WO2009005014A1 - Resist stripping composition - Google Patents
Resist stripping composition Download PDFInfo
- Publication number
- WO2009005014A1 WO2009005014A1 PCT/JP2008/061763 JP2008061763W WO2009005014A1 WO 2009005014 A1 WO2009005014 A1 WO 2009005014A1 JP 2008061763 W JP2008061763 W JP 2008061763W WO 2009005014 A1 WO2009005014 A1 WO 2009005014A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- resist stripping
- stripping composition
- specific
- ether
- amide
- Prior art date
Links
- 239000000203 mixture Substances 0.000 title abstract 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 abstract 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 abstract 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 abstract 2
- -1 cyclic ester Chemical class 0.000 abstract 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 abstract 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 abstract 1
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- 150000001408 amides Chemical class 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 150000003950 cyclic amides Chemical class 0.000 abstract 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 abstract 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 abstract 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 abstract 1
- 150000002576 ketones Chemical class 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- AJFDBNQQDYLMJN-UHFFFAOYSA-N n,n-diethylacetamide Chemical compound CCN(CC)C(C)=O AJFDBNQQDYLMJN-UHFFFAOYSA-N 0.000 abstract 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 abstract 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/046—Salts
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0395—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having a backbone with alicyclic moieties
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
-
- C11D2111/22—
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-175640 | 2007-07-03 | ||
JP2007175640A JP2009014938A (en) | 2007-07-03 | 2007-07-03 | Resist release agent composition |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009005014A1 true WO2009005014A1 (en) | 2009-01-08 |
Family
ID=40226060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/061763 WO2009005014A1 (en) | 2007-07-03 | 2008-06-27 | Resist stripping composition |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2009014938A (en) |
KR (1) | KR20100030617A (en) |
CN (1) | CN101669072A (en) |
TW (1) | TW200921302A (en) |
WO (1) | WO2009005014A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9360761B2 (en) | 2009-08-25 | 2016-06-07 | Ltc Co., Ltd. | Photoresist stripping composition for manufacturing LCD |
JP2020531596A (en) * | 2017-07-06 | 2020-11-05 | ダウ グローバル テクノロジーズ エルエルシー | Combination of amides for cleaning and stripping electronic components |
WO2021049208A1 (en) * | 2019-09-09 | 2021-03-18 | 富士フイルム株式会社 | Treatment liquid, kit, treatment liquid production method, substrate cleaning method, and substrate treatment method |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011031028A2 (en) * | 2009-09-09 | 2011-03-17 | Dongwoo Fine-Chem Co., Ltd. | Resist stripper composition for forming copper-based wiring |
KR101169332B1 (en) * | 2010-05-12 | 2012-07-30 | 주식회사 이엔에프테크놀로지 | Photoresist stripper composition |
KR102021158B1 (en) * | 2012-06-26 | 2019-09-11 | 노무라마이크로사이엔스가부시키가이샤 | Resist stripping agent |
KR102081710B1 (en) * | 2012-07-31 | 2020-02-28 | 세메스 주식회사 | Apparatus and method fdr cleaning substrates |
KR101595977B1 (en) * | 2013-03-07 | 2016-02-19 | 주식회사 엘지화학 | Stripper composition for removing photoresist and stripping mthod of photoresist using the same |
CN103336412B (en) * | 2013-07-03 | 2017-02-08 | 北京科华微电子材料有限公司 | Novel photoresist stripper and application technology thereof |
CN105579907B (en) * | 2013-09-25 | 2019-12-17 | 东京应化工业株式会社 | Radiation-sensitive composition and pattern production method |
