WO2009028313A1 - 静電アクチュエータ - Google Patents

静電アクチュエータ Download PDF

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Publication number
WO2009028313A1
WO2009028313A1 PCT/JP2008/064197 JP2008064197W WO2009028313A1 WO 2009028313 A1 WO2009028313 A1 WO 2009028313A1 JP 2008064197 W JP2008064197 W JP 2008064197W WO 2009028313 A1 WO2009028313 A1 WO 2009028313A1
Authority
WO
WIPO (PCT)
Prior art keywords
actuator
counter
enlarging
displacement
electrostatic actuator
Prior art date
Application number
PCT/JP2008/064197
Other languages
English (en)
French (fr)
Inventor
Isao Takahashi
Original Assignee
Alps Electric Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co., Ltd. filed Critical Alps Electric Co., Ltd.
Priority to JP2009530033A priority Critical patent/JP5138691B2/ja
Publication of WO2009028313A1 publication Critical patent/WO2009028313A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices

Abstract

【課題】　全体の厚みを大きくすることなく、簡単且つ安価な構成で、十分なストローク（変位量）が得られるようにした静電静電アクチュエータを提供すること。 【解決手段】　一対の対向電極１１，１２間に所定の電圧を与えると、電極間に発生する静電引力によって対向電極間距離ｄが狭められる。この際、一方の対向電極１１が作動子２０の一方の端部２１を加圧するため、作動子２０を図示上方の立ち上がり姿勢に回動させることができる。梃子の原理を用いた簡単且つ安価な構成により、アクチュエータ全体の厚みを大きくすることなく、十分な変位量を得ることが可能となる。
PCT/JP2008/064197 2007-08-27 2008-08-07 静電アクチュエータ WO2009028313A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009530033A JP5138691B2 (ja) 2007-08-27 2008-08-07 静電アクチュエータ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007219941 2007-08-27
JP2007-219941 2007-08-27

Publications (1)

Publication Number Publication Date
WO2009028313A1 true WO2009028313A1 (ja) 2009-03-05

Family

ID=40387039

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/064197 WO2009028313A1 (ja) 2007-08-27 2008-08-07 静電アクチュエータ

Country Status (2)

Country Link
JP (1) JP5138691B2 (ja)
WO (1) WO2009028313A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013017287A (ja) * 2011-07-01 2013-01-24 Polytec Design:Kk 積層型静電アクチュエータ
DE102014213168A1 (de) * 2014-07-07 2016-01-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Umwandeln von mechanischer Energie in elektrische Energie

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01186179A (ja) * 1988-01-21 1989-07-25 Toshiba Corp 静電アクチュエータ
JP2001268948A (ja) * 2000-03-21 2001-09-28 Keiji Saneyoshi 静電アクチュエータおよびそれを用いた動作機構
JP2004085700A (ja) * 2002-08-23 2004-03-18 Seiko Epson Corp ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法
JP2006046352A (ja) * 2004-07-05 2006-02-16 Mikuni Corp 動力伝達機構

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6198164A (ja) * 1984-10-19 1986-05-16 Matsushita Electric Ind Co Ltd 圧力発生装置
WO2000051190A1 (en) * 1999-02-26 2000-08-31 Active Control Experts, Inc. Packaged strain actuator
PT1665880E (pt) * 2003-09-03 2013-02-04 Stanford Res Inst Int Transdutores de polímero electroactivo para deformação de superfícies

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01186179A (ja) * 1988-01-21 1989-07-25 Toshiba Corp 静電アクチュエータ
JP2001268948A (ja) * 2000-03-21 2001-09-28 Keiji Saneyoshi 静電アクチュエータおよびそれを用いた動作機構
JP2004085700A (ja) * 2002-08-23 2004-03-18 Seiko Epson Corp ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法
JP2006046352A (ja) * 2004-07-05 2006-02-16 Mikuni Corp 動力伝達機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013017287A (ja) * 2011-07-01 2013-01-24 Polytec Design:Kk 積層型静電アクチュエータ
DE102014213168A1 (de) * 2014-07-07 2016-01-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Umwandeln von mechanischer Energie in elektrische Energie

Also Published As

Publication number Publication date
JPWO2009028313A1 (ja) 2010-11-25
JP5138691B2 (ja) 2013-02-06

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