.
  • the heater 51a is composed of a central heating element (not shown in the drawing because it is inside the heater 51a) made of Kanthal wire, nichrome wire or other heating wire, and insulation such as magnesium oxide covering the periphery of the heating element.
  • the object 21 and its periphery are covered with a cylindrical stainless steel sheath member 22.
  • the insulator 21 covers the entire periphery including the side surface of the heating element, but FIG. 3 shows only the insulator exposed on the side surface.
  • the sheath member 22 is not installed on the side surface in FIG. 3, but may be installed so as to cover at least the side surface.
  • the heater unit 51a includes a pair of lead wires 14 for supplying electric power to the heating element and a thermocouple 15 for measuring temperature.
  • This type of heater can generate heat of 500 ° C. or more, and has the feature that the exhaust gas temperature can be easily heated to 100 ° C. to 400 ° C.
  • the ribbon heater itself is a resin sheath (insulator), so the upper limit of the heat generation temperature is about 120 ° C.
  • the inside of the pipe is The temperature can only be raised to about 60-70 ° C. Such a temperature is not sufficient to prevent the gas product from adhering to the inner wall of the pipe.
  • the diffusing unit 51c is composed of a plurality of units 51b having the same structure.
  • one unit 51b includes a cylindrical tubular member 23 and eight fins 24 provided at one end of the tubular member 23. ing. Eight fins 24 constitute one fin group 52. The eight fins 24 constituting the fin group 52 are attached to the end portion so that one end goes around the end portion of the cylindrical member 23 at equal intervals, and the other end extends from the end portion. Spread diagonally. Adjacent fins 24 are provided with a gap so as not to hinder gas flow.
  • the wide surface of the fin is directed in the direction of the central axis of the cylindrical member 23, or the upper and lower sides are slightly inclined with respect to the direction of the central axis.
  • the end of the fin of one unit 51b is brought close to the inner wall of the pipe 12. Preferably they are contacted.
  • the cylindrical member 23 and the eight fins 24 are integrally formed.
  • the integral structure of the cylindrical member 23 and the eight fins 24 is produced as follows. That is, a cylindrical member having an appropriate length is prepared, and eight places are cut at equal intervals along the circumference of the end surface of the cylindrical member. After making a cut into a predetermined length along the longitudinal direction of the tubular member from each of the locations, the tubular member is opened from the inside to the outside along the cut.
  • the unit 51b of the diffusion portion 51c is manufactured using stainless steel that is excellent in corrosion resistance against various gases used in semiconductor manufacturing and that is a heat radiating member and a heat conducting member.
  • the unit 51b is used by inserting the cylindrical member 23 into the heater portion 51a. Thereby, the heat of the heater part 51a can be efficiently conducted to the plurality of fins 24, and the heat can be efficiently radiated from the fins 24 to the surroundings.
  • the entire diffusion portion 51c of the heater portion 51a is configured by sequentially inserting a plurality of units 51b constituting the diffusion portion 51c into the heater portion 51a via the cylindrical member 23. That is, the plurality of fin groups 52 are arranged at a predetermined interval along the longitudinal direction of the heater portion 51a. Each fin is arranged such that a wide surface faces the longitudinal direction of the heater portion 51a, or the upper and lower sides are slightly inclined with respect to the longitudinal direction of the heater portion 51a. In FIG. 3, the upper portion of the fin is inclined toward the downstream side of the gas flow with respect to the gas flow flowing from the left side to the right side. In other words, the plurality of fins 24 are provided such that a wide surface stands with respect to the surface of the heater portion 51a, and is provided so as to make a round around the heater portion 51a at intervals.
  • the mutual arrangement of the plurality of fin groups 52 is such that the gaps between the fins 24 of the fin groups 52 are the same between adjacent fin groups 52 along the longitudinal direction of the heater portion 51a as shown in FIG. You may arrange
  • the heater portion 51a When the heating means 13 described above is installed in the pipe 12, the heater portion 51a is disposed along the central axis direction of the pipe 12 and substantially at the center portion of the pipe 12, and the longitudinal direction of the heater portion 51a is When the means 13 is installed in the pipe 12, it coincides with the direction of gas flow. Therefore, the gas introduced into the pipe 101 provided with the heater flows along the longitudinal direction of the heater portion 51a and flows between the fins 24 of the diffusion portion 51c. At this time, the flowing gas is disturbed by a part of the flow being blocked by the fin 24 whose wide surface faces the direction of the gas flow. That is, the atmosphere heated by the heat from the fins 24 is stirred by the flowing gas, or the heated flowing gas itself is stirred. It can be made uniform. Furthermore, since this phenomenon is sequentially performed in each unit, the temperature uniformity of the entire diffusion portion is increased.
  • the heating means 13 is installed inside the pipe 12, the inside of the pipe 12 can be efficiently heated. Further, unlike the case of the ribbon heater, it is not necessary to wrap around the entire area of the pipe, and the heater installation part having the L-shaped structure pipe is not necessary. Therefore, the heater installation part can be a simple mechanism.
  • the heater 51a can be installed so as to come to the center of the pipe 12, the bias of heating from the center to the periphery of the pipe 12 can be reduced. Furthermore, since the cylindrical member 23 of the diffusing portion 51c is formed of a heat conducting member, the fin 24 is formed of a heat radiating member, and is attached around the heater portion 51a, heat can be efficiently transferred around the heater portion 51a. The temperature difference inside the pipe 12 can be reduced as much as possible by transmitting and widely releasing.
  • FIG. 9A and FIG. 10A and FIG. 10B are cross-sectional views showing the configuration of a pipe provided with a heater according to a modification of the first embodiment.
  • the same reference numerals as those in FIG. 3 are the same as those in FIG.
  • the fin 24a of the diffusing portion 51d is provided on the cylindrical member 23a, and the wide surface of the fin 24a faces the direction of gas flow. However, it differs from FIG. 3 in that the upper part of the fin 24a of the diffusion part 51d is inclined toward the upstream side of the gas flow.
  • the heating means 13 is the same as in FIG. 3, but the diameter of the pipe 12a corresponding to the installation location of the heating means 13 is larger than the diameter of the pipes 12a at both ends. This is different from FIG. This configuration is suitable when it is necessary to ensure a larger cross-sectional area of the gas flow passage.
  • the fin 24a of the diffusing portion 51d is provided on the cylindrical member 23a, and the wide surface of the fin 24a faces the gas flow direction as in FIG.
  • the upper part of the fin 24a of the diffusion part 51d is inclined toward the upstream side of the gas flow.
  • the point from which the diameter of the pipe 12a of the part corresponding to the installation location of the heating means 13 is larger than the diameter of the pipe 12a of both ends differs from FIG.
  • stainless steel is preferably used in the same manner as the cylindrical member 23 and the fin 24 of the first embodiment.
  • the atmosphere heated by the heat from the fins 24 and 24a is stirred by the flowing gas, or the heated flowing gas itself is stirred.
  • the temperature distribution over the part can be made more uniform. Further, since this phenomenon is sequentially performed in each unit, the temperature uniformity increases from the central part to the peripheral part in the pipes 12 and 12a.
  • FIG. 5 is a perspective view (No. 1) showing a method of attaching the pipe provided with the heater according to the first embodiment of the present invention to the exhaust pipe.
  • FIGS. 6A and 6B are views (No. 2) illustrating a method of attaching the pipe provided with the heater according to the first embodiment of the present invention to another pipe.
  • 6A is a perspective view
  • FIG. 6B is a cross-sectional view taken along the line II in FIG. 6A.
  • FIG. 7A is a schematic view showing an example in which a pipe provided with the heater according to the present embodiment is installed in a part of a gas pipe that connects the vacuum pump 106 of the etching apparatus to the abatement apparatus 107.
  • FIG.7 (b) is sectional drawing of piping provided with the installed heater. 5 and 6, the pipe 101 shown in FIG. 3 is used as the pipe provided with the heater, and in FIG. 7, the pipe 101b shown in FIG. 10A is used as the pipe provided with the heater. The detailed configuration of the pipe 101b will
  • a pipe 101 provided with a heater and exhaust pipes 102 and 103 are prepared.
  • the structure by which the lead wire part was pulled out of the piping 101 provided with the heater is abbreviate
  • the exhaust pipe 102 is connected to a vacuum pump 106 of an apparatus such as etching that discharges harmful gas, and the exhaust pipe 103 is connected to a processing device 107 for detoxifying harmful gas.
  • the exhaust pipes 102 and 103 are opposed to each other with an interval corresponding to the length of the pipe 101 provided with the heating means 13.
  • the exhaust pipe 102 has a pipe 31 and a flange 32 provided at an end of the pipe 31.
  • the exhaust pipe 103 includes a pipe 33 and a flange 34 provided at an end of the pipe 33.
  • the flanges 32 and 34 respectively have centering seal surfaces 32a and 34a at positions corresponding to the centering seal surface 11a of the pipe 101 provided with the heater.
  • the exhaust pipe 102 is also formed with a centering seal surface 32a similar to the centering seal surface 34a, but cannot be seen behind the flange 32 in the drawing.
  • center rings 35 and 36 are prepared and set on the center ring seal surfaces 32a and 34a of the pipes 102 and 103, respectively.
  • each centering seal surface 11a, 32a, 34a is formed with a groove for storing the centering 35, 36, it is omitted in FIG.
  • FIG. 6A shows the state at this time.
  • the exhaust pipe 102 and the heater are connected by a clamper 37 and a screw (not shown).
  • the flanges 32 and 11 of the pipe 101 provided with each other are tightened to make their contact stronger, and the flanges 34 and 11 of the pipe 101 provided with the exhaust pipe 103 and the heater are similarly tightened to contact each other. To make it stronger. Thereby, the airtightness inside the pipes 101, 102, 103 is maintained by the center rings 35, 36 with respect to the outside.
  • one pipe 101 having a heater is connected between the exhaust pipes 102 and 103.
  • the exhaust pipe that is, the pipe from the exhaust port of the vacuum pump 106 such as an etching apparatus to the inlet of the abatement apparatus 107 is used.
  • the pipe 101b having the first heater is first installed at the uppermost stream, that is, the exhaust port of the vacuum pump 106, and then the heater effect of the first pipe 101b is lost.
  • a pipe 101b having a second heater is installed in the part.
  • FIG.7 (b) is sectional drawing of piping provided with the heater of Fig.7 (a).
