WO2009113833A2 - Réseau de lentilles à l'échelle d'une plaquette, appareil de moulage associé et procédé de fabrication correspondant - Google Patents

Réseau de lentilles à l'échelle d'une plaquette, appareil de moulage associé et procédé de fabrication correspondant Download PDF

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Publication number
WO2009113833A2
WO2009113833A2 PCT/KR2009/001267 KR2009001267W WO2009113833A2 WO 2009113833 A2 WO2009113833 A2 WO 2009113833A2 KR 2009001267 W KR2009001267 W KR 2009001267W WO 2009113833 A2 WO2009113833 A2 WO 2009113833A2
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WO
WIPO (PCT)
Prior art keywords
substrate
mold member
lens
optical
wafer scale
Prior art date
Application number
PCT/KR2009/001267
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English (en)
Korean (ko)
Other versions
WO2009113833A3 (fr
Inventor
강신일
임지석
최민석
김호관
Original Assignee
연세대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 연세대학교 산학협력단 filed Critical 연세대학교 산학협력단
Publication of WO2009113833A2 publication Critical patent/WO2009113833A2/fr
Publication of WO2009113833A3 publication Critical patent/WO2009113833A3/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00278—Lenticular sheets
    • B29D11/00298—Producing lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/0085—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing wafer level optics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0961—Lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between

