WO2009019863A1 - 絶対変位検出方法及びその方法を用いた絶対変位センサ - Google Patents

絶対変位検出方法及びその方法を用いた絶対変位センサ Download PDF

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Publication number
WO2009019863A1
WO2009019863A1 PCT/JP2008/002120 JP2008002120W WO2009019863A1 WO 2009019863 A1 WO2009019863 A1 WO 2009019863A1 JP 2008002120 W JP2008002120 W JP 2008002120W WO 2009019863 A1 WO2009019863 A1 WO 2009019863A1
Authority
WO
WIPO (PCT)
Prior art keywords
absolute displacement
sensor housing
relative
displacement
mass body
Prior art date
Application number
PCT/JP2008/002120
Other languages
English (en)
French (fr)
Inventor
Kazuto Seto
Original Assignee
Oiles Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oiles Corporation filed Critical Oiles Corporation
Priority to EP08790384.5A priority Critical patent/EP2177885A4/en
Priority to US12/672,115 priority patent/US8418552B2/en
Priority to CN2008801020912A priority patent/CN101790675B/zh
Priority to NZ583164A priority patent/NZ583164A/en
Priority to KR1020107002589A priority patent/KR101300024B1/ko
Publication of WO2009019863A1 publication Critical patent/WO2009019863A1/ja

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42Devices characterised by the use of electric or magnetic means
    • G01P3/50Devices characterised by the use of electric or magnetic means for measuring linear speed
    • G01P3/52Devices characterised by the use of electric or magnetic means for measuring linear speed by measuring amplitude of generated current or voltage
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/11Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by inductive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/16Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by evaluating the time-derivative of a measured speed signal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181Geophones

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Geophysics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

 絶対変位センサ1は、被検出体としてのセンサハウジング2と、センサハウジング2にばね係数k及び減衰係数cをもって可動に支持された質量mを有した質量体3と、質量体3に対するセンサハウジング2の相対速度を電気的に検出する検出手段4と、相対変位をポジティブに、相対速度を一次微分して得られた相対加速度をネガティブに夫々フィードバックさせて、センサハウジング2の絶対変位に起因する質量体3の絶対変位を制御するフィードバック制御手段5と、相対変位に位相遅れ補償を施す位相遅れ補償手段6とを具備している。
PCT/JP2008/002120 2007-08-06 2008-08-05 絶対変位検出方法及びその方法を用いた絶対変位センサ WO2009019863A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP08790384.5A EP2177885A4 (en) 2007-08-06 2008-08-05 ABSOLUTE DISPLACEMENT DETECTION METHOD AND ABSOLUTE DISPLACEMENT SENSOR USING THE METHOD
US12/672,115 US8418552B2 (en) 2007-08-06 2008-08-05 Absolute displacement detection method and absolute displacement sensor using the method
CN2008801020912A CN101790675B (zh) 2007-08-06 2008-08-05 绝对位移检测方法和使用该方法的绝对位移传感器
NZ583164A NZ583164A (en) 2007-08-06 2008-08-05 Using relative displacement and relative velocity to obtain absolute displacement with phase compensation
KR1020107002589A KR101300024B1 (ko) 2007-08-06 2008-08-05 절대 변위 검출 방법 및 그 방법을 이용한 절대 변위 센서

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007204782A JP4973373B2 (ja) 2007-08-06 2007-08-06 絶対変位検出方法及びその方法を用いた絶対変位センサ
JP2007-204782 2007-08-06

Publications (1)

Publication Number Publication Date
WO2009019863A1 true WO2009019863A1 (ja) 2009-02-12

Family

ID=40341104

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002120 WO2009019863A1 (ja) 2007-08-06 2008-08-05 絶対変位検出方法及びその方法を用いた絶対変位センサ

Country Status (7)

