WO2009119032A1

WO2009119032A1 - Operation deviation reporting device and operation deviation reporting method

Info

Publication number: WO2009119032A1
Application number: PCT/JP2009/001145
Authority: WO
Inventors: 尾池洋志
Original assignee: 株式会社アドバンテスト
Priority date: 2008-03-25
Filing date: 2009-03-13
Publication date: 2009-10-01
Also published as: TW200944819A

Abstract

The operational situation of a testing device is grasped in comparison to other testing devices. An operation deviation reporting device is provided with an operational situation measurement unit which measures a time wherein the testing device which tests an element to be tested is in a predetermined specific operational situation, an average calculation unit which calculates the average of the ratio wherein the testing device was in the specific operational situation on the basis of the time measured by the operational situation measurement unit, a deviation calculation unit which calculates the deviation of the ratio of the time wherein the testing device was in the predetermined operational situation in a specific period to the average calculated by the average calculation unit, and a deviation reporting unit which reports the magnitude of the deviation calculated by the deviation calculation unit.

Description

Operating deviation notification device and operating deviation notification method

The present invention relates to an operation deviation notification device and an operation deviation notification method. In particular, the present invention relates to an operation deviation notification device and an operation deviation notification method as to whether or not a test apparatus for testing a device under test is in a predetermined specific operation state.

This application is related to the following Japanese application and claims priority from the following Japanese application. For designated countries where incorporation by reference of documents is permitted, the contents described in the following application are incorporated into this application by reference and made a part of this application.
1. Japanese Patent Application No. 2008-078889 Filing Date March 25, 2008 Japanese Patent Application No. 2008-297264 Filing Date November 20, 2008

2. Description of the Related Art Conventionally, a semiconductor test apparatus that tests a device under test such as a semiconductor device performs self-diagnosis by a program (for example, Patent Document 1). In this semiconductor test apparatus, pass and fail are determined by self-diagnosis.
JP 2002-90427 A

In the semiconductor test apparatus, an abnormality is detected by determining that a failure has occurred by self-diagnosis, but recovery to the abnormality is performed by a maintenance person of the semiconductor test apparatus. In that case, if the semiconductor test equipment failure is not communicated to the maintenance personnel because the user of the semiconductor test equipment and the maintenance staff belong to different companies, the semiconductor testing equipment will not recover, It will remain. On the other hand, it is conceivable to contact the maintenance personnel every time an abnormality is detected in the semiconductor test equipment, but the maintenance personnel will be able to restore the abnormality even if the abnormality can be recovered by replacement parts at hand of the user. However, it is not efficient.

Therefore, an object of one aspect of the present invention is to provide an operation deviation notification device and an operation deviation notification method capable of solving the above-described problems. This object is achieved by a combination of features described in the independent claims. The dependent claims define further advantageous specific examples of the present invention.

In the first embodiment of the present invention, based on the operating state measuring unit that measures the time that is a specific operating state determined in advance by the test apparatus that tests the device under test, and the time measured by the operating state measuring unit. The average value calculation unit that calculates the average value of the ratio of the test device in a specific operation status, and the average operation value that is calculated by the average value calculation unit corresponds to the specific operation status in a specific period of the test device. An operational deviation notification device is provided that includes a deviation calculation unit that calculates a deviation of the ratio and a deviation notification unit that performs notification indicating the magnitude of the deviation calculated by the deviation calculation unit.

In the second embodiment of the present invention, the test apparatus for testing the device under test measures an operating condition measuring step for measuring a predetermined operating condition, and the time measured by the operating condition measuring step. The average calculation step for calculating the average value of the ratio of the test apparatus in the specific operation status, and the ratio of the test apparatus in the specific operation status in the specific period of the test apparatus with respect to the average value calculated by the average calculation step There is provided an operating deviation notification method comprising a deviation calculation step for calculating the deviation of the deviation, and a deviation notification step for performing notification indicating the magnitude of the deviation calculated by the deviation calculation step.

