WO2009031432A1 - ダイシング装置、及びダイシング方法 - Google Patents

ダイシング装置、及びダイシング方法 Download PDF

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Publication number
WO2009031432A1
WO2009031432A1 PCT/JP2008/065156 JP2008065156W WO2009031432A1 WO 2009031432 A1 WO2009031432 A1 WO 2009031432A1 JP 2008065156 W JP2008065156 W JP 2008065156W WO 2009031432 A1 WO2009031432 A1 WO 2009031432A1
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WO
WIPO (PCT)
Prior art keywords
blade
edge
worked
dicing
imaging means
Prior art date
Application number
PCT/JP2008/065156
Other languages
English (en)
French (fr)
Inventor
Tomohiro Suzuki
Original Assignee
Tokyo Seimitsu Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co., Ltd. filed Critical Tokyo Seimitsu Co., Ltd.
Publication of WO2009031432A1 publication Critical patent/WO2009031432A1/ja

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring

Abstract

　本発明の一の態様によれば、ダイシング装置には、ブレードとワークとが接触するブレードの先端近傍をＸ方向に向かって撮像する撮像手段が備えられている。撮像手段は加工前のブレードの先端付近を撮像して画像処理によりその先端部の位置を計測する。これにより、ダイシング装置は加工前のブレードの外径寸法情報を得る。同様にして、撮像手段は加工後に撮像されたブレード先端部の画像から加工後の先端部の位置を計測する。このようにして得られた加工前と加工後との計測値の違いよりブレードの磨耗量が算出され、算出された値に基づきブレードの下降距離が調整される。
PCT/JP2008/065156 2007-09-06 2008-08-26 ダイシング装置、及びダイシング方法 WO2009031432A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-231552 2007-09-06
JP2007231552 2007-09-06

Publications (1)

Publication Number Publication Date
WO2009031432A1 true WO2009031432A1 (ja) 2009-03-12

Family

ID=40428752

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065156 WO2009031432A1 (ja) 2007-09-06 2008-08-26 ダイシング装置、及びダイシング方法

Country Status (2)

Country Link
TW (1) TW200918270A (ja)
WO (1) WO2009031432A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011083852A (ja) * 2009-10-15 2011-04-28 Hallys Corp 研削装置
JP2011104728A (ja) * 2009-11-19 2011-06-02 Apic Yamada Corp 切削装置及び切削方法
JP2012160606A (ja) * 2011-02-01 2012-08-23 Disco Abrasive Syst Ltd 切削装置
JP2018192603A (ja) * 2017-05-22 2018-12-06 株式会社ディスコ 切削装置の切削ブレード検出機構

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6228044B2 (ja) * 2014-03-10 2017-11-08 株式会社ディスコ 板状物の加工方法
CN105575856B (zh) * 2015-12-23 2018-11-20 中国电子科技集团公司第十一研究所 一种对InSb进行割圆倒角的装置
CN114012603B (zh) * 2021-11-09 2022-12-06 江苏京创先进电子科技有限公司 一种砂轮刀综合状态检测方法、装置、设备及存储介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0852733A (ja) * 1994-08-09 1996-02-27 Seiko Seiki Co Ltd ダイシング装置
JP2001332515A (ja) * 2000-05-22 2001-11-30 Disco Abrasive Syst Ltd 回転ブレードの位置検出装置
JP2003211350A (ja) * 2002-01-18 2003-07-29 Tokyo Seimitsu Co Ltd ダイシング装置及びカッターセット方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0852733A (ja) * 1994-08-09 1996-02-27 Seiko Seiki Co Ltd ダイシング装置
JP2001332515A (ja) * 2000-05-22 2001-11-30 Disco Abrasive Syst Ltd 回転ブレードの位置検出装置
JP2003211350A (ja) * 2002-01-18 2003-07-29 Tokyo Seimitsu Co Ltd ダイシング装置及びカッターセット方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011083852A (ja) * 2009-10-15 2011-04-28 Hallys Corp 研削装置
JP2011104728A (ja) * 2009-11-19 2011-06-02 Apic Yamada Corp 切削装置及び切削方法
JP2012160606A (ja) * 2011-02-01 2012-08-23 Disco Abrasive Syst Ltd 切削装置
JP2018192603A (ja) * 2017-05-22 2018-12-06 株式会社ディスコ 切削装置の切削ブレード検出機構

Also Published As

Publication number Publication date
TW200918270A (en) 2009-05-01

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