Definitions

  • the present invention relates to a wafer scale lens array in which a plurality of lenses are integrally molded on a substrate, and more particularly, a wafer scale in which a plurality of lenses are formed in independent shapes on a substrate to improve molding stability and quality.
  • a lens array and a method and apparatus for manufacturing the same are particularly known.
  • 1 to 3 is a process flow chart showing a wafer scale lens array manufacturing process according to the prior art.
  • the lens material 20 is applied to a predetermined thickness on the prepared substrate 10.
  • the mold member 30 having the same shape as that of the lens to be molded is formed on the upper surface of the substrate 10 to which the lens material 20 is applied and covered with the mold member 30. Then, the lens array 40 having the same shape as the lens cavity 31 is formed in the lens material 20 applied on the substrate 20.
  • the substrate 10 is irradiated with ultraviolet rays as a whole to cure the lens array 40 to produce a wafer scale lens array as shown in FIG. 11.
  • the lens array 40 includes a plurality of lens parts 42 arranged at predetermined intervals on the substrate 10 to play an optical role, and a residual layer 44 disposed between the lens parts 42. .
  • the lens material 20 When the lens material 20 is cured by irradiating with ultraviolet rays, the lens material 20 is inevitably contracted, although there is a difference in degree. That is, in the case of most physical phase changes including ultraviolet curing, when the phase of the material changes from the liquid phase to the solid phase, the material is accompanied by shrinkage.
  • the substrate 10 may be caused by shrinkage which is inevitably generated in the process of curing the lens material. Cause stress.
  • shrinkage of the lens parts 42 and the remaining layer 44 may occur as a whole, thereby causing stress on the substrate 10, resulting in warpage of the substrate, or a phenomenon in which the substrate is broken.
  • Another object of the present invention is to provide a molding apparatus capable of manufacturing a wafer scale lens array in which a plurality of lens portions are each independently arranged.
  • Still another object of the present invention is to provide a method of manufacturing a wafer lens array which can prevent bending or breakage of a substrate by minimizing stress applied to the substrate in a wafer scale replication process.
  • Another object of the present invention is to provide a wafer lens array manufacturing method that can minimize the release force of the mold member in the wafer scale replication process to minimize the occurrence of defects.
  • the wafer scale lens array according to the present invention is characterized in that it comprises a substrate and a plurality of lens units which are arranged at regular intervals independently of each other to perform an optical function.
  • the substrate may be formed of a material through which ultraviolet light may pass and support the lens units.
  • the apparatus for forming a wafer scale lens array includes a mold member for forming a plurality of lens portions for performing an optical function by pressing an optical polymer applied to a surface of a substrate, wherein the mold member includes a lens portion region for performing an optical function.
  • a UV blocking film is provided to block ultraviolet light from being irradiated to the remaining areas except for the above.
  • the mold member is characterized in that a plurality of lens cavities are formed on the lower surface thereof, and an ultraviolet blocking film is provided between the lens cavities.
  • the mold member includes a first mold member disposed on the upper surface of the substrate and a second mold member disposed on the lower surface of the substrate, and the UV blocking film is disposed on at least one of the first mold member and the second mold member. It is done.
  • the UV blocking film is formed by attaching a thin metal film to the surface of the mold member or the substrate, or is formed through a metal thin film deposition process.
  • a method of manufacturing a wafer scale lens array includes disposing a mold member having a plurality of lens cavities and applying an optical polymer, which is a lens material, to at least one of the mold member and the substrate. Providing a UV blocking film that blocks the non-optical area, pressing a mold member onto the optical polymer to form a plurality of lens parts, which are optical areas on a substrate surface, and covering the UV blocking film on a remaining layer, which is a non-optical area; And irradiating with ultraviolet rays to cure only the lens parts, and removing the mold layer from the substrate after removing the mold member from the substrate.
  • a method of manufacturing a wafer scale lens array includes preparing a substrate on which a plurality of through holes are formed, arranging a first mold member on an upper side of the substrate, and a second mold member on a lower side of the substrate. And installing an ultraviolet ray blocking film on at least one of the first mold member and the second mold member except for the optical region, and applying an optical polymer, which is a lens material, to the upper surface of the substrate to insert the optical polymer into the through hole. Forming a plurality of lens portions on the surface of the substrate by pressing the first mold member against the optical polymer, curing the lens portions by irradiating ultraviolet rays with the first mold member, and curing the first mold member and the second mold member. Separating from the substrate and washing to remove the uncured residual layer between the lens portions.
  • the wafer scale lens array of the present invention has the advantage that a plurality of lenses are each arranged in a separate form on the substrate.
  • the lens units are independently arranged on the substrate in the wafer scale replication process, it is possible to minimize the stress applied to the substrate when the lens unit is cured to prevent bending or breakage of the substrate. There is this.
  • the wafer scale lens array manufacturing method of the present invention has the advantage that can minimize the release force of the mold member in the wafer scale replication process can be minimized.
  • an uncured region exists between a plurality of lens portions in a wafer scale copying process, and thus the uncured region may perform a material replenishment role to compensate for shrinkage when the lens portion is cured.
  • 1 to 3 is a process flow chart showing a wafer scale lens array manufacturing process according to the prior art.
  • 4 to 8 are process flowcharts illustrating a manufacturing process of a wafer scale lens array according to a first embodiment of the present invention.
  • 9 through 11 are process flowcharts illustrating a manufacturing process of a wafer scale lens array according to a second exemplary embodiment of the present invention.
  • 12 to 16 are process flowcharts illustrating a process of manufacturing a wafer scale lens array according to a third embodiment of the present invention.
  • 17 to 19 are process flowcharts illustrating a manufacturing process of a wafer scale lens array according to a fourth embodiment of the present invention.
  • 4 to 8 are process flowcharts illustrating a manufacturing process of a wafer scale lens array according to an exemplary embodiment of the present invention.
  • the substrate 100 is prepared.
  • the optical polymer 200 which is a lens material, is coated on the substrate 100 with a predetermined thickness.
  • the optical polymer 200 a photocurable polymer that can be cured by ultraviolet rays is used.
  • the mold member 300 having the plurality of lens cavities 310 is formed on the substrate 100.
  • a UV blocking film 400 that blocks ultraviolet rays is installed on the bottom surface of the mold member 300.
  • the UV blocking film 400 is formed between the lens cavities 310. That is, it is formed on the remaining portions except the optically effective surface capable of performing the lens role.
  • the substrate 100 may use any kind of substrate that may serve as a structure for supporting the lenses that perform the optical function.
  • the mold member 300 is preferably formed of a material that can transmit ultraviolet rays.
  • the UV blocking film 400 may be formed by attaching a thin metal blocking film to the lower surface of the mold member 300, and may be formed through a metal thin film deposition process.
  • the mold member 300 having the UV blocking film 400 is pressed on the upper surface of the substrate 100, as shown in FIG. 5, the plurality of lens cavities 310 formed on the mold member 300 and The same lens pattern is transferred to the surface of the optical polymer 200.
  • a plurality of lens parts 210 arranged at predetermined intervals and a residual layer 220 disposed between the lens parts 210 are formed on the surface of the substrate 100.
  • the plurality of lens portions 210 are regions that function optically effective, and the residual layer 220 has no optical function, and the optical polymer between the lens portions 210 when molded into the mold member 300. Is the remaining part.
  • the UV blocking film 400 formed on the bottom surface of the mold member 300 is disposed to cover the residual layer 220 to prevent the ultraviolet ray from being irradiated onto the residual layer 220 when the ultraviolet ray is irradiated in a later process.
  • ultraviolet rays are irradiated through the mold member 300 from the upper side toward the lower direction.
  • the lens parts 210 are cured by ultraviolet rays, and the residual layer 220 disposed between the lens parts 210 is blocked by the UV blocking film 400 to become an uncured area that is not cured.
  • This uncured area can perform a material replenishment function to compensate for shrinkage that occurs during lens array molding. Therefore, the lens parts can minimize the change in shape and numerical value due to shrinkage.
