WO2009028313A1 - 静電アクチュエータ - Google Patents
静電アクチュエータ Download PDFInfo
- Publication number
- WO2009028313A1 WO2009028313A1 PCT/JP2008/064197 JP2008064197W WO2009028313A1 WO 2009028313 A1 WO2009028313 A1 WO 2009028313A1 JP 2008064197 W JP2008064197 W JP 2008064197W WO 2009028313 A1 WO2009028313 A1 WO 2009028313A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- actuator
- counter
- enlarging
- displacement
- electrostatic actuator
- Prior art date
Links
- 238000006073 displacement reaction Methods 0.000 abstract 2
- 230000000630 rising effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
Landscapes
- Micromachines (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
【課題】 全体の厚みを大きくすることなく、簡単且つ安価な構成で、十分なストローク(変位量)が得られるようにした静電静電アクチュエータを提供すること。 【解決手段】 一対の対向電極11,12間に所定の電圧を与えると、電極間に発生する静電引力によって対向電極間距離dが狭められる。この際、一方の対向電極11が作動子20の一方の端部21を加圧するため、作動子20を図示上方の立ち上がり姿勢に回動させることができる。梃子の原理を用いた簡単且つ安価な構成により、アクチュエータ全体の厚みを大きくすることなく、十分な変位量を得ることが可能となる。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009530033A JP5138691B2 (ja) | 2007-08-27 | 2008-08-07 | 静電アクチュエータ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007219941 | 2007-08-27 | ||
JP2007-219941 | 2007-08-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009028313A1 true WO2009028313A1 (ja) | 2009-03-05 |
Family
ID=40387039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/064197 WO2009028313A1 (ja) | 2007-08-27 | 2008-08-07 | 静電アクチュエータ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5138691B2 (ja) |
WO (1) | WO2009028313A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013017287A (ja) * | 2011-07-01 | 2013-01-24 | Polytec Design:Kk | 積層型静電アクチュエータ |
DE102014213168A1 (de) * | 2014-07-07 | 2016-01-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zum Umwandeln von mechanischer Energie in elektrische Energie |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01186179A (ja) * | 1988-01-21 | 1989-07-25 | Toshiba Corp | 静電アクチュエータ |
JP2001268948A (ja) * | 2000-03-21 | 2001-09-28 | Keiji Saneyoshi | 静電アクチュエータおよびそれを用いた動作機構 |
JP2004085700A (ja) * | 2002-08-23 | 2004-03-18 | Seiko Epson Corp | ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法 |
JP2006046352A (ja) * | 2004-07-05 | 2006-02-16 | Mikuni Corp | 動力伝達機構 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6198164A (ja) * | 1984-10-19 | 1986-05-16 | Matsushita Electric Ind Co Ltd | 圧力発生装置 |
JP2003527046A (ja) * | 1999-02-26 | 2003-09-09 | アクティブ コントロール エキスパーツ,インコーポレイテッド | パッケージングされたひずみアクチュエータ |
PT1665880E (pt) * | 2003-09-03 | 2013-02-04 | Stanford Res Inst Int | Transdutores de polímero electroactivo para deformação de superfícies |
-
2008
- 2008-08-07 JP JP2009530033A patent/JP5138691B2/ja active Active
- 2008-08-07 WO PCT/JP2008/064197 patent/WO2009028313A1/ja active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01186179A (ja) * | 1988-01-21 | 1989-07-25 | Toshiba Corp | 静電アクチュエータ |
JP2001268948A (ja) * | 2000-03-21 | 2001-09-28 | Keiji Saneyoshi | 静電アクチュエータおよびそれを用いた動作機構 |
JP2004085700A (ja) * | 2002-08-23 | 2004-03-18 | Seiko Epson Corp | ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法 |
JP2006046352A (ja) * | 2004-07-05 | 2006-02-16 | Mikuni Corp | 動力伝達機構 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013017287A (ja) * | 2011-07-01 | 2013-01-24 | Polytec Design:Kk | 積層型静電アクチュエータ |
DE102014213168A1 (de) * | 2014-07-07 | 2016-01-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zum Umwandeln von mechanischer Energie in elektrische Energie |
Also Published As
Publication number | Publication date |
---|---|
JPWO2009028313A1 (ja) | 2010-11-25 |
JP5138691B2 (ja) | 2013-02-06 |
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