JP6228796B2 (en) * | 2013-09-26 | 2017-11-08 | 東京応化工業株式会社 | Resist composition and resist pattern forming method |
KR102213779B1 (en) * | 2014-08-26 | 2021-02-08 | 동우 화인켐 주식회사 | Resist stripper composition and a method of stripping resist using the same |
CN109075035B (en) * | 2016-04-28 | 2023-06-13 | 富士胶片株式会社 | Treatment liquid and treatment liquid container |
CN109313400A (en) * | 2016-07-28 | 2019-02-05 | 野村微科学股份有限公司 | Anticorrosive additive stripping liquid controlling composition |
CN115685700A (en) * | 2021-07-27 | 2023-02-03 | 元瀚材料股份有限公司 | Environmentally friendly photoresist removal composition and method of using the same |
CN115291483B (en) * | 2022-09-02 | 2023-08-29 | 昆山晶科微电子材料有限公司 | Semiconductor stripping liquid and preparation method thereof |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11218933A (en) * | 1998-01-30 | 1999-08-10 | Fuji Film Olin Kk | Solvent for cleaning and removing resist and manufacture of device for forming electronic parts |
JP2001194806A (en) * | 1999-10-25 | 2001-07-19 | Toray Ind Inc | Resist stripping method |
JP2001324821A (en) * | 2000-05-15 | 2001-11-22 | Fuji Photo Film Co Ltd | Method for removing silicon-containing two-layer resist |
JP2002520659A (en) * | 1998-07-10 | 2002-07-09 | クラリアント・インターナシヨナル・リミテッド | Composition for removing photoresist and organic substances from substrate surface |
JP2003513342A (en) * | 1999-11-02 | 2003-04-08 | 東京エレクトロン株式会社 | Removal of photoresist and residue from substrate using supercritical carbon dioxide method |
JP2003122028A (en) * | 2001-10-17 | 2003-04-25 | Mitsubishi Gas Chem Co Inc | Liquid composition for removing resist |
JP2004502980A (en) * | 2000-07-10 | 2004-01-29 | イーケイシー テクノロジー インコーポレーテッド | Composition for cleaning organic and plasma etching residues of semiconductor devices |
JP2004029346A (en) * | 2002-06-25 | 2004-01-29 | Mitsubishi Gas Chem Co Inc | Resist stripping solution composition |
JP2005070795A (en) * | 2003-08-27 | 2005-03-17 | Lg Philips Lcd Co Ltd | Composition for removing resist for copper and removal method by using the same |
WO2005057281A2 (en) * | 2003-12-02 | 2005-06-23 | Advanced Technology Materials, Inc. | Resist, barc and gap fill material stripping chemical and method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2759462B2 (en) * | 1988-11-11 | 1998-05-28 | ナガセ電子化学株式会社 | Aqueous release agent composition |
JPH11282162A (en) * | 1998-03-26 | 1999-10-15 | Jsr Corp | Manufacture of hardened film |
-
2007
- 2007-07-03 JP JP2007175640A patent/JP2009014938A/en active Pending
-
2008
- 2008-06-27 KR KR1020097026215A patent/KR20100030617A/en not_active Application Discontinuation
- 2008-06-27 WO PCT/JP2008/061763 patent/WO2009005014A1/en active Application Filing
- 2008-06-27 CN CN200880013980A patent/CN101669072A/en active Pending
- 2008-07-02 TW TW097124965A patent/TW200921302A/en unknown
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11218933A (en) * | 1998-01-30 | 1999-08-10 | Fuji Film Olin Kk | Solvent for cleaning and removing resist and manufacture of device for forming electronic parts |
JP2002520659A (en) * | 1998-07-10 | 2002-07-09 | クラリアント・インターナシヨナル・リミテッド | Composition for removing photoresist and organic substances from substrate surface |
JP2001194806A (en) * | 1999-10-25 | 2001-07-19 | Toray Ind Inc | Resist stripping method |
JP2003513342A (en) * | 1999-11-02 | 2003-04-08 | 東京エレクトロン株式会社 | Removal of photoresist and residue from substrate using supercritical carbon dioxide method |
JP2001324821A (en) * | 2000-05-15 | 2001-11-22 | Fuji Photo Film Co Ltd | Method for removing silicon-containing two-layer resist |
JP2004502980A (en) * | 2000-07-10 | 2004-01-29 | イーケイシー テクノロジー インコーポレーテッド | Composition for cleaning organic and plasma etching residues of semiconductor devices |
JP2003122028A (en) * | 2001-10-17 | 2003-04-25 | Mitsubishi Gas Chem Co Inc | Liquid composition for removing resist |
JP2004029346A (en) * | 2002-06-25 | 2004-01-29 | Mitsubishi Gas Chem Co Inc | Resist stripping solution composition |