  • 7 (a) and 7 (b) reference numeral 105 denotes an exhaust pipe similar to the exhaust pipes 102 and 103, and other reference numerals are the same as those shown in FIGS. 3, 5 and 6. The same thing as FIG.3, FIG.5 and FIG.6 is shown.
  • the pipe 101 including the heater can be attached to the exhaust pipes 102 and 103 together with the pipe 101 via the flange 11. Therefore, the pipe 101 provided with the heater can be easily installed at a necessary place, and thereby the efficiency of the heater installation work can be improved.
  • FIGS. 8A to 8C are diagrams showing the configuration of the pipe 104 provided with the heater according to the second embodiment of the present invention.
  • 8A is a cross-sectional view of the pipe 104
  • FIG. 8B is a side view seen from the right side of FIG. 8A
  • FIG. 8A corresponds to a cross-sectional view taken along the line II-II.
  • FIG. 8C is a perspective view of the heating means 40.
  • the second embodiment is different from the first embodiment in the configuration of the heating means 40 shown in FIG. 8C, particularly the diffusion portion 53b.
  • FIGS. 8A to 8C the same reference numerals as those in FIG. 3 are the same as those in FIG.
  • the configuration of the heating means 40, particularly the diffusion portion 53b, will be described in detail.
  • the heating means 40 includes a heater portion 53a and a diffusion portion 53b.
  • the heater section 53a is a cartridge type, and has a substantially rod shape including a heating element 41 at the center of the inside, an insulator 42a covering the periphery of the heating element 41, and a sheath member 42b covering them.
  • the tip is covered with a sheath member 42b.
  • the other end is bent at 90 degrees and serves as an introduction portion for a lead wire and a thermocouple.
  • the diffusing portion 53b includes a cylindrical tubular member 43 that covers the periphery of the heater portion 53a, and eight elongated fins 44 attached to the surface of the tubular member 43.
  • the fins 44 extend radially from the center of the heater portion 53a to a position close to or in contact with the inner wall of the pipe (tubular member) 12, and are equally spaced. And disposed on the surface of the cylindrical member 43 along the longitudinal direction of the cylindrical member 43. In other words, the fins 44 are arranged at equal intervals around the surface of the cylindrical member 43 so that a wide surface is parallel to the longitudinal direction of the heater portion 53a.
  • this diffusion part 53b is manufactured integrally in the longitudinal direction, it may be divided into a plurality as shown in the figure. The split type is preferable in consideration of manufacturability.
  • the cylindrical member 43 and the fin 44 of the diffusing portion 53b are excellent in corrosion resistance against various gases used in semiconductor manufacturing, and are also a heat radiating member and a heat conducting member, such as stainless steel. Is used.
  • the heater portion 53 a is installed along the central axis direction of the pipe 12 and substantially at the center of the pipe 12.
  • the longitudinal direction of the heater portion 53a coincides with the direction of gas flow.
  • the gas introduced into the pipe 104 provided with the heater flows along the longitudinal direction of the heater portion 53a and flows between the fins 44 of the diffusion portion 53b.
  • a heat diffusion chamber is formed between the fins of the diffusion portion 53b.
  • the heating means 40 can be easily installed inside the pipe 12 without disturbing the gas flow. For this reason, the inside of the piping 12 can be efficiently heated. Furthermore, unlike the case of the ribbon heater, there is no need to wrap around the entire area of the piping, and there is no need for a heater installation section having an L-shaped structure, so the heater installation section can be a simple mechanism.
  • FIG. 9B, FIG. 10C, and FIG. 10D are cross-sectional views showing the configuration of a pipe provided with a heater according to a modification of the second embodiment.
  • the same reference numerals as those in FIG. 8 are the same as those in FIG.
  • the fin 44a of the diffusing portion is provided on the cylindrical member 43a, and the wide surface of the fin 44a is arranged in parallel to the gas flow direction. 8 is different from FIG. 8 in that the fins 44a of the diffusion portion 53c are separated into a plurality along the gas flow and are spaced from each other.
  • the heating means 40 is the same as that in FIG. The difference is that it is getting bigger.
  • FIG. 8 is the same as FIG. 8, but differs from FIG. 8 in that the fins 44a of the diffusion portion 53c are separated into a plurality along the gas flow and are spaced from each other. Moreover, the point from which the diameter of the piping 12a of the part corresponding to the installation location of the heating means 40a is larger than the diameter of the piping 12a of both ends differs from FIG.
  • stainless steel is preferably used as in the cylindrical member 43 and the fin 44 of the second embodiment.
  • all the fins 44a may be installed in one cylindrical member 43a as long as the length of the heater part, or the cylindrical member 43a shorter than the length of the heater part and the cylindrical member 43a are turned around.
  • a unit may be formed by combining the fin group including the plurality of fins 44a provided as described above, and the plurality of units may be sequentially inserted into the heater unit.
  • the atmosphere heated by the heat from the fins 44 and 44a is stirred by the flowing gas, or the heated flowing gas itself is stirred.
  • the temperature distribution over the part can be made more uniform. Furthermore, since this phenomenon is sequentially performed in each unit, the temperature uniformity from the central part to the peripheral part in the pipes 12 and 12a is increased.
  • stainless steel is used as the material of the cylindrical members 23, 23a, 43, 43a and the fins 24, 24a, 44, 44a of the diffusing portions 51c, 51d, 53b, 53c. Absent. Any metal material may be used as long as it has corrosion resistance to the gas used for semiconductor manufacturing. The metal material is more preferably a member having corrosion resistance and particularly excellent in heat dissipation and heat conduction.
  • the surfaces of the fins 24, 24a, 44, and 44a of the diffusion portions 51c, 51d, 53b, and 53c described above are smooth, unevenness may be formed to increase the surface area and improve heat dissipation.
  • a plurality of fin groups 52 regularly arranged at predetermined intervals along the longitudinal direction of the heater portion 51a are provided, and the fins 24 of the fin groups 52 are spaced from each other around the heater portion 51a.
  • the fins 24 may be randomly arranged around the heater portion 51a. This modification is also applicable to the heating means 13a shown in FIGS. 9 (a) and 10 (b).
  • the pipe provided with the heater of the invention was applied to a part of the exhaust pipe, it can be used alone instead of the furnace.

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  • Physics & Mathematics (AREA)
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Abstract

Provided is piping having a heater, wherein a structure of a heater arranging section is simple and inside the piping can be efficiently heated or operation efficiency of arranging a heater section to the piping is improved. The piping is provided with a pipe-like member (12), and a heating means (13) arranged on an inner side of the pipe-like member (12).  The heating means (13) has a heater section (51a), and a heat diffusing section (51c) which is provided with a plurality of fins (24) arranged on the circumference of the heater section (51a).

Description

加熱手段を備えた配管Piping with heating means
　本発明は、加熱手段を備えた配管に関し、より詳しくは、半導体製造などにおいて使用するガス或いは使用済みの排ガスを流通させる、加熱手段を備えた配管に関する。 The present invention relates to a pipe provided with a heating means, and more particularly to a pipe provided with a heating means for circulating a gas used in semiconductor manufacturing or the like or a used exhaust gas.
　半導体製造において、エッチングや成膜に用いられたガスは、除害装置で処理し、無害化して廃棄することが義務づけられている。この場合、排ガスはエッチング装置などから除害装置へ配管を流通させて運ばれる。 In semiconductor manufacturing, gas used for etching and film formation is obliged to be processed by a detoxifying device, rendered harmless and discarded. In this case, the exhaust gas is conveyed from the etching device or the like through the piping to the abatement device.
　この際、排ガスの反応生成物が配管内壁に付着し、排ガスの流通が妨げられることになる。これを防止するため、配管内を所定温度以上に昇温し、排ガスの反応生成物が配管内壁に付着しないようにしている。 At this time, the reaction product of the exhaust gas adheres to the inner wall of the pipe, and the circulation of the exhaust gas is hindered. In order to prevent this, the temperature in the pipe is raised to a predetermined temperature or higher so that the reaction product of the exhaust gas does not adhere to the inner wall of the pipe.
　その一つの方法として、図１に示すように、配管１の外側表面にリボンヒータ２を巻きつけて、配管１の外部から配管１内部を加熱する方法がある。 One method is to wrap a ribbon heater 2 around the outer surface of the pipe 1 and heat the inside of the pipe 1 from the outside of the pipe 1 as shown in FIG.
　その他の方法として、図２に示すように、Ｌ字型の構造の配管３を用い、配管３の屈曲部３ａを利用して配管３内にヒータ４を差し込み、配管３内部を加熱する方法がある。 As another method, as shown in FIG. 2, there is a method in which a pipe 3 having an L-shaped structure is used, a heater 4 is inserted into the pipe 3 using a bent portion 3 a of the pipe 3, and the pipe 3 is heated. is there.
　しかしながら、リボンヒータ２を用いた方法によれば、外部から加熱することになることと、加熱部が樹脂製となるため高温が得られないことから、配管内部まで十分な加熱ができないという問題があった。 However, according to the method using the ribbon heater 2, there is a problem that heating cannot be performed sufficiently to the inside of the pipe because heating is performed from the outside and a high temperature cannot be obtained because the heating portion is made of resin. there were.
　さらに、その問題を少しでも解消するために配管全域に万遍なくリボンヒータを密ピッチで巻きつけることになるが、リボンヒータ２の重ね巻きは厳禁とされており、リボンヒータ２が相互に重ならないようにリボンヒータ２を配管１表面に沿って注意して巻く必要があるため、現場での工事における作業能率が悪くなっていた。 In addition, in order to solve the problem as much as possible, ribbon heaters are uniformly wound around the entire piping at a dense pitch. However, the ribbon heater 2 is strictly prohibited from being overwrapped. Since it is necessary to wind the ribbon heater 2 carefully along the surface of the pipe 1 so as not to become unsatisfactory, the work efficiency in the construction at the site has deteriorated.
　さらに、配管３内にヒータ４を差し込む方法では、Ｌ字型構造で代表される屈曲部３ａをもつ配管３が必要であるため、配管３の構造が複雑となり、また、そのため設置場所が制約され、結果的に排気配管内全域を十分加熱できないという問題がある。 Furthermore, the method of inserting the heater 4 into the pipe 3 requires the pipe 3 having the bent portion 3a typified by the L-shaped structure, so that the structure of the pipe 3 is complicated and the installation place is restricted. As a result, there is a problem that the entire exhaust pipe cannot be heated sufficiently.
