WO2009010585A3 - Method for producing an emitter structure and emitter structures resulting therefrom - Google Patents
Method for producing an emitter structure and emitter structures resulting therefrom Download PDFInfo
- Publication number
- WO2009010585A3 WO2009010585A3 PCT/EP2008/059463 EP2008059463W WO2009010585A3 WO 2009010585 A3 WO2009010585 A3 WO 2009010585A3 EP 2008059463 W EP2008059463 W EP 2008059463W WO 2009010585 A3 WO2009010585 A3 WO 2009010585A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- emitter
- producing
- resulting therefrom
- structures resulting
- forming
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Development (AREA)
- Photovoltaic Devices (AREA)
- Bipolar Transistors (AREA)
- Cold Cathode And The Manufacture (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL08786243T PL2165371T3 (en) | 2007-07-18 | 2008-07-18 | Method for producing an emitter structure and emitter structures resulting therefrom |
JP2010516519A JP5374504B2 (en) | 2007-07-18 | 2008-07-18 | Emitter structure fabrication method and resulting emitter structure |
AT08786243T ATE547812T1 (en) | 2007-07-18 | 2008-07-18 | METHOD FOR PRODUCING AN EMITTER STRUCTURE AND RESULTING EMITTER STRUCTURES |
EP08786243A EP2165371B1 (en) | 2007-07-18 | 2008-07-18 | Method for producing an emitter structure and emitter structures resulting therefrom |
ES08786243T ES2382924T3 (en) | 2007-07-18 | 2008-07-18 | Method to produce an emitter structure and emitter structures that result from it |
US12/608,761 US9087957B2 (en) | 2007-07-18 | 2009-10-29 | Method for producing an emitter structure and emitter structures resulting therefrom |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US95053107P | 2007-07-18 | 2007-07-18 | |
US60/950,531 | 2007-07-18 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/608,761 Continuation US9087957B2 (en) | 2007-07-18 | 2009-10-29 | Method for producing an emitter structure and emitter structures resulting therefrom |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009010585A2 WO2009010585A2 (en) | 2009-01-22 |
WO2009010585A3 true WO2009010585A3 (en) | 2009-05-28 |
Family
ID=40260135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/059463 WO2009010585A2 (en) | 2007-07-18 | 2008-07-18 | Method for producing an emitter structure and emitter structures resulting therefrom |
Country Status (8)
Country | Link |
---|---|
US (1) | US9087957B2 (en) |
EP (1) | EP2165371B1 (en) |
JP (1) | JP5374504B2 (en) |
KR (1) | KR20100032900A (en) |
AT (1) | ATE547812T1 (en) |
ES (1) | ES2382924T3 (en) |
PL (1) | PL2165371T3 (en) |
WO (1) | WO2009010585A2 (en) |
Families Citing this family (31)
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US8815104B2 (en) | 2008-03-21 | 2014-08-26 | Alliance For Sustainable Energy, Llc | Copper-assisted, anti-reflection etching of silicon surfaces |
CN102084467A (en) | 2008-04-14 | 2011-06-01 | 班德加普工程有限公司 | Process for fabricating nanowire arrays |
US8053867B2 (en) | 2008-08-20 | 2011-11-08 | Honeywell International Inc. | Phosphorous-comprising dopants and methods for forming phosphorous-doped regions in semiconductor substrates using phosphorous-comprising dopants |
US7951696B2 (en) | 2008-09-30 | 2011-05-31 | Honeywell International Inc. | Methods for simultaneously forming N-type and P-type doped regions using non-contact printing processes |
US8518170B2 (en) | 2008-12-29 | 2013-08-27 | Honeywell International Inc. | Boron-comprising inks for forming boron-doped regions in semiconductor substrates using non-contact printing processes and methods for fabricating such boron-comprising inks |
US8283557B2 (en) * | 2009-03-10 | 2012-10-09 | Silevo, Inc. | Heterojunction solar cell based on epitaxial crystalline-silicon thin film on metallurgical silicon substrate design |
KR101145928B1 (en) | 2009-03-11 | 2012-05-15 | 엘지전자 주식회사 | Solar Cell and Manufacturing Method of the same |
