WO2009093882A2

WO2009093882A2 - Shadow mask and coating method using same

Info

Publication number: WO2009093882A2
Application number: PCT/KR2009/000412
Authority: WO
Inventors: Choong Hoon Yi; Sun Mi Lee
Original assignee: Modistech Co., Ltd.
Priority date: 2008-01-25
Filing date: 2009-01-28
Publication date: 2009-07-30
Also published as: WO2009093882A3; KR100923952B1; KR20090081708A

Abstract

The present invention relates to a shadow mask and a coating method using same, in which the shadow mask is disposed on a substrate to be masked in such a manner that the shadow mask tightly contacts the substrate so as to prevent drooping of the mask. Further, since the shadow mask is attached to the substrate to be masked, a fine pattern with no shadow effect can be obtained.

Description

[Revision 10.03.2009] by Rule 26 Shadow mask and coating method using same

The present invention is directed to a mask for selectively forming a coating film.

In general, an organic light emitting device manufactured by using a shadow mask, when charge is injected into an organic electroluminescent layer provided between a hole injection electrode (anode) and an electron injection electrode (cathode), electrons and holes are paired and then extinguished to emit light. The light emitting device has an advantage of being able to be driven at a voltage of about 10V lower than that of an inorganic electroluminescent device or a plasma display panel (PDP).

In addition, the organic light emitting device is attracting attention as a next-generation flat panel display because it is thin, light, and has good color, and may be formed on a flexible substrate such as a plastic film.

Organic light emitting devices are classified into low molecular materials and high molecular materials, and low molecular methods are mainly deposition methods using metal shadow masks, and polymer methods are printing methods.

FIG. 1 is a schematic view for describing a shadow mask according to the related art, and the conventional shadow mask 11a is made of metal and forms a single open mask or a plurality of mask patterned openings 12.

The metal shadow mask 11a is fixed to the frame 10 to uniformly apply tensile force, thereby minimizing sagging due to weight.

However, due to the weight of the metal mask 11a itself, the center portion is convexly curved, and deformation of the mask occurs.

In addition, when the mask is deformed, an error occurs between the circular mask and the opening 12.

FIG. 2 is a schematic view for explaining another shadow mask according to the prior art, which uses the divided pattern mask 15 in the frame assembly 13 to minimize the mask deflection and the opening 16 of the pattern. ) Deformation can be prevented, but problems of gap and tightness between the pattern masks 15 still remain.

This invention solves the subject which can prevent sagging of a mask.

An object of the present invention is to provide a shadow mask and a coating method using the same because the shadow mask can be placed in close contact with a substrate to be masked.

In addition, an object of the present invention is to provide a shadow mask and a coating method using the same because a shadow mask is attached to a substrate to be masked, thereby enabling a precise pattern without a shadow effect.

Further, an object of the present invention is to provide a shadow mask and a coating method using the same, in which the shadow mask of the present invention is provided with alignment keys.

In addition, an object of the present invention is to provide a shadow mask and a coating method using the same, which can reduce the process time and manufacturing process cost since the coating process can be performed continuously by implementing a shadow mask with a plurality of laminated mask films. .

In addition, the shadow mask of the present invention has a plurality of film masks are configured in the form of a roll, it is an object to provide a shadow mask and a coating method using the same easy to replace the film mask as the roll moves.

A first preferred aspect for achieving the above objects of the present invention is

Made of film,

A shadow mask is provided in which an alignment key formed on a substrate for masking and an alignment key that can be aligned with each other are formed.

A second preferred aspect for achieving the above objects of the present invention is

There is provided a shadow mask, each of which has openings formed therein, and which is composed of a plurality of film masks stacked so that the openings communicate.

A third preferred aspect for achieving the above objects of the present invention is

Placing a shadow mask made of a film and having an alignment key in close contact with an upper portion of the substrate on which the alignment key is aligned with the alignment key of the shadow mask;

Matching the alignment key of the shadow mask with the alignment key of the substrate;

Provided is a coating method using a shadow mask configured to form a coating film on the substrate exposed to the opening of the shadow mask.

A fourth preferred aspect for achieving the above objects of the present invention is

Placing a shadow mask made up of a plurality of film masks stacked so that the openings communicate with each other, and being placed in close contact with the upper portion of the substrate;

Forming a first coating layer on the substrate exposed to the openings of the shadow mask;

Removing the film mask on the top of the plurality of film masks of the shadow mask and repeatedly forming a second coating layer on the substrate, exposing the film mask closest to the substrate;

Masking with a film mask closest to the substrate to form a third coating on the substrate;

Removing the film mask closest to the substrate, to provide a coating method using a shadow mask comprising the step of leaving a coating film laminated first to third coating film on the substrate.