　本発明は、上記の従来例の問題点に鑑みて創作されたものであり、ヒータ設置部の構造がシンプルで、かつ配管内を効率良く加熱することができ、或いはヒータの設置作業の能率を向上させることができる加熱手段を備えた配管を提供するものである。 The present invention was created in view of the problems of the above-described conventional example, and the structure of the heater installation part is simple and the inside of the pipe can be efficiently heated, or the efficiency of the heater installation work is improved. A pipe provided with a heating means that can be improved is provided.
　本発明の一観点によれば、管状部材と、前記管状部材の内側に設けられた加熱手段とを有し、前記加熱手段は、ヒータ部と、該ヒータ部の周囲に配置された複数のフィンを備えた熱の拡散部とを有することを特徴とする加熱手段を備えた配管が提供される。 According to an aspect of the present invention, the apparatus includes a tubular member and a heating unit provided inside the tubular member, and the heating unit includes a heater unit and a plurality of fins disposed around the heater unit. There is provided a pipe provided with a heating means, characterized in that it has a heat diffusion part.
　本発明によれば、加熱手段を配管の内側に設置しているので、配管内を効率良く加熱することができる。さらに、リボンヒータの場合のように配管全域に巻く必要もなく、Ｌ字型の構造の配管を備えたヒータ設置部も必要でないため、ヒータ設置部をシンプルな機構とすることができる。 According to the present invention, since the heating means is installed inside the pipe, the inside of the pipe can be efficiently heated. Furthermore, unlike the case of the ribbon heater, there is no need to wrap around the entire area of the piping, and there is no need for a heater installation section having an L-shaped structure, so the heater installation section can be a simple mechanism.
　また、加熱手段はヒータ部と熱の拡散部とを有し、該拡散部は周囲に配置された複数のフィンを有して、該フィンは配管（管状部材）内壁に近接または接触させているので、組み立て時においてヒータ部を配管の内部中央に容易に設置することができる。しかも、フィンがヒータ部の周囲に取り付けられているので、熱をヒータの周囲に効率よくかつ広く放出させて、配管内部の温度差を極力少なくすることができる。 Further, the heating means has a heater portion and a heat diffusion portion, and the diffusion portion has a plurality of fins arranged around the fin, and the fins are close to or in contact with the inner wall of the pipe (tubular member). Therefore, the heater part can be easily installed at the center inside the pipe during assembly. Moreover, since the fins are attached around the heater portion, heat can be efficiently and widely released around the heater, and the temperature difference inside the pipe can be reduced as much as possible.
　さらに、好ましくは，前記ヒータ部は、少なくとも発熱部が棒状であり、前記複数のファンは、前記ヒータ部の周囲に相互に間隔をおいて一回りするように配置されているとよい。 Further preferably, at least the heat generating part of the heater part has a rod shape, and the plurality of fans may be arranged around the heater part so as to make a round with each other.
　また、好ましくは、前記複数のフィンは、前記ヒータ部の長手方向に沿って間隔を置いて配置された複数のフィン群で構成され、一つの該フィン群は前記ヒータ部の周囲を相互に間隔をおいて一回りするように配置された複数のフィンで構成されているとよい。 Preferably, the plurality of fins are configured by a plurality of fin groups arranged at intervals along the longitudinal direction of the heater portion, and one fin group is spaced from each other around the heater portion. It is good to be comprised with the several fin arrange | positioned so that it may go around once.
　また、好ましくは、前記フィンの面は、前記ヒータの長手方向に向き、又は前記ヒータの長手方向に対して斜めを向いているとよい。それらのフィンによりガスの流れの一部が遮られてガスの流れが乱される。これにより、フィンからの熱で昇温したガスがかき回されるため、配管内の中央部から周辺部にかけて温度分布をより一層均一にすることができる。 Preferably, the surface of the fin is oriented in the longitudinal direction of the heater or obliquely with respect to the longitudinal direction of the heater. These fins obstruct part of the gas flow and disturb the gas flow. Thereby, since the gas heated by the heat from the fins is stirred, the temperature distribution can be made more uniform from the central part to the peripheral part in the pipe.
　また、好ましくは、前記フィンの面は、前記ヒータ部の長手方向に平行であり、又は該長手方向に対して傾斜しているとよい。 Preferably, the surface of the fin is parallel to the longitudinal direction of the heater portion or inclined with respect to the longitudinal direction.
　また、好ましくは、前記拡散部は、前記ヒータ部の周囲を覆う筒状部材と、該筒状部材に取り付けられた前記複数のフィンとで構成されるとよい。これにより、ヒータ部の熱を効率良く、複数のフィン全面に伝導させることができる。 Also preferably, the diffusing section may be configured by a cylindrical member that covers the periphery of the heater section and the plurality of fins attached to the cylindrical member. Thereby, the heat of a heater part can be efficiently conducted to the whole several fin surface.
　また、好ましくは、ヒータ部は、中心部の発熱体と、発熱体の周囲を覆う絶縁物と、外皮となるシース部材とで構成された棒状であって、その一端がシース部材で封止され、他端が少なくともリード線導入部とされたカートリッジ型にすることにより、配管への取り付けを容易にすることができる。 Preferably, the heater portion is a rod-shaped member composed of a central heating element, an insulator covering the periphery of the heating element, and a sheath member serving as an outer skin, one end of which is sealed with the sheath member. By using a cartridge type in which the other end is at least a lead wire introduction portion, it is possible to facilitate attachment to the pipe.
　さらに、好ましくは、加熱手段を備えた配管は、フランジを介して配管ごと別の配管に取り付け可能となっていることで、加熱手段を備えた配管を必要な箇所に簡単に設置することができるため、ヒータの設置作業の能率を向上させることができる。 Further, preferably, the pipe provided with the heating means can be attached to another pipe together with the pipe via the flange, so that the pipe provided with the heating means can be easily installed at a necessary place. Therefore, the efficiency of heater installation work can be improved.
　以上のように、本発明によれば、ヒータ設置部の構造がシンプルで、かつ配管内を効率良く加熱することができ、或いは、ヒータの設置作業の能率を向上させることができる。 As described above, according to the present invention, the structure of the heater installation part is simple and the inside of the pipe can be efficiently heated, or the efficiency of the heater installation work can be improved.
従来例のヒータを備えた配管の構成について示す側面図である。It is a side view shown about the structure of piping provided with the heater of the prior art example. 他の従来例のヒータを備えた配管の構成について示す側面図である。It is a side view shown about the structure of piping provided with the heater of another prior art example. 本発明の第１の実施の形態であるヒータを備えた配管の構成について示す模式図である。It is a schematic diagram shown about the structure of piping provided with the heater which is the 1st Embodiment of this invention. （ａ）～（ｃ）は、本発明の第１の実施の形態であるヒータを備えた配管の支持部ユニットの構成について示す図であり、（ｂ）は側面図であり、（ａ）は（ｂ）の支持部ユニットを左側から見た図であり、（ｃ）は（ｂ）の支持部ユニットを右側から見た図である。(A)-(c) is a figure shown about the structure of the support part unit of piping provided with the heater which is the 1st Embodiment of this invention, (b) is a side view, (a) It is the figure which looked at the support part unit of (b) from the left side, (c) is the figure which looked at the support part unit of (b) from the right side. 本発明の第１の実施の形態であるヒータを備えた配管の排気配管への取付け方法について示す斜視図（その１）である。It is a perspective view (the 1) shown about the attachment method to the exhaust piping of piping provided with the heater which is the 1st Embodiment of this invention. （ａ）、（ｂ）は、本発明の第１の実施の形態であるヒータを備えた配管の別の配管への取付け方法について示す図（その２）である。（ａ）は斜視図であり、（ｂ）は（ａ）のＩ－Ｉ線に沿う断面図である。(A), (b) is a figure (the 2) shown about the attachment method to another piping of piping provided with the heater which is the 1st Embodiment of this invention. (A) is a perspective view, (b) is a sectional view taken along line II of (a). （ａ）は、本発明の第１の実施形態のヒータを備えた配管がエッチング装置から除害装置に至る間を繋ぐガス配管の一部に設置された構成を示す模式図である。（ｂ）は、ヒータを備えた配管の断面図である。(A) is a schematic diagram which shows the structure installed in a part of gas piping which connects the piping provided with the heater of the 1st Embodiment of this invention from an etching apparatus to an abatement apparatus. (B) is sectional drawing of piping provided with the heater. （ａ）は、本発明の第２の実施の形態であるヒータを備えた配管の構成について示す側面図であり、（ｂ）は、（ａ）のII-II線に沿う断面図であり、（ｃ）は、加熱手段の斜視図である。(A) is a side view showing the configuration of a pipe provided with a heater according to the second embodiment of the present invention, (b) is a cross-sectional view taken along line II-II in (a), (C) is a perspective view of a heating means. （ａ）、（ｂ）は、本発明の実施の形態の変形例に係るヒータを備えた配管の構成について示す断面図である。(A), (b) is sectional drawing shown about the structure of piping provided with the heater which concerns on the modification of embodiment of this invention. （ａ）乃至（ｄ）は、本発明の実施の形態の変形例に係るヒータを備えた配管の構成について示す断面図である。(A) thru | or (d) are sectional drawings shown about the structure of piping provided with the heater which concerns on the modification of embodiment of this invention.
　以下に、本発明の実施の形態について図面を参照しながら説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　（第１の実施の形態）
　（ヒータ（加熱手段）を備えた配管の構成の説明）
　図３は、本発明の第１の実施の形態に係るヒータを備えた配管の構成を示す図である。図３の左側の図はヒータを備えた配管を側面から透視して見た図であり、右側の図は、左側の図のヒータを備えた配管を右側から見た図である。図４（ａ）～（ｃ）は、上述のヒータを備えた配管に備えられた加熱手段の拡散部を構成する複数のユニットから一ユニットを抜き出して示した図である。図４（ｂ）は一ユニットの側面図で、図４（ａ）は、図４（ｂ）の一ユニットを左側から見た図であり、図４（ｃ）は、図４（ｂ）の一ユニットを右側から見た図である。 (First embodiment)
(Description of the configuration of the piping provided with a heater (heating means))
FIG. 3 is a diagram illustrating a configuration of a pipe provided with the heater according to the first embodiment of the present invention. The left view of FIG. 3 is a view seen from the side of the piping provided with the heater, and the right view is a view of the piping provided with the heater of the left view as viewed from the right. FIGS. 4A to 4C are views showing one unit extracted from a plurality of units constituting the diffusion portion of the heating means provided in the pipe provided with the above-described heater. 4 (b) is a side view of one unit, FIG. 4 (a) is a view of one unit of FIG. 4 (b) viewed from the left side, and FIG. 4 (c) is a view of FIG. 4 (b). It is the figure which looked at one unit from the right side.