US8324089B2 (en) | 2009-07-23 | 2012-12-04 | Honeywell International Inc. | Compositions for forming doped regions in semiconductor substrates, methods for fabricating such compositions, and methods for forming doped regions using such compositions |
WO2011017659A1 (en) * | 2009-08-06 | 2011-02-10 | Energy Focus, Inc. | Method of passivating and reducing reflectance of a photovoltaic cell |
CN102074599B (en) | 2009-09-07 | 2014-10-29 | Lg电子株式会社 | Solar cell and method for manufacturing the same |
CN102754215A (en) * | 2009-11-18 | 2012-10-24 | 太阳能和风能科技公司 | Method of manufacturing photovoltaic cells, photovoltaic cells produced thereby and uses thereof |
US8796060B2 (en) | 2009-11-18 | 2014-08-05 | Solar Wind Technologies, Inc. | Method of manufacturing photovoltaic cells, photovoltaic cells produced thereby and uses thereof |
US8586862B2 (en) | 2009-11-18 | 2013-11-19 | Solar Wind Technologies, Inc. | Method of manufacturing photovoltaic cells, photovoltaic cells produced thereby and uses thereof |
EP2510552A4 (en) * | 2009-12-09 | 2014-11-05 | Solexel Inc | High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using semiconductor wafers |
KR101579320B1 (en) * | 2010-05-12 | 2015-12-21 | 엘지전자 주식회사 | Solar cell |
KR101141578B1 (en) * | 2010-09-14 | 2012-05-17 | (주)세미머티리얼즈 | Method for manufacturing a Solar Cell |
JP2014512673A (en) | 2011-03-08 | 2014-05-22 | アライアンス フォー サステイナブル エナジー リミテッド ライアビリティ カンパニー | Efficient black silicon photovoltaic device with improved blue sensitivity |
US20120312361A1 (en) * | 2011-06-08 | 2012-12-13 | International Business Machines Corporation | Emitter structure and fabrication method for silicon heterojunction solar cell |
CN102243999A (en) * | 2011-06-28 | 2011-11-16 | 上海宏力半导体制造有限公司 | Preparation method of silicon nitride layer in preparation process of semiconductor device |
US8629294B2 (en) | 2011-08-25 | 2014-01-14 | Honeywell International Inc. | Borate esters, boron-comprising dopants, and methods of fabricating boron-comprising dopants |
US8975170B2 (en) | 2011-10-24 | 2015-03-10 | Honeywell International Inc. | Dopant ink compositions for forming doped regions in semiconductor substrates, and methods for fabricating dopant ink compositions |
KR101860919B1 (en) * | 2011-12-16 | 2018-06-29 | 엘지전자 주식회사 | Solar cell and method for manufacturing the same |
US9190549B2 (en) * | 2012-02-28 | 2015-11-17 | International Business Machines Corporation | Solar cell made using a barrier layer between p-type and intrinsic layers |
US9178098B2 (en) * | 2012-02-29 | 2015-11-03 | The Boeing Company | Solar cell with delta doping layer |
JP5546616B2 (en) * | 2012-05-14 | 2014-07-09 | セリーボ, インコーポレイテッド | Rear junction solar cell with tunnel oxide |
DE102013219603A1 (en) * | 2013-09-27 | 2015-04-02 | International Solar Energy Research Center Konstanz E.V. | Process for producing a solar cell |
JP6350858B2 (en) * | 2014-05-26 | 2018-07-04 | パナソニックIpマネジメント株式会社 | Solar cell manufacturing method and solar cell |
JP5830147B1 (en) * | 2014-09-04 | 2015-12-09 | 信越化学工業株式会社 | Solar cell and method for manufacturing solar cell |
US9520507B2 (en) * | 2014-12-22 | 2016-12-13 | Sunpower Corporation | Solar cells with improved lifetime, passivation and/or efficiency |
KR101976421B1 (en) * | 2016-12-28 | 2019-05-09 | 엘지전자 주식회사 | Manufacturing method of solar cell |
EP4287267A1 (en) * | 2022-06-01 | 2023-12-06 | Jinko Solar (Haining) Co., Ltd. | Photovoltaic cell and photovoltaic module |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4922218A (en) * | 1987-09-14 | 1990-05-01 | Sanyo Electric Co., Ltd. | Photovoltaic device |
US5378289A (en) * | 1992-11-20 | 1995-01-03 | Sanyo Electric Co., Ltd. | Method of forming crystalline silicon film and solar cell obtained thereby |
US6552414B1 (en) * | 1996-12-24 | 2003-04-22 | Imec Vzw | Semiconductor device with selectively diffused regions |
