WO2009095170A2 - Micro-actionneur électromagnétique à membrane - Google Patents
Micro-actionneur électromagnétique à membrane Download PDFInfo
- Publication number
- WO2009095170A2 WO2009095170A2 PCT/EP2009/000330 EP2009000330W WO2009095170A2 WO 2009095170 A2 WO2009095170 A2 WO 2009095170A2 EP 2009000330 W EP2009000330 W EP 2009000330W WO 2009095170 A2 WO2009095170 A2 WO 2009095170A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- coil
- membrane
- microactuator
- electromagnetic
- coils
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64C—AEROPLANES; HELICOPTERS
- B64C23/00—Influencing air flow over aircraft surfaces, not otherwise provided for
- B64C23/005—Influencing air flow over aircraft surfaces, not otherwise provided for by other means not covered by groups B64C23/02 - B64C23/08, e.g. by electric charges, magnetic panels, piezoelectric elements, static charges or ultrasounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64C—AEROPLANES; HELICOPTERS
- B64C3/00—Wings
- B64C3/38—Adjustment of complete wings or parts thereof
- B64C3/44—Varying camber
- B64C3/48—Varying camber by relatively-movable parts of wing structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
Definitions
- the present invention relates to an electromagnetic microactuator which is constructed on a carrier body and has at least one coil and a membrane which can be deflected by energizing the coil.
- Electromagnetic microactuators are known in the field of use of micropumps, miniaturized actuators or find application in the field of active flow control of the air flow on aircraft wings.
- the microactuators are constructed on the principle of an electromagnetic actuator having a coil which can deflect a membrane when energized.
- a metallic body can be arranged, on which the electromagnetic field, which is generated by the energization of the coil, acts. The stronger the coil is energized, the greater the deflection of the membrane. If an alternating voltage is applied to the coil, then the membrane can be set in oscillation with the alternating voltage frequency.
- the simplest construction shown in the prior art can be seen in a loudspeaker, usually the coil forming the moving part of the loudspeaker arrangement.
- electromagnetic microactuators apply the coil to the diaphragm to be deflected in order to reduce the dynamically moved mass.
- electromagnetic microactuators which have a respective coil both on the carrier body and on the membrane, so that a mutual electromagnetic influence can form, in order in this way to generate an oscillation in the membrane when an alternating voltage is applied to the coils without needing a metallic body as a core.
- the invention includes the technical teaching that the membrane is formed from a currentable dielectric elastomer actuator having an elastomeric film with a double-sided electrode coating.
- the invention is based on the idea of carrying out a preferably electromagnetic microactuator of known design with a membrane which can be influenced in its elastic properties by means of a current supply.
- a dielectric Elastomeraktor consisting of an elastomeric film having at its two interfaces respective electrode coatings.
- Dielectric elastomer actuators are adaptive Material systems that can achieve high strains up to 300%. They belong to the group of electroactive polymers which are based on the functional principle of converting the electrical energy, which is introduced into the material system by contacting the electrode coatings, directly into mechanical work.
- an electrostatic pressure is established in the elastomeric film, so that the thickness of the elastomeric film may decrease. Due to the effect of the transverse contraction, the thickness of the elastomer film in its plane of extent is extended when the thickness is reduced. The consequence is that the deflection of the membrane is increased by energizing the electrode coatings, so that the effect of the electromagnetic influence by the energization of the coil with the effect of the planar expansion of the elastomer film superimposed. In this way, electromagnetic microactuators can be considerably expanded in their power spectrum, wherein the arrangement according to the invention does not preclude further miniaturization of the electromagnetic actuators.
- the electrically activatable membrane according to the invention can also be used, for example, with piezoelectric, electrostatic, magnetic or magnetostrictive actuators.
- One field of application of electromagnetic microactuators relates to actively influencing the flow formation on the wing of an aircraft.
- a significant proportion of the resistance of an aircraft is determined by the frictional resistance of the airflow.