　（全体の構成）
　図３に示すように、ヒータを備えた配管１０１は、長さ約４５０ｍｍ、直径約４８ｍｍの配管（管状部材）１２と、配管１２の両端に設けられたフランジ（配管相互接続部）１１と、配管１２内部に設置された加熱手段１３とで構成される。 (Overall configuration)
As shown in FIG. 3, a pipe 101 provided with a heater has a pipe (tubular member) 12 having a length of about 450 mm and a diameter of about 48 mm, flanges (pipe interconnecting portions) 11 provided at both ends of the pipe 12, and It is comprised with the heating means 13 installed in the piping 12 inside.
　なお、加熱手段１３の設置箇所に対応する部分の配管１２の直径は、ガス流通路の断面積を確保することができれば、図３に示すように、配管１２両端の直径と同じにしてもよいが、ガス流通路の断面積をより大きく確保する必要がある場合、図１０（ａ）に示すように、加熱手段１３の設置箇所に対応してその部分の配管１２の直径を両端の配管１２の直径よりも大きくしてもよい。 The diameter of the pipe 12 corresponding to the installation location of the heating means 13 may be the same as the diameter of both ends of the pipe 12 as shown in FIG. 3 as long as the cross-sectional area of the gas flow passage can be secured. However, when it is necessary to ensure a larger cross-sectional area of the gas flow passage, the diameter of the pipe 12 at that portion is set to the pipe 12 at both ends corresponding to the installation location of the heating means 13 as shown in FIG. It may be larger than the diameter.
　加熱手段１３はリード線導入部側が９０度に曲げられて、配管１２の管壁を貫通する形状になっている。配管レイアウトで多くを占める直線部分への設置を可能にした形状であり、配管１０１全域への加熱を可能にする形状である。また、リード線部は、ヒータ本体部分のシース部材を延長して流通気体から完全に保護された状態で、配管の外に引き出されている。 The heating means 13 is bent at 90 degrees on the lead wire introduction portion side and has a shape penetrating the pipe wall of the pipe 12. It is a shape that enables installation in a straight line portion that occupies most in the piping layout, and a shape that enables heating to the entire area of the piping 101. Further, the lead wire portion is drawn out of the pipe in a state where the sheath member of the heater main body portion is extended to be completely protected from the circulating gas.
　後述の（ヒータを備えた配管の取り付け方法の説明）の項で詳しく説明するように、ヒータを備えた配管１０１は、フランジ１１を介して配管ごと別の配管に取り付け可能となっている。配管１２の両端のフランジ１１は、別の配管のフランジと対向し、接触する面にセンターリングを介在させてシールをするためのシール面１１ａを有している。 As will be described in detail in the following section (Explanation of the method of attaching a pipe provided with a heater), the pipe 101 provided with a heater can be attached to another pipe together with the pipe via the flange 11. The flanges 11 at both ends of the pipe 12 are opposed to flanges of other pipes, and have seal surfaces 11a for sealing with a center ring interposed between the contact surfaces.
　（加熱手段の構成）
　加熱手段１３は、図３に示すように、ヒータ部５１ａと、配管１２内壁に接触または近接させてヒータ部５１ａを配管中央に保持し、かつガスの流通を妨げないような構造をもつ拡散部５１ｃとで構成される。拡散部５１ｃは、半導体製造に使用される種々のガスに対する耐腐食性に優れ、かつ放熱材料及び熱伝導材料でもあるステンレスなどで構成されている。 (Structure of heating means)
As shown in FIG. 3, the heating means 13 includes a heater part 51a and a diffusion part that has a structure that keeps the heater part 51a in the center of the pipe in contact with or close to the inner wall of the pipe 12 and does not hinder the flow of gas. 51c. The diffusion portion 51c is made of stainless steel that is excellent in corrosion resistance to various gases used in semiconductor manufacturing and that is also a heat dissipation material and a heat conduction material.
　（ヒータ部の構成）
　ヒータ部５１ａは、図３に示すように、円柱状を有する。ヒータ部５１ａは、カンタル線、ニクロム線その他の発熱線からなる中心部の発熱体（ヒータ部５１ａの内部にあるため図面では表示していない）と、発熱体の周囲を覆う酸化マグネシュウム等の絶縁物２１と、その周囲を円筒状のステンレスシース部材２２で覆って構成されている。なお、絶縁物２１は発熱体の側面を含むすべての周囲を覆っているが、図３では、側面に露出する絶縁物だけを記載している。また、シース部材２２は、図３では、側面に設置されていないが、少なくとも側面を覆うように設置されてもよい。 (Structure of heater part)
As shown in FIG. 3, the heater 51a has a cylindrical shape. The heater 51a is composed of a central heating element (not shown in the drawing because it is inside the heater 51a) made of Kanthal wire, nichrome wire or other heating wire, and insulation such as magnesium oxide covering the periphery of the heating element. The object 21 and its periphery are covered with a cylindrical stainless steel sheath member 22. The insulator 21 covers the entire periphery including the side surface of the heating element, but FIG. 3 shows only the insulator exposed on the side surface. In addition, the sheath member 22 is not installed on the side surface in FIG. 3, but may be installed so as to cover at least the side surface.
　さらに、ヒータ部５１ａは、発熱体に電力を供給する一対のリード線１４と、温度測定を行うための熱電対１５とを備えている。 Furthermore, the heater unit 51a includes a pair of lead wires 14 for supplying electric power to the heating element and a thermocouple 15 for measuring temperature.
　この種のヒータは５００℃以上の発熱が可能であり、排ガス温度を１００℃～４００℃に加熱することが容易であるという特徴を持っている。 This type of heater can generate heat of 500 ° C. or more, and has the feature that the exhaust gas temperature can be easily heated to 100 ° C. to 400 ° C.
　なお、上述のヒータに対して、リボンヒータ自体は、樹脂製外皮（絶縁体）であるため発熱温度の上限が約１２０℃であり、配管の外側にリボンヒータを設置した場合、配管の内部を６０～７０℃程度にしか昇温できない。この程度の温度では配管内壁へのガス生成物の付着を防止するには十分でない。 In contrast to the above heater, the ribbon heater itself is a resin sheath (insulator), so the upper limit of the heat generation temperature is about 120 ° C. When the ribbon heater is installed outside the pipe, the inside of the pipe is The temperature can only be raised to about 60-70 ° C. Such a temperature is not sufficient to prevent the gas product from adhering to the inner wall of the pipe.
　（拡散部の構成）
　拡散部５１ｃは、図３に示すように、同じ構造の複数のユニット５１ｂで構成されている。一つのユニット５１ｂは、図４（ａ）～（ｃ）に示すように、円筒状の筒状部材２３と、筒状部材２３の片側端部に設けられた８枚のフィン２４とで構成されている。８枚のフィン２４が一つのフィン群５２を構成する。フィン群５２を構成する８枚のフィン２４は一方の端が筒状部材２３の端部の周囲を一回りするようにかつ等間隔で当該端部に取り付けられ、他方の端が当該端部から斜め方向に広がっている。隣接するフィン２４同士は、ガスの流通を妨げないように隙間を開けて設けられている。フィンの広い面は筒状部材２３の中心軸の方向に向くようにし、或いは中心軸の方向に対して上下が少し斜めに傾くようにする。この実施形態では一ユニット５１ｂのフィン先端は配管１２の内壁に近接させる。好ましくは接触させる。 (Configuration of diffuser)
As shown in FIG. 3, the diffusing unit 51c is composed of a plurality of units 51b having the same structure. As shown in FIGS. 4A to 4C, one unit 51b includes a cylindrical tubular member 23 and eight fins 24 provided at one end of the tubular member 23. ing. Eight fins 24 constitute one fin group 52. The eight fins 24 constituting the fin group 52 are attached to the end portion so that one end goes around the end portion of the cylindrical member 23 at equal intervals, and the other end extends from the end portion. Spread diagonally. Adjacent fins 24 are provided with a gap so as not to hinder gas flow. The wide surface of the fin is directed in the direction of the central axis of the cylindrical member 23, or the upper and lower sides are slightly inclined with respect to the direction of the central axis. In this embodiment, the end of the fin of one unit 51b is brought close to the inner wall of the pipe 12. Preferably they are contacted.
　この実施形態では、筒状部材２３と８枚のフィン２４とは一体的に形成されている。筒状部材２３と８枚のフィン２４との一体構造は、次のようにして作製される。すなわち、適当な長さの筒状部材を用意し、筒状部材の端面の円周に沿って等間隔に８箇所切込みを入れるところを設定する。その各箇所から筒状部材の長手方向に沿って所定の長さに切り込みを入れた後、その切り込みに沿って筒状部材を内側から外側に開く。 In this embodiment, the cylindrical member 23 and the eight fins 24 are integrally formed. The integral structure of the cylindrical member 23 and the eight fins 24 is produced as follows. That is, a cylindrical member having an appropriate length is prepared, and eight places are cut at equal intervals along the circumference of the end surface of the cylindrical member. After making a cut into a predetermined length along the longitudinal direction of the tubular member from each of the locations, the tubular member is opened from the inside to the outside along the cut.
　この拡散部５１ｃのユニット５１ｂは、半導体製造に使用される種々のガスに対する耐腐食性に優れ、かつ放熱部材及び熱伝導部材であるステンレスなどを使用して作製される。ユニット５１ｂは、筒状部材２３をヒータ部５１ａに挿入して用いられる。これにより、ヒータ部５１ａの熱を効率良く、複数のフィン２４に伝導させることができ、さらに、フィン２４から周囲に効率良く放熱できる。 The unit 51b of the diffusion portion 51c is manufactured using stainless steel that is excellent in corrosion resistance against various gases used in semiconductor manufacturing and that is a heat radiating member and a heat conducting member. The unit 51b is used by inserting the cylindrical member 23 into the heater portion 51a. Thereby, the heat of the heater part 51a can be efficiently conducted to the plurality of fins 24, and the heat can be efficiently radiated from the fins 24 to the surroundings.
