WO2009086976A2 - Composant micromécanique et procédé de production de composant micromécanique - Google Patents

Composant micromécanique et procédé de production de composant micromécanique Download PDF

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Publication number
WO2009086976A2
WO2009086976A2 PCT/EP2008/065524 EP2008065524W WO2009086976A2 WO 2009086976 A2 WO2009086976 A2 WO 2009086976A2 EP 2008065524 W EP2008065524 W EP 2008065524W WO 2009086976 A2 WO2009086976 A2 WO 2009086976A2
Authority
WO
WIPO (PCT)
Prior art keywords
electrodes
stator
actuator
trench structure
electrode
Prior art date
Application number
PCT/EP2008/065524
Other languages
German (de)
English (en)
Other versions
WO2009086976A3 (fr
Inventor
Tjalf Pirk
Stefan Pinter
Joachim Fritz
Christoph Friese
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2009086976A2 publication Critical patent/WO2009086976A2/fr
Publication of WO2009086976A3 publication Critical patent/WO2009086976A3/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling

Definitions

  • An adjustable mirror 2 is shown by way of example as an application for a micromechanical component 1 in a plan view in FIG.
  • the micromechanical component 1 is produced from a monolithic substrate 3 by patterning methods which include lithographic mask techniques, etching methods and deposition methods, in particular of metallic surfaces.
  • patterning methods which include lithographic mask techniques, etching methods and deposition methods, in particular of metallic surfaces.
  • An exemplary manufacturing method will be explained in detail after the structural description of embodiments of the micromechanical components and their operating principles.
  • the rotor can, for example, together with the mirror 2 or the inner frame 5a, 5b, 5c, 5d, 5e, 5f, be actively moved by electrostatic forces back to its rest position.
  • To the sections 26, 27, 28, 29 of the stator electrode 21 to other potentials are applied, as indicated in Figure 3.
  • the two upper sections 26, 29 of the stator 22 have a different potential to the upper section 32 of the rotor electrode 22.
  • the two lower sections 27, 28 of the stator electrode 22 have a different potential to the lower section 34 of the rotor electrode 22.
  • the relative location and spacing of the electrodes 63, 64 of the stator and the rotor are defined by the trenches 62.
  • the reproducibility of an actuator is thus essentially limited only by the etching methods and lithographic imaging methods used.
  • the stator electrodes 71a, 71b and the actuator electrode 72 are in mutually insulated portions 72a, 73a as in the previously described embodiments; 72b, 73b and 80, 81, respectively, through insulating layers 76a, 76b; 81 isolated.
  • the opposite side surfaces of the electrodes are thus in the separate sections 72a, 73a; 72b, 73b; 80, 81 divided.
  • the sections extend over the entire longitudinal extent of the electrodes.
  • the sections are arranged successively in the transverse direction of the side surface.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un composant micromécanique qui présente au moins une électrode de stator (21) comportant une face latérale divisée en au moins deux segments électroconducteurs (26, 27, 29, 30) qui sont isolés électriquement l'un vis-à-vis de l'autre et peuvent être sollicités par différents potentiels. Ledit composant micromécanique comprend en outre au moins une électrode d'actionneur (22) comportant une face latérale divisée en au moins deux segments électroconducteurs (32, 34; 80, 82) qui sont isolés électriquement l'un vis-à-vis de l'autre et peuvent être sollicités par différents potentiels électriques. La face latérale de l'électrode d'actionneur (22) est disposée de manière à être tournée vers la face latérale de l'électrode de stator (21; 71a, 71b; 103, 104).
PCT/EP2008/065524 2008-01-07 2008-11-14 Composant micromécanique et procédé de production de composant micromécanique WO2009086976A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008003344.8 2008-01-07
DE200810003344 DE102008003344A1 (de) 2008-01-07 2008-01-07 Mikromechanisches Bauelement und Herstellungsverfahren für ein mikromechanisches Bauelement

Publications (2)

Publication Number Publication Date
WO2009086976A2 true WO2009086976A2 (fr) 2009-07-16
WO2009086976A3 WO2009086976A3 (fr) 2010-01-07

Family

ID=40719441

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/065524 WO2009086976A2 (fr) 2008-01-07 2008-11-14 Composant micromécanique et procédé de production de composant micromécanique

Country Status (2)

Country Link
DE (1) DE102008003344A1 (fr)
WO (1) WO2009086976A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11697584B2 (en) 2017-08-31 2023-07-11 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Multidirectional translating and tilting platform using bending actuators as active entity

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008042967B4 (de) 2008-10-20 2017-04-06 Robert Bosch Gmbh Kaskadierte mikromechanische Aktuatorstruktur
US11101746B2 (en) * 2018-12-13 2021-08-24 Beijing Voyager Technology Co., Ltd. Bipolar staggered comb drive for bidirectional MEMS actuation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020005976A1 (en) * 2000-03-24 2002-01-17 Behrang Behin Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
US20040232107A1 (en) * 2002-10-24 2004-11-25 Fujitsu Limited Method for manufacturing microstructure
WO2005068353A1 (fr) * 2004-01-20 2005-07-28 National University Of Singapore Lecture optique au moyen de reseaux de diffraction vibratoires
US20070054433A1 (en) * 2005-09-08 2007-03-08 Rockwell Scientific Licensing Llc High temperature microelectromechanical (MEM) devices and fabrication method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7479402B2 (en) 2006-03-20 2009-01-20 Honeywell International Inc. Comb structure fabrication methods and systems

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020005976A1 (en) * 2000-03-24 2002-01-17 Behrang Behin Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
US20040232107A1 (en) * 2002-10-24 2004-11-25 Fujitsu Limited Method for manufacturing microstructure
WO2005068353A1 (fr) * 2004-01-20 2005-07-28 National University Of Singapore Lecture optique au moyen de reseaux de diffraction vibratoires
US20070054433A1 (en) * 2005-09-08 2007-03-08 Rockwell Scientific Licensing Llc High temperature microelectromechanical (MEM) devices and fabrication method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11697584B2 (en) 2017-08-31 2023-07-11 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Multidirectional translating and tilting platform using bending actuators as active entity

Also Published As

Publication number Publication date
WO2009086976A3 (fr) 2010-01-07
DE102008003344A1 (de) 2009-07-09

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