According to the present invention, the shadow mask can be placed in close contact with the substrate to be masked, thereby preventing sagging of the mask, and since the shadow mask is attached to the substrate to be masked, it is possible to realize a precise pattern without a shadow effect. There is.

In addition, the shadow mask of the present invention has an effect that the alignment key is formed to reduce the existing shadow mask alignment time.

In addition, the present invention has the effect of reducing the process time and manufacturing process cost because it is possible to implement the coating process by implementing a shadow mask with a plurality of laminated mask film continuously.

In addition, the shadow mask of the present invention, since the plurality of film masks are configured in the form of a roll, there is an effect that the film mask can be easily replaced as the roll moves.

1 is a schematic view for explaining a shadow mask according to the prior art

2 is a schematic view for explaining another shadow mask according to the prior art;

3 and 4 is a schematic diagram for explaining a shadow mask according to the present invention

5 to 8 is a schematic cross-sectional view for explaining a coating method using a shadow mask according to the present invention

9 to 11 are schematic perspective views illustrating a state in which films of the shadow mask of FIG. 5 are removed.

12 is a schematic perspective view illustrating another shadow mask and a coating method using the shadow mask according to the present invention.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

3 and 4 is a schematic view for explaining a shadow mask according to the present invention, the shadow mask according to the present invention is made of a film, the alignment key formed on the substrate for masking and the alignment key that can be aligned with the position is formed It is characterized by that.

That is, as shown in Figure 3, the alignment keys (200a, 200b, 200c, 200d) formed on the shadow mask 200 of the present invention overlaps with the alignment keys (100a, 100b, 100c) formed on the substrate 100 The substrate 100 and the shadow mask 200 are in close contact with each other without a space.

In addition, the shadow mask 200 of the present invention includes the structure of FIG. 3 having one opening 210 or the structure of FIG. 4 with the plurality of openings 220 patterned, and the shape of the opening may be any shape. It's okay.

Therefore, the shadow mask of the present invention can be placed in close contact with the substrate to be masked, there is an advantage that can solve the conventional problem of the deflection of the mask.

In addition, since the shadow mask is attached to the substrate to be masked, the present invention has an advantage of realizing a precise pattern without a shadow effect.

In addition, the shadow mask of the present invention has an advantage that the alignment key is formed to reduce the existing shadow mask alignment time.

Meanwhile, the shadow mask of the present invention is preferably used as a mask after adhered to the substrate to be masked.

5 to 8 are schematic cross-sectional views for explaining a coating method using a shadow mask according to the present invention. First, the shadow mask made of a film as shown in FIGS. 3 and 4 and having an alignment key is described above. After placing the alignment key aligned with the alignment key of the shadow mask in close contact with the substrate, the alignment key of the shadow mask is aligned with the alignment key of the substrate, and then a coating layer is formed on the substrate exposed to the opening of the shadow mask. There is a way to form.

In addition, the shadow mask of the present invention may be formed of a plurality of film masks each having openings formed as shown in FIG. 5 and stacked so that the openings communicate with each other.

At this time, in order to mask the shadow on the substrate 100, the shadow mask 300 composed of a plurality of film masks (310, 320, 330) is placed in close contact with the upper portion of the substrate 100 as shown in FIG.

Here, the widths d1, d2, and d3 of the

openings

311, 321, and 331 of the plurality of

film masks

310, 320, and 330 may be wider as they approach the substrate 100.

That is, the width d3 of the opening 331 of the film mask 330 that is closest to the substrate 100 is equal to the opening 321 of the film mask 320 stacked on the film mask 330. It is wider than the width d2 and the width d2 of the opening 321 of the film mask 320 is greater than the width d1 of the opening 311 of the film mask 310 stacked on the film 320. wide.

As a result, the widths d1, d2, and d3 of the

openings

311, 321, and 331 of the plurality of

film masks

310, 320, and 330 of FIG. 5 become “d3> d2> d1”.

Therefore, each opening formed in the plurality of film masks according to the present invention is characterized in that the size is closer to the substrate.

As such, the shadow mask 300 is placed on the substrate 100 in close contact with each other, and then a first coating layer 510 is formed on the substrate 100 exposed to the

openings

311, 321, and 331 of the shadow mask 300. do.

In this case, the first coating layer 510 is formed only on the substrate 100 exposed to the

openings

311, 321, and 331 of the shadow mask 300, and the other region of the substrate 100 is formed by the shadow mask 300. Since the mask is masked, the first coating layer 510 is not formed.

Next, the film mask 330 at the top of the plurality of film masks 310, 320, 330 of the shadow mask 300 is removed, and a second coating layer 520 is formed on the substrate 100.

