JP2000173882A - Production simulation system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize an efficient production simulation for semiconductors or the like. SOLUTION: A MES data control section 10 acquires production system data from a production system which controls production lines in a factory, and the production system data are stored as the acquired MES data in the MES data control section 10, and a MES data edition/insufficient data input section 12 is capable of editing the acquired MES data or adding necessary data to the acquired MES data to do a simulation. By this setup, a simulation can be carried out effectively, taking advantage of production system data which a production system possesses.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production simulation system, and more particularly to a production simulation system capable of efficiently performing a simulation of semiconductor production or the like.

[0002]

2. Description of the Related Art Conventionally, there have been many devices intended for production simulation of semiconductors and the like. However, in a conventional apparatus for the purpose of simulation of production of semiconductors or the like, a production system for controlling production of a production line and a simulator for predicting a production amount of the production line are separately constructed. There was a problem.

First, there is a lack of a function for collecting data from an existing system such as a production system owned by a factory and making it available as input data for a simulator. Therefore, the data held by the production system could not be used effectively. For this reason, a person had to collect data necessary for performing a simulation and manually input the data to the simulator. As a result, the accuracy of the input data is reduced, and the human input is increased due to the increase in the data input time.

Second, it has not been possible to centrally manage the simulation parameters required for performing a simulation. That is, in the production simulation, some simulation parameters are set,
By changing the value, the target behavior of the production line is grasped. However, in the conventional production simulation system, since the simulation parameters are individually input to the simulator, it is difficult to centrally manage the simulation parameters. For this reason, it has been difficult to perform a plurality of simulations based on the centrally managed simulation parameters.

Third, since there is no means for effectively processing the simulation result data obtained by performing the simulation, a large amount of manpower is required for processing the simulation result data. That is, a lot of simulation result data is output by performing a simulation, but really necessary data can be obtained only by performing various processings on the simulation result data. Also, unless a plurality of aggregated data obtained by processing is compared and referenced, it is often the case that the comparison of the simulation results is not truly performed. In the conventional production simulation system, a means for processing the simulation result data was not prepared, so that a great deal of manual support was required. Further, there is no means for comparing or referring to a plurality of aggregated data obtained by processing.

[0006]

As can be seen from the above description, a conventional apparatus for simulation of production of semiconductors and the like has a production system for managing production of a production line and a production system for producing the production line in the future. Since the simulator for predicting was separately constructed, various problems occurred.

Accordingly, the present invention has been made to solve the above problems, and a simulator can effectively utilize various data of a production system to obtain a necessary simulation result with a small amount of labor. The purpose is to be. Another object of the present invention is to make it possible to centrally manage simulation parameters required for performing a simulation, and to easily perform a plurality of simulations with different simulation parameter conditions. Further, it is another object of the present invention to be able to easily process data obtained by performing a simulation according to a user's analysis purpose.

[0008]

In order to solve the above-mentioned problems, a production simulation system according to the present invention acquires production system data from a production system for controlling production of a production line in a factory, and acquires the data as acquired data. To store, the data management unit, the user, for the acquired data, edit the data required for performing the simulation, and input the data that is insufficient for performing the simulation, as supplemented basic data The data editing lacking data input unit to be stored in the data management unit, and the supplemented basic data are converted into a data format required for performing a simulation, and the basic data for a simulator is used as the basic data for performing the simulation. And a data conversion unit for generating data.

Further, the production simulation system according to the present invention provides data suitable for inputting a strategy parameter as a condition change when a user performs a simulation from basic data for simulation which is basic data for performing a simulation. A template data conversion unit for generating first template data having a structure, a strategy parameter input unit for a user to input the strategy parameters, and a second template combining the strategy parameters and the first template data. A template data management unit that generates and manages data; and a second data management unit that manages the data by the template data management unit.
A template data inverse conversion unit for converting the template data into simulation input data having a data structure suitable for the simulator to perform a simulation.

