WO2009072352A1 - 洗浄液及び洗浄方法 - Google Patents
洗浄液及び洗浄方法 Download PDFInfo
- Publication number
- WO2009072352A1 WO2009072352A1 PCT/JP2008/068568 JP2008068568W WO2009072352A1 WO 2009072352 A1 WO2009072352 A1 WO 2009072352A1 JP 2008068568 W JP2008068568 W JP 2008068568W WO 2009072352 A1 WO2009072352 A1 WO 2009072352A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- cleaning
- cleaning liquid
- liquid
- disclosed
- solvent
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title abstract 10
- 239000007788 liquid Substances 0.000 title abstract 7
- 238000000034 method Methods 0.000 title abstract 2
- 238000007654 immersion Methods 0.000 abstract 3
- 239000002904 solvent Substances 0.000 abstract 3
- 150000002596 lactones Chemical class 0.000 abstract 2
- 239000004215 Carbon black (E152) Substances 0.000 abstract 1
- 229930195733 hydrocarbon Natural products 0.000 abstract 1
- 150000002430 hydrocarbons Chemical class 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000003960 organic solvent Substances 0.000 abstract 1
- 239000004094 surface-active agent Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/66—Non-ionic compounds
- C11D1/72—Ethers of polyoxyalkylene glycols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2072—Aldehydes-ketones
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/43—Solvents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- C11D2111/22—
Abstract
安全性が高く洗浄性能にも優れた洗浄液及びこれを用いた洗浄方法を提供する。 光学レンズ部とウェーハステージ上に載置した露光対象物との間を液浸媒体で満たして露光を行う液浸露光装置の洗浄に使用される洗浄液として、(a)界面活性剤、及び(b)ラクトン系溶剤を含有し、(b)ラクトン系溶剤の含有量が60質量%以上である洗浄液を用いる。この洗浄液は、さらに、(c)液浸媒体、(d)水溶性有機溶剤、(e)炭化水素系溶剤を含有していてもよい。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-314589 | 2007-12-05 | ||
JP2007314589A JP2009141050A (ja) | 2007-12-05 | 2007-12-05 | 洗浄液及び洗浄方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009072352A1 true WO2009072352A1 (ja) | 2009-06-11 |
Family
ID=40717533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/068568 WO2009072352A1 (ja) | 2007-12-05 | 2008-10-14 | 洗浄液及び洗浄方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2009141050A (ja) |
TW (1) | TW200925795A (ja) |
WO (1) | WO2009072352A1 (ja) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0468095A (ja) * | 1990-07-09 | 1992-03-03 | Asahi Chem Ind Co Ltd | フラックス洗浄剤 |
JPH0665769A (ja) * | 1992-08-18 | 1994-03-08 | Mitsubishi Kasei Corp | 脱脂洗浄剤 |
JPH07331292A (ja) * | 1994-06-15 | 1995-12-19 | Tonen Corp | 洗浄液組成物 |
JP2001164291A (ja) * | 1999-12-09 | 2001-06-19 | Japan Energy Corp | ワックス・ピッチ用洗浄液組成物 |
JP2003082390A (ja) * | 2001-09-12 | 2003-03-19 | Neos Co Ltd | レンズ及びプリズム製造工程用洗浄剤組成物 |
JP2005079222A (ja) * | 2003-08-29 | 2005-03-24 | Nikon Corp | 光学部品の洗浄機構を搭載した液浸投影露光装置及び液浸光学部品洗浄方法 |
JP2007123775A (ja) * | 2005-10-31 | 2007-05-17 | Tokyo Ohka Kogyo Co Ltd | 洗浄液および洗浄方法 |
WO2007060971A1 (ja) * | 2005-11-22 | 2007-05-31 | Tokyo Ohka Kogyo Co., Ltd. | ホトリソグラフィ用洗浄液およびこれを用いた露光装置の洗浄方法 |
JP2007150102A (ja) * | 2005-11-29 | 2007-06-14 | Fujitsu Ltd | 露光装置及び光学素子の洗浄方法 |
-
2007
- 2007-12-05 JP JP2007314589A patent/JP2009141050A/ja active Pending
-
2008
- 2008-10-14 WO PCT/JP2008/068568 patent/WO2009072352A1/ja active Application Filing
- 2008-11-26 TW TW097145814A patent/TW200925795A/zh unknown
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0468095A (ja) * | 1990-07-09 | 1992-03-03 | Asahi Chem Ind Co Ltd | フラックス洗浄剤 |
JPH0665769A (ja) * | 1992-08-18 | 1994-03-08 | Mitsubishi Kasei Corp | 脱脂洗浄剤 |
JPH07331292A (ja) * | 1994-06-15 | 1995-12-19 | Tonen Corp | 洗浄液組成物 |
JP2001164291A (ja) * | 1999-12-09 | 2001-06-19 | Japan Energy Corp | ワックス・ピッチ用洗浄液組成物 |
JP2003082390A (ja) * | 2001-09-12 | 2003-03-19 | Neos Co Ltd | レンズ及びプリズム製造工程用洗浄剤組成物 |
JP2005079222A (ja) * | 2003-08-29 | 2005-03-24 | Nikon Corp | 光学部品の洗浄機構を搭載した液浸投影露光装置及び液浸光学部品洗浄方法 |
JP2007123775A (ja) * | 2005-10-31 | 2007-05-17 | Tokyo Ohka Kogyo Co Ltd | 洗浄液および洗浄方法 |
WO2007060971A1 (ja) * | 2005-11-22 | 2007-05-31 | Tokyo Ohka Kogyo Co., Ltd. | ホトリソグラフィ用洗浄液およびこれを用いた露光装置の洗浄方法 |
JP2007150102A (ja) * | 2005-11-29 | 2007-06-14 | Fujitsu Ltd | 露光装置及び光学素子の洗浄方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2009141050A (ja) | 2009-06-25 |
TW200925795A (en) | 2009-06-16 |
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