Note that the above summary of the invention does not enumerate all the necessary features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

It is the schematic which shows the whole system containing the working deviation notification apparatus 100 of this embodiment. 3 is a block diagram showing functional blocks of an operating deviation notification device 100. FIG. It is an example of the information of the operation condition which the operation condition storage part 150 stores. The relationship between test time (1), failure time (2), and standby time (3) within the measurement period is shown. It is an example of the distribution of the operation rate based on test time. It is an example of distribution of the non-operation rate based on failure time. It is an example of distribution of the non-operation rate based on standby time.

Explanation of symbols

20 testing devices, 22 testing devices, 24 testing devices, 26 testing devices, 28 testing devices, 30 factories, 32 factories, 40 users, 42 users, 50 networks, 100 operating deviation notification devices, 110 operating status measuring units, 120 average values Calculation unit, 130 Deviation calculation unit, 140 Deviation notification unit, 150 Operation status storage unit

Hereinafter, the (1) aspect of the present invention will be described through embodiments of the invention. However, the following embodiments do not limit the invention according to the scope of claims, and the features described in the embodiments are as follows. Not all combinations are essential for the solution of the invention.

FIG. 1 is a schematic diagram showing the entire system including the operating deviation notification device 100 of the present embodiment. The operating deviation notification device 100 measures the operating status of the test device 20 and notifies the operating rate deviation of the testing device 20 based on the operating status. The test apparatus 20 tests a device under test such as a semiconductor memory or semiconductor logic.

As shown in FIG. 1, the operating deviation notification device 100 communicates with the

test devices

20, 22, 24, 26, and 28 via a network 50. In the following description, it is assumed that the

test apparatuses

20 and 22 are used in the same factory 30 and the test apparatus 24 is used in another factory 32. Further, the

factories

30 and 32 belong to the user 40, and the other users 42 use the

test devices

26 and 28. Note that each of the test apparatuses 20 and the like does not have to be connected to the network 50, as long as the operation status of the test apparatus 20 or the like can be notified to the operation deviation notification apparatus 100.

FIG. 2 is a block diagram showing functional blocks of the operation deviation notifying device 100. The operating deviation notification device 100 includes an operating status measurement unit 110 that acquires the operating status from the test apparatus 20 and the like, an operating status storage unit 150 that stores information on the operating status acquired by the operating status measurement unit 110, and an operating status storage unit. Calculated by an average value calculation unit 120 that calculates an average value based on 150 information, a deviation calculation unit 130 that calculates a deviation of an operation rate or the like of a specific test apparatus 20 at a specific time, and a deviation calculation unit 130 A deviation notifying unit 140 for notifying the deviation.

The operating status measuring unit 110 measures the time that is a specific operating status determined in advance by the test apparatus 20 or the like. In this case, the operation status measurement unit 110 acquires the time when the plurality of

test apparatuses

20, 22, 24, 26, and 28 are in a specific operation status and stores them in the operation status storage unit 150. As a specific operation status, the operation deviation notification device 100 measures one or two of a test time, a failure time, and a standby time.

Here, the test time refers to the time during which the device under test is put into the test apparatus 20 or the like and the test apparatus 20 is testing. The operating state measurement unit 110 measures the time during which the test apparatus 20 is actually testing, for example, by accumulating the time during which signals are input and output between the device under test and the test apparatus 20.

The failure time refers to a time during which the test apparatus 20 cannot perform a test even if the device under test is inserted into the test apparatus 20 or the like. The operating state measuring unit 110 detects the time when the test apparatus 20 or the like has failed, for example, after the self-diagnostic program built in the test apparatus 20 or the like detects a failure, the program then detects the path. It is measured by accumulating the time until.

The standby time refers to a time during which the test element can be tested if it is inserted into the test apparatus 20 or the like, but the test element is not actually inserted. That is, it means the time that is neither the test time nor the failure time. The operating deviation notification device 100 indicates the standby time, for example, if there is no signal input / output between the device under test and the test device 20, and the self-diagnostic program does not detect a failure, that is, the most recent diagnosis result is a pass. Measure by accumulating a certain time.