Further, a production simulation system according to the present invention performs a simulation based on simulation input data and generates simulation result data. The simulator obtains the simulation result data from the simulator and analyzes the simulation result data. And a scenario data analysis unit for sequentially displaying a chart based on an analysis scenario corresponding to the above.

Further, a production simulation system according to the present invention obtains production system data from a production system for performing production management of a production line in a factory and stores the data as acquired data. For the acquired data, edit the data necessary for performing the simulation and input data that is insufficient for performing the simulation, and store the data as supplemented basic data in the data management unit. Data input unit, the supplemented basic data, perform the conversion of the data format required for performing the simulation,
A data conversion unit that generates basic data for a simulator that becomes basic data in performing a simulation, and data suitable for inputting a strategy parameter serving as a condition swing when a user performs a simulation from the basic data for a simulation. A template data conversion unit for generating first template data having a structure, a strategy parameter input unit for a user to input the strategy parameters, and a second template combining the strategy parameters and the first template data. Generating and managing data, a template data management unit, and converting the second template data managed by the template data management unit into simulation input data having a data structure suitable for a simulator to perform a simulation; A template data inverting unit, a simulator that performs a simulation based on the simulation input data to generate simulation result data, and obtains the simulation result data from the simulator, and an analysis scenario according to a user's analysis purpose. And a scenario data analysis unit for sequentially displaying a chart based on the above.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention is a production simulation system having a production simulator for semiconductors or the like at its core, which facilitates the function of reducing data input to the simulation and the input of parameters for performing conditions when performing the simulation. And a function of continuously analyzing the results obtained by performing the simulation based on the analysis scenario of the user. Hereinafter, an embodiment of the present invention will be described in detail.

FIG. 1 is a block diagram showing the overall functions when the production simulation system according to the present embodiment is applied to semiconductor production. As shown in FIG. 1, the production simulation system includes an MES data management unit 1
0, MES data edit / deficient data input unit 12, M
ES data conversion unit 14, strategy parameter input unit 16,
It is provided with a template creation unit 18, a simulator 20, and a scenario data analysis unit 22.

The MES data management unit 10 has a function of acquiring production system data that can be used for simulation from among production system data under the control of a factory production system (MES: Manufacturing Executing System). That is, production system data is input to the MES data management unit 10 from a production system that performs production management of a production line in a factory. The acquired production system data is transmitted to the MES data management unit 10 by the acquired M
It is stored as ES data.

MES data editing / insufficient data input unit 12
Has a function of inputting and supplementing data missing from the management of the production system. That is, the data acquired by the MES data management unit 10 from the production management system includes incomplete data to be used for the simulation. Therefore, the MES data editing / missing data input unit 12 compensates for missing data from data managed by the production management system by manually inputting the data using an input interface (GUI). The data acquired by the MES data management unit 10 and supplemented by the MES data editing / insufficient data input unit 12 is stored in the MES data management unit 10 as supplemented basic MES data.

The supplemented basic MES data stored in the MES data management unit 10 is input to the MES data conversion unit 14. The MES data converter 14 converts the data format as needed and uses the converted data as basic MES data for simulation of the simulator 20.
The basic MES data for simulation input from the MES data conversion unit 14 to the simulator 20 is stored in a database existing inside the simulator 20.

On the other hand, in the strategy parameter input section 16, the user can set parameters without being aware of the data structure inside the simulator 20. here,
The parameter is a value that changes a condition when performing a simulation. For example, changing the configuration of the product and its input amount as a parameter (change of the product mix), changing the number of apparatuses and the priority coefficient (the ratio between the express lot and the normal lot), and the like can be mentioned. Each parameter set by changing conditions by the user is managed as template data by the template creation unit 18. Each parameter is converted as a part of the simulation input data of the simulator 20.

The simulator 20 performs a simulation based on the basic MES data for simulation converted from the MES data by the MES data converter 14 and the simulation input data generated by the template generator 18 with the parameter assignment. Do. Simulation result data obtained by this simulation is output to the scenario data analysis unit 22.

The scenario data analysis unit 22 converts, extracts, and processes data necessary for analysis from the simulation result data obtained by the simulation, and displays the data as a chart according to the analysis scenario according to the analysis purpose of the user.

