WO2008148917A2 - Procédé de fabrication d'un dispositif pour focalisation de fluide micrométrique - Google Patents
Procédé de fabrication d'un dispositif pour focalisation de fluide micrométrique Download PDFInfo
- Publication number
- WO2008148917A2 WO2008148917A2 PCT/ES2008/000413 ES2008000413W WO2008148917A2 WO 2008148917 A2 WO2008148917 A2 WO 2008148917A2 ES 2008000413 W ES2008000413 W ES 2008000413W WO 2008148917 A2 WO2008148917 A2 WO 2008148917A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- wafer
- fluid
- focusing
- focused
- photolithography
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
- B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
- B05B7/0433—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with one inner conduit of gas surrounded by an external conduit of liquid upstream the mixing chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
- B01F33/301—Micromixers using specific means for arranging the streams to be mixed, e.g. channel geometries or dispositions
- B01F33/3011—Micromixers using specific means for arranging the streams to be mixed, e.g. channel geometries or dispositions using a sheathing stream of a fluid surrounding a central stream of a different fluid, e.g. for reducing the cross-section of the central stream or to produce droplets from the central stream
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
- B05B7/0884—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point the outlet orifices for jets constituted by a liquid or a mixture containing a liquid being aligned
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
- B01L3/502776—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for focusing or laminating flows
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/019—Bonding or gluing multiple substrate layers
Definitions
- SUBSTITUTE SHEET (RULE 26) The drops generated can vary between hundreds of microns and tens of nanometers.
Abstract
Cette invention concerne un procédé permettant de fabriquer un dispositif conçu pour disperser ou 'focaliser' un fluide de manière précise et régulée à l'échelle du micromètre, au moyen d'une technique de focalisation de flux et des dispositifs produits selon un tel procédé. Le procédé décrit dans cette invention permet la fabrication simple d'un dispositif pouvant produire des flux coaxiaux de fluides (encapsulation en trois dimensions). Le procédé de fabrication, qui est fondé sur des techniques classiques utilisées dans les technologies de micro-systèmes (systèmes microélectromécaniques ou MEMS), permet la fabrication de masse bon marché de dispositifs de dispersions présentant une précision de l'ordre du micromètre et une taille extrêmement réduite. Le dispositif ainsi fabriqué peut être aisément intégré dans des matrices bidimensionnelles et des flux coaxiaux peuvent être créés perpendiculairement à la matrice de dispositifs.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES200701626A ES2310967B2 (es) | 2007-06-06 | 2007-06-06 | Metodo de fabricacion para dispositivo enfocador de fluido a escala m icrometrica. |
ESP200701626 | 2007-06-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008148917A2 true WO2008148917A2 (fr) | 2008-12-11 |
WO2008148917A3 WO2008148917A3 (fr) | 2009-01-29 |
Family
ID=40094229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/ES2008/000413 WO2008148917A2 (fr) | 2007-06-06 | 2008-06-05 | Procédé de fabrication d'un dispositif pour focalisation de fluide micrométrique |
Country Status (2)
Country | Link |
---|---|
ES (1) | ES2310967B2 (fr) |
WO (1) | WO2008148917A2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9091434B2 (en) | 2008-04-18 | 2015-07-28 | The Board Of Trustees Of The University Of Alabama | Meso-scaled combustion system |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104865002B (zh) * | 2015-05-05 | 2017-04-12 | 苏州曼普拉斯传感科技有限公司 | 一种mems压力传感器装置及封装方法 |
US10369579B1 (en) | 2018-09-04 | 2019-08-06 | Zyxogen, Llc | Multi-orifice nozzle for droplet atomization |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2199048A1 (es) * | 2002-02-04 | 2004-02-01 | Univ Sevilla | Dispositivo multidispositivo y procedimiento para la produccion de chorros capilares y particulas micro y nanometricos. |
US20040233424A1 (en) * | 2003-05-21 | 2004-11-25 | National Cheng Kung University | Chip-based microfluidic particle detector with three dimensional focusing mechanisms |
US20040266022A1 (en) * | 2003-06-26 | 2004-12-30 | Narayanan Sundararajan | Hydrodynamic Focusing Devices |
US20070054119A1 (en) * | 2005-03-04 | 2007-03-08 | Piotr Garstecki | Systems and methods of forming particles |
ES2273572A1 (es) * | 2005-05-04 | 2007-05-01 | Universidad De Sevilla | Procedimiento de preparacion de particulas de tamaño micro y nanometrico con productos labiles y particulas obtenidas. |
-
2007
- 2007-06-06 ES ES200701626A patent/ES2310967B2/es active Active
-
2008
- 2008-06-05 WO PCT/ES2008/000413 patent/WO2008148917A2/fr active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2199048A1 (es) * | 2002-02-04 | 2004-02-01 | Univ Sevilla | Dispositivo multidispositivo y procedimiento para la produccion de chorros capilares y particulas micro y nanometricos. |
US20040233424A1 (en) * | 2003-05-21 | 2004-11-25 | National Cheng Kung University | Chip-based microfluidic particle detector with three dimensional focusing mechanisms |
US20040266022A1 (en) * | 2003-06-26 | 2004-12-30 | Narayanan Sundararajan | Hydrodynamic Focusing Devices |
US20070054119A1 (en) * | 2005-03-04 | 2007-03-08 | Piotr Garstecki | Systems and methods of forming particles |
ES2273572A1 (es) * | 2005-05-04 | 2007-05-01 | Universidad De Sevilla | Procedimiento de preparacion de particulas de tamaño micro y nanometrico con productos labiles y particulas obtenidas. |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9091434B2 (en) | 2008-04-18 | 2015-07-28 | The Board Of Trustees Of The University Of Alabama | Meso-scaled combustion system |
Also Published As
Publication number | Publication date |
---|---|
ES2310967A1 (es) | 2009-01-16 |
ES2310967B2 (es) | 2009-07-21 |
WO2008148917A3 (fr) | 2009-01-29 |
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