FIG. 3 is an example of operation status information stored in the operation status storage unit 150. The operation status storage unit 150 stores information on the operation status measured by the operation status measurement unit 110. In the form shown in FIG. 3, the operation status storage unit 150 stores a measurement period, a test time, and a failure time in association with a user ID, a factory ID, and a test apparatus ID. Here, the user ID and the factory ID may be stored as separate tables in association with the test apparatus ID. The measurement period is, for example, one month, but may be longer or shorter than this, and is preferably equal to or longer than the length of the specific period in which the deviation calculation unit 130 calculates the deviation. In this case, the measurement period may be a cumulative period from the past, may be a specific period, or may be the entire period such as a monthly period, or any period within it.

FIG. 4 shows the relationship between test time (1), failure time (2), and standby time (3) within the measurement period. As shown in FIG. 4, the total of the test time (1), failure time (2), and standby time (3) is the measurement period. Therefore, the operation status measurement unit 110 can calculate another time by measuring any two times of the three periods.

The average value calculation unit 120 calculates an average value of the ratio of the test apparatus 20 or the like in a specific operation state based on each time measured by the operation state measurement unit 110 and stored in the operation state storage unit 150. . For example, the average value calculation unit 120 acquires the test times “730 hours” and “725 hours” of the plurality of

test apparatuses

20 and 22 indicated by the test apparatus IDs “T0020” and “T0022” as operating hours, and uses them. By adding up and dividing by the measurement period “744 hours” (= 31 days) and the number of individuals 2 of the

test devices

20 and 22 used in the calculation, the average of “operation rate” as a specific operation status based on the test time The value “97.8%” is calculated.

Similarly, the average value calculation unit 120 acquires the failure times “10 hours” and “16 hours” of the test apparatus IDs “T0020” and “T0022” as non-working hours and adds them up to the measurement period “744 hours”. And the average value “1.1%” of the non-operation rate based on the failure time is calculated by dividing by the number of individuals 2 of the

test devices

20 and 22 used in the calculation. Further, the average value calculation unit 120 calculates the standby time “4 hours” by subtracting the test time “730 hours” and the failure time “10 hours” of the test apparatus ID “T0020” from the measurement period “744 hours”. . Based on the standby time calculated in this way, the average value calculating unit 120 calculates the average value “0.9%” of the non-operation rate based on the standby time by the same calculation as in the case of the failure time.

In the above description, the average value calculation unit 120 calculates the average value from the two

test apparatuses

20 and 22, but the number is not limited to two and is preferably larger. In addition, the average value calculation unit 120 calculates the average value of the same period in the plurality of test apparatuses 20 or the like, but instead of this, a plurality of periods in the plurality of test apparatuses 20 or the like, for example, monthly in one year You may calculate the average value which averaged the operating condition of this over the said one year.

The deviation calculation unit 130 calculates a deviation of a ratio in a specific operation state in a specific period of the specific test apparatus 20 or the like with respect to the average value calculated by the average value calculation unit 120. In this case, when the average value calculation unit 120 calculates the average value of the operation rate based on the test time as the specific operation status, the deviation calculation unit 130 performs a test in a specific period of the specific test apparatus 20 or the like. Calculate the deviation of availability based on time. In the example illustrated in FIG. 3, the deviation calculation unit 130 acquires the average value “97.8%” of the operation rate based on the test time from the average value calculation unit 120. Furthermore, the deviation calculating unit 130 operates the operation rate “98.1%” in a specific period of the specific test apparatus, for example, the test apparatus 20 specified by the test apparatus ID “T0020”, for example, the measurement period “744 hours”. (= 730/744) is calculated. Based on these, the deviation calculation unit 130 calculates the deviation “0.3%”.

Similarly, when the average value calculating unit 120 calculates the average value of the non-operating rate based on the failure time as the specific operating status, the deviation calculating unit 130 detects a failure in a specific period of the specific test apparatus 20 or the like. Calculate the deviation of non-operating rate based on time. Further, the deviation calculating unit 130, when the average value calculating unit 120 calculates the average value of the non-operating rate based on the standby time as the specific operation status, the standby time in a specific period of the specific test apparatus 20 or the like. Calculate the deviation of non-operating rate based on.