The above is the overall function of the production simulation system for semiconductors and the like according to the present embodiment. Next, an example of the hardware configuration of the production simulation system for semiconductors and the like will be described with reference to FIG. FIG.
FIG. 1 is a diagram illustrating a configuration when a production simulation system according to an embodiment is used for semiconductor production or the like.

As shown in FIG. 2, in this embodiment,
Database server 30 and simulation server 32
And a client / server type system configuration in which a plurality of simulation / data analysis clients 34 are connected to these servers.

The database server 30 is a server that provides a service for managing production system data and a service for handling production system data.
In the present embodiment, this database server 30
The MES data management unit 10 and the MES data conversion unit 14 shown in FIG.

The simulation server 32 is a server that provides simulation execution and template management services. In the present embodiment, the simulation server 32 uses the template creation unit 18 shown in FIG.
And the simulator 20 are realized.

The simulation / data analysis client 34 has a GUI for inputting and editing various data and a function for analyzing output data. In the present embodiment, the simulation / data analysis client 3
4 implements the MES data editing / insufficient data input unit 12 and the strategy parameter input unit 16 and the scenario data analysis unit 22 shown in FIG.

The hardware configuration of the production simulation system such as a semiconductor shown in FIG. 2 is merely an example. For example, the database server 30, the simulation server 32, and the simulation / data analysis client 34 are connected to one computer. It is also possible to configure with.

FIG. 3 shows the MES data management unit 10 and the MES
FIG. 4 is a block diagram showing internal functions of a data editing / deficient data input unit 12;

As shown in FIG. 3, the MES data management section 10 includes a MES data acquisition / conversion section 10a and a MES data storage section 10b. MES
The data acquisition / conversion unit 10a selects production system data to be acquired from the production system and acquires the selected production system data. Also, data conversion of small parts such as a unit system is performed as necessary. The acquired production system data is stored in the MES data storage unit 10b as acquired MES data.

MES data editing / insufficient data input unit 12
Is the MES key data and partial data acquisition / display unit 12
a and a user edit input unit 12b.

The MES key data and partial data acquisition / display unit 12a acquires the acquired MES data stored in the MES data storage unit 10b, which is a database of the MES data management unit 10. Then, the MES key data and the partial data acquisition / display unit 12a displays the acquired acquired MES data as key data for the user to input insufficient data. For example, if it is necessary to supplement the data related to the processing time, the recipe name serving as the key data of the processing time is acquired and displayed from the acquired MES data, and the user is assisted in editing the data and adding missing data.

The user edit input section 12b has a function of allowing the user to edit the acquired MES data displayed in this way and to input data that is insufficient for performing a simulation. The data edited or input by the user edit input section 12b is ME
The S key data and the partial data acquisition / display unit 12a are input and displayed, and via the MES key data and the partial data acquisition / display unit 12a, the supplemented basic MES is displayed.
The data is stored in the MES data storage unit 10b. Then, the stored supplementary basic MES data is input to the MES data conversion unit 14, where necessary data format conversion is performed, and simulation basic MES data is generated. This simulation basic MES
The data is fed to the simulator 20.

FIG. 4 is a block diagram showing the internal functions of the template creating section 18. Template creation unit 18
Is configured to include a template data display / input unit 18a, a template data management unit 18b, and a template data conversion / inversion unit 18c.

As described above, the database inside the simulator 20 manages the basic MES data for simulation used for the simulation. The basic MES data for simulation is converted into template data via the template data conversion / inversion unit 18c. That is, template data conversion /
The inverse conversion unit 18c has a function of converting the basic MES data for simulation held inside the simulator 20 into template data in the present embodiment. Further, the template data conversion / inverse conversion unit 18c
On the contrary, it also has a function of inversely converting the template data of the template creating unit 18 into the simulation input data for the simulator 20.

