WO1998052279A1 - Elastic wave device - Google Patents

Elastic wave device Download PDF

Info

Publication number
WO1998052279A1
WO1998052279A1 PCT/JP1997/001584 JP9701584W WO9852279A1 WO 1998052279 A1 WO1998052279 A1 WO 1998052279A1 JP 9701584 W JP9701584 W JP 9701584W WO 9852279 A1 WO9852279 A1 WO 9852279A1
Authority
WO
WIPO (PCT)
Prior art keywords
polycrystal silicon
wave device
film
formed
elastic
Prior art date
Application number
PCT/JP1997/001584
Other languages
French (fr)
Inventor
Atsushi Isobe
Mitsutaka Hikita
Nobuhiko Shibagaki
Kengo Asai
Chisaki Takubo
Original Assignee
Hitachi, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd. filed Critical Hitachi, Ltd.
Priority to PCT/JP1997/001584 priority Critical patent/WO1998052279A1/en
Publication of WO1998052279A1 publication Critical patent/WO1998052279A1/en

Links

Classifications

    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/10Mounting in enclosures
    • H03H9/1064Mounting in enclosures for surface acoustic wave [SAW] devices
    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/0222Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0538Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement
    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/058Holders; Supports for surface acoustic wave devices
    • H03H9/0585Holders; Supports for surface acoustic wave devices consisting of an adhesive layer
    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/058Holders; Supports for surface acoustic wave devices
    • H03H9/059Holders; Supports for surface acoustic wave devices consisting of mounting pads or bumps

Abstract

In order to realize a subminiature elastic wave device, which has an electric property comparable to at least that of a conventional elastic surface wave device and of which reliability is not degraded even when undergoing resin sealing or bare chip packaging, an elastic boundary wave device of three-medium construction, in which films (29, 30) of two or more kinds are formed on a piezoelectric substrate (28), is excited. Formed on the piezoelectric substrate formed with an interdigital electrode (14) are a polycrystal silicon dioxide film (29) and a polycrystal silicon film (30). The piezoelectric substrate is formed from a single crystal substance. The polycrystal silicon dioxide film and the polycrystal silicon film are formed as by a sputtering method, CVD method and a coating method. Formation of the polycrystal silicon film enables elastic wave excited by the interdigital electrode to be confined to the polycrystal silicon dioxide film, and even when the polycrystal silicon film is deteriorated in its film quality, the elastic boundary wave device exhibits an electric property superior to that of a conventional elastic surface wave device. Also, since the polycrystal silicon dioxide film and the polycrystal silicon film protect the interdigital electrode, the elastic boundary wave device can have a high reliability.
PCT/JP1997/001584 1997-05-12 1997-05-12 Elastic wave device WO1998052279A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP1997/001584 WO1998052279A1 (en) 1997-05-12 1997-05-12 Elastic wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1997/001584 WO1998052279A1 (en) 1997-05-12 1997-05-12 Elastic wave device

Publications (1)

Publication Number Publication Date
WO1998052279A1 true WO1998052279A1 (en) 1998-11-19

Family

ID=14180518

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1997/001584 WO1998052279A1 (en) 1997-05-12 1997-05-12 Elastic wave device

Country Status (1)

Country Link
WO (1) WO1998052279A1 (en)