The deviation notifying unit 140 performs notification indicating the magnitude of the deviation calculated by the deviation calculating unit 130. In this case, the deviation notification unit 140 may transmit the notification to the test apparatus 20 corresponding to the deviation, may be displayed on the screen of the operating deviation notification apparatus 100, or the magnitude of the deviation This may be stored in the operating status storage unit 150 in association with the test apparatus ID or the like. Further, the deviation notification unit 140 may perform notification indicating that the specific test apparatus is in an abnormal state when the deviation in a specific period of the specific test apparatus 20 or the like is out of a predetermined range. Thereby, it can be recognized that the specific test apparatus 20 is different in operating condition from the other test apparatuses 22 and the like. In addition, it is possible to investigate the cause of the different operating status and to deal with it. In particular, when an abnormal state is notified based on the deviation of the non-operation rate, the non-operation rate deviation based on the failure time and the non-operation rate deviation based on the standby time can be distinguished and notified. As a result, when the non-operation rate is high, it is possible to determine whether to recover due to a failure or to shorten the standby time, and to deal with it.

FIG. 5 is an example of the distribution of operation rate based on the test time. As shown in FIG. 5, the average value calculation unit 120 calculates the average value of the operation rate, i.e., when the number of specimens such as the test apparatus 20 is large, the measurement period is long, or the like, You may approximate the appearance frequency of a sample by normal distribution. In this case, the average value calculation unit 120 may store the average value, variance, standard deviation, absolute deviation (also referred to as average deviation), or the like in the operation status storage unit 150. In addition, although the average value of the operation rate based on the test time is predicted to be close to 100%, for example, 90% or more, it does not exceed 100%.

In the example shown in FIG. 5, the deviation notification unit 140 sets a threshold of an operation rate lower than the average value. That is, the deviation notification unit 140 sets the operation rate from 100% to the threshold within a predetermined range. This threshold value is set in advance, and is stored in, for example, the operation status storage unit 150. The threshold is a value as a deviation, for example. When the threshold is a positive value, the boundary of the predetermined range is higher than the average value. When the threshold is a negative value, the boundary is lower than the average value. It is in.

The deviation notifying unit 140 compares the deviation vt1 of the operating rate of the test apparatus 20 calculated by the deviation calculating unit 130 with a threshold value, and the deviation vt1 is within a predetermined range, so that the operating state of the test apparatus 20 is normal. Judge. On the other hand, the deviation notifying unit 140 determines that the test apparatus 22 is in an abnormal state because the operating rate deviation vt2 of the test apparatus 22 is out of the predetermined range, and makes a notification to that effect. Thereby, it is possible to discover that a specific test device 22 has a lower operation rate than other test devices 20 or the like, and the user of the operation deviation notification device 100 or the user 40 of the test device 22 can change the operation rate. It is possible to take measures such as investigating the cause of the low level and taking action to increase the operating rate.

FIG. 6 is an example of a non-operation rate distribution based on the failure time. Here, it may be approximated by a normal distribution as in the case of FIG. In addition, although the average value of the non-operating rate based on the failure time is predicted to be close to 0%, for example, 10% or less, it does not exceed 0% and become negative.

In the example illustrated in FIG. 6, the deviation notification unit 140 sets a threshold value for the non-operation rate that is higher than the average value. That is, the deviation notification unit 140 sets the non-operation rate from 0% to the threshold within a predetermined range. This threshold value is set in advance, and is stored in, for example, the operation status storage unit 150. Further, as in the case of FIG. 5, the deviation notification unit 140 compares the deviation vb2 of the non-operation rate based on the failure time of the test apparatus 20 calculated by the deviation calculation unit 130 with the threshold value, and the deviation vb2 is within a predetermined range. Therefore, it is determined that the operating status of the test apparatus 20 is normal. On the other hand, since the deviation vb1 of the non-operation rate based on the failure time of the test apparatus 22 is out of the predetermined range, the deviation notification unit 140 determines that the test apparatus 22 is in an abnormal state and notifies that fact. Thereby, it can discover that a specific test apparatus 22 has a high non-operation rate compared with the other test apparatus 20 grade | etc., By this. In particular, since the determination is based on the non-operation rate based on the failure time, the user of the operation deviation notification device 100 or the user 40 of the test device 22 investigates the cause of the long time from the failure to the recovery and takes measures for it. Measures such as raising the operating rate.