Template data conversion / inverse conversion unit 18c
The data converted into the template data is input to the template data management unit 18b and displayed on the template data display / input unit 18a. Further, the user can use the strategy parameter input unit 16 to input the above-mentioned condition parameter. 5 and 6 show display examples and input examples of the word.

FIG. 5 shows a display example of template data of a product mix. On the upper side of FIG. 5, a product mix window 40 displaying template data of the product mix is displayed. The product mix template has various data for each product ID. For example, in this embodiment, the product ID
For each lot size, priority, stepper No. have. Further, the number of lots per month from the first month to the fifth month of the product ID and the average thereof are displayed as data. These template data are stored in the simulator 20
This is data obtained by converting the internal simulation basic MES data by the template data conversion unit / inverse conversion unit 18c.

In the lower part of FIG. 5, a product mix parameter window 42 for changing simulation conditions while changing the conditions of the product mix parameters is displayed. In the example of FIG. 5, the product ID “AA0
1 shows settings when the average number of lots per month in the product mix of “1” is changed to 80, 90, 100, 110, and 120. These condition parameters are input by the user in the strategy parameter input unit 16.

FIG. 6 shows a display example of the template data of the apparatus. On the upper side of FIG. 6, a device window 44 for displaying template data of the device is displayed. The device template has various data for each workstation. For example, in this embodiment, each workstation has the number of devices, load size, index time, maximum load, delay time, and area. These template data are stored in simulator 2
0 is the data obtained by converting the simulation basic MES data inside 0 by the template data conversion unit / inverse conversion unit 18c.

On the lower side of FIG. 6, a device number parameter window 46 for changing simulation conditions while changing the conditions of the device number parameter is displayed. In the example of FIG. 6, the number of the steppers 1 is 3, 4, 5,
The setting when changing the number to seven or seven is shown. These condition parameters are input by the user in the strategy parameter input unit 16.

Referring back to FIG. 4, the template data management section 18b includes a template data display / input section 18a.
And the template data converted by the template data conversion / inverse conversion unit 18c. The template data management unit 1
8b manages the association between the template data structure and the simulator data structure, and also manages the association between the template and the execution of the simulator a plurality of times. The relationship between the data structure of the template data and the data structure of the input data for simulation is managed, for example, in a format as shown in FIG. The left side of FIG. 7 shows the data structure of the template data, and the right side of FIG. 7 shows the data structure of the simulation input data.

The data structure of the template data has a structure that takes into account the parameter assignment, compared to the data structure of the simulation input data, thereby making it possible to reduce the load of setting by the user. However, since the accuracy of the data has not been reduced, as shown in FIG. 7, by appropriately mapping to the data of the simulator,
Simulation with sufficient accuracy can be performed. That is, since the items necessary for generating the simulation input data are not omitted in the template data, all the simulation input data necessary for performing the simulation can be obtained. .

The relationship between the template and the multiple executions of the simulator is managed in a format as shown in FIG. One simulation model is obtained by combining a plurality of templates as parameter assignment items. The multiple executions of the simulation are realized by generating the simulation models by the number of combinations of the templates and executing the simulations using the plurality of simulation models.

For example, in the present embodiment, in FIG. 8, template B is a product mix template, and as shown in FIG. 5, the product mix parameters are determined by the conditions of templates B-1, B-2,. I'm pretending. In addition, the template X is a template of the apparatus, and as shown in FIG. 6, the parameters of the number of apparatuses are conditionally assigned to the templates X-1, X-2,. When the conditions are set in this way, a simulation model is generated in which the product mix and the number of devices are varied in each sheet. Then, by executing a simulation using this simulation model, a plurality of simulation result data in a case where the product mix and the number of apparatuses are varied are obtained collectively.

As shown in FIG. 4, the template data conversion / inverse conversion unit 18c includes a template data management unit 1
8b, based on the relationship between the data structure of the template data and the data structure of the simulation input data, which are converted from the basic MES data for simulation to the template data, and the inverse conversion from the template data to the simulation input data. I do.