When the film mask 330 is removed, the film mask 320 performs a masking operation, and the width d2 of the film mask 320 is wider than the width d1 of the removed film mask 330. Therefore, an area exposed by the opening 321 of the film mask 320 becomes a partial area of the first coating film 510 and the substrate 100, and the second coating film 520 is formed of the first coating film ( 510 is coated wider.

That is, the process of FIG. 6 repeats the process of removing the film mask on the top of the plurality of film masks of the shadow mask and forming a second coating layer on the substrate, and then the film mask closest to the substrate. It is a process to expose.

Here, the second coating film is formed by the number of film masks except for the top film mask and the film mask closest to the substrate.

Next, after the second coating film 520 is formed, the film mask 320 is removed and then masked with the film mask 310 to form a third coating film 530 on the substrate 100. 7)

7 is a process of forming a third coating layer on the substrate by masking with a film mask closest to the substrate.

Finally, when the film mask 310 closest to the substrate 100 is removed, the desired coating layers 510, 520, and 530 may be formed on the substrate 100 (FIG. 8).

This process of FIG. 8 is a process of removing the film mask which is closest to the said board | substrate, and leaving the coating film by which the 1st-3rd coating film was laminated | stacked on the said board | substrate.

As such, the shadow mask of the present invention has the advantage of forming a plurality of laminated coating films by easy installation, and also has the advantage of reducing the process time and manufacturing process costs because the coating process can be carried out continuously.

9 to 11 are schematic perspective views illustrating a state in which the films of the shadow mask of FIG. 5 are removed. The shadow mask including the plurality of film masks 310, 320, and 330 is closely attached to the substrate 100 as shown in FIG. 9. After the first coating film is coated, the top film mask 310 is removed as shown in FIG. 10, the second coating film is coated, and then the film mask 320 under the top film mask 310 as shown in FIG. 11. Is removed.

Subsequently, after the film mask 320 is removed, the third coating film is coated in the state of FIG. 11.

12 is a schematic perspective view for explaining another shadow mask and a coating method using the shadow mask according to the present invention, the shadow mask may be composed of a roll-shaped film.

And when a shadow mask comprises a some film mask in roll form, replacement of a film mask becomes easy as this roll moves.

That is, as shown in FIG. 12, the roll mask shadow mask 600 is provided with a plurality of film masks, and the substrate 100 has one film mask 610 mounted thereon. Masking to form a coating film on the substrate 100.

Then, rotating the shadow mask 600 in the form of a roll to form an additional coating film, another film mask is placed on the substrate 100, masked with the film mask to be different from the substrate 100 It is possible to form a coating film.

At this time, it is preferable that an alignment key is formed in the film mask of the shadow mask 600 in roll form.

In addition, when used in a flexible substrate can be used in a roll-to-roll method by bonding the film mask in advance.

While the configuration of the invention according to the embodiment of the present invention has been described in detail, the present invention is not necessarily limited to these embodiments, and various modifications can be made without departing from the spirit of the present invention.

The present invention is a shadow mask of a coating film for fabricating a device including a flat panel display, a solar cell, a flexible device, a plastic electronics, and the like, which prevents the deflection of the mask and continuously performs the coating process. Shadow masks can be provided that can reduce costs.

Claims

Made of film,

A shadow mask having an alignment key formed on a substrate for masking and an alignment key for position alignment.
The method according to claim 1,

The film,

Shadow mask, characterized in that configured in the form of a roll.
The method according to claim 2,

The substrate,

A shadow mask, which is a flexible substrate capable of a roll to roll coating method.
A shadow mask, each of which has openings formed therein and is also composed of a plurality of film masks stacked such that the openings communicate.
The method according to claim 3,

Each opening formed in the plurality of film masks,

The shadow mask of claim 1, wherein the size of the shadow mask increases as the substrate approaches the substrate.
Placing a shadow mask made of a film and having an alignment key in close contact with an upper portion of the substrate on which the alignment key is aligned with the alignment key of the shadow mask;

Matching the alignment key of the shadow mask with the alignment key of the substrate;

Coating method using a shadow mask comprising the step of forming a coating film on the substrate exposed to the opening of the shadow mask.
The method according to claim 6,

The shadow mask is,

Coating method using a shadow mask consisting of a plurality of film masks in the form of a roll.
Placing a shadow mask made up of a plurality of film masks stacked so that the openings communicate with each other, and being placed in close contact with the upper portion of the substrate;

Forming a first coating layer on the substrate exposed to the openings of the shadow mask;

Removing the film mask on the top of the plurality of film masks of the shadow mask and repeatedly forming a second coating layer on the substrate, exposing the film mask closest to the substrate;

Masking with a film mask closest to the substrate to form a third coating on the substrate;

Removing the film mask closest to the substrate, and leaving a coating film in which first to third coating films are stacked on the substrate.