FIG. 7 is an example of a non-operating rate distribution based on the standby time. Here, it may be approximated by a normal distribution, and the average value of the non-operating rate is close to 0% but never becomes negative as in the case of FIG. In the example illustrated in FIG. 7, as in the case of FIG. 6, the deviation notification unit 140 sets a threshold value for a non-operation rate higher than the average value and stores the threshold value in the operation status storage unit 150 in advance.

The deviation notification unit 140 compares the deviation vw2 of the non-operation rate based on the standby time of the test apparatus 20 calculated by the deviation calculation unit 130 with a threshold value, and the deviation vw2 is within a predetermined range. Judge that the situation is normal. On the other hand, the deviation notifying unit 140 determines that the test apparatus 22 is in an abnormal state because the non-operating rate deviation vw1 based on the failure time of the test apparatus 22 is out of the predetermined range, and performs a notification to that effect. Thereby, it can discover that a specific test apparatus 22 has a high non-operation rate compared with the other test apparatus 20 grade | etc., By this. In particular, since the determination is based on the non-operation rate based on the standby time, the user of the operation deviation notification device 100 or the user 40 of the test device 22 investigates the cause of the test device 20 being usable but not used. Measures can be taken to increase the operating rate.

It should be noted that the above judgment of the deviation notification unit 140 in FIGS. 5 to 7 can be made regardless of whether the operating rate and the non-operating rate are approximated by a normal distribution. When approximating the operating rate and the non-operating rate with a normal distribution, the deviation calculating unit 130 calculates the deviation value of the test apparatus 20, and the deviation notifying unit 140 compares the deviation value of the testing apparatus 20 with the threshold value. May be. In the forms shown in FIG. 5 to FIG. 7, the threshold value may be an operating rate distribution, a variance in a non-operating rate distribution, a standard deviation σ, an absolute deviation, or n times of them, respectively. Good. Further, the threshold value may be set by the number (number ratio) deviating from a predetermined range in the frequency distribution. For example, when the occupancy rate distribution is approximated by a normal distribution, 90% of the entire distribution is in the range of about ± 1.64σ from the average, so the occupancy rate is calculated by setting the threshold to + 1.64σ. The test apparatus 20 corresponding to the operation rate included in about 5% ((100-90) / 2) deviating from the average with respect to the entire number of the numerical values obtained can be specified.

In addition, the deviation notifying unit 140 determines that the deviation of the operating rate based on the test time is outside the predetermined range, the deviation of the non-operating rate based on the failure time is outside the predetermined range, and the deviation of the non-operating rate based on the standby time. May be notified that the test apparatus is in an abnormal state in at least one of the cases where the test apparatus is out of the predetermined range. In this case, the deviation notification unit 140 may change the predetermined range in the test time, the predetermined range in the failure time, and the predetermined range in the standby time. In particular, the deviation notification unit 140 may set the predetermined range in the failure time to be narrower than other predetermined ranges when it is desired to pay attention due to an abnormality caused by a failure. Similarly, the deviation notification unit 140 may set the predetermined range in the standby time to be narrower than other predetermined ranges when it is desired to pay attention to the standby time.

In the above embodiment, the deviation calculating unit 130 calculates the deviation of the specific test apparatus 20, but the object for calculating the deviation is not limited to this. As another form, the deviation calculation unit 130 calculates a deviation between the average value of the operation status of the plurality of

test apparatuses

20 and 22 used in a specific factory 30 and the average value calculated by the average value calculation unit 120. May be. Thereby, the abnormality of the operation condition in the factory 30 whole can be discovered. As yet another form, the deviation calculation unit 130 calculates a deviation between the average value of the operating status of the

test apparatuses

20, 22, and 24 used by the specific user 40 and the average value calculated by the average value calculation unit 120. It may be calculated. Thereby, the abnormality of the operation condition in the user 40 whole can be discovered.

Further, the average value calculation unit 120 may calculate an average value of a plurality of measurement periods in a specific test apparatus 20 instead of calculating an average value of the plurality of test apparatuses 20 and the like. Here, the operation status measurement unit 110 may add test times and the like measured in a plurality of measurement periods to the operation status storage unit 150, or change the test time and the like in the old measurement period to the test time and the like in the new measurement period. The operation status storage unit 150 may store the test time for a certain latest period by rewriting.