FIGS. 9 to 11 are diagrams showing an example of the relationship between template data and simulation input data in these conversions and inverse conversions. In the example of [4] MTTR / MTBF setting shown in FIG. 11, in the template, MTTR / MTBF is input as a percentage with respect to the simulation time in order to facilitate the setting. This is converted to a template data conversion / inverse conversion unit 18c.
, Simulation input data converted to time is obtained and input to the simulator 20. By using the template in this way, the user can obtain simulation input data necessary for performing a simulation by simply inputting simple template data. Here, M
TTR (meantime to repair) is the mean repair time, and MTBF (mean timebetween failure) is the mean time between failures.

FIG. 12 is a block diagram showing the internal functions of the scenario data analysis unit 22. As shown in FIG. 12, the scenario data analysis unit 22 includes a scenario designation / chart selection unit 22a, a scenario management unit 22b, an analysis data acquisition unit 22c, a chart output unit 22d, and a chart parameter trigger input unit 22e. Is provided.

The scenario designation / chart selection section 22a
It has a function of selecting an analysis scenario managed by the scenario management unit 22b. The user can obtain all charts necessary for the analysis purpose simply by selecting an analysis scenario according to his / her analysis purpose.

The scenario management section 22b manages data constituting an analysis scenario. FIG. 13 shows an example of the analysis scenario. As shown in FIG. 13, by performing an analysis step from a summary evaluation to a detailed evaluation for a certain evaluation purpose, a chart is sequentially displayed so that the evaluation can be advanced. At each step of the analysis, the user takes an action that specifies what item the user wants to evaluate in detail. The analysis step proceeds with this action as a trigger.

In the example of the scenario pattern A shown in FIG. 13, an action of paying attention to the input amount A2 is performed in the analysis step 1, and in the analysis step 2, a WIP (Work In Process: process remaining) at the input amount A2 is triggered. )
And the relationship between the payout amount and the relationship between the WIP and the construction period. Here, the user takes an action of paying attention to the state of WIP = w0, and the analysis step 3 uses this as a trigger to display the average operation rate of each device when WIP = w0. Here, the user takes an action of paying attention to the device N, and in the analysis step 4, using this as a trigger, a time-series change in the operation rate of the device N is displayed. Since the analysis step proceeds in this manner, the user can sequentially obtain necessary charts simply by taking an action of focusing on the displayed content.

FIG. 14 manages this analysis scenario.
FIG. 7 is a diagram illustrating an example of a chart output order / chart parameter management table 50 for each scenario. As shown in FIG. 14, the chart output order / chart parameter management table 50 for each scenario corresponds to each analysis scenario, and includes items such as “chart order”, “x-axis item”, and “y”.
It has “axis item”, “x2 axis item”, “y2 axis item”, “fixed parameter”, “chart parameter”, and “data acquisition table name”.

Of these items, “chart order” is
This item indicates the order in which the charts are displayed. The “x-axis item” is an item for specifying the x-axis of the chart. The “y-axis item” is an item for specifying the y-axis of the chart. “X2 axis item” is an item that specifies the second x axis of the chart.
The “y2 axis item” is an item for specifying the second y axis of the chart. These “chart order”, “x-axis item”, “y-axis item”, “x2-axis item”, and “y2-axis item” can be said to be basic information for drawing each chart.

"Fixed parameters" are items for designating parameters to be fixed when the chart is drawn.
The “chart parameter” is an item serving as a trigger when the user displays the next chart. When the user selects the "chart parameter", the process proceeds to the next analysis step. For example, a chart whose “chart order” is 1 is a chart of the analysis step 1 shown in FIG. Here, since the “chart parameter” is the input amount, by selecting the input amount A2 in the analysis step 1, the process proceeds to the next “chart order” 2 chart. The “data acquisition table name” is an item in which a simulation data acquisition destination and the like are described and managed.

FIGS. 15 to 17 are diagrams specifically showing a computer display screen in an example of the analysis scenario described above. As shown in FIG. 15, in this analysis scenario, as an initial screen, a graph in which the accumulated payout of the selected lot of the simulation and the state of the fluctuation of the WIP are developed in time series is displayed. The user compares the accumulated payout amount and the fluctuation of the WIP based on this graph to estimate the optimum input amount.

