WO2009022428A1 - ガラス基板表面から異物を除去する方法 - Google Patents

ガラス基板表面から異物を除去する方法 Download PDF

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Publication number
WO2009022428A1
WO2009022428A1 PCT/JP2007/065968 JP2007065968W WO2009022428A1 WO 2009022428 A1 WO2009022428 A1 WO 2009022428A1 JP 2007065968 W JP2007065968 W JP 2007065968W WO 2009022428 A1 WO2009022428 A1 WO 2009022428A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass substrate
foreign matter
high energy
energy beams
removing foreign
Prior art date
Application number
PCT/JP2007/065968
Other languages
English (en)
French (fr)
Inventor
Yoshiaki Ikuta
Original Assignee
Asahi Glass Company, Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Company, Limited filed Critical Asahi Glass Company, Limited
Priority to PCT/JP2007/065968 priority Critical patent/WO2009022428A1/ja
Priority to AT07792598T priority patent/ATE539041T1/de
Priority to JP2009528016A priority patent/JP5110085B2/ja
Priority to KR1020097025398A priority patent/KR20100053484A/ko
Priority to EP07792598A priority patent/EP2177487B1/en
Publication of WO2009022428A1 publication Critical patent/WO2009022428A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/72—Repair or correction of mask defects
    • G03F1/74—Repair or correction of mask defects by charged particle beam [CPB], e.g. focused ion beam
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70933—Purge, e.g. exchanging fluid or gas to remove pollutants

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Epidemiology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Public Health (AREA)
  • Toxicology (AREA)
  • Atmospheric Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Surface Treatment Of Glass (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

　ガラス基板の表面粗さを該基板の表面全体にわたって増加させることなしに、該基板表面に強固に付着した異物を除去する方法を提供。 　ガラス基板表面から異物を除去する方法であって、前記ガラス基板表面の前記異物が存在する部位周辺に高エネルギービームを照射して、前記高エネルギービームが照射された部位周辺にガラス基板の構成材料の構造的変化による応力を生じさせる工程と、前記高エネルギービーム照射後のガラス基板表面をウェットエッチングする工程と、を含むことを特徴とするガラス基板表面から異物を除去する方法。
PCT/JP2007/065968 2007-08-16 2007-08-16 ガラス基板表面から異物を除去する方法 WO2009022428A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
PCT/JP2007/065968 WO2009022428A1 (ja) 2007-08-16 2007-08-16 ガラス基板表面から異物を除去する方法
AT07792598T ATE539041T1 (de) 2007-08-16 2007-08-16 Verfahren zur entfernung von oberflächenverunreinigungen auf einem glassubstrats
JP2009528016A JP5110085B2 (ja) 2007-08-16 2007-08-16 ガラス基板表面から異物を除去する方法
KR1020097025398A KR20100053484A (ko) 2007-08-16 2007-08-16 유리 기판 표면으로부터 이물질을 제거하는 방법
EP07792598A EP2177487B1 (en) 2007-08-16 2007-08-16 Method of removing contaminant from surface of glass substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/065968 WO2009022428A1 (ja) 2007-08-16 2007-08-16 ガラス基板表面から異物を除去する方法

Publications (1)

Publication Number Publication Date
WO2009022428A1 true WO2009022428A1 (ja) 2009-02-19

Family

ID=40350492

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/065968 WO2009022428A1 (ja) 2007-08-16 2007-08-16 ガラス基板表面から異物を除去する方法

Country Status (5)

Country Link
EP (1) EP2177487B1 (ja)
JP (1) JP5110085B2 (ja)
KR (1) KR20100053484A (ja)
AT (1) ATE539041T1 (ja)
WO (1) WO2009022428A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012003254A (ja) * 2010-05-19 2012-01-05 Hoya Corp 薄膜の評価方法、マスクブランク及び転写用マスク
JP2016143791A (ja) * 2015-02-03 2016-08-08 旭硝子株式会社 マスクブランク用ガラス基板
US10077206B2 (en) * 2015-06-10 2018-09-18 Corning Incorporated Methods of etching glass substrates and glass substrates

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012020899A1 (ko) * 2010-08-10 2012-02-16 연세대학교 산학협력단 반사 방지성 유리 및 그 제조 방법
US9561982B2 (en) 2013-04-30 2017-02-07 Corning Incorporated Method of cleaning glass substrates
KR102644537B1 (ko) * 2021-04-21 2024-03-08 비씨엔씨 주식회사 반도체 공정 장비용 쿼츠 균일 표면처리 방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0515474A (ja) * 1991-07-09 1993-01-26 Hirokazu Nishiyama ガラス表面に付着する異物の除去方法
JPH07256473A (ja) * 1994-03-24 1995-10-09 Rikagaku Kenkyusho 光分解を利用した固体の多段階エッチング方法
JP2004359475A (ja) * 2003-06-02 2004-12-24 Seiko Epson Corp 光学素子の製造方法及び光学装置
JP2007069216A (ja) * 2005-09-02 2007-03-22 Nippon Sheet Glass Co Ltd 無機材料の加工方法
JP2007072121A (ja) * 2005-09-06 2007-03-22 Okamoto Kogaku Kakosho:Kk 光学素子の表面処理方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007027419A (ja) * 2005-07-15 2007-02-01 Canon Inc 露光装置
US20070012335A1 (en) * 2005-07-18 2007-01-18 Chang Hsiao C Photomask cleaning using vacuum ultraviolet (VUV) light cleaning
US7629556B2 (en) * 2005-12-16 2009-12-08 Sematech, Inc. Laser nozzle methods and apparatus for surface cleaning

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0515474A (ja) * 1991-07-09 1993-01-26 Hirokazu Nishiyama ガラス表面に付着する異物の除去方法
JPH07256473A (ja) * 1994-03-24 1995-10-09 Rikagaku Kenkyusho 光分解を利用した固体の多段階エッチング方法
JP2004359475A (ja) * 2003-06-02 2004-12-24 Seiko Epson Corp 光学素子の製造方法及び光学装置
JP2007069216A (ja) * 2005-09-02 2007-03-22 Nippon Sheet Glass Co Ltd 無機材料の加工方法
JP2007072121A (ja) * 2005-09-06 2007-03-22 Okamoto Kogaku Kakosho:Kk 光学素子の表面処理方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012003254A (ja) * 2010-05-19 2012-01-05 Hoya Corp 薄膜の評価方法、マスクブランク及び転写用マスク
JP2016143791A (ja) * 2015-02-03 2016-08-08 旭硝子株式会社 マスクブランク用ガラス基板
US10077206B2 (en) * 2015-06-10 2018-09-18 Corning Incorporated Methods of etching glass substrates and glass substrates

Also Published As

Publication number Publication date
EP2177487A1 (en) 2010-04-21
EP2177487B1 (en) 2011-12-28
EP2177487A4 (en) 2011-05-11
ATE539041T1 (de) 2012-01-15
JP5110085B2 (ja) 2012-12-26
JPWO2009022428A1 (ja) 2010-11-11
KR20100053484A (ko) 2010-05-20

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