　ヒータ部５１ａの拡散部５１ｃの全体は、拡散部５１ｃを構成する複数のユニット５１ｂが筒状部材２３を介して順次ヒータ部５１ａに挿入されて構成される。すなわち、複数のフィン群５２は、ヒータ部５１ａの長手方向に沿って所定の間隔をおいて配置される。また、各フィンは広い面がヒータ部５１ａの長手方向に向くように、或いはヒータ部５１ａの長手方向に対して上下が少し斜めに傾くようにして配置される。図３では、左側から右側に流れるガス流に対してフィンの上部をガス流の下流の方に傾かせている。言い換えれば、複数のフィン２４は広い面がヒータ部５１ａの表面に対して立つように設けられ、かつヒータ部５１ａの周囲を相互に間隔をおいて一回りするように設けられる。 The entire diffusion portion 51c of the heater portion 51a is configured by sequentially inserting a plurality of units 51b constituting the diffusion portion 51c into the heater portion 51a via the cylindrical member 23. That is, the plurality of fin groups 52 are arranged at a predetermined interval along the longitudinal direction of the heater portion 51a. Each fin is arranged such that a wide surface faces the longitudinal direction of the heater portion 51a, or the upper and lower sides are slightly inclined with respect to the longitudinal direction of the heater portion 51a. In FIG. 3, the upper portion of the fin is inclined toward the downstream side of the gas flow with respect to the gas flow flowing from the left side to the right side. In other words, the plurality of fins 24 are provided such that a wide surface stands with respect to the surface of the heater portion 51a, and is provided so as to make a round around the heater portion 51a at intervals.
　複数のフィン群５２の相互の配置は、各フィン群５２のフィン２４の間の隙間が、図３に示すように、ヒータ部５１ａの長手方向に沿って隣り合うフィン群５２の間で同じ位置にくるように配置してもよいし、或いは相互にずれるように配置してもよい。 The mutual arrangement of the plurality of fin groups 52 is such that the gaps between the fins 24 of the fin groups 52 are the same between adjacent fin groups 52 along the longitudinal direction of the heater portion 51a as shown in FIG. You may arrange | position so that it may come to, or may arrange | position so that it may mutually shift | deviate.
　なお、拡散部５１ｃの一ユニットを構成する筒状部材２３と８枚のフィン２４は別の方法で作製してもよい。そして、拡散部５１ｃのフィン２４の配置に関して、フィンの広い面がヒータ部５１ａの長手方向に対して左右が斜めに傾くように作製されてもよいし、或いは種々の傾きのものが混在するように作製されてもよい。 In addition, you may produce the cylindrical member 23 and the eight fins 24 which comprise one unit of the spreading | diffusion part 51c by another method. And about the arrangement | positioning of the fin 24 of the spreading | diffusion part 51c, the wide surface of a fin may be produced so that right and left may incline diagonally with respect to the longitudinal direction of the heater part 51a, or the thing of various inclinations may be mixed. May be made.
　上述した加熱手段１３を配管１２内に設置したときに、ヒータ部５１ａは配管１２の中心軸方向に沿ってかつ配管１２のほぼ中心部に配置されるとともに、ヒータ部５１ａの長手方向は、加熱手段１３を配管１２内に設置したときにガスの流れの方向と一致する。従って、このヒータを備えた配管１０１内に導入されたガスは、ヒータ部５１ａの長手方向に沿って流れ、拡散部５１ｃのフィン２４の間を流通する。このとき、流通するガスは、広い面がガスの流れの方向に向いたフィン２４によって流れの一部が遮られて乱される。すなわち、フィン２４からの熱により昇温した雰囲気が流通ガスによって掻き回され、或いは昇温した流通ガス自身が掻き回されるため、配管１０１内の中央部から周辺部にかけての温度分布をより一層均一にすることができる。更にこの現象が各ユニットで順次行われるため、拡散部全体の温度均一性が増すことになる。 When the heating means 13 described above is installed in the pipe 12, the heater portion 51a is disposed along the central axis direction of the pipe 12 and substantially at the center portion of the pipe 12, and the longitudinal direction of the heater portion 51a is When the means 13 is installed in the pipe 12, it coincides with the direction of gas flow. Therefore, the gas introduced into the pipe 101 provided with the heater flows along the longitudinal direction of the heater portion 51a and flows between the fins 24 of the diffusion portion 51c. At this time, the flowing gas is disturbed by a part of the flow being blocked by the fin 24 whose wide surface faces the direction of the gas flow. That is, the atmosphere heated by the heat from the fins 24 is stirred by the flowing gas, or the heated flowing gas itself is stirred. It can be made uniform. Furthermore, since this phenomenon is sequentially performed in each unit, the temperature uniformity of the entire diffusion portion is increased.
　（効果）
　以上のように、本発明の第１実施形態のヒータを備えた配管１０１によれば、加熱手段１３を配管１２の内部に設置しているので、配管１２内を効率良く加熱することができる。また、リボンヒータの場合のように配管全域に巻く必要もなく、Ｌ字型の構造の配管を備えたヒータ設置部も必要でないため、ヒータ設置部をシンプルな機構とすることができる。 (effect)
As described above, according to the pipe 101 provided with the heater according to the first embodiment of the present invention, since the heating means 13 is installed inside the pipe 12, the inside of the pipe 12 can be efficiently heated. Further, unlike the case of the ribbon heater, it is not necessary to wrap around the entire area of the pipe, and the heater installation part having the L-shaped structure pipe is not necessary. Therefore, the heater installation part can be a simple mechanism.
　また、ヒータ部５１ａが配管１２の中央部に来るように設置することができるため、配管１２の中央部から周辺部にかけて加熱の偏りを少なくすることができる。さらに、拡散部５１ｃの筒状部材２３が熱伝導部材で構成され、フィン２４が放熱部材で構成され、かつヒータ部５１ａの周囲に取り付けられているので、熱をヒータ部５１ａの周囲に効率よく伝えるとともに広く放出させて、配管１２内部の温度差を極力少なくすることができる。 Also, since the heater 51a can be installed so as to come to the center of the pipe 12, the bias of heating from the center to the periphery of the pipe 12 can be reduced. Furthermore, since the cylindrical member 23 of the diffusing portion 51c is formed of a heat conducting member, the fin 24 is formed of a heat radiating member, and is attached around the heater portion 51a, heat can be efficiently transferred around the heater portion 51a. The temperature difference inside the pipe 12 can be reduced as much as possible by transmitting and widely releasing.
　（ヒータを備えた配管の変形例）
　図９（ａ）及び図１０（ａ）、（ｂ）は、第1実施形態の変形例のヒータを備えた配管の構成を示す断面図である。図中、図３と同じ符号で示すものは図３と同じものである。 (Modification of piping with heater)
FIG. 9A and FIG. 10A and FIG. 10B are cross-sectional views showing the configuration of a pipe provided with a heater according to a modification of the first embodiment. In the figure, the same reference numerals as those in FIG. 3 are the same as those in FIG.
　図９（ａ）のヒータを備えた配管１０１ａにおいて、拡散部５１ｄのフィン２４ａが筒状部材２３ａに設けられ、フィン２４ａの広い面がガスの流れの方向に向いている点は図３と同じであるが、拡散部５１ｄのフィン２４ａの上部がガスの流れの上流側に傾いている点が図３と異なる。 9A, the fin 24a of the diffusing portion 51d is provided on the cylindrical member 23a, and the wide surface of the fin 24a faces the direction of gas flow. However, it differs from FIG. 3 in that the upper part of the fin 24a of the diffusion part 51d is inclined toward the upstream side of the gas flow.
　図１０（ａ）のヒータを備えた配管１０１ｂにおいて、加熱手段１３は図３と同じであるが、加熱手段１３の設置箇所に対応する部分の配管１２ａの直径が両端の配管１２ａの直径よりも大きくなっている点が図３と異なる。この構成は、ガス流通路の断面積をより大きく確保する必要がある場合に適している。 In the pipe 101b provided with the heater of FIG. 10A, the heating means 13 is the same as in FIG. 3, but the diameter of the pipe 12a corresponding to the installation location of the heating means 13 is larger than the diameter of the pipes 12a at both ends. This is different from FIG. This configuration is suitable when it is necessary to ensure a larger cross-sectional area of the gas flow passage.
　図１０（ｂ）のヒータを備えた配管１０１ｃにおいて、拡散部５１ｄのフィン２４ａが筒状部材２３ａに設けられ、フィン２４ａの広い面がガスの流れの方向に向いている点は図３と同じであるが、拡散部５１ｄのフィン２４ａの上部がガスの流れの上流側に傾いている点が図３と異なる。また、加熱手段１３の設置箇所に対応する部分の配管１２ａの直径が両端の配管１２ａの直径よりも大きくなっている点も図３と異なる。 In the pipe 101c provided with the heater of FIG. 10B, the fin 24a of the diffusing portion 51d is provided on the cylindrical member 23a, and the wide surface of the fin 24a faces the gas flow direction as in FIG. However, it differs from FIG. 3 in that the upper part of the fin 24a of the diffusion part 51d is inclined toward the upstream side of the gas flow. Moreover, the point from which the diameter of the pipe 12a of the part corresponding to the installation location of the heating means 13 is larger than the diameter of the pipe 12a of both ends differs from FIG.
　なお、拡散部５１ｄにおいて上述した筒状部材２３ａ及びフィン２４ａの材料は、第１実施形態の筒状部材２３及びフィン２４と同じようにステンレスが好適に用いられる。 In addition, as the material of the cylindrical member 23a and the fin 24a described above in the diffusion portion 51d, stainless steel is preferably used in the same manner as the cylindrical member 23 and the fin 24 of the first embodiment.
　これらの構成によっても、フィン２４、２４ａからの熱により昇温した雰囲気が流通ガスによって掻き回され、或いは昇温した流通ガス自身が掻き回されるため、配管１０１ａ～１０１ｃ内の中央部から周辺部にかけての温度分布をより一層均一にすることができる。更に、この現象が各ユニットで順次行われるため、配管１２、１２ａ内中央部から周辺部にかけて温度均一性が増すことになる。 Even in these configurations, the atmosphere heated by the heat from the fins 24 and 24a is stirred by the flowing gas, or the heated flowing gas itself is stirred. The temperature distribution over the part can be made more uniform. Further, since this phenomenon is sequentially performed in each unit, the temperature uniformity increases from the central part to the peripheral part in the pipes 12 and 12a.
　（ヒータを備えた配管の取付け方法の説明）
　次に、図３、図５、図６（ａ）、（ｂ）及び図７（ａ）、（ｂ）を参照しながら、上述のヒータを備えた配管１０１の排気配管への取付け方法ついて説明する。 (Explanation of how to install piping with heater)
Next, with reference to FIGS. 3, 5, 6 (a), 6 (b) and FIGS. 7 (a), (b), a method of attaching the pipe 101 equipped with the heater to the exhaust pipe will be described. To do.