Next, as shown in FIG. 16, since the user has grasped the optimum input amount, it is necessary to analyze WIP. Therefore, in this analysis scenario, WI
A graph showing the relationship between P and the payout amount is displayed. The user can grasp the optimum WIP from this graph.

Now that the user has grasped the optimum input amount and the optimum WIP, it is necessary to analyze the bottleneck machine. Therefore, in this analysis scenario, a graph of the operation rate for each device is displayed. This graph allows the user to identify the machine that becomes the bottleneck.

Referring back to FIG. 12, the analysis data acquisition unit 2
2c acquires simulation result data from the simulator 20 and outputs it to the chart output unit 22d. Which data of the simulation result data is obtained is based on the “simulation data acquisition table name” managed by the scenario management unit 22b. Therefore, the analysis data acquisition unit 22c
The simulation result data is acquired from the simulator 20 based on the “simulation data acquisition table name”.

The chart output section 22d has a chart drawing engine. And this chart output unit 22d
Performs drawing and printing of a chart on a screen based on the simulator output data acquired by the analysis data acquiring unit 22c and the chart parameters inputted by the chart parameter trigger input unit 22e.

Chart parameter trigger input section 22e
Has a function of inputting "chart parameters" (see FIG. 14) which is a trigger for advancing the analysis scenario. As a trigger input method, there are a mouse click on a chart by a user, an item specification by a keyboard, and the like.

Next, a data flow in the production simulation system for semiconductors and the like described above will be described with reference to FIG.

First, paying attention to the flow of data from the production system, the MES data management unit 10 acquires production system data from the production system, performs data conversion on the unit system, etc., and then performs MES data management as acquired MES data. Stored in the unit 10. The acquired MES data is output by the MES data editing / deficient data input unit 12.
After missing data has been entered or other data edited,
It is stored again in the MES data management unit 10 as supplemented basic MES data. And this supplemented basic MES
The data is converted into basic MES data for simulation by the MES data
Stored in The basic MES data for simulation is converted into a template data conversion / inverse conversion unit 1.
The template data is converted into template data by 8c and stored in the template data management unit 18b.

Next, paying attention to the flow of data from the user, the simulation parameters input by the user are used as template data display / input unit 1 as parameters.
8a and stored as parameter assignment template data. Then, the template data management unit 18b combines the template data fetched from the simulator 20 with the parameter assignment template data and stores it as new template data.

This new template data is converted into simulation input data (simulation model) by the template data conversion / inversion section 18 c and stored in the simulator 20. Simulator 2
Numeral 0 performs a simulation using the simulation input data and outputs simulation result data. The scenario data analysis unit 22 analyzes the simulation result based on the simulation result data.
The above is the data flow in the semiconductor or other production simulation system according to the present embodiment.

As can be understood from the above description, the production simulation system for semiconductors and the like according to the present embodiment allows the user to obtain various production system data stored in a production system existing in a semiconductor production factory.
The ES data editing / missing data input unit 12 edits data necessary for simulation and adds missing data, and then manages the data as supplemented basic MES data in the MES data management unit 10. .
Then, the supplemented basic MES data managed by the MES data management unit is subjected to data format conversion by the MES data conversion unit 14 as necessary, and is input to the simulator 20 as simulation basic MES data. Therefore, the production system data stored in the production system can be effectively used by the simulator 20 with a small amount of labor. That is, it is possible to reduce the labor caused by manual input after manually collecting production system data required conventionally. Moreover,
Since only the production system data held by the production system does not necessarily contain the data necessary for performing the simulation, the MES data editing / deficient data input unit 12 uses the acquired MES data acquired from the production system for the acquired MES data. As a result, editing and addition can be performed, so that the acquired basic MES data acquired from the production system can be effectively used and processed into supplementary basic MES data suitable for simulation.