- Various influencing concepts act on a shift of the laminar-turbulent transition in the direction of the trailing trailing edge, wherein the transition point between the laminar and the turbulent flow is displaced by the adaptive influencing of the flow in the direction of the trailing trailing edge. This results in a reduction of the frictional resistance of the air flow as the laminar travel distance of the flow over the airfoil is increased.
- An active approach to extending the laminar run length is to minimize the transient-causing unstable Tollmien Schlichting (TS) waves by overlaying with artificial countercurrents.
- TS Tollmien Schlichting
- tactile displays can be carried out with the electromagnetic microactuators according to the invention, where high amplitudes and high frequencies are required at the highest spatial resolution.
- the individual microactuators can be reduced in size to a few square millimeters or sub-square millimeters.
- the energization of the coil can be synchronized with the energization of the dielectric elastomer actuator. If the coil is operated at a natural frequency of the membrane, then a particularly large amplitude of the membrane can be expected. With the help of the voltage applied to the membrane, the rigidity of the membrane can be adjusted. As a result, the range in which large amplitudes can be generated, ie the frequency width in which the electromagnetic actuator can be operated in resonance, can be expanded.
- the synchronization takes place according to a method for operating the electromagnetic microactuator, wherein the membrane forming the dielectric E- lastomeraktor is energized only within the time range in which the membrane is deflected by energizing the coil from the NulHage.
- the dielectric elastomer actuator By energizing the dielectric elastomer actuator, it expands in the direction of the plane of extent of the elastomer film while reducing the thickness of the elastomer film. Both the stiffness of the membrane is reduced as well as an active support of the deflection generated. Due to the As the thickness of the elastomeric film is reduced, the stiffness is reduced, whereby the expansion of the elastomeric film from a plane of the zero position into a dome-shaped embossment is nullified, since the membrane is clamped on the edge. Consequently, the deflection is superimposed by the energization of the coil with the deflection by the expansion of the elastomeric film. As a result, a larger amplitude of the deflection can be implemented, which can be maintained even at higher frequencies in the kHz range.
- the coil is designed as a microcoil and applied by means of a thin-film technique on the carrier body and / or on the surface of the membrane.
- the membrane and the planar coil can each be constructed parallel to one another on the carrier body. Only by energizing the coil and the elastomer actuator a dome-like bulge of the membrane is generated, so that increases the distance between the membrane and the support body.
- the miniaturization of the microactuator can be implemented, for example, by means of the LIGA technique, which describes a method with the steps of lithography, electroplating and impression taking.
- components with high aspect ratios can be produced on a carrier body designed as a substrate, whereby a high degree of miniaturization of both the coil and the membrane is possible.
- the anchor body may be designed as a permanent magnet or as a soft magnetic or dimagnetic body, which is arranged for example on the membrane, wherein the anchor body cooperates with the magnetic field of the coil for generating the deflection of the membrane.
- the magnetic field is generated by the coil applied to the carrier body.
- the coil is arranged on the membrane, and the anchor body forms a core on the carrier body, which is firmly applied thereto.
- the coil is constructed on a coil core, wherein this is madebiidet as a layered coil core with a high magnetizability.
- the electromagnetic flux can be further increased by the current supply to the coil, so that the power density of the electromagnetic microactuator is further increased.
- the structure of the coil and the coil core can also be done by means of the LIGA technique.
- each coil is provided, which are applied to the carrier body in an offset by 90 ° to each other arrangement on this.
- the coils are designed as planar coils, the arrangement of the coils depending on the application can also be done as a dipole, quadrupole and so on.
- the mutual influence of the resulting electromagnetic fields can be minimized by providing the arrangement of the planar coils in such a way that the magnetic field remains limited to the space of the individual microactuator.
- the coils strip conductors are applied to the carrier body, which ends at the edge of the carrier body in contact pads.
- the individual actuators can be interconnected to avoid a separate contacting of the microactuators with a periphery.
- the contacting of the dielectric Elastomeraktors can also be provided by printed conductors and corresponding contact pads, which are arranged in the region of the recording of the membrane.
