WO2009005098A1 - 裏面入射型測距センサ及び測距装置 - Google Patents

裏面入射型測距センサ及び測距装置 Download PDF

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Publication number
WO2009005098A1
WO2009005098A1 PCT/JP2008/062005 JP2008062005W WO2009005098A1 WO 2009005098 A1 WO2009005098 A1 WO 2009005098A1 JP 2008062005 W JP2008062005 W JP 2008062005W WO 2009005098 A1 WO2009005098 A1 WO 2009005098A1
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WIPO (PCT)
Prior art keywords
distance measuring
distance
back surface
light
incident type
Prior art date
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PCT/JP2008/062005
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English (en)
French (fr)
Inventor
Mitsuhito Mase
Takashi Suzuki
Seiichiro Mizuno
Mitsutaka Takemura
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Hamamatsu Photonics K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007175636A external-priority patent/JP4971890B2/ja
Priority claimed from JP2007175639A external-priority patent/JP4971892B2/ja
Priority claimed from JP2007175638A external-priority patent/JP4971891B2/ja
Application filed by Hamamatsu Photonics K.K. filed Critical Hamamatsu Photonics K.K.
Priority to CN2008800233095A priority Critical patent/CN101688915B/zh
Priority to US12/666,572 priority patent/US8264673B2/en
Priority to KR1020097022741A priority patent/KR101355283B1/ko
Priority to EP08790809.1A priority patent/EP2166373B1/en
Publication of WO2009005098A1 publication Critical patent/WO2009005098A1/ja
Priority to US13/585,127 priority patent/US8477292B2/en
Priority to US13/585,103 priority patent/US8665422B2/en

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    • H—ELECTRICITY
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    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
    • G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
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Abstract

　裏面入射型測距センサ１の各画素Ｐ（ｍ，ｎ）からは、距離情報を有する信号ｄ’（ｍ，ｎ）として２つの電荷量（Ｑ１，Ｑ２）が出力される。各画素Ｐ（ｍ，ｎ）は微小測距センサとして対象物Ｈまでの距離に応じた信号ｄ’（ｍ，ｎ）を出力するので、対象物Ｈからの反射光を、撮像領域１Ｂに結像すれば、対象物Ｈ上の各点までの距離情報の集合体としての対象物の距離画像を得ることができる。投光用の近赤外光の入射に応答して半導体深部で発生したキャリアを、光入射面とは逆側のキャリア発生位置近傍に設けられたポテンシャル井戸に引き込めば、高速で正確な測距が可能となる。
PCT/JP2008/062005 2007-07-03 2008-07-02 裏面入射型測距センサ及び測距装置 WO2009005098A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CN2008800233095A CN101688915B (zh) 2007-07-03 2008-07-02 背面入射型测距传感器以及测距装置
US12/666,572 US8264673B2 (en) 2007-07-03 2008-07-02 Back-illuminated distance measuring sensor and distance measuring device
KR1020097022741A KR101355283B1 (ko) 2007-07-03 2008-07-02 이면 입사형 측거 센서 및 측거 장치
EP08790809.1A EP2166373B1 (en) 2007-07-03 2008-07-02 Back surface incident type distance measuring sensor and distance measuring device
US13/585,127 US8477292B2 (en) 2007-07-03 2012-08-14 Back-illuminated distance measuring sensor and distance measuring device
US13/585,103 US8665422B2 (en) 2007-07-03 2012-08-14 Back-illuminated distance measuring sensor and distance measuring device

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007-175638 2007-07-03
JP2007175636A JP4971890B2 (ja) 2007-07-03 2007-07-03 裏面入射型測距センサ及び測距装置
JP2007175639A JP4971892B2 (ja) 2007-07-03 2007-07-03 裏面入射型測距センサ及び測距装置
JP2007-175636 2007-07-03
JP2007-175639 2007-07-03
JP2007175638A JP4971891B2 (ja) 2007-07-03 2007-07-03 裏面入射型測距センサ及び測距装置

Related Child Applications (3)

Application Number Title Priority Date Filing Date
US12/666,572 A-371-Of-International US8264673B2 (en) 2007-07-03 2008-07-02 Back-illuminated distance measuring sensor and distance measuring device
US13/585,127 Continuation US8477292B2 (en) 2007-07-03 2012-08-14 Back-illuminated distance measuring sensor and distance measuring device
US13/585,103 Continuation US8665422B2 (en) 2007-07-03 2012-08-14 Back-illuminated distance measuring sensor and distance measuring device

Publications (1)

Publication Number Publication Date
WO2009005098A1 true WO2009005098A1 (ja) 2009-01-08

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Application Number Title Priority Date Filing Date
PCT/JP2008/062005 WO2009005098A1 (ja) 2007-07-03 2008-07-02 裏面入射型測距センサ及び測距装置

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US (3) US8264673B2 (ja)
EP (3) EP2924465B1 (ja)
KR (1) KR101355283B1 (ja)
CN (2) CN101688915B (ja)
WO (1) WO2009005098A1 (ja)

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JPWO2020017343A1 (ja) * 2018-07-18 2021-08-19 ソニーセミコンダクタソリューションズ株式会社 受光素子および測距モジュール
WO2022158570A1 (ja) * 2021-01-21 2022-07-28 凸版印刷株式会社 距離画像撮像装置、及び距離画像撮像方法

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JP5909421B2 (ja) 2012-08-01 2016-04-26 浜松ホトニクス株式会社 複合センサ及び複合センサモジュール
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JP6457822B2 (ja) * 2015-01-21 2019-01-23 キヤノン株式会社 光電変換装置及び撮像システム
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JP6659448B2 (ja) 2016-05-02 2020-03-04 浜松ホトニクス株式会社 距離センサ及び距離センサの駆動方法
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US8264673B2 (en) 2012-09-11
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EP2924465B1 (en) 2017-11-29
CN101688915B (zh) 2012-11-21
EP2166373A1 (en) 2010-03-24
US8665422B2 (en) 2014-03-04
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US20100201966A1 (en) 2010-08-12

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