In the production simulation system for a semiconductor or the like according to the present embodiment, the simulation condition allocation parameter is input by the user as a strategy parameter in the strategy parameter input unit 16 and the parameter allocation template data is generated based on the parameter. Is done. Then, the template data management unit 18b generates new template data by combining the basic MES data for simulation fetched from the simulator 20 and the parameter assignment template data. Based on the new template data, the template data conversion / inversion unit 18c generates simulation input data. For this reason, the user can input the strategy parameters in a data structure suitable for inputting simulation conditions without being conscious of the data structure of the simulation input data. In addition, by using the template data, it is possible to set a plurality of conditions of the strategy parameter, and it is possible to automatically perform a plurality of simulations with the conditions. Further, since the user inputs the strategy parameters to the template data, the simulation parameters can be centrally managed by managing the template data.

Further, since the simulation result data obtained by performing the simulation with the simulator 20 is continuously displayed in a form according to the scenario according to the analysis purpose of the user, the simulation result data is independent of the user's skill. The charts required for analysis can be sequentially displayed. That is, the user obtains a chart according to the analysis purpose by simply selecting one scenario from a plurality of scenarios registered in the scenario management unit 22b in the scenario designation chart selection unit 22a of the scenario data analysis unit 22. be able to. That is, the user can effectively use the simulation result data without making complicated settings.

The present invention is not limited to the above embodiment, but can be variously modified. For example, as can be seen from FIG. 1, the basic MES data for simulation output from the MES data conversion unit 14 may be directly input to the template creation unit 18 without temporarily storing it in the simulator 20. is there.

[0065]

As described above, according to the production simulation system of the present invention, an efficient production simulation can be performed without depending on the skill of the user.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an overall structure of a production simulation system for a semiconductor or the like according to an embodiment of the present invention.

FIG. 2 is a diagram illustrating an example of a hardware configuration of a production simulation system for a semiconductor or the like according to the embodiment.

FIG. 3 is a block diagram showing a configuration of an MES data management unit and an MES data editing / insufficient data input unit shown in FIG. 1;

FIG. 4 is a block diagram illustrating a configuration of a template creation unit illustrated in FIG. 1;

FIG. 5 is a diagram showing template data of a product mix as an example.

FIG. 6 is a diagram showing template data of an apparatus as an example. .

FIG. 7 is a view showing the relationship between the data structure of template data and the data structure of input data for simulation.

FIG. 8 is a diagram showing an example of a combination of simulation model generation in a case where a simulation is performed a plurality of times while changing the condition using a template.

FIG. 9 is a diagram showing the relationship between template data and simulation input data.

FIG. 10 is a diagram showing the relationship between template data and simulation input data.

FIG. 11 is a diagram showing the relationship between template data and simulation input data.

FIG. 12 is a block diagram illustrating a configuration of a scenario data analysis unit illustrated in FIG. 1;

FIG. 13 is a diagram showing an example of an analysis scenario.

FIG. 14 is a view showing a chart-by-scenario output order / chart parameter management table corresponding to the analysis scenario shown in FIG. 13;

FIG. 15 is a view showing an example of a specific display screen of analysis step 1 in the analysis scenario shown in FIG. 13;

FIG. 16 is a view showing an example of a specific display screen of analysis step 2 in the analysis scenario shown in FIG. 13;

FIG. 17 is a view showing an example of a specific display screen of analysis step 3 in the analysis scenario shown in FIG. 13;

FIG. 18 is a view collectively showing a data flow in the production simulation system for semiconductors and the like according to the present embodiment.

[Explanation of symbols]

Reference Signs List 10 MES data management unit 10a MES data acquisition / conversion unit 10b MES data storage unit 12 MES data editing / insufficient data input unit 12a MES key data and partial data acquisition / display unit 12b User editing input unit 14 MES data conversion unit 16 Strategy Parameter input unit 18 Template creation unit 18a Template data display / input unit 18b Template data management unit 18c Template data conversion / inversion unit 20 Simulator 22 Scenario data analysis unit 30 Database server 32 Simulation server 34 Simulation / data analysis client 40 Product mix window 42 Product mix parameter window 44 Device window 46 Device number parameter window 50 Chart output for each scenario Order / chart parameter management table

