WO2009056413A3 - Mikromechanisches bauelement und verfahren zum betrieb eines mikromechanischen bauelements - Google Patents

Mikromechanisches bauelement und verfahren zum betrieb eines mikromechanischen bauelements Download PDF

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Publication number
WO2009056413A3
WO2009056413A3 PCT/EP2008/062989 EP2008062989W WO2009056413A3 WO 2009056413 A3 WO2009056413 A3 WO 2009056413A3 EP 2008062989 W EP2008062989 W EP 2008062989W WO 2009056413 A3 WO2009056413 A3 WO 2009056413A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrodes
micromechanical component
decoupled
operating
stationary
Prior art date
Application number
PCT/EP2008/062989
Other languages
English (en)
French (fr)
Other versions
WO2009056413A2 (de
Inventor
Lars Tebje
Fouad Bennini
Wolfgang Fuerst
Original Assignee
Bosch Gmbh Robert
Lars Tebje
Fouad Bennini
Wolfgang Fuerst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert, Lars Tebje, Fouad Bennini, Wolfgang Fuerst filed Critical Bosch Gmbh Robert
Priority to EP08804851A priority Critical patent/EP2205983A2/de
Priority to CN200880114316A priority patent/CN101842709A/zh
Priority to US12/601,689 priority patent/US20100206072A1/en
Publication of WO2009056413A2 publication Critical patent/WO2009056413A2/de
Publication of WO2009056413A3 publication Critical patent/WO2009056413A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Es wird ein mikromechanisches Bauelement (1) vorgeschlagen, wobei das mikromechanische Bauelement Festelektroden (3) und eine seismische Masse (19) aufweist, wobei die seismische Masse über Aufhängeelemente (5) mit einem Trägersubstrat (18) verbunden und gegenüber diesem beweglich ist und wobei die seismische Masse Gegenelektroden aufweist, welche über eine erste elektrisch leitfähige Verbindung (8) miteinander verbunden sind und wobei ferner die Festelektroden Messelektroden (7) und abgekoppelte Elektroden aufweisen, wobei die Messelektroden als elektrisches Auswertungsmittel und die den abgekoppelten Elektroden (6) gegenüberliegenden Gegenelektroden (4) als frequenzbandveränderndes mechanisches Element fungierend vorgesehen sind.
PCT/EP2008/062989 2007-10-30 2008-09-29 Mikromechanisches bauelement und verfahren zum betrieb eines mikromechanischen bauelements WO2009056413A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08804851A EP2205983A2 (de) 2007-10-30 2008-09-29 Mikromechanisches bauelement und verfahren zum betrieb eines mikromechanischen bauelements
CN200880114316A CN101842709A (zh) 2007-10-30 2008-09-29 微机械结构元件和用于运行微机械结构元件的方法
US12/601,689 US20100206072A1 (en) 2007-10-30 2008-09-29 Micromechanical component and method for operating a micromechanical component

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007051871A DE102007051871A1 (de) 2007-10-30 2007-10-30 Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements
DE102007051871.6 2007-10-30

Publications (2)

Publication Number Publication Date
WO2009056413A2 WO2009056413A2 (de) 2009-05-07
WO2009056413A3 true WO2009056413A3 (de) 2009-07-09

Family

ID=40482003

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/062989 WO2009056413A2 (de) 2007-10-30 2008-09-29 Mikromechanisches bauelement und verfahren zum betrieb eines mikromechanischen bauelements

Country Status (5)

Country Link
US (1) US20100206072A1 (de)
EP (1) EP2205983A2 (de)
CN (1) CN101842709A (de)
DE (1) DE102007051871A1 (de)
WO (1) WO2009056413A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9316666B2 (en) 2012-11-27 2016-04-19 Murata Manufacturing Co., Ltd. Acceleration sensor having a capacitor array located in the center of an inertial mass
DE102016210958A1 (de) 2016-06-20 2017-12-21 Robert Bosch Gmbh Mikromechanische Vorrichtung mit Dämpfungsnoppen

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994028427A1 (en) * 1993-05-26 1994-12-08 Cornell Research Foundation, Inc. Microelectromechanical lateral accelerometer
US5618989A (en) * 1994-09-15 1997-04-08 Robert Bosch Gmbh Acceleration sensor and measurement method
DE19817357A1 (de) * 1998-04-18 1999-10-21 Bosch Gmbh Robert Mikromechanisches Bauelement
US20040113647A1 (en) * 2002-09-18 2004-06-17 Nilmoni Deb Built-in self test of MEMS

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5563343A (en) * 1993-05-26 1996-10-08 Cornell Research Foundation, Inc. Microelectromechanical lateral accelerometer
US5616514A (en) * 1993-06-03 1997-04-01 Robert Bosch Gmbh Method of fabricating a micromechanical sensor
DE4419844B4 (de) * 1994-06-07 2009-11-19 Robert Bosch Gmbh Beschleunigungssensor
DE4431338C2 (de) * 1994-09-02 2003-07-31 Bosch Gmbh Robert Beschleunigungssensor
US5511420A (en) * 1994-12-01 1996-04-30 Analog Devices, Inc. Electric field attraction minimization circuit
JP3430771B2 (ja) * 1996-02-05 2003-07-28 株式会社デンソー 半導体力学量センサの製造方法
US5880369A (en) * 1996-03-15 1999-03-09 Analog Devices, Inc. Micromachined device with enhanced dimensional control
JP4003326B2 (ja) * 1998-02-12 2007-11-07 株式会社デンソー 半導体力学量センサおよびその製造方法
US6105428A (en) * 1998-12-10 2000-08-22 Motorola, Inc. Sensor and method of use
DE19949605A1 (de) * 1999-10-15 2001-04-19 Bosch Gmbh Robert Beschleunigungssensor
US6536280B1 (en) * 2000-09-12 2003-03-25 Ic Mechanics, Inc. Thin film MEMS sensors employing electrical sensing and force feedback
FR2886458B1 (fr) * 2005-05-25 2007-09-07 St Microelectronics Sa Reseau capacitif
US7350415B2 (en) * 2006-05-25 2008-04-01 Honeywell International Inc. Closed-loop comb drive sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994028427A1 (en) * 1993-05-26 1994-12-08 Cornell Research Foundation, Inc. Microelectromechanical lateral accelerometer
US5618989A (en) * 1994-09-15 1997-04-08 Robert Bosch Gmbh Acceleration sensor and measurement method
DE19817357A1 (de) * 1998-04-18 1999-10-21 Bosch Gmbh Robert Mikromechanisches Bauelement
US20040113647A1 (en) * 2002-09-18 2004-06-17 Nilmoni Deb Built-in self test of MEMS

Also Published As

Publication number Publication date
CN101842709A (zh) 2010-09-22
DE102007051871A1 (de) 2009-05-07
EP2205983A2 (de) 2010-07-14
US20100206072A1 (en) 2010-08-19
WO2009056413A2 (de) 2009-05-07

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