WO2009057680A1 - Film forming apparatus and film forming method - Google Patents

Film forming apparatus and film forming method Download PDF

Info

Publication number
WO2009057680A1
WO2009057680A1 PCT/JP2008/069728 JP2008069728W WO2009057680A1 WO 2009057680 A1 WO2009057680 A1 WO 2009057680A1 JP 2008069728 W JP2008069728 W JP 2008069728W WO 2009057680 A1 WO2009057680 A1 WO 2009057680A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotating
film forming
sub
center
shaft
Prior art date
Application number
PCT/JP2008/069728
Other languages
French (fr)
Japanese (ja)
Inventor
Junichiro Yoshioka
Kuniaki Horie
Nobumasa Nambu
Original Assignee
Ebara-Udylite Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara-Udylite Co., Ltd. filed Critical Ebara-Udylite Co., Ltd.
Publication of WO2009057680A1 publication Critical patent/WO2009057680A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Abstract

A main rotating section (15) which rotates with a main shaft (13) at the center is provided with a plurality of sub-rotating sections (16), and each sub-rotating section (16) has a plurality of work holders (17). A work (W) held by the work holder (17) rotates on its own rotating shaft (46), while rotating with the main shaft (13) at the center and rotating with a sub-shaft (36) at the center by rotation of the main rotating section (15) and sub-rotating sections (16). Films are formed by making surfaces of the works (W) sequentially face a target (23).
PCT/JP2008/069728 2007-10-31 2008-10-30 Film forming apparatus and film forming method WO2009057680A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007283475A JP2009108384A (en) 2007-10-31 2007-10-31 Film-forming apparatus
JP2007-283475 2007-10-31

Publications (1)

Publication Number Publication Date
WO2009057680A1 true WO2009057680A1 (en) 2009-05-07

Family

ID=40591065

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/069728 WO2009057680A1 (en) 2007-10-31 2008-10-30 Film forming apparatus and film forming method

Country Status (2)

Country Link
JP (1) JP2009108384A (en)
WO (1) WO2009057680A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113316661A (en) * 2019-02-14 2021-08-27 东和株式会社 Workpiece holding portion rotating unit and vacuum processing apparatus

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5036501B2 (en) 2007-11-19 2012-09-26 小島プレス工業株式会社 Substrate support device and sputtering device
JP6135519B2 (en) * 2014-01-17 2017-05-31 株式会社デンソー Deposition equipment
JP2022029738A (en) * 2020-08-05 2022-02-18 芝浦機械株式会社 Surface treatment apparatus and surface treatment method
CN113463056B (en) * 2021-07-01 2022-06-17 安徽工业大学 Vacuum coating does not have sample turning device that shelters from

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310464U (en) * 1989-06-20 1991-01-31
JP2006307318A (en) * 2005-03-31 2006-11-09 Kobe Steel Ltd Method for producing alpha-alumina layer-formed member and surface treatment
JP2007039710A (en) * 2005-08-01 2007-02-15 Optorun Co Ltd Film-forming apparatus and method for forming thin film
JP2007100123A (en) * 2005-09-30 2007-04-19 Kyocera Kinseki Corp Vacuum vapor deposition apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310464U (en) * 1989-06-20 1991-01-31
JP2006307318A (en) * 2005-03-31 2006-11-09 Kobe Steel Ltd Method for producing alpha-alumina layer-formed member and surface treatment
JP2007039710A (en) * 2005-08-01 2007-02-15 Optorun Co Ltd Film-forming apparatus and method for forming thin film
JP2007100123A (en) * 2005-09-30 2007-04-19 Kyocera Kinseki Corp Vacuum vapor deposition apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113316661A (en) * 2019-02-14 2021-08-27 东和株式会社 Workpiece holding portion rotating unit and vacuum processing apparatus

Also Published As

Publication number Publication date
JP2009108384A (en) 2009-05-21

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