　図５は、本発明の第１実施形態であるヒータを備えた配管の排気配管への取付け方法について示す斜視図（その１）である。図６（ａ）、（ｂ）は、本発明の第１実施形態であるヒータを備えた配管の別の配管への取付け方法について示す図（その２）である。図６（ａ）は斜視図であり、図６（ｂ）は図６（ａ）のＩ-Ｉ線に沿う断面図である。図７（ａ）は、本実施形態のヒータを備えた配管がエッチング装置の真空ポンプ１０６から除害装置１０７に至る間を繋ぐガス配管の一部に設置された例を示す模式図である。図７（ｂ）は、設置されたヒータを備えた配管の断面図である。図５及び図６においては、ヒータを備えた配管として図３に示す配管１０１を用い、図７においては、ヒータを備えた配管として図１０（ａ）に示す配管１０１ｂを用いている。配管１０１ｂの詳しい構成については後述する。 FIG. 5 is a perspective view (No. 1) showing a method of attaching the pipe provided with the heater according to the first embodiment of the present invention to the exhaust pipe. FIGS. 6A and 6B are views (No. 2) illustrating a method of attaching the pipe provided with the heater according to the first embodiment of the present invention to another pipe. 6A is a perspective view, and FIG. 6B is a cross-sectional view taken along the line II in FIG. 6A. FIG. 7A is a schematic view showing an example in which a pipe provided with the heater according to the present embodiment is installed in a part of a gas pipe that connects the vacuum pump 106 of the etching apparatus to the abatement apparatus 107. FIG.7 (b) is sectional drawing of piping provided with the installed heater. 5 and 6, the pipe 101 shown in FIG. 3 is used as the pipe provided with the heater, and in FIG. 7, the pipe 101b shown in FIG. 10A is used as the pipe provided with the heater. The detailed configuration of the pipe 101b will be described later.
　まず、図５に示すように、ヒータを備えた配管１０１と排気配管１０２及び１０３とを準備する。なお、ヒータを備えた配管１０１において、リード線部がヒータを備えた配管１０１の外に引き出された構成は省略している。 First, as shown in FIG. 5, a pipe 101 provided with a heater and exhaust pipes 102 and 103 are prepared. In addition, in the piping 101 provided with a heater, the structure by which the lead wire part was pulled out of the piping 101 provided with the heater is abbreviate | omitted.
　排気配管１０２は、有害ガスを排出するエッチングなどの装置の真空ポンプ１０６に接続され、排気配管１０３は、有害ガスの無害化のための処理装置１０７に接続されている。 The exhaust pipe 102 is connected to a vacuum pump 106 of an apparatus such as etching that discharges harmful gas, and the exhaust pipe 103 is connected to a processing device 107 for detoxifying harmful gas.
　排気配管１０２及び１０３は、加熱手段１３を備えた配管１０１の長さに相当する間隔をあけて対向している。排気配管１０２は、配管３１と配管３１の端部に設けられたフランジ３２とを有する。一方、排気配管１０３は、配管３３と配管３３の端部に設けられたフランジ３４とを有する。また、フランジ３２、３４には、それぞれ、ヒータを備えた配管１０１のセンターリングシール面１１ａに対応する位置に同じくセンターリングシール面３２ａ、３４ａを有する。なお、排気配管１０２でもセンターリングシール面３４ａと同じようなセンターリングシール面３２ａが形成されているが、図面上ではフランジ３２の陰になって見えない。 The exhaust pipes 102 and 103 are opposed to each other with an interval corresponding to the length of the pipe 101 provided with the heating means 13. The exhaust pipe 102 has a pipe 31 and a flange 32 provided at an end of the pipe 31. On the other hand, the exhaust pipe 103 includes a pipe 33 and a flange 34 provided at an end of the pipe 33. Further, the flanges 32 and 34 respectively have centering seal surfaces 32a and 34a at positions corresponding to the centering seal surface 11a of the pipe 101 provided with the heater. The exhaust pipe 102 is also formed with a centering seal surface 32a similar to the centering seal surface 34a, but cannot be seen behind the flange 32 in the drawing.
　次に、センターリング３５、３６を用意し、それぞれ配管１０２及び１０３の各センターリングシール面３２ａ、３４ａにセットする。なお、各センターリングシール面１１ａ、３２ａ、３４ａには、センターリング３５、３６を収納する溝が形成されているが、図５では省略している。 Next, center rings 35 and 36 are prepared and set on the center ring seal surfaces 32a and 34a of the pipes 102 and 103, respectively. In addition, although each centering seal surface 11a, 32a, 34a is formed with a groove for storing the centering 35, 36, it is omitted in FIG.
　次いで、ヒータを備えた配管１０１の両端のフランジ１１と、配管１０２及び１０３の各フランジ３２、３４とが対向するように位置させ、センターリング面３２ａ、３４ａに既にセットされているセンターリング３５、３６がそれぞれ各フランジ１１のセンターリングシール面１１ａにセットされるように接触させる。図６（ａ）は、このときの状態を示す。 Next, the flanges 11 at both ends of the pipe 101 provided with the heater are positioned so that the flanges 32 and 34 of the pipes 102 and 103 face each other, and the center rings 35a and 35a already set on the centering surfaces 32a and 34a, 36 are brought into contact with each other so as to be set on the centering seal surface 11a of each flange 11. FIG. 6A shows the state at this time.
　次に、排気配管１０３とヒータを備えた配管１０１のフランジ３４、１１同士の接触部を示す図６（ｂ）に代表して示すように、クランパ３７と図示しないネジによって、排気配管１０２とヒータを備えた配管１０１のフランジ３２、１１同士を締め付けてそれらの接触をより強固にするとともに、同じようにして排気配管１０３とヒータを備えた配管１０１のフランジ３４、１１同士を締め付けてそれらの接触をより強固にする。これにより、センターリング３５、３６によって、外部に対して配管１０１、１０２、１０３内部の気密性が保たれるようになる。 Next, as representatively shown in FIG. 6B showing the contact portion between the flanges 34 and 11 of the exhaust pipe 103 and the pipe 101 provided with the heater, the exhaust pipe 102 and the heater are connected by a clamper 37 and a screw (not shown). The flanges 32 and 11 of the pipe 101 provided with each other are tightened to make their contact stronger, and the flanges 34 and 11 of the pipe 101 provided with the exhaust pipe 103 and the heater are similarly tightened to contact each other. To make it stronger. Thereby, the airtightness inside the pipes 101, 102, 103 is maintained by the center rings 35, 36 with respect to the outside.
　なお、上述の説明では、排気配管１０２と１０３の間にヒータを備えた配管１０１を一つ接続したが、排気配管すなわち、エッチング装置等の真空ポンプ１０６排気口から除害装置１０７入口までの配管が長くなれば、配管内温度を適当な温度以上に保つためヒータを備えた配管１０１を複数個設置することが望ましい。その場合、図７（ａ）に示すように１個目のヒータを備えた配管１０１ｂを最上流すなわち真空ポンプ１０６の排気口にまず設置し、次は１個目の配管１０１ｂのヒータ効果がなくなる部分に２個目のヒータを備えた配管１０１ｂを設置する。このように行えば配管すべてにヒータが必要にならず、４ｍ程度の配管であれば１個で、さらに長い配管でも２個から３個で排気配管内のガス反応生成物の付着を極力防げる効果がある。図７（ｂ）は図７（ａ）のヒータを備えた配管の断面図である。図７（ａ）及び図７（ｂ）中、符号１０５は排気配管１０２、１０３と同じような排気配管を示し、他の符号に関して、図３、図５及び図６と同じ符号で示すものは、図３、図５及び図６と同じものを示す。 In the above description, one pipe 101 having a heater is connected between the exhaust pipes 102 and 103. However, the exhaust pipe, that is, the pipe from the exhaust port of the vacuum pump 106 such as an etching apparatus to the inlet of the abatement apparatus 107 is used. In order to keep the temperature in the pipe at an appropriate temperature or more, it is desirable to install a plurality of pipes 101 provided with heaters. In this case, as shown in FIG. 7A, the pipe 101b having the first heater is first installed at the uppermost stream, that is, the exhaust port of the vacuum pump 106, and then the heater effect of the first pipe 101b is lost. A pipe 101b having a second heater is installed in the part. In this way, all the pipes do not require a heater, and if the pipe length is about 4 m, it is only one, and even two or more long pipes can prevent the gas reaction product from adhering to the exhaust pipe as much as possible. There is. FIG.7 (b) is sectional drawing of piping provided with the heater of Fig.7 (a). 7 (a) and 7 (b), reference numeral 105 denotes an exhaust pipe similar to the exhaust pipes 102 and 103, and other reference numerals are the same as those shown in FIGS. 3, 5 and 6. The same thing as FIG.3, FIG.5 and FIG.6 is shown.
　以上のように、本発明の第１実施形態に係るヒータを備えた配管１０１によれば、ヒータを備えた配管１０１は、フランジ１１を介して配管１０１ごと排気配管１０２、１０３に取り付け可能となっているため、ヒータを備えた配管１０１を必要な箇所に簡単に設置することができ、これにより、ヒータの設置作業の能率を向上させることができる。これは、図１０（ａ）に示すヒータを備えた配管１０１ｂでも同様である。 As described above, according to the pipe 101 including the heater according to the first embodiment of the present invention, the pipe 101 including the heater can be attached to the exhaust pipes 102 and 103 together with the pipe 101 via the flange 11. Therefore, the pipe 101 provided with the heater can be easily installed at a necessary place, and thereby the efficiency of the heater installation work can be improved. The same applies to the pipe 101b provided with the heater shown in FIG.
　（第２の実施の形態）
　（ヒータ（加熱手段）を備えた配管の構成の説明）
　図８（ａ）～（ｃ）は、本発明の第２の実施の形態に係るヒータを備えた配管１０４の構成を示す図である。図８（ａ）は配管１０４の断面図であり、図８（ｂ）は（ａ）の右側から見た側面図であり、（ａ）はII-II線に沿う断面図に相当する。図８（ｃ）は加熱手段４０の斜視図である。 (Second Embodiment)
(Description of the configuration of the piping provided with a heater (heating means))
FIGS. 8A to 8C are diagrams showing the configuration of the pipe 104 provided with the heater according to the second embodiment of the present invention. 8A is a cross-sectional view of the pipe 104, FIG. 8B is a side view seen from the right side of FIG. 8A, and FIG. 8A corresponds to a cross-sectional view taken along the line II-II. FIG. 8C is a perspective view of the heating means 40.