- the anchor body is arranged centrally between the four coils on the side of the diaphragm, the side of the arrangement of the anchor body facing the diaphragm in the direction of the coils.
- the anchor body is designed either with a round or a square cross-sectional geometry, with a quadratic cross-sectional geometry forming an advantageous embodiment with quadrilateral planar coils with a respective offset of 90 ° to one another.
- this may have a toroidal shape, wherein the anchor body extends into a gap introduced in the toroidal coil.
- a very high flux density of the magnetic field can be generated within the armature body, thereby further increasing the performance potential of the microactuator.
- the coil is designed as a planar coil.
- the coil geometry may be, for example, round or have the shape of a regular polygon.
- Figure 1 is a schematic view of a cross section of an electromagnetic microactuator
- Figure 2 is a schematic representation of a dielectric Elastomeraktors both in the non-energized and in the energized state;
- Figure 3 is a perspective view of an electromagnetic microactuator with four planar coils, which are distributed equally distributed around a permanent magnet and wherein the coils are contacted by conductor tracks;
- FIG. 4 is a cross-sectional view of the electromagnetic microactuator of FIG. 3; 5 shows a perspective view of an electromagnetic microactuator according to FIG. 3 with a square-shaped permanent magnet, which is arranged on a membrane, which is designed as a dielectric elastomer actuator, and FIG
- FIG. 6 shows a perspective view of a coil with a toroidal shape and a gap in which the permanent magnet extends, the permanent magnet being arranged on a membrane designed as a dielectric elastomer body.
- the electromagnetic microactuator in Figure 1 is designated by the reference numeral 1.
- the schematically illustrated microactuator 1 comprises a carrier body 2, on which the individual components of the microactuator 1 are constructed on one another by means of a thin-film technique. Adjacent to the carrier body 2 are two coils 3, which comprise a coil core 9. Building on the coils 3 is followed by a spacer 12, which is designed in one piece and, as shown in cross-section, both on the left side and on the right side above the coil 3 is shown. On the spacer 12, a membrane 4 is applied, which is shown in a deflected position. The zero position of the membrane 4 is shown by a dashed line.
- the membrane 4 Centrally under the diaphragm 4 is arranged as an anchor body, a permanent magnet 8, which is deflected by the magnetic field, which is generated by energizing the coils 3, from the zero position. The deflection of the permanent magnet 8 likewise results in the deflection of the membrane 4.
- the membrane 4 is designed as a dielectric elastomer actuator, the structure of the membrane 4 being described in FIG.
- Figure 2 shows a membrane 4, which is formed according to the invention as a dielectric elastomer actuator.
- elastomeric materials often silicones or acrylics are used. Such materials are characterized by a very low modulus of elasticity and at the same time have a high dielectric constant and a high dielectric strength against electrical potentials.
- the energization of the Dielectric Elastomeraktors can be reduced with decreasing thickness of the elastomeric film 5 in order to reduce the risk of voltage breakdowns.
- a first electrode coating 6 and above a second electrode coating 7 are applied at the boundary surfaces of the elastomer conductor 5 below the elastomer film 5.
- the arrangement of elastomer film 5 and the electrode coatings 6 and 7 is in a non-energized state.
- the E lastlastimfiim 5 via the electrode coatings 6 and 7 is energized.
- the arrows pointing orthogonal to the plane of extent of the elastomeric film 5 indicate a reduction in the thickness, the arrows in the direction of extension of the elastomeric film 5 representing the directions of expansion of the elastomeric film 5.
- the material of the elastomeric film 5 has a volume constancy, since an incompressible material is preferably selected.
- an actuator is provided in a simple manner, which according to the invention is used as a membrane of a microactuator according to the illustration in FIG.
- FIG. 3 shows an exemplary construction of an electromagnetic microactuator 1 with a carrier body 2, on which four planar coils 3 arranged at 90 ° to one another are applied.