Cited By (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6046656A (en) * 1997-05-08 2000-04-04 Kabushiki Kaisha Toshiba Elastic boundary wave device and method of its manufacture
JP2003512637A (en) * 1999-10-15 2003-04-02 トルノワ,ピエ−ル Interface sound filters, especially for wireless connections
WO2004070946A1 (en) * 2003-02-10 2004-08-19 Murata Manufacturing Co., Ltd. Elastic boundary wave device
WO2004095699A1 (en) * 2003-04-18 2004-11-04 Murata Manufacturing Co., Ltd. Elastic boundary wave device
WO2005060094A1 (en) 2003-12-16 2005-06-30 Murata Manufacturing Co., Ltd. Acoustic boundary wave device
WO2005069486A1 (en) 2004-01-19 2005-07-28 Murata Manufacturing Co., Ltd. Acoustic boundary wave device
WO2005086345A1 (en) * 2004-03-05 2005-09-15 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
WO2005093949A1 (en) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. Boundary acoustic wave device manufacturing method and boundary acoustic wave device
WO2005099091A1 (en) * 2004-04-08 2005-10-20 Murata Manufacturing Co., Ltd. Elastic boundary wave filter
WO2006109591A1 (en) * 2005-04-08 2006-10-19 Murata Manufacturing Co., Ltd. Elastic wave element
WO2006114930A1 (en) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
WO2006126327A1 (en) * 2005-05-26 2006-11-30 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
JP2007028195A (en) * 2005-07-15 2007-02-01 Murata Mfg Co Ltd Elastic boundary wave apparatus and its manufacturing method
WO2007085237A1 (en) * 2006-01-26 2007-08-02 Epcos Ag Electroacoustic component
JP2007267366A (en) * 2006-02-28 2007-10-11 Fujitsu Ltd Elastic boundary wave element, resonator and filter
WO2007124732A1 (en) * 2006-04-28 2007-11-08 Epcos Ag Electroacoustic component
WO2007138840A1 (en) * 2006-05-30 2007-12-06 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
JP2008067289A (en) * 2006-09-11 2008-03-21 Fujitsu Ltd Surface acoustic wave device and filter
WO2008035546A1 (en) * 2006-09-21 2008-03-27 Murata Manufacturing Co., Ltd. Elastic boundary wave device
JP2008072316A (en) * 2006-09-13 2008-03-27 Fujitsu Ltd Elastic wave device, resonator and filter
WO2008038459A1 (en) 2006-09-25 2008-04-03 Murata Manufacturing Co., Ltd. Boundary acoustic wave filter
JP2008078739A (en) * 2006-09-19 2008-04-03 Fujitsu Ltd Elastic wave device and filter
WO2008044411A1 (en) * 2006-10-12 2008-04-17 Murata Manufacturing Co., Ltd. Elastic boundary-wave device
JP2008118576A (en) * 2006-11-07 2008-05-22 Fujitsu Ltd Elastic wave device
WO2008078481A1 (en) 2006-12-25 2008-07-03 Murata Manufacturing Co., Ltd. Elastic boundary-wave device
WO2008146489A1 (en) * 2007-05-28 2008-12-04 Panasonic Corporation Elastic boundary wave substrate and elastic boundary wave functional element using the substrate
US7466061B2 (en) 2006-06-06 2008-12-16 Fujitsu Limited Acoustic boundary wave device, resonator and filter
JP2009010927A (en) * 2007-05-28 2009-01-15 Kazuhiko Yamanouchi Elastic boundary wave substrate and elastic boundary wave functional element using the substrate
US7489064B2 (en) 2005-07-22 2009-02-10 Murata Manufacturing Co., Ltd Boundary acoustic wave device
WO2009054121A1 (en) * 2007-10-23 2009-04-30 Panasonic Corporation Boundary acoustic wave device
WO2009066367A1 (en) * 2007-11-19 2009-05-28 Fujitsu Limited Elastic boundary wave device and communication equipment using the same
JP2009159039A (en) * 2007-12-25 2009-07-16 Panasonic Corp Elastic boundary wave device, and filter and antenna duplexer using the same
JP2009267905A (en) * 2008-04-28 2009-11-12 Panasonic Corp Elastic wave device and filter and electronic equipment using the same
EP2128980A2 (en) 2008-05-30 2009-12-02 Hitachi Ltd. Acoustic wave device and high-frequency filter using the same
WO2010016192A1 (en) * 2008-08-08 2010-02-11 株式会社村田製作所 Acoustic wave device
WO2010016246A1 (en) * 2008-08-07 2010-02-11 パナソニック株式会社 Elastic wave element and electronic device using the same
WO2010052914A1 (en) * 2008-11-10 2010-05-14 パナソニック株式会社 Elastic wave element and electronic device using the same
WO2010079575A1 (en) * 2009-01-07 2010-07-15 株式会社村田製作所 Elastic boundary wave device
EP2211462A2 (en) 2009-01-26 2010-07-28 Murata Manufacturing Co., Ltd. Acoustic wave device
WO2010119796A1 (en) * 2009-04-14 2010-10-21 株式会社村田製作所 Boundary acoustic wave device
WO2010131607A1 (en) * 2009-05-12 2010-11-18 株式会社村田製作所 Elastic boundary wave device
CN1902817B (en) * 2004-01-13 2010-12-15 株式会社村田制作所 Boundary acoustic wave device
DE112009000963T5 (en) 2008-04-30 2011-02-17 Murata Manufacturing Co. Ltd. Boundary acoustic wave device
EP2288027A2 (en) 2009-08-17 2011-02-23 Hitachi Media Electronics Co., Ltd. Elastic wave device
US7898145B2 (en) 2006-09-25 2011-03-01 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
US7915786B2 (en) 2007-08-14 2011-03-29 Taiyo Yuden Co., Ltd. Elastic boundary wave device
US8049577B2 (en) 2007-11-15 2011-11-01 Taiyo Yuden Co., Ltd. Elastic wave device, duplexer using the same, and communication apparatus using the duplexer
JP2012503394A (en) * 2008-09-18 2012-02-02 サントル ナショナル ドゥ ラ ルシェルシュ シアンティフィックCentre National De La Recherche Scientifique Interface acoustic wave device
DE102011113479A1 (en) 2010-09-08 2012-03-08 Hitachi Media Electronics Co., Ltd. Longitudinal leaky Surface acoustic wave (LLSAW) device for e.g. radio frequency filter of e.g. mobile telephone, has dielectric sheet formed on surface of finger electrode portions and surface of substrate between electrode portions
US8198781B2 (en) 2006-09-27 2012-06-12 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
US8222972B2 (en) 2007-10-30 2012-07-17 Taiyo Yuden Co., Ltd. Acoustic wave element, duplexer, communication module, and communication apparatus
US8258891B2 (en) 2009-02-27 2012-09-04 Taiyo Yuden Co., Ltd. Acoustic wave device, duplexer, communication module, communication apparatus, and manufacturing method for acoustic wave device
US8269577B2 (en) 2008-10-31 2012-09-18 Taiyo Yuden Co., Ltd. Acoustic wave filter, duplexer, communication module, and communication apparatus
US8553391B2 (en) 2010-09-16 2013-10-08 Murata Manufacturing Co., Ltd. Electronic component
US8629598B2 (en) 2008-05-12 2014-01-14 Murata Manufactruing Co., Ltd. Boundary acoustic wave device