JP2005070795A (en) * | 2003-08-27 | 2005-03-17 | Lg Philips Lcd Co Ltd | Composition for removing resist for copper and removal method by using the same |
WO2005057281A2 (en) * | 2003-12-02 | 2005-06-23 | Advanced Technology Materials, Inc. | Resist, barc and gap fill material stripping chemical and method |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9360761B2 (en) | 2009-08-25 | 2016-06-07 | Ltc Co., Ltd. | Photoresist stripping composition for manufacturing LCD |
JP2020531596A (en) * | 2017-07-06 | 2020-11-05 | ダウ グローバル テクノロジーズ エルエルシー | Combination of amides for cleaning and stripping electronic components |
US11016392B2 (en) | 2017-07-06 | 2021-05-25 | Dow Global Technologies Llc | Amide combinations for cleaning and stripping of electronic parts |
JP7092807B2 (en) | 2017-07-06 | 2022-06-28 | ダウ グローバル テクノロジーズ エルエルシー | A combination of amides for cleaning and stripping electronic components |
WO2021049208A1 (en) * | 2019-09-09 | 2021-03-18 | 富士フイルム株式会社 | Treatment liquid, kit, treatment liquid production method, substrate cleaning method, and substrate treatment method |
JPWO2021049208A1 (en) * | 2019-09-09 | 2021-03-18 | ||
JP7324290B2 (en) | 2019-09-09 | 2023-08-09 | 富士フイルム株式会社 | Processing liquid, kit, manufacturing method of processing liquid, cleaning method of substrate, processing method of substrate |
Also Published As
Publication number | Publication date |
---|---|
TW200921302A (en) | 2009-05-16 |
JP2009014938A (en) | 2009-01-22 |
CN101669072A (en) | 2010-03-10 |
KR20100030617A (en) | 2010-03-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2009005014A1 (en) | Resist stripping composition | |
TW200736857A (en) | Chemical rinse composition for removing resist stripper | |
MX2009004943A (en) | Hepatitis c virus inhibitors. | |
AU2003272688A1 (en) | Compositions substrate for removing etching residue and use thereof | |
IN2012DN02361A (en) | ||
ES2527817T3 (en) | 2 component coating adhesive | |
SG136954A1 (en) | Composition for removing photoresist and/or etching residue from a substrate and use thereof | |
WO2011022622A3 (en) | Improved enhanced oil recovery surfactant composition and method of making the same | |
EP2520579A3 (en) | A silicone compound, photocurable liquid ink using the silicone compound, and method of manufacturing the ink | |
NZ726475A (en) | Antiviral compounds | |
NO20091845L (en) | Macrocyclic peptides such as hepatitis C virus inhibitors | |
NO20073122L (en) | Non-aqueous, non-corrosive microelectronics cleaning formulations | |
MX2021015589A (en) | Use of coating compositions for wind turbine blades. | |
BR0313876A (en) | Use of a mixture, fuel and solvent compositions, and, Process for the preparation of a mixture. | |
ATE546467T1 (en) | ORTHO-NITROSOPHENOLS AS POLYMERIZATION INHIBITORS | |
CO6501175A2 (en) | DERIVATIVES OF BENZOTIAZINES, ITS PREPARATION AND APPLICATION AS DRUGS | |
WO2011008051A3 (en) | Composition for removing resists used with copper or copper alloy | |
GB2487032A (en) | Graffiti removal composition and method | |
WO2007109518A3 (en) | Optoelectronic devices with multilayered structures | |
PH12018502344A1 (en) | A non-aqueous stripping composition and a method of stripping an organic coating from a substrate | |
AR044966A1 (en) | PROCESS FOR THE PRODUCTION OF NEIGHBORHOOD DIESTERS FROM EPOXIDS | |
WO2011126636A3 (en) | Lubricating oil compositions containing epoxide antiwear agents | |
WO2008063273A3 (en) | Fluids having silicone groups and organic groups containing esters | |
EP1946743A3 (en) | Humectant composition | |
RU2015132830A (en) | COMPOSITION INK FOR SOLDER MASK |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200880013980.1 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08777675 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 20097026215 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 08777675 Country of ref document: EP Kind code of ref document: A1 |