- a membrane 4 On a mounted on the support body 2 Ab- support holder 12, a membrane 4 is applied, which has a centrally arranged as a permanent magnet 8 formed anchor body.
- the coils 3 are in each case contacted by conductor tracks 10, the conductor tracks 10 terminating on the edge side of the carrier body 2 in contact pads 11.
- the arrangement forms a single microactuator 1, which can form an array in the case of a respective adjacent arrangement of a multiplicity of microactuators 1. Consequently, there is a rectangular shape of the support body 2, to each edge adjacent to arrange another microactuator 1.
- FIG. 4 shows a cross-sectional view of the microactuator 1 according to FIG. 3.
- a coil 3 in cross-section can be seen here both on the left side and on the right side, wherein a further coil 3 is shown centrally in the side view in the uncut state.
- FIG. 5 shows a further illustration of an electromagnetic microactuator 1 with a carrier body 2, on which four coils 3 arranged offset from one another by 90 ° are applied.
- the coils are each contacted via conductor tracks 10, which terminate in contact pads 11.
- the planar design of both the coils 3 and the conductor tracks 10 and the contact pads 11 is made possible by a thin-film technique, by means of which the structure of the microactuator 1 is generated on the carrier body 2.
- a spacer 12 is constructed of a further plastic material which can also be applied by means of thin-film technology.
- the area of the contact pads 11 remains free to provide an external contact, so that the spacer 12 does not protrude beyond the contact pads 11.
- a permanent magnet 8 is shown as the anchor body, which has a square cross-section.
- the permanent magnet 8 is attached on the underside to a membrane 4, so that by energizing the coils 3, the permanent magnet 8 and thus the membrane 4 can be deflected.
- FIG. 6 shows a toroidal design of a coil 3 which can be used for an electromagnetic microactuator 1 according to FIG.
- the coil 3 is annularly formed with a gap in which the permanent magnet 8 extends.
- the permanent magnet 8 is connected in the same way with the membrane 4, so that the deflection can take place when the coil is energized. Characterized in that the permanent magnet 8 in the gap of the toroidal coil. 3 extends, it is possible to expose the permanent magnet 8 a strong electromagnetic flux. As a result, the power density of a fvlikroaktors can be further increased.
- the invention is not limited in its execution to the above-mentioned preferred embodiment. Rather, a number of variants is conceivable, which makes use of the illustrated solution even with fundamentally different types of use.
- Anchor body (permanent magnet)
Abstract
L'invention concerne un micro-actionneur électromagnétique (1) monté sur un corps de support (2) et présentant au moins une bobine (3) et une membrane (4) qui, lorsque la bobine (3) est alimentée en courant, peut subir une déflexion. La membrane (4) est constituée d'un actionneur élastomère diélectrique pouvant être alimenté en courant et présentant un film élastomère (5) pourvu d'un revêtement d'électrode (6, 7) sur ses deux faces.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008006832A DE102008006832A1 (de) | 2008-01-30 | 2008-01-30 | Elektromagnetischer Membran-Mikroaktor |
