WO2009050808A1 - クリーンルームのダミーグレーチング - Google Patents

クリーンルームのダミーグレーチング Download PDF

Info

Publication number
WO2009050808A1
WO2009050808A1 PCT/JP2007/070339 JP2007070339W WO2009050808A1 WO 2009050808 A1 WO2009050808 A1 WO 2009050808A1 JP 2007070339 W JP2007070339 W JP 2007070339W WO 2009050808 A1 WO2009050808 A1 WO 2009050808A1
Authority
WO
WIPO (PCT)
Prior art keywords
grating
clean room
upper layer
work space
space region
Prior art date
Application number
PCT/JP2007/070339
Other languages
English (en)
French (fr)
Inventor
Kwang-Seok Oh
Jin-Hyuk So
Original Assignee
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Limited filed Critical Tokyo Electron Limited
Priority to PCT/JP2007/070339 priority Critical patent/WO2009050808A1/ja
Priority to KR1020097022370A priority patent/KR20100005094A/ko
Priority to JP2009537817A priority patent/JP4967027B2/ja
Publication of WO2009050808A1 publication Critical patent/WO2009050808A1/ja

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B9/00—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation
    • E04B9/02—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation having means for ventilation or vapour discharge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Ventilation (AREA)
  • Sewage (AREA)
  • Housing For Livestock And Birds (AREA)
  • Floor Finish (AREA)

Abstract

【課題】クリーンルームの上層作業空間域の底部のグレーチングを開放する際にも安全及び品質上の問題が生じないようにしつつ、連続して作業を行える装置を提供する。 【解決手段】クリーンルームの上層作業空間域の底部に取り付けるためのダミーグレーチングであって、ダミーグレーチングは、上層作業空間域の底部を構成するグレーチングを開放することで形成される開口部を閉塞する。ダミーグレーチングは、その側面部にホールが形成されており、当該ホールを開閉するホール蓋体をさらに有している。
PCT/JP2007/070339 2007-10-18 2007-10-18 クリーンルームのダミーグレーチング WO2009050808A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2007/070339 WO2009050808A1 (ja) 2007-10-18 2007-10-18 クリーンルームのダミーグレーチング
KR1020097022370A KR20100005094A (ko) 2007-10-18 2007-10-18 클린 룸의 임시 그레이팅
JP2009537817A JP4967027B2 (ja) 2007-10-18 2007-10-18 クリーンルームのダミーグレーチング及びクリーンルームの上層作業空間域の底部を構成する部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/070339 WO2009050808A1 (ja) 2007-10-18 2007-10-18 クリーンルームのダミーグレーチング

Publications (1)

Publication Number Publication Date
WO2009050808A1 true WO2009050808A1 (ja) 2009-04-23

Family

ID=40567100

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/070339 WO2009050808A1 (ja) 2007-10-18 2007-10-18 クリーンルームのダミーグレーチング

Country Status (3)

Country Link
JP (1) JP4967027B2 (ja)
KR (1) KR20100005094A (ja)
WO (1) WO2009050808A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014010198A1 (ja) * 2012-07-09 2014-01-16 東京エレクトロン株式会社 クリーンルームの監視装置及びクリーンルームの監視方法
CN113874588A (zh) * 2019-05-16 2021-12-31 申智媛 抗静电性透明光栅

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102016148B1 (ko) 2018-05-17 2019-08-30 삼성중공업 주식회사 그레이팅 처짐 방지 장치
KR102358987B1 (ko) * 2020-08-07 2022-02-07 주식회사 에스세미텍 반도체 또는 디스플레이 장비의 설치를 위한 바닥 패널 구조

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002098379A (ja) * 2000-09-26 2002-04-05 Hitachi Plant Eng & Constr Co Ltd クリーンルームの床構造及びプレート部材
JP2003176567A (ja) * 2001-12-11 2003-06-24 Daikure Co Ltd 溝蓋開閉用の取手
JP2005243858A (ja) * 2004-02-26 2005-09-08 Tokyo Electron Ltd 処理装置
JP2007186902A (ja) * 2006-01-13 2007-07-26 Kuwahara Chuko Kk 溝蓋

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004138340A (ja) * 2002-10-18 2004-05-13 Kyoritsu Air Tech Inc 圧力調整ダンパおよびこれを用いたフロア構造
JP4627685B2 (ja) * 2005-06-07 2011-02-09 日立Ｇｅニュークリア・エナジー株式会社 床の配管又は機器の貫通方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002098379A (ja) * 2000-09-26 2002-04-05 Hitachi Plant Eng & Constr Co Ltd クリーンルームの床構造及びプレート部材
JP2003176567A (ja) * 2001-12-11 2003-06-24 Daikure Co Ltd 溝蓋開閉用の取手
JP2005243858A (ja) * 2004-02-26 2005-09-08 Tokyo Electron Ltd 処理装置
JP2007186902A (ja) * 2006-01-13 2007-07-26 Kuwahara Chuko Kk 溝蓋

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014010198A1 (ja) * 2012-07-09 2014-01-16 東京エレクトロン株式会社 クリーンルームの監視装置及びクリーンルームの監視方法
CN113874588A (zh) * 2019-05-16 2021-12-31 申智媛 抗静电性透明光栅
CN113874588B (zh) * 2019-05-16 2023-11-17 申智媛 抗静电透明光栅

Also Published As

Publication number Publication date
JP4967027B2 (ja) 2012-07-04
KR20100005094A (ko) 2010-01-13
JPWO2009050808A1 (ja) 2011-02-24

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