WO2009063562A1 - Dispositif de transport de substrat - Google Patents

Dispositif de transport de substrat Download PDF

Info

Publication number
WO2009063562A1
WO2009063562A1 PCT/JP2007/072224 JP2007072224W WO2009063562A1 WO 2009063562 A1 WO2009063562 A1 WO 2009063562A1 JP 2007072224 W JP2007072224 W JP 2007072224W WO 2009063562 A1 WO2009063562 A1 WO 2009063562A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
abutting
abutting member
transport device
substrate transport
Prior art date
Application number
PCT/JP2007/072224
Other languages
English (en)
Japanese (ja)
Inventor
Mitsuhiro Noda
Original Assignee
Hirata Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corporation filed Critical Hirata Corporation
Priority to PCT/JP2007/072224 priority Critical patent/WO2009063562A1/fr
Priority to TW097143891A priority patent/TW200942475A/zh
Publication of WO2009063562A1 publication Critical patent/WO2009063562A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Abstract

Un dispositif de transport de substrat comprend un moyen de transport qui transporte un substrat sur une piste de transport horizontale, un élément de butée qui positionne le substrat en le mettant en butée sur un bord d'extrémité du substrat transporté, et un système d'entraînement qui déplace l'élément de butée entre une position de butée où l'élément de butée est sur la piste de transport et une position de repos où l'élément de butée n'est pas sur la piste de transport. Les moyens d'entraînement déplacent l'élément de butée de la position de butée à la position de repos afin qu'il soit éloigné du bord d'extrémité du substrat dans une direction horizontale.
PCT/JP2007/072224 2007-11-15 2007-11-15 Dispositif de transport de substrat WO2009063562A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2007/072224 WO2009063562A1 (fr) 2007-11-15 2007-11-15 Dispositif de transport de substrat
TW097143891A TW200942475A (en) 2007-11-15 2008-11-13 Substrate transport device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/072224 WO2009063562A1 (fr) 2007-11-15 2007-11-15 Dispositif de transport de substrat

Publications (1)

Publication Number Publication Date
WO2009063562A1 true WO2009063562A1 (fr) 2009-05-22

Family

ID=40638418

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/072224 WO2009063562A1 (fr) 2007-11-15 2007-11-15 Dispositif de transport de substrat

Country Status (2)

Country Link
TW (1) TW200942475A (fr)
WO (1) WO2009063562A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011175016A (ja) * 2010-02-23 2011-09-08 Hitachi Plant Technologies Ltd 液晶基板貼合システム
JP2013257594A (ja) * 2013-08-30 2013-12-26 Hitachi Ltd 液晶基板貼合システム
JP2014225711A (ja) * 2014-09-10 2014-12-04 芝浦メカトロニクス株式会社 基板検出装置および基板処理装置
EP3254997A1 (fr) * 2016-06-06 2017-12-13 ALTRATEC Automation GmbH Dispositif d'arrêt d'une marchandise à transporter sur un convoyeur

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6033593B2 (ja) * 2012-07-18 2016-11-30 東レエンジニアリング株式会社 基板搬送装置
KR102052667B1 (ko) * 2015-10-27 2019-12-05 히라따기꼬오 가부시키가이샤 이송 유닛, 이동 탑재 장치 및 이동 탑재 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08108931A (ja) * 1994-10-12 1996-04-30 Murata Mach Ltd ストッパ装置
JP2005286189A (ja) * 2004-03-30 2005-10-13 Anritsu Corp 基板搬送用位置決め装置
WO2006137249A1 (fr) * 2005-06-22 2006-12-28 Hirata Corporation Système de transfert de pièce

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08108931A (ja) * 1994-10-12 1996-04-30 Murata Mach Ltd ストッパ装置
JP2005286189A (ja) * 2004-03-30 2005-10-13 Anritsu Corp 基板搬送用位置決め装置
WO2006137249A1 (fr) * 2005-06-22 2006-12-28 Hirata Corporation Système de transfert de pièce

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011175016A (ja) * 2010-02-23 2011-09-08 Hitachi Plant Technologies Ltd 液晶基板貼合システム
JP2013257594A (ja) * 2013-08-30 2013-12-26 Hitachi Ltd 液晶基板貼合システム
JP2014225711A (ja) * 2014-09-10 2014-12-04 芝浦メカトロニクス株式会社 基板検出装置および基板処理装置
EP3254997A1 (fr) * 2016-06-06 2017-12-13 ALTRATEC Automation GmbH Dispositif d'arrêt d'une marchandise à transporter sur un convoyeur

Also Published As

Publication number Publication date
TW200942475A (en) 2009-10-16

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