DE102008006832.2 | 2008-01-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009095170A2 true WO2009095170A2 (fr) | 2009-08-06 |
WO2009095170A3 WO2009095170A3 (fr) | 2009-11-12 |
Family
ID=40806664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2009/000330 WO2009095170A2 (fr) | 2008-01-30 | 2009-01-21 | Micro-actionneur électromagnétique à membrane |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102008006832A1 (fr) |
WO (1) | WO2009095170A2 (fr) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2320488A1 (fr) * | 2009-11-07 | 2011-05-11 | Bayer MaterialScience AG | Convertisseur électromécanique avec un élastomère diélectrique |
ITTO20100664A1 (it) * | 2010-07-30 | 2012-01-31 | St Microelectronics Srl | Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione |
KR20140094544A (ko) * | 2011-10-17 | 2014-07-30 | 더 기타머 컴파니 | 진동 트랜스듀서 및 액추에이터 |
US9084845B2 (en) | 2011-11-02 | 2015-07-21 | Smith & Nephew Plc | Reduced pressure therapy apparatuses and methods of using same |
US9227000B2 (en) | 2006-09-28 | 2016-01-05 | Smith & Nephew, Inc. | Portable wound therapy system |
CN105299000A (zh) * | 2015-11-10 | 2016-02-03 | 中国科学院合肥物质科学研究院 | 一种单向驱动微流体管 |
US9427505B2 (en) | 2012-05-15 | 2016-08-30 | Smith & Nephew Plc | Negative pressure wound therapy apparatus |
US9901664B2 (en) | 2012-03-20 | 2018-02-27 | Smith & Nephew Plc | Controlling operation of a reduced pressure therapy system based on dynamic duty cycle threshold determination |
US9956121B2 (en) | 2007-11-21 | 2018-05-01 | Smith & Nephew Plc | Wound dressing |
WO2018162419A1 (fr) * | 2017-03-06 | 2018-09-13 | nui lab GmbH | Actionneur electromagnetique |
DE102017216399A1 (de) * | 2017-09-15 | 2019-03-21 | Airbus Operations Gmbh | Steuerfläche für ein Luftfahrzeug und Luftfahrzeug mit flexibler Steuerfläche |
US10307517B2 (en) | 2010-09-20 | 2019-06-04 | Smith & Nephew Plc | Systems and methods for controlling operation of a reduced pressure therapy system |
DE102017223882A1 (de) * | 2017-12-29 | 2019-07-04 | Airbus Defence and Space GmbH | Strömungsaktuatormodul und Strömungskörpersystem |
US10364143B2 (en) | 2014-12-18 | 2019-07-30 | Stmicroelectronics S.R.L. | Integrated micro-electromechanical device of semiconductor material having a diaphragm, such as a pressure sensor and an actuator |
CN110641677A (zh) * | 2019-09-30 | 2020-01-03 | 安徽建筑大学 | 一种飞艇 |
US10682446B2 (en) | 2014-12-22 | 2020-06-16 | Smith & Nephew Plc | Dressing status detection for negative pressure wound therapy |
EP3596343A4 (fr) * | 2017-03-17 | 2020-12-23 | CU Aerospace, LLC | Actionneur à plasma cyclotronique à aimant à arc pour une commande de flux actif |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015107626B4 (de) | 2015-05-15 | 2019-11-07 | Airbus Defence and Space GmbH | Strömungssteuerungsvorrichtung, Strömungsdynamischer Profilkörper und Strömungssteuerungsverfahren mit Schallwellenerzeugung |
US11643190B2 (en) | 2020-01-30 | 2023-05-09 | Airbus Operations Gmbh | Vortex generator apparatus for an aircraft |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2841943A1 (fr) * | 2002-07-04 | 2004-01-09 | Bosch Gmbh Robert | Dispositif de pompage, membrane avec de tels dispositifs et servomoteur pneumatique avec une telle membrane |
US20040189106A1 (en) * | 2003-03-14 | 2004-09-30 | Shih-Chia Chang | Microactuator having a ferromagnetic substrate |
US20070200467A1 (en) * | 1999-07-20 | 2007-08-30 | Sri International | Compliant electroactive polymer transducers for sonic applications |
