WO2008146489A1 - Elastic boundary wave substrate and elastic boundary wave functional element using the substrate - Google Patents

Elastic boundary wave substrate and elastic boundary wave functional element using the substrate Download PDF

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Publication number
WO2008146489A1
WO2008146489A1 PCT/JP2008/001329 JP2008001329W WO2008146489A1 WO 2008146489 A1 WO2008146489 A1 WO 2008146489A1 JP 2008001329 W JP2008001329 W JP 2008001329W WO 2008146489 A1 WO2008146489 A1 WO 2008146489A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
thin film
boundary wave
elastic boundary
functional element
Prior art date
Application number
PCT/JP2008/001329
Other languages
French (fr)
Japanese (ja)
Inventor
Kazuhiko Yamanouchi
Yusuke Satoh
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008098723A external-priority patent/JP5154285B2/en
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to US12/601,687 priority Critical patent/US8508101B2/en
Publication of WO2008146489A1 publication Critical patent/WO2008146489A1/en

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

Provided is a substrate wherein a metal electrode, a dielectric thin film and another dielectric thin film are adhered on a piezoelectric substrate. The substrate confines elastic wave energy therein. Especially by using a SiO2 thin film as a thin film (4) and an AlN thin film as a thin film (5), the substrate having a high electromechanical coupling coefficient (k2) and excellent frequency-temperature characteristics is obtained by making the film thicknesses of electrodes (2, 3) and those of the thin film (4) and the thin film (5) optimum.
PCT/JP2008/001329 2007-05-28 2008-05-28 Elastic boundary wave substrate and elastic boundary wave functional element using the substrate WO2008146489A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/601,687 US8508101B2 (en) 2007-05-28 2008-05-28 Elastic boundary wave substrate and elastic boundary wave functional element using the substrate

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007166939 2007-05-28
JP2007-166939 2007-05-28
JP2008098723A JP5154285B2 (en) 2007-05-28 2008-03-09 Boundary acoustic wave functional element
JP2008-098723 2008-03-09

Publications (1)

Publication Number Publication Date
WO2008146489A1 true WO2008146489A1 (en) 2008-12-04

Family

ID=40074763

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001329 WO2008146489A1 (en) 2007-05-28 2008-05-28 Elastic boundary wave substrate and elastic boundary wave functional element using the substrate

Country Status (1)

Country Link
WO (1) WO2008146489A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998052279A1 (en) * 1997-05-12 1998-11-19 Hitachi, Ltd. Elastic wave device
WO2005093949A1 (en) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. Boundary acoustic wave device manufacturing method and boundary acoustic wave device
JP2006279609A (en) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk Elastic boundary wave element, resonator, and ladder filter
WO2006114930A1 (en) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. Boundary acoustic wave device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998052279A1 (en) * 1997-05-12 1998-11-19 Hitachi, Ltd. Elastic wave device
WO2005093949A1 (en) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. Boundary acoustic wave device manufacturing method and boundary acoustic wave device
JP2006279609A (en) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk Elastic boundary wave element, resonator, and ladder filter
WO2006114930A1 (en) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. Boundary acoustic wave device

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