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JPH0567941A (en) * 1991-09-09 1993-03-19 Sumitomo Electric Ind Ltd Surface acoustic wave element

Patent Citations (4)

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JPS54158895A (en) * 1978-06-06 1979-12-15 Matsushita Electric Ind Co Ltd Elastic surface wave device
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JPH04258008A (en) * 1991-02-12 1992-09-14 Murata Mfg Co Ltd Surface acoustic wave device
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Cited By (126)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6046656A (en) * 1997-05-08 2000-04-04 Kabushiki Kaisha Toshiba Elastic boundary wave device and method of its manufacture
JP2003512637A (en) * 1999-10-15 2003-04-02 トルノワ,ピエ−ル Interface sound filters, especially for wireless connections
JP4820037B2 (en) * 1999-10-15 2011-11-24 トルノワ,ピエ−ル Interface acoustic filter, especially for wireless connection
WO2004070946A1 (en) * 2003-02-10 2004-08-19 Murata Manufacturing Co., Ltd. Elastic boundary wave device
KR100851219B1 (en) 2003-02-10 2008-08-07 가부시키가이샤 무라타 세이사쿠쇼 Elastic boundary wave device
US7471027B2 (en) 2003-02-10 2008-12-30 Murata Manufacturing Co., Ltd. Elastic boundary wave device
KR100766263B1 (en) * 2003-02-10 2007-10-15 가부시키가이샤 무라타 세이사쿠쇼 Elastic boundary wave device
US7453184B2 (en) 2003-04-18 2008-11-18 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
DE112004000499B4 (en) * 2003-04-18 2011-05-05 Murata Mfg. Co., Ltd., Nagaokakyo-shi Boundary acoustic wave device
WO2004095699A1 (en) * 2003-04-18 2004-11-04 Murata Manufacturing Co., Ltd. Elastic boundary wave device
JP2009177829A (en) * 2003-04-18 2009-08-06 Murata Mfg Co Ltd Boundary elastic wave device
US7737603B2 (en) 2003-12-16 2010-06-15 Murata Manufacturiing Co., Ltd. Boundary acoustic wave device
WO2005060094A1 (en) 2003-12-16 2005-06-30 Murata Manufacturing Co., Ltd. Acoustic boundary wave device
KR100785242B1 (en) * 2003-12-16 2007-12-12 가부시키가이샤 무라타 세이사쿠쇼 Acoustic boundary wave device
JP2009290914A (en) * 2003-12-16 2009-12-10 Murata Mfg Co Ltd Acoustic boundary wave device
CN1902817B (en) * 2004-01-13 2010-12-15 株式会社村田制作所 Boundary acoustic wave device
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