　第２実施形態において、第１実施形態と異なるところは、図８（ｃ）に示す加熱手段４０、特に拡散部５３ｂの構成である。なお、図８（ａ）～（ｃ）において、図３と同じ符号で示すものは、図３と同じものである。 The second embodiment is different from the first embodiment in the configuration of the heating means 40 shown in FIG. 8C, particularly the diffusion portion 53b. In FIGS. 8A to 8C, the same reference numerals as those in FIG. 3 are the same as those in FIG.
　以下に、加熱手段４０、特に拡散部５３ｂの構成について詳しく説明する。 Hereinafter, the configuration of the heating means 40, particularly the diffusion portion 53b, will be described in detail.
　（加熱手段の構成）
　加熱手段４０は、図８（ａ）に示すように、ヒータ部５３ａと拡散部５３ｂとで構成される。 (Structure of heating means)
As shown in FIG. 8A, the heating means 40 includes a heater portion 53a and a diffusion portion 53b.
　ヒータ部５３aはカートリッジ型であり、内部中心の発熱体４１と、該発熱体４１の周囲を覆う絶縁物４２aと、それらを覆うシース部材４２ｂで構成された略棒状である。先端はシース部材４２ｂで覆われている。他端は９０度に曲げられておりリード線及び熱電対の導入部としている。 The heater section 53a is a cartridge type, and has a substantially rod shape including a heating element 41 at the center of the inside, an insulator 42a covering the periphery of the heating element 41, and a sheath member 42b covering them. The tip is covered with a sheath member 42b. The other end is bent at 90 degrees and serves as an introduction portion for a lead wire and a thermocouple.
　拡散部５３ｂは、ヒータ部５３ａの周囲を覆う円筒状の筒状部材４３と、筒状部材４３の表面に取り付けられた８枚の細長い板状のフィン４４とで構成されている。フィン４４は、図８（ａ）～（ｃ）に示すように、ヒータ部５３ａの中心から放射状に配管（管状部材）１２内壁に近接または接触する位置まで伸びており、かつ等間隔を置いて、かつ筒状部材４３の長手方向に沿って筒状部材４３の表面に配置される。言い換えれば、フィン４４は、筒状部材４３の表面周囲に、広い面がヒータ部５３ａの長手方向に平行になるように等間隔を置いて配置される。図では発熱体４１に対して平行にしているが、放熱効果を少し上げるため傾斜をつけて巻くような形態でもよい。また、この拡散部５３ｂは長手方向に一体に製作しているが、図のように複数個に分割してもよい。製作性を考えると分割型が好ましい。 The diffusing portion 53b includes a cylindrical tubular member 43 that covers the periphery of the heater portion 53a, and eight elongated fins 44 attached to the surface of the tubular member 43. As shown in FIGS. 8A to 8C, the fins 44 extend radially from the center of the heater portion 53a to a position close to or in contact with the inner wall of the pipe (tubular member) 12, and are equally spaced. And disposed on the surface of the cylindrical member 43 along the longitudinal direction of the cylindrical member 43. In other words, the fins 44 are arranged at equal intervals around the surface of the cylindrical member 43 so that a wide surface is parallel to the longitudinal direction of the heater portion 53a. Although it is parallel to the heating element 41 in the figure, it may be configured to be wound with an inclination in order to slightly increase the heat dissipation effect. Moreover, although this diffusion part 53b is manufactured integrally in the longitudinal direction, it may be divided into a plurality as shown in the figure. The split type is preferable in consideration of manufacturability.
　拡散部５３ｂの筒状部材４３及びフィン４４は、第１実施形態と同じように、半導体製造に使用される種々のガスに対する耐腐食性に優れ、かつ放熱部材及び熱伝導部材でもある、例えばステンレスを使用する。 As in the first embodiment, the cylindrical member 43 and the fin 44 of the diffusing portion 53b are excellent in corrosion resistance against various gases used in semiconductor manufacturing, and are also a heat radiating member and a heat conducting member, such as stainless steel. Is used.
　図８（ａ）、（ｂ）に示すように、この加熱手段４０を配管１２内に設置したとき、ヒータ部５３ａが配管１２の中心軸方向に沿ってかつ配管１２のほぼ中心部に設置されるとともに、ヒータ部５３ａの長手方向はガスの流れの方向と一致する。ヒータを備えた配管１０４内に導入されたガスは、ヒータ部５３ａの長手方向に沿って流れ、拡散部５３ｂのフィン４４の間を流通する。この拡散部５３ｂのフィン間は熱の拡散室を形成する。 As shown in FIGS. 8A and 8B, when this heating means 40 is installed in the pipe 12, the heater portion 53 a is installed along the central axis direction of the pipe 12 and substantially at the center of the pipe 12. In addition, the longitudinal direction of the heater portion 53a coincides with the direction of gas flow. The gas introduced into the pipe 104 provided with the heater flows along the longitudinal direction of the heater portion 53a and flows between the fins 44 of the diffusion portion 53b. A heat diffusion chamber is formed between the fins of the diffusion portion 53b.
　（効果）
　第２の実施形態に係るヒータを備えた配管１０４によれば、フィン４４がヒータ部５３ａの表面周囲に８枚、広い面がヒータ部５３ａの長手方向に平行になるように間隔を置いて配置されている。 (effect)
According to the pipe 104 provided with the heater according to the second embodiment, eight fins 44 are arranged around the surface of the heater portion 53a and spaced apart so that a wide surface is parallel to the longitudinal direction of the heater portion 53a. Has been.
　したがって、ガスの流通を妨げずに、加熱手段４０を配管１２の内部に容易に設置することができる。また、このため、配管１２内を効率良く加熱することができる。さらに、リボンヒータの場合のように配管全域に巻く必要もなく、Ｌ字型の構造の配管を備えたヒータ設置部も必要でないため、ヒータ設置部をシンプルな機構とすることができる。 Therefore, the heating means 40 can be easily installed inside the pipe 12 without disturbing the gas flow. For this reason, the inside of the piping 12 can be efficiently heated. Furthermore, unlike the case of the ribbon heater, there is no need to wrap around the entire area of the piping, and there is no need for a heater installation section having an L-shaped structure, so the heater installation section can be a simple mechanism.
　その他の構成は、第１の実施形態に係るヒータを備えた配管と同様な構成を有するので、第１の実施形態に係るヒータを備えた配管と同様な効果を有する。 Other configurations have the same configuration as the piping provided with the heater according to the first embodiment, and therefore have the same effect as the piping provided with the heater according to the first embodiment.
　（ヒータを備えた配管の変形例）
　図９（ｂ）、図１０（ｃ）、及び図１０（ｄ）は、第２実施形態の変形例のヒータを備えた配管の構成を示す断面図である。図中、図８と同じ符号で示すものは図８と同じものである。 (Modification of piping with heater)
FIG. 9B, FIG. 10C, and FIG. 10D are cross-sectional views showing the configuration of a pipe provided with a heater according to a modification of the second embodiment. In the figure, the same reference numerals as those in FIG. 8 are the same as those in FIG.
　図９（ｂ）のヒータを備えた配管１０４ａにおいて、拡散部のフィン４４ａが筒状部材４３ａに設けられ、フィン４４ａの広い面がガスの流れの方向に平行に配置されている点は図８と同じであるが、拡散部５３ｃのフィン４４ａが、ガスの流れに沿って複数に分離し、相互に間隔をおいて配置されている点が図８と異なる。 In the pipe 104a provided with the heater of FIG. 9B, the fin 44a of the diffusing portion is provided on the cylindrical member 43a, and the wide surface of the fin 44a is arranged in parallel to the gas flow direction. 8 is different from FIG. 8 in that the fins 44a of the diffusion portion 53c are separated into a plurality along the gas flow and are spaced from each other.
　図１０（ｃ）のヒータを備えた配管１０４ｂにおいて、加熱手段４０は図８と同じであるが、加熱手段４０の設置箇所に対応する部分の配管１２ａの直径が両端の配管１２ａの直径よりも大きくなっている点が異なる。 In the pipe 104b provided with the heater in FIG. 10C, the heating means 40 is the same as that in FIG. The difference is that it is getting bigger.
　また、図１０（ｄ）のヒータを備えた配管１０４ｃにおいて、拡散部５３ｃのフィン４４ａが筒状部材４３ａに設けられ、フィン４４ａの広い面がガスの流れの方向に平行に配置されている点は図８と同じであるが、拡散部５３ｃのフィン４４ａが、ガスの流れに沿って複数に分離し、相互に間隔をおいて配置されている点が図８と異なる。また、加熱手段４０ａの設置箇所に対応する部分の配管１２ａの直径が両端の配管１２ａの直径よりも大きくなっている点が図８と異なる。 Further, in the pipe 104c provided with the heater of FIG. 10D, the fins 44a of the diffusing portion 53c are provided on the cylindrical member 43a, and the wide surfaces of the fins 44a are arranged in parallel to the gas flow direction. FIG. 8 is the same as FIG. 8, but differs from FIG. 8 in that the fins 44a of the diffusion portion 53c are separated into a plurality along the gas flow and are spaced from each other. Moreover, the point from which the diameter of the piping 12a of the part corresponding to the installation location of the heating means 40a is larger than the diameter of the piping 12a of both ends differs from FIG.
　なお、拡散部５３ｃにおいて上述した筒状部材４３ａ及びフィン４４ａの材料は、第２実施形態の筒状部材４３及びフィン４４と同じようにステンレスが好適に用いられる。また、ヒータ部の長さと同じ位の一つの筒状部材４３ａにすべてのフィン４４ａを設置してもよいし、ヒータ部の長さよりも短い筒状部材４３ａと、筒状部材４３ａを一回りするように設けられた複数のフィン４４ａからなるフィン群とを一組としてユニットを形成し、複数のユニットを順次ヒータ部に挿入して設置するようにしてもよい。 In addition, as the material of the cylindrical member 43a and the fin 44a described above in the diffusing portion 53c, stainless steel is preferably used as in the cylindrical member 43 and the fin 44 of the second embodiment. Moreover, all the fins 44a may be installed in one cylindrical member 43a as long as the length of the heater part, or the cylindrical member 43a shorter than the length of the heater part and the cylindrical member 43a are turned around. A unit may be formed by combining the fin group including the plurality of fins 44a provided as described above, and the plurality of units may be sequentially inserted into the heater unit.