WO2008011466A1 (fr) * | 2006-07-19 | 2008-01-24 | University Of Florida Research Foundation, Inc. | Procédé et appareil de commande électromagnétique de mouvements. |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE552836C (de) * | 1930-06-28 | 1932-06-18 | Reinhard Wussow | Elektromagnetisch betaetigte Pumpe |
FR2454000A1 (fr) * | 1979-04-10 | 1980-11-07 | Bourgeois Jean Marie | Pompe a membranes automouvantes magnetiques |
DE19849700C2 (de) * | 1998-10-28 | 2001-06-28 | Festo Ag & Co | Mikroventilanordnung |
JP3832338B2 (ja) * | 2001-12-25 | 2006-10-11 | 松下電工株式会社 | 電歪ポリマーアクチュエータ |
FR2862629B1 (fr) * | 2003-11-25 | 2006-02-17 | St Microelectronics Sa | Dispositif de refroidissement d'un circuit integre |
-
2008
- 2008-01-30 DE DE102008006832A patent/DE102008006832A1/de not_active Ceased
-
2009
- 2009-01-21 WO PCT/EP2009/000330 patent/WO2009095170A2/fr active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070200467A1 (en) * | 1999-07-20 | 2007-08-30 | Sri International | Compliant electroactive polymer transducers for sonic applications |
FR2841943A1 (fr) * | 2002-07-04 | 2004-01-09 | Bosch Gmbh Robert | Dispositif de pompage, membrane avec de tels dispositifs et servomoteur pneumatique avec une telle membrane |
US20040189106A1 (en) * | 2003-03-14 | 2004-09-30 | Shih-Chia Chang | Microactuator having a ferromagnetic substrate |
WO2008011466A1 (fr) * | 2006-07-19 | 2008-01-24 | University Of Florida Research Foundation, Inc. | Procédé et appareil de commande électromagnétique de mouvements. |
Cited By (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11141325B2 (en) | 2006-09-28 | 2021-10-12 | Smith & Nephew, Inc. | Portable wound therapy system |
US9642955B2 (en) | 2006-09-28 | 2017-05-09 | Smith & Nephew, Inc. | Portable wound therapy system |
US10130526B2 (en) | 2006-09-28 | 2018-11-20 | Smith & Nephew, Inc. | Portable wound therapy system |
US9227000B2 (en) | 2006-09-28 | 2016-01-05 | Smith & Nephew, Inc. | Portable wound therapy system |
US11129751B2 (en) | 2007-11-21 | 2021-09-28 | Smith & Nephew Plc | Wound dressing |
US11179276B2 (en) | 2007-11-21 | 2021-11-23 | Smith & Nephew Plc | Wound dressing |
US11351064B2 (en) | 2007-11-21 | 2022-06-07 | Smith & Nephew Plc | Wound dressing |
US11364151B2 (en) | 2007-11-21 | 2022-06-21 | Smith & Nephew Plc | Wound dressing |
US10744041B2 (en) | 2007-11-21 | 2020-08-18 | Smith & Nephew Plc | Wound dressing |
US10555839B2 (en) | 2007-11-21 | 2020-02-11 | Smith & Nephew Plc | Wound dressing |
US9956121B2 (en) | 2007-11-21 | 2018-05-01 | Smith & Nephew Plc | Wound dressing |
US10016309B2 (en) | 2007-11-21 | 2018-07-10 | Smith & Nephew Plc | Wound dressing |
US10231875B2 (en) | 2007-11-21 | 2019-03-19 | Smith & Nephew Plc | Wound dressing |
EP2320488A1 (fr) * | 2009-11-07 | 2011-05-11 | Bayer MaterialScience AG | Convertisseur électromécanique avec un élastomère diélectrique |
WO2011054886A1 (fr) * | 2009-11-07 | 2011-05-12 | Bayer Materialscience Ag | Convertisseur électromécanique avec élastomère diélectrique |
ITTO20100664A1 (it) * | 2010-07-30 | 2012-01-31 | St Microelectronics Srl | Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione |
US11027051B2 (en) | 2010-09-20 | 2021-06-08 | Smith & Nephew Plc | Pressure control apparatus |
US11534540B2 (en) | 2010-09-20 | 2022-12-27 | Smith & Nephew Plc | Pressure control apparatus |