In the above embodiment, the average value calculation unit 120 calculates the average value using the actual measurement value of the operation status of the test apparatus 20 and the like acquired by the operation status measurement unit 110. Not limited. As another example, the operation status storage unit 150 stores the actual value data of the operation status of the entire factory received from the user 40 or the like, and the average value calculation unit 120 calculates the average value using the data. May be. Thereby, even when the user 40 newly starts using the test apparatus 20, even when there is no past actual measurement value for the test apparatus 20, the deviation can be calculated. Further, in this case, the average value calculation unit 120 calculates the average value from the method of calculating the average value using the actual value data of the operation condition of the entire factory received from the user 40 or the like when the predetermined condition is satisfied. You may switch to the method of calculating an average value using the measured value of the operating condition of the test apparatus 20 etc. which the measurement part 110 acquired. Here, the predetermined condition is preferably a condition that the number of data has become statistically significant. For example, after a certain period of time has elapsed since the start of actual measurement of the operating status of the test apparatus 20, or the test apparatus 20 For example, the number has reached a predetermined number. In addition, as another predetermined condition, when the actual measured value of the operation status of the test apparatus 20 or the like is abnormally low with respect to the average value calculated from the actual value data of the actual operating status of the entire factory, the actual measured value is set. You may switch to the calculation method of the average value based on.

Furthermore, the test apparatus 20 can be efficiently leased using the above embodiment. In this case, first, assuming a working status, for example, a test time, a unit-based unit lease fee corresponding to the assumed value of the working status is set. When it is assumed that the operating rates of the plurality of test apparatuses 20 are high as a whole, that is, the test time is long, and when the variance is assumed to be low, the unit lease fee is set low. The test device 20 is leased to the user 40 with the unit lease fee, and the actual value of the operation status of the test device 20 related to the lease is acquired using the operation deviation notification device 100 of the above-described embodiment. The lease fee of the user 40 is determined in proportion and the lease fee is collected.

Here, the integration of the expected value of the operating status and the lease fee is “the total amount of lease fee that is expected to be collected”. Further, the integral of the actual measured value of the operation status of the plurality of test devices 20 obtained from the operation deviation notification device 100 and the lease fee is “the total amount of the actual lease fee that can be collected”. Therefore, the difference between “the total amount of lease payments that can be collected” and “the total amount of actual lease payments that can be collected” is calculated as a predicted risk, that is, an opportunity loss. Furthermore, by calculating how the unit lease fee should be set so that this opportunity loss does not occur, the unit lease fee for the period can be corrected more appropriately.

As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

The execution order of each process such as operations, procedures, steps, and stages in the apparatus, system, program, and method shown in the claims, the description, and the drawings is particularly “before” or “prior”. It should be noted that they can be implemented in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flow in the claims, the description, and the drawings, even if it is described using “first”, “next”, etc. for the sake of convenience, it means that it is essential to carry out in this order. is not.