　これらの構成によっても、フィン４４、４４ａからの熱により昇温した雰囲気が流通ガスによって掻き回され、或いは昇温した流通ガス自身が掻き回されるため、配管１０４ａ～１０４ｃ内の中央部から周辺部にかけての温度分布をより一層均一にすることができる。更に、この現象が各ユニットで順次行われるため、配管１２、１２ａ内中央部から周辺部にかけての温度均一性が増すことになる。 Even in these configurations, the atmosphere heated by the heat from the fins 44 and 44a is stirred by the flowing gas, or the heated flowing gas itself is stirred. The temperature distribution over the part can be made more uniform. Furthermore, since this phenomenon is sequentially performed in each unit, the temperature uniformity from the central part to the peripheral part in the pipes 12 and 12a is increased.
　（その他の実施の形態）
　以上、実施の形態によりこの発明を詳細に説明したが、この発明の範囲は上記実施の形態に具体的に示した例に限られるものではなく、この発明の要旨を逸脱しない範囲の上記実施の形態の変更はこの発明の範囲に含まれる。 (Other embodiments)
Although the present invention has been described in detail with the embodiments, the scope of the present invention is not limited to the examples specifically shown in the above embodiments, and the above embodiments within the scope of the present invention are not deviated. Variations in form are within the scope of this invention.
　例えば、上記実施形態では、拡散部５１ｃ、５１ｄ、５３ｂ、５３ｃの筒状部材２３、２３ａ、４３、４３ａ及びフィン２４、２４ａ、４４、４４ａの材料としてステンレスを用いているが、これに限られない。半導体製造に使用されるガスに対する耐食性を有する金属材料であればよい。金属材料は、耐食性を有するとともに、特に放熱や熱伝導に優れた部材であればさらに好ましい。 For example, in the above embodiment, stainless steel is used as the material of the cylindrical members 23, 23a, 43, 43a and the fins 24, 24a, 44, 44a of the diffusing portions 51c, 51d, 53b, 53c. Absent. Any metal material may be used as long as it has corrosion resistance to the gas used for semiconductor manufacturing. The metal material is more preferably a member having corrosion resistance and particularly excellent in heat dissipation and heat conduction.
　また、上述した拡散部５１ｃ、５１ｄ、５３ｂ、５３ｃのフィン２４、２４ａ、４４、４４ａの表面は平滑であるが、凹凸を形成して表面積を増やし、放熱性を向上させてもよい。 Further, although the surfaces of the fins 24, 24a, 44, and 44a of the diffusion portions 51c, 51d, 53b, and 53c described above are smooth, unevenness may be formed to increase the surface area and improve heat dissipation.
　また、ヒータ部５１ａの長手方向に沿って所定の間隔をおいて規則的に配置される複数のフィン群５２を設け、かつフィン群５２のフィン２４はヒータ部５１ａの周囲を相互に間隔をおいて一回りするように設けられているが、ヒータ部５１ａの周囲にフィン２４をランダムに配置してもよい。この変形例はまた、図９（ａ）、図１０（ｂ）の加熱手段１３ａにも適用可能である。 In addition, a plurality of fin groups 52 regularly arranged at predetermined intervals along the longitudinal direction of the heater portion 51a are provided, and the fins 24 of the fin groups 52 are spaced from each other around the heater portion 51a. However, the fins 24 may be randomly arranged around the heater portion 51a. This modification is also applicable to the heating means 13a shown in FIGS. 9 (a) and 10 (b).
　また、発明のヒータを備えた配管は、排気配管の一部に適用されたが、単独で炉の代わりに用いることもできる。 Moreover, although the pipe provided with the heater of the invention was applied to a part of the exhaust pipe, it can be used alone instead of the furnace.
１１、３２、３４　フランジ
１１ａ、３２ａ、３４ａ　センターリングシール面
１２、１２ａ　配管（管状部材）
１３、１３ａ、４０、４０ａ　加熱手段
１４　リード線
１５　熱電対（温度計測手段）
２３、２３ａ、４３、４３ａ　筒状部材
２４、２４ａ、４４、４４ａ　フィン
３１、３３　配管
３５、３６　センターリング
５１ａ、５３ａ　ヒータ部
５１ｂ　拡散部ユニット
５１ｃ、５１ｄ、５３ｂ、５３ｃ　拡散部
５２　フィン群
１０１、１０１ａ～１０１ｃ、１０４、１０４ａ～１０４ｃ　ヒータを備えた配管
１０２、１０３、１０５　排気配管
１０６　エッチング装置の真空ポンプ
１０７　除害装置 11, 32, 34 Flange 11a, 32a, 34a Center ring seal surface 12, 12a Piping (tubular member)
13, 13a, 40, 40a Heating means 14 Lead wire 15 Thermocouple (temperature measuring means)
23, 23a, 43, 43a Tubular members 24, 24a, 44, 44a Fins 31, 33 Piping 35, 36 Centering 51a, 53a Heater 51b Diffusion unit 51c, 51d, 53b, 53c Diffusion unit 52 Fin group 101, 101a to 101c, 104, 104a to 104c Pipes 102, 103, 105 provided with heaters Exhaust pipe 106 Vacuum pump 107 of etching apparatus Detoxifying apparatus

Claims (8)

  1. 　管状部材と、前記管状部材の内側に設けられた加熱手段とを有し、
    　前記加熱手段は、ヒータ部と、該ヒータ部の周囲に配置された複数のフィンを備えた熱の拡散部とを有することを特徴とする加熱手段を備えた配管。     A tubular member, and heating means provided inside the tubular member,
    The heating unit includes a heater unit and a heat diffusion unit including a plurality of fins arranged around the heater unit.
  2. 　前記ヒータ部は、少なくとも発熱部が棒状であり、前記複数のフィンは、前記ヒータ部の周囲に相互に間隔をおいて一回りするように配置されていることを特徴とする請求項１記載の加熱手段を備えた配管。 2. The heater according to claim 1, wherein at least the heat generating part has a rod shape, and the plurality of fins are arranged around the heater part so as to make a round with a space therebetween. Piping with heating means.
  3. 　前記複数のフィンは、前記ヒータ部の長手方向に沿って間隔を置いて配置された複数のフィン群で構成され、一つの該フィン群は前記ヒータ部の周囲を相互に間隔をおいて一回りするように配置されていることを特徴とする請求項２記載の加熱手段を備えた配管。 The plurality of fins are composed of a plurality of fin groups arranged at intervals along the longitudinal direction of the heater portion, and the one fin group makes one turn around the heater portion at intervals. The piping provided with the heating means according to claim 2, wherein the piping is arranged to do so.
  4. 　前記フィンの面は、前記ヒータの長手方向に向き、又は前記ヒータの長手方向に対して斜めを向いていることを特徴とする請求項３記載の加熱手段を備えた配管。 4. A pipe provided with heating means according to claim 3, wherein the surface of the fin is oriented in the longitudinal direction of the heater or obliquely with respect to the longitudinal direction of the heater.
  5. 　前記フィンの面は、前記ヒータ部の長手方向に平行であり、又は該長手方向に対して傾斜していることを特徴とする請求項２に記載の加熱手段を備えた配管。 The pipe with heating means according to claim 2, wherein the surface of the fin is parallel to the longitudinal direction of the heater section or is inclined with respect to the longitudinal direction.
  6. 　前記拡散部は、前記ヒータ部の周囲を覆う筒状部材と、該筒状部材に取り付けられた前記複数のフィンとで構成されたことを特徴とする請求項１乃至５の何れか一項に記載の加熱手段を備えた配管。 The said diffusion part was comprised with the cylindrical member which covers the circumference | surroundings of the said heater part, and these fins attached to this cylindrical member, The Claim 1 characterized by the above-mentioned. Piping provided with the heating means described.
  7. 　前記ヒータ部は、中心部の発熱体と、該発熱体の周囲を覆う絶縁物と、それらを覆うシース部材とで構成された略棒状であって、一端が前記シース部材で封止され、他端は少なくともリード線導入部としたカートリッジ型であることを特徴とする請求項１に記載の加熱手段を備えた配管。 The heater portion is a substantially rod-like shape composed of a central heating element, an insulator covering the periphery of the heating element, and a sheath member covering them, and one end is sealed with the sheath member, The pipe having the heating means according to claim 1, wherein the end is at least a cartridge type having a lead wire introduction portion.
  8. 　前記加熱手段を備えた配管は、両端にフランジを備え、該フランジを介して他の配管に取り付け可能となっていることを特徴とする請求項１乃至７の何れか一項に記載の加熱手段を備えた配管。 The heating means according to any one of claims 1 to 7, wherein the pipe provided with the heating means includes flanges at both ends, and can be attached to another pipe via the flange. With piping.
PCT/JP2009/058518 2008-05-09 2009-04-30 Piping provided with heating means WO2009136594A1 (en)

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JP2008123003A JP2009270659A (en) 2008-05-09 2008-05-09 Pipe with heating means

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KR101347484B1 (en) 2009-06-01 2014-01-02 가부시키가이샤 알파테크 Piping and processing system both provided with heating means
CN103688096B (en) * 2011-05-19 2016-09-28 巴斯夫欧洲公司 For carrying the pipeline of fused salt
KR101239148B1 (en) * 2011-07-19 2013-03-06 (주)티티에스 Exhaust apparatus
ES2537450T3 (en) * 2012-09-10 2015-06-08 Norma Germany Gmbh Plug-in connector
KR101359895B1 (en) 2012-09-19 2014-02-07 지승일 Heater for pipe
KR101359894B1 (en) 2012-09-19 2014-02-07 지승일 Heater for pipe and manufacturing method thereof

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JPS5736529U (en) * 1980-08-08 1982-02-26
JPH08320096A (en) * 1995-05-26 1996-12-03 Kurita Kogyo:Kk Heat insulating pipe system
JP2006038270A (en) * 2004-07-23 2006-02-09 Matsushita Electric Ind Co Ltd Fluid heating device and various washing devices using same

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Publication number Priority date Publication date Assignee Title
JPS5736529U (en) * 1980-08-08 1982-02-26
JPH08320096A (en) * 1995-05-26 1996-12-03 Kurita Kogyo:Kk Heat insulating pipe system
JP2006038270A (en) * 2004-07-23 2006-02-09 Matsushita Electric Ind Co Ltd Fluid heating device and various washing devices using same

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