  • the mold member 300 When the curing of the lens unit 210 is completed, as shown in FIG. 7, the mold member 300 is separated from the substrate 100. At this time, since the residual layer 220 is excluded from replication as an uncured uncured region, the release force may be minimized when the mold member 300 is separated from the substrate 100. In this way, the release force of the mold member 300 can be reduced, so that even when the thickness of the substrate is formed thin, the substrate can be prevented from being damaged. When the thickness of the substrate is reduced, the thickness of the optical element can be reduced, thereby miniaturizing the optical element and reducing the cost.
  • the remaining layer 220 which is an uncured region, is washed and removed in the washing process.
  • the wafer scale lens array has a shape in which lens parts 210 are formed on the substrate 100 at independent intervals.
  • 9 to 11 are process flowcharts illustrating a manufacturing process of a wafer scale lens array according to a second exemplary embodiment of the present invention.
  • the lower surface of the substrate 100 is provided with a UV blocking film 110 to block ultraviolet rays.
  • the UV blocking film 110 is formed in a predetermined shape to prevent ultraviolet light from being irradiated to the remaining areas except for an optically effective area that can serve as a lens manufactured on the surface of the substrate 100 in a later process.
  • the UV blocking film 110 may be formed by attaching a thin metal blocking film to a lower surface of the substrate 100, and may be formed through a metal thin film deposition process.
  • the substrate 100 may support lens units that perform an optical function and may use any kind through which ultraviolet rays may pass.
  • the optical polymer 200 which is a lens material, is coated on the upper surface of the substrate 100 with a predetermined thickness.
  • the optical polymer 200 may be a photocurable polymer that can be cured by ultraviolet light.
  • the same lens pattern as the plurality of lens cavities 310 formed on the mold member 300 may be formed of the optical polymer.
  • a plurality of lens parts 210 and a residual layer 220 disposed at a predetermined thickness are formed on the upper surface of the substrate 100.
  • the plurality of lens parts 210 are formed.
  • the lens unit 210 is an area that has an optically effective function, and the residual layer 220 has no optical function, and is an area in which an optical polymer remains between the lens parts when forming the mold member 300.
  • the UV blocking film 110 formed on the substrate 100 blocks the remaining layer 220 region.
  • the mold member 300 is separated from the substrate 100.
  • the release force may be minimized when the mold member 300 is separated from the substrate.
  • the mold member 300 is separated from the substrate 100, and then the connection part, which is an uncured region, is attached and removed in the washing process.
  • the structure in which the UV blocking film 400 is installed on the mold member 300 described in the first embodiment and the structure in which the UV blocking film 110 is installed on the substrate 100 described in the second embodiment are combined.
  • the structure is also applicable. That is, the UV blocking film 400 is installed on the lower surface of the mold member 300, the UV blocking film 110 is installed on the upper surface of the substrate 100, and the ultraviolet rays are simultaneously irradiated in the vertical direction to cure the lens parts 210. And prevent the residual layer 220 from curing.
  • 12 to 16 are process flowcharts illustrating a manufacturing process of a wafer scale lens array according to a third embodiment of the present invention.
  • a substrate 600 having a through hole 610 is prepared at a predetermined interval.
  • the first mold member 700 having the plurality of first lens cavities 710 is formed on the upper side of the substrate 600, and the plurality of second lens cavities 810 are formed on the lower side of the substrate 600.
  • the second mold member 800 is positioned.
  • the substrate 600 may be applied to any kind of substrate that may serve as a structure for supporting the lenses that perform the optical function.
  • the substrate 600 may be formed of a material through which ultraviolet rays can pass.
  • the first mold member 700 is formed of a material through which ultraviolet rays can pass, and a UV blocking film 720 for blocking ultraviolet rays is installed on the bottom surface of the first mold member 700.
  • the ultraviolet blocking film 720 is formed between the first lens cavities 710. That is, it is formed on the remaining portions except the optically effective surface capable of performing the lens role.
  • the second mold member 800 may be formed of a material through which ultraviolet rays may pass, and an ultraviolet blocking film installed on the first mold member 700 may be installed. That is, the UV blocking film 720 may be installed on both the first molding member 700 and the second molding member 800, and may be installed on either of them.
  • the ultraviolet blocking film 720 may be installed on the substrate 600 in addition to the first and second mold members 700 and 800.
  • the substrate 600 is placed on the upper surface of the second mold member 800, and the optical polymer 820, which is a lens material, is formed in each through hole 610 of the substrate 600 in a predetermined thickness. Apply. At this time, since the through hole 610 of the substrate 600 and the second lens cavity 810 of the second mold member 800 are aligned to be aligned, the optical polymer 820 is inserted into the through hole 610 to be formed. The two lens cavity 810 is filled and applied to the upper surface of the substrate 600 in a convex shape at regular intervals.
  • the optical polymer 820 may be a photocurable polymer that can be cured by ultraviolet light.
  • the first mold member 700 having the UV blocking film 720 formed thereon is pressed onto the top surface of the substrate 600, as illustrated in FIG. 14, a plurality of lenses formed on the first mold member 700.
  • the same lens pattern as the cavities 710 is transferred to the top surface of the optical polymer 820.
  • the lens parts 850 having an optically effective function are formed in the through hole 610 of the substrate 600, and the residual layer 860 is formed around the lens parts 850.
  • the residual layer 860 has no optical function and is a portion where the optical polymer remains between the lens parts 850 when molded into the first mold member 700.
  • the UV blocking film 720 is disposed to cover the residual layer 860 so that ultraviolet rays are irradiated onto the residual layer 860 when the ultraviolet rays are irradiated in a later process. Block it.
  • the ultraviolet rays passing through the first mold member 700 harden the lens parts 850, and a residual layer disposed around the lens parts 850. 860 becomes a state of being blocked by the UV blocking film 720 and becomes an uncured region that is not cured.
  • This uncured area can perform a material replenishment function to compensate for shrinkage that occurs during lens array molding. Therefore, the lens parts can minimize the change in shape and numerical value due to shrinkage.
  • the first mold member 700 and the second mold member 800 are separated from the substrate 600.
  • the release force may be minimized when the first mold member 700 is separated from the substrate 600.
  • the remaining layer which is an uncured region, is washed and removed in the cleaning process.
  • the lens units 210 are inserted into the through holes 610 of the substrate 600 and arranged in an independent form.
  • the ultraviolet blocking film can be removed.
  • the optical polymer which is a lens material
  • the ultraviolet blocking film can be removed instead.
  • the mold member and / or the substrate may have an ultraviolet blocking film.
  • 17 to 19 are process flowcharts illustrating a manufacturing process of a wafer scale lens array according to a fourth embodiment of the present invention.
  • a substrate 600 on which a through hole 610 is formed at a predetermined interval is prepared.
  • the first mold member 700 having the plurality of first lens cavities 710 is formed on the upper side of the substrate 600, and the plurality of second lens cavities 810 are formed on the lower side of the substrate 600.
  • the second mold member 800 is positioned.
  • the first molding member 700 is provided with an ultraviolet blocking film 720 that blocks ultraviolet rays.
  • the UV blocking film 720 is provided on the remaining portions except for an optically effective surface capable of serving as a lens.
  • the second mold member 800 may be formed of a material through which ultraviolet rays may pass, and an ultraviolet blocking film installed on the first mold member 700 may be installed. That is, the UV blocking film 720 may be installed on both the first molding member 700 and the second molding member 800, and may be installed on either of them. In addition, the UV blocking film 720 may be installed on the surface of the substrate 600.
  • optical polymer 900 which is a lens material is apply
  • the lens parts 910 that function optically effective are formed in the through hole 610 of the substrate 600, and a residual layer 920 is formed between the lens parts 910.
  • the residual layer 920 has no optical function and is an area where the optical polymer remains between the lens parts 910 when molded into the first mold member 700.
  • the ultraviolet blocking film 720 is disposed to cover the residual layer 920, and the ultraviolet ray is irradiated onto the residual layer 920 when the ultraviolet ray is irradiated in a later process. Block it.
  • the ultraviolet rays passing through the first mold member 700 harden the lens portions 910 and remain between the lens portions 910.
  • the layer 920 is blocked by the UV blocking film 720 and becomes an uncured region that is not cured.
  • the first mold member 700 and the second mold member 800 are separated from the substrate 600.
  • the release force may be minimized when the first mold member 700 is separated from the substrate 600.
  • the through hole 610 of the substrate 600 When the first mold member 700 and the second mold member 800 are separated from the substrate 600, and then the residual layer 920 that is an uncured region is washed and removed in the cleaning process, the through hole 610 of the substrate 600.
  • a lens scale lens array in which lens parts 910 are inserted and arranged in a separate form is manufactured.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