Claims

An operating condition measuring unit that measures the time during which the test apparatus for testing the device under test is a predetermined operating condition;
Based on the time measured by the operating status measuring unit, an average value calculating unit that calculates an average value of the ratio of the test apparatus in a specific operating status;
A deviation calculating unit that calculates a deviation of a proportion of the test apparatus in a specific period with respect to the average value calculated by the average value calculating unit;
An operating deviation notification device comprising: a deviation notification unit that performs notification indicating the magnitude of the deviation calculated by the deviation calculation unit.
The operating status measurement unit acquires the time during which each test device is in the specific operating status from the plurality of test devices,
The operation deviation notification device according to claim 1, wherein the average value calculation unit calculates the average value based on times acquired from the plurality of test devices.
3. The operation deviation notification device according to claim 2, wherein the operation status measurement unit measures a time during which the test apparatus is in the specific operation status in a period longer than the specific period.
4. The operation deviation notification device according to claim 3, wherein the deviation notification unit performs notification indicating that the test apparatus is in an abnormal state when the deviation in the specific period is out of a predetermined range.
The operating state measuring unit measures the test time when the device under test is put into the test apparatus and the test apparatus is testing as the specific operating state,
The average value calculation unit calculates an average value of an operation rate when the test time measured by the operation state measurement unit is an operation time,
The deviation calculating unit calculates a deviation of an operation rate in a specific period of the test apparatus with respect to the average value calculated by the average value calculating unit,
The operational deviation notification device according to claim 4, wherein the deviation notification unit performs notification indicating that the test apparatus is in an abnormal state when the deviation in the specific period is out of a predetermined range.
The operating state measuring unit further measures the waiting time when the test element is not inserted, although it can be tested if the element under test is inserted into the test apparatus as the specific operating state,
The average value calculation unit further calculates an average value of the non-operation rate when the standby time measured by the operation status measurement unit is set as the non-operation time,
The deviation calculating unit further calculates a deviation of a non-operation rate in a specific period of the test apparatus with respect to the average value calculated by the average value calculating unit,
The deviation notifying unit, when the deviation of the operating rate based on the test time is out of a predetermined range in the specific period, and when the deviation of the non-operating rate based on the waiting time is out of a predetermined range. The operation deviation notification device according to claim 5, wherein a notification indicating that the test device is in an abnormal state is provided in at least one of the cases.
The operation deviation according to claim 6, wherein the predetermined range of the deviation of the non-operation rate based on the standby time is narrower than the predetermined range of the deviation of the operation rate based on the test time. Notification device.
The operating state measuring unit measures a failure time during which the test apparatus cannot perform a test even when the element under test is inserted into the test apparatus as the specific operating state,
The average value calculation unit calculates an average value of the non-operation rate when the failure time measured by the operation state measurement unit is defined as non-operation time,
The deviation calculation unit calculates a deviation of a non-operation rate based on the failure time in a specific period of the test apparatus with respect to the average value calculated by the average value calculation unit,
The operational deviation notification device according to claim 4, wherein the deviation notification unit performs notification indicating that the test apparatus is in an abnormal state when the deviation in the specific period is out of a predetermined range.
The operating state measuring unit further measures the waiting time when the test element is not inserted, although it can be tested if the element under test is inserted into the test apparatus as the specific operating state,
The average value calculation unit further calculates an average value of the non-operation rate when the standby time measured by the operation status measurement unit is set as the non-operation time,
The deviation calculating unit further calculates a deviation of the non-operation rate based on the standby time in a specific period of the test apparatus with respect to the average value based on the standby time calculated by the average value calculating unit. ,
The deviation notifying unit, when the deviation of the non-operation rate based on the failure time is out of a predetermined range in the specific period, and when the deviation of the non-operation rate based on the standby time is out of a predetermined range The operation deviation notification device according to claim 8, wherein notification indicating that the test device is in an abnormal state is performed in at least one of the cases.
The operation according to claim 9, wherein the predetermined range of the deviation of the non-operation rate based on the failure time is narrower than the predetermined range of the deviation of the non-operation rate based on the standby time. Deviation notification device.
The operating state measuring unit measures the waiting time when the test element is not inserted, although it can be tested as the specific operating state if the element under test is inserted into the test apparatus,
The average value calculation unit calculates an average value of the non-operation rate when the standby time measured by the operation state measurement unit is set as the non-operation time,
The deviation calculation unit calculates a deviation of the non-operation rate in a specific period of the test apparatus with respect to the average value calculated by the average value calculation unit,
The operational deviation notification device according to claim 4, wherein the deviation notification unit performs notification indicating that the test apparatus is in an abnormal state when the deviation in the specific period is out of a predetermined range.
An operation state measurement step for measuring a time during which a test apparatus for testing the device under test is a predetermined operation state;
Based on the time measured by the operation status measurement step, an average calculation step for calculating an average value of a ratio of the test apparatus in a specific operation status;
A deviation calculating step of calculating a deviation of a ratio in the specific operating state in a specific period of the test apparatus with respect to the average value calculated by the average calculating step;
An operation deviation notification method comprising: a deviation notification step for performing notification indicating the magnitude of the deviation calculated by the deviation calculation step.