WO2009093882A3 - 쉐도우 마스크 및 이를 이용한 코팅 방법 - Google Patents

쉐도우 마스크 및 이를 이용한 코팅 방법 Download PDF

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Publication number
WO2009093882A3
WO2009093882A3 PCT/KR2009/000412 KR2009000412W WO2009093882A3 WO 2009093882 A3 WO2009093882 A3 WO 2009093882A3 KR 2009000412 W KR2009000412 W KR 2009000412W WO 2009093882 A3 WO2009093882 A3 WO 2009093882A3
Authority
WO
WIPO (PCT)
Prior art keywords
shadow mask
same
coating method
substrate
mask
Prior art date
Application number
PCT/KR2009/000412
Other languages
English (en)
French (fr)
Other versions
WO2009093882A2 (ko
Inventor
이충훈
이선미
Original Assignee
(주) 모디스틱
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주) 모디스틱 filed Critical (주) 모디스틱
Publication of WO2009093882A2 publication Critical patent/WO2009093882A2/ko
Publication of WO2009093882A3 publication Critical patent/WO2009093882A3/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

본 발명은 쉐도우 마스크를 마스킹할 기판에 밀착시켜 올려놓을 수 있으므로, 마스크의 처짐을 방지할 수 있고, 마스킹할 기판에 쉐도우 마스크가 붙어 있기 때문에 쉐도우 효과(Shadow effect)없는 정밀한 패턴을 구현할 수 있는 쉐도우 마스크 및 이를 이용한 코팅 방법에 관한 것이다.
PCT/KR2009/000412 2008-01-25 2009-01-28 쉐도우 마스크 및 이를 이용한 코팅 방법 WO2009093882A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080007734A KR100923952B1 (ko) 2008-01-25 2008-01-25 코팅용 필름 쉐도우 마스크
KR10-2008-0007734 2008-01-25

Publications (2)

Publication Number Publication Date
WO2009093882A2 WO2009093882A2 (ko) 2009-07-30
WO2009093882A3 true WO2009093882A3 (ko) 2009-11-05

Family

ID=40901565

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/000412 WO2009093882A2 (ko) 2008-01-25 2009-01-28 쉐도우 마스크 및 이를 이용한 코팅 방법

Country Status (2)

Country Link
KR (1) KR100923952B1 (ko)
WO (1) WO2009093882A2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101361898B1 (ko) * 2012-01-17 2014-02-14 주식회사 야스 필름 밴드 마스크

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060020034A (ko) * 2004-08-30 2006-03-06 삼성에스디아이 주식회사 유기막층의 형성 방법 및 풀칼라 유기 전계 발광 소자의제조 방법
KR20060020051A (ko) * 2004-08-30 2006-03-06 삼성에스디아이 주식회사 유기막층의 형성 방법 및 유기 전계 발광 소자의 제조 방법
JP2007095378A (ja) * 2005-09-27 2007-04-12 Dainippon Screen Mfg Co Ltd 塗布システム
KR20070055260A (ko) * 2005-11-25 2007-05-30 엘지전자 주식회사 미세 패턴 구현 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100784026B1 (ko) * 2005-09-27 2007-12-10 다이니폰 스크린 세이조우 가부시키가이샤 도포 장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060020034A (ko) * 2004-08-30 2006-03-06 삼성에스디아이 주식회사 유기막층의 형성 방법 및 풀칼라 유기 전계 발광 소자의제조 방법
KR20060020051A (ko) * 2004-08-30 2006-03-06 삼성에스디아이 주식회사 유기막층의 형성 방법 및 유기 전계 발광 소자의 제조 방법
JP2007095378A (ja) * 2005-09-27 2007-04-12 Dainippon Screen Mfg Co Ltd 塗布システム
KR20070055260A (ko) * 2005-11-25 2007-05-30 엘지전자 주식회사 미세 패턴 구현 방법

Also Published As

Publication number Publication date
KR100923952B1 (ko) 2009-11-03
WO2009093882A2 (ko) 2009-07-30
KR20090081708A (ko) 2009-07-29

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