US11623039B2 (en) | 2010-09-20 | 2023-04-11 | Smith & Nephew Plc | Systems and methods for controlling operation of a reduced pressure therapy system |
US10307517B2 (en) | 2010-09-20 | 2019-06-04 | Smith & Nephew Plc | Systems and methods for controlling operation of a reduced pressure therapy system |
KR20140094544A (ko) * | 2011-10-17 | 2014-07-30 | 더 기타머 컴파니 | 진동 트랜스듀서 및 액추에이터 |
CN103999171A (zh) * | 2011-10-17 | 2014-08-20 | 吉特马尔公司 | 振动传感及致动器 |
EP2769387A4 (fr) * | 2011-10-17 | 2015-12-23 | Guitammer Company | Transducteur et actionneur de vibration |
KR102003829B1 (ko) * | 2011-10-17 | 2019-07-25 | 더 기타머 컴파니 | 진동 트랜스듀서 및 액추에이터 |
US11648342B2 (en) | 2011-11-02 | 2023-05-16 | Smith & Nephew Plc | Reduced pressure therapy apparatuses and methods of using same |
US11253639B2 (en) | 2011-11-02 | 2022-02-22 | Smith & Nephew Plc | Reduced pressure therapy apparatuses and methods of using same |
US9084845B2 (en) | 2011-11-02 | 2015-07-21 | Smith & Nephew Plc | Reduced pressure therapy apparatuses and methods of using same |
US10143783B2 (en) | 2011-11-02 | 2018-12-04 | Smith & Nephew Plc | Reduced pressure therapy apparatuses and methods of using same |
US9901664B2 (en) | 2012-03-20 | 2018-02-27 | Smith & Nephew Plc | Controlling operation of a reduced pressure therapy system based on dynamic duty cycle threshold determination |
US11730877B2 (en) | 2012-03-20 | 2023-08-22 | Smith & Nephew Plc | Controlling operation of a reduced pressure therapy system based on dynamic duty cycle threshold determination |
US10881764B2 (en) | 2012-03-20 | 2021-01-05 | Smith & Nephew Plc | Controlling operation of a reduced pressure therapy system based on dynamic duty cycle threshold determination |
US9427505B2 (en) | 2012-05-15 | 2016-08-30 | Smith & Nephew Plc | Negative pressure wound therapy apparatus |
US10702418B2 (en) | 2012-05-15 | 2020-07-07 | Smith & Nephew Plc | Negative pressure wound therapy apparatus |
US10299964B2 (en) | 2012-05-15 | 2019-05-28 | Smith & Nephew Plc | Negative pressure wound therapy apparatus |
US9545465B2 (en) | 2012-05-15 | 2017-01-17 | Smith & Newphew Plc | Negative pressure wound therapy apparatus |
US10364143B2 (en) | 2014-12-18 | 2019-07-30 | Stmicroelectronics S.R.L. | Integrated micro-electromechanical device of semiconductor material having a diaphragm, such as a pressure sensor and an actuator |
US11724932B2 (en) | 2014-12-18 | 2023-08-15 | Stmicroelectronics S.R.L. | Integrated micro-electromechanical device of semiconductor material having a diaphragm |
US10973965B2 (en) | 2014-12-22 | 2021-04-13 | Smith & Nephew Plc | Systems and methods of calibrating operating parameters of negative pressure wound therapy apparatuses |
US10780202B2 (en) | 2014-12-22 | 2020-09-22 | Smith & Nephew Plc | Noise reduction for negative pressure wound therapy apparatuses |
US10737002B2 (en) | 2014-12-22 | 2020-08-11 | Smith & Nephew Plc | Pressure sampling systems and methods for negative pressure wound therapy |
US11654228B2 (en) | 2014-12-22 | 2023-05-23 | Smith & Nephew Plc | Status indication for negative pressure wound therapy |
US10682446B2 (en) | 2014-12-22 | 2020-06-16 | Smith & Nephew Plc | Dressing status detection for negative pressure wound therapy |
CN105299000A (zh) * | 2015-11-10 | 2016-02-03 | 中国科学院合肥物质科学研究院 | 一种单向驱动微流体管 |
WO2018162419A1 (fr) * | 2017-03-06 | 2018-09-13 | nui lab GmbH | Actionneur electromagnetique |