La présente invention concerne un réseau de lentilles à l'échelle d'une plaquette qui protège un substrat d'une inflexion ou d'un endommagement et qui minimise la force nécessaire pour séparer un élément de moule, ainsi qu'un procédé de fabrication correspondant. Le procédé de fabrication du réseau de lentilles à l'échelle d'une plaquette consiste à appliquer une certaine épaisseur de matériau de lentille polymère optique à la surface du substrat; à mouler plusieurs unités lentilles comportant la section optique par compression du polymère optique avec un élément de moule; à faire durcir l'unité lentille uniquement par application d'une couche de blocage de rayons ultraviolets sur une couche résiduelle comportant la section non optique et à appliquer des rayons ultraviolets sur celle-ci par balayage, à travers l'élément de moule; puis à fabriquer un réseau d'unités lentilles sur le substrat où plusieurs unités lentilles sont organisées en réseau de façon indépendante et uniforme de par la séparation de l'élément de moule du substrat et à nettoyer et à retirer la couche résiduelle non durcie.
PCT/KR2009/001267 2008-03-14 2009-03-13 Réseau de lentilles à l'échelle d'une plaquette, appareil de moulage associé et procédé de fabrication correspondant WO2009113833A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0023884 2008-03-14
KR1020080023884A KR20090098470A (ko) 2008-03-14 2008-03-14 웨이퍼 스케일 렌즈 어레이, 그 성형장치 및 그 제조방법