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Etsuo Fukuda 8th Shin-Sugita-cho, Isogo-ku, Yokohama-shi, Kanagawa F-term in the Toshiba Yokohama office (reference) 3C042 RJ00 RL11 5B049 BB07 CC21 CC31 EE05 EE31 EE41 FF03 FF04 GG04 GG07 5H215 AA06 AA20 BB09 BB20 CC07 CC09 CX01 GG01 HH03 KK03 9A001 DD11 HH32 JJ44 KK54 LL09

Claims (8)

[Claims] 1. A data management unit that acquires production system data from a production system that controls production of a production line in a factory, and stores the acquired data as acquired data. Editing data necessary for performing the simulation, inputting data that is insufficient for performing the simulation, and storing the data as supplemented basic data in the data management unit, a data editing insufficient data input unit, and the supplemented basic A data conversion unit that converts data into a data format required for performing a simulation and generates basic data for a simulator that becomes basic data for performing the simulation. system. 2. A data acquisition unit for selecting production system data to be acquired from a production system and acquiring the selected production system data, wherein the acquired data and the supplemented basic data are acquired. 2. The production simulation system according to claim 1, further comprising: a data storage unit for storing data. 3. The data-editing-deficient-data input unit acquires and displays at least a part of the acquired data stored in the data management unit, and displays the acquired data. 3. The production simulation system according to claim 1, further comprising: a user editing input unit configured to allow a user to edit displayed data and to input missing data. 4. 4. Generating first template data having a data structure suitable for a user to input a strategy parameter serving as a condition for performing a simulation from simulation basic data serving as basic data in performing a simulation. A template data conversion unit, a strategy parameter input unit for a user to input the strategy parameters, and a template for generating and managing second template data by combining the strategy parameters and the first template data. A data management unit; and a template data inverse conversion unit that converts the second template data managed by the template data management unit into simulation input data having a data structure suitable for a simulator to perform a simulation. thing A production simulation system characterized by the following. 5. A simulator for performing a simulation based on simulation input data and generating simulation result data, acquiring the simulation result data from the simulator, and executing the simulation based on an analysis scenario according to a user's analysis purpose. And a scenario data analysis unit for sequentially displaying a chart. 6. The scenario data analysis unit includes: a scenario management unit in which a plurality of scenarios each of which specifies a chart required according to an analysis purpose and an output order thereof are registered; To allow the user to select one scenario from among multiple scenarios
The production simulation system according to claim 5, comprising: a scenario designation unit. 7. A scenario data analysis unit, comprising: a chart parameter trigger input unit for receiving an input of a chart parameter serving as a trigger for displaying a next chart by advancing an analysis scenario; and a simulation result data required from the simulator. An analysis data acquisition unit, a simulation output data acquired by the analysis data acquisition unit, and a chart output unit that draws a chart based on the chart parameters input by the chart parameter trigger input unit. The production simulation system according to claim 5, comprising: 8. A data management unit for acquiring production system data from a production system for controlling production of a production line in a factory and storing the acquired data as acquired data, wherein a user performs simulation on the acquired data. Editing data necessary for performing the simulation, inputting data that is insufficient for performing the simulation, and storing the data as supplemented basic data in the data management unit, a data editing lacking data input unit, A data conversion unit that converts data into a data format required for performing a simulation and generates basic data for a simulator that becomes basic data for performing a simulation. Suitable for inputting strategic parameters that will be used as conditions when performing A template data conversion unit for generating first template data having a data structure; a strategy parameter input unit for a user to input the strategy parameter; and a second combination of the strategy parameter and the first template data. A template data management unit that generates and manages template data, and converts the second template data managed by the template data management unit into simulation input data having a data structure suitable for a simulator to perform a simulation. A template data inverting unit, a simulator for performing a simulation based on the simulation input data to generate simulation result data, and obtaining the simulation result data from the simulator. And a scenario data analysis unit for sequentially displaying a chart based on an analysis scenario according to a user's analysis purpose.