EP3596343A4 (fr) * | 2017-03-17 | 2020-12-23 | CU Aerospace, LLC | Actionneur à plasma cyclotronique à aimant à arc pour une commande de flux actif |
US11214352B2 (en) | 2017-09-15 | 2022-01-04 | Airbus Operations Gmbh | Control surface for an aircraft, and aircraft having a flexible control surface |
DE102017216399A1 (de) * | 2017-09-15 | 2019-03-21 | Airbus Operations Gmbh | Steuerfläche für ein Luftfahrzeug und Luftfahrzeug mit flexibler Steuerfläche |
DE102017223882B4 (de) * | 2017-12-29 | 2020-07-16 | Airbus Defence and Space GmbH | Strömungsaktuatormodul und Strömungskörpersystem |
DE102017223882A1 (de) * | 2017-12-29 | 2019-07-04 | Airbus Defence and Space GmbH | Strömungsaktuatormodul und Strömungskörpersystem |
CN110641677A (zh) * | 2019-09-30 | 2020-01-03 | 安徽建筑大学 | 一种飞艇 |
Also Published As
Publication number | Publication date |
---|---|
WO2009095170A3 (fr) | 2009-11-12 |
DE102008006832A1 (de) | 2009-08-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2009095170A2 (fr) | Micro-actionneur électromagnétique à membrane | |
EP4247005A2 (fr) | Transducteur acoustique micromécanique | |
DE3914031A1 (de) | Mikromechanischer aktuator | |
EP3364532B1 (fr) | Actionneur linéaire | |
DE102019203914B3 (de) | MEMS mit großer fluidisch wirksamer Oberfläche | |
DE102016208924A1 (de) | Mikromechanisches Bauteil und Verfahren zum Verstellen eines verstellbaren Teils gleichzeitig um zwei zueinander geneigte Drehachsen | |
WO2005086326A1 (fr) | Dispositif d'entrainement lineaire pourvu d'un corps d'induit comportant un porte-aimant | |
EP2320488A1 (fr) | Convertisseur électromécanique avec un élastomère diélectrique | |
WO2021223886A1 (fr) | Microsystème électromécanique (mems) destiné à interagir avec un flux volumétrique de façon hautement efficace | |
EP3105770B1 (fr) | Système micro-électromécanique et son procédé de fabrication | |
DE102009002631A1 (de) | Piezoelektrischer Antrieb und Mikroventil mit einem solchen | |
EP3778469B1 (fr) | Composant mems, module doté du composant mems et procédé de fonctionnement du composant mems | |
WO2015193160A1 (fr) | Transducteur électrodynamique | |
EP3790712A1 (fr) | Dispositif de préhension pour tenir au moins un composant et procédé de maintien associé | |
DE102019201889A1 (de) | MEMS und Verfahren zum Herstellen desselben | |
DE102011084541A1 (de) | Mikro-elektromechanisches Lautsprecherarray und Verfahren zum Betreiben eines mikro-elektromechanischen Lautsprecherarrays | |
DE102015226233A1 (de) | Biegewandler sowie Verfahren zu dessen Herstellung sowie zu dessen Betrieb | |
WO2020229466A1 (fr) | Système de transducteurs de flexion acoustique et dispositif acoustique | |
DE102013101020A1 (de) | Ultraschallaktor und Ultraschallmotor mit solch einem Ultraschallaktor | |
EP3607592A1 (fr) | Procédé de fonctionnement d'un moteur à ultrasons | |
EP3005431A1 (fr) | Actionneur piézoélectrique | |
DE102019205735B3 (de) | Mikromechanischer Schallwandler | |
DE102020201241B4 (de) | Mikroelektromechanischer antrieb zum bewegen von objekten | |
DE102017205047A1 (de) | Mikromechanische Aktuatorvorrichtung und Verfahren zu dessen Herstellung | |
DE102021204653A1 (de) | In-plane MEMS-Varaktor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09706960 Country of ref document: EP Kind code of ref document: A2 |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 09706960 Country of ref document: EP Kind code of ref document: A2 |