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WO2009113833A2 true WO2009113833A2 (fr) 2009-09-17
WO2009113833A3 WO2009113833A3 (fr) 2009-12-10

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WO (1) WO2009113833A2 (fr)

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Publication number Priority date Publication date Assignee Title
KR20110137649A (ko) * 2010-06-17 2011-12-23 엘지이노텍 주식회사 성형 장치 및 폴리머 성형물의 제조방법
US8072685B1 (en) 2011-01-31 2011-12-06 Omnivision Technologies, Inc. Lens assembly and method for forming the same
KR101437532B1 (ko) * 2012-10-17 2014-09-04 주식회사 엔엔피 마이크로 렌즈 어레이 제조 방법
KR102146959B1 (ko) * 2018-07-23 2020-08-21 한국광기술원 렌즈 어레이 제조장치
KR102225983B1 (ko) * 2019-03-25 2021-03-09 정명수 모바일기기용 프레넬 렌즈의 제조방법

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Publication number Priority date Publication date Assignee Title
JP2005039195A (ja) * 2003-06-26 2005-02-10 Nippon Sheet Glass Co Ltd レンズ付き発光素子の製造方法
KR20060078405A (ko) * 2004-12-31 2006-07-05 삼성전자주식회사 마이크로 렌즈 기판 어레이, 그를 포함하는 입체 영상디스플레이 장치 및 그의 제조 방법

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Publication number Priority date Publication date Assignee Title
JPH10186105A (ja) * 1996-12-19 1998-07-14 Fujitsu Takamizawa Component Kk レンズアレイ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005039195A (ja) * 2003-06-26 2005-02-10 Nippon Sheet Glass Co Ltd レンズ付き発光素子の製造方法
KR20060078405A (ko) * 2004-12-31 2006-07-05 삼성전자주식회사 마이크로 렌즈 기판 어레이, 그를 포함하는 입체 영상디스플레이 장치 및 그의 제조 방법

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WO2009113833A3 (fr) 2009-12-10

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