Country Link
US (1) US8418552B2 (ja)
EP (1) EP2177885A4 (ja)
JP (1) JP4973373B2 (ja)
KR (1) KR101300024B1 (ja)
CN (1) CN101790675B (ja)
NZ (1) NZ583164A (ja)
WO (1) WO2009019863A1 (ja)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5322710B2 (ja) * 2009-03-06 2013-10-23 特許機器株式会社 サーボ型振動センサ及び振動制御装置
JP5532238B2 (ja) * 2010-07-08 2014-06-25 国立大学法人東京工業大学 剛体特性同定装置及び剛体特性同定方法
CN102537196B (zh) * 2010-12-24 2013-12-18 上海微电子装备有限公司 主动减振系统及其减振单元和绝对位移测量装置
CN102749873B (zh) * 2012-07-27 2014-09-03 吉林大学 电磁驱动式相控震源相位补偿控制系统及补偿控制方法
US9121865B2 (en) * 2012-12-12 2015-09-01 Raytheon Company Hung mass accelerometer with differential Eddy current sensing
JP6405735B2 (ja) * 2014-06-16 2018-10-17 一登 背戸 絶対変位センサ
JP6451095B2 (ja) * 2014-06-16 2019-01-16 一登 背戸 絶対変位センサ
JP6451094B2 (ja) * 2014-06-16 2019-01-16 一登 背戸 絶対変位センサ
JP5946074B1 (ja) * 2015-01-21 2016-07-05 国立研究開発法人防災科学技術研究所 絶対速度応答演算装置、それを用いた絶対速度応答演算システム、及び絶対速度応答演算方法
US9784759B2 (en) 2015-11-16 2017-10-10 Raytheon Company Thermally insensitive open-loop hung mass accelerometer with differential Eddy current sensing
US10024880B2 (en) 2016-05-21 2018-07-17 Raytheon Company Athermal hung mass accelerometer with reduced sensitivity to longitudinal temperature gradients
US10668882B2 (en) * 2018-03-30 2020-06-02 Veoneer Us Inc. Mechanical transfer function cancellation
CN111366231A (zh) * 2020-02-14 2020-07-03 清华大学 振动测量装置
CN111694437B (zh) * 2020-06-20 2023-09-08 瑞声科技(新加坡)有限公司 触觉效果的实现方法及设备、计算机可读存储介质
CN112556831B (zh) * 2020-12-01 2021-08-27 南京艾泰克物联网科技有限公司 一种井盖异常智能检测报警装置检测方法
CN112683384A (zh) * 2020-12-01 2021-04-20 西南交通大学 一种基于列车行进震动脉冲无线充电的智能地铁检测机构

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01136033A (ja) * 1987-11-22 1989-05-29 Ichiyo Wada 機械振動測定用ピックアップの信号処理回路
JPH02113040U (ja) * 1989-02-25 1990-09-10
JP2003130629A (ja) * 2001-10-29 2003-05-08 Kayaba Ind Co Ltd 変位計測装置及びその計測方法
JP2003130628A (ja) * 2001-10-23 2003-05-08 Kazuto Sedo 絶対速度・絶対変位検出方法及びその方法を用いた絶対速度・絶対変位センサ
JP2004251666A (ja) * 2003-02-18 2004-09-09 Kazuto Sedo サーボ型絶対変位・速度センサ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW419839B (en) * 1999-08-09 2001-01-21 Nat Science Council Device for measuring vibration and method thereof
JP2001148342A (ja) * 1999-11-22 2001-05-29 Canon Inc 能動的除振装置、速度センサを用いた制御装置および方法、露光装置ならびにデバイス製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01136033A (ja) * 1987-11-22 1989-05-29 Ichiyo Wada 機械振動測定用ピックアップの信号処理回路
JPH02113040U (ja) * 1989-02-25 1990-09-10
JP2003130628A (ja) * 2001-10-23 2003-05-08 Kazuto Sedo 絶対速度・絶対変位検出方法及びその方法を用いた絶対速度・絶対変位センサ
JP2003130629A (ja) * 2001-10-29 2003-05-08 Kayaba Ind Co Ltd 変位計測装置及びその計測方法
JP2004251666A (ja) * 2003-02-18 2004-09-09 Kazuto Sedo サーボ型絶対変位・速度センサ

Also Published As

Publication number Publication date
KR101300024B1 (ko) 2013-08-29
JP2009041954A (ja) 2009-02-26
KR20100069641A (ko) 2010-06-24
EP2177885A1 (en) 2010-04-21
NZ583164A (en) 2011-08-26
CN101790675B (zh) 2013-07-24
CN101790675A (zh) 2010-07-28
EP2177885A4 (en) 2016-10-26
JP4973373B2 (ja) 2012-07-11
US20110203377A1 (en) 2011-08-25
US8418552B2 (en) 2013-04-16

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