WO2008146778A1 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

Info

Publication number
WO2008146778A1
WO2008146778A1 PCT/JP2008/059631 JP2008059631W WO2008146778A1 WO 2008146778 A1 WO2008146778 A1 WO 2008146778A1 JP 2008059631 W JP2008059631 W JP 2008059631W WO 2008146778 A1 WO2008146778 A1 WO 2008146778A1
Authority
WO
WIPO (PCT)
Prior art keywords
corners
control apparatus
fluid control
members
joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/059631
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Tomohiro Nakata
Tsutomu Shinohara
Michio Yamaji
Wataru Okase
Shuji Moriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Fujikin Inc
Original Assignee
Tokyo Electron Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Fujikin Inc filed Critical Tokyo Electron Ltd
Priority to TW097119845A priority Critical patent/TW200916677A/zh
Publication of WO2008146778A1 publication Critical patent/WO2008146778A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Chemical Vapour Deposition (AREA)
PCT/JP2008/059631 2007-05-31 2008-05-26 流体制御装置 Ceased WO2008146778A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097119845A TW200916677A (en) 2007-05-31 2008-05-29 Fluid control device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007144919A JP2008298177A (ja) 2007-05-31 2007-05-31 流体制御装置
JP2007-144919 2007-05-31

Publications (1)

Publication Number Publication Date
WO2008146778A1 true WO2008146778A1 (ja) 2008-12-04

Family

ID=40075019

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059631 Ceased WO2008146778A1 (ja) 2007-05-31 2008-05-26 流体制御装置

Country Status (3)

Country Link
JP (1) JP2008298177A (https=)
TW (1) TW200916677A (https=)
WO (1) WO2008146778A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2017221893A1 (ja) * 2016-06-21 2019-04-11 株式会社フジキン 流体制御装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10895329B2 (en) 2016-09-12 2021-01-19 Fujikin Incorporated Fluid control system, base block used for same, and method for manufacturing fluid control system
US11091837B2 (en) 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
WO2019044541A1 (ja) 2017-08-31 2019-03-07 株式会社フジキン 継手ブロックおよびその製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS46614Y1 (https=) * 1966-09-14 1971-01-11
JPS5086322U (https=) * 1973-12-11 1975-07-23
US20060027275A1 (en) * 2001-07-13 2006-02-09 Talon Innovations, Inc. Shear-resistant modular fluidic blocks
JP2008133933A (ja) * 2006-11-29 2008-06-12 Ckd Corp 連結用アダプタ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS46614Y1 (https=) * 1966-09-14 1971-01-11
JPS5086322U (https=) * 1973-12-11 1975-07-23
US20060027275A1 (en) * 2001-07-13 2006-02-09 Talon Innovations, Inc. Shear-resistant modular fluidic blocks
JP2008133933A (ja) * 2006-11-29 2008-06-12 Ckd Corp 連結用アダプタ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2017221893A1 (ja) * 2016-06-21 2019-04-11 株式会社フジキン 流体制御装置
JP2020115040A (ja) * 2016-06-21 2020-07-30 株式会社フジキン 流体制御装置
JP7015071B2 (ja) 2016-06-21 2022-02-02 株式会社フジキン 流体制御装置

Also Published As

Publication number Publication date
JP2008298177A (ja) 2008-12-11
TW200916677A (en) 2009-04-16

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