US20060209915A1 (en) * | 2005-02-10 | 2006-09-21 | Masaki Shima | Photovoltaic device |
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JPS5582472A (en) * | 1978-12-13 | 1980-06-21 | Ibm | Silicone solar energy converter |
JPS6235680A (en) * | 1985-08-09 | 1987-02-16 | Toa Nenryo Kogyo Kk | Amorphous silicon solar battery and manufacture of the same |
JPS6358974A (en) * | 1986-08-29 | 1988-03-14 | Sumitomo Electric Ind Ltd | Amorphous phovoltaic element |
US5217539A (en) * | 1991-09-05 | 1993-06-08 | The Boeing Company | III-V solar cells and doping processes |
JPH04245683A (en) * | 1991-01-31 | 1992-09-02 | Tonen Corp | Manufacture of solar cell |
JPH0595124A (en) * | 1991-10-02 | 1993-04-16 | Sharp Corp | Photoelectric conversion element |
JP2943126B2 (en) * | 1992-07-23 | 1999-08-30 | キヤノン株式会社 | Solar cell and method of manufacturing the same |
DE19522539C2 (en) * | 1995-06-21 | 1997-06-12 | Fraunhofer Ges Forschung | Solar cell with an emitter having a surface texture and method for producing the same |
EP0851511A1 (en) * | 1996-12-24 | 1998-07-01 | IMEC vzw | Semiconductor device with two selectively diffused regions |
JPH10303442A (en) * | 1997-02-28 | 1998-11-13 | Kyocera Corp | Substrate for forming semiconductor film and semiconductor device using the same |
US6150603A (en) * | 1999-04-23 | 2000-11-21 | Hughes Electronics Corporation | Bilayer passivation structure for photovoltaic cells |
JP2004327578A (en) * | 2003-04-23 | 2004-11-18 | Hitachi Cable Ltd | Crystal thin film semiconductor device and its manufacturing method |
JP2006310368A (en) * | 2005-04-26 | 2006-11-09 | Shin Etsu Handotai Co Ltd | Solar cell manufacturing method and solar cell |
JP2007142471A (en) * | 2007-02-23 | 2007-06-07 | Kyocera Corp | Method for manufacturing solar cell |
US7846750B2 (en) * | 2007-06-12 | 2010-12-07 | Guardian Industries Corp. | Textured rear electrode structure for use in photovoltaic device such as CIGS/CIS solar cell |
-
2008
- 2008-07-18 KR KR1020107001032A patent/KR20100032900A/en active IP Right Grant
- 2008-07-18 JP JP2010516519A patent/JP5374504B2/en not_active Expired - Fee Related
- 2008-07-18 ES ES08786243T patent/ES2382924T3/en active Active
- 2008-07-18 AT AT08786243T patent/ATE547812T1/en active
- 2008-07-18 WO PCT/EP2008/059463 patent/WO2009010585A2/en active Application Filing
- 2008-07-18 EP EP08786243A patent/EP2165371B1/en active Active
- 2008-07-18 PL PL08786243T patent/PL2165371T3/en unknown
-
2009
- 2009-10-29 US US12/608,761 patent/US9087957B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4922218A (en) * | 1987-09-14 | 1990-05-01 | Sanyo Electric Co., Ltd. | Photovoltaic device |
US5378289A (en) * | 1992-11-20 | 1995-01-03 | Sanyo Electric Co., Ltd. | Method of forming crystalline silicon film and solar cell obtained thereby |
US6552414B1 (en) * | 1996-12-24 | 2003-04-22 | Imec Vzw | Semiconductor device with selectively diffused regions |
US20060209915A1 (en) * | 2005-02-10 | 2006-09-21 | Masaki Shima | Photovoltaic device |
Non-Patent Citations (1)
Title |
---|
SHARMA V K ET AL: "Outlook for high efficiency solar cells to be used with and without concentration", ENERGY CONVERSION AND MANAGEMENT, ELSEVIER SCIENCE PUBLISHERS, OXFORD, GB, vol. 36, no. 4, 1 April 1995 (1995-04-01), pages 239 - 255, XP004040039, ISSN: 0196-8904 * |
Also Published As
Publication number | Publication date |
---|---|
US9087957B2 (en) | 2015-07-21 |
JP5374504B2 (en) | 2013-12-25 |
EP2165371A2 (en) | 2010-03-24 |
ATE547812T1 (en) | 2012-03-15 |
JP2010533969A (en) | 2010-10-28 |
KR20100032900A (en) | 2010-03-26 |
PL2165371T3 (en) | 2012-08-31 |
US20100139763A1 (en) | 2010-06-10 |
EP2165371B1 (en) | 2012-02-29 |
ES2382924T3 (en) | 2012-06-14 |
WO2009010